CN111854410A - Purging device for diffuser of chemical vapor deposition apparatus - Google Patents
Purging device for diffuser of chemical vapor deposition apparatus Download PDFInfo
- Publication number
- CN111854410A CN111854410A CN202010738521.2A CN202010738521A CN111854410A CN 111854410 A CN111854410 A CN 111854410A CN 202010738521 A CN202010738521 A CN 202010738521A CN 111854410 A CN111854410 A CN 111854410A
- Authority
- CN
- China
- Prior art keywords
- axis
- actuator
- diffuser
- rack
- limiting block
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010926 purge Methods 0.000 title claims abstract description 66
- 238000005229 chemical vapour deposition Methods 0.000 title claims abstract description 25
- 230000007246 mechanism Effects 0.000 claims description 32
- 238000003825 pressing Methods 0.000 claims description 11
- 230000001939 inductive effect Effects 0.000 description 22
- 238000007664 blowing Methods 0.000 description 12
- 238000000034 method Methods 0.000 description 12
- 230000008569 process Effects 0.000 description 10
- 230000004888 barrier function Effects 0.000 description 7
- 230000001276 controlling effect Effects 0.000 description 4
- 230000001976 improved effect Effects 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000000861 blow drying Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000006748 scratching Methods 0.000 description 2
- 230000002393 scratching effect Effects 0.000 description 2
- 230000001960 triggered effect Effects 0.000 description 2
- 208000012260 Accidental injury Diseases 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
- 239000010407 anodic oxide Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 208000014674 injury Diseases 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 230000008093 supporting effect Effects 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/004—Nozzle assemblies; Air knives; Air distributors; Blow boxes
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Manipulator (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a purging device suitable for a diffuser of a chemical vapor deposition device, which comprises two purging robots arranged oppositely, wherein each purging robot comprises a nozzle for purging the diffuser and a position adjusting device for controlling the movement of the nozzle. The invention is suitable for the purging device of the diffuser of the chemical vapor deposition device, can improve the purging work efficiency of the diffuser, and can improve the safety and the stability.
Description
Technical Field
The invention belongs to the technical field of CVD (chemical vapor deposition) equipment, and particularly relates to purging equipment suitable for a diffuser of a chemical vapor deposition device.
Background
The cvd (chemical Vapor deposition) film forming process is the basis of the entire IC industry and the panel industry, and directly determines the performance and reliability of semiconductor devices. When the chamber is evacuated to a vacuum state (1torr) at a high temperature, process gas is introduced, a high-frequency power supply is applied to the upper electrode plate DIFF to form an electric field, plasma (electrically neutral as a whole) is formed, the temperature is provided by the lower electrode and a heating base (named Suscepter), and the plasma forms a film on the glass substrate through adsorption and combination. The quality of the film deposited on the glass is a key process control project, the influence factors are many, and the parameters mainly affecting the compactness and the components of the film are the substrate temperature and the gas flow and distribution. The volume flow and the distribution concentration are regulated and controlled by DIFF.
In chemical vapor deposition devices, in particular diffusers (diffusers), have a diffusing action of diffusing a gas uniformly on a glass panel, while also functioning as plasma electrodes. The diffuser is basically shaped like a plate-shaped cuboid (the length-width ratio is about 1.1), and a large number of pore structures are uniformly distributed on the diffuser, and the diffuser is similar to a honeycomb structure. The center in the width direction is taken as a reference surface, concentric conical holes are formed in two sides of the reference surface, an anodic oxide film is deposited on the surface of the whole structure, in the CVD film plating process, the plasma atmosphere is harsh, the anodic film can effectively resist the etching and corrosion of the environment to a substrate, and the charge discharge phenomenon and the like are avoided.
At present, a plurality of enterprises at home and abroad regenerate diffusers of CVD devices of traditional panels, and after anode regeneration of the diffusers is finished, the diffusers need to be subjected to subsequent procedures such as high-pressure cleaning, blow-drying, drying and the like. Wherein the blow-drying after the cleaning is finished, most factories manually blow the air by blowing, workers have to pay attention to the air blowing, and a handheld air gun is kept at a certain distance (15-20mm) from a diffuser and is aligned with a honeycomb hole for blowing. Because it is nearer to the diffuser, the air gun has reaction force, and the staff is tired easily, and the probability can cause the scratch of diffuser moreover, and production efficiency is not high simultaneously.
Disclosure of Invention
The present invention is directed to solving at least one of the problems of the prior art. Therefore, the invention provides a purging device suitable for a diffuser of a chemical vapor deposition device, aiming at improving the purging working efficiency of the diffuser.
In order to achieve the purpose, the invention adopts the technical scheme that: a purging apparatus for a diffuser of a chemical vapor deposition device includes two purging robots arranged opposite to each other, the purging robots including nozzles for purging the diffuser and position adjustment means for controlling movement of the nozzles.
The position adjusting device comprises a Z-axis executing mechanism, a Y-axis executing mechanism and an X-axis executing mechanism, wherein the Z-axis executing mechanism is used for driving the nozzle to move along the Z-axis direction, the Y-axis executing mechanism is connected with the Z-axis executing mechanism and is used for driving the Z-axis executing mechanism to move along the Y-axis direction, the X-axis executing mechanism is connected with the Y-axis executing mechanism and is used for driving the Y-axis executing mechanism to move along the X-axis direction, the nozzle is arranged on the Z-axis executing mechanism, and the X-axis direction, the Y-axis direction and the Z.
The X-axis executing mechanism comprises an X-axis actuator, an X-axis sliding rail, an X-axis rack and an X-axis gear, wherein the X-axis rack is connected with the Y-axis executing mechanism and arranged on the X-axis sliding rail, the X-axis gear is connected with the X-axis actuator and meshed with the X-axis rack, and the length direction of the X-axis rack is parallel to the X-axis direction.
The Y-axis executing mechanism comprises a Y-axis sliding rail connected with the X-axis rack, a Y-axis actuator, a Y-axis rack connected with the Z-axis executing mechanism and arranged on the Y-axis sliding rail, and a Y-axis gear connected with the Y-axis actuator and meshed with the Y-axis rack, and the length direction of the Y-axis rack is parallel to the Y-axis direction.
The Y-axis direction is vertical, the Y-axis actuator is a servo motor, and the Y-axis actuator has a self-locking function.
The position adjusting device further comprises an X-axis negative limiting block, an X-axis positive limiting block and an X-axis zero-position sensing switch, the X-axis negative limiting block, the X-axis positive limiting block and the X-axis zero-position sensing switch are located on the same straight line parallel to the X-axis direction, and the Y-axis sliding rail is located between the X-axis negative limiting block and the X-axis zero-position sensing switch.
The Y-axis negative limiting block, the Y-axis positive limiting block and the Y-axis zero-position sensing switch of the position adjusting device are positioned on the same straight line parallel to the Y-axis direction, and the X-axis slide rail is positioned between the Y-axis negative limiting block and the Y-axis zero-position sensing switch.
The Z-axis executing mechanism comprises a Z-axis actuator connected with the nozzle, the Z-axis actuator is an air cylinder, and the Z-axis actuator is arranged on the Y-axis rack.
The diffuser is placed on the hanger, the hanger is located between the two blowing robots, the blowing robots further comprise pressing mechanisms used for applying pressure to the hanger, and the hanger is clamped by the pressing mechanisms of the two blowing robots, so that the diffuser is in a vertical state.
The pressing mechanism comprises a clamping seat, a clamping rod arranged on the clamping seat and used for being in contact with the hanging tool, and a clamping cylinder connected with the clamping seat and used for controlling the clamping seat to move along the Z-axis direction.
The invention is suitable for the purging device of the diffuser of the chemical vapor deposition device, can improve the purging work efficiency of the diffuser, can improve the safety and the stability, can realize automatic purging, saves a large amount of labor force, reduces the cost, and is more uniform and faster than manual purging.
Drawings
The description includes the following figures, the contents shown are respectively:
FIG. 1 is a front view of a purge apparatus of the present invention suitable for a diffuser of a chemical vapor deposition device;
FIG. 2 is a schematic structural view of a purge apparatus suitable for a diffuser of a chemical vapor deposition device according to the present invention;
FIG. 3 is a front view of the purge robot;
FIG. 4 is a left side view of the purge robot;
FIG. 5 is a right side view of the purge robot;
FIG. 6 is a top view of the purge robot;
labeled as: 1. a diffuser; 2. a safety door; 3. a guide rail; 4. a security barrier; 5. an operation box; 6. bracing; 7. a column; 8. an X-axis rack; 9. an X-axis slide rail; 10. an X-axis actuator; 11. an X-axis drag chain; 12. an X-axis negative limiting block; 13. an X-axis positive limiting block; 14. an X-axis zero position induction switch; 15. a Y-axis rack; 16. a Y-axis slide rail; 17. a Y-axis actuator; 18. a nozzle; 19. a Y-axis negative limiting block; 20. a Y-axis zero position inductive switch; 21. a Y-axis positive limiting block; 22. a Y-axis drag chain; 23. detecting photoelectric switch in the seat; 24. a butt clamping cylinder; 25. a clamping lever; 26. an inductive switch; 27. a Z-axis actuator; 28. a clamping seat; 29. and a frame.
Detailed Description
The following detailed description of the embodiments of the present invention will be given with reference to the accompanying drawings for a purpose of helping those skilled in the art to more fully, accurately and deeply understand the concept and technical solution of the present invention and to facilitate its implementation.
As shown in fig. 1to 6, the present invention provides a purging apparatus for a diffuser of a chemical vapor deposition device, including two purging robots oppositely disposed, the purging robots including nozzles 18 for purging the diffuser and position adjusting means for controlling movement of the nozzles 18.
Specifically, as shown in fig. 1to 6, the purging robot further includes a frame 29 vertically disposed, a position adjusting device is disposed on the frame 29, the position adjusting device controls the nozzle 18 to move, so that the nozzle 18 can purge the diffuser, the distance between the nozzle 18 and the diffuser is easy to control, the distance between the nozzle 18 and the diffuser is adjustable, and the risk of scratching the diffuser is reduced.
As shown in fig. 1to 6, the position adjusting device includes a Z-axis actuator for driving the nozzle 18 to move along a Z-axis direction, a Y-axis actuator connected to the Z-axis actuator for driving the Z-axis actuator to move along a Y-axis direction, and an X-axis actuator connected to the Y-axis actuator for driving the Y-axis actuator to move along an X-axis direction, wherein the nozzle 18 is disposed on the Z-axis actuator, and the X-axis direction, the Y-axis direction and the Z-axis direction are perpendicular to each other. The X-axis direction and the Z-axis direction are both horizontal directions and are vertical to each other, and the Y-axis direction is vertical to the X-axis direction and the Z-axis direction. The X-axis actuating mechanism, the Y-axis actuating mechanism and the Z-axis actuating mechanism are matched to realize the movement of the nozzle 18 along the X-axis direction, the Y-axis direction and the Z-axis direction, and the device has high degree of freedom and wide position movement range.
As shown in fig. 1to 6, the X-axis actuator includes an X-axis actuator 10, an X-axis slide rail 9, an X-axis rack 8 connected to the Y-axis actuator and disposed on the X-axis slide rail 9, and an X-axis gear connected to the X-axis actuator 10 and engaged with the X-axis rack 8, the length directions of the X-axis slide rail 9 and the X-axis rack 8 are parallel to the X-axis direction, the X-axis rack 8 and the X-axis slide rail 9 are slidably connected, and the X-axis gear and the X-axis rack 8 form a rack-and-pinion mechanism. The X-axis sliding rail 9 is fixedly connected with the rack 29, the X-axis actuator 10 is fixedly arranged at one end of the X-axis sliding rail 9 in the length direction, and the X-axis actuator 10 is a servo motor. The X-axis actuator 10 drives the X-axis gear to rotate, the X-axis gear is meshed with the X-axis rack 8, the X-axis gear drives the X-axis rack 8 to move on the X-axis slide rail 9 along the X-axis direction, and the X-axis slide rail 9 plays a role in guiding the X-axis rack 8. When the X-axis slide rail 9 moves along the X-axis direction, it drives the Y-axis actuator and the Z-axis actuator to move synchronously with the nozzle 18.
As shown in fig. 1to 6, the Y-axis actuator includes a Y-axis slide rail 16 connected to the X-axis rack 8, a Y-axis actuator 17, a Y-axis rack 15 connected to the Z-axis actuator and disposed on the Y-axis slide rail 16, and a Y-axis gear connected to the Y-axis actuator 17 and engaged with the Y-axis rack 15, the length directions of the Y-axis slide rail 16 and the Y-axis rack 15 are parallel to the Y-axis direction, the Y-axis rack 15 and the Y-axis slide rail 16 are connected in a sliding manner, the Y-axis slide rail 16 is fixedly connected to the X-axis rack 8, and the Y-axis gear and the Y-axis rack 15 form a rack-and-pinion mechanism. The Y-axis actuator 17 is fixedly arranged at one end of the Y-axis slide rail 16 in the length direction, and the Y-axis actuator 17 is a servo motor. The Y-axis actuator 17 drives the Y-axis gear to rotate, the Y-axis gear is meshed with the Y-axis rack 15, the Y-axis gear drives the Y-axis rack 15 to move on the Y-axis slide rail 16 along the Y-axis direction, and the Y-axis slide rail 16 plays a role in guiding the Y-axis rack 15. When the Y-axis slide rail 16 moves along the Y-axis direction, it drives the Z-axis actuator and the nozzle 18 to move synchronously.
The Y-axis direction is vertical, the Y-axis direction is considered to be the plumb direction, and the equipment has self weight, so that the Y-axis actuator 17 selects the servo motor with the self-locking function, the nozzle 18 can stably stay at the set height position, and the reliability is improved.
As shown in fig. 1to 6, the position adjusting device further includes an X-axis negative limiting block 12, an X-axis positive limiting block 13, and an X-axis zero-position sensing switch 14, the X-axis negative limiting block 12, the X-axis positive limiting block 13, and the X-axis zero-position sensing switch 14 are fixedly disposed on the frame 29, the X-axis negative limiting block 12, the X-axis positive limiting block 13, and the X-axis zero-position sensing switch 14 are located on the same straight line parallel to the X-axis direction, the Y-axis slide rail 16 is located between the X-axis negative limiting block 12 and the X-axis zero-position sensing switch 14, and the X-axis zero-position sensing switch 14 is located between the Y-axis slide rail 16 and the X. The X-axis zero-position inductive switch 14 is electrically connected with the control system, and the X-axis zero-position inductive switch 14 is used for detecting the position of the Y-axis slide rail 16, so that the soft limiting of the Y-axis slide rail 16 is realized, and mechanical accidents in the X-axis motion process are avoided. Meanwhile, the mechanical hard limiting is realized through the matching of the X-axis positive limiting block 13 and the X-axis negative limiting block 12.
As shown in fig. 1to 6, the position adjusting device includes a Y-axis negative limiting block 19, a Y-axis positive limiting block 21, and a Y-axis zero position inductive switch 20, the Y-axis negative limiting block 19, the Y-axis positive limiting block 21, and the Y-axis zero position inductive switch 20 are located on the same straight line parallel to the Y-axis direction, and the X-axis slide rail 9 is located between the Y-axis negative limiting block 19 and the Y-axis zero position inductive switch 20. The X-axis slide rail 9 is located between the Y-axis negative limiting block 19 and the Y-axis zero-position inductive switch 20, and the Y-axis zero-position inductive switch 20 is located between the X-axis slide rail 9 and the Y-axis positive limiting block 21. The Y-axis zero-position sensing switch 20 is electrically connected with the control system, and the Y-axis zero-position sensing switch 20 is used for detecting the position of the X-axis slide rail 9, so that the soft limiting of the X-axis slide rail 9 is realized, and mechanical accidents in the Y-axis motion process are avoided. Meanwhile, mechanical hard limiting is realized through the matching of the Y-axis positive limiting block 21 and the Y-axis negative limiting block 19. The Y-axis negative limiting block 19 is located above the X-axis slide rail 9, and the Y-axis zero-position inductive switch 20 is located below the X-axis slide rail 9.
As shown in fig. 1to 6, the Z-axis actuator includes a Z-axis actuator 27 connected to the nozzle 18, the Z-axis actuator 27 is an air cylinder, the extending and retracting directions of the Z-axis actuator 27 are parallel to the Z-axis direction, the Z-axis actuator 27 is disposed on the Y-axis rack 15, and the Y-axis rack 15 and the Z-axis actuator 27 move synchronously. The nozzle 18 is fixedly connected with a piston rod of the Z-axis actuator 27, and after the Z-axis actuator 27 extends, the nozzle 18 is driven to be close to the diffuser, and the distance between the nozzle 18 and the diffuser is controlled to be kept between 15 mm and 20 mm. The telescopic cylinder is adopted to provide enough space, so that the diffuser can be conveniently hung between the two blowing robots.
The stroke of the Z-axis actuator 27 is 175mm, the total stroke of the Z-axis actuators 27 of the two purge robots is 350mm in sum, and the cylinder position is adjustable. The Z-axis actuators 27 of the two purging robots are respectively and independently controlled to extend and retract.
The stroke of the X-axis rack 8 is 4500mm, and the stroke of the Y-axis rack 15 is 3900 mm. The X-axis actuator 10 and the Y-axis actuator 17 are both servo motors, and are convenient to control and adjust the speed.
As shown in fig. 1to 6, the Z-axis actuator 27 is provided with the inductive switch 26, a contact of the inductive switch 26 protrudes about 185mm from the nozzle, a distance between the contact of the inductive switch 26 and the diffuser is smaller than a distance between the nozzle 18 and the diffuser, and a distance between the contact of the inductive switch 26 and the diffuser is smaller than a distance between the nozzle 18 and the diffuser by about 5mm, so that the distance between the nozzle 18 and the diffuser is controlled within a set range. The inductive switch 26 is electrically connected with the control system, the inductive switch 26 sends a signal to the control system, if a contact part of the interference inductive switch 26 contacts with the diffuser first, the purging device alarms and stops, and therefore the risk of scratching products is reduced, and the yield is improved. The contact of the inductive switch 26 is made of plastic, so that damage caused by the nozzle 18 directly hitting the diffuser can be avoided. And the inductive switch 26 is located below the nozzle 18, the position of the inductive switch 26 on the Z-axis actuator 27 can be adjusted, thereby allowing the distance between the nozzle 18 and the diffuser to be adjusted.
For better purging effect, a plurality of nozzles 18 are provided on the Z-axis actuator 27.
In the present embodiment, as shown in fig. 1to 6, four nozzles 18 are provided on the Z-axis actuator 27 of each purging robot, that is, eight nozzles 18 are arranged on two sides of the diffuser, the nozzles 18 spray gas to the diffuser, a ball valve switch is installed at an air inlet of each nozzle 18, the ball valve switch is connected to an air path of the air supply system, and the on/off of each nozzle 18 can be controlled individually by the ball valve switch. The gas path of the gas supply system is provided with a plurality of gas paths, gas is supplied to the nozzles 18 through the gas paths, and in order to ensure that the gas amount is enough, every two nozzles 18 are supplied with gas through one gas path of the gas supply system.
As shown in fig. 1to 6, the diffuser is placed on a hanger, the hanger is located between two purging robots, a guide rail 3 is further disposed between the two purging robots, and the length direction of the guide rail 3 is parallel to the X-axis direction. The hanger is suspended by a hoisting device (such as a travelling crane), and the diffuser is fixed on the hanger and moves synchronously along with the hanger. The diffuser is lifted by the lifting device through the hanger, the hanger slides into the space between the two blowing robots along the guide rail 3, and the operator holds the hanger. The guide rail 3 is used for guiding the hanger in the process that the hanger carries the diffuser to enter the space between the two blowing robots, so that the hanger moves along the X-axis direction, and the guide rail 3 can prevent the diffuser from shaking in the hoisting process and colliding with equipment to cause scratches. The diffuser is placed in the middle between the two blowing robots, and after the position is finely adjusted, the lower end of the hanger is fixed by the clamp. After the placement is finished, the safety door 2 is closed.
As shown in fig. 1to 6, the purge robot further includes a hold-down mechanism for applying pressure to the rack, and the rack is clamped by the hold-down mechanisms of the two purge robots, so that the diffuser is in a vertical state. The pressing mechanism comprises a clamping seat 28, a clamping rod 25 which is arranged on the clamping seat 28 and is used for being in contact with a hanger, and a clamping air cylinder 24 which is connected with the clamping seat 28 and is used for controlling the clamping seat 28 to move along the Z-axis direction. The opposite clamping cylinder 24 is a telescopic cylinder, the opposite clamping cylinder 24 is fixedly arranged at the upper end of the rack 29, the telescopic direction of the opposite clamping cylinder 24 is parallel to the Z-axis direction, the clamping seat 28 is fixedly connected with a piston rod of the opposite clamping cylinder 24, the clamping rod 25 is fixedly arranged on the clamping seat 28, the clamping rod 25 has a certain length, the length direction of the clamping rod 25 is parallel to the X-axis direction, and the clamping rod 25 is used for applying pressing force along the Z-axis direction to the hanger. The two sides of the hanger are respectively provided with a pressing mechanism, the two pressing mechanisms are matched to clamp and fix the hanger, so that the hanger is kept in a vertical state, and then a diffuser on the hanger can be kept in the vertical state, so that the interference of the nozzle 18 and the diffuser in the working process can be avoided.
After the hanger and the diffuser are placed between the two blowing robots, the opposite clamping cylinders 24 of the two blowing robots are started firstly, so that the opposite clamping cylinders 24 are extended, the clamping rods 25 are driven to clamp the hanger, and the diffuser is kept vertical. Two butt clamp cylinders 24 are controlled by the same air path, the butt clamp cylinders 24 are installed on the rack 29 through bolts, and the butt clamp cylinders 24 are arranged to be adjustable in position on the rack 29, so that the initial position of the clamping rod 25 can be adjusted, and fine adjustment in the debugging process is facilitated.
As shown in fig. 1to 6, the purging device for a diffuser of a chemical vapor deposition apparatus according to the present invention further includes a safety door 2, the safety door 2 closing an opening between the two purging robots, the safety door 2 being located at one side of the hanger. Set up inductive switch on the emergency exit 2, if emergency exit 2 does not close, inductive switch can send signal to control system, and control system sends alarm command, and equipment that sweeps will report to the police, and the robot that sweeps does not work. The purging robot can work only when the door is closed and the signal is triggered.
As shown in fig. 1to 6, the purge robot further includes a presence detection photoelectric switch 23, and the presence detection photoelectric switch 23 is used to detect whether a diffuser is interposed between the two purge robots. The mat inspection photoelectric switch 23 is electrically connected with a control system, a Z-axis actuator 27, a Y-axis actuator 17 and the Z-axis actuator 27 of the purging robot are electrically connected with the control system, and the Z-axis actuator 27, the Y-axis actuator 17 and the Z-axis actuator 27 are controlled by the control system. If the insertion of a diffuser is not detected at the position detection photoelectric switch 23, no signal is triggered and the purging robot does not operate. Through the signal control, the purging robot can be started to work after the preparation is sufficient, and accidents are avoided.
As shown in fig. 1to 6, the safety barrier 4 is arranged on the rack 29, the safety barrier 4 is vertically arranged, the length direction of the safety barrier 4 is parallel to the X-axis direction, the height direction of the safety barrier 4 is parallel to the Y-axis direction, and the thickness direction of the safety barrier 4 is parallel to the Z-axis direction. The safety doors 2 are arranged in two numbers, the two safety doors 2 are positioned on the same straight line parallel to the X-axis direction, the two purging robots are positioned between the two safety doors 2, and the hanging tool is also positioned between the two safety doors 2. A safety barrier 4 on the purge robot together with two safety doors 2 encloses the diffuser. The mechanical measure can prevent foreign objects from entering the interior in the working process and interfering the operating environment of the device. More importantly, the device and the personnel are isolated, accidental injury is avoided, and safety is improved.
As shown in fig. 1to 6, the frame 29 is vertical, the X-axis slide rail 9 is fixed to be set up in the frame 29, be provided with the stand 7 in the frame 29, the stand 7 provides the supporting role to the frame 29, the stand 7 is vertical, stand 7 and frame 29 fixed connection, stand 7 is connected with bracing 6, bracing 6 is the bracing piece that the slope set up, contained angle and this contained angle have between the length direction of bracing 6 and the length direction of stand 7 are the acute angle, the upper end and the stand 7 fixed connection of bracing 6, certain distance has between the lower extreme of bracing 6 and the lower extreme of stand 7, the lower extreme and the bottom platform fixed connection of stand 7 and bracing 6, the setting of bracing 6 has improved the holistic stability of equipment.
The invention is described above with reference to the accompanying drawings. It is to be understood that the specific implementations of the invention are not limited in this respect. Various insubstantial improvements are made by adopting the method conception and the technical scheme of the invention; the present invention is not limited to the above embodiments, and can be modified in various ways.
Claims (10)
1. Purging apparatus for a diffuser of a chemical vapor deposition device, comprising two purging robots arranged opposite each other, the purging robots comprising nozzles for purging the diffuser and position adjustment means for controlling the movement of the nozzles.
2. The purge apparatus of claim 1, wherein the position adjustment device comprises a Z-axis actuator for moving the nozzle along a Z-axis direction, a Y-axis actuator connected to the Z-axis actuator for moving the Z-axis actuator along a Y-axis direction, and an X-axis actuator connected to the Y-axis actuator for moving the Y-axis actuator along an X-axis direction, wherein the nozzle is disposed on the Z-axis actuator, and the X-axis direction, the Y-axis direction, and the Z-axis direction are perpendicular to each other.
3. The purge apparatus for a diffuser of a chemical vapor deposition device according to claim 2, wherein the X-axis actuator comprises an X-axis actuator, an X-axis slide rail, an X-axis rack connected to the Y-axis actuator and disposed on the X-axis slide rail, and an X-axis gear connected to the X-axis actuator and engaged with the X-axis rack, wherein a length direction of the X-axis rack is parallel to an X-axis direction.
4. The purge apparatus for a diffuser of a chemical vapor deposition device according to claim 3, wherein the Y-axis actuator comprises a Y-axis slide rail connected to the X-axis rack, a Y-axis actuator, a Y-axis rack connected to the Z-axis actuator and disposed on the Y-axis slide rail, and a Y-axis gear connected to the Y-axis actuator and engaged with the Y-axis rack, wherein a length direction of the Y-axis rack is parallel to a Y-axis direction.
5. The purge apparatus for a chemical vapor deposition device diffuser of claim 4, wherein the Y-axis direction is vertical, the Y-axis actuator is a servo motor and the Y-axis actuator has a self-locking function.
6. The purging device for the diffuser of the chemical vapor deposition apparatus according to claim 4 or 5, wherein the position adjusting device further comprises an X-axis negative limiting block, an X-axis positive limiting block and an X-axis zero position sensing switch, the X-axis negative limiting block, the X-axis positive limiting block and the X-axis zero position sensing switch are positioned on the same straight line parallel to the X-axis direction, and the Y-axis slide rail is positioned between the X-axis negative limiting block and the X-axis zero position sensing switch.
7. The purging apparatus as claimed in any one of claims 4 to 6, wherein the position adjusting device comprises a Y-axis negative limiting block, a Y-axis positive limiting block and a Y-axis zero position sensing switch, the Y-axis negative limiting block, the Y-axis positive limiting block and the Y-axis zero position sensing switch are located on a same straight line parallel to a Y-axis direction, and the X-axis slide rail is located between the Y-axis negative limiting block and the Y-axis zero position sensing switch.
8. The purge apparatus of any one of claims 4 to 7, wherein the Z-axis actuator comprises a Z-axis actuator connected to the nozzle, the Z-axis actuator being a pneumatic cylinder, the Z-axis actuator being disposed on the Y-axis rack.
9. The purge apparatus for a diffuser of a chemical vapor deposition device according to any one of claims 1to 8, wherein the diffuser is placed on a rack, the rack being located between the two purge robots, the purge robot further comprising a hold down mechanism for applying pressure to the rack, the rack being gripped by the hold down mechanisms of the two purge robots to hold the diffuser in an upright position.
10. The purge apparatus for a diffuser of a chemical vapor deposition device according to claim 9, wherein the pressing mechanism comprises a clamping base, a clamping rod disposed on the clamping base for contacting the hanger, and a clamping cylinder connected to the clamping base for controlling the clamping base to move along the Z-axis direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010738521.2A CN111854410B (en) | 2020-07-28 | 2020-07-28 | Purge apparatus for a chemical vapor deposition apparatus diffuser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010738521.2A CN111854410B (en) | 2020-07-28 | 2020-07-28 | Purge apparatus for a chemical vapor deposition apparatus diffuser |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111854410A true CN111854410A (en) | 2020-10-30 |
| CN111854410B CN111854410B (en) | 2024-03-19 |
Family
ID=72948589
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010738521.2A Active CN111854410B (en) | 2020-07-28 | 2020-07-28 | Purge apparatus for a chemical vapor deposition apparatus diffuser |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111854410B (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006224067A (en) * | 2005-02-21 | 2006-08-31 | Toyota Motor Corp | Foreign matter removing apparatus and foreign matter removing method |
| CN203565388U (en) * | 2013-10-14 | 2014-04-30 | 广东德科机器人技术与装备有限公司 | Cleaning and blowing drying device of paint spraying machine for toys |
| CN105436450A (en) * | 2014-08-15 | 2016-03-30 | 中冶宝钢技术服务有限公司 | Defect fusing and removing equipment for continuous casting slab |
| CN105689319A (en) * | 2016-01-24 | 2016-06-22 | 赵文林 | Automatic cleaning device for gauze mask |
| CN209829744U (en) * | 2019-05-08 | 2019-12-24 | 秦建楠 | Cleaning device for spare and accessory part machining |
| CN210773233U (en) * | 2019-10-18 | 2020-06-16 | 天津澳德纳科技有限公司 | Drying equipment for injection mold |
| CN212320367U (en) * | 2020-07-28 | 2021-01-08 | 芜湖通潮精密机械股份有限公司 | Purging device for diffuser of chemical vapor deposition apparatus |
-
2020
- 2020-07-28 CN CN202010738521.2A patent/CN111854410B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006224067A (en) * | 2005-02-21 | 2006-08-31 | Toyota Motor Corp | Foreign matter removing apparatus and foreign matter removing method |
| CN203565388U (en) * | 2013-10-14 | 2014-04-30 | 广东德科机器人技术与装备有限公司 | Cleaning and blowing drying device of paint spraying machine for toys |
| CN105436450A (en) * | 2014-08-15 | 2016-03-30 | 中冶宝钢技术服务有限公司 | Defect fusing and removing equipment for continuous casting slab |
| CN105689319A (en) * | 2016-01-24 | 2016-06-22 | 赵文林 | Automatic cleaning device for gauze mask |
| CN209829744U (en) * | 2019-05-08 | 2019-12-24 | 秦建楠 | Cleaning device for spare and accessory part machining |
| CN210773233U (en) * | 2019-10-18 | 2020-06-16 | 天津澳德纳科技有限公司 | Drying equipment for injection mold |
| CN212320367U (en) * | 2020-07-28 | 2021-01-08 | 芜湖通潮精密机械股份有限公司 | Purging device for diffuser of chemical vapor deposition apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| CN111854410B (en) | 2024-03-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN212320367U (en) | Purging device for diffuser of chemical vapor deposition apparatus | |
| CN111730185B (en) | Automatic parallel sealing device and sealing method based on image recognition | |
| CN2917866Y (en) | Charging and baiting device | |
| CN111299048A (en) | Automatic spraying device is used in production of server rack | |
| CN106799380B (en) | Automatic electrostatic dust remover and dust removing method thereof | |
| CN115463858B (en) | Automatic detection device and detection method for aluminum bottle | |
| TW201927510A (en) | Apparatus for cleaning tire mold | |
| CN109552896A (en) | A kind of fired brick brick unloading clamp device | |
| CN111299200A (en) | Automatic conveying equipment for secondary cleaning | |
| CN111250449B (en) | Assembly line equipment for automatically cleaning workpiece and dust-free treatment method for workpiece surface | |
| CN111854410A (en) | Purging device for diffuser of chemical vapor deposition apparatus | |
| CN103712582B (en) | A kind of intelligent fuel assembly mobile device | |
| CN109570377A (en) | A kind of plate handling equipment | |
| CN108745771A (en) | It is a kind of to draw paint machine and its control method automatically | |
| CN210966179U (en) | Plastic part dust removal case that sprays paint | |
| CN103706510A (en) | Large-area continuous dip-coating production line and method thereof | |
| CN115591805A (en) | Battery piece grid line detection equipment and detection method | |
| CN215967243U (en) | High-precision screw locking mechanism | |
| CN114857914A (en) | All-dimensional cleaning and drying equipment and all-dimensional cleaning and drying method | |
| CN114905294A (en) | Operation platform for overturning and clamping workpiece by manipulator | |
| CN110125027B (en) | Automatic detection device for strip-shaped workpiece | |
| CN211238156U (en) | Plasma surface treatment apparatus | |
| CN113113334A (en) | Wet process cleaning equipment and wet process cleaning method | |
| CN209583057U (en) | A kind of fired brick brick unloading clamp device | |
| CN207806961U (en) | Spot-welding mechanism and its lithium battery welding equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |