CN111796493A - Glue spreading developing equipment - Google Patents
Glue spreading developing equipment Download PDFInfo
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- CN111796493A CN111796493A CN202010768885.5A CN202010768885A CN111796493A CN 111796493 A CN111796493 A CN 111796493A CN 202010768885 A CN202010768885 A CN 202010768885A CN 111796493 A CN111796493 A CN 111796493A
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- 239000003292 glue Substances 0.000 title claims abstract description 65
- 230000007480 spreading Effects 0.000 title abstract description 12
- 238000003892 spreading Methods 0.000 title abstract description 12
- 238000010438 heat treatment Methods 0.000 claims abstract description 356
- 239000007788 liquid Substances 0.000 claims abstract description 48
- 238000004026 adhesive bonding Methods 0.000 claims abstract description 31
- 238000000034 method Methods 0.000 claims abstract description 21
- 230000008569 process Effects 0.000 claims abstract description 20
- 239000008188 pellet Substances 0.000 claims abstract description 11
- 230000003044 adaptive effect Effects 0.000 claims abstract description 3
- 238000001816 cooling Methods 0.000 claims description 169
- 238000004140 cleaning Methods 0.000 claims description 48
- 230000001681 protective effect Effects 0.000 claims description 42
- 239000007888 film coating Substances 0.000 claims description 41
- 238000009501 film coating Methods 0.000 claims description 41
- 230000007547 defect Effects 0.000 claims description 19
- 239000011248 coating agent Substances 0.000 claims description 18
- 238000000576 coating method Methods 0.000 claims description 18
- 238000012545 processing Methods 0.000 claims description 17
- 235000012431 wafers Nutrition 0.000 abstract description 26
- 230000009286 beneficial effect Effects 0.000 description 15
- 239000012636 effector Substances 0.000 description 8
- 238000007669 thermal treatment Methods 0.000 description 5
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 238000011161 development Methods 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/38—Treatment before imagewise removal, e.g. prebaking
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/40—Treatment after imagewise removal, e.g. baking
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Thermotherapy And Cooling Therapy Devices (AREA)
Abstract
The invention provides a glue spreading developing device, which comprises a pellet block; an interface block; a first process module disposed between the pellet block and the interface block and comprising a first liquid treatment module and first and second heat treatment modules disposed on opposite sides of the first liquid treatment module; the first heat treatment module comprises four layers of first heat treatment units which are arranged in a stacked mode, the first liquid treatment module comprises four layers of first liquid treatment units which are arranged in a stacked mode, the second heat treatment module comprises four layers of second heat treatment units which are arranged in a stacked mode, and each unit is provided with an adaptive manipulator. In the gluing and developing equipment, the carrying stroke of a single mechanical arm is greatly reduced, the number of wafers carried in the same time is increased, and the efficiency is improved.
Description
Technical Field
The invention relates to the technical field of glue spreading and developing, in particular to glue spreading and developing equipment.
Background
In the prior art, the mechanical arm in the gluing and developing equipment has long stroke and takes long time, thereby reducing the working efficiency.
Chinese patent No. CN100565343C discloses a coating and developing apparatus and method thereof,
by laminating two unit blocks for forming an anti-corrosion agent film and two unit blocks for forming an anti-reflection film, space saving is achieved when the anti-reflection film is formed on the upper and lower sides of the anti-corrosion agent film. Further, it is possible to cope with the case where the antireflection film is not formed, and the software can be simplified in this case. The TCT layer (B3), the COT layer (B4), the BCT layer (B5), and the DEV layers (B1, B2) as the unit blocks for development processing are stacked on each other in the process block (S2). In the case of forming the antireflection film, it is possible to cope with the situation by selecting the unit block to be used in the TCT layer (B3), the COT layer (B4), and the BCT layer (B5), and it is possible to simplify the software while suppressing the complication of the transport program at this time. However, the robot has a long stroke, and the number of wafers transferred by the same robot in a certain time is small, which results in low efficiency.
Chinese patent publication No. CN103199032A discloses a cluster-structured glue spreading and developing apparatus, which is used to obtain a structure of a glue spreading and developing apparatus in which a photoresist and a photoresist pattern are uniformly distributed on a semiconductor wafer. The invention comprises a wafer box station, a process station and an interface station, wherein the wafer box station and the process station transmit wafers through a material unloading/loading robot, the process station and the interface station transmit wafers through the interface robot, the process station comprises a photoresist coating station and a developing station, the photoresist coating station and the developing station are arranged in a straight line with the wafer box station and the interface station, process processing modules in the station are distributed in a bundling manner, and a bundling origin is respectively a process robot CR and a process robot DR for transmitting the wafers in the station. The invention realizes the reduction of the occupied area of the whole equipment, has strong technical expansibility of process modules in the process station, is convenient for loading and disassembling standardized modules, ensures that the modules with different functions are simply matched and combined, and can be implemented on the equipment by different production processes. However, the stroke of one robot is long, and the number of wafers transferred by the same robot in a certain time is small, which results in low efficiency.
Therefore, there is a need to provide a new type of glue developing apparatus to solve the above problems in the prior art.
Disclosure of Invention
The invention aims to provide a gluing and developing device which reduces the stroke of a manipulator and improves the efficiency.
In order to achieve the above object, the glue spreading and developing apparatus of the present invention comprises:
pellet block;
an interface block;
a first process module disposed between the pellet block and the interface block and comprising a first liquid treatment module and first and second heat treatment modules disposed on opposite sides of the first liquid treatment module;
the first heat treatment module comprises four layers of first heat treatment units which are arranged in a stacked mode, the first liquid treatment module comprises four layers of first liquid treatment units which are arranged in a stacked mode, the second heat treatment module comprises four layers of second heat treatment units which are arranged in a stacked mode, and each unit is provided with an adaptive manipulator.
The invention has the beneficial effects that: the first process module comprises a first liquid treatment module, a first heat treatment module and a second heat treatment module, wherein the first heat treatment module and the second heat treatment module are arranged on two opposite sides of the first liquid treatment module, the first heat treatment module comprises four layers of first heat treatment units which are arranged in a stacked mode, the first liquid treatment module comprises four layers of first liquid treatment units which are arranged in a stacked mode, the second heat treatment module comprises four layers of second heat treatment units which are arranged in a stacked mode, each unit is provided with a manipulator which is matched with the corresponding unit, the carrying stroke of each manipulator is greatly reduced, the number of wafers carried in the same time is increased, and the efficiency is improved.
Preferably, the first layer of first heat treatment unit includes a first low-temperature heating unit group and a first tackifying unit group which are stacked, the first low-temperature heating unit group includes a first row of low-temperature heating units and a second row of low-temperature heating units which are arranged in parallel, the low-temperature heating units in the first row of low-temperature heating units and the low-temperature heating units in the second row of low-temperature heating units are stacked, the first tackifying unit group includes a first row of tackifying units and a second row of tackifying units which are arranged in parallel, and the tackifying units in the first row of tackifying units and the second row of tackifying units are stacked. The beneficial effects are that: the low-temperature heating treatment and the tackifying treatment are convenient to carry out, and the movement stroke of the manipulator is reduced.
Further preferably, the second layer of the first heat treatment unit includes a second low-temperature heating unit group, the second low-temperature heating unit group includes a third row of low-temperature heating units and a fourth row of low-temperature heating units, which are arranged in parallel, and the low-temperature heating units in the third row of low-temperature heating units and the low-temperature heating units in the fourth row of low-temperature heating units are all arranged in a stacked manner. The beneficial effects are that: the second heating treatment is convenient to carry out, and the movement stroke of the mechanical arm is reduced.
Further preferably, the third layer of first heat treatment unit includes a third low-temperature heating unit group, a wafer defect detecting unit group and a second tackifying unit group, the second tackifying unit group and the second low-temperature heating unit group are stacked, the third low-temperature heating unit group includes a row of stacked low-temperature heating units, the wafer defect detecting unit group includes a row of stacked wafer defect detecting units, the second tackifying unit group includes a third row of tackifying units and a fourth row of tackifying units, the third row of tackifying units and the wafer defect detecting unit group are stacked, the fourth row of tackifying units and the third low-temperature heating unit group are stacked, and the wafer defect detecting unit group and the third low-temperature heating unit group are stacked. The beneficial effects are that: the second heating treatment, the wafer defect detection and the tackifying treatment are convenient to carry out, and the movement stroke of the manipulator is reduced.
Further preferably, the fourth-layer first heat treatment unit comprises a fourth low-temperature heating unit group and a first cooling unit group which are arranged in parallel, the fourth low-temperature heating unit group comprises a row of stacked low-temperature heating units, and the first cooling unit group comprises a row of stacked cooling units. The beneficial effects are that: the second heating treatment and the cooling treatment are convenient to carry out, and the movement stroke of the mechanical arm is reduced.
Preferably, the first-layer first liquid treatment unit includes a first protective film coating unit group, a second protective film coating unit group, and a second protective film coating unit group, which are arranged in a stacked manner, the first protective film coating unit group includes a first protective film coating unit and a second protective film coating unit arranged in parallel, the second protective film coating unit group includes a third protective film coating unit and a fourth protective film coating unit arranged in parallel, the second cooling unit group includes some second cooling units arranged in a stacked manner, and the second cooling unit group is arranged between the first protective film coating unit and the third protective film coating unit. The beneficial effects are that: the coating treatment and the cooling treatment of the protective film are convenient to carry out twice, and the movement stroke of the mechanical hand is reduced.
Further preferably, the second layer of first liquid treatment unit comprises a first gluing unit group, a third cooling unit group and a second gluing unit group which are arranged in a stacked manner, the first gluing unit group comprises a first gluing unit and a second gluing unit which are arranged in parallel, the second gluing unit group comprises a third gluing unit and a fourth gluing unit which are arranged in parallel, the third cooling unit group comprises a row of cooling units which are arranged in a stacked manner, the third cooling unit group is arranged between the second gluing unit and the fourth gluing unit, the first gluing unit and the third protective film coating unit are arranged in a stacked manner, and the second gluing unit and the fourth protective film coating unit are arranged in a stacked manner. The beneficial effects are that: the gluing treatment and the cooling treatment are carried out twice conveniently, and the movement stroke of the mechanical arm is reduced.
Further preferably, the third layer of the first liquid treatment unit comprises a first bottom glue unit group, a fourth cooling unit group and a second bottom glue unit group which are arranged in a stacked manner, the first bottom glue unit group comprises a first bottom glue unit and a second bottom glue unit which are arranged in parallel, the second bottom glue unit group comprises a third bottom glue unit and a fourth bottom glue unit which are arranged in parallel, the fourth cooling unit group comprises a row of cooling units which are arranged in a stacked manner, the fourth cooling unit group is arranged between the first bottom glue unit and the third bottom glue unit, the first bottom glue unit and the third glue unit are arranged in a stacked manner, and the second bottom glue unit and the fourth glue unit are arranged in a stacked manner. The beneficial effects are that: the bottom layer glue treatment and the cooling treatment are convenient to carry out twice, and the movement stroke of the mechanical arm is reduced.
Further preferably, the fourth layer of the first liquid processing unit includes a first developing unit group and a second developing unit group, the first developing unit group includes a first row of developing units and a second row of developing units which are arranged in parallel, the second developing unit group includes a third row of developing units and a fourth row of developing units which are arranged in parallel, the developing units in the first row of developing units, the second row of developing units, the third row of developing units and the fourth row of developing units are all stacked, the first row of developing units and the third bottom glue unit are stacked, and the second row of developing units and the fourth bottom glue unit are stacked. The beneficial effects are that: the development processing is convenient for twice, and the movement stroke of the mechanical arm is reduced.
Preferably, the first layer of second heat treatment unit includes a fifth low-temperature heating unit group, a first high-temperature heating unit group and a fifth cooling unit group which are stacked, the fifth low-temperature heating unit group includes a fifth row of low-temperature heating units and a sixth row of low-temperature heating units which are arranged in parallel, the first high-temperature heating unit group includes a first row of high-temperature heating units and a second row of high-temperature heating units which are arranged in parallel, the fifth cooling unit group includes a row of cooling units which are stacked, and the low-temperature heating units in the fifth row of low-temperature heating units and the sixth row of low-temperature heating units are all stacked. The beneficial effects are that: the low-temperature heating treatment, the high-temperature heating treatment and the cooling treatment are convenient to carry out, and the movement stroke of the manipulator is reduced.
Further preferably, the second layer of second heat treatment units include a sixth low-temperature heating unit group, the sixth low-temperature heating unit group includes a seventh row of low-temperature heating units and an eighth row of low-temperature heating units, which are arranged in parallel, and the low-temperature heating units in the seventh row of low-temperature heating units and the low-temperature heating units in the eighth row of low-temperature heating units are all arranged in a stacked manner. The beneficial effects are that: the second heating treatment is convenient to carry out, and the movement stroke of the manipulator is reduced.
Further preferably, the third layer of second heat treatment unit includes a second high temperature heating unit group, an edge exposure unit group and a first post-exposure heating rapid cooling unit group which are stacked, the second high temperature heating unit group includes a third row of high temperature heating units and a fourth row of high temperature heating units which are arranged in parallel, the edge exposure unit group includes a first edge exposure unit and a second edge exposure unit which are arranged in parallel, the first post-exposure heating rapid cooling unit group includes a first post-exposure heating rapid cooling unit and a second post-exposure heating rapid cooling unit which are arranged in parallel, the third row of high temperature heating units and the fourth row of high temperature heating units are stacked, and the first post-exposure heating rapid cooling unit and the second post-exposure heating rapid cooling unit are stacked. The beneficial effects are that: the high-temperature heating treatment, the edge exposure treatment and the post-exposure heating and rapid cooling treatment are convenient to carry out, and the movement stroke of the manipulator is reduced.
Further preferably, the fourth layer of second heat treatment unit includes a third exposure unit and a second post-exposure heating rapid cooling unit group, the second post-exposure heating rapid cooling unit group includes a third post-exposure heating rapid cooling unit and a fourth post-exposure heating rapid cooling unit which are arranged in parallel, the third exposure unit and the third post-exposure heating rapid cooling unit are arranged in a stacked manner, and the third post-exposure heating rapid cooling unit and the fourth post-exposure heating rapid cooling unit are arranged in a stacked manner. The beneficial effects are that: the edge exposure treatment and the heating and quick cooling treatment after the exposure are convenient to carry out, and the movement stroke of the mechanical arm is reduced.
Preferably, the first process module further comprises a cleaning module, wherein one side of the first heat treatment module, which faces away from the first liquid treatment module, is connected with the carrier block, one side of the second heat treatment module, which faces away from the first liquid treatment module, is connected with the cleaning module, and one side of the cleaning module, which faces away from the second heat treatment module, is connected with the interface block. The beneficial effects are that: is convenient for cleaning and reduces the movement stroke of the mechanical hand.
Preferably, the cleaning module includes a post-exposure cleaning unit group, a sixth cooling unit group and a back cleaning unit group, the sixth cooling unit group is disposed between the post-exposure cleaning unit group and the back cleaning unit group, the post-exposure cleaning unit group includes a row of post-exposure cleaning units stacked together, the sixth cooling unit group includes a row of cooling units stacked together, and the back cleaning unit group includes a row of back cleaning units stacked together. The beneficial effects are that: the cleaning treatment, the cooling treatment and the back cleaning treatment after exposure are convenient to carry out, and the movement stroke of the mechanical arm is reduced.
Drawings
FIG. 1 is a schematic diagram of a top view of the gumming development device of the present invention;
FIG. 2 is a schematic cross-sectional view of a first process module according to the present invention;
FIG. 3 is a schematic cross-sectional view of a first thermal processing module according to the present invention;
FIG. 4 is a schematic cross-sectional view of a first liquid treatment module according to the present invention;
FIG. 5 is a schematic cross-sectional view of a second thermal processing module according to the present invention;
FIG. 6 is a schematic cross-sectional view of a cleaning module according to the present invention;
fig. 7 is a schematic structural view of the transfer robot of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings of the present invention, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention. Unless defined otherwise, technical or scientific terms used herein shall have the ordinary meaning as understood by one of ordinary skill in the art to which this invention belongs. As used herein, the word "comprising" and similar words are intended to mean that the element or item listed before the word covers the element or item listed after the word and its equivalents, but does not exclude other elements or items.
In view of the problems in the prior art, an embodiment of the present invention provides a glue spreading and developing apparatus, and referring to fig. 1, the glue spreading and developing apparatus includes:
a pellet block 10;
an interface block 20;
a first process module 30 disposed between the pellet block 10 and the interface block 20 and including a first liquid treatment module 31 and first and second heat treatment modules 32 and 33 disposed on opposite sides of the first liquid treatment module 31;
wherein the first thermal treatment module 32 comprises four stacked first thermal treatment units (not shown), the first liquid treatment module 31 comprises four stacked first liquid treatment units (not shown), the second thermal treatment module 33 comprises four stacked second thermal treatment units (not shown), and each unit has an adapted robot (not shown).
In some embodiments of the invention, the paste developing apparatus further comprises a second process module disposed between the pellet block and the interface block and comprising a second liquid treatment module and third and fourth heat treatment modules disposed on opposite sides of the second liquid treatment module, the second liquid treatment module being structurally identical to and disposed opposite the first liquid treatment module, the third heat treatment module being structurally identical to and disposed opposite the first heat treatment module, and the fourth heat treatment module being structurally identical to and disposed opposite the second heat treatment module.
In some embodiments of the present invention, referring to fig. 3, the first layer first heat treatment unit includes a first low temperature heating unit group (not shown) and a first viscosity increasing unit group (not shown) which are stacked, the first low-temperature heating unit group comprises a first row of low-temperature heating units 321 and a second row of low-temperature heating units 322 which are arranged in parallel, and the low-temperature heating units in the first row of low-temperature heating units 321 and the second row of low-temperature heating units 322 are all stacked, the first tackifying unit group comprises a first row of tackifying units 323 and a second row of tackifying units 324 arranged in parallel, and the first column 323 and the second column 324 are stacked, the first column 323 of viscosity increasing units and the first column 321 of low-temperature heating units are stacked, the second row of viscosity increasing units 324 and the second row of low-temperature heating units 322 are stacked. Specifically, the number of the low-temperature heating units in the first column of low-temperature heating units 321 and the second column of low-temperature heating units 322 is 4, and the number of the tackifying units in the first column of tackifying units 323 and the second column of tackifying units 324 is 2.
In some embodiments of the present invention, referring to fig. 3, the second layer of first thermal processing units includes a second low-temperature heating unit group (not labeled), the second low-temperature heating unit group includes a third row of low-temperature heating units 325 and a fourth row of low-temperature heating units 326 arranged in parallel, and the low-temperature heating units in the third row of low-temperature heating units 325 and the fourth row of low-temperature heating units 326 are all arranged in a stacked manner. Specifically, the number of the low-temperature heating units in the third column of low-temperature heating units 325 and the fourth column of low-temperature heating units 326 is 2.
In some embodiments of the present invention, referring to fig. 3, the third layer of first thermal processing units includes a third low-temperature heating unit group 3210, a wafer defect detecting unit group 329, and a second adhesion-promoting unit group (not shown), the second viscosity increasing unit group and the second low-temperature heating unit group are stacked, the third low-temperature heating unit group 3210 includes a row of stacked low-temperature heating units, the wafer defect detecting unit set 329 includes a row of wafer defect detecting units stacked, the second group of tackifying units comprises a third column 327 and a fourth column 328 of tackifying units arranged in parallel, and the third row 327 and the wafer defect detecting unit group 329 are stacked, the fourth row of viscosity increasing units 328 is stacked on the third low-temperature heating unit group 3210, the wafer defect detecting unit group 329 and the third low-temperature heating unit group 3210 are arranged in parallel. Specifically, the third row of low-temperature heating units 325 and the third row of tackifying units 327 are stacked, the fourth row of low-temperature heating units 326 and the fourth row of tackifying units 328 are stacked, the number of tackifying units in the third row of tackifying units 327 and the fourth row of tackifying units 328 is 2, the number of wafer defect detecting units in the wafer defect detecting unit group 329 is 2, and the number of low-temperature heating units in the third low-temperature heating unit group 3210 is 6.
In some embodiments of the present invention, referring to fig. 3, the fourth-layer first heat treatment unit includes a fourth low-temperature heating unit group 3212 and a first cooling unit group 3211, which are arranged in parallel, the fourth low-temperature heating unit group 3212 includes one row of stacked low-temperature heating units, and the first cooling unit group 3211 includes one row of stacked cooling units. Specifically, the number of the cooling units in the first cooling unit group 3211 is 4, the number of the low-temperature heating units in the fourth low-temperature heating unit group 3212 is 6, a second low-temperature heating unit from top to bottom in the fourth low-temperature heating unit group 3212 is arranged in parallel with a first cooling unit from top to bottom in the first cooling unit group, and a second low-temperature heating unit from bottom to top in the fourth low-temperature heating unit group 3212 is arranged in parallel with a first cooling unit from bottom to top in the first cooling unit group 3211.
In some embodiments of the present invention, referring to fig. 4, the first-layer first liquid treatment unit includes a first protective film coating unit group (not shown) including a first protective film coating unit 311 and a second protective film coating unit 312 arranged in parallel, a second cooling unit group 315 including a third protective film coating unit 313 and a fourth protective film coating unit 314 arranged in parallel, and a second protective film coating unit group (not shown) including a second cooling unit 315 arranged in a row in a stacked manner, and the second cooling unit group 315 is arranged between the first protective film coating unit 311 and the third protective film coating unit 313. Specifically, the number of the cooling units in the second cooling unit group 315 is 4.
More specifically, the first protective film coating unit is disposed in parallel with a first low-temperature heating unit from bottom to top in the second row of low-temperature heating units, the first protective film coating unit is further disposed in parallel with a second low-temperature heating unit from bottom to top in the second row of low-temperature heating units, a first cooling unit from top to bottom in the second cooling unit group is disposed in parallel with a first tackifying unit from top to bottom in the second row of tackifying units, and a first cooling unit from bottom to top in the second cooling unit tube group is disposed in parallel with a first tackifying unit from bottom to top in the second row of tackifying units.
In some embodiments of the present invention, referring to fig. 4, the second-layer first liquid treatment unit includes a first gluing unit group (not shown) including a first gluing unit 316 and a second gluing unit 317 arranged in parallel, a third cooling unit group 3110 including a third gluing unit 318 and a fourth gluing unit 319 arranged in parallel, and a second gluing unit group (not shown) including a third cooling unit 3110 arranged in a row in a stacked manner, the third cooling unit group 3110 being arranged between the second gluing unit 317 and the fourth gluing unit 319, the first gluing unit 316 being arranged in a stacked manner with the third protective film coating unit 313, and the second gluing unit 317 being arranged in a stacked manner with the fourth protective film coating unit 314.
Specifically, the number of the cooling units in the third cooling unit group is 4.
In some embodiments of the present invention, referring to fig. 4, the third layer first liquid treatment unit includes a first bottom glue unit set (not labeled), a fourth cooling unit set 3115 and a second bottom glue unit set (not labeled), the first bottom glue unit set includes a first bottom glue unit 3111 and a second bottom glue unit 3112 which are arranged in parallel, the second bottom glue unit set includes a third bottom glue unit 3113 and a fourth bottom glue unit 3114 which are arranged in parallel, the fourth cooling unit set 3115 includes a row of cooling units which are arranged in stack, the fourth cooling unit set is arranged between the first bottom glue unit 3111 and the third bottom glue unit 3112, the first bottom glue unit 3111 is arranged in stack with the third glue unit 3113, and the second bottom glue unit 3112 is arranged in stack with the fourth glue unit 3114.
Specifically, the number of the cooling units in the fourth cooling unit group is 4, the first cooling unit from top to bottom in the fourth cooling unit group is arranged in parallel with the first low-temperature heating unit of the fourth row of low-temperature heating units, and the second cooling unit from top to bottom in the fourth cooling unit group is arranged in parallel with the second low-temperature heating unit of the fourth row of low-temperature heating units.
In some embodiments of the present invention, referring to fig. 4, the fourth-layer first liquid processing unit includes a first developing unit group (not shown) and a second developing unit group (not shown), the first developing unit group includes a first column of developing units 3116 and a second column of developing units 3117 which are arranged in parallel, the second developing unit group includes a third column of developing units 3118 and a fourth column of developing units 3119 which are arranged in parallel, and developing units in the first column of developing units 3116, the second column of developing units 3117, the third column of developing units 3118 and the fourth column of developing units 3119 are all arranged in a stacked manner, the first column of developing units 3116 is arranged in a stacked manner with the third bottom layer glue unit 3118, and the second column of developing units 3117 is arranged in a stacked manner with the fourth bottom layer glue unit 3119.
Specifically, the number of the developing units in the first row of developing units, the second row of developing units, the third row of developing units and the fourth row of developing units is 3, the first developing unit from top to bottom in the first row of developing units is arranged in parallel with the first low-temperature heating unit from top to bottom in the third low-temperature heating unit group, the first developing unit from top to bottom in the first row of developing units is also arranged in parallel with the second low-temperature heating unit from top to bottom in the third low-temperature heating unit group, the first developing unit from bottom to top in the first row of developing units is arranged in parallel with the first low-temperature heating unit from bottom to top in the third low-temperature heating unit group, the first developing unit from bottom to top in the first row of developing units is also arranged in parallel with the second low-temperature heating unit from bottom to top in the third low-temperature heating unit group, the first developing unit from top to bottom in the third row of developing units and the first low-temperature heating unit from top to bottom in the fourth low-temperature heating unit group are arranged in parallel, the first developing unit from top to bottom in the third row of developing units and the second low-temperature heating unit from top to bottom in the fourth low-temperature heating unit group are also arranged in parallel, the first developing unit from bottom to top in the third row of developing units and the first low-temperature heating unit from bottom to top in the fourth low-temperature heating unit group are arranged in parallel, and the first developing unit from bottom to top in the third row of developing units and the second low-temperature heating unit from bottom to top in the fourth low-temperature heating unit group are also arranged in parallel.
In some embodiments of the present invention, referring to fig. 5, the first-layer second heat treatment unit includes a fifth low-temperature heating unit group (not shown), a first high-temperature heating unit group (not shown), and a fifth cooling unit group 335 that are stacked, the fifth low-temperature heating unit group comprises a fifth row of low-temperature heating units 331 and a sixth row of low-temperature heating units 332 which are arranged in parallel, the first high temperature heating unit group includes a first row 333 and a second row 334 of high temperature heating units arranged in parallel, the fifth cooling unit group 335 includes a row of cooling units arranged in a stack, and the low-temperature heating units in the fifth row of low-temperature heating units 331 and the sixth row of low-temperature heating units 332 are all stacked, the high-temperature heating units in the first row 333 and the second row 334 are stacked.
Specifically, the first row of high-temperature heating units and the fifth row of low-temperature heating units are stacked, the fifth cooling unit group, the second row of high-temperature heating units and the sixth row of low-temperature heating units are stacked, the number of the low-temperature heating units in the fifth row of low-temperature heating units and the number of the low-temperature heating units in the sixth row of low-temperature heating units are both 2, the number of the high-temperature heating units in the first row of high-temperature heating units and the number of the high-temperature heating units in the second row of high-temperature heating units are both 4, and the number of the cooling units in the fifth cooling unit group is 4.
More specifically, the fifth row of low-temperature heating units and the second protective film coating unit are arranged in parallel, the lowest point of the first cooling unit from bottom to top in the fifth cooling unit group and the lowest point of the fourth protective film coating unit are on the same horizontal line, and the highest point of the first cooling unit from top to bottom in the fifth cooling unit group and the highest point of the second glue coating unit are on the same horizontal plane.
In some embodiments of the present invention, referring to fig. 5, the second layer of second thermal treatment units includes a sixth low-temperature heating unit group (not labeled), the sixth low-temperature heating unit group includes a seventh row of low-temperature heating units 336 and an eighth row of low-temperature heating units 337 arranged in parallel, and the low-temperature heating units in the seventh row of low-temperature heating units 336 and the eighth row of low-temperature heating units 337 are stacked. Specifically, the number of the low-temperature heating units in the seventh row of low-temperature heating units 336 and the eighth row of low-temperature heating units 337 is 2, and the lowest point of the first low-temperature heating unit from bottom to top in the seventh row of low-temperature heating units 336 and the eighth row of low-temperature heating units 337 and the highest point of the second bottom layer glue unit are located on the same horizontal plane.
In some embodiments of the present invention, referring to fig. 5, the third layer of the second thermal processing unit includes a second high temperature heating unit group (not shown), an edge exposure unit group (not shown), and a first post-exposure heating and rapid cooling unit group (not shown), the second high temperature heating unit group includes a third row of high temperature heating units 338 and a fourth row of high temperature heating units 339, the edge exposure unit group includes a first edge exposure unit 3310 and a second edge exposure unit 3311, the first post-exposure heating and rapid cooling unit group includes a first post-exposure heating and rapid cooling unit 3312 and a second post-exposure heating and rapid cooling unit 3313, the high temperature heating units in the third row of high temperature heating units 338 and the fourth row of high temperature heating units 339 are stacked, and the post-exposure heating and rapid cooling units in the first post-exposure heating and rapid cooling unit 3312 and the second post-exposure heating and rapid cooling unit 3313 are stacked And (4) setting.
Specifically, the number of the high-temperature heating units in the third row of high-temperature heating units and the number of the high-temperature heating units in the fourth row of high-temperature heating units are both 2, and the number of the post-exposure heating and rapid cooling units in the first post-exposure heating and rapid cooling unit and the second post-exposure heating and rapid cooling unit is both 3.
More specifically, a third row of high-temperature heating units and the fourth bottom layer of glue units are arranged in parallel, the first edge exposure unit and a first developing unit from bottom to top in the second row of developing units are arranged in parallel, a first post-exposure heating rapid cooling unit from bottom to top in the first row of post-exposure heating rapid cooling units and a second developing unit from bottom to top in the second row of developing units are arranged in parallel, a second post-exposure heating rapid cooling unit from bottom to top in the first row of post-exposure heating rapid cooling units and a second developing unit from bottom to top in the second row of developing units are arranged in parallel, and a first post-exposure heating rapid cooling unit from top to bottom in the first row of post-exposure heating rapid cooling units and a first developing unit from top to bottom in the second row of developing units are arranged in parallel.
In some embodiments of the present invention, referring to fig. 5, the fourth layer of second thermal processing unit includes a third exposing unit 3314 and a second post-exposure heating and rapid cooling unit set (not labeled), the second post-exposure heating and rapid cooling unit set includes a third post-exposure heating and rapid cooling unit 3315 and a fourth post-exposure heating and rapid cooling unit 3316 which are arranged in parallel, the third exposing unit 3314 and the third post-exposure heating and rapid cooling unit 3315 are stacked, and the post-exposure heating and rapid cooling units 3315 and 3316 in the third post-exposure heating and rapid cooling unit 3315 and the fourth post-exposure heating and rapid cooling unit 3316 are stacked.
Specifically, the number of the heating and quick cooling units after exposure in the third row of heating and quick cooling units after exposure and the number of the heating and quick cooling units after exposure in the fourth row of heating and quick cooling units after exposure are both 3, the third all-over exposure unit is arranged in parallel with the first developing unit from bottom to top in the fourth row of developing units, the first post-exposure heating quick-cooling unit from bottom to top in the third row of post-exposure heating quick-cooling units and the second developing unit from bottom to top in the fourth row of developing units are arranged in parallel, the second after-exposure heating quick-cooling unit from bottom to top in the third row of after-exposure heating quick-cooling units and the second developing unit from bottom to top in the fourth row of developing units are arranged in parallel, and the first post-exposure heating quick-cooling unit from top to bottom in the third row of post-exposure heating quick-cooling units and the first developing unit from top to bottom in the fourth row of developing units are arranged in parallel.
In some embodiments of the present invention, referring to fig. 2, the first process module further comprises a cleaning module 34, a side of the first heat treatment module 32 facing away from the first liquid treatment module 31 is connected to the pellet block 10, a side of the second heat treatment module 33 facing away from the first liquid treatment module 31 is connected to the cleaning module 34, and a side of the cleaning module 34 facing away from the second heat treatment module 33 is connected to the interface block 20.
In some embodiments of the present invention, referring to fig. 6, the cleaning module 34 includes a post-exposure cleaning unit group 341, a sixth cooling unit group 342, and a back surface cleaning unit group 343, and the lowest point of the sixth high temperature heating unit is located at the same horizontal plane; the number of the cooling units in the sixth cooling unit group is 2, the highest point of the first cooling unit from top to bottom in the sixth cooling unit group and the first lower cooling unit group 342 from top to bottom in the eighth row of low-temperature heating units are disposed between the post-exposure cleaning unit group 341 and the back surface cleaning unit group 343, the post-exposure cleaning unit group 341 includes a row of post-exposure cleaning units stacked one on another, the sixth cooling unit group 342 includes a row of cooling units stacked one on another, and the back surface cleaning unit group 343 includes a row of back surface cleaning units stacked one on another.
Specifically, the number of the post-exposure cleaning units in the post-exposure cleaning unit group is 3, and the highest point of a first post-exposure cleaning unit from top to bottom in the post-exposure cleaning unit group and the lowest point of a second warm heating unit from top to bottom in the second row of high-temperature heating units are located on the same horizontal plane; the number of the back cleaning units in the back cleaning unit group is 6, and a first back cleaning unit from bottom to top in the back cleaning unit group and a first post-exposure heating rapid cooling unit from bottom to top in the fourth row of post-exposure heating rapid cooling units are arranged in parallel.
In some embodiments of the present invention, the second layer of the first heat treatment unit further includes a first buffer unit, the first buffer unit is disposed between the first row of the viscosity increasing units and the third row of the low-temperature heating units, and a horizontal plane where a lowest point of the first buffer unit is located between a horizontal plane where a lowest point of the third glue spreading unit is located and a horizontal plane where a highest point of the first bottom glue spreading unit is located; the third layer of first heat treatment units further comprise a second cache unit, and the second cache unit is arranged on the upper side of the wafer defect detection unit group; the fourth layer of first heat treatment units further comprises a third cache unit, the third cache unit is arranged on the lower side of the first cooling treatment unit group, and the second cache unit and the third cache unit are arranged in a stacked mode.
In some embodiments of the present invention, the first-layer first liquid treatment unit further includes a fourth buffer unit disposed between the second protective film coating unit and the fourth protective film coating unit; the second layer of first liquid processing units further comprise a fifth cache unit, and the fifth cache unit is arranged between the first gluing unit and the third gluing unit; the third layer of the first liquid treatment unit further comprises a sixth buffer unit, and the sixth buffer unit is arranged between the second bottom layer glue unit and the fourth bottom layer glue unit; the fourth layer of the first liquid processing unit further comprises a seventh cache unit, an eighth cache unit and a ninth cache unit, wherein the seventh cache unit and the eighth cache unit are arranged between the first row of developing units and the third row of developing units, and the ninth cache unit is arranged between the second row of developing units and the fourth row of developing units.
In some embodiments of the present invention, the third-layer second heat treatment unit further includes a tenth buffer unit and an eleventh buffer unit, which are stacked, and the tenth buffer unit and the eleventh buffer unit are disposed on the upper side of the second post-exposure heating and fast cooling unit; the fourth layer of second heating processing unit further comprises a twelfth cache unit, the twelfth cache unit is arranged on the lower side of the fourth row of post-exposure heating and quick-cooling units, and the horizontal plane where the highest point of the twelfth cache unit is located is lower than the horizontal plane where the lowest point of the third edge exposure unit is located.
In some embodiments of the present invention, referring to fig. 7, each of the first heat treatment unit, the first liquid treatment unit and the second heat treatment unit is a conveying robot 40, the conveying robot 40 includes a vertical sliding plate 41, a horizontal sliding plate 42 and a fixed base 43, a left end effector 431 and a right end effector 432 are disposed on an upper surface of the fixed base 43, the left end effector 431 and the right end effector 432 are disposed in the same direction, a rotating shaft (not shown) is disposed in the fixed base 43, the rotating shaft is driven by a motor (not shown) to rotate the upper surface of the fixed base 43, so as to drive the left end effector 431 and the right end effector 432 to rotate, the rotating direction of the rotating shaft is the same as the rotating direction of θ, and the left end effector 431 and the right end effector 432 perform telescopic operation along the R direction, the vertical sliding plate 41 is slidably connected to the horizontal sliding plate 42 and driven by a motor (not shown) to slide the vertical sliding plate 41 along the horizontal sliding plate 42, and the fixed seat 43 is slidably connected to the vertical sliding plate 41 and driven by a motor (not shown) to slide the fixed seat 43 along the vertical sliding plate 41.
In some embodiments of the present invention, the pellet block and the interface block are conventional and each include a robot for handling wafers, and the detailed structure thereof is not described herein.
Although the embodiments of the present invention have been described in detail hereinabove, it is apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it is to be understood that such modifications and variations are within the scope and spirit of the present invention as set forth in the following claims. Moreover, the invention as described herein is capable of other embodiments and of being practiced or of being carried out in various ways.
Claims (15)
1. A paste application developing apparatus, comprising:
pellet block;
an interface block;
a first process module disposed between the pellet block and the interface block, comprising a first liquid treatment module and first and second heat treatment modules disposed on opposite sides of the first liquid treatment module;
the first heat treatment module comprises four layers of first heat treatment units which are arranged in a stacked mode, the first liquid treatment module comprises four layers of first liquid treatment units which are arranged in a stacked mode, the second heat treatment module comprises four layers of second heat treatment units which are arranged in a stacked mode, and each unit is provided with an adaptive manipulator.
2. The gumming and developing device according to claim 1, wherein the first layer first heat treatment unit comprises a first low-temperature heating unit group and a first tackifying unit group which are arranged in a stacked manner, the first low-temperature heating unit group comprises a first row of low-temperature heating units and a second row of low-temperature heating units which are arranged in parallel, the low-temperature heating units in the first row of low-temperature heating units and the low-temperature heating units in the second row of low-temperature heating units are arranged in a stacked manner, the first tackifying unit group comprises a first row of tackifying units and a second row of tackifying units which are arranged in parallel, and the tackifying units in the first row of tackifying units and the second row of tackifying units are arranged in a stacked manner.
3. The gumming and developing device according to claim 2, wherein the second layer of first heat treatment units comprise a second low-temperature heating unit group, the second low-temperature heating unit group comprises a third row of low-temperature heating units and a fourth row of low-temperature heating units which are arranged in parallel, and the low-temperature heating units in the third row of low-temperature heating units and the fourth row of low-temperature heating units are all arranged in a stacked mode.
4. The gumming developing apparatus according to claim 3, wherein the third layer of the first heat treatment unit comprises a third low temperature heating unit group, a wafer defect detecting unit group and a second tackifying unit group, the second tackifying unit group and the second low-temperature heating unit group are arranged in a stacked manner, the third low-temperature heating unit group comprises a row of low-temperature heating units arranged in a stacked manner, the wafer defect detecting unit group comprises a row of wafer defect detecting units which are arranged in a stacked mode, the second tackifying unit group comprises a third row of tackifying units and a fourth row of tackifying units which are arranged in parallel, the third row of tackifying units and the wafer defect detecting unit group are arranged in a stacked mode, the fourth row of tackifying units and the third low-temperature heating unit group are arranged in a stacked mode, and the wafer defect detecting unit group and the third low-temperature heating unit group are arranged in parallel.
5. The gumming and developing device according to claim 4, wherein the fourth layer first heat treatment unit comprises a fourth low-temperature heating unit group and a first cooling unit group which are arranged in parallel, the fourth low-temperature heating unit group comprises a row of stacked low-temperature heating units, and the first cooling unit group comprises a row of stacked cooling units.
6. The gumming and developing apparatus according to claim 1, wherein the first-layer first liquid treatment unit includes a first protective film coating unit group, a second cooling unit group, and a second protective film coating unit group, which are arranged in a stacked manner, the first protective film coating unit group includes a first protective film coating unit and a second protective film coating unit, which are arranged in parallel, the second protective film coating unit group includes a third protective film coating unit and a fourth protective film coating unit, which are arranged in parallel, the second cooling unit group includes some second cooling units, which are arranged in a stacked manner, and the second cooling unit group is arranged between the first protective film coating unit and the third protective film coating unit.
7. The paste coating and developing apparatus according to claim 6, wherein the second layer first liquid processing unit includes a first paste coating unit group, a third cooling unit group and a second paste coating unit group which are stacked, the first paste coating unit group includes a first paste coating unit and a second paste coating unit which are arranged in parallel, the second paste coating unit group includes a third paste coating unit and a fourth paste coating unit which are arranged in parallel, the third cooling unit group includes a row of cooling units which are stacked, the third cooling unit group is arranged between the second paste coating unit and the fourth paste coating unit, the first paste coating unit and the third protective film coating unit are stacked, and the second paste coating unit and the fourth protective film coating unit are stacked.
8. The gluing and developing device according to claim 7, wherein the third layer first liquid processing unit comprises a first bottom glue unit group, a fourth cooling unit group and a second bottom glue unit group which are arranged in a stacked manner, the first bottom glue unit group comprises a first bottom glue unit and a second bottom glue unit which are arranged in parallel, the second bottom glue unit group comprises a third bottom glue unit and a fourth bottom glue unit which are arranged in parallel, the fourth cooling unit group comprises a column of cooling units which are arranged in a stacked manner, the fourth cooling unit group is arranged between the first bottom glue unit and the third bottom glue unit, the first bottom glue unit and the third gluing unit are arranged in a stacked manner, and the second bottom glue unit and the fourth gluing unit are arranged in a stacked manner.
9. The gumming and developing device according to claim 8, wherein the fourth layer of first liquid processing unit comprises a first developing unit group and a second developing unit group, the first developing unit group comprises a first row of developing units and a second row of developing units which are arranged in parallel, the second developing unit group comprises a third row of developing units and a fourth row of developing units which are arranged in parallel, developing units in the first row of developing units, the second row of developing units, the third row of developing units and the fourth row of developing units are all arranged in a stacked manner, the first row of developing units and the third bottom layer glue unit are arranged in a stacked manner, and the second row of developing units and the fourth bottom layer glue unit are arranged in a stacked manner.
10. The gumming and developing device according to claim 1, wherein the first layer and second heat treatment unit comprises a fifth low-temperature heating unit group, a first high-temperature heating unit group and a fifth cooling unit group which are arranged in a stacked manner, the fifth low-temperature heating unit group comprises a fifth row and a sixth row of low-temperature heating units which are arranged in parallel, the first high-temperature heating unit group comprises a first row and a second row of high-temperature heating units which are arranged in parallel, the fifth cooling unit group comprises a row of cooling units which are arranged in a stacked manner, and the low-temperature heating units in the fifth row and the sixth row of low-temperature heating units are arranged in a stacked manner.
11. The gumming and developing device according to claim 10, wherein the second layer second heat treatment unit comprises a sixth low-temperature heating unit group, the sixth low-temperature heating unit group comprises a seventh row of low-temperature heating units and an eighth row of low-temperature heating units which are arranged in parallel, and the low-temperature heating units in the seventh row of low-temperature heating units and the low-temperature heating units in the eighth row of low-temperature heating units are arranged in a stacked manner.
12. The gumming developing apparatus according to claim 11, wherein the third layer second heat treatment unit comprises a second high temperature heating unit group, an edge exposure unit group and a first post-exposure heating rapid cooling unit group which are arranged in a stacked manner, the second high-temperature heating unit group comprises a third row of high-temperature heating units and a fourth row of high-temperature heating units which are arranged in parallel, the side exposure unit group comprises a first side exposure unit and a second side exposure unit which are arranged in parallel, the first post-exposure heating and rapid cooling unit group comprises a first post-exposure heating and rapid cooling unit and a second post-exposure heating and rapid cooling unit which are arranged in parallel, and the high-temperature heating units in the third row of high-temperature heating units and the fourth row of high-temperature heating units are all arranged in a stacking way, and the post-exposure heating and quick-cooling units in the first post-exposure heating and quick-cooling unit and the second post-exposure heating and quick-cooling unit are all arranged in a stacked manner.
13. The gumming and developing device according to claim 12, wherein the fourth layer of second heat treatment unit comprises a third edge exposure unit and a second post-exposure heating and rapid cooling unit group, the second post-exposure heating and rapid cooling unit group comprises a third row of post-exposure heating and rapid cooling units and a fourth row of post-exposure heating and rapid cooling units which are arranged in parallel, the third edge exposure unit and the third row of post-exposure heating and rapid cooling units are arranged in a stacked manner, and the post-exposure heating and rapid cooling units in the third row of post-exposure heating and rapid cooling units and the fourth row of post-exposure heating and rapid cooling units are arranged in a stacked manner.
14. The gumming and developing device of claim 1, wherein the first process module further comprises a cleaning module, a side of the first heat treatment module facing away from the first liquid treatment module is connected with the carrier block, a side of the second heat treatment module facing away from the first liquid treatment module is connected with the cleaning module, and a side of the cleaning module facing away from the second heat treatment module is connected with the interface block.
15. The gumming and developing device according to claim 1, wherein the cleaning module comprises a post-exposure cleaning unit group, a sixth cooling unit group and a back surface cleaning unit group, the sixth cooling unit group is arranged between the post-exposure cleaning unit group and the back surface cleaning unit group, the post-exposure cleaning unit group comprises a row of post-exposure cleaning units arranged in a stacked manner, the sixth cooling unit group comprises a row of cooling units arranged in a stacked manner, and the back surface cleaning unit group comprises a row of back surface cleaning units arranged in a stacked manner.
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| CN202010768885.5A CN111796493B (en) | 2020-08-03 | 2020-08-03 | Glue spreading and developing equipment |
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