New! View global litigation for patent families

CN102288775B - Airflow type angular velocity transducer - Google Patents

Airflow type angular velocity transducer Download PDF

Info

Publication number
CN102288775B
CN102288775B CN 201110186345 CN201110186345A CN102288775B CN 102288775 B CN102288775 B CN 102288775B CN 201110186345 CN201110186345 CN 201110186345 CN 201110186345 A CN201110186345 A CN 201110186345A CN 102288775 B CN102288775 B CN 102288775B
Authority
CN
Grant status
Grant
Patent type
Prior art keywords
airflow
type
angular
velocity
transducer
Prior art date
Application number
CN 201110186345
Other languages
Chinese (zh)
Other versions
CN102288775A (en )
Inventor
朴林华
王星
余全刚
Original Assignee
北京信息科技大学
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Grant date

Links

Abstract

一种气流式角速度传感器包括测试腔体,设置在所述测试腔体中心位置的敏感元件,对称设置在测试腔体两端的两个压电泵,与测试腔体和压电泵相连通的气体循环通道和信号处理电路;测试腔体为沿轴向中心、径向中心均对称的腔体,在测试腔体的两端位置设置有进气口;两个压电泵与测试腔体的两端具有一定距离,传感器内的气体可在由测试腔体,气体循环通道和压电泵组成的密闭空间内循环,敏感元件为四周设置有四组热敏电阻丝的板状框架结构,每组电阻丝所在直线与敏感元件的中心位置的垂直距离相同,相对的两组热敏丝相互平行,相邻的两组热敏丝之间相互垂直,敏感元件的中心与所述进气口的中心均位于测试腔体的中心线上。 A pneumatic type angular velocity sensor includes a test chamber, provided at the center position of the sensitive element of the test chamber, symmetrically disposed across the two piezoelectric pump test cavity with a test chamber and a piezoelectric pump communicating gas circulation passage and the signal processing circuit; test cavity along the axial center, are symmetrical to the radial center of the cavity, provided at both ends of the position of the test cavity with an air inlet; twenty-two piezoelectric pump the test cavity end with a distance, in the gas sensor may be circulated within the closed space by the test chamber, and the gas circulation passage composed of a piezoelectric pump, the sensitive element is provided with four sets of plate-shaped thermistor wire frame structure around each the same vertical distance from the center position of the straight line where the resistance wire and the sensing element, the thermal fuses two opposing parallel, mutually perpendicular center between the two adjacent thermal fuses, the sensitive element and the center intake port They are located on the center line of the test cavity.

Description

气流式角速度传感器 Airflow angular velocity sensor

技术领域 FIELD

[0001] 本发明涉及一种角速度传感器,特别涉及气流式角速度传感器。 [0001] The present invention relates to an angular velocity sensor, and particularly relates to an angular velocity sensor airflow.

背景技术 Background technique

[0002] 气流式角速度传感器是一种具有陀螺功能而没有传统陀螺的转动部分,也没有压电陀螺悬挂部件的固态惯性器件。 [0002] Airflow gyro angular velocity sensor having a rotating portion traditional function without gyro, piezoelectric gyro suspended solid is no inertia member device. 气流式角速度传感器以气体作为敏感质量,其质量极小。 Air flow type angular velocity sensor as a gas sensitive mass, minimum quality. 气流式传感器以其具有成本低、响应时间短、抗冲击能力强等优点被广泛应用在角速度的测量领域内。 Air flow sensor for its low cost, short response time, high impact resistance, etc. are widely used in the field of angular velocity measurement.

[0003] 现有技术中的气流式角速度传感器通常为二维压电射流角速度传感器,这种气流式角速度传感器通过设置两个敏感元件来分别对x、y两个方向上的角速度进行测量。 [0003] The prior art air flow type angular velocity sensor is typically a piezoelectric angular velocity sensor is a two-dimensional jet, this angular velocity sensor, respectively airflow angular velocity in two directions x, y is measured by the two sensitive elements is provided. 所以,它存在制作起来体积大、成本较高、两个敏感元件之间交叉耦合强等缺点,导致传感器的输出不稳定,重复性较差。 Therefore, it is made up and the presence of bulky, high cost, strong coupling between the two cross-sensitive elements and other shortcomings, causes the output of the sensor instability, poor reproducibility.

发明内容 SUMMARY

[0004] 针对现有技术中的气流式角速度传感器所存在的问题,本发明提供一种新型的角速度传感器包括:测试腔体,设置在所述测试腔体中心位置的敏感元件,对称设置在测试腔体两端的两个压电泵,与测试腔体和所述压电泵相连通的气体循环通道和信号处理电路;所述测试腔体为沿轴向中心、径向中心均对称的腔体,在测试腔体的两端位置设置有进气口;两个压电泵与测试腔体的两端具有一定距离,所述传感器内的气体可在由测试腔体、气体循环通道和压电泵组成的密闭空间内循环,所述敏感元件为四周设置有四组热敏电阻丝的板状框架结构,每组电阻丝所在直线与敏感元件的中心位置的垂直距离相同,相对的两组热敏丝相互平行,相邻的两组热敏丝之间相互垂直,所述敏感元件的中心与所述进气口的中心均位于测试腔体的中心线上;所述气体在 [0004] The prior art for air flow type angular velocity sensor problems, the present invention provides a novel angular velocity sensor comprising: a test chamber, provided at the center position of the sensitive element of the test chamber, the test symmetrically disposed two ends of the piezoelectric pump chamber, the test chamber and the piezoelectric pump gas circulation passage communicating the signal processing circuit; said test cavity along the axial center, are symmetrical to the radial center of the cavity ends position of the test chamber is provided with an intake port; two ends of the test chamber and a piezoelectric pump having a certain distance, the gas sensor may be made within the test chamber, the gas in the circulation passage and a piezoelectric sealed space within the pump cycle consisting of a sensitive element is provided with four sets of plate-shaped thermistor wire frame structure around the same vertical distance from the center position of each linear resistance wire located sensitive element, two opposing sets of heat fuses parallel to one another, perpendicular to each other between two adjacent thermal fuses, the sensitive element center and said intake port centers on the center line of the test cavity; said gas 所述压电泵的作用下形成气体射流束,气体射流束经过设置在测试腔体两端的进气口喷射到敏感元件上,再通过所述出气口进入到气体循环通道中返回,气体射流束喷射到敏感元件上的位置会随着外部角速度的改变而发生偏移,进而导致敏感元件上测试热敏电阻丝对中的两个相对设置的热敏电阻丝的电阻发生改变,经由信号处理电路处理后可根据热敏电阻丝对中两个电阻丝的电阻发生相对变化值得出角速度值。 The piezoelectric effect is formed under the gas jet pump beam, a gas jet beam passes through the intake port is provided at both ends of the test chamber is sprayed onto the sensitive element, then through the outlet into the gas circulating passage to return the gas jet beam injected to a position on the external sensitive element will change with angular velocity offset occurs, leading to the resistance of the thermistor wire to two wire test thermistors sensitive element disposed opposite the change, via the signal processing circuit post-processing may be worth the value of the relative change in angular velocity occurs thermistor resistance wire in accordance with two resistance wires.

[0005] 进一步,所述气体循环通道为偶数个,沿周向均布在所述测试腔体外侧。 [0005] Further, the gas circulation passage is an even number, uniformly distributed circumferentially on the outside of the test chamber.

[0006] 进一步,所述设置在测试腔体两端的进气口为喷嘴体,所述喷嘴体包括主喷嘴和设置在主喷嘴周围的列阵喷嘴,列阵式喷嘴的直径小于主喷嘴直径。 [0006] Further, the body is provided at both ends of the test chamber to the intake port of the nozzle body, said nozzle body includes a main nozzle and a nozzle array disposed around the main nozzle, the diameter of the nozzle array is smaller than the diameter of the main nozzle.

[0007] 进一步,所述测试腔体的内腔截面形状为喇叭口相对设置的两个喇叭形状。 [0007] Further, two trumpet-shaped lumen cross-sectional shape of the test cavity disposed opposite to the bell mouth.

[0008] 进一步,所述测试腔体的内壁截面形状为角部为倒角的矩形。 [0008] Further, the sectional shape of the inner wall of the test cavity as a rectangular chamfered corner portions.

[0009] 进一步,位于所述热敏电阻丝除端部外,其他部分不与所述框架接触。 [0009] Further, the thermistor located at the ends of the wire in addition to, not in contact with other portions of the frame.

[0010] 进一步,所述敏感元件还包括两个背对设置框架上的,用于为所述气体射流束导流的导向面,所述导向面为回转体,其母线为圆弧或直线,所述导向面的最高点应位于所述测试腔体的中心线上。 [0010] Further, the sensitive element further comprises a two opposite to the frame provided for said gas flow jet beam guide surface, said guide surface is a rotating body, a circular arc or a straight line generatrix, the highest point of the guide surface should be on the center line of the test cavity.

[0011] 进一步,在所述测试腔体上还设置有导线引出口和导线引出槽,用于将敏感元件上的导线引出与所述外部信号处理电路相连。 [0011] Further, in the test chamber is also provided with a lead wire and the lead outlet grooves, the wire lead-out for the sensitive elements connected to the external signal processing circuit.

[0012] 进一步,所述信号处理电路包括:压电泵驱动电路、电桥电路、放大电路、滤波电路和补偿电路组成,所述补偿电路包括温度传感器和单片机,单片机内部装有零位温度补偿程序、非线性度补偿程序和灵敏度补偿程序,主要完成零位温度补偿、非线性度补偿和灵敏度补偿等信号处理。 [0012] Further, the signal processing circuit comprising: a piezoelectric pump driving circuit, a bridge circuit, an amplifier circuit, a filter circuit and a compensation circuit, the compensation circuit includes a temperature sensor and a microcontroller, the microcontroller is equipped with an internal temperature compensating zero program, nonlinearity and sensitivity compensation procedure compensation procedure, mainly to complete zero temperature compensation, compensation for non-linearity and sensitivity compensation signal processing.

[0013] 本发明中的气流式角速度传感器具有下列优点: [0013] In the present invention, the air flow type angular velocity sensor has the following advantages:

[0014] ( I)传感器以气体作为敏感介质,具有较高的抗冲击能力。 [0014] (I) as a gas sensor sensitive medium having a high impact resistance.

[0015] (2)使用一个敏感元件即可测试XY两个方向的角速度,简化了传感器结构,将体积缩小到原有角速度传感器的一半。 [0015] (2) the use of a sensitive element to the angular velocity test two XY directions, the sensor structure is simplified, the volume will be reduced to half of that of the angular velocity sensor.

[0016] (3)增设了气流引导模块即设置在敏感元件上的导向面。 [0016] (3) the addition of the flow guide surface of the guide module that is provided on the sensing element. 通过导向面的设置,解决了射流柱间直接碰撞而引起的气体循环紊乱的问题,提高了传感器的稳定性。 By providing the guide surfaces, solves the problem of direct collision between the jet column caused by gas circulation disorders, to improve the stability of the sensor.

[0017] (4)采用阵列式喷嘴替代了单一喷嘴,解决了射流中心强度随传输距离衰减的问题,降低了气体的损耗,提升了传感器的分辨率。 [0017] (4) The nozzle array replaces the single nozzle, solves the problem of the center of the jet intensity attenuation as the transmission distance, the gas loss is reduced to enhance the resolution of the sensor.

附图说明 BRIEF DESCRIPTION

[0018] 图I为本发明中气流式角速度传感器结构示意图; [0018] In the gas flow type angular velocity sensor invention structural diagram I present;

[0019] 图2为测试腔体中心剖视图; [0019] FIG. 2 is a sectional view of the center of the test chamber;

[0020] 图3为图2中BB向剖视图; [0020] FIG. 2 FIG. 3 is a cross-sectional view along line BB;

[0021] 图4为测试腔体端盖结构示意图; [0021] FIG. 4 is a schematic diagram of the test cavity end closure structure;

[0022] 图5为敏感元件模块主视图; [0022] FIG. 5 is a front view of the sensitive element module;

[0023] 图6为图5中AA向剖视图; [0023] FIG. 6 is a sectional view taken along line AA 5;

[0024] 图7为本发明中气流式角速度传感器信号处理电路框图; [0024] FIG. 7 is a schematic block circuit diagram of the processing gas flow sensor type angular velocity signal invention;

[0025] 图8为实施例2中测试腔体结构示意图。 [0025] FIG. 8 is a schematic diagram of a test cavity structure in Example 2.

具体实施方式 detailed description

[0026] 实施例I [0026] Example I

[0027] 如图I中所示,本发明中气流式角速度传感器包括:外壳1,压电泵2,压电泵座3,测试腔体4、敏感元件5、碟簧6和信号处理电路(图中未显示),其中外壳I由侧壁11和设置在侧壁两端的底座12组成,侧壁11可为薄壁圆筒状,也可为其他形状。 [0027] As shown in FIG I, the present invention is a jet angular velocity sensor comprising: a housing 1, 2 of the piezoelectric pump, a piezoelectric pump base 3, the test chamber 4, the sensitive element 5, disc springs 6 and the signal processing circuit ( not shown), wherein both ends of the base I of the housing 12 consists of sidewalls 11 and side walls is provided, the side walls 11 may be thin-walled cylindrical shape, other shapes may be. 两个底座12上还设置有电源插座引出口13,在两个底座12上均开有电源插座引出口13是为了方便角速度传感器的安装,使角速度传感器的设置位置不受外接电源位置的限制,在工作时,两个引出口13中仅有一个使用,另一个封闭。 Two upper base 12 is also provided with a power outlet socket 13 on the base 12 are two power outlet opening outlet 13 to facilitate the installation of the angular velocity sensor, the angular velocity sensor so that the installation position is not limited to an external power source position, in operation, two of the outlet 13 to use only one, the other is closed. 当电源和导线由引出口13引出后,所使用的引出口13也将被封闭,使外壳I内成为一个密闭空间。 When the power supply and wire leads from the outlet 13, the outlet 13 will also be used for blocking, the housing I becomes a closed space inside. 在外壳I内的中心位置设置有测试腔体4,两个压电泵2对称的设置在测试腔体4的两端。 I center position within the housing 4 is provided with two piezoelectric pump 2 symmetrically disposed in the test chamber 4 at both ends of the test chamber body. 碟簧6设置在外壳I内,与一侧底座12相接,用于装配时提供预紧力,将测试腔体4和设置在其两端的压电泵2在外壳I内压紧固定,避免它们在测试过程中在外壳I内发生轴向(即图I中的水平方向)移动。 I within the housing, in contact with one side of the base 12, there is provided a disc spring assembly 6 is provided when the preload, and the test chamber 4 is provided within the housing 2 are pressed and fixed in the piezoelectric pump I at both ends, to avoid they occur in the housing axially I during the test (i.e., the horizontal direction in FIG. I) movement.

[0028] 如图I所示,测试腔体4为腔体侧壁40和设置在其两端的腔体端盖41围成的空间,为左、右,上、下均对称的结构。 [0028] FIG I, the test chamber 4 to the chamber sidewall 40 and disposed at both ends of the cavity space surrounded cap 41, the left and right, upper and lower are symmetrical structure. 如图2、3中所示,腔体侧壁40由中间向两端逐渐增厚,使测试腔体4为两个形状相同的喇叭,在喇叭口处对接在一起形成的形状。 As shown in FIG. 3, the side wall of the chamber 40 progressively thicker middle to both ends so that the test chamber 4 to shape the same two speakers, butted together to form the shape of the bell mouth. 这种设计方式可减少气流与测试腔体内壁的直接碰撞,降低了气体能量的损耗,相应减少了测试腔体4内气流通道存在的涡流现象,使气体在密闭腔体内能够平稳有序的循环。 This design approach can reduce airflow from directly colliding with the inner wall of the test chamber, the gas energy loss is reduced, a corresponding reduction in the eddy current phenomenon of gas flow passages within 4 test chamber, the gas is circulated in a smooth and orderly closed cavity . 在测试腔体4的外侦牝沿周向均布设置有偶数个气体循环通道42,优选的为4-8个,本实施例的气体循环通道42为四个,气体循环通道可设置在测试腔体4的侧壁内,也可为单独设置在测试腔体4外侧的管道,也可为测试腔体4与外壳侧壁11之间的间隙。 In the test chamber investigation female outer circumferential direction to the body 4 is provided with an even number of uniformly distributed gas circulation passage 42, preferably 4-8, the gas circulation passage 42 of the present embodiment is four, the gas circulation passage may be provided in the test cavity the inner side wall 4, may also be provided separately in the test chamber 4 outside the duct member, and the gap between the side wall of the housing body 11 may be of the test chamber. 气体循环通道42的断面为圆形,本实施例中气体循环通道42设置在测试腔体4的侧壁内,并且,优选的气体循环通道42的圆周与腔体侧壁40外圆周相切,气体循环通道42与测试腔体4通过四个出气口43连通,四个出气口43均布在测试腔体4轴向中心处的圆周上,在测试腔体4外围沿周向均布设置与其腔内连通的四个气体循环通道42,其目的是使由测试腔体中输出的气体能够进行合理、有序、稳定的循环,并使其达到压电泵处的动能尽量小,来自不同方向上的气体动能可以相互抵消。 Gas circulation passage section 42 is circular in the embodiment according to the present embodiment the gas circulation passage 42 is disposed within the test chamber side wall 4 thereof, and the circumference of the chamber sidewall 42 is preferably a gas circulation passage 40 is tangential to the outer circumference, gas circulation passage 42 and the cavity 4 through the communication test four outlet 43, four air outlet 43 are distributed on the circumference at the center of the test chamber 4 axially along the periphery of the test chamber 4 uniform circumferential direction thereof is provided thereto cavity four gas circulation passage 42 communicates, which aims to make the output from the test gas in the cavity can be performed in a reasonable manner, stable cycle, and it reaches the kinetic energy of the piezoelectric pump as small as possible, from different directions on the gas kinetic energy can offset each other. 在腔体侧壁40上还设置有四个导线出口44和与之相连通的设置在测试腔体侧壁上的导线槽45。 On the side wall 40 is also provided with a cavity outlet 44 and four wires connected thereto through the wire grooves disposed side walls of the test chamber 45. 端盖41为具有一定厚度的板状结构,其截面与腔体侧壁40截面相配,在端盖41上还设置有进气口,如图4所示,该进气口为喷嘴体,包括主喷嘴46和位于主喷嘴46周围的列阵式喷嘴47,主喷嘴46为一个与端盖41同心设置的一个大圆孔;列阵式喷嘴47为在主喷嘴46周围,与主喷嘴46同心的圆周上均布的若干个小通孔。 Cap is a plate-like structure 41 having a certain thickness, the cross section of the chamber sidewall 40 mating cross section, the end cap 41 is also provided with an intake port 4, the intake port of the nozzle body, comprising the main nozzle 46 and the nozzle array 46 is located around the main nozzle 47, a primary nozzle 46 to a larger round end cap 41 concentrically arranged; nozzle array 47 around the main nozzle 46, the nozzle 46 is concentric with the main uniformly distributed over the circumference a number of small through-holes. 主喷嘴46的直径与列阵式喷嘴47直径的比值可为6-10 :1,优选的为8 :1 ;列阵式喷嘴46中的喷嘴数量可为4-8个。 Ratio of the diameter of nozzle array 47 of the main nozzle 46 diameter may be 6-10: 1, preferably 8: 1; the number of nozzles in the nozzle array 46 may be 4-8. 喷嘴体主要功能是产生射流束,是进入测试腔体4内的气流流动的关键部件,其结构和形状决定了嗔出气流的运动状态。 The main function is to produce the nozzle body jet beam, is the key member into the test chamber air flow inside the body 4, which determines the structure and shape of the airflow angry state of motion. 在王嗔嘴46周围设直的列阵式嗔嘴47 —方面能够增加喷嘴射出气体的效率,另一方面可以减少气体在喷嘴射出后发生的扩散,使气体可以在测试腔体4内稳定的传递,有效避免了气体射流中心强度随传输距离衰减的问题,降低了气体的损耗,从而提高了气体射流柱的性能和传感器测试的稳定性。 In the nozzle array of formula anger Wang Chen provided around the mouth 46 straight 47 - aspect can increase the efficiency of gas emitted from the nozzle, on the other hand can reduce the diffusion of gas generated after the injection nozzle, the gas can be stabilized within the body 4 of the test chamber transfer, effectively avoids the problem of the center of the gas jet intensity attenuation as the transmission distance, the gas loss is reduced, thereby enhancing the stability and performance of the gas jet sensor test column.

[0029] 测试腔体4长宽比优选的为3:1,即其腔体腔内空间的长度和最大直径处之间的比值为3 :1,这样的设计比例既可保证气流束射到热敏电阻丝的强度高,又保证了在外界角速度作用下,射流束的偏离效果明显。 [0029] The test chamber 3 is preferably an aspect ratio of 4:, i.e. a ratio between the length and the largest diameter of the cavity space in which the cavity 3: 1, the proportion of this design can ensure hot airflow beams impinge sensitive resistance wire of high strength, but also ensure an angular velocity under external action, departing from the effects of jet beam significantly.

[0030] 如图1、5、6所示,敏感元件5由两个相背固定在一起敏感元件模块构成,如图6、7中所示,敏感元件模块51包括带有导向面55的框架52、热敏电阻丝53和热敏电阻丝安装结构54 ;框架52为一个带有导向面55的平板,其形状为四个边为圆弧的正方形,在其四个角处均固定有热敏电阻丝安装结构54,四根热敏电阻丝53通过热敏电阻丝安装结构54设置在框架52上,每根热敏电阻丝53的两端分别固定位于两个相邻角部上的热敏电阻丝安装结构54上,除其两端外,热敏电阻丝53的其他部分不与框架52和热敏电阻丝安装结构54相接触。 [0030] As shown in FIG. 1,5,6, 5-sensitive element modules secured together sensitive element is constituted by two opposite, as shown in FIG sensitive element 6,7 comprises a frame module 51 with a guide surface 55 52, the thermistor 53 and the thermistor wire wire mounting structure 54; frame 52 is a flat plate 55 with a guide surface, in the shape of an arc of the four sides of a square, at the four corners thereof were fixed with a heat sensitive resistive wire mounting structure 54, four thermistor wires 53 via the thermistor wire mounting structure 54 is provided on the frame 52, both ends of each of the thermistor wire 53 are secured within the heat on the two adjacent corners the mounting structure 54 sensitive resistance wire, except for its ends, the other wire portions of the thermistor 53 is not in contact with the frame 52 and the thermistor wire 54 mounting structure. 热敏电阻丝的设置方式有很多种,但均要保证每根热敏电阻丝53所在直线与敏感元件的5中心的垂直距离相等,并且相对设置的两根电阻丝53相互平行,对称的设置在框架52上,相邻设置的两根电阻丝53相互垂直。 Thermistor wire arrangement are many, but are equal to ensure that the vertical distance of 5 53 where the center of each of the straight wire and the thermistor sensing element, and two opposite resistance wire 53 disposed parallel to each other are disposed symmetrically on the frame 52, two adjacent resistance wires 53 arranged perpendicular to each other. 相对边的两根热敏电阻丝53组成一组测试热敏电阻丝对用于对角速度进行测试。 The two opposing sides of the thermistor wire 53. The thermistor wire a set of tests used for testing the angular velocity. 热敏电阻丝安装结构54还用于将热敏电阻丝53与测试电路连接在一起;设置在敏感元件5上的导线可通过导向出口44和导线槽45由测试腔体中引出与外部电路相连。 The thermistor wire is also mounting structure 54 for the thermistor wires 53 connected to the test circuit; sensitive element disposed on the conductor 5 may be guided by the thread guide 45 and the outlet 44 leads from the test cavity and connected to an external circuit . 框架52的导向面55为回转体,其母线为圆弧或直线,其截面形状如图7中所示的斜边为圆弧的三角形,也可为斜边为直线的三角形。 Guide surfaces 55 of the turning body frame 52, a circular arc or a straight line generatrix, oblique cross-sectional shape as shown in FIG. 7 is an arc of a triangle, the hypotenuse of the triangle may also be straight. 装配时,两个敏感元件模块51的平面相接,固定在一起,然后通过四角吊装的方式设置在测试腔体中,其形心与测试腔体的形心相重合;优选的,如图I中所示,敏感元件5的四个角分别对着四个出气口43的中心线,其导向面55的最高点应与位于端盖41中心线,也就是测试腔体4的轴线上。 When assembled, the two sensitive elements contact plane of the module 51, secured together and disposed in the test chamber by way of lifting the four corners, with its centroid centroid coincides with the test chamber; Preferably, as I As shown, the four corners of the sensitive element 5 are four outlet toward the center line 43, which is the highest point of the guide surface 55 of the cover 41 should be positioned with the center line, i.e. the test cavity axis 4. 导向面55的最高点距进气口的距离应满足气体射流束具有足够长的喷射距离,又不能太长,而使气体射流束发散而影响测试效果。 Intake port 55 from the highest point of the guide surfaces should meet the gas jet injection beam having a sufficiently long distance, and not too long, the gas jet beam divergence affect the test results. 敏感元件5的四个角距离四个出气口43的距离应满足敏感元件的四个角不会对出气口43造成堵塞,但其间的距离也不应过长,使导向面55对射向其上的气体的移动方向失去导向意义,导致由出气口43排出到测试腔体4以外的气体,无法满足在压电泵2的作用下形成气体射流束所需的气体的量,降低传感器测试结果的准确性。 5 from the four corners from the sensitive element 43 of the four outlet of the four corners of the sensing element should meet without plugging of outlet port 43, but the distance between them should not be too long, so that the guide surface 55 is directed to gas moving direction of the guide loses meaning, leading to the discharge outlet 43 to the outside of the gas chamber 4 of the test, the amount of gas required to form the gas jet beam under the action of a piezoelectric pump 2 can not be met, reducing the sensor test results accuracy. 在敏感元件5和测试腔体4的大小,以及敏感元件5与测试腔体的出气口、排气口之间的距离一定的条件下,气流式角速度传感器在静止、旋转时,随着角速度的不断变化,由气体射流束喷射进测试腔体4内的气体,其通过出气口43进入到气体循环通道42中的气体量与在测试腔体4内循环的气体之间的比例会随着角速度的变化而变化,所以,测试腔体4与敏感元件5的大小比例可通过标定或模拟计算等方式确定,以满足上述条件。 Under certain conditions, a distance between the sensitive element 5 and the size of the test chamber 4, and a sensitive element 5 and the outlet of the test chamber, an exhaust port, the air flow type angular velocity sensor in a stationary, while rotating, with the angular velocity changing, by the gas injected into the gas jet beam within the test chamber 4, into which the gas circulation passage 43 through the outlet ratio between the amount of gas in the gas loop 42 in the test chamber 4 will increase as the angular velocity change varies, therefore, the size ratio of 4 to 5 test sensitive element cavity may be determined by simulation or calibration, etc., in order to satisfy the above conditions.

[0031] 如图I中所示,两个压电泵2对称的设置在测试腔体4的两端,并与测试腔体4的两个端盖42之间具有一定距离,该空间可满足气流式角速度传感器中气体循环的需要。 [0031] As shown in FIG I, the two piezoelectric pump 2 is disposed symmetrically at both ends of the test chamber 4, and the test cavity with a distance between the two end caps 424, which can meet the space air flow type angular velocity sensor circulating gas is required. 压电泵2包括压电片21和压电振子22,压电片21和压电振子22均固定设置在压电泵座3上,其中,压电片21为压电陶瓷薄片,压电振子22为带有中心圆孔的弹性薄板。 2 piezoelectric pump includes a piezoelectric sheet 21 and the piezoelectric vibrator 22, the piezoelectric sheet 21 and the piezoelectric vibrator 22 are fixed to the piezoelectric pump holder 3, wherein the piezoelectric substrate is a piezoelectric ceramic sheets 21, the piezoelectric vibrator the elastic sheet 22 with a central circular hole. 在逆压电效应的作用下压电片21可使压电振子22产生变形,压电振子22的变形导致的压电泵2内部空间容积变化实现气流的循环输入和输出。 Under the action of the inverse piezoelectric effect of the piezoelectric sheet 21 of the piezoelectric vibrator 22 can be deformed, deformation of the piezoelectric vibrator 22 of the piezoelectric pump circulating the input and output second internal space volume variation due to the implemented stream.

[0032] 如图7所示,信号处理电路主要由压电泵驱动电路30、电桥电路31、放大电路32、滤波电路33和补偿电路34组成,压电泵驱动电路30驱动压电泵2产生运动气流,形成气体射流射向敏感元件5 ;电桥电路31将热电阻丝53的电阻信号转换为电压信号,其输出接于放大电路32 ;放大电路32将输出的电压信号进行放大,以便于信号的检测,其输出接于滤波电路33 ;滤波电路33主要清除电路中的噪声干扰,并接于补偿电路34 ;补偿电路34利用单片机36对传感器产生的温度漂移进行补偿,最后输出角速度。 [0032] As shown in FIG. 7, the signal processing circuit is mainly composed of a piezoelectric pump driving circuit 30, a bridge circuit 31, amplification circuit 32, filter circuit 33 and compensation circuit 34 composed of a piezoelectric pump drive circuit 30 drives the piezoelectric pump 2 generating motion stream, forming a gas jet directed sensitive element 5; bridge circuit 31 to heat the resistance wire resistance signal 53 into a voltage signal, which is connected to the output of amplifier circuit 32; amplifying circuit 32 amplifies the voltage signal output to to the detection signal, an output connected to a filter circuit 33; filter circuit 33 mainly remove noise in the circuit, and connected to the compensation circuit 34; the temperature compensation circuit 34 using the microcontroller 36 pairs generated by a sensor drift compensation, the final output angular velocity. 补偿电路34包括温度传感器35和单片机36,单片机36内部装有零位温度补偿程序37、非线性度补偿程序38和灵敏度补偿程序39,主要用于完成零位温度补偿、非线性度补偿和灵敏度补偿等信号处理。 The compensation circuit 34 includes a temperature sensor 35 and MCU 36, the MCU 36 with zero temperature compensation program 37, program 38, and the nonlinear compensation sensitivity compensation procedure 39, is mainly used to zero the temperature compensation, compensation for non-linearity and sensitivity compensation signal processing. 上述信号处理电路电源采用正负级稳压电源,其电压值要根据热敏电阻丝53电阻值、单片机16供电电压和实际信号大小而定,一般选用±15DVC。 The signal processing circuit power supply uses positive and negative power supply level, the voltage value according to the resistance value of the thermistor wire 53, the microcontroller 16 signals the actual supply voltage and its size is generally used ± 15DVC.

[0033] 使用时,将本实施例中的气流式角速度传感器通过底座设置在被测装置上,首先检测气流式角速度传感器的设置位置,检测方法为接通电源,气流式角速度传感器所检测到的角速度应为零,即热电阻丝对产生的热量应相等。 [0033] In use, the present embodiment air flow type angular velocity sensor is provided through the base on the device under test, firstly detects the position of airflow is provided an angular velocity sensor, the detection method of the power supply is turned on, the air flow type angular velocity sensor detected angular velocity should be zero, i.e., heat resistance wire should be equal to the heat generated. 工作时,压电片在逆压电效应的作用下驱使压电振子振动,将处于压电泵与测试腔体端盖之间空间内的气体吸入到压电泵中,然后再由压电泵中喷出,由压电泵喷出的气体产生射流,气体射流束经过喷嘴体进入到测试腔体中,并喷射到敏感元件上,经敏感元件的导向面导向后,一部分由出气口喷出,并经过气体循环通道返回到压电泵与测试腔体端盖之间的空间,另一部分在测试腔体内循环。 In operation, the piezoelectric sheet of the piezoelectric vibrator driving under the influence of the inverse piezoelectric effect, the gas in the space between the piezoelectric pump and drawn into the test chamber cover piezoelectric pump, a piezoelectric pump and then in discharge, the discharge gas generated by the piezoelectric pump jet beam passes through a gas jet nozzle body into the test chamber, and sprayed onto the sensitive element, after the guide surface of the guide element is sensitive, a portion of the discharge outlet and through the gas circulation path to return to the space between the piezoelectric pump and the test chamber cover, the other part is circulated in vivo test chamber. 由测试腔体喷出的气体,沿气体循环通道循环至压电泵与测试腔体端盖之间的空间内。 Test chamber by the ejecting gas, the gas in the circulation path into the space between the piezoelectric pump and the test chamber cover. 在测试过程中,气体一直在压电泵的作用下按此路线,在由压电泵测试腔体与气体循环通道所组成的密闭空间内往复循环,对被测装置进行角速度进行测试。 During the test, the gas has the effect of this in the course of the piezoelectric pump, reciprocating cycle in the confined space of the test cavity with a piezoelectric pump circulation passage composed of the gas, the angular velocity of the device under test to test. 在设备静止时,即角速度为零时,由压电泵驱动气体而产生的气体射流束,没有受到外界角速度的干扰,此时,气体射流束均匀的喷射到敏感元件导向面的中心位置,使对称设置敏感元件上的两个热敏电阻丝对中的两个热敏电阻丝所产生的热量均相同,经过后续电桥检测,可知热敏电阻丝对中的两根热敏电阻丝的电阻相对变化为零。 When the device is stationary, i.e., when the angular velocity is zero, the gas from the gas generated by the piezoelectric pump driving the jet beam, the angular velocity is not affected by external disturbances, this time, a gas jet beam ejected uniformly to the center position guide surface sensitive element, so that two symmetrically arranged wires thermistors on the two thermistor wires of the sensitive element heat generated are the same, the bridge through subsequent detection, found thermistor wire of the two wires of the thermistor relative change is zero. 当设备以一定角速度做旋转运动时,气体射流束喷射到敏感元件上的位置,由于受到角速度的影响,会相对于敏感元件中心向某一方向偏离,使敏感元件发生转动。 When the angular velocity of the device at a constant rotational movement, a gas injection jet beam to a location on the sensitive element, due to the influence of the angular velocity, the sensitive element will be off-center with respect to a certain direction, so that rotation of the sensitive elements occur. 此时,热敏电阻丝对中的两根相对设置的热敏电阻丝的电阻阻值在射流的作用下会发生相对变化,所产生的热量会不同,经后续电桥检测,可知两根热阻丝的电阻相对变化量,通过电桥电路得到输出电压。 In this case, the thermistor resistor wire thermistor wire disposed on the opposite two opposing vary under the action of the jet, the heat generated will be different, the subsequent detection bridge, two heat understood relative resistance wire resistance change amount obtained by the output voltage of the bridge circuit. 这样,利用输出电压和输入角速度的对应关系,就可以计算出气流式角速度传感器输入角速度的大小。 Thus, using the output voltage and the correspondence relationship between the input angular velocity, can be calculated the size of the angular velocity sensor input airflow angular velocity.

[0034] 实施例2 [0034] Example 2

[0035] 如图8中所示,本实施例中的气流式角速度传感器的结构与实施例I中基本相同,其不同之处在于,测试腔体结构轴向截面形状为带有圆弧倒角的矩形。 As shown in Figure 8 [0035], the structure of the air flow type angular velocity sensor according to the present embodiment is substantially the same with the embodiment in Example I, except that its test cavity structure is an axial cross-sectional shape with R-chamfered rectangle. 这种设计形式比实施例I中的喇叭形设计增加了测试腔体的容积,扩大了气体在腔体内部循环的空间,抑制了射流柱的发散。 This design form than horn design in Example I embodiment increases the volume of the test chamber, the expansion of the gas in the space inside the loop of the cavity, suppresses divergence of the jet column. 由于增加了圆弧倒角的设计,它比现有技术中测试腔体中长方形截面设计降低了气流与腔体的四个顶角的直接碰撞,有效避免了腔体内部存在的涡流现象。 With the addition of chamfered design, than in the prior art that a rectangular test cavity sectional design reduces flow directly colliding with the four corners of the cavity, effectively prevent the eddy current of the internal cavity exists.

[0036] 由于气流式角速度传感器采用零位输出、灵敏度随温度变化较大,传感器在大角速度输入时输出电压是非线性的,因此必须对传感器进行补偿处理才能够得到准确的测量结果。 [0036] Since the air flow type angular velocity sensor using the zero output, the sensitivity varies with temperature is large, large output angular velocity sensor input voltage is nonlinear, the sensor must be able to get an accurate compensation processing of measurement results. 为了得到更加准确的测试结果,在不影响传感器分辨率的情况下,本发明采用移动式算术平均法进行数据处理,采用非等间距分段的多项式拟合方法和分段线性插值方法,通过温度传感器和单片机进行软件补偿。 In order to obtain more accurate test results, without affecting the resolution of the sensor, the present invention uses a mobile data processing arithmetic mean, using the polynomial method piecewise linear interpolation and non - equidistant segments, the temperature sensor and microcontroller software compensation. 这种软件补偿方法调试简单,成本低,补偿精度高,适用于大批量生产。 This software debugging compensation method is simple, low cost, high compensation accuracy, suitable for mass production.

[0037] 本发明气流式角速度传感器采用喷嘴阵结构提升了传感器的性能,而且信号处理电路和外围元器件共用一套系统实现,使得气流式角速度传感器的体积比现有设计减小了一半。 [0037] The present invention is an angular velocity sensor using a jet nozzle array configuration to enhance the performance of the sensor, and the signal processing circuits and peripheral components share one system implementation, such that the airflow volume of the angular velocity sensor is reduced by half over existing designs.

Claims (9)

1、 一种气流式角速度传感器,其特征为,该传感器包括:测试腔体,设置在所述测试腔体中心位置的敏感元件,对称设置在测试腔体两端的两个压电泵,与测试腔体和所述压电泵相连通的气体循环通道和信号处理电路;所述测试腔体为沿轴向中心、径向中心均对称的腔体,在测试腔体的两端位置设置有进气口;两个压电泵与测试腔体的两端具有一定距离,所述传感器内的气体可在由测试腔体、气体循环通道和压电泵组成的密闭空间内循环,所述敏感元件为四周设置有四组热敏电阻丝的板状框架结构,每组电阻丝所在直线与敏感元件的中心位置的垂直距离相同,相对的两组热敏丝相互平行,相邻的两组热敏丝之间相互垂直,所述敏感元件的中心与所述进气口的中心均位于测试腔体的中心线上;所述气体在所述压电泵的作用下形成气体射流束,气体 A gas flow type angular velocity sensor, wherein the sensor comprises: a test chamber, provided at the center position of the sensitive element of the test chamber, symmetrically disposed across the two piezoelectric pump test cavity with a test gas circulation passage and a signal processing circuit and the piezoelectric pump chamber in communication; the test chamber along the axial center, are symmetrical to the radial center of the cavity, is provided at both ends of an intake position of the test cavity port; two ends of the test chamber and a piezoelectric pump having a certain distance, the gas sensor may be circulated within the closed space by the test chamber, and the gas circulation passage composed of a piezoelectric pump, the sensitive element four weeks is provided with four sets of plate-like wire frame structure of the thermistor, the same vertical distance from the center position of each linear resistance wire located sensitive element, two thermal fuses opposing parallel, adjacent two thermal between the wires perpendicular to each other, the center of the sensitive element and the intake port centers on the center line of the test cavity; said gas forming a gas jet pump beam in the piezoelectric effect, the gas 流束经过设置在测试腔体两端的进气口喷射到敏感元件上,再通过出气口进入到气体循环通道中返回,气体射流束喷射到敏感元件上的位置会随着外部角速度的改变而发生偏移,进而导致敏感元件上测试热敏电阻丝对中的两个相对设置的热敏电阻丝的电阻发生改变,经由信号处理电路处理后可根据热敏电阻丝对中两个电阻丝的电阻发生相对变化值得出角速度值。 Stream through the air inlet is provided at both ends of the test chamber is sprayed onto the sensitive element, and then returned into the gas circulating passage through the outlet, the gas injection jet beam to a position on the sensitive element will change with angular velocity occurs outside offset resistance of the thermistor wire leading to the test of the two sensitive elements of the thermistor wire disposed opposite changed, according to the thermistor resistance wire may be of the two resistance wires via the signal processing circuit worth angular velocity occurs relative change value.
2、根据权利要求I中所述角速度传感器,其特征为,所述气体循环通道为偶数个,沿周向均布在所述测试腔体外侧。 2, I in the angular velocity sensor according to claim, characterized in that the gas circulation passage is an even number, uniformly distributed circumferentially on the outside of the test chamber.
3、根据权利要求I中所述角速度传感器,其特征为,所述设置在测试腔体两端的进气口为喷嘴体,所述喷嘴体包括主喷嘴和设置在主喷嘴周围的列阵喷嘴,列阵式喷嘴的直径小于主喷嘴直径。 3, I in the angular velocity sensor according to claim, wherein said intake port is provided at both ends of the test cavity is a nozzle body, said nozzle body includes a main nozzle and a nozzle array disposed around the main nozzle, diameter nozzle array is smaller than the diameter of the main nozzle.
4、根据权利要求I中所述角速度传感器,其特征为,所述测试腔体的内腔截面形状为喇叭口相对设置的两个喇叭形状。 4. The angular velocity sensor as claimed in claim I, wherein the lumen cross-sectional shape of the test cavity for the two oppositely disposed flared horn shape.
5、根据权利要求I中所述角速度传感器,其特征为,所述测试腔体的内壁截面形状为角部为倒角的矩形。 5. The angular velocity sensor as claimed in claim I, wherein the sectional shape of the inner wall of the test cavity as a rectangular chamfered corner portions.
6、根据权利要求I中所述角速度传感器,其特征为,所述热敏电阻丝除端部外,其他部分不与所述框架接触。 6. The angular velocity sensor as claimed in claim I, wherein, in addition to the thermistor wire end portions, the other portion does not contact with the frame.
7、根据权利要求6中所述角速度传感器,其特征为,所述敏感元件还包括两个背对设置框架上的,用于为所述气体射流束导流的导向面,所述导向面为回转体,其母线为圆弧或直线,所述导向面的最高点应位于所述测试腔体的中心线上。 7. The angular velocity sensor as claimed in claim 6, characterized in that said sensitive element further comprises a two opposite to the frame provided for the guide surface to guide the gas jet beam, the guide surface is slewing body generatrix is ​​a straight line or an arc, the guide surface should be the highest point on the centerline of the test cavity.
8、根据权利要求I中所述角速度传感器,其特征为,在所述测试腔体上还设置有导线引出口和导线引出槽,用于将敏感元件上的导线引出与所述外部信号处理电路相连。 8. The angular velocity sensor as claimed in claim I, wherein is further provided with a conductor on the test chamber and the outlet channel lead wire for the sensing element lead wire to the external signal processing circuit connected.
9、根据权利要求I中所述角速度传感器,其特征为,所述信号处理电路包括:压电泵驱动电路、电桥电路、放大电路、滤波电路和补偿电路组成,所述补偿电路包括温度传感器和单片机,单片机内部装有零位温度补偿程序、非线性度补偿程序和灵敏度补偿程序,主要完成零位温度补偿、非线性度补偿和灵敏度补偿等信号处理。 9. The angular velocity sensor as claimed in claim I, wherein said signal processing circuit comprising: a piezoelectric pump driving circuit, a bridge circuit, an amplifier circuit, a filter circuit and a compensation circuit, the compensation circuit includes a temperature sensor and a microcontroller, the internal microcontroller with zero temperature compensation procedure, nonlinearity and sensitivity compensation procedure compensation procedure, mainly to complete zero temperature compensation, compensation for non-linearity and sensitivity compensation signal processing.
CN 201110186345 2011-07-05 2011-07-05 Airflow type angular velocity transducer CN102288775B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201110186345 CN102288775B (en) 2011-07-05 2011-07-05 Airflow type angular velocity transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 201110186345 CN102288775B (en) 2011-07-05 2011-07-05 Airflow type angular velocity transducer

Publications (2)

Publication Number Publication Date
CN102288775A true CN102288775A (en) 2011-12-21
CN102288775B true CN102288775B (en) 2012-12-12

Family

ID=45335364

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 201110186345 CN102288775B (en) 2011-07-05 2011-07-05 Airflow type angular velocity transducer

Country Status (1)

Country Link
CN (1) CN102288775B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102980567B (en) * 2012-11-23 2015-09-16 北京信息科技大学 A small stream gyroscope
CN103017733A (en) * 2012-12-12 2013-04-03 北京信息科技大学 High-sensitivity air-flow type all-directional horizontal posture sensor
CN105066978B (en) * 2015-07-16 2017-10-20 北京信息科技大学 A micro-cycle air-plane biaxial angular velocity sensor pet

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3559492A (en) 1967-01-30 1971-02-02 Litton Systems Inc Two-axes angular rate and linear acceleration multisensor
CN1318751A (en) 2001-06-15 2001-10-24 清华大学 Resultant jet flow angular-velocity meter
CN1595169A (en) 2004-07-16 2005-03-16 北京大学 Jet flow angle velocity transducer and method for making same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3559492A (en) 1967-01-30 1971-02-02 Litton Systems Inc Two-axes angular rate and linear acceleration multisensor
CN1318751A (en) 2001-06-15 2001-10-24 清华大学 Resultant jet flow angular-velocity meter
CN1595169A (en) 2004-07-16 2005-03-16 北京大学 Jet flow angle velocity transducer and method for making same

Also Published As

Publication number Publication date Type
CN102288775A (en) 2011-12-21 application

Similar Documents

Publication Publication Date Title
JPH0719981A (en) High-temperature pressure sensor
JPH11118553A (en) Flow sensor
US20120237402A1 (en) Detection device
JPH05309551A (en) Displacement detecting device
CN101593786A (en) Temperature compensation circuit used for avalanche photodiode
CN2854512Y (en) High precision dust-proof calibrate instrument
CN201066524Y (en) A cavity structure for fire photoelectricity inductance smoke detector
JP2010078429A (en) Particulate substance detector
JP2000073755A (en) O2 sensor installing structure of catalyst converter
JPH0882509A (en) Laser interfering distance measuring apparatus
CN2773672Y (en) Optical detector of sulfur hexafluoride gas concentration
CN200941092Y (en) Detector for detecting air suspension particles, numbers and mass density
CN1904621A (en) Piezoelectric three dimension acceleration sensor
CN201273813Y (en) Thickness measurement instrument for CCD optical bias resistant non-invasive detection
CN202018419U (en) Gas detection platform adopting Herroitt multiple reflection sample room
CN101865875A (en) Gas sensor
CN202066726U (en) Novel firepower power station high-temperature smoke-gas detecting and sampling system
CN203894137U (en) Detection system for aerosol employing extinction method
CN202902574U (en) Air conditioner exhaust silencing device
CN202013344U (en) TCD
CN202362319U (en) Calibration device of tri-axial acceleration sensor
CN2127490Y (en) Pneumatic position measuring probe
CN202757758U (en) Test platform for electric spindle tester
CN101949821A (en) Longitudinal resonant photoacoustic pool for photoacoustic spectrometry monitoring of gases
CN1621667A (en) Flywheel for single-cylinder air-cooled diesel engine

Legal Events

Date Code Title Description
C06 Publication
C10 Request of examination as to substance
C14 Granted