CN111843190B - Calibration method for laser processing equipment - Google Patents

Calibration method for laser processing equipment Download PDF

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Publication number
CN111843190B
CN111843190B CN202010572274.3A CN202010572274A CN111843190B CN 111843190 B CN111843190 B CN 111843190B CN 202010572274 A CN202010572274 A CN 202010572274A CN 111843190 B CN111843190 B CN 111843190B
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sensor
galvanometer
coordinate system
coordinate
dimensional coordinate
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CN111843190A (en
Inventor
伍波
周志豪
王强
王科鹏
冼志军
罗搏飞
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Changzhou Jiejiachuang Intelligent Equipment Co ltd
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Changzhou Jiejiachuang Intelligent Equipment Co ltd
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B23K26/0821—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head using multifaceted mirrors, e.g. polygonal mirror
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00—Technologies related to metal processing
    • Y02P10/25—Process efficiency

Abstract

The invention provides a calibration method of laser processing equipment. The calibration method of the laser processing equipment adopts the laser processing equipment which comprises the following steps: a controller; a work table; a light source assembly adapted to generate a laser beam; the galvanometer component is used for projecting a laser beam from the light source component on the worktable to form a laser spot and moving in a two-dimensional coordinate system of the galvanometer to adjust the irradiation position of the laser spot on the worktable; the sensor is used for acquiring the irradiation position of the laser spot on the worktable so as to acquire the coordinate of the laser spot in a two-dimensional coordinate system of the sensor according to the irradiation position; and the controller calibrates the coordinates of the galvanometer component in the two-dimensional coordinate system of the galvanometer according to the coordinates of the laser spots in the two-dimensional coordinate system of the sensor. The invention can realize repeated calibration of the galvanometer component in the online mass production processing process of the laser processing equipment, has high calibration accuracy and does not influence the continuous production of products.

Description

Calibration method for laser processing equipment
Technical Field
The invention relates to the technical field of laser processing, in particular to a calibration method of laser processing equipment.
Background
The laser processing technology is the most technologically advanced processing and manufacturing technology in the present era, and has obvious competitive advantages compared with the traditional processing mode. Since the laser processing technology has been vigorously developed in the seventies of the last century, dozens of laser processing technologies such as laser cutting, laser engraving, laser welding, laser marking and the like have been formed.
The laser processing technology has the advantages of high speed, high precision, low consumption and the like, so that the laser processing technology is popularized and applied in a large range, is widely applied to the important fields of national economy such as microelectronic appliances, automobiles, photovoltaic cells, aerospace, mechanical manufacturing, printing and packaging and the like, and plays an important role in improving the labor productivity, improving the product quality, realizing automatic production, protecting the environment, reducing the material resource consumption, reducing the production cost and the like.
The laser processing is a non-contact type, and does not generate frictional resistance between a tool and the surface of a workpiece, and does not directly impact the workpiece, the workpiece is hardly deformed, and the laser processing is a high-speed, high-efficiency, and high-precision processing method because the laser processing is a local processing and hardly affects a portion not irradiated with the laser. The laser processing technology is the combination of optical technology and electromechanical technology, the moving speed, the power density, the direction and the like of laser beams can be adjusted, the laser processing technology is easily matched with a numerical control system to process complex workpieces, and therefore the laser processing technology can be applied to different layers and ranges.
The laser processing technology has been widely applied in many fields, and has a wider application prospect with the continuous and deep research of the laser processing technology, equipment and process. The heat input into the workpiece is small in the machining process, so that the heat affected zone and the thermal deformation are small, the machining efficiency is high, and the automation is easy to realize.
One of the disadvantages of the related art is that an error occurs in the working process of a laser scanning galvanometer in a laser processing device, which results in the reduction of the position precision of the laser scanning galvanometer. The technical scheme capable of accurately calibrating the laser scanning galvanometer is lacked in the related art.
Disclosure of Invention
The present invention is directed to solving at least one of the above problems.
A first object of the present invention is to provide a calibration method of a laser machining apparatus.
A second object of the present invention is to provide another method of calibrating a laser machining apparatus.
To achieve the first object of the present invention, an embodiment of the present invention provides a calibration method of a laser processing apparatus, which employs a laser processing apparatus including: a controller; a work table; a light source assembly adapted to generate a laser beam; the galvanometer component is used for projecting the laser beam from the light source component on the worktable to form a laser spot and moving in a two-dimensional coordinate system of the galvanometer to adjust the irradiation position of the laser spot on the worktable; the sensor is used for acquiring the irradiation position of the laser spot on the worktable surface so as to obtain the coordinate of the laser spot in a two-dimensional coordinate system of the sensor according to the irradiation position; the two-dimensional coordinate system of the sensor corresponds to the two-dimensional coordinate system of the galvanometer, and the controller calibrates the coordinates of the galvanometer component in the two-dimensional coordinate system of the galvanometer according to the coordinates of the laser spots in the two-dimensional coordinate system of the sensor.
The embodiment can correspondingly adjust the position of the galvanometer component according to the change condition of the coordinates of the laser spots in the two-dimensional coordinate system of the sensor under the condition that the galvanometer component is at the same position, so as to achieve the aim of correcting and calibrating the position, distance and other parameters of the galvanometer component in the two-dimensional coordinate system of the galvanometer, thereby overcoming and correcting the offset error of the galvanometer component and ensuring the accuracy of laser processing. In addition, the sensor of this embodiment can realize the repeated calibration of galvanometer subassembly in online volume production course of working, need not stop the operation, and it can be through software control, calibrates after the volume production of fixed time interval is processed to save down time. In conclusion, the present embodiment can not only solve the problem of poor processing caused by zero drift error and proportional drift error of the galvanometer component, improve the yield and the processing precision of the processed products of the equipment, but also meet the requirements of high precision and long-term stable mass production processing, and realize repeated calibration in the online mass production processing process without shutdown operation.
In addition, the technical solution provided by the above embodiment of the present invention may further have the following additional technical features:
in the above technical solution, the sensor includes: the first sensor is suitable for acquiring the coordinates of the laser spots in a two-dimensional coordinate system of the first sensor; the second sensor is suitable for acquiring the coordinates of the laser spots in a two-dimensional coordinate system of the second sensor; the two-dimensional coordinate system of the vibrating mirror is characterized in that the two-dimensional coordinate system of the vibrating mirror is a two-dimensional coordinate system of the first sensor, the two-dimensional coordinate system of the second sensor is a two-dimensional coordinate system of the vibrating mirror, and the two-dimensional coordinate system of the first sensor is a two-dimensional coordinate system of the vibrating mirror.
The first sensor and the second sensor are matched with each other, and the correction and calibration of the position and the distance of the galvanometer component in the two-dimensional coordinate system of the galvanometer can be completed through the acquisition results of the first sensor and the second sensor.
In any of the above technical solutions, the first sensor is disposed on the working table and below the initial position of the galvanometer component; the second sensor is arranged on any position of the working table surface.
Locate the below of galvanometer subassembly initial position with first sensor, can be convenient for realize the correction to the zero drift through first sensor. The second sensor is arranged at any position of the working table surface, and can detect the proportional drift of the galvanometer component caused by temperature change.
The embodiment of the invention provides a calibration method of laser processing equipment, which adopts the laser processing equipment and comprises the following steps: respectively before the beginning and after the ending of at least one processing period, acquiring the coordinates of the laser spots in a two-dimensional coordinate system of a sensor by using the sensor; and calibrating the galvanometer component according to the change of the coordinates of the laser spots in the two-dimensional coordinate system of the sensor.
The present embodiment provides a method of calibrating a laser machining apparatus according to any of the embodiments of the present invention. Which performs irradiation position acquisition of the laser spot before and after the start and end of at least one processing cycle, respectively. Therefore, the galvanometer component is calibrated according to the change of the coordinates of the laser spots in the two-dimensional coordinate system of the sensor, so that the aim of accurately calibrating the offset of the galvanometer component is fulfilled.
In addition, the technical solution provided by the above embodiment of the present invention may further have the following additional technical features:
in the above technical solution, the obtaining, by the sensor, the coordinates of the laser spot in the two-dimensional coordinate system of the sensor before and after the start and the end of at least one processing cycle specifically includes: before at least one processing cycle begins, moving a laser spot to any position through a galvanometer component, acquiring and recording coordinates of the laser spot in a two-dimensional coordinate system of a sensor as reference coordinates of the sensor, and acquiring and recording coordinates of the laser spot in the two-dimensional coordinate system of the galvanometer as reference coordinates of the galvanometer component; after at least one processing cycle is finished, the laser spot is moved back to any position through the galvanometer component, the coordinate of the laser spot in the two-dimensional coordinate system of the sensor is obtained and recorded as the change coordinate of the sensor, and the coordinate of the change coordinate of the sensor in the two-dimensional coordinate system of the galvanometer is obtained and recorded as the change coordinate of the galvanometer component.
The embodiment provides a mode of acquiring the irradiation position of the laser spot by using the sensor before and after the beginning and the end of at least one processing cycle respectively, and the calibration of the galvanometer component can be realized by comparing the acquisition results of the sensor before and after the beginning and the end of at least one processing cycle.
In any of the above technical solutions, calibrating the galvanometer component according to a change of a coordinate where the laser spot is located in the two-dimensional coordinate system of the sensor specifically includes: and correspondingly adjusting the position of the galvanometer component according to the change of the sensor change coordinate relative to the sensor reference coordinate, so that the sensor change coordinate is restored to the sensor reference coordinate, and further the galvanometer component change coordinate is restored to the galvanometer component reference coordinate.
According to the embodiment, the position coordinate of the galvanometer component can be correspondingly adjusted according to the change of the sensor change coordinate relative to the sensor reference coordinate, so that the aim of calibrating the offset error generated by the galvanometer component in a processing period is fulfilled.
To achieve the second object of the present invention, an embodiment of the present invention provides a calibration method of a laser processing apparatus, which uses the laser processing apparatus, and the calibration method of the laser processing apparatus includes: respectively before the beginning and after the ending of at least one processing period, acquiring the coordinates of the laser spots in a two-dimensional coordinate system of a first sensor by using the first sensor; respectively before the beginning and after the end of at least one processing period, acquiring coordinates of the laser spots in a two-dimensional coordinate system of a second sensor by using the second sensor; carrying out zero drift calibration on the galvanometer component according to the change of the coordinate of the laser spot in the two-dimensional coordinate system of the first sensor; and carrying out proportional drift calibration on the vibrating mirror assembly according to the change of the coordinate of the laser spot in the two-dimensional coordinate system of the first sensor and the change of the coordinate of the laser spot in the two-dimensional coordinate system of the second sensor.
The two-dimensional coordinate system of the first sensor corresponding to the first sensor covers the initial position of the laser spot projected by the galvanometer component, namely: the origin position or the zero position. And the moving distance of the laser spot relative to the initial position can be obtained through the acquisition results of the second sensor and the first sensor. Therefore, the embodiment can realize accurate calibration of zero drift and proportional drift of the vibrating mirror assembly.
In addition, the technical solution provided by the above embodiment of the present invention may further have the following additional technical features:
in the above technical solution, the acquiring, by the first sensor, the coordinates of the laser spot in the two-dimensional coordinate system of the first sensor before and after the start and the end of at least one processing cycle specifically includes: before at least one processing cycle begins, moving a laser spot to an initial position through a galvanometer component, acquiring a coordinate of the laser spot in a two-dimensional coordinate system of a first sensor and recording the coordinate as a reference coordinate of the first sensor, and acquiring a coordinate of the reference coordinate of the first sensor in the two-dimensional coordinate system of the galvanometer and recording the coordinate as the reference coordinate of the first galvanometer component; after at least one processing period is finished, the laser spot is moved back to the initial position through the galvanometer component, the coordinate of the laser spot in the two-dimensional coordinate system of the sensor is obtained and recorded as the change coordinate of the first sensor, and the coordinate of the change coordinate of the first sensor in the two-dimensional coordinate system of the galvanometer is obtained and recorded as the change coordinate of the first galvanometer component; the calibration of zero drift of the galvanometer component according to the change of the coordinate of the laser spot in the two-dimensional coordinate system of the first sensor specifically comprises the following steps: and correspondingly adjusting the position coordinate of the galvanometer component according to the change of the change coordinate of the first sensor relative to the reference coordinate of the first sensor, so that the change coordinate of the first sensor is restored to the reference coordinate of the first sensor, and the change coordinate of the first galvanometer component is restored to the reference coordinate of the first galvanometer component.
The embodiment provides a technical scheme for realizing calibration of zero drift of the galvanometer component by comparing acquisition results of the first sensor before and after the beginning and the end of at least one processing cycle.
In any of the above technical solutions, the obtaining, by the second sensor, the coordinates of the laser spot in the two-dimensional coordinate system of the second sensor before and after the start and the end of at least one processing cycle specifically includes: before at least one processing cycle begins, the laser spot is moved to any position through the galvanometer component, the coordinate of the laser spot in the two-dimensional coordinate system of the second sensor is obtained and recorded as the reference coordinate of the second sensor, and the coordinate of the laser spot in the two-dimensional coordinate system of the galvanometer component and the reference coordinate of the second sensor are obtained and recorded as the reference coordinate of the second galvanometer component; after at least one processing cycle is finished, the laser spot is moved back to any position through the galvanometer component, the coordinate of the laser spot in the two-dimensional coordinate system of the second sensor is obtained and recorded as the change coordinate of the second sensor, and the coordinate of the change coordinate of the second sensor in the two-dimensional coordinate system of the galvanometer is obtained and recorded as the change coordinate of the second galvanometer component; the calibration of the proportional drift of the galvanometer component according to the change of the coordinate of the laser spot in the two-dimensional coordinate system of the second sensor specifically comprises the following steps: and correspondingly adjusting the position coordinate of the galvanometer component according to the change of the change coordinate of the second sensor relative to the reference coordinate of the second sensor, and restoring the change coordinate of the second sensor to the reference coordinate of the second sensor so as to obtain the change coordinate of the second galvanometer component to be restored to the reference coordinate of the second galvanometer component.
The calibration of the zero drift of the galvanometer component can be realized by comparing the acquisition results of the first sensor before the beginning and after the end of at least one processing cycle, and the calibration of the proportional drift of the galvanometer component can be realized by comparing the acquisition results of the second sensor before the beginning and after the end of at least one processing cycle.
In any of the above technical solutions, the calibrating the proportional drift of the galvanometer component according to the change of the coordinate where the laser spot is located in the two-dimensional coordinate system of the first sensor and the change of the coordinate where the laser spot is located in the two-dimensional coordinate system of the second sensor further comprises: acquiring the distance between the reference coordinate of the first galvanometer component and the reference coordinate of the second galvanometer component, and recording the distance as the reference distance; acquiring the distance between the change coordinates of the first galvanometer component and the change coordinates of the second galvanometer component, and recording the distance as the change distance; and correspondingly adjusting the position coordinates of the galvanometer component according to the change of the change distance relative to the reference distance so as to restore the change distance to the reference distance.
In the embodiment, the ratio drift condition of the galvanometer component is obtained by comparing the distance between the original point position of the galvanometer component before the beginning of one or more processing periods and the distance between the original point position of the galvanometer component after the ending of one or more processing periods and the certain fixed position, and the ratio drift of the galvanometer component is calibrated according to the ratio drift condition.
Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.
Drawings
The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
fig. 1 is a first structural view of a laser processing apparatus in a front view direction according to a calibration method of the laser processing apparatus according to an embodiment of the present invention;
fig. 2 is a second structural view of the laser processing apparatus in the front view direction, which is adopted in the calibration method of the laser processing apparatus according to the embodiment of the present invention;
fig. 3 is a schematic structural view of a laser processing apparatus in a top view direction adopted in a calibration method of the laser processing apparatus according to an embodiment of the present invention;
FIG. 4 is a flowchart of a first step of a method of calibrating a laser machining apparatus according to one embodiment of the present invention;
FIG. 5 is a flow chart of a second step of a method of calibrating a laser machining apparatus according to one embodiment of the present invention;
FIG. 6 is a flow chart of a third step of a calibration method for a laser machining apparatus according to an embodiment of the present invention;
FIG. 7 is a flowchart illustrating a fourth step of a calibration method for a laser machining apparatus according to an embodiment of the present invention;
FIG. 8 is a flow chart of a fifth step of a calibration method for a laser machining apparatus according to one embodiment of the present invention;
FIG. 9 is a flowchart illustrating a sixth step of a calibration method for a laser machining apparatus according to an embodiment of the present invention;
fig. 10 is a flowchart illustrating a seventh step of a calibration method of a laser processing apparatus according to an embodiment of the present invention.
Wherein, the correspondence between the reference numbers and the component names in fig. 1 to 3 is:
100: laser processing apparatus, 110: controller, 120: countertop, 130: a light source assembly, 132: laser hair-growing assembly, 134: optical system, 140: galvanometer assembly, 142: field lens, 150: sensor, 152: first sensor, 154: second sensor, 200: the galvanometer component scans the range.
Detailed description of the preferred embodiments
In order that the above objects, features and advantages of the present invention can be more clearly understood, a more particular description of the invention, taken in conjunction with the accompanying drawings and detailed description, is set forth below. It should be noted that the embodiments and features of the embodiments of the present application may be combined with each other without conflict.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, however, the present invention may be practiced in other ways than those specifically described herein, and therefore the scope of the present invention is not limited by the specific embodiments disclosed below.
A calibration method of a laser machining apparatus and a laser machining apparatus 100 employed by the calibration method of the laser machining apparatus according to some embodiments of the present invention are described below with reference to fig. 1 to 10.
Examples
As shown in fig. 1 and 2, the present embodiment provides a laser processing apparatus 100 employed in a calibration method of the laser processing apparatus, including: controller 110, work surface 120, light source assembly 130, galvanometer assembly 140, and sensor 150. The light source assembly 130 is adapted to generate a laser beam. The galvanometer assembly 140 projects the laser beam from the light source assembly 130 onto the work table 120 to form a laser spot, and moves within the galvanometer two-dimensional coordinate system to adjust the irradiation position of the laser spot on the work table 120. The sensor 150 collects the irradiation position of the laser spot on the work table 120 to obtain the coordinates of the laser spot in the sensor two-dimensional coordinate system according to the irradiation position. The two-dimensional sensor coordinate system and the two-dimensional galvanometer coordinate system correspond to each other, and the controller 110 calibrates the coordinates of the galvanometer component 140 in the two-dimensional galvanometer coordinate system according to the coordinates of the laser spots in the two-dimensional sensor coordinate system.
The laser processing apparatus 100 of the present embodiment may be used to perform processing operations such as laser cutting, laser engraving, laser welding, laser marking, rapid prototyping, and the like. The work table 120 is used for carrying a workpiece to be processed. The light source assembly 130 is used for hair growth laser. The light source assembly 130 includes a laser generator assembly 132 and an optical system 134, wherein laser generated by the laser generator assembly 132 passes through the optical system 134 outside the laser to adjust the light path emitting direction and the size of laser spots, and then is emitted from the optical system 134, and laser beams enter the galvanometer assembly 140. The galvanometer assembly 140 includes a field lens 142. After the laser beam exits from the field lens 142, the laser spot is focused within the scanning range 200 of the galvanometer component of the worktable 120.
The galvanometer assembly 140 can provide a high quality laser beam to complete the laser production process. Specifically, the galvanometer component 140 is a high-precision and high-speed servo control system composed of a driving board and a high-speed swing motor, and can control the irradiation position of the laser spot. One of the important parameters for measuring the performance of the galvanometer component 140 is drift error. The drift error specifically includes an error due to temperature drift and an error due to gain drift, that is: temperature drift and gain drift. The temperature drift refers to the change of the transistor parameters caused by the change of the environmental temperature, the temperature is increased, the current amplification factor of the transistor is increased, and the current amplification factor of the transistor is reduced. This additional current increase is caused by temperature change, and is therefore understood as temperature drift, which is also called zero point drift, and this phenomenon appears as a change in the position of the zero point on the laser scanning galvanometer, so that the position accuracy of the laser scanning galvanometer is reduced. The gain drift is an error caused by the movement of the driving motor due to the change of temperature, and is expressed as a change of the moving distance of the laser spot in the laser processing process, and is also called as proportional drift. A high level of positioning accuracy is necessary for the galvanometer assembly 140, and at the same time, both the galvanometer motor and the driver electronics inevitably generate heat, generate thermal drift, and cause positioning errors to occur. It is therefore an object of the present embodiment to provide a laser processing apparatus capable of achieving accurate calibration.
In order to achieve the above purpose, the present embodiment adds the sensor 150 to the original optical path design without changing the basic components of the original laser processing apparatus 100, such as the light source assembly 130, the galvanometer assembly 140, and the like. The sensor 150 is embodied as a two-dimensional coordinate sensor having a detection sensing range and capable of detecting and outputting a two-dimensional coordinate system of the laser spot falling within its detection sensing range with an error of less than 1 micron. In other words, the sensor 150 of the present embodiment can establish a two-dimensional coordinate system of the sensor within the detection sensing range thereof, and output a two-dimensional coordinate corresponding to the specific position of the laser spot within the detection sensing range thereof. Thus, the sensor 150 can characterize the actual position of the laser spot on the work surface 120 or within the scanning range 200 of the galvanometer assembly. It is emphasized that this position is characterized by the coordinates of the laser spot in the two-dimensional coordinate system of the sensor.
The galvanometer assembly 140 is positionally moved with precision and small amplitude to control the irradiation position of the laser spot on the work table 120. The galvanometer component 140 corresponds to a galvanometer two-dimensional coordinate system, and processes and acts laser spots on the worktable 120 by scanning polarization in the X direction and the Y direction of the galvanometer. Accordingly, the position of the galvanometer assembly 140 in the galvanometer two-dimensional coordinate system corresponds to the irradiation position of the laser spot on the work surface 120.
As noted above, the sensor 150 is capable of characterizing the actual position of the laser spot on the work surface 120 or within the scanning range 200 of the galvanometer assembly, and thus, the sensor two-dimensional coordinate system and the galvanometer two-dimensional coordinate system correspond to one another. The coordinate measurement scales of the two-dimensional coordinate system of the sensor and the two-dimensional coordinate system of the galvanometer can be the same or different, but the two coordinate measurement scales have accurate and unique association corresponding relation. The detection sensing of the sensor 150 can not only represent the actual irradiation position of the laser spot, but also calculate or convert the position of the galvanometer component 140 in the two-dimensional coordinate system of the galvanometer according to the position of the laser spot in the two-dimensional coordinate system of the sensor. Therefore, the present embodiment can use the controller 110 to calibrate the coordinates of the galvanometer component 140 in the two-dimensional coordinate system of the galvanometer according to the coordinates of the laser spot in the two-dimensional coordinate system of the sensor.
The present embodiment employs sensor 150 to obtain the coordinates of the laser spot in the sensor two-dimensional coordinate system and the coordinates of the galvanometer assembly 140 in the galvanometer two-dimensional coordinate system at any position of the galvanometer assembly 140 between the beginning of one or more duty cycles. When the galvanometer assembly 140 is operated for a period of time, it is subject to offset and error due to temperature rise, and the machining precision of the galvanometer assembly 140 is reduced. Thus, the present embodiment again employs sensor 150 to obtain the coordinates of the laser spot in the sensor two-dimensional coordinate system and the coordinates of galvanometer assembly 140 in the galvanometer two-dimensional coordinate system when galvanometer assembly 140 is returned to either position after the end of one or more of the duty cycles. Therefore, in the embodiment, the position of the galvanometer component 140 can be correspondingly adjusted according to the change condition of the coordinates of the laser spot in the two-dimensional coordinate system of the sensor under the condition that the galvanometer component 140 is at the same position, so that the purpose of correcting and calibrating the parameters such as the position, the distance and the like of the galvanometer component 140 in the two-dimensional coordinate system of the galvanometer is achieved, the offset error is overcome and corrected by the galvanometer component 140, and the accuracy degree of laser processing is ensured.
In addition, the sensor 150 of the present embodiment can achieve repeated calibration of the galvanometer assembly 140 during mass production on-line processing, without requiring shutdown operations, and can be controlled by software to perform calibration after mass production at fixed time intervals, thereby saving downtime.
In conclusion, the present embodiment can not only solve the problem of poor processing caused by the zero drift error and the proportional drift error of the galvanometer component 140, improve the yield and the processing precision of the processed products of the equipment, but also meet the requirements of high precision and long-term stable mass production processing, and realize repeated calibration in the online mass production processing process without shutdown operation.
Examples
As shown in fig. 3, the present embodiment provides a laser processing apparatus 100 employed in the calibration method of the laser processing apparatus, and in addition to the technical features of embodiment 1 described above, the present embodiment further includes the following technical features.
The sensor 150 includes: a first sensor 152 and a second sensor 154. The first sensor 152 is adapted to acquire the coordinates at which the laser spot is located in the first sensor two-dimensional coordinate system. The second sensor 154 is adapted to acquire the coordinates at which the laser spot is located in the second sensor two-dimensional coordinate system. The two-dimensional coordinate system of the vibrating mirror is characterized in that the two-dimensional coordinate system of the vibrating mirror is a two-dimensional coordinate system of the vibrating mirror, wherein the origin position of the two-dimensional coordinate system of the first sensor corresponds to the origin position of the two-dimensional coordinate system of the vibrating mirror, and the origin position of the two-dimensional coordinate system of the second sensor corresponds to any point in a quadrant of the two-dimensional coordinate system of the vibrating mirror.
In other words, the present embodiment is provided with two-dimensional photosensors with coordinate systems including the first sensor 152 and the second sensor 154. The first sensor 152 and the second sensor 154 are both positioned within the scanning range 200 of the galvanometer assembly of the work surface 120. Wherein the detection acquisition range of the first sensor 152 covers the spot irradiation position corresponding to the initial position of the galvanometer assembly 140, that is: a zero position. The second sensor 154 may be placed at any fixed location within the scanning range 200 of the galvanometer assembly.
The laser spot collected by the first sensor 152 falls into a position in the first sensor two-dimensional coordinate system, which can be mapped to read the position coordinate corresponding to the position of the galvanometer assembly 140 in the galvanometer two-dimensional coordinate system. The laser spot collected by the second sensor 154 falls into a position in the second sensor two-dimensional coordinate system, and the position coordinate can be mapped and read to correspond to the position of the galvanometer component 140 in the galvanometer two-dimensional coordinate system. The origin position of the two-dimensional coordinate system of the first sensor corresponds to the origin position of the two-dimensional coordinate system of the galvanometer, so the acquisition result of the first sensor 152 reflects the zero drift error condition of the galvanometer assembly 140. The origin position of the second sensor two-dimensional coordinate system corresponds to any point in the quadrant of the galvanometer two-dimensional coordinate system, so the acquisition result of the second sensor 154 reflects the proportional drift error condition of the galvanometer assembly 140.
In summary, the first sensor 152 and the second sensor 154 cooperate with each other, and the calibration of the position and distance of the galvanometer assembly 140 in the two-dimensional coordinate system of the galvanometer can be completed through the acquisition results of the two sensors.
Examples
As shown in fig. 3, the present embodiment provides a laser processing apparatus 100 adopted by the calibration method of the laser processing apparatus, and in addition to the technical features of embodiment 2 described above, the present embodiment further includes the following technical features.
The first sensor 152 is disposed on the table top 120 and below the initial position of the galvanometer assembly 140. The second sensor 154 is located at any position on the countertop 120.
In other words, the first sensor 152 is disposed at a corresponding position directly below the initial position of the galvanometer assembly 140, and the second sensor 154 is disposed at a fixed position within the scanning range 200 of the galvanometer assembly above the work surface 120, so long as the processing and production of the product is not affected.
Locating the first sensor 152 below the initial position of the galvanometer assembly 140 may facilitate correction of zero drift by the first sensor 152. The second sensor 154 is disposed at any position within the scanning range 200 of the galvanometer component on the worktable 120, and the distance change of the galvanometer component 140 can be obtained by using the acquisition results of the first sensor 152 and the second sensor 154, so as to detect the proportional drift of the galvanometer component 140 caused by the temperature change.
Examples
As shown in fig. 4, the present embodiment provides a calibration method of a laser processing apparatus, which uses the laser processing apparatus 100 according to any embodiment of the present invention, and the calibration method of the laser processing apparatus includes:
step S102, acquiring coordinates of laser spots in a two-dimensional coordinate system of a sensor by using the sensor before and after the start and the end of at least one processing period respectively;
and step S104, calibrating the galvanometer component according to the change of the coordinate of the laser spot in the two-dimensional coordinate system of the sensor.
The present embodiment provides a method of calibrating a laser machining apparatus 100 according to any of the embodiments of the present invention. Which respectively performs irradiation position acquisition of the laser spot before and after the start and end of at least one processing cycle. Furthermore, the present embodiment determines the corresponding position of the galvanometer component 140 in the two-dimensional coordinate system of the galvanometer according to the position of the laser spot in the two-dimensional coordinate system of the sensor. Therefore, the deviation condition of the galvanometer component 140 in the whole processing period can be represented by the change of the coordinates of the laser spot in the two-dimensional coordinate system of the sensor, and finally, the galvanometer component is calibrated according to the change of the coordinates of the laser spot in the two-dimensional coordinate system of the sensor, so that the aim of accurately calibrating the deviation of the galvanometer component 140 is fulfilled.
Examples
As shown in fig. 5, the present embodiment provides a calibration method of a laser processing apparatus, and in addition to the technical features of embodiment 4 described above, the present embodiment further includes the following technical features.
The step of acquiring coordinates of the laser spot in a two-dimensional coordinate system of the sensor by using the sensor before and after the beginning and the end of at least one processing cycle respectively comprises the following steps:
step S202, before at least one processing cycle begins, the laser spot is moved to any position through the galvanometer component, the coordinate of the laser spot in the two-dimensional coordinate system of the sensor is obtained and recorded as the reference coordinate of the sensor, and the coordinate of the laser spot in the two-dimensional coordinate system of the galvanometer component and the reference coordinate of the sensor are obtained and recorded as the reference coordinate of the galvanometer component;
and S204, after at least one processing cycle is finished, moving the laser spot back to any position through the galvanometer component, acquiring the coordinate of the laser spot in the two-dimensional coordinate system of the sensor and recording the coordinate as the change coordinate of the sensor, and acquiring the coordinate of the change coordinate of the sensor in the two-dimensional coordinate system of the galvanometer and recording the coordinate as the change coordinate of the galvanometer component.
The present embodiment provides a manner of acquiring the irradiation position of the laser spot by using the sensor 150 before and after the start and end of at least one processing cycle, respectively, and the calibration of the galvanometer assembly 140 can be realized by comparing the acquisition results of the sensor 150 before and after the start and end of at least one processing cycle.
Examples
As shown in fig. 6, the present embodiment provides a calibration method of a laser processing apparatus, and in addition to the technical features of embodiment 4 or embodiment 5 described above, the present embodiment further includes the following technical features.
According to the change of the coordinates of the laser facula in the two-dimensional coordinate system of the sensor, the calibration of the galvanometer component specifically comprises the following steps:
step S302, correspondingly adjusting the position coordinate of the galvanometer component according to the change of the sensor change coordinate relative to the sensor reference coordinate, so that the sensor change coordinate is restored to the sensor reference coordinate, and further the galvanometer component change coordinate is restored to the galvanometer component reference coordinate.
It should be noted that the present embodiment aims to adjust the sensor change coordinates to the sensor reference coordinates. However, it is understood that although the present embodiment is directed to achieving the above object, actually, the sensor change coordinates may have a slight difference to some extent from the sensor reference coordinates after adjustment due to an error of the laser processing apparatus itself or a measurement error or a movement error of a component above the laser processing apparatus. Namely: the sensor variation coordinates and the sensor reference coordinates do not necessarily coincide exactly after adjustment. It can be understood by those skilled in the art that the present embodiment is only directed to achieve the purpose of restoring the galvanometer component change coordinate to the galvanometer component reference coordinate, and the technical solutions of adjusting the position of the galvanometer component accordingly based on the above purpose are all within the protection scope of the present invention.
The present embodiment provides a specific method of calibration based on the acquisition of the sensor 150 before and after the beginning and the end of at least one processing cycle. Because the coordinates of the irradiation position of the laser spot in the sensor two-dimensional coordinate system correspond to the coordinates of the galvanometer component 140 in the galvanometer two-dimensional coordinate system, the position of the galvanometer component 140 can be correspondingly adjusted according to the change of the sensor change coordinates relative to the sensor reference coordinates, so that the purpose of calibrating the offset error generated by the galvanometer component 140 in the processing period is achieved.
Examples
As shown in fig. 7, the present embodiment provides a calibration method of a laser processing apparatus, which uses the laser processing apparatus 100 according to any embodiment of the present invention, the calibration method of the laser processing apparatus including:
step S402, before and after the beginning and the end of at least one processing cycle, a first sensor is adopted to obtain the coordinates of the laser spot in a two-dimensional coordinate system of the first sensor;
step S404, before the beginning and after the ending of at least one processing cycle, a second sensor is adopted to obtain the coordinates of the laser spots in a two-dimensional coordinate system of the second sensor;
step S406, carrying out zero drift calibration on the galvanometer component according to the change of the coordinate of the laser spot in the two-dimensional coordinate system of the first sensor;
and step S408, carrying out proportional drift calibration on the galvanometer component according to the change of the coordinate of the laser spot in the two-dimensional coordinate system of the first sensor and the change of the coordinate of the laser spot in the two-dimensional coordinate system of the second sensor.
The calibration method of the laser processing apparatus of the present embodiment realizes the acquisition of the laser spot irradiation position by the first sensor 152 and the second sensor 154 which cooperate with each other. As previously noted, the first sensor 152 is adapted to acquire the coordinates of the laser spot in the first sensor two-dimensional coordinate system, and the second sensor 154 is adapted to acquire the coordinates of the laser spot in the second sensor two-dimensional coordinate system. The first sensor 152 is disposed on the work table 120 and below the initial position of the galvanometer assembly 140, and the second sensor 154 is disposed at any position on the work table 120. Thus, the two-dimensional coordinate system of the first sensor corresponding to the first sensor 152 covers the initial position of the laser spot projected by the galvanometer component 140, that is: the origin position or the zero point position. And the moving distance of the laser spot relative to the initial position can be known through the acquisition results of the second sensor 154 and the first sensor 152. Therefore, the present embodiment enables accurate calibration of zero drift and proportional drift of the galvanometer component 140.
Examples
As shown in fig. 8, the present embodiment provides a calibration method of a laser processing apparatus, and in addition to the technical features of embodiment 7 described above, the present embodiment further includes the following technical features.
The step of acquiring the coordinates of the laser spot in the two-dimensional coordinate system of the first sensor by using the first sensor before and after the beginning and the end of at least one processing cycle respectively comprises the following steps:
step S502, before at least one processing cycle begins, the laser spot is moved to an initial position through the galvanometer component, the coordinate of the laser spot in the two-dimensional coordinate system of the first sensor is obtained and recorded as the reference coordinate of the first sensor, and the coordinate of the reference coordinate of the first sensor in the two-dimensional coordinate system of the galvanometer is obtained and recorded as the reference coordinate of the first galvanometer component;
step S504, after at least one processing cycle is finished, the laser spot is moved back to the initial position through the galvanometer component, the coordinate of the laser spot in the two-dimensional coordinate system of the sensor is obtained and recorded as the change coordinate of the first sensor, and the coordinate of the change coordinate of the first sensor in the two-dimensional coordinate system of the galvanometer is obtained and recorded as the change coordinate of the first galvanometer component;
the calibration of zero drift of the galvanometer component according to the change of the coordinate of the laser spot in the two-dimensional coordinate system of the first sensor specifically comprises the following steps:
step S506, correspondingly adjusting the position coordinate of the galvanometer component according to the change of the first sensor change coordinate relative to the first sensor reference coordinate, so that the first sensor change coordinate is restored to the first sensor reference coordinate, and further the first galvanometer component change coordinate is restored to the first galvanometer component reference coordinate.
The present embodiment provides a technical solution for calibrating the zero drift of the galvanometer assembly 140 by comparing the collected results of the first sensor 152 before the beginning and after the end of at least one processing cycle.
Examples
As shown in fig. 9, the present embodiment provides a calibration method of a laser processing apparatus, and in addition to the technical features of embodiment 8 described above, the present embodiment further includes the following technical features.
The step of acquiring the coordinates of the laser spot in the two-dimensional coordinate system of the second sensor by using the second sensor before and after the start and the end of at least one processing cycle respectively comprises the following steps:
step S602, before at least one processing cycle begins, moving a laser spot to any position through a galvanometer component, acquiring the coordinate of the laser spot in a two-dimensional coordinate system of a second sensor and recording the coordinate as a reference coordinate of the second sensor, acquiring the coordinate of the reference coordinate of the second sensor in the two-dimensional coordinate system of the galvanometer and recording the coordinate as the reference coordinate of the second galvanometer component;
step S604, after at least one processing cycle is finished, the laser spot is moved back to any position through the galvanometer component, the coordinate of the laser spot in the two-dimensional coordinate system of the second sensor is obtained and recorded as the change coordinate of the second sensor, and the coordinate of the change coordinate of the second sensor in the two-dimensional coordinate system of the galvanometer is obtained and recorded as the change coordinate of the second galvanometer component;
the calibration of the proportional drift of the galvanometer component according to the change of the coordinate of the laser spot in the two-dimensional coordinate system of the second sensor specifically comprises the following steps:
step S606, the position coordinate of the galvanometer component is correspondingly adjusted according to the change of the change coordinate of the second sensor relative to the reference coordinate of the second sensor, the change coordinate of the second sensor is restored to the reference coordinate of the second sensor, and then the change coordinate of the second galvanometer component is restored to the reference coordinate of the second galvanometer component.
The present embodiment provides a manner of acquiring the irradiation position of the laser spot by using the first sensor 152 and the second sensor 154 before and after the start and the end of at least one processing cycle, respectively, and the calibration of the zero shift of the galvanometer assembly 140 can be realized by comparing the acquisition results of the first sensor 152 before and after the start and the end of at least one processing cycle, and the calibration of the proportional shift of the galvanometer assembly 140 can be realized by comparing the acquisition results of the second sensor 154 before and after the start and the end of at least one processing cycle.
Example 10:
as shown in fig. 10, the present embodiment provides a calibration method of a laser processing apparatus, and in addition to the technical features of embodiment 9 described above, the present embodiment further includes the following technical features.
According to the change of the coordinate of the laser spot in the two-dimensional coordinate system of the first sensor and the change of the coordinate of the laser spot in the two-dimensional coordinate system of the second sensor, the calibration of the proportional drift of the galvanometer component further comprises the following steps:
step S702, acquiring the distance between the reference coordinates of the first galvanometer component and the reference coordinates of the second galvanometer component, and recording the distance as the reference distance;
step S704, acquiring the distance between the first galvanometer component change coordinate and the second galvanometer component change coordinate, and recording the distance as the change distance;
step S706, according to the change of the change distance relative to the reference distance, the position of the galvanometer component is correspondingly adjusted, so that the change distance is recovered to the reference distance.
In the embodiment, the distance between the original point position of the galvanometer component 140 before the beginning of one or more processing cycles and a certain fixed position is compared with the distance between the original point position of the galvanometer component 140 after the end of one or more processing cycles and the certain fixed position, so as to obtain the proportion drift condition of the galvanometer component 140, and accordingly, the proportion drift of the galvanometer component 140 is calibrated. In addition, after the calibration is completed, the present embodiment may rewrite the results of the zero point position calibration and the proportional shift error calibration into the scanning procedure to complete the calibration at this time.
Examples
The embodiment provides a calibration method of a laser processing apparatus, which includes the following steps.
Firstly, before mass production processing of the laser processing apparatus 100, the galvanometer component 140 is controlled by software to return to the original point position, so that the laser spot falls within the collection range of the first sensor 152 arranged at the original point position, and the coordinate point position D of the laser spot in the two-dimensional coordinate system of the first sensor is obtained from the first sensor 152 1 Coordinate point position D 1 Coordinates d of a position point in a two-dimensional coordinate system corresponding to the galvanometer of the galvanometer assembly 140 1 . Furthermore, the galvanometer component 140 is controlled by software, so that the laser spot falls within the acquisition range of the second sensor 154, and the two-dimensional coordinate system of the second laser spot in the second sensor is obtained from the second sensor 154Coordinate position D 2 Coordinate position D 2 Coordinates d of a position point in a two-dimensional coordinate system corresponding to the galvanometer of the galvanometer assembly 140 2 。
Subsequently, after mass production processing for a fixed time, the galvanometer component 140 is automatically controlled to move to the position point coordinate d in the two-dimensional coordinate system of the galvanometer through software programming 1 The laser spot firstly falls into the collection range of the first sensor 152, and the coordinate point position D of the laser spot in the two-dimensional coordinate system of the first sensor is obtained from the first sensor 152 3 And the position point coordinate d in the galvanometer two-dimensional coordinate system of the galvanometer assembly 140 3 . After obtaining the coordinates, the coordinates D 1 And coordinates D 3 Comparing, controlling the vibrating mirror assembly 140 to move through software calculation in order to make two coordinates of the laser spot falling point in the two-dimensional coordinate system of the first sensor consistent, and aligning the coordinate d of the vibrating mirror assembly 140 3 Correcting to make the laser spot falling point move to the coordinate D 1 The coincident position is used for obtaining a two-dimensional coordinate D of the sensor 3-1 And scanning galvanometer two-dimensional coordinate d 3-1 . Wherein D is 1 And D 3-1 Is the same coordinate parameter, d 1 And d 3-1 Are the same coordinate parameter. Therefore, the corresponding relation between the two-dimensional coordinate system of the galvanometer and the two-dimensional coordinate system of the first sensor is recovered to be consistent with that before mass production processing. This step calibrates the origin position of the galvanometer two-dimensional coordinate system of the galvanometer component 140, thereby calibrating the origin drift error of the galvanometer component 140, that is: zero drift error.
Further, after the origin drift calibration is completed, the galvanometer assembly 140 is automatically controlled to move to the position point coordinate d in the two-dimensional coordinate system of the galvanometer 2 Where the laser spot again falls within the acquisition range of the second sensor 154, the coordinate point position D of the laser spot in the two-dimensional coordinate system of the second sensor is obtained from the second sensor 154 4 And the position point coordinate d in the galvanometer two-dimensional coordinate system of the galvanometer assembly 140 4 . In order to make the two coordinates of the laser spot falling point in the two-dimensional coordinate system of the second sensor consistent, the galvanometer component 140 is controlled to move through software calculation, and the coordinate d4 is corrected, so that the laser spot fallsThe entry point moves to the coordinate D 2 The coincident position is used for obtaining a two-dimensional coordinate D of the sensor 5 And scanning galvanometer two-dimensional coordinate d 5 . Wherein D is 2 And D 5 Is the same coordinate parameter, d 2 And d 5 Are the same coordinate parameter.
Finally, the coordinate d is passed 1 And coordinates d 2 To obtain two coordinates d 1 And d 2 Actual linear distance in the middle, by coordinate d 3-1 And coordinates d 5 Obtaining two coordinates d after the fixed time period of mass production processing 3-1 And d 5 Thereby calibrating the distance before and after mass production processing to obtain the coordinate d 3-1 And coordinates d 5 Is equal to the coordinate d 1 And coordinates d 2 This step may enable calibration of the proportional drift error.
In addition, after the above steps are completed, the results of the zero point position calibration and the proportional drift error calibration can be rewritten into the scanning program, and the calibration at this time is completed.
Through the above embodiment of the present embodiment, after the mass production process for a fixed time, the software system may operate the galvanometer assembly 140 to move, and automatically control the galvanometer assembly 140 to move to the coordinate d 1 Coordinate d 2 To retrieve the sensor coordinate D from the first sensor 152 and the second sensor 154 where the new laser spot falls 3 、D 4 And the corresponding coordinate d in the two-dimensional coordinate system of the galvanometer 3 、d 4 Newly pair d 3 、d 4 Correcting to obtain new sensor coordinate corresponding to scanning galvanometer coordinate D in scanning galvanometer coordinate system 3-1 、D 5 And the corresponding coordinate d in the coordinate system of the scanning galvanometer 3-1 、d 5 And repeating the next round of calibration. It should be noted that in the entire laser processing system of the present embodiment, all system components of the existing laser processing system are not changed, and only the first sensor 152 and the second sensor 154 need to be added at two positions within the scanning range 200 of the galvanometer assembly at the position of the worktable 120. Through software control, before mass production processingAnd after the coordinates of the two positions are calibrated and processed for a fixed time in a mass production mode, the coordinates in the first sensor 152 and the second sensor 154 are automatically obtained again through software, and the calibration of the zero drift error and the proportional drift error of the galvanometer component 140 is realized. This embodiment is calibrated again after a fixed amount of time has elapsed for production.
In summary, the embodiment of the invention has the following beneficial effects:
1. the embodiment of the invention can further solve the problem of poor processing caused by zero drift error and proportional drift error of the galvanometer component 140, and improve the yield of equipment processing products.
2. The embodiment of the invention can realize repeated calibration of the galvanometer component 140 in the process of online mass production processing, does not need shutdown operation, and can carry out calibration after mass production processing at fixed time intervals through software control, thereby saving the shutdown time.
In the present invention, the terms "first", "second", and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance; the term "plurality" means two or more unless expressly limited otherwise. The terms "mounted," "connected," "fixed," and the like are used broadly and should be construed to include, for example, "connected" may be a fixed connection, a detachable connection, or an integral connection; "coupled" may be direct or indirect through an intermediary. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "left", "right", "front", "rear", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the referred device or unit must have a specific direction, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.
In the description herein, the description of the terms "one embodiment," "some embodiments," "specific embodiments," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and various modifications and changes will occur to those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (5)

1. A method of calibrating a laser machining apparatus, wherein a laser machining apparatus is used, the laser machining apparatus comprising:
a controller;
a work table;
a light source assembly adapted to generate a laser beam;
the galvanometer component is used for projecting the laser beam from the light source component on the worktable to form a laser spot and moving in a two-dimensional coordinate system of the galvanometer to adjust the irradiation position of the laser spot on the worktable;
the sensor is used for acquiring the irradiation position of the laser spot on the worktable surface so as to obtain the coordinate of the laser spot in a two-dimensional coordinate system of the sensor according to the irradiation position;
the two-dimensional coordinate system of the sensor corresponds to the two-dimensional coordinate system of the galvanometer, and the controller calibrates the coordinates of the galvanometer component in the two-dimensional coordinate system of the galvanometer according to the coordinates of the laser spots in the two-dimensional coordinate system of the sensor;
correspondingly adjusting the position of the galvanometer component according to the change of the sensor change coordinate relative to the sensor reference coordinate, so that the sensor change coordinate is restored to the sensor reference coordinate, and further the galvanometer component change coordinate is restored to the galvanometer component reference coordinate;
the sensor includes:
the first sensor is suitable for acquiring the coordinates of the laser spot in a two-dimensional coordinate system of the first sensor;
the second sensor is suitable for acquiring the coordinates of the laser spots in a two-dimensional coordinate system of the second sensor;
the origin position of the two-dimensional coordinate system of the first sensor corresponds to the origin position of the two-dimensional coordinate system of the galvanometer, and the origin position of the two-dimensional coordinate system of the second sensor corresponds to any point position in a quadrant of the two-dimensional coordinate system of the galvanometer;
the first sensor and the second sensor are matched with each other to finish the correction and calibration of the position and the distance of the galvanometer component in the two-dimensional coordinate system of the galvanometer;
the first sensor is arranged on the working table surface and is arranged below the initial position of the galvanometer component;
the second sensor is arranged at any position of the working table surface;
the first sensor and the second sensor are both arranged at positions within the scanning range of the galvanometer component of the working table top;
the calibration method of the laser processing equipment comprises the following steps:
before and after the beginning and the end of at least one processing period respectively, acquiring coordinates of the laser light spots in a two-dimensional coordinate system of the sensor by using the sensor;
calibrating the galvanometer component according to the change of the coordinate of the laser spot in the two-dimensional coordinate system of the sensor;
the step of acquiring, by the sensor, the coordinates of the laser spot in the two-dimensional coordinate system of the sensor before and after the start and the end of at least one processing cycle, respectively, includes:
before at least one processing cycle begins, moving the laser spot to any position through the galvanometer component, acquiring the coordinate of the laser spot in the two-dimensional coordinate system of the sensor and recording the coordinate as a reference coordinate of the sensor, and acquiring the coordinate of the reference coordinate of the sensor in the two-dimensional coordinate system of the galvanometer and recording the coordinate as the reference coordinate of the galvanometer component;
after at least one processing cycle is finished, the laser spot is moved back to any position through the galvanometer component, the coordinate of the laser spot in the two-dimensional coordinate system of the sensor is obtained and recorded as a sensor change coordinate, and the coordinate of the laser spot in the two-dimensional coordinate system of the galvanometer component is obtained and recorded as a galvanometer component change coordinate.
2. The method for calibrating laser processing equipment according to claim 1, wherein the calibrating the galvanometer component according to the change of the coordinates of the laser spot in the two-dimensional coordinate system of the sensor specifically comprises:
and correspondingly adjusting the position coordinate of the galvanometer component according to the change of the sensor change coordinate relative to the sensor reference coordinate, so that the sensor change coordinate is restored to the sensor reference coordinate, and further the galvanometer component change coordinate is restored to the galvanometer component reference coordinate.
3. A method of calibrating a laser machining apparatus, wherein a laser machining apparatus is used, the laser machining apparatus comprising:
a controller;
a work table;
a light source assembly adapted to generate a laser beam;
the galvanometer component is used for projecting the laser beam from the light source component on the worktable to form a laser spot and moving in a two-dimensional coordinate system of the galvanometer to adjust the irradiation position of the laser spot on the worktable;
the sensor is used for acquiring the irradiation position of the laser spot on the worktable surface so as to obtain the coordinate of the laser spot in a two-dimensional coordinate system of the sensor according to the irradiation position;
the two-dimensional coordinate system of the sensor corresponds to the two-dimensional coordinate system of the galvanometer, and the controller calibrates the coordinate of the galvanometer component in the two-dimensional coordinate system of the galvanometer according to the coordinate of the laser spot in the two-dimensional coordinate system of the sensor;
correspondingly adjusting the position of the galvanometer component according to the change of the sensor change coordinate relative to the sensor reference coordinate, so that the sensor change coordinate is restored to the sensor reference coordinate, and further the galvanometer component change coordinate is restored to the galvanometer component reference coordinate;
the sensor includes:
the first sensor is suitable for acquiring the coordinates of the laser spot in a two-dimensional coordinate system of the first sensor;
the second sensor is suitable for acquiring the coordinates of the laser spots in a two-dimensional coordinate system of the second sensor;
the origin position of the two-dimensional coordinate system of the first sensor corresponds to the origin position of the two-dimensional coordinate system of the galvanometer, and the origin position of the two-dimensional coordinate system of the second sensor corresponds to any point position in a quadrant of the two-dimensional coordinate system of the galvanometer;
the first sensor and the second sensor are matched with each other to finish correction and calibration of the position and the distance of the galvanometer component in the galvanometer two-dimensional coordinate system;
the first sensor is arranged on the working table surface and is arranged below the initial position of the galvanometer component;
the second sensor is arranged at any position of the working table surface;
the first sensor and the second sensor are both arranged at positions within the scanning range of the galvanometer component of the working table top;
the calibration method of the laser processing equipment comprises the following steps:
before and after the beginning and the end of at least one processing cycle respectively, acquiring coordinates of the laser spot in a two-dimensional coordinate system of the first sensor by using the first sensor;
before and after the beginning and the end of at least one processing cycle respectively, acquiring coordinates of the laser spot in a two-dimensional coordinate system of a second sensor by using the second sensor;
carrying out zero drift calibration on the galvanometer component according to the change of the coordinate of the laser spot in the two-dimensional coordinate system of the first sensor;
according to the change of the coordinate of the laser spot in the two-dimensional coordinate system of the first sensor and the change of the coordinate of the laser spot in the two-dimensional coordinate system of the second sensor, carrying out proportional drift calibration on the galvanometer component;
the first sensor is arranged on the working table and below the initial position of the galvanometer component, and the second sensor is arranged at any position of the working table;
the two-dimensional coordinate system of the first sensor corresponding to the first sensor covers the initial position of the laser spot projected by the galvanometer component, the initial position is an original position or a zero position, and the moving distance of the laser spot relative to the initial position can be obtained through the acquisition results of the second sensor and the first sensor;
the step of acquiring, by the first sensor, coordinates of the laser spot located in the two-dimensional coordinate system of the first sensor before and after the start and the end of at least one processing cycle, respectively, includes:
before at least one processing cycle begins, moving the laser spot to an initial position through the galvanometer component, acquiring a coordinate of the laser spot in the two-dimensional coordinate system of the first sensor and recording the coordinate as a reference coordinate of the first sensor, acquiring a coordinate of the reference coordinate of the first sensor in the two-dimensional coordinate system of the galvanometer and recording the coordinate as the reference coordinate of the first galvanometer component;
after at least one processing period is finished, the laser light spot is moved back to the initial position through the galvanometer component, the coordinate of the laser light spot in the two-dimensional coordinate system of the sensor is obtained and recorded as a first sensor change coordinate, and the coordinate of the laser light spot in the two-dimensional coordinate system of the galvanometer is obtained and recorded as a first galvanometer component change coordinate;
the calibrating zero drift of the galvanometer component according to the change of the coordinate of the laser spot in the two-dimensional coordinate system of the first sensor specifically comprises the following steps:
and correspondingly adjusting the position coordinate of the galvanometer component according to the change of the first sensor change coordinate relative to the first sensor reference coordinate, so that the first sensor change coordinate is restored to the first sensor reference coordinate, and the first galvanometer component change coordinate is restored to the first galvanometer component reference coordinate.
4. The calibration method of a laser processing apparatus according to claim 3,
the acquiring, by the second sensor, the coordinates of the laser spot in the second sensor two-dimensional coordinate system before and after the start and the end of at least one processing cycle respectively includes:
before at least one processing cycle begins, moving the laser spot to any position through the galvanometer component, acquiring the coordinate of the laser spot in the two-dimensional coordinate system of the second sensor and recording the coordinate as the reference coordinate of the second sensor, acquiring the coordinate of the reference coordinate of the second sensor in the two-dimensional coordinate system of the galvanometer and recording the coordinate as the reference coordinate of the second galvanometer component;
after at least one processing period is finished, the laser light spots are moved back to any position through the galvanometer component, coordinates of the laser light spots in the two-dimensional coordinate system of the second sensor are obtained and recorded as second sensor change coordinates, and coordinates of the laser light spots in the two-dimensional coordinate system of the galvanometer component and the second sensor change coordinates are obtained and recorded as second galvanometer component change coordinates;
the calibrating the proportional drift of the galvanometer component according to the change of the coordinate of the laser spot in the two-dimensional coordinate system of the second sensor specifically comprises:
and correspondingly adjusting the position coordinate of the galvanometer component according to the change of the change coordinate of the second sensor relative to the reference coordinate of the second sensor, and restoring the change coordinate of the second sensor to the reference coordinate of the second sensor so as to obtain the change coordinate of the galvanometer component restored to the reference coordinate of the galvanometer component.
5. The method of calibrating laser processing equipment of claim 4, wherein said scaling drift calibration of said galvanometer assembly based on changes in coordinates of said laser spot in said first sensor two-dimensional coordinate system and changes in coordinates of said laser spot in said second sensor two-dimensional coordinate system further comprises:
acquiring the distance between the first galvanometer component reference coordinate and the second galvanometer component reference coordinate, and recording the distance as a reference distance;
acquiring the distance between the change coordinates of the first galvanometer component and the change coordinates of the second galvanometer component, and recording the distance as a change distance;
and correspondingly adjusting the position coordinates of the galvanometer component according to the change of the change distance relative to the reference distance so as to restore the change distance to the reference distance.
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CN112103373B (en) * 2020-11-12 2021-08-13 常州捷佳创精密机械有限公司 Edge processing system and method for solar cell

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3088117B2 (en) * 1991-02-21 2000-09-18 エヌイーシーレーザ・オートメーション株式会社 Laser processing equipment
JP2002090682A (en) * 2000-09-19 2002-03-27 Matsushita Electric Ind Co Ltd Galvanometer, position-correcting method for the galvanometer, laser beam machining apparatus using the galvanometer, and laser beam machining method using the galvanometer
CN101804521B (en) * 2010-04-15 2014-08-20 中国电子科技集团公司第四十五研究所 Galvanometer system correction device and correction method thereof
DE102010032800A1 (en) * 2010-07-30 2012-02-02 Isedo Ag Method and device for calibrating a laser processing machine
CN108072973B (en) * 2016-11-16 2020-09-15 英塔赛利环保科技(天津)有限公司 Laser galvanometer device comprising correction system and correction method
CN108072972B (en) * 2016-11-16 2020-09-11 英塔赛利环保科技(天津)有限公司 Laser galvanometer device correction system and method
CN106782031A (en) * 2016-12-27 2017-05-31 中国船舶重工集团公司第七0七研究所 Towards the method for the calibration laser galvanometer index error of paper chart operation
CN109570750B (en) * 2018-12-12 2021-01-08 武汉帝尔激光科技股份有限公司 Laser galvanometer precision online correction system and method
CN210451366U (en) * 2019-09-18 2020-05-05 中国科学院福建物质结构研究所 Galvanometer correction system
CN110940490B (en) * 2019-12-13 2021-05-04 湖南省鹰眼在线电子科技有限公司 Laser spot scanning precision detection method and device of laser processing equipment

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