CN108072973B - Laser galvanometer device comprising correction system and correction method - Google Patents
Laser galvanometer device comprising correction system and correction method Download PDFInfo
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- CN108072973B CN108072973B CN201611006298.2A CN201611006298A CN108072973B CN 108072973 B CN108072973 B CN 108072973B CN 201611006298 A CN201611006298 A CN 201611006298A CN 108072973 B CN108072973 B CN 108072973B
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- 238000000034 method Methods 0.000 title claims abstract description 15
- 238000005259 measurement Methods 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 description 4
- 230000003111 delayed effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
Abstract
The invention discloses a laser galvanometer system capable of being corrected in real time and a correction method, wherein the system comprises a laser, a galvanometer system and a controller connected with the laser; a central controller and a high-speed camera are also arranged; the high-speed camera collects the actual position of the laser, the position information is transmitted to the central controller, the central controller calculates the real-time error, the error is converted into a correction signal and transmitted to the controller of the galvanometer system, and correction is completed. The correction system and method can realize real-time correction.
Description
Technical Field
The present invention relates to a correction system and a correction method, and particularly to correction of a laser galvanometer.
Background
Laser galvanometers are increasingly widely applied to the field of daily life. The laser galvanometer can control the emitting direction and the emitting direction of laser light through the vibration of the plurality of reflectors in a plurality of dimensions. The control of the laser direction through multiple dimensions forms a laser image on the projection screen that is formed due to persistence of vision. The laser galvanometer system consists of an X-Y optical scanning head, an electronic driving amplifier and an optical reflecting mirror. The signal provided by the computer controller drives the optical scanning head through the drive amplifier circuit, thereby controlling the deflection of the laser beam in the X-Y plane. In a laser demonstration system, the waveform of the optical scanning is a vector scanning, and the scanning speed of the system determines the stability of a laser pattern. In recent years, high-speed scanners have been developed, with scanning speeds up to 45000 dots per second, and thus capable of demonstrating complex laser animation.
The scanning principle adopted is as follows: the scanning pattern is a two-dimensional effect pattern, so that the scanning motor is controlled by X, Y two motors, the position of one point is determined at one moment, the position of the point at different moments is converted into the whole scanning pattern by controlling the scanning frequency, the lower the scanning frequency (speed), the more obvious the pattern flicker is, and the scanning pattern can be understood by a principle mode of a movie.
Due to the frequent use of the laser galvanometer system and the high-frequency vibration of the galvanometer, the problem of inaccurate positioning can occur after the laser galvanometer is used for a period of time, namely, the galvanometer cannot return to an initial position, so that the actual position of a laser spot is not a preset position, and a positioning error is caused. This is particularly important for error correction. The existing known correction system and method are completed under the condition that the laser galvanometer system does not work, and no real-time correction is carried out. Therefore, the normal work of the laser galvanometer can be delayed, the error condition of the laser galvanometer cannot be known in real time, and whether the laser galvanometer needs to be corrected in time or not is not known. In order to solve the technical problems, the invention provides a solution which can correct in time and reduce the problem of influencing the normal operation of the laser galvanometer caused by correction. Meanwhile, compared with the traditional correction mode, the correction system and the correction method can correct the laser galvanometer more timely.
Disclosure of Invention
A laser galvanometer device comprising a correction system comprises a laser for emitting visible laser; the scanning galvanometer comprises an X-axis scanning galvanometer and a Y-axis scanning galvanometer which are respectively used for reflecting visible laser emitted by the laser in the X-axis direction and the Y-axis direction; the X-axis scanning galvanometer is connected with an X-axis controller, and the Y-axis scanning galvanometer is connected with a Y-axis controller; the X-axis controller and the Y-axis controller are used for controlling the scanning angles of the scanning galvanometer in the X axis and the Y axis; the central controller transmits pre-stored control signals to the X-axis controller and the Y-axis controller respectively so as to determine the rotation angle of the scanning galvanometer; a high-speed camera is used for shooting the actual coordinate position of the reflected laser on the screen; the high-speed camera transmits the shot real-time image data to the central controller, and an error processing unit is arranged in the central controller and used for comparing the position coordinates (x ', y') of the laser points in the real-time image with the position coordinates (x, y) of the laser points stored in the central controller to obtain an error; the error processing unit decomposes the error into an X-axis direction errorXAnd error in Y-axis directionYIn the central controller, there is a signal output unit which outputs a correction signal before outputting a next control signal to the X-axis controller and the Y-axis controllerXAnd-YAnd adding a control signal prestored in advance to finish the correction of the scanning galvanometer.
One comprisesThe calibration method of the laser galvanometer device of the calibration system comprises the following steps: 1) emitting visible laser light by a laser; 2) the scanning galvanometer comprises an X-axis scanning galvanometer and a Y-axis scanning galvanometer which are respectively used for reflecting visible laser emitted by the laser in the X-axis direction and the Y-axis direction; the X-axis scanning galvanometer is connected with an X-axis controller, and the Y-axis scanning galvanometer is connected with a Y-axis controller; the X-axis controller and the Y-axis controller are used for controlling the scanning angles of the scanning galvanometer in the X axis and the Y axis; 3) the central controller transmits pre-stored control signals to the X-axis controller and the Y-axis controller respectively so as to determine the rotation angle of the scanning galvanometer; 4) a high-speed camera is used for shooting the actual coordinate position of the reflected laser on the screen; the high-speed camera transmits the shot real-time image data to the central controller; 5) an error processing unit is arranged in the central controller and used for comparing the position coordinates (x ', y') of the laser points in the real-time image with the position coordinates (x, y) of the laser points stored in the central controller to obtain an error; the error processing unit decomposes the error into an X-axis direction errorXAnd error in Y-axis directionYIn the central controller, there is a signal output unit which outputs a correction signal before outputting a next control signal to the X-axis controller and the Y-axis controllerXAnd-YAnd superposing the control signals prestored in advance to finish the correction of the scanning galvanometer.
The measurement method can also be used for carrying out secondary correction when the laser galvanometer is in operation.
Specifically, after the laser galvanometer works for a period of time t, opening an account of the high-speed camera to obtain the real-time position of the laser, transmitting the real-time position of the laser to the central controller, and calculating to obtain a second error so as to perform secondary correction.
The central controller is provided with a storage unit, and the storage unit stores error empirical values after a certain time period T corresponding to various scanning modes of the laser. When the scanning time of the laser reaches a period T, a correction mode is automatically started, the stored error empirical value is converted into a corresponding correction empirical value to be superposed on a control signal, and the corresponding correction empirical value is transmitted to the X-axis controller and the Y-axis controller.
Drawings
FIG. 1 is a schematic diagram of a laser galvanometer device and a calibration method of the present invention
Detailed Description
A laser galvanometer device comprising a correction system comprises a laser 1 for emitting visible laser; a scanning galvanometer, which comprises an X-axis scanning galvanometer 21 and a Y-axis scanning galvanometer 22, and is used for reflecting visible laser emitted by the laser in the X-axis direction and the Y-axis direction respectively; the X-axis scanning galvanometer 21 is connected with an X-axis controller 2a, and the Y-axis scanning galvanometer 22 is connected with a Y-axis controller 2 b; the X-axis controller 2a and the Y-axis controller 2b are used for controlling the scanning angles of the scanning galvanometer in the X axis and the Y axis; a central controller 3, wherein the central controller 3 transmits control signals prestored in advance to an X-axis controller and a Y-axis controller respectively so as to determine the rotation angle of the scanning galvanometer; a high-speed camera 4 is used for shooting the actual coordinate position of the reflected laser on the screen 5; the high-speed camera 4 transmits the shot real-time image data to the central controller 3, and an error processing unit is arranged in the central controller 3 and used for comparing the position coordinates (x ', y') of the laser points in the real-time image with the position coordinates (x, y) of the laser points stored in the central controller to obtain an error; the error processing unit decomposes the error into an X-axis direction errorXAnd error in Y-axis directionYIn the central controller 3, there is a signal output unit which outputs a correction signal before outputting the next control signal to the X-axis controller 2a and the Y-axis controller 2bXAnd-YAnd adding a control signal prestored in advance to finish the correction of the scanning galvanometer.
A method of calibrating a laser galvanometer device including a calibration system, the method comprising the steps of: 1) emitting visible laser light by a laser 1; 2) the scanning galvanometer comprises an X-axis scanning galvanometer 21 and a Y-axis scanning galvanometer 22 which are respectively used for reflecting visible laser emitted by the laser in the X-axis direction and the Y-axis direction; the X-axis scanning galvanometer 21The Y-axis scanning galvanometer 22 is connected with a Y-axis controller 2 b; the X-axis controller 2a and the Y-axis controller 2b are used for controlling the scanning angles of the scanning galvanometer in the X axis and the Y axis; 3) a central controller 3, wherein the central controller 3 transmits control signals prestored in advance to the X-axis controller 2a and the Y-axis controller 2b respectively so as to determine the rotation angle of the scanning galvanometer; 4) a high-speed camera 4 is used for shooting the actual coordinate position of the reflected laser on the screen 5; the high-speed camera 4 transmits the shot real-time image data to the central controller 3; 5) an error processing unit is arranged in the central controller 3 and used for comparing the position coordinates (x ', y') of the laser points in the real-time image with the position coordinates (x, y) of the laser points stored in the central controller 3 to obtain an error; the error processing unit decomposes the error into an X-axis direction errorXAnd error in Y-axis directionYIn the central controller 3, there is a signal output unit which outputs a correction signal before outputting the next control signal to the X-axis controller and the Y-axis controllerXAnd-YControl signals pre-stored in advance are superposed to finish the correction of the scanning galvanometer; after the set time t, the high-speed camera 4 measures the actual position of the laser again to obtain the 2 nd measurement error, and feeds the error back to the central controller 3, and the 2 nd correction is completed in the same way as the method.
The central controller is provided with a storage unit, and the storage unit stores error empirical values after a certain time period T corresponding to various scanning modes of the laser. When the scanning time of the laser reaches a period T, a correction mode is automatically started, the stored error empirical value is converted into a corresponding correction empirical value to be superposed on a control signal, and the corresponding correction empirical value is transmitted to the X-axis controller and the Y-axis controller. The empirical values stored in the memory are error-related empirical values stored for a plurality of identical laser galvanometer devices after performing identical or similar scanning operations. Because the laser galvanometer repeatedly vibrates in the specified action, different scanning corresponds to different error values, but the scanning actions are the same or similar, the error values after a period of time T do not differ too much, and therefore the empirical value is superposed in a working signal, so that the rapid correction can be realized, and the scanning can not be delayed.
By adopting the technical scheme, the calibration can be completed when the laser galvanometer normally works, so that the calibration is real-time, and the precision is improved.
Claims (1)
1. A method of calibrating a laser galvanometer device including a calibration system, the method comprising the steps of:
1) emitting visible laser light by a laser (1);
2) the scanning galvanometer comprises an X-axis scanning galvanometer (21) and a Y-axis scanning galvanometer (22) which are respectively used for reflecting visible laser emitted by a laser in the X-axis direction and the Y-axis direction; the X-axis scanning galvanometer (21) is connected with an X-axis controller (2a), and the Y-axis scanning galvanometer (22) is connected with a Y-axis controller (2 b); the X-axis controller (2a) and the Y-axis controller (2b) are used for controlling the scanning angles of the scanning galvanometer in the X axis and the Y axis;
3) a central controller) (3), wherein the central controller (3) transmits control signals prestored in advance to an X-axis controller (2a) and a Y-axis controller (2b) respectively so as to determine the rotation angle of the scanning galvanometer;
4) a high-speed camera (4) is used for shooting the actual coordinate position of the reflected laser on the screen (5); the high-speed camera (4) transmits the shot real-time image data to the central controller 3;
5) an error processing unit is arranged in the central controller (3) and used for comparing the position coordinates (x ', y') of the laser points in the real-time image with the position coordinates (x, y) of the laser points stored in the central controller (3) to obtain an error; the error processing unit decomposes the error into an X-axis direction error (X) and a Y-axis direction error (Y), a signal output unit is arranged in the central controller (3), and before outputting the next control signal to the X-axis controller and the Y-axis controller, the signal output unit adds the correction signals (-X) and (-Y) to the control signal prestored in advance to finish the correction of the scanning galvanometer;
6) after the set time t, the high-speed camera (4) measures the actual position of the laser again to obtain a 2 nd measurement error, the error is fed back to the central controller (3), and the 2 nd correction is completed in the same way as the method;
the central controller is provided with a storage unit, the storage unit stores error experience values after a certain time period T corresponding to various scanning modes of the laser (1), when the scanning time of the laser reaches the period T, the correction mode is automatically started, the stored error experience values are converted into corresponding correction experience values to be superposed on the control signals, and the correction experience values are transmitted to the X-axis controller and the Y-axis controller to finish rapid correction.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109143124B (en) * | 2018-08-01 | 2020-11-17 | 歌尔光学科技有限公司 | Magnet polarity detection method, device, system and storage medium |
| CN111186217B (en) * | 2018-11-15 | 2021-04-09 | 苏州苏大维格科技集团股份有限公司 | Laser printing system with galvanometer checking function |
| CN109309825B (en) * | 2018-11-26 | 2024-01-23 | 长兴博泰电子科技股份有限公司 | Laser animation projection device and control method |
| CN109773332B (en) * | 2018-12-29 | 2021-04-27 | 大族激光科技产业集团股份有限公司 | Multi-galvanometer system correction method and multi-galvanometer correction system |
| CN109738164A (en) * | 2019-01-18 | 2019-05-10 | 深圳市鹏鼎自动化技术有限公司 | A kind of laser index carving galvanometer high-precision correction system and method |
| CN109827505B (en) * | 2019-03-26 | 2020-05-19 | 北京航空航天大学 | High-precision laser scanning galvanometer position sensor calibration system |
| CN111843190B (en) * | 2020-06-22 | 2023-04-07 | 常州捷佳创智能装备有限公司 | Calibration method for laser processing equipment |
| CN114764190B (en) * | 2021-01-11 | 2024-02-09 | 深圳市大族数控科技股份有限公司 | Automatic correction method for laser processing equipment and computer equipment |
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| CN1547055A (en) * | 2003-12-12 | 2004-11-17 | 华中科技大学 | Vibrating mirror type laser scanning system |
| CN101651496A (en) * | 2009-09-08 | 2010-02-17 | 长春理工大学 | Beacon optical axis precision positioning system in atmosphere laser communication system |
| CN105834580A (en) * | 2014-11-20 | 2016-08-10 | 财团法人工业技术研究院 | Three-dimensional laser processing device and positioning error correction method |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1547055A (en) * | 2003-12-12 | 2004-11-17 | 华中科技大学 | Vibrating mirror type laser scanning system |
| CN101651496A (en) * | 2009-09-08 | 2010-02-17 | 长春理工大学 | Beacon optical axis precision positioning system in atmosphere laser communication system |
| CN105834580A (en) * | 2014-11-20 | 2016-08-10 | 财团法人工业技术研究院 | Three-dimensional laser processing device and positioning error correction method |
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Effective date of registration: 20240312 Address after: 300450 Tianjin Binhai New Area High tech Zone Huayuan Industrial Zone Haitai Development Sixth Road No. 3 Xingqi No.1 Park Building 2, 3rd and 4th floors Patentee after: TIANJIN TIANXING TECHNOLOGY DEVELOPMENT Co.,Ltd. Guo jiahuodiqu after: Zhong Guo Address before: 300380 block c-102, building 4, No. 2, Haitai Huake fifth road, Huayuan Industrial Zone (outside the ring), Binhai high tech Zone, Xiqing District, Tianjin Patentee before: Yingta Saili environmental protection technology (Tianjin) Co.,Ltd. Guo jiahuodiqu before: Zhong Guo |