CN111853196B - Compact three-dimensional motion mechanism - Google Patents

Compact three-dimensional motion mechanism Download PDF

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Publication number
CN111853196B
CN111853196B CN202010738581.4A CN202010738581A CN111853196B CN 111853196 B CN111853196 B CN 111853196B CN 202010738581 A CN202010738581 A CN 202010738581A CN 111853196 B CN111853196 B CN 111853196B
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axis
plate
motion mechanism
movable plate
output end
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CN111853196A (en
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吕涛
付东辉
陈小云
阚卓娜
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16HGEARING
    • F16H37/00Combinations of mechanical gearings, not provided for in groups F16H1/00 - F16H35/00
    • F16H37/12Gearings comprising primarily toothed or friction gearing, links or levers, and cams, or members of at least two of these types
    • F16H37/124Gearings comprising primarily toothed or friction gearing, links or levers, and cams, or members of at least two of these types for interconverting rotary motion and reciprocating motion
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K7/00Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/10Structural association with clutches, brakes, gears, pulleys or mechanical starters

Abstract

The invention discloses a compact three-dimensional motion mechanism which comprises a Z-axis motion mechanism, a connecting fixed plate connected to the output end of the Z-axis motion mechanism, an X-axis motion mechanism arranged on the connecting fixed plate, a horizontal movable plate connected to the output end of the X-axis motion mechanism, a synchronous follow-up plate connected to the bottom surface of the horizontal movable plate in a Y-direction motion manner, and a Y-axis motion mechanism arranged on the surface of the synchronous follow-up plate, wherein the output end of the Y-axis motion mechanism is connected with the horizontal movable plate, and the surface of the synchronous follow-up plate is used for installing a load. Therefore, the load can smoothly realize three-dimensional space motion by driving the connecting fixed plate by the Z-axis motion mechanism, driving the horizontal movable plate by the X-axis motion mechanism and driving the synchronous follow-up plate by the Y-axis motion mechanism, and meanwhile, a non-laminated mounting structure (horizontal distribution structure) is formed. Therefore, compared with the stacking installation structure in the prior art, the stacking installation structure can greatly reduce the overall height of the mechanism and reduce the occupied space.

Description

Compact three-dimensional motion mechanism
Technical Field
The invention relates to the technical field of motion mechanisms, in particular to a compact three-dimensional motion mechanism.
Background
The three-dimensional motion mechanism is a commonly used motion mechanism or driving mechanism, and can drive a load or a workpiece to perform three-dimensional motion in space. Generally, the three-dimensional motion mechanism mainly comprises three-axis motion freedom degrees of X-Y-Z, namely plane motion in two directions in a horizontal plane and lifting motion in a vertical direction.
At present, the three-dimensional motion mechanism is often assembled by stacking three single-axis motion mechanisms, such as a bottom-mounted Z-axis motion mechanism, a middle-stacked X-axis motion mechanism, a top-stacked Y-axis motion mechanism, and the like. The structure of the three-dimensional motion mechanism in the prior art can conveniently realize the three-dimensional motion driving of the load, but the whole structure of the three-dimensional motion mechanism is in a vertical laminated shape, the three-layer laminated structure leads to the fact that the height of the mechanism is larger, the space occupation is larger, and more connecting pieces are arranged between every two motion mechanisms, thus leading to the fact that the size and the weight are larger.
Therefore, how to reduce the overall height of the mechanism and reduce the space occupation on the basis of realizing the three-dimensional space motion of the driving load is a technical problem faced by those skilled in the art.
Disclosure of Invention
The invention aims to provide a compact three-dimensional motion mechanism, which can reduce the overall height of the mechanism and reduce the space occupation on the basis of realizing the three-dimensional motion of a driving load.
In order to solve the technical problem, the invention provides a compact three-dimensional motion mechanism, which comprises a Z-axis motion mechanism, a connecting fixed plate connected to the output end of the Z-axis motion mechanism, an X-axis motion mechanism arranged on the connecting fixed plate, a horizontal movable plate connected to the output end of the X-axis motion mechanism, a synchronous follow-up plate connected to the bottom surface of the horizontal movable plate in a Y-direction motion manner, and a Y-axis motion mechanism arranged on the surface of the synchronous follow-up plate and having an output end connected with the horizontal movable plate, wherein the surface of the synchronous follow-up plate is used for installing a load.
Preferably, the horizontal movable plate has a rectangular frame structure, and the inner space of the horizontal movable plate is used for accommodating the load.
Preferably, the Z-axis movement mechanism comprises a Z-axis driving motor and a Z-direction worm and gear assembly connected to the output end of the Z-axis driving motor, and one end of the connecting fixing plate is in transmission with the output end of the Z-direction worm and gear assembly in a matching manner.
Preferably, the Z-axis movement mechanism further comprises a Z-direction guide rail vertically arranged on a casing of the Z-axis driving motor, and a Z-direction slider slidably arranged in the Z-direction guide rail and driven by matching with the output end of the Z-direction worm gear assembly, and the tail end of the Z-direction slider is connected with the connecting fixing plate.
Preferably, the Z-direction guide rail is a dovetail groove guide rail, and the Z-direction slider is a trapezoidal slider.
Preferably, the X-axis movement mechanism comprises an X-axis driving motor connected to one side of the bottom surface of the connecting fixing plate and an X-direction worm and gear assembly connected to the output end of the X-axis driving motor, and the side wall of one side of the horizontal movable plate is in matched transmission with the output end of the X-direction worm and gear assembly.
Preferably, the X-axis movement mechanism further comprises an X-direction guide block connected to the other side of the bottom surface of the connecting fixing plate, a plurality of X-direction through holes are formed in the surface of the X-direction guide block, and X-direction guide posts which slide in a matched manner with the X-direction through holes are inserted into the side wall of the other side of the horizontal movable plate.
Preferably, a Y-directional guide rail is disposed on a bottom surface of the horizontal movable plate, and a Y-directional slide rail engaged with the Y-directional guide rail is disposed on a surface of the synchronous follow-up plate.
Preferably, the Y-axis movement mechanism includes a Y-axis driving motor disposed at one end of the surface of the synchronous follow-up plate, and a Y-direction worm gear assembly connected to an output end of the Y-axis driving motor, and a side wall at one end of the horizontal movable plate is in transmission with an output end of the Y-direction worm gear assembly in a matching manner.
Preferably, the Y-axis moving mechanism further includes a Y-direction guide block disposed at the other end of the surface of the synchronous follow-up plate, a plurality of Y-direction through holes are formed on the surface of the Y-direction guide block, and Y-direction guide posts which are matched with the Y-direction through holes to slide are inserted into the side wall of the other end of the horizontal movable plate.
The compact three-dimensional motion mechanism provided by the invention mainly comprises a Z-axis motion mechanism, a connecting fixed plate, an X-axis motion mechanism, a horizontal movable plate, a synchronous follow-up plate and a Y-axis motion mechanism. The Z-axis motion mechanism is mainly used for outputting power in the Z-axis direction. The connecting and fixing plate is connected to the output end of the Z-axis movement mechanism and can move along the Z axis under the driving of the connecting and fixing plate. The X-axis movement mechanism is arranged on the connecting fixing plate and is mainly used for outputting power in the X-axis direction. The horizontal movable plate is connected to the output end of the X-axis movement mechanism and can move along the X axis under the driving of the horizontal movable plate. The synchronous follow-up plate is connected to the bottom surface of the horizontal movable plate, moves synchronously with the horizontal movable plate when the horizontal movable plate moves along the X axis, and can independently move along the Y axis direction, and the load is installed on the surface of the synchronous follow-up plate. The Y-axis motion mechanism is arranged on the surface of the synchronous follow-up plate, and the output end of the Y-axis motion mechanism is connected with the horizontal movable plate and can drive the synchronous follow-up plate to move along the Y axis relative to the horizontal movable plate. Therefore, the load can smoothly realize three-dimensional space motion by driving the connecting fixed plate through the Z-axis motion mechanism, driving the horizontal movable plate through the X-axis motion mechanism and driving the synchronous follow-up plate through the Y-axis motion mechanism, and meanwhile, the X-axis motion mechanism and the Y-axis motion mechanism are respectively arranged on the connecting fixed plate and the synchronous follow-up plate and almost positioned in the same height horizontal plane, and the Z-axis motion mechanism is connected with the connecting fixed plate and forms a non-laminated installation structure (horizontal distribution structure) with the X-axis motion mechanism and the Y-axis motion mechanism. Therefore, compared with a stacking installation structure in the prior art, the compact three-dimensional motion mechanism provided by the invention can greatly reduce the overall height of the mechanism and reduce the occupied space.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
FIG. 1 is a top view of the overall structure of one embodiment of the present invention.
Fig. 2 is a front half sectional view of fig. 1.
Fig. 3 is a bottom view of fig. 1.
Fig. 4 is a detailed structural schematic diagram of the horizontal movable plate shown in fig. 1.
Wherein, in fig. 1-4:
a load-a;
a Z-axis motion mechanism-1, a connecting fixed plate-2, an X-axis motion mechanism-3, a horizontal movable plate-4, a synchronous follow-up plate-5 and a Y-axis motion mechanism-6;
the device comprises a Z-axis driving motor-101, a Z-direction worm gear assembly-102, a Z-direction guide rail-103, a Z-direction sliding block-104, an X-axis driving motor-301, an X-direction worm gear assembly-302, an X-direction guide block-303, an X-direction through hole-304, an X-direction guide column-401, a Y-direction guide column-402, a threaded hole-403, a Y-axis driving motor-601, a Y-direction worm gear assembly-602, a Y-direction guide block-603 and a Y-direction through hole-604.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1, fig. 2 and fig. 3, fig. 1 is a schematic overall structure diagram of an embodiment of the present invention, fig. 2 is a front half-sectional view of fig. 1, and fig. 3 is a bottom view of fig. 1.
In a specific embodiment provided by the invention, the compact three-dimensional motion mechanism mainly comprises a Z-axis motion mechanism 1, a connecting fixed plate 2, an X-axis motion mechanism 3, a horizontal movable plate 4, a synchronous follow-up plate 5 and a Y-axis motion mechanism 6.
The Z-axis movement mechanism 1 is mainly used for outputting power in the Z-axis direction. The connecting and fixing plate 2 is connected to the output end of the mechanism for Z-axis movement and can move along the Z axis under the drive of the mechanism.
The X-axis movement mechanism 3 is arranged on the connecting and fixing plate 2 and is mainly used for outputting power in the X-axis direction. The horizontal movable plate 4 is connected to the output end of the X-axis movement mechanism 3 and can move along the X-axis under the driving of the horizontal movable plate.
The synchronous follow-up plate 5 is attached to the bottom surface of the horizontal moving plate 4, moves in synchronization with the horizontal moving plate 4 when moving along the X-axis, and can move alone in the Y-axis direction, and the load a is mounted on the surface of the synchronous follow-up plate 5.
The Y-axis moving mechanism 6 is provided on the surface of the synchronous follow-up plate 5, and the output end is connected to the horizontal movable plate 4, and drives the synchronous follow-up plate 5 to move along the Y-axis with respect to the horizontal movable plate 4.
Therefore, the load a can smoothly realize three-dimensional space motion by driving the connecting fixed plate 2 by the Z-axis motion mechanism 1, driving the horizontal movable plate 4 by the X-axis motion mechanism 3 and driving the synchronous follow-up plate 5 by the Y-axis motion mechanism 6, and meanwhile, because the X-axis motion mechanism 3 and the Y-axis motion mechanism 6 are respectively arranged on the connecting fixed plate 2 and the synchronous follow-up plate 5, the two are almost positioned in the same height horizontal plane, and the Z-axis motion mechanism 1 is connected with the connecting fixed plate 2 and forms a non-laminated installation structure (horizontal distribution structure) with the X-axis motion mechanism 3 and the Y-axis motion mechanism 6.
Therefore, compared with a stacked installation structure in the prior art, the compact three-dimensional motion mechanism provided by the embodiment can greatly reduce the overall height of the mechanism and reduce the occupied space.
As shown in fig. 4, fig. 4 is a specific structural schematic diagram of the horizontal movable plate 4 shown in fig. 1.
In a preferred embodiment with respect to the horizontal movable plate 4, the horizontal movable plate 4 may be embodied in a rectangular frame structure, and in consideration of the fact that the synchronous follow-up plate 5 is provided on the bottom surface of the horizontal movable plate 4 and the synchronous follow-up plate 5 is provided on the surface for mounting the load a, in order to avoid interference with the mounting of the load a, the inner space of the horizontal movable plate 4 may be used to accommodate the load a. With this arrangement, the load a can be mounted at the surface center position of the synchronous follower plate 5, and the synchronous follower plate 5 can be disposed to face the horizontally movable plate 4.
In a preferred embodiment of the Z-axis movement mechanism 1, the Z-axis movement mechanism 1 mainly includes a Z-axis drive motor 101 and a Z-direction worm gear assembly 102. Wherein, the Z-direction worm gear assembly 102 is connected to the output end of the Z-axis driving motor 101, and one end of the connecting fixing plate 2 is in transmission with the output end of the Z-direction worm gear assembly 102 in a matching manner. So set up, when Z axle driving motor 101 output power, will drive Z and rotate to worm gear subassembly 102, and then the drive is connected fixed plate 2 and is carried out elevating movement along the vertical. Meanwhile, the connecting and fixing plate 2 is connected with the X-axis motion mechanism 3, the Y-axis motion mechanism 6, the horizontal movable plate 4 and the synchronous follow-up plate 5, so that the load a can be driven to synchronously vertically move by the vertical lifting motion of the connecting and fixing plate 2.
In order to improve the stability and smoothness of the connecting and fixing plate 2 during vertical lifting movement, in this embodiment, a Z-direction guide rail 103 is provided on the housing of the Z-axis driving motor 101, and the Z-direction slider 104 is assembled with the Z-direction guide rail 103. And the bottom end of the Z-direction slider 104 is matched with the output end of the Z-direction worm gear assembly 102 for transmission, and the top end of the Z-direction slider 104 is connected with the connecting and fixing plate 2. So set up, when Z axle driving motor 101 output power, will be through the transmission cooperation between Z to worm gear subassembly 102 and the Z to slider 104, drive Z to slider 104 along Z to the guide rail 103 slip, and then drive and connect fixed plate 2 along vertical elevating movement.
Further, the Z-guide 103 may be a dovetail guide, and the Z-slider 104 may be an isosceles trapezoid slider engaged with the dovetail guide. By such arrangement, the Z-direction slider 104 can be prevented from being accidentally removed when sliding in the Z-direction guide rail 103. Of course, the Z-guide 103 may also be a rectangular-slot guide, and the Z-slide 104 may also be a rectangular slide.
In a preferred embodiment of the X-axis movement mechanism 3, the X-axis movement mechanism 3 mainly includes an X-axis drive motor 301 and an X-direction worm gear assembly 302. Wherein, the X-axis driving motor 301 is connected to one side of the bottom surface of the connecting fixing plate 2 and is distributed downwards along the vertical direction. The X-direction worm gear assembly 302 is connected to the output end of the X-axis driving motor 301, and one side wall of the horizontal movable plate 4 forms a matching transmission with the output end of the X-direction worm gear assembly 302. With such an arrangement, when the X-axis driving motor 301 outputs power, the horizontal movable plate 4 can be driven to move along the horizontal X direction by the X-direction worm gear assembly 302. Specifically, a threaded hole 403 may be formed in one side wall (a right side wall shown in the figure) of the horizontal moving plate, and the threaded hole 403 is in threaded connection with the output end of the X-direction worm gear assembly 302 to form a threaded transmission (or a screw transmission).
In order to improve the stability and smoothness of the horizontal moving plate moving along the horizontal X direction, in this embodiment, an X-direction guide block 303 is disposed at the other side of the bottom surface of the connecting and fixing plate 2, and a plurality of X-direction through holes 304 are formed on the surface of the X-direction guide block 303. Correspondingly, a plurality of X-directional guide posts 401 are inserted into the other side wall (left side wall in the figure) of the horizontal movable plate 4, and each X-directional guide post 401 is matched with the corresponding X-directional through hole 304 to form a shaft hole. So set up, when the horizontal motion board is along horizontal X to the removal, will guarantee under the guiding effect of X to guide post 401 that the direction of removal is accurate no deviation.
In order to facilitate the movable connection between the synchronous follow-up plate 5 and the horizontal movable plate 4, a Y-directional guide rail is disposed on the bottom surface of the horizontal movable plate 4, and a Y-directional slide rail that is matched with the Y-directional guide rail to slide is disposed on the surface of the synchronous follow-up plate 5. Specifically, considering that the horizontal movable plate 4 is mainly of a rectangular frame structure, each Y-directional guide rail may be provided at a position on both sides of the bottom surface Y of the horizontal movable plate 4, and correspondingly, each Y-directional slide rail is provided at a corresponding position on the surface of the synchronous follow-up plate 5.
In a preferred embodiment with respect to the Y-axis moving mechanism 6, the Y-axis moving mechanism 6 mainly includes a Y-axis drive motor 601 and a Y-direction worm gear assembly 602. Wherein, the Y-axis driving motor 601 is arranged at one end of the surface of the synchronous follow-up plate 5 and distributed downwards along the vertical direction. The Y-direction worm gear assembly 602 is connected to the output end of the Y-axis driving motor 601, and one end side wall (shown upper end side wall) of the horizontal movable plate 4 is in transmission with the output end of the Y-direction worm gear assembly 602 in a matching manner. With such an arrangement, when the Y-axis driving motor 601 outputs force, the horizontal movable plate 4 can be driven to move along the horizontal Y direction by the Y-direction worm gear assembly 602. Specifically, a threaded hole 403 may be formed in one end side wall (shown as an upper end side wall) of the horizontal moving plate, and the threaded hole 403 is in threaded connection with an output end of the Y-direction worm gear assembly 602 to form a threaded transmission (or a lead screw transmission).
It should be noted that, because the output end of the X-axis motion mechanism 3 is directly used for driving the horizontal motion plate to perform horizontal X-direction motion, and the output end of the Y-axis motion mechanism 6 drives the horizontal motion plate to perform horizontal Y-direction relative motion through the synchronous follower plate 5, when the Y-axis drive motor 601 outputs power, since the horizontal motion plate is already connected with the output end of the X-axis drive motor 301 and cannot perform Y-direction motion, the power of the Y-axis drive motor 601 drives the synchronous follower plate 5 in reverse direction to perform Y-direction motion relative to the horizontal motion plate, thereby driving the load a to perform Y-direction motion.
Further, in order to improve the stability and smoothness of the synchronous follow-up plate 5 along the horizontal Y direction, in this embodiment, a Y-direction guide block 603 is disposed at the other end position of the surface of the synchronous follow-up plate 5, and a plurality of Y-direction through holes 604 are disposed on the surface of the Y-direction guide block 603. Correspondingly, a plurality of Y-directional guide posts 402 are inserted into the other end side wall (lower end side wall in the figure) of the horizontal movable plate 4, and each Y-directional guide post 402 is matched with the corresponding Y-directional through hole 604 to form a shaft hole. So configured, when the synchronous follow-up plate 5 moves along the horizontal Y direction, the moving direction will be ensured to be accurate and without deviation under the guiding action of the Y-direction guide post 402.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (6)

1. A compact three-dimensional motion mechanism is characterized by comprising a Z-axis motion mechanism (1), a connecting fixed plate (2) connected to the output end of the Z-axis motion mechanism (1), an X-axis motion mechanism (3) arranged on the connecting fixed plate (2), a horizontal movable plate (4) connected to the output end of the X-axis motion mechanism (3), a synchronous follow-up plate (5) connected to the bottom surface of the horizontal movable plate (4) in a Y-direction motion manner, and a Y-axis motion mechanism (6) arranged on the surface of the synchronous follow-up plate (5) and the output end of the Y-axis motion mechanism is connected with the horizontal movable plate (4), wherein the surface of the synchronous follow-up plate (5) is used for installing a load (a);
the horizontal movable plate (4) is of a rectangular frame structure, the inner space of the horizontal movable plate (4) is used for accommodating the load (a), and the X-axis movement mechanism (3) and the Y-axis movement mechanism (6) are connected to the outer space of the horizontal movable plate (4);
the X-axis movement mechanism (3) comprises an X-axis driving motor (301) connected to one side of the bottom surface of the connecting fixing plate (2) and an X-direction worm gear assembly (302) connected to the output end of the X-axis driving motor (301), and the side wall of one side of the horizontal movable plate (4) is in matched transmission with the output end of the X-direction worm gear assembly (302);
a Y-direction guide rail is arranged on the bottom surface of the horizontal movable plate (4), and a Y-direction slide rail matched with the Y-direction guide rail is arranged on the surface of the synchronous follow-up plate (5);
the Y-axis movement mechanism (6) comprises a Y-axis driving motor (601) arranged at one end of the surface of the synchronous follow-up plate (5) and a Y-direction worm gear assembly (602) connected to the output end of the Y-axis driving motor (601), and one end side wall of the horizontal movable plate (4) is in matched transmission with the output end of the Y-direction worm gear assembly (602).
2. The compact three-dimensional motion mechanism as claimed in claim 1, wherein the Z-axis motion mechanism (1) comprises a Z-axis drive motor (101), a Z-direction worm gear assembly (102) connected to the output end of the Z-axis drive motor (101), and one end of the connecting and fixing plate (2) is in transmission fit with the output end of the Z-direction worm gear assembly (102).
3. The compact three-dimensional motion mechanism as claimed in claim 2, wherein the Z-axis motion mechanism (1) further comprises a Z-direction guide rail (103) erected on the housing of the Z-axis driving motor (101), a Z-direction slider (104) slidably arranged in the Z-direction guide rail (103) and matched with the output end of the Z-direction worm gear assembly (102) for transmission, and the end of the Z-direction slider (104) is connected with the connecting and fixing plate (2).
4. The compact three-dimensional motion mechanism according to claim 3, wherein the Z-direction guide rail (103) is embodied as a dovetail groove guide rail, and the Z-direction slider (104) is embodied as a trapezoidal slider.
5. The compact three-dimensional movement mechanism according to claim 1, wherein the X-axis movement mechanism (3) further comprises an X-direction guide block (303) connected to the other side of the bottom surface of the fixed connection plate (2), a plurality of X-direction through holes (304) are formed in the surface of the X-direction guide block (303), and X-direction guide posts (401) which are matched with the X-direction through holes (304) to slide are inserted in the other side wall of the horizontal movable plate (4).
6. The compact three-dimensional motion mechanism as claimed in claim 1, wherein the Y-axis motion mechanism (6) further comprises a Y-directional guide block (603) disposed at the other end of the surface of the synchronous follow-up plate (5), a plurality of Y-directional through holes (604) are opened on the surface of the Y-directional guide block (603), and a Y-directional guide post (402) which is engaged with each Y-directional through hole (604) and slides is inserted on the other end side wall of the horizontal motion plate (4).
CN202010738581.4A 2020-07-28 2020-07-28 Compact three-dimensional motion mechanism Active CN111853196B (en)

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CN111421497A (en) * 2020-04-26 2020-07-17 上海联谊光纤激光器械有限公司 Ultrahigh-precision five-dimensional movement adjusting device with high bearing capacity

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