CN111850475B - Turning device and vacuum coating equipment - Google Patents
Turning device and vacuum coating equipment Download PDFInfo
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- CN111850475B CN111850475B CN201910351135.5A CN201910351135A CN111850475B CN 111850475 B CN111850475 B CN 111850475B CN 201910351135 A CN201910351135 A CN 201910351135A CN 111850475 B CN111850475 B CN 111850475B
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- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 16
- 230000007246 mechanism Effects 0.000 claims abstract description 45
- 230000007306 turnover Effects 0.000 claims abstract description 18
- 230000009471 action Effects 0.000 claims abstract description 17
- 230000001133 acceleration Effects 0.000 claims abstract description 11
- 230000005540 biological transmission Effects 0.000 claims description 75
- 230000000712 assembly Effects 0.000 claims description 9
- 238000000429 assembly Methods 0.000 claims description 9
- 238000005096 rolling process Methods 0.000 claims 1
- 230000000694 effects Effects 0.000 description 4
- 238000009434 installation Methods 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 230000005484 gravity Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 208000027418 Wounds and injury Diseases 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 208000014674 injury Diseases 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Braking Arrangements (AREA)
Abstract
The invention provides a turnover device, comprising: a support frame; the bearing structure is used for installing components and parts, and comprises a first pivot shaft and a second pivot shaft, and the bearing structure is rotatably arranged on the support frame through the first pivot shaft and the second pivot shaft; the driving mechanism is arranged on the support frame and positioned at the position of the first pivot shaft, and is in driving connection with the first pivot shaft so as to drive the carried structure to turn over; and the braking mechanism is arranged on the support frame and is positioned at the position of the second pivot shaft, and when the rotation angular acceleration of the pivot shaft is larger than a preset value, the braking piece of the braking mechanism moves to limit the rotation of the second pivot shaft so as to emergently brake the overturning action of the bearing structure. The invention solves the problems that the overturning action of the cover plate of the vacuum coating equipment in the prior art is difficult to control and can not be effectively braked, so that certain potential safety hazard exists.
Description
Technical Field
The invention relates to the technical field of vacuum coating supporting equipment, in particular to a turnover device for turning a cover plate in a vacuum chamber of vacuum coating equipment.
Background
The vacuum chamber of the vacuum coating equipment is internally provided with a cover plate generally, the cover plate is used for bearing and installing various components, and in order to ensure the practicability of the vacuum coating equipment, the components are required to be installed on the surfaces of two sides of the cover plate, and in order to facilitate the installation of the components, the cover plate is required to be overturned.
However, the cover plate of the vacuum coating equipment in the prior art has larger structural size and weight, has large rotational inertia in the overturning process, and is easy to accidentally injure operators when being quickly overturned under the action of self gravity once the cover plate is out of control, so that the prior vacuum coating equipment has certain hidden danger in use; how to provide a turnover device capable of effectively controlling the turnover action of a cover plate of vacuum coating equipment and reliably braking the cover plate is a problem to be solved in the prior art.
Disclosure of Invention
The invention mainly aims to provide a turnover device and vacuum coating equipment, which are used for solving the problems that the turnover action of a cover plate of the vacuum coating equipment in the prior art is difficult to control and cannot be effectively braked, so that a certain potential safety hazard exists.
In order to achieve the above object, according to one aspect of the present invention, there is provided a flipping device comprising: a support frame; the bearing structure is used for installing components and parts, and comprises a first pivot shaft and a second pivot shaft, and the bearing structure is rotatably arranged on the support frame through the first pivot shaft and the second pivot shaft; the driving mechanism is arranged on the support frame and positioned at the position of the first pivot shaft, and is in driving connection with the first pivot shaft so as to drive the carried structure to turn over; and the braking mechanism is arranged on the support frame and is positioned at the position of the second pivot shaft, and when the rotation angular acceleration of the pivot shaft is larger than a preset value, the braking piece of the braking mechanism moves to limit the rotation of the second pivot shaft so as to emergently brake the overturning action of the bearing structure.
Further, the drive mechanism includes a drive motor and a planetary gear set, wherein the planetary gear set includes: the gear ring is fixedly connected with the support frame; the sun gear is fixedly connected with the first pivot shaft; and the planetary gear is arranged in the gear ring and meshed with the gear ring and the sun gear at the same time, and the driving motor is in driving connection with the planetary gear.
Further, the planetary gears are multiple, the multiple planetary gears are arranged at intervals around the circumference of the sun gear, the multiple driving motors are arranged, and the multiple driving motors are in one-to-one driving connection with the multiple planetary gears.
Further, the braking mechanism includes: the first transmission gear is fixedly connected with the second pivot shaft; the second transmission gear is meshed with the first transmission gear, the second transmission gear is pivotally arranged on the support frame through the transmission shaft, and the second transmission gear is positioned at the first end of the transmission shaft; the ratchet assembly comprises a stop ratchet and a driving ratchet, wherein the stop ratchet is fixedly connected with the support frame, a plurality of ratchet grooves which are distributed in sequence around the circumference of the inner peripheral wall of the stop ratchet are formed in the inner peripheral wall of the stop ratchet, the driving ratchet is connected with the transmission shaft and is positioned at the second end of the transmission shaft, the driving ratchet is rotatably arranged in the stop ratchet, the driving ratchet comprises a pawl which is movably arranged, the pawl is used as a braking piece, when the angular acceleration of the pivoting shaft is larger than a preset value, the pawl moves towards the circumferential outer side of the driving ratchet under the action of centrifugal force and is selectively clamped and matched with one of the ratchet grooves so as to limit the rotation of the driving ratchet, the second transmission gear, the first transmission gear and the pivoting shaft, and the overturning action of the bearing structure is braked emergently.
Further, the driving ratchet wheel comprises a ratchet plate, an elastic telescopic piece and a pawl, the ratchet plate is fixedly arranged at the second end of the transmission shaft, an avoidance notch is formed in the ratchet plate, and the pawl is movably arranged at the avoidance notch and is connected with the ratchet plate through the elastic telescopic piece.
Further, a plurality of avoidance notches are formed on the ratchet plate, the number of the pawls is multiple, the pawls are arranged at the positions of the avoidance notches in a one-to-one correspondence mode, and the pawls are connected with the ratchet plate through an elastic telescopic piece.
Further, two second transmission gears are respectively arranged on two radial sides of the first transmission gear, and the two second transmission gears are connected with the two ratchet assemblies through two transmission shafts in a one-to-one correspondence manner, wherein the rotation setting directions of ratchet grooves of driving ratchet wheels of the two ratchet assemblies are opposite.
Further, two second transmission gears are arranged at intervals in the horizontal direction on both sides of the radial direction of the first transmission gear.
Further, the turnover device further comprises a bearing seat, the first pivot shaft and the second pivot shaft are both in pivot connection with the support frame through one bearing seat, and the transmission shaft is in pivot connection with the support frame through one bearing seat.
According to another aspect of the present invention, there is provided a vacuum coating apparatus including the above-described turnover device.
By applying the technical scheme of the invention, the turnover device is provided, and the bearing structure is rotatably installed on the support frame by utilizing the pivot shaft, so that the bearing structure can be turned up and down in a rotating manner, and further, an operator can conveniently install components on the upper surface and the lower surface of the bearing structure.
In addition, through setting up the actuating mechanism that is connected with the first pivot axle drive in the pivot axle, can realize effectively that the automation to bearing structure upset action is controlled, and be favorable to controlling bearing structure's rotation speed, rotation angle and stop position accurately.
Furthermore, by providing a braking mechanism in braking engagement with a second one of the pivot shafts, the braking mechanism is able to emergency brake the load-bearing structure in case of failure of the drive mechanism; thereby providing reliable safety work assurance for operators. Specifically, when actuating mechanism function became invalid, bearing structure can possess very big rotation angular acceleration in the twinkling of an eye under self gravity effect, have great moment of inertia promptly, under this circumstances, when pivot axis's rotation angular acceleration is greater than the default, braking mechanism's brake piece can effective motion and act on the second pivot axle, play the effect of stopping rotating to the second pivot axle, and then make bearing structure stop the upset, the condition emergence of the operating personnel of having avoided bearing structure under the quick upset of uncontrolled condition and injury, the operation installation assurance when operating personnel installs components and parts on bearing structure has been improved greatly.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention. In the drawings:
fig. 1 shows a schematic top view of a tilting device according to an alternative embodiment of the invention;
FIG. 2 shows a schematic front cross-sectional view of the flipping device of FIG. 1 at A-A;
FIG. 3 shows a schematic left view of the flipping unit of FIG. 1;
FIG. 4 shows a schematic left view of the flipping unit of FIG. 1 at a brake mechanism;
FIG. 5 shows a schematic right-hand view of the brake mechanism of the flipping unit of FIG. 1;
fig. 6 shows a schematic view of the structure of one of the ratchet assemblies and the drive shaft of the brake mechanism of fig. 5 in an assembled state.
Wherein the above figures include the following reference numerals:
10. a support frame; 20. a load bearing structure; 30. a pivot shaft; 31. a first pivot shaft; 32. a second pivot shaft; 40. a driving mechanism; 41. a driving motor; 42. a planetary gear set; 421. a gear ring; 422. a sun gear; 423. a planetary gear; 50. a braking mechanism; 51. a first transmission gear; 52. a second transmission gear; 53. a transmission shaft; 54. a ratchet assembly; 541. a stop ratchet; 542. an active ratchet; 543. ratchet tooth slot; 544. a pawl; 545. a ratchet plate; 546. an elastic expansion piece; 547. avoiding the notch; 60. and a bearing seat.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. The following description of at least one exemplary embodiment is merely exemplary in nature and is in no way intended to limit the invention, its application, or uses. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In order to solve the problems that the overturning action of a cover plate of vacuum coating equipment in the prior art is difficult to control and cannot be effectively braked to have a certain potential safety hazard, the invention provides a overturning device and vacuum coating equipment.
As shown in fig. 1 to 5, the turning device includes a support frame 10, a bearing structure 20, a pivot shaft 30, a driving mechanism 40 and a braking mechanism 50, the bearing structure 20 is used for mounting components, the pivot shaft 30 includes a first pivot shaft 31 and a second pivot shaft 32, the bearing structure 20 is rotatably disposed on the support frame 10 through the first pivot shaft 31 and the second pivot shaft 32, the driving mechanism 40 is disposed on the support frame 10 and located at the position of the first pivot shaft 31, the driving mechanism 40 is in driving connection with the first pivot shaft 31 to drive the bearing structure 20 to turn, the braking mechanism 50 is disposed on the support frame 10 and located at the position of the second pivot shaft 32, and when the rotational angular acceleration of the pivot shaft 30 is greater than a preset value, the braking member of the braking mechanism 50 moves to limit the rotation of the second pivot shaft 32, and the turning action of the bearing structure 20 is braked urgently.
The bearing structure 20 is rotatably mounted on the support frame 10 by using the pivot shaft 30, so that the bearing structure 20 can be turned up and down in a rotating manner, thereby facilitating the mounting of components on the upper and lower surfaces of the bearing structure 20 by an operator.
In addition, by providing the driving mechanism 40 in driving connection with the first pivot shaft 31 of the pivot shafts 30, it is possible to effectively realize the automatic control of the tilting action of the bearing structure 20, and it is advantageous to precisely control the rotational speed, rotational angle, and stop position of the bearing structure 20.
Furthermore, by providing the brake mechanism 50 in braking engagement with the second one 32 of the pivot shafts 30, the brake mechanism 50 is able to emergency brake the load bearing structure 20 in case of a failure of the drive mechanism 40; thereby providing reliable safety work assurance for operators. Specifically, when the function of the driving mechanism 40 fails, the bearing structure 20 has a very large rotational angular acceleration under the action of its own weight, that is, has a relatively large rotational inertia, in this case, when the rotational angular acceleration of the pivot shaft 30 is greater than a preset value, the braking member of the braking mechanism 50 can effectively move and act on the second pivot shaft 32, so as to play a role in stopping rotation of the second pivot shaft 32, and further, the bearing structure 20 stops turning, so that the situation that the bearing structure 20 is quickly turned over under the uncontrolled condition to injure an operator is avoided, and the operation installation assurance of the operator when installing components on the bearing structure 20 is greatly improved.
It should be noted that, as an embodiment similar to the above-mentioned structure of the pivot shaft 30 including the first pivot shaft 31 and the second pivot shaft 32, the pivot shaft 30 is one, two ends of the pivot shaft 30 respectively protrude from the surfaces of two opposite sides of the bearing structure 20 to form pivot ends, and the two pivot ends function as the first pivot shaft 31 and the second pivot shaft 32, which is also within the scope of protection of the present application.
As shown in fig. 1 to 3, the driving mechanism 40 includes a driving motor 41 and a planetary gear set 42, wherein the planetary gear set 42 includes a ring gear 421, a sun gear 422 and a planetary gear 423, the ring gear 421 is fixedly connected with the support frame 10, the sun gear 422 is fixedly connected with the first pivot shaft 31, the planetary gear 423 is disposed in the ring gear 421 and simultaneously engaged with the ring gear 421 and the sun gear 422, and wherein the driving motor 41 is drivingly connected with the planetary gear 423. In this way, the driving motor 41 can drive the planetary gear 423 to rotate, and the gear ring 421 is fixedly connected with the support frame 10, so that the planetary gear 423 and the driving motor 41 can drive the sun gear 422 to rotate while rotating in the rotating gear ring 421, and the rotation of the sun gear 422 can provide a rotation moment for the bearing structure 20 to drive the bearing structure 20 to rotate along a first rotation direction or a second rotation direction opposite to the first rotation direction, so as to realize reliable overturning of the bearing structure 20.
In order to achieve the effect of stably overturning the driving bearing structure 20, optionally, the number of the planetary gears 423 is multiple, the plurality of planetary gears 423 are arranged around the circumference of the sun gear 422 at intervals, the number of the driving motors 41 is multiple, and the plurality of driving motors 41 are in one-to-one driving connection with the plurality of planetary gears 423. The plurality of planetary gears 423 rotate synchronously around the circumference of the sun gear 422 and have the same rotation speed.
In the illustrated embodiment of the present application, the planetary gear 423 and the driving motor 41 are two in one-to-one driving connection. In this way, the overall cost of the upender can be effectively controlled while achieving stable upending of the drive carrying structure 20.
As shown in fig. 4 to 6, the brake mechanism 50 includes a first transmission gear 51, a second transmission gear 52, a transmission shaft 53 and a ratchet assembly 54, the first transmission gear 51 is fixedly connected with the second pivot shaft 32, the second transmission gear 52 is meshed with the first transmission gear 51, the second transmission gear 52 is pivotably disposed on the support frame 10 through the transmission shaft 53, and the second transmission gear 52 is located at a first end of the transmission shaft 53, the ratchet assembly 54 includes a stopping ratchet 541 and an active ratchet 542, wherein the stopping ratchet 541 is fixedly connected with the support frame 10, an inner peripheral wall of the stopping ratchet 541 is formed with a plurality of ratchet grooves 543 sequentially distributed around a periphery thereof, the active ratchet 542 is connected with the transmission shaft 53 and located at a second end of the transmission shaft 53, the active ratchet 542 is rotatably disposed in the stopping ratchet 541, the active ratchet 542 includes a movably disposed pawl 544 as a brake, and the pawl 544 moves toward the periphery of the pawl 542 under a centrifugal force and selectively engages with one of the plurality of ratchet grooves 543 under the centrifugal force to limit the turning-over of the driving ratchet 542, the first gear 52 and the first pivot shaft 20, and the pivoting structure 20 bearing the pivoting motion of the driving ratchet 542.
It should be noted that, when the carrying structure 20 is turned over normally, the rotation of the carrying structure 20 drives the first transmission gear 51 to rotate synchronously through the second pivot shaft 32, the first transmission gear 51 is meshed with the second transmission gear 52 to drive the second transmission gear 52 to rotate, and the second transmission gear 52 drives the ratchet assembly 54 to rotate synchronously through the transmission shaft 53; in an emergency situation where the function of the driving mechanism 40 fails, the driving shaft of the driving mechanism 40 fails to be connected with the driving connection of the planetary gear 423, at this time, the carrying structure 20 has a very large rotational angular acceleration under the action of its own weight, that is, has a relatively large rotational inertia, and the rotational inertia is sequentially transmitted to the ratchet assembly 54 through the second pivot shaft 32, the first transmission gear 51 and the second transmission gear 52, and the ratchet assembly 54 has a relatively large rotational inertia, where the pawl 544 of the driving ratchet 542 of the ratchet assembly 54 moves to the peripheral side of the driving ratchet 542 under the action of centrifugal force and selectively engages with one of the plurality of ratchet grooves 543 of the stopping ratchet 541, so that the stopping ratchet 541 plays a role in limiting the rotation of the driving ratchet 542, and the driving ratchet 542 synchronously limits the rotation of the second transmission gear 52, the first transmission gear 51 and the second pivot shaft 32 through the transmission shaft 53, so that the carrying structure 20 stops the overturning action.
Specifically, as shown in fig. 6, the driving ratchet 542 includes a ratchet plate 545, an elastic expansion member 546 and a pawl 544, the ratchet plate 545 is fixedly disposed at the second end of the transmission shaft 53, a relief notch 547 is formed in the ratchet plate 545, and the pawl 544 is movably disposed at the relief notch 547 and connected to the ratchet plate 545 through the elastic expansion member 546.
Optionally, the pawl 544 is connected to the ratchet plate 545 by a pin.
In order to improve the overturning braking effect of the braking mechanism 50 on the bearing structure 20, a plurality of avoidance notches 547 are formed on the ratchet disc 545, a plurality of pawls 544 are provided, the plurality of pawls 544 are arranged at the plurality of avoidance notches 547 in a one-to-one correspondence manner, and each pawl 544 is connected with the ratchet disc 545 through an elastic telescopic piece 546.
Optionally, the elastic telescoping member 546 is a tension spring. Thus, the cost of the braking mechanism 50 can be controlled, the economy of the turnover device is improved, and the braking mechanism 50 is simple in structure and convenient to assemble.
As shown in fig. 5, the two second transmission gears 52 are respectively located at two radial sides of the first transmission gear 51, and the two second transmission gears 52 are connected with the two ratchet assemblies 54 through the two transmission shafts 53 in a one-to-one correspondence manner, wherein the rotation setting directions of the ratchet grooves 543 of the driving ratchet 542 of the two ratchet assemblies 54 are opposite. In this way, the two ratchet assemblies 54 act as a brake to the carrier structure 20 as the carrier structure 20 rotates in the first and second rotational directions, respectively.
As shown in fig. 4, two second transmission gears 52 are provided at intervals in the horizontal direction on both sides in the radial direction of the first transmission gear 51. In this way, the installation of two second transfer gears 52 and two ratchet assemblies 54 is facilitated.
As shown in fig. 1, 3 and 6, the turning device further includes a bearing block 60, and the first pivot shaft 31 and the second pivot shaft 32 are pivotally connected to the support frame 10 through one bearing block 60, and the transmission shaft 53 is pivotally connected to the support frame 10 through one bearing block 60. In this way, the rotational reliability of the first pivot shaft 31, the second pivot shaft 32, and the transmission shaft 53 is ensured.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments in accordance with the present application. As used herein, the singular is also intended to include the plural unless the context clearly indicates otherwise, and furthermore, it is to be understood that the terms "comprises" and/or "comprising" when used in this specification are taken to specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof.
The above description is only of the preferred embodiments of the present invention and is not intended to limit the present invention, but various modifications and variations can be made to the present invention by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (8)
1. A turnover device is characterized in that,
comprising the following steps:
a support (10);
-a carrying structure (20) and a pivot shaft (30), the carrying structure (20) being for mounting components, the pivot shaft (30) comprising a first pivot shaft (31) and a second pivot shaft (32), the carrying structure (20) being rotatably arranged on the support frame (10) by means of the first pivot shaft (31) and the second pivot shaft (32);
the driving mechanism (40) is arranged on the support frame (10) and positioned at the position of the first pivot shaft (31), and the driving mechanism (40) is in driving connection with the first pivot shaft (31) so as to drive the carried structure (20) to turn over;
a braking mechanism (50), the braking mechanism (50) is arranged on the supporting frame (10) and is positioned at the position of the second pivot shaft (32), when the rotation angular acceleration of the pivot shaft (30) is larger than a preset value, a braking piece of the braking mechanism (50) moves to limit the rotation of the second pivot shaft (32) so as to emergently brake the overturning action of the bearing structure (20);
the drive mechanism (40) comprises a drive motor (41) and a planetary gear set (42), wherein the planetary gear set (42) comprises:
the gear ring (421), the said gear ring (421) is fixedly connected with said support frame (10);
a sun gear (422), the sun gear (422) being fixedly connected with the first pivot shaft (31);
a planetary gear (423), wherein the planetary gear (423) is arranged in the gear ring (421) and simultaneously meshes with the gear ring (421) and the sun gear (422), and the driving motor (41) is in driving connection with the planetary gear (423);
the brake mechanism (50) includes:
a first transmission gear (51), the first transmission gear (51) being fixedly connected with the second pivot shaft (32);
a second transmission gear (52) and a transmission shaft (53), wherein the second transmission gear (52) is meshed with the first transmission gear (51), the second transmission gear (52) is pivotably arranged on the support frame (10) through the transmission shaft (53), and the second transmission gear (52) is positioned at a first end of the transmission shaft (53);
the ratchet assembly (54), the ratchet assembly (54) includes stopping ratchet (541) and initiative ratchet (542), wherein, stopping ratchet (541) with support frame (10) fixed connection, the inner circumference wall of stopping ratchet (541) is formed with a plurality of ratchet grooves (543) that distribute around its circumference in proper order, initiative ratchet (542) with transmission shaft (53) are connected and are located the second end of transmission shaft (53), initiative ratchet (542) rotationally set up in stopping ratchet (541), initiative ratchet (542) include movable pawl (544) that set up, pawl (544) are as the arresting member, when the angular acceleration of pivot axle (30) is greater than the default, pawl (544) are under centrifugal force to the circumference outside of initiative ratchet (542) remove and selectively with one of a plurality of ratchet grooves (543) joint cooperation in order to restrict initiative ratchet (542), second transmission gear (52), first gear and pivot axle (51) are to the pivot axle (20) is rotated and is carried the structure of rolling over.
2. The turning device according to claim 1, wherein,
the planetary gears (423) are multiple, the multiple planetary gears (423) are arranged around the sun gear (422) at intervals in the circumferential direction, the multiple driving motors (41) are arranged, and the multiple driving motors (41) are in one-to-one driving connection with the multiple planetary gears (423).
3. The turning device according to claim 1, wherein,
the driving ratchet wheel (542) comprises a ratchet wheel disc (545), an elastic telescopic piece (546) and a pawl (544), the ratchet wheel disc (545) is fixedly arranged at the second end of the transmission shaft (53), an avoidance gap (547) is formed in the ratchet wheel disc (545), and the pawl (544) is movably arranged at the avoidance gap (547) and connected with the ratchet wheel disc (545) through the elastic telescopic piece (546).
4. The turnover device of claim 3, wherein the turnover device comprises a turnover device,
the ratchet plate (545) is provided with a plurality of avoidance notches (547), the number of the pawls (544) is multiple, the pawls (544) are arranged at the positions of the avoidance notches (547) in a one-to-one correspondence manner, and each pawl (544) is connected with the ratchet plate (545) through one elastic telescopic piece (546).
5. The turning device according to any one of claims 1, 3 to 4, wherein,
the two second transmission gears (52) are respectively positioned at two radial sides of the first transmission gear (51), the two second transmission gears (52) are connected with the two ratchet assemblies (54) through the two transmission shafts (53) in a one-to-one correspondence mode, and the rotation setting directions of ratchet grooves (543) of driving ratchet wheels (542) of the two ratchet assemblies (54) are opposite.
6. The flipping unit according to claim 5, wherein,
the two second transmission gears (52) are arranged at intervals along the horizontal direction on two radial sides of the first transmission gear (51).
7. The turning device according to claim 1, wherein,
the turnover device further comprises a bearing seat (60), the first pivot shaft (31) and the second pivot shaft (32) are both in pivot connection with the support frame (10) through one bearing seat (60), and the transmission shaft (53) is in pivot connection with the support frame (10) through one bearing seat (60).
8. A vacuum coating device is characterized in that,
comprising a flipping device according to any one of claims 1 to 7.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910351135.5A CN111850475B (en) | 2019-04-28 | 2019-04-28 | Turning device and vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910351135.5A CN111850475B (en) | 2019-04-28 | 2019-04-28 | Turning device and vacuum coating equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111850475A CN111850475A (en) | 2020-10-30 |
| CN111850475B true CN111850475B (en) | 2024-03-22 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910351135.5A Active CN111850475B (en) | 2019-04-28 | 2019-04-28 | Turning device and vacuum coating equipment |
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| Country | Link |
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| CN (1) | CN111850475B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112877667B (en) * | 2021-01-11 | 2022-11-25 | 安徽工业大学 | Sample turning device in vacuum coating |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB631361A (en) * | 1946-06-06 | 1949-11-01 | Aron Kolko | Automatically variable speed transmission gear |
| GB856620A (en) * | 1956-05-25 | 1960-12-21 | Aspro Nicholas Ltd | Improvements in and relating to package fabricating machines |
| JP2011063845A (en) * | 2009-09-17 | 2011-03-31 | Fujifilm Corp | Workpiece-reversing unit |
| DE102011083934A1 (en) * | 2011-09-30 | 2013-04-04 | Induflex Robert Morgan, E.K. | Device for transporting container, has introduction teeth that are attached to turntable around pivot such that introduction teeth are moved at speed corresponding to preset speed of turntable |
| WO2015096820A1 (en) * | 2013-12-29 | 2015-07-02 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Process chamber and semiconductor processing apparatus |
-
2019
- 2019-04-28 CN CN201910351135.5A patent/CN111850475B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB631361A (en) * | 1946-06-06 | 1949-11-01 | Aron Kolko | Automatically variable speed transmission gear |
| GB856620A (en) * | 1956-05-25 | 1960-12-21 | Aspro Nicholas Ltd | Improvements in and relating to package fabricating machines |
| JP2011063845A (en) * | 2009-09-17 | 2011-03-31 | Fujifilm Corp | Workpiece-reversing unit |
| DE102011083934A1 (en) * | 2011-09-30 | 2013-04-04 | Induflex Robert Morgan, E.K. | Device for transporting container, has introduction teeth that are attached to turntable around pivot such that introduction teeth are moved at speed corresponding to preset speed of turntable |
| WO2015096820A1 (en) * | 2013-12-29 | 2015-07-02 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Process chamber and semiconductor processing apparatus |
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| Publication number | Publication date |
|---|---|
| CN111850475A (en) | 2020-10-30 |
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