CN1117987C - Resultant jet flow angular-velocity meter - Google Patents
Resultant jet flow angular-velocity meter Download PDFInfo
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- CN1117987C CN1117987C CN 01129216 CN01129216A CN1117987C CN 1117987 C CN1117987 C CN 1117987C CN 01129216 CN01129216 CN 01129216 CN 01129216 A CN01129216 A CN 01129216A CN 1117987 C CN1117987 C CN 1117987C
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- spout
- jet
- jet flow
- velocity meter
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- 238000012545 processing Methods 0.000 claims abstract description 10
- 239000007921 spray Substances 0.000 claims description 17
- 239000012528 membrane Substances 0.000 claims description 9
- 238000005516 engineering process Methods 0.000 claims description 7
- 230000002194 synthesizing effect Effects 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims description 3
- 230000003068 static effect Effects 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 abstract description 5
- 230000035945 sensitivity Effects 0.000 abstract description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 238000005507 spraying Methods 0.000 abstract 2
- 238000003786 synthesis reaction Methods 0.000 abstract 2
- 230000002349 favourable effect Effects 0.000 abstract 1
- 238000011031 large-scale manufacturing process Methods 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 6
- 239000012530 fluid Substances 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 238000013461 design Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000013467 fragmentation Methods 0.000 description 1
- 238000006062 fragmentation reaction Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000035800 maturation Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
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Abstract
The present invention belongs to the sensor technical field. The present invention adopts a jet stream source of a synthesis spraying machine composed of a driver vibrating film and a spout. One pair or a plurality of pairs of heat sensitive sensors are symmetrically arranged on both sides of a central line of the synthesis spraying machine. The heat sensitive sensors are positioned at places which are 9 to 15 times of distance away from the diameter of the spout. The present invention is suitable for being applied to different occasions, particularly for situations of bad working circumstances. The spin-rate meter has the characteristics of simple structure, good reliability, high sensitivity and resolution, and low cost, and can easily realize large-scale production and seriation production. The cost for processing silicon can be greatly reduced, and simultaneously favorable performance can be ensured.
Description
The invention belongs to sensor technical field.
All need to widely apply angular-rate sensor or gyroscope in fields such as automobile, military affairs, the product for civilian use (such as camera, toy, mouse), Industry Control, aviation and boats and ships.Development performance novel turn meter device better, that reliability is higher, price is lower is the target that people are pursuing always.In the device of the measured angular speed of having used at present, general characteristics are to need rotary part.The existence of rotary part makes that the life-span of device is short, and reliability is low, and in addition, it also makes little processing difficulties, and cost raises.United States Patent (USP) 5012676 has proposed a kind of with the turn meter of gas jet as actuating medium, and its synoptic diagram as shown in Figure 1.It is with a pump 1,2 form fluid by spout 3 flows, a flow through long and narrow runner 5 and be subjected to the heating of heating plate 4 and form hot fluid of this fluid streams forms jet via spout 6 subsequently, and is mapped on two heat sensitive sensors 8 that are arranged symmetrically on the lumen centerline in cavity 7.When not having angular velocity, jet does not have deflection, two thermo-responsive silks detect identical temperature, and in the time of angular velocity, jet deflects, formation temperature is poor between two heat sensitive sensors, is comprising the information of angular velocity in this difference, can measured angular speed by measuring temperature difference.The parts of the key of above-mentioned turn meter are pump 1,2 and runner 5, and this structure makes that the size of this turn meter is bigger, and is on the high side.In addition, long and narrow runner 5 makes the effluxvelocity decay very fast, and this will cause the sensitivity of turn meter and resolution to reduce greatly.
The objective of the invention is for overcoming the weak point of prior art, a kind of resultant jet flow angular-velocity meter is proposed, adopt synthetic spray apparatus as jet source, adopt fluid as actuating medium, do not have rotary part, have simple in structure, good reliability, sensitivity and resolution height, characteristics that cost is low.
A kind of resultant jet flow angular-velocity meter that the present invention proposes, it is characterized in that, the synthesizing jet source that employing is made of driver vibrating membrane and spout, a pair of or many heat sensitive sensor is arranged symmetrically in the center line both sides of said synthetic spray, the position of this heat sensitive sensor is positioned at nozzle diameter 9-15 doubly outside the distance.
The present invention can adopt precision optical machinery processing or micro-processing technology to make.
The driver of said synthetic spray can be electromagnetism, piezoelectricity, any one of type of drive such as static.
Said synthesizing jet source can comprise a shell, be fixed on the working cavity on the shell, driver vibrating membrane and spout, their edge is all on the steady job cavity, be fixed on the wiring board that has metering circuit of shell and cavity one side, be arranged symmetrically in a plurality of backflows and louvre on the jet working cavity.
Principle of work of the present invention and characteristic:
At first simply introduce the notion of synthetic spray.Fig. 2 is the basic functional principle figure of synthetic spray.A cavity 10 is arranged among the figure, and cavity 10 1 sides are films 9, and opposite side has an aperture (spout) 11, and the mode by film periodic vibration makes gas periodically be entered by aperture and flows out cavity.When gas flows out aperture, effluent air and form a shear layer on every side between the stationary gas, this layer vortex collar vortex 12 of formation of will reeling, it leaves cavity under the effect and moves downstream drawing certainly.Meanwhile, along with the past swivel motion of film, gas will be inhaled into cavity from aperture, and therefore collar vortex is not subjected to the influence of suction process at this moment away from cavity.Like this, a series of collar vortex will form, and these collar vortexs will experience process such as instability and fragmentation and finally form turbulent flow spray 13 near aperture in motion process.This several characteristics that is sprayed with; 1) need not FLUID TRANSPORTATION, clean mass rate is zero; 2) electrical quantity control, the speed of jet can be undertaken by changing the actuator electrical parameter.These characteristics makes synthetic spray can be integrated in easily in the measurement of angular velocity, and it has simplified the pumping unit that general injection stream needs, and can adopt micro-processing technology to process, and reduces cost greatly from anti-.
The General Principle synoptic diagram of measured angular speed as shown in Figure 3.14 is turn meter among the figure, F
LBe centrifugal force, F
KBe coriolis force, V
rBe the speed in the relative measured object measuring element, the angular velocity of ω for measuring.It mainly is that information by the coriolis force that is comprising on the measuring element obtains the angular velocity amount.
Resultant jet flow angular-velocity meter utilizes above-mentioned principle and forms in conjunction with synthetic spray notion.Owing to do not have pump and long and narrow runner, this turn meter can adopt dual mode to machine, the one, and precision optical machinery processing, the 2nd, micromachined is just processed through the IC technology with silicon materials.It produces jet by synthetic spray and is used as actuating medium, is not having under the situation of angular velocity, and jet can not deflect, as shown in Figure 4.In this time, a pair of or many heat sensitive sensors to heating that are arranged symmetrically in the jet will be subjected to the same impact of the air-flow of relative low temperature, so temperature is identical, does not have electric signal output.In the time of angular velocity, owing to be subjected to the coriolis force effect, jet deflects, and synoptic diagram as shown in Figure 5.At this time, the jet impulse generation difference that corresponding a pair of heat sensitive sensor is suffered, temperature difference will produce between these two sensors, and this temperature difference is proportional to coriolis force, and comprising the information of angular velocity in the coriolis force, therefore by measuring the information that temperature difference can obtain angular velocity.
Characteristics of the present invention and range of application:
1, owing to adopt synthetic spray apparatus, adopt fluid, do not have rotary part as actuating medium as jet source,
Therefore the mission life of this turn meter is longer.
2, adopt synthetic spray to form jet, do not have long and narrow runner, simple in structure, be convenient to processing and manufacturing;
3, jet acts directly on the Sensitive Apparatus, and effluxvelocity is bigger, so sensitivity and resolution height.
4, because the micro-processing technology maturation of synthetic spray and heat sensitive sensor can be utilized the technology of making integrated circuit
(IC technology) is a large amount of to be made, and greatly reduces cost, therefore is applicable to situation cheaply, than
As be used for airbag safety systems and toy in the automobile;
5, the present invention is suitable for the long-life situation of needs of the application under the different occasions, particularly work under bad environment.
Brief Description Of Drawings:
Fig. 1 is the structural representation of existing efflux angle velograph.
Fig. 2 is the principle of work synoptic diagram of synthetic spray of the present invention.
Fig. 3 is a turn meter measuring principle synoptic diagram of the present invention.
Fig. 4 is not left-right symmetric figure for there being the angular velocity jet in the present invention.
Fig. 5 is for there being the angular velocity jet figure that deflects in the present invention.
Fig. 6 is the structure meter synoptic diagram of the embodiment one of use pair of sensors of the present invention.
Fig. 7 is the structural representation of the embodiment two of two pairs of sensors of use of the present invention.
The present invention designs two kinds of resultant jet flow angular-velocity meter embodiment, is described with reference to the accompanying drawings as follows:
Embodiment one is for having the resultant jet flow angular-velocity meter of a pair of temperature sensor, and its structure as shown in Figure 6.Among the figure, package casing 17 can be cylindrical or square, and jet working cavity 19 is fixed on the shell 17, one side the jet working cavity be the wiring board 21 that has metering circuit, it is fixed on shell 17 and the cavity 19.Arrange synthetic spray on wiring board 21 right sides, it is made of driver vibrating membrane 20 and spout 15, and their edge is all on the steady job cavity 19.The driver of vibrating membrane 20 can adopt Piezoelectric Driving, static driven or Electromagnetic Drive, and wherein the amplitude of Electromagnetic Drive can be bigger, helps the formation of high effluxvelocity, and the driver of vibrating membrane adopts Electromagnetic Drive among the embodiment one, and frequency of operation is 500Hz.The size of spout 15 can be weighed selection as required, in general, under the identical condition of semiperiod mean mass flux, the sensitivity of the turn meter of small size orifice design and resolution will be higher than the design of large scale spout, nozzle diameter in the present embodiment one is 1mm, and vibration film 20 is 4mm apart from the distance of spout 15.In order to detect jet, be that two temperature sensor 18a and the 18b that line of symmetry is arranged is fixed on the jet working cavity with spout 15 center lines, its distance to spout is 10 times nozzle diameter in embodiment one, is 10mm apart from spout just.Temperature sensor adopts the heating thermistor wire to constitute, and its temperature is than jet temperature height.In order effectively to form jet and to prevent that temperature raise in the cavity 19, four backflows and louvre 16a-16d are arranged symmetrically in respectively on the jet working cavity 19, and wherein two on the left side of heating thermistor wire, and two are arranged in the right.Working cavity length in embodiment one is taken as 25mm, highly is 10mm, and backflow and heat radiation aperture are 0.5mm.
Said apparatus mainly is to produce jet by the synthetic spray that is made of driver vibrating membrane 20 and spout 15, is not having under the situation of angular velocity, and jet can not deflect.In this time, the heat sensitive sensor that is arranged symmetrically in a pair of heating in the jet will be subjected to the same impact of the air-flow of relative low temperature, because temperature is identical, not have electric signal output.In the time of angular velocity, because the coriolis force effect, jet deflects.At this time, the jet impulse generation difference that a pair of temperature sensor is suffered, temperature difference will produce between two sensors, and this temperature difference is proportional to coriolis force, and comprising the information of angular velocity in the coriolis force, therefore by measuring the information that temperature difference can obtain angular velocity.
Embodiment two is for having the resultant jet flow angular-velocity meter of two pairs of temperature sensors, its structure as shown in Figure 7, temperature sensor is respectively 18a-18d among the figure, other structures and Fig. 6 are basic identical, principle of work is also basic identical, but accuracy of detection is higher.Working cavity length in the present embodiment two is taken as 15mm, highly be 6mm, backflow and heat radiation aperture are 0.3mm, the driver of vibration film is a Piezoelectric Driving, vibration frequency is 2000Hz, and nozzle diameter is 0.5mm, and vibration film 20 is 1.2mm apart from the distance of spout 15, temperature sensor is 14 times a nozzle diameter apart from the distance of spout, just 7mm.
Except that above two embodiment, can also adopt manyly to the sensor symmetric arrangement, will help improving accuracy of detection like this, reduce error.
Claims (4)
1. resultant jet flow angular-velocity meter, it is characterized in that, the synthesizing jet source that employing is made of driver vibrating membrane and spout, a pair of or many heat sensitive sensor is arranged symmetrically in the center line both sides of said synthetic spray, the position of this heat sensitive sensor is positioned at nozzle diameter 9-15 doubly outside the distance.
2. resultant jet flow angular-velocity meter as claimed in claim 1 is characterized in that, adopts precision optical machinery processing or micro-processing technology to make.
3. resultant jet flow angular-velocity meter as claimed in claim 1 is characterized in that, the driver of said synthetic spray is an electromagnetism, piezoelectricity, any one of type of drive such as static.
4, resultant jet flow angular-velocity meter as claimed in claim 1, it is characterized in that, said synthesizing jet source comprises a shell, be fixed on the working cavity on the shell, driver vibrating membrane and spout, the edge of this driver vibrating membrane and spout all on the steady job cavity, is fixed on the wiring board that has metering circuit of shell and cavity one side, is arranged symmetrically in a plurality of backflows and louvre on the jet working cavity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01129216 CN1117987C (en) | 2001-06-15 | 2001-06-15 | Resultant jet flow angular-velocity meter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01129216 CN1117987C (en) | 2001-06-15 | 2001-06-15 | Resultant jet flow angular-velocity meter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1318751A CN1318751A (en) | 2001-10-24 |
| CN1117987C true CN1117987C (en) | 2003-08-13 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 01129216 Expired - Fee Related CN1117987C (en) | 2001-06-15 | 2001-06-15 | Resultant jet flow angular-velocity meter |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI693101B (en) * | 2015-06-02 | 2020-05-11 | 美商英特爾公司 | Synthetic jet device, method of forming the same and package substrate |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100371716C (en) * | 2004-11-25 | 2008-02-27 | 清华大学 | Micro-channel fluid angular rate sensor |
| CN102288775B (en) * | 2011-07-05 | 2012-12-12 | 北京信息科技大学 | Airflow type angular velocity transducer |
| CN111594920A (en) * | 2020-05-29 | 2020-08-28 | 佛山市万物互联科技有限公司 | Air conditioner indoor unit and air conditioner |
| CN114109899B (en) * | 2021-11-19 | 2022-09-02 | 武汉理工大学 | Continuous intensive air supply device |
-
2001
- 2001-06-15 CN CN 01129216 patent/CN1117987C/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI693101B (en) * | 2015-06-02 | 2020-05-11 | 美商英特爾公司 | Synthetic jet device, method of forming the same and package substrate |
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| Publication number | Publication date |
|---|---|
| CN1318751A (en) | 2001-10-24 |
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