CN111850475A - Turning device and vacuum coating equipment - Google Patents
Turning device and vacuum coating equipment Download PDFInfo
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- CN111850475A CN111850475A CN201910351135.5A CN201910351135A CN111850475A CN 111850475 A CN111850475 A CN 111850475A CN 201910351135 A CN201910351135 A CN 201910351135A CN 111850475 A CN111850475 A CN 111850475A
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- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 17
- 230000007246 mechanism Effects 0.000 claims abstract description 51
- 230000009471 action Effects 0.000 claims abstract description 23
- 230000007306 turnover Effects 0.000 claims abstract description 17
- 230000001133 acceleration Effects 0.000 claims abstract description 12
- 230000005540 biological transmission Effects 0.000 claims description 76
- 230000000712 assembly Effects 0.000 claims description 8
- 238000000429 assembly Methods 0.000 claims description 8
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 238000009434 installation Methods 0.000 description 5
- 230000005484 gravity Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
Abstract
The invention provides a turnover device, comprising: a support frame; the bearing structure is used for mounting components and comprises a first pivot shaft and a second pivot shaft, and the bearing structure is rotatably arranged on the support frame through the first pivot shaft and the second pivot shaft; the driving mechanism is arranged on the support frame and positioned at the position of the first pivot shaft, and the driving mechanism is in driving connection with the first pivot shaft so as to drive the loaded structure to overturn; and the braking mechanism is arranged on the support frame and positioned at the position of the second pivot shaft, and when the rotation angular acceleration of the pivot shaft is greater than a preset value, a braking part of the braking mechanism moves to limit the rotation of the second pivot shaft so as to emergently brake the overturning action of the bearing structure. The invention solves the problems that the turning action of the cover plate of the vacuum coating equipment in the prior art is difficult to control and cannot be effectively braked so as to have certain potential safety hazard.
Description
Technical Field
The invention relates to the technical field of vacuum coating matching equipment, in particular to a turnover device for turning over a cover plate in a vacuum chamber of vacuum coating equipment.
Background
The cover plate is usually arranged in a vacuum cavity of the vacuum coating equipment and used for bearing and installing various components, the components are required to be installed on the surfaces of the two sides of the cover plate in order to guarantee the practicability of the vacuum coating equipment, and the cover plate is required to be overturned in order to facilitate the installation of the components.
However, the cover plate of the vacuum coating equipment in the prior art has large structural size and weight, and has large moment of inertia in the overturning process, and once the cover plate is out of control, the cover plate can be quickly overturned under the action of self gravity to easily hurt operators by mistake, so that the existing vacuum coating equipment has certain potential safety hazards in use; how to provide a turnover device which can effectively control the turnover action of the cover plate of the vacuum coating equipment and can reliably brake the cover plate becomes a problem to be solved in the prior art.
Disclosure of Invention
The invention mainly aims to provide a turnover device and vacuum coating equipment, and aims to solve the problems that the turnover action of a cover plate of the vacuum coating equipment in the prior art is difficult to control and cannot be effectively braked, so that certain potential safety hazards exist.
In order to achieve the above object, according to one aspect of the present invention, there is provided a turnover device including: a support frame; the bearing structure is used for mounting components and comprises a first pivot shaft and a second pivot shaft, and the bearing structure is rotatably arranged on the support frame through the first pivot shaft and the second pivot shaft; the driving mechanism is arranged on the support frame and positioned at the position of the first pivot shaft, and the driving mechanism is in driving connection with the first pivot shaft so as to drive the loaded structure to overturn; and the braking mechanism is arranged on the support frame and positioned at the position of the second pivot shaft, and when the rotation angular acceleration of the pivot shaft is greater than a preset value, a braking part of the braking mechanism moves to limit the rotation of the second pivot shaft so as to emergently brake the overturning action of the bearing structure.
Further, the driving mechanism includes a driving motor and a planetary gear set, wherein the planetary gear set includes: the gear ring is fixedly connected with the support frame; the sun gear is fixedly connected with the first pivot shaft; and the planetary gear is arranged in the gear ring and is simultaneously meshed with the gear ring and the sun gear, and the driving motor is in driving connection with the planetary gear.
Furthermore, the number of the planet gears is multiple, the planet gears are arranged at intervals around the circumference of the sun gear, the number of the driving motors is multiple, and the driving motors are in one-to-one corresponding driving connection with the planet gears.
Further, the brake mechanism includes: the first transmission gear is fixedly connected with the second pivot shaft; the second transmission gear is meshed with the first transmission gear and can be pivotally arranged on the support frame through the transmission shaft, and the second transmission gear is positioned at the first end of the transmission shaft; the ratchet wheel assembly comprises a stopping ratchet wheel and a driving ratchet wheel, wherein the stopping ratchet wheel is fixedly connected with the support frame, a plurality of ratchet grooves are formed in the inner peripheral wall of the stopping ratchet wheel and sequentially distributed around the circumferential direction of the stopping ratchet wheel, the driving ratchet wheel is connected with the transmission shaft and located at the second end of the transmission shaft, the driving ratchet wheel is rotatably arranged in the stopping ratchet wheel and comprises a movably arranged pawl, the pawl is used as a braking piece, and when the angular acceleration of the pivot shaft is larger than a preset value, the pawl moves towards the circumferential outer side of the driving ratchet wheel under the action of centrifugal force and is selectively in clamping fit with one of the ratchet grooves to limit the rotation of the driving ratchet wheel, the second transmission gear, the first transmission gear and the pivot shaft, so that the overturning action of the bearing.
Furthermore, the active ratchet wheel comprises a ratchet wheel disc, an elastic telescopic piece and a pawl, the ratchet wheel disc is fixedly arranged at the second end of the transmission shaft, an avoiding gap is formed in the ratchet wheel disc, and the pawl is movably arranged at the avoiding gap and connected with the ratchet wheel disc through the elastic telescopic piece.
Furthermore, a plurality of avoidance notches are formed in the ratchet wheel disc, the pawls are multiple, the pawls are arranged at the avoidance notches in a one-to-one correspondence mode, and each pawl is connected with the ratchet wheel disc through an elastic telescopic piece.
Furthermore, the number of the second transmission gears is two, the two second transmission gears are respectively positioned on two radial sides of the first transmission gear, the two second transmission gears are connected with the two ratchet wheel assemblies through the two transmission shafts in a one-to-one correspondence manner, and the rotation setting directions of ratchet grooves of driving ratchet wheels of the two ratchet wheel assemblies are opposite.
Further, two second transmission gears are arranged on two radial sides of the first transmission gear at intervals along the horizontal direction.
Furthermore, the turnover device further comprises a bearing seat, the first pivot shaft and the second pivot shaft are both in pivot connection with the support frame through one bearing seat, and the transmission shaft is in pivot connection with the support frame through one bearing seat.
According to another aspect of the invention, a vacuum coating device is provided, which comprises the turning device.
By applying the technical scheme provided by the invention, the turnover device is provided, and the bearing structure is rotatably arranged on the support frame by utilizing the pivot shaft, so that the bearing structure can be turned over up and down in a rotating manner, and further, an operator can conveniently install components on the upper surface and the lower surface of the bearing structure.
In addition, through setting up the actuating mechanism who is connected with the drive of first pivot axle in the pivot axle, can realize effectively carrying structure the automated control of upset action, and be favorable to accurately controlling the slew velocity, the turned angle and the stop position of carrying structure.
Moreover, by providing a braking mechanism in braking cooperation with a second one of the pivot axes, the braking mechanism can perform emergency braking on the carrying structure in case of a failure of the function of the driving mechanism; thereby providing reliable and safe operation guarantee for operators. Particularly, when actuating mechanism functional failure, bearing structure can possess very big rotation angular acceleration under self action of gravity in the twinkling of an eye, great inertia has promptly, under this condition, when the rotation angular acceleration of pivotal axis is greater than the default, the arresting member of arrestment mechanism can effective motion and act on the second pivotal axis, play the effect of splining to the second pivotal axis, and then make bearing structure stop the upset, avoided bearing structure to overturn fast under uncontrolled condition and hurt operating personnel's situation emergence, the operation installation assurance when having improved operating personnel installation components and parts on bearing structure greatly.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this application, illustrate embodiments of the invention and, together with the description, serve to explain the invention and not to limit the invention. In the drawings:
fig. 1 shows a schematic top view of a turning device according to an alternative embodiment of the invention;
FIG. 2 shows a front cross-sectional view at A-A of the flipping mechanism of FIG. 1;
FIG. 3 shows a schematic left side view of the flipping unit of FIG. 1;
FIG. 4 shows a schematic left view at the brake mechanism of the flipping mechanism of FIG. 1;
FIG. 5 shows a schematic view from the right at the brake mechanism of the flipping mechanism of FIG. 1;
FIG. 6 is a schematic view of the ratchet assembly and drive shaft of the brake mechanism of FIG. 5 in an assembled state.
Wherein the figures include the following reference numerals:
10. a support frame; 20. a load bearing structure; 30. a pivotal shaft; 31. a first pivot shaft; 32. a second pivot shaft; 40. a drive mechanism; 41. a drive motor; 42. a planetary gear set; 421. a ring gear; 422. a sun gear; 423. a planetary gear; 50. a brake mechanism; 51. a first drive gear; 52. a second transmission gear; 53. a drive shaft; 54. a ratchet assembly; 541. a stop ratchet; 542. an active ratchet wheel; 543. a ratchet groove; 544. a pawl; 545. a ratchet wheel disc; 546. an elastic extensible member; 547. avoiding the notch; 60. and a bearing seat.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the invention, its application, or uses. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In order to solve the problems that the turning action of a cover plate of vacuum coating equipment in the prior art is difficult to control and cannot be effectively braked so as to have certain potential safety hazards, the invention provides a turning device and the vacuum coating equipment, and the vacuum coating equipment comprises the turning device.
As shown in fig. 1 to 5, the turnover device includes a support frame 10, a bearing structure 20, a pivot shaft 30, a driving mechanism 40 and a braking mechanism 50, wherein the bearing structure 20 is used for mounting components, the pivot shaft 30 includes a first pivot shaft 31 and a second pivot shaft 32, the bearing structure 20 is rotatably disposed on the support frame 10 through the first pivot shaft 31 and the second pivot shaft 32, the driving mechanism 40 is disposed on the support frame 10 and located at a position of the first pivot shaft 31, the driving mechanism 40 is drivingly connected with the first pivot shaft 31 to drive the bearing structure 20 to turn over, the braking mechanism 50 is disposed on the support frame 10 and located at a position of the second pivot shaft 32, when a rotational angular acceleration of the pivot shaft 30 is greater than a preset value, a braking member of the braking mechanism 50 moves to limit rotation of the second pivot shaft 32, and emergency braking is performed on a turning action of the bearing structure 20.
The bearing structure 20 is rotatably mounted on the supporting frame 10 by the pivot shaft 30, so that the bearing structure 20 can be turned up and down in a rotating manner, and thus, an operator can conveniently mount components on the upper surface and the lower surface of the bearing structure 20.
In addition, by providing the driving mechanism 40 in driving connection with the first pivot shaft 31 of the pivot shafts 30, automatic control of the turning action of the bearing structure 20 can be effectively achieved, and the rotation speed, the rotation angle and the stop position of the bearing structure 20 can be controlled accurately.
Furthermore, by providing a braking mechanism 50 in braking engagement with the second one of the pivot shafts 30 32, the braking mechanism 50 is able to provide emergency braking of the load bearing structure 20 in the event of a failure of the drive mechanism 40; thereby providing reliable and safe operation guarantee for operators. Specifically, when the driving mechanism 40 fails, the carrying structure 20 may have a large rotation angular acceleration instantaneously under the action of its own gravity, that is, a large rotation inertia, in this case, when the rotation angular acceleration of the pivot shaft 30 is greater than a preset value, the braking member of the braking mechanism 50 can effectively move and act on the second pivot shaft 32 to stop the rotation of the second pivot shaft 32, so that the carrying structure 20 stops overturning, the situation that the carrying structure 20 is quickly overturned under an uncontrolled condition to hurt an operator is avoided, and the work and installation guarantee of the operator when installing components on the carrying structure 20 is greatly improved.
It should be noted that, as an embodiment similar to the above-mentioned structure form of the pivot shaft 30 including the first pivot shaft 31 and the second pivot shaft 32, the pivot shaft 30 is a single pivot shaft, two ends of the pivot shaft 30 respectively protrude from the surfaces of the two opposite sides of the bearing structure 20 to form pivot ends, and the two pivot ends have the same function as the first pivot shaft 31 and the second pivot shaft 32, and this embodiment is also within the protection scope of the present application.
As shown in fig. 1 to 3, the driving mechanism 40 includes a driving motor 41 and a planetary gear set 42, wherein the planetary gear set 42 includes a ring gear 421, a sun gear 422 and a planetary gear 423, the ring gear 421 is fixedly connected with the supporting frame 10, the sun gear 422 is fixedly connected with the first pivot shaft 31, the planetary gear 423 is disposed in the ring gear 421 and is simultaneously meshed with the ring gear 421 and the sun gear 422, and the driving motor 41 is drivingly connected with the planetary gear 423. In this way, the driving motor 41 can drive the planetary gear 423 to rotate, and the ring gear 421 is fixedly connected with the supporting frame 10 and cannot rotate, so that the planetary gear 423 and the driving motor 41 can drive the sun gear 422 to rotate while rotating the ring gear 421, the rotation of the sun gear 422 can provide a rotation torque for the bearing structure 20, and the bearing structure 20 is driven to rotate along a first rotation direction or a second rotation direction opposite to the first rotation direction, so as to realize reliable overturning of the bearing structure 20.
In order to achieve the effect of stably overturning the driving bearing structure 20, optionally, the number of the planetary gears 423 is multiple, the multiple planetary gears 423 are arranged at intervals around the circumference of the sun gear 422, the number of the driving motors 41 is multiple, and the multiple driving motors 41 are in one-to-one driving connection with the multiple planetary gears 423. Note that the plurality of planetary gears 423 rotate synchronously in the circumferential direction of the sun gear 422 at the same rotational speed.
In the illustrated embodiment of the present application, the planetary gears 423 and the driving motors 41 are two in one-to-one driving connection. In this way, the overall cost of the turnover device can be effectively controlled while achieving stable turnover of the drive bearing structure 20.
As shown in fig. 4 to 6, the braking mechanism 50 includes a first transmission gear 51, a second transmission gear 52, a transmission shaft 53 and a ratchet assembly 54, the first transmission gear 51 is fixedly connected with the second pivot shaft 32, the second transmission gear 52 is meshed with the first transmission gear 51, the second transmission gear 52 is pivotally disposed on the support frame 10 through the transmission shaft 53, the second transmission gear 52 is disposed at a first end of the transmission shaft 53, the ratchet assembly 54 includes a stopping ratchet 541 and a driving ratchet 542, wherein the stopping ratchet 541 is fixedly connected with the support frame 10, an inner peripheral wall of the stopping ratchet 541 is formed with a plurality of ratchet grooves 543 sequentially distributed around a circumferential direction thereof, the driving ratchet 542 is connected with the transmission shaft 53 and is disposed at a second end of the transmission shaft 53, the driving ratchet 542 is rotatably disposed in the stopping ratchet 541, the driving ratchet 542 includes a movably disposed pawl 544, and the pawl 544 serves as a braking member, when the angular acceleration of the pivot shaft 30 is greater than the predetermined value, the pawl 544 moves outward in the circumferential direction of the driving ratchet 542 under the action of centrifugal force and selectively engages with one of the plurality of ratchet grooves 543 to limit the rotation of the driving ratchet 542, the second transmission gear 52, the first transmission gear 51 and the pivot shaft 30, so as to perform an emergency braking action on the tilting action of the bearing structure 20.
It should be noted that, when the carrying structure 20 is normally turned over, the rotation of the carrying structure 20 drives the first transmission gear 51 to synchronously rotate through the second pivot shaft 32, the first transmission gear 51 is meshed with the second transmission gear 52 to drive the second transmission gear 52 to rotate, and the second transmission gear 52 drives the ratchet assembly 54 to synchronously rotate through the transmission shaft 53; when the driving mechanism 40 fails in an emergency, the driving shaft of the driving mechanism 40 fails to be in driving connection with the planetary gear 423, and at this time, the carrying structure 20 instantly has a large rotational angular acceleration under the action of its own gravity, that is, has a large rotational inertia, which is transmitted to the ratchet assembly 54 sequentially through the second pivot shaft 32, the first transmission gear 51, and the second transmission gear 52, and when the ratchet assembly 54 has a large rotational inertia, the pawl 544 of the driving ratchet 542 of the ratchet assembly 54 moves to the circumferential outer side of the driving ratchet 542 under the action of centrifugal force and is selectively in snap-fit with one of the plurality of ratchet grooves 543 of the stopping ratchet 541, so that the stopping ratchet 541 plays a role in limiting the rotation of the driving ratchet 542, and the driving ratchet 542 synchronously limits the rotation of the second transmission gear 52, the first transmission gear 51, and the second pivot shaft 32 through the transmission shaft 53, thereby stopping the turning action of the carrying structure 20.
Specifically, as shown in fig. 6, the active ratchet 542 includes a ratchet plate 545, an elastic expansion member 546 and pawls 544, the ratchet plate 545 is fixedly disposed at the second end of the transmission shaft 53, an avoidance gap 547 is formed on the ratchet plate 545, and the pawls 544 are movably disposed at the avoidance gap 547 and connected to the ratchet plate 545 through the elastic expansion member 546.
Optionally, pawls 544 are connected to ratchet plate 545 by pins.
In order to improve the tilting braking effect of the braking mechanism 50 on the carrying structure 20, a plurality of avoidance notches 547 are formed in the ratchet wheel 545, a plurality of pawls 544 are formed, the plurality of pawls 544 are correspondingly arranged at the avoidance notches 547, and each pawl 544 is connected with the ratchet wheel 545 through one elastic expansion piece 546.
Optionally, the resilient bellows 546 is a tension spring. Thus, not only can the cost of the braking mechanism 50 be controlled and the economy of the turnover device be improved, but also the structure of the braking mechanism 50 is simple and the assembly is convenient.
As shown in fig. 5, there are two second transmission gears 52, the two second transmission gears 52 are respectively located at two sides of the first transmission gear 51 in the radial direction, and the two second transmission gears 52 are connected to the two ratchet assemblies 54 through the two transmission shafts 53 in a one-to-one correspondence manner, wherein the rotation directions of the ratchet grooves 543 of the driving ratchet wheels 542 of the two ratchet assemblies 54 are opposite. Thus, the two ratchet assemblies 54 act as brakes for the carrier structure 20 when the carrier structure 20 rotates in the first and second rotational directions, respectively.
As shown in fig. 4, two second transmission gears 52 are provided at intervals in the horizontal direction on both sides in the radial direction of the first transmission gear 51. In this way, the installation of the two second drive gears 52 and the two ratchet assemblies 54 is facilitated.
As shown in fig. 1, 3 and 6, the turning device further includes a bearing seat 60, the first pivot shaft 31 and the second pivot shaft 32 are both pivotally connected to the support frame 10 through one bearing seat 60, and the transmission shaft 53 is pivotally connected to the support frame 10 through one bearing seat 60. In this way, the rotational reliability of the first pivot shaft 31, the second pivot shaft 32, and the transmission shaft 53 is ensured.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments according to the present application. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof, unless the context clearly indicates otherwise.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A turnover device, comprising:
a support frame (10);
the bearing structure (20) is used for mounting components, the pivot shaft (30) comprises a first pivot shaft (31) and a second pivot shaft (32), and the bearing structure (20) is rotatably arranged on the support frame (10) through the first pivot shaft (31) and the second pivot shaft (32);
a driving mechanism (40), wherein the driving mechanism (40) is arranged on the supporting frame (10) and is positioned at the position of the first pivot shaft (31), and the driving mechanism (40) is in driving connection with the first pivot shaft (31) to drive the carried structure (20) to overturn;
the braking mechanism (50) is arranged on the support frame (10) and located at the position of the second pivot shaft (32), and when the rotation angular acceleration of the pivot shaft (30) is larger than a preset value, a braking part of the braking mechanism (50) moves to limit the rotation of the second pivot shaft (32) so as to emergently brake the overturning action of the bearing structure (20).
2. The flipping device according to claim 1, wherein the drive mechanism (40) comprises a drive motor (41) and a planetary gear set (42), wherein the planetary gear set (42) comprises:
The gear ring (421), the gear ring (421) is fixedly connected with the supporting frame (10);
a sun gear (422), the sun gear (422) being fixedly connected with the first pivot shaft (31);
a planetary gear (423), wherein the planetary gear (423) is arranged in the ring gear (421) and is meshed with the ring gear (421) and the sun gear (422), and the driving motor (41) is in driving connection with the planetary gear (423).
3. The overturning device according to claim 2, wherein the planetary gear (423) is provided in plurality, the planetary gears (423) are arranged around the sun gear (422) at intervals in the circumferential direction, the driving motor (41) is provided in plurality, and the driving motors (41) are in one-to-one driving connection with the planetary gears (423).
4. The flipping mechanism according to claim 1, wherein the braking mechanism (50) comprises:
the first transmission gear (51), the first transmission gear (51) is fixedly connected with the second pivot shaft (32);
the second transmission gear (52) is meshed with the first transmission gear (51), the second transmission gear (52) is arranged on the support frame (10) in a pivoting mode through the transmission shaft (53), and the second transmission gear (52) is located at the first end of the transmission shaft (53);
A ratchet assembly (54), the ratchet assembly (54) comprising a stopping ratchet (541) and a driving ratchet (542), wherein the stopping ratchet (541) is fixedly connected with the support frame (10), a plurality of ratchet grooves (543) are formed on the inner peripheral wall of the stopping ratchet (541) and are sequentially distributed around the circumferential direction of the stopping ratchet, the driving ratchet (542) is connected with the transmission shaft (53) and is located at the second end of the transmission shaft (53), the driving ratchet (542) is rotatably arranged in the stopping ratchet (541), the driving ratchet (542) comprises a movably arranged pawl (544), the pawl (544) serves as the brake, when the angular acceleration of the pivot shaft (30) is greater than a preset value, the pawl (544) moves towards the circumferential outer side of the driving ratchet (542) under the action of centrifugal force and is selectively engaged with one of the plurality of ratchet grooves (543), so as to limit the rotation of the driving ratchet wheel (542), the second transmission gear (52), the first transmission gear (51) and the pivot shaft (30), and emergently brake the overturning action of the bearing structure (20).
5. The flipping device according to claim 4, wherein the active ratchet (542) comprises a ratchet disc (545), an elastic expansion member (546) and the pawl (544), the ratchet disc (545) is fixedly disposed at the second end of the transmission shaft (53), an avoidance gap (547) is formed on the ratchet disc (545), and the pawl (544) is movably disposed at the avoidance gap (547) and connected with the ratchet disc (545) through the elastic expansion member (546).
6. The flipping device according to claim 5, wherein a plurality of avoiding notches (547) are formed on the ratchet disc (545), the pawls (544) are plural, the pawls (544) are arranged in one-to-one correspondence at the avoiding notches (547), and each pawl (544) is connected to the ratchet disc (545) through one resilient telescopic member (546).
7. The flipping device according to any one of claims 4 to 6, wherein there are two second transmission gears (52), the two second transmission gears (52) are respectively located at two sides of the first transmission gear (51) in a radial direction, and the two second transmission gears (52) are connected with the two ratchet assemblies (54) through the two transmission shafts (53) in a one-to-one correspondence, wherein the rotation setting directions of the ratchet grooves (543) of the driving ratchet wheels (542) of the two ratchet assemblies (54) are opposite.
8. The flipping device according to claim 7, wherein the two second transmission gears (52) are arranged at intervals in a horizontal direction at both sides of the first transmission gear (51) in a radial direction.
9. A turnover device as claimed in claim 4, characterized in that the turnover device further comprises a bearing housing (60), the first pivot shaft (31) and the second pivot shaft (32) are both pivotally connected to the support frame (10) through one of the bearing housings (60), and the transmission shaft (53) is pivotally connected to the support frame (10) through one of the bearing housings (60).
10. A vacuum coating apparatus comprising the turning device according to any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910351135.5A CN111850475B (en) | 2019-04-28 | 2019-04-28 | Turning device and vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910351135.5A CN111850475B (en) | 2019-04-28 | 2019-04-28 | Turning device and vacuum coating equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111850475A true CN111850475A (en) | 2020-10-30 |
| CN111850475B CN111850475B (en) | 2024-03-22 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910351135.5A Active CN111850475B (en) | 2019-04-28 | 2019-04-28 | Turning device and vacuum coating equipment |
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| Country | Link |
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| CN (1) | CN111850475B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112877667A (en) * | 2021-01-11 | 2021-06-01 | 安徽工业大学 | Sample turning device in vacuum coating |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB631361A (en) * | 1946-06-06 | 1949-11-01 | Aron Kolko | Automatically variable speed transmission gear |
| GB856620A (en) * | 1956-05-25 | 1960-12-21 | Aspro Nicholas Ltd | Improvements in and relating to package fabricating machines |
| JP2011063845A (en) * | 2009-09-17 | 2011-03-31 | Fujifilm Corp | Workpiece-reversing unit |
| DE102011083934A1 (en) * | 2011-09-30 | 2013-04-04 | Induflex Robert Morgan, E.K. | Device for transporting container, has introduction teeth that are attached to turntable around pivot such that introduction teeth are moved at speed corresponding to preset speed of turntable |
| WO2015096820A1 (en) * | 2013-12-29 | 2015-07-02 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Process chamber and semiconductor processing apparatus |
-
2019
- 2019-04-28 CN CN201910351135.5A patent/CN111850475B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB631361A (en) * | 1946-06-06 | 1949-11-01 | Aron Kolko | Automatically variable speed transmission gear |
| GB856620A (en) * | 1956-05-25 | 1960-12-21 | Aspro Nicholas Ltd | Improvements in and relating to package fabricating machines |
| JP2011063845A (en) * | 2009-09-17 | 2011-03-31 | Fujifilm Corp | Workpiece-reversing unit |
| DE102011083934A1 (en) * | 2011-09-30 | 2013-04-04 | Induflex Robert Morgan, E.K. | Device for transporting container, has introduction teeth that are attached to turntable around pivot such that introduction teeth are moved at speed corresponding to preset speed of turntable |
| WO2015096820A1 (en) * | 2013-12-29 | 2015-07-02 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Process chamber and semiconductor processing apparatus |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112877667A (en) * | 2021-01-11 | 2021-06-01 | 安徽工业大学 | Sample turning device in vacuum coating |
Also Published As
| Publication number | Publication date |
|---|---|
| CN111850475B (en) | 2024-03-22 |
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