CN111795644B - Positive intersection point laser double-measuring head pose calibration test piece - Google Patents

Positive intersection point laser double-measuring head pose calibration test piece Download PDF

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CN111795644B
CN111795644B CN202010680652.XA CN202010680652A CN111795644B CN 111795644 B CN111795644 B CN 111795644B CN 202010680652 A CN202010680652 A CN 202010680652A CN 111795644 B CN111795644 B CN 111795644B
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calibration
coordinate system
test piece
measuring head
boss
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CN111795644A (en
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陈珂
胡鑫
汪永超
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Sichuan University
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Sichuan University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/002Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G01B11/007Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

The invention discloses a right-intersection point laser double-measuring head pose calibration test piece, which comprises three shaft sections: clamping the shaft section, horizontally measuring the head and calibrating the shaft section, and vertically measuring the head and calibrating the shaft section; the clamping shaft section comprises a clamping prismatic surface and a positioning cylindrical surface; the horizontal measuring head calibration shaft section comprises a calibration cylindrical surface, a calibration eccentric cylindrical surface, a peripheral alignment plane, a boss type step surface, a cross-shaped groove and a peripheral calibration boss, wherein the peripheral alignment plane, the boss type step surface, the cross-shaped groove and the peripheral calibration boss are distributed according to the calibration station sequence; the vertical measuring head calibration shaft section comprises a circular ring-shaped step surface, a top calibration boss, a top alignment plane and a T-shaped groove; in the calibration process, the test piece can be used for calibrating and calibrating the horizontal measuring head and the vertical measuring head in an orthogonal coordinate system, and compared with a single measuring head pose calibration test piece, the test piece can effectively improve the measurement range, and the calibration of a plurality of characteristic surfaces is utilized, so that the pitching and deflection errors in the installation process of the point laser measuring head and the calibration errors of the two measuring head coordinate systems are reduced.

Description

Positive intersection point laser double-measuring head pose calibration test piece
Technical Field
The invention relates to a calibration test piece of a non-contact three-coordinate detection device, in particular to a laser double-measuring-head pose calibration test piece for a right-intersection point.
Background
When the three-coordinate detection device measures a workpiece for the first time, the three-coordinate detection device is required to be calibrated in precision, and the precision of a calibrated test piece directly influences the system precision of a measurement coordinate system of the three-coordinate detection device; the traditional gantry type three-coordinate detection device adopts a contact type measurement mode, adopts a standard sphere or a standard cylinder for calibration, and in the point laser three-coordinate detection device, the influence of a depth-of-view error and an inclination angle error on the calibration precision in laser triangulation is effectively restrained by using the calibration test piece, and the pitching and deflection errors and the calibration errors of two measuring head coordinate systems in the installation process of the point laser measuring head are reduced by utilizing a plurality of characteristic surfaces for calibration.
For the single-probe pose calibration part, only the calibration work of a peripheral measurement coordinate system or a top measurement coordinate system can be satisfied in the measurement process, the calibration cannot be performed at the same time, and the workpiece detection efficiency is obviously reduced.
The patent CN201920346069 only can calibrate a single laser measuring head three-coordinate detection device, and cannot be applied to a measurement scene in which top characteristic surface detection is required to be carried out on a workpiece to be measured; the device has no clamping surface fixed in the detection device, and extra system precision errors can be introduced in the calibration process; the method has no checking feature of the origin after the calibration of the measuring head coordinate system, so that the calibration error of the measuring head origin cannot be reflected.
Disclosure of Invention
The invention provides a right-intersection point laser dual-measuring head pose calibration test piece.
The clamping shaft section (I) is positioned at the end part of the calibration test piece in the Z direction, and comprises a positioning cylindrical surface (101) and a clamping prismatic surface (102); the axis of the positioning cylindrical surface (101) is overlapped with the Z axis of the test piece coordinate system, and the distance between the end surface of the positioning cylindrical surface and the reference surface of the test piece coordinate system XOY is a known fixed value; the clamping prismatic surface (102) is a suction surface of the calibration test piece fixed on the detection device, and the axis of the clamping prismatic surface coincides with the Z axis of the test piece coordinate system.
The horizontal measuring head calibration shaft section (II) consists of a calibration eccentric cylindrical surface (201), a calibration cylindrical surface (202), a peripheral alignment plane (203), a boss type step surface (204), a cross-shaped groove (205), a peripheral calibration boss (206) and a horizontal calibration sheet (207); the calibration eccentric cylindrical surface (201) is positioned at the upper part of the clamping shaft section (I), and the axis of the calibration eccentric cylindrical surface deviates from a known fixed value along the direction of a test piece coordinate system X, Y to form a calibrated test characteristic surface of the horizontal measuring head coordinate system; the calibration cylindrical surface (202) is positioned at the upper part of the calibration eccentric cylindrical surface (201), and the axis of the calibration cylindrical surface is overlapped with the Z axis of the test piece coordinate system to form a calibrated inspection characteristic surface of the horizontal measuring head coordinate system; the peripheral alignment plane (203) is positioned at the upper part of the calibration cylindrical surface (202) and is mutually perpendicular to the boss-type step surface (204), the distance from the Z axis of the test piece coordinate system is a known fixed value, in the calibration process, two points of known interval distance are detected in the X direction of the peripheral alignment plane (203), and the difference value between the two points fed back by the horizontal measuring head (401) is utilized to calculate the rotation alignment angle of the calibration test piece around the Z axis, so as to form the calibration characteristic of the Y axis linear zero position of the horizontal measuring head coordinate system; each step surface of the boss type step surface (204) is parallel to each other, the relative distance is known, the transverse right-angle edge and the longitudinal right-angle edge of each boss type step surface (204) are mutually perpendicular, and in the transverse and longitudinal detection process of the horizontal measuring head (401) on the boss type step surface (204), if the horizontal measuring head (401) has pitching and swaying angles, the position difference value fed back by the horizontal measuring head (401) on the three step surfaces is unequal to the design value of the boss type step surface (204), so that the pitching and swaying angle errors of the installation of the horizontal measuring head (401) are reflected; the plane where the cross-shaped groove (205) is positioned and the peripheral alignment plane (203) are symmetrical about a test piece coordinate system XOZ reference plane, the cross section of the cross-shaped groove (205) is rectangular about the test piece coordinate system YOZ reference plane, the symmetry plane of the horizontal groove is coincident with the test piece coordinate system XOY reference plane, the groove width of the cross-shaped groove (205) is a known fixed value and is larger than the maximum spot size in the measuring range of the horizontal measuring head (401), and the transverse and longitudinal rectangular edges of the cross-shaped groove (205) can trigger the abrupt change of the measuring value of the horizontal measuring head in the detecting process to form the calibration characteristic of the axial zero position of the horizontal measuring head coordinate system X, Z; the plane where the peripheral calibration boss (206) is located is symmetrical to the boss-type step surface (204) about the test piece coordinate system YOZ reference surface, the center of the peripheral calibration boss (206) is coincident with the test piece coordinate system X-axis, the top characteristic surface of the peripheral calibration boss is parallel to the test piece coordinate system XOY reference surface, the length, width and height of the peripheral calibration boss (206) are known characteristic values, the horizontal calibration pieces (207) are fixed on four characteristic surfaces of the peripheral calibration boss (206) in two groups, each group consists of two pieces and is symmetrically distributed about the peripheral calibration boss (206), the four horizontal calibration piece (207) calibration end surfaces are parallel to the top characteristic surface of the peripheral calibration boss (206), the distances are equal and are known fixed values, if errors exist in the calibration of the origin of the horizontal measurement head (401), the horizontal measurement head (401) is delayed or received in advance in the transverse and longitudinal detection process of the peripheral calibration boss (206), and accordingly the calibration errors of the origin of the horizontal measurement head (401) are reflected, and the calibration characteristics of the origin of the horizontal measurement head (401) after the calibration of the origin are formed.
The vertical measuring head calibration shaft section (III) is positioned at the upper part of the horizontal measuring head calibration shaft section (II) and consists of a circular ring-shaped step surface (301), a top calibration boss (302), a top alignment plane (303), a T-shaped groove (304) and a vertical calibration sheet (305); the distance between the top alignment plane (303) and the X OY reference plane of the test piece coordinate system is a known fixed value, a calibration characteristic of the Z-axis linear zero position of the vertical measuring head coordinate system is formed, if the calibration test piece has a deflection angle in the Z-axis direction, the vertical measuring head (402) detects two points with known distance along the Y-axis direction of the test piece coordinate system, and carries out secondary detection on the detected starting point and the detected end point along the-X direction until the horizontal right angle edge of the T-shaped groove (304) triggers abrupt change, and if the second detection distance between the starting point and the end point has a position difference, the rotation alignment angle of the Z axis can be calculated through the position difference and the known distance detected for the first time; the plane of the T-shaped groove (304) coincides with the top alignment plane (303), the cross section of the T-shaped groove is rectangular, the T-shaped groove (304) is symmetrical with respect to a test piece coordinate system XOZ reference plane, the symmetrical plane of the horizontal groove of the T-shaped groove (304) coincides with a test piece coordinate system YOZ reference plane, the groove width of the T-shaped groove (304) is a known fixed value and is larger than the maximum spot size in the measurement range of the vertical measuring head (402), and the right-angle edge of the T-shaped groove (304) can trigger the abrupt change of the measurement value of the vertical measuring head (402) in the transverse and longitudinal detection process of the vertical measuring head (402), so that the characteristic of the axial zero position of the vertical measuring head coordinate system X, Y is formed; each step surface of the circular step surface (301) is parallel to each other, the relative distance is known, and in the process of transversely and longitudinally detecting the circular step surface (301) by the vertical measuring head (402), if the vertical measuring head (402) has pitching and swaying angles, the position difference fed back by the vertical measuring head (402) on the three step surfaces is unequal to the design value of the circular step surface (301), so that the pitching angle and the swaying angle of the vertical measuring head (402) are reflected; the center of the top calibration boss (302) is overlapped with the Z axis of the test piece coordinate system, the length, the width and the height of the top calibration boss are known characteristic values, the vertical calibration pieces (305) are fixed on four characteristic surfaces of the top calibration boss (302) in two groups, each group is composed of two pieces and symmetrically distributed relative to the top calibration boss (302), the calibration end surfaces of the four vertical calibration pieces (305) are parallel to the top calibration plane (303), the distances of the four vertical calibration pieces are equal to known fixed values, if the original point calibration of the vertical measurement head (402) has errors, the set abrupt change triggered by the vertical calibration pieces (305) is delayed or received in advance in the transverse and longitudinal detection process of the top calibration boss (302), so that the calibration errors of the original point of the vertical measurement head (402) are reflected, and the verification characteristics of the original point after the calibration of the vertical measurement head coordinate system are formed.
The thickness of the horizontal calibration piece (207) is equal to the diameter of a light spot at the focus of the horizontal measuring head (401), the thickness of the vertical calibration piece (305) is equal to the diameter of a light spot at the focus of the vertical measuring head (402), and the calibration pieces with different thicknesses can be suitable for point laser measuring heads with different types.
The peripheral alignment plane (203), the boss type step surface (204), the cross-shaped groove (205) and the peripheral alignment boss (206) of the horizontal measuring head calibration shaft section (II) are distributed at intervals of 90 degrees according to the station sequence in the calibration and calibration process.
The calibration test piece is combined with a horizontal calibration shaft section (II) and a vertical calibration shaft section (III) on the same shaft, and the axis of a calibration cylindrical surface (202) of the horizontal calibration shaft section (II) coincides with the axes of the vertical calibration shaft section (III) and the clamping shaft section (I); the origin of the coordinate system is positioned at the intersection point of the axis of the calibration cylindrical surface (202) and the horizontal symmetry plane of the cross-shaped groove (205); at least two prismatic surfaces of the clamping prismatic surface (102) are parallel to a plane where the boss type step surface (204) or the peripheral calibration boss (206) is located;
the origin of the coordinate system is arranged at the intersection point of the axis of the calibration cylindrical surface (202) and the horizontal symmetry plane of the cross-shaped groove (205), the axis of the coordinate system Z axis coincides with the axes of the calibration cylindrical surface (202) and the annular step surface (301), the direction of the pointing top alignment plane (303) is the coordinate system Z axis positive direction, the axis of the coordinate system Y axis is perpendicular to the peripheral alignment plane (203), the direction of the pointing peripheral alignment plane (203) is the coordinate system Y axis positive direction, and the coordinate system accords with the right-hand coordinate system rule.
Drawings
Fig. 1 is an isometric view i of a cross point laser dual probe pose calibration test piece, fig. 2 is an isometric view ii of a cross point laser dual probe pose calibration test piece, fig. 3 is a vertical probe calibration schematic diagram, and fig. 4 is a horizontal probe calibration schematic diagram.
The graphic symbols are: the measuring device comprises a clamping shaft section I, a horizontal measuring head calibration shaft section II, a vertical measuring head calibration shaft section III, a positioning cylindrical surface 101, a clamping prismatic surface 102, a calibration eccentric cylindrical surface 201, a calibration cylindrical surface 202, a peripheral alignment plane 203, a boss-type step surface 204, a cross-shaped groove 205, a peripheral alignment boss 206, a horizontal calibration sheet 207, a circular ring-type step surface 301, a top calibration boss 302, a top alignment plane 303, a T-type groove 304, a vertical calibration sheet 305, a horizontal measuring head 401 and a vertical measuring head 402.
Detailed Description
The preferred embodiments of the present invention will be described in detail below with reference to the attached drawings;
the utility model provides a right-angle point laser double-gauge head pose calibration test piece which characterized in that, it includes clamping axle section (I), horizontal gauge head calibration axle section (II), vertical gauge head calibration axle section (III).
The clamping shaft section (I) is positioned at the end part of the calibration test piece in the Z direction, and comprises a positioning cylindrical surface (101) and a clamping prismatic surface (102); the axis of the positioning cylindrical surface (101) is overlapped with the Z axis of the test piece coordinate system, and the distance between the end surface of the positioning cylindrical surface and the reference surface of the test piece coordinate system XOY is a known fixed value; the clamping prismatic surface (102) is a suction surface of the calibration test piece fixed on the detection device, and the axis of the clamping prismatic surface coincides with the Z axis of the test piece coordinate system.
The horizontal measuring head calibration shaft section (II) consists of a calibration eccentric cylindrical surface (201), a calibration cylindrical surface (202), a peripheral alignment plane (203), a boss type step surface (204), a cross-shaped groove (205), a peripheral calibration boss (206) and a horizontal calibration sheet (207); the calibration eccentric cylindrical surface (201) is positioned at the upper part of the clamping shaft section (I), and the axis of the calibration eccentric cylindrical surface deviates from a known fixed value along the direction of a test piece coordinate system X, Y to form a calibrated test characteristic surface of the horizontal measuring head coordinate system; the calibration cylindrical surface (202) is positioned at the upper part of the calibration eccentric cylindrical surface (201), and the axis of the calibration cylindrical surface is overlapped with the Z axis of the test piece coordinate system to form a calibrated inspection characteristic surface of the horizontal measuring head coordinate system; the peripheral alignment plane (203) is positioned at the upper part of the calibration cylindrical surface (202) and is mutually perpendicular to the boss-type step surface (204), the distance from the Z axis of the test piece coordinate system is a known fixed value, in the calibration process, two points of known interval distance are detected in the X direction of the peripheral alignment plane (203), and the difference value between the two points fed back by the horizontal measuring head (401) is utilized to calculate the rotation alignment angle of the calibration test piece around the Z axis, so as to form the calibration characteristic of the Y axis linear zero position of the horizontal measuring head coordinate system; each step surface of the boss type step surface (204) is parallel to each other, the relative distance is known, the transverse right-angle edge and the longitudinal right-angle edge of each boss type step surface (204) are mutually perpendicular, and in the transverse and longitudinal detection process of the horizontal measuring head (401) on the boss type step surface (204), if the horizontal measuring head (401) has pitching and swaying angles, the position difference value fed back by the horizontal measuring head (401) on the three step surfaces is unequal to the design value of the boss type step surface (204), so that the pitching and swaying angle errors of the installation of the horizontal measuring head (401) are reflected; the plane where the cross-shaped groove (205) is positioned and the peripheral alignment plane (203) are symmetrical about a test piece coordinate system XOZ reference plane, the cross section of the cross-shaped groove (205) is rectangular about the test piece coordinate system YOZ reference plane, the symmetry plane of the horizontal groove is coincident with the test piece coordinate system XOY reference plane, the groove width of the cross-shaped groove (205) is a known fixed value and is larger than the maximum spot size in the measuring range of the horizontal measuring head (401), and the transverse and longitudinal rectangular edges of the cross-shaped groove (205) can trigger the abrupt change of the measuring value of the horizontal measuring head in the detecting process to form the calibration characteristic of the axial zero position of the horizontal measuring head coordinate system X, Z; the plane where the peripheral calibration boss (206) is located is symmetrical to the boss-type step surface (204) about the test piece coordinate system YOZ reference surface, the center of the peripheral calibration boss (206) is coincident with the test piece coordinate system X-axis, the top characteristic surface of the peripheral calibration boss is parallel to the test piece coordinate system XOY reference surface, the length, width and height of the peripheral calibration boss (206) are known characteristic values, the horizontal calibration pieces (207) are fixed on four characteristic surfaces of the peripheral calibration boss (206) in two groups, each group consists of two pieces and is symmetrically distributed about the peripheral calibration boss (206), the four horizontal calibration piece (207) calibration end surfaces are parallel to the top characteristic surface of the peripheral calibration boss (206), the distances are equal and are known fixed values, if errors exist in the calibration of the origin of the horizontal measurement head (401), the horizontal measurement head (401) is delayed or received in advance in the transverse and longitudinal detection process of the peripheral calibration boss (206), and accordingly the calibration errors of the origin of the horizontal measurement head (401) are reflected, and the calibration characteristics of the origin of the horizontal measurement head (401) after the calibration of the origin are formed.
The vertical measuring head calibration shaft section (III) is positioned at the upper part of the horizontal measuring head calibration shaft section (II) and consists of a circular ring-shaped step surface (301), a top calibration boss (302), a top alignment plane (303), a T-shaped groove (304) and a vertical calibration sheet (305); the distance between the top alignment plane (303) and the X OY reference plane of the test piece coordinate system is a known fixed value, a calibration characteristic of the Z-axis linear zero position of the vertical measuring head coordinate system is formed, if the calibration test piece has a deflection angle in the Z-axis direction, the vertical measuring head (402) detects two points with known distance along the Y-axis direction of the test piece coordinate system, and carries out secondary detection on the detected starting point and the detected end point along the-X direction until the horizontal right angle edge of the T-shaped groove (304) triggers abrupt change, and if the second detection distance between the starting point and the end point has a position difference, the rotation alignment angle of the Z axis can be calculated through the position difference and the known distance detected for the first time; the plane of the T-shaped groove (304) coincides with the top alignment plane (303), the cross section of the T-shaped groove is rectangular, the T-shaped groove (304) is symmetrical with respect to a test piece coordinate system XOZ reference plane, the symmetrical plane of the horizontal groove of the T-shaped groove (304) coincides with a test piece coordinate system YOZ reference plane, the groove width of the T-shaped groove (304) is a known fixed value and is larger than the maximum spot size in the measurement range of the vertical measuring head (402), and the right-angle edge of the T-shaped groove (304) can trigger the abrupt change of the measurement value of the vertical measuring head (402) in the transverse and longitudinal detection process of the vertical measuring head (402), so that the characteristic of the axial zero position of the vertical measuring head coordinate system X, Y is formed; each step surface of the circular step surface (301) is parallel to each other, the relative distance is known, and in the process of transversely and longitudinally detecting the circular step surface (301) by the vertical measuring head (402), if the vertical measuring head (402) has pitching and swaying angles, the position difference fed back by the vertical measuring head (402) on the three step surfaces is unequal to the design value of the circular step surface (301), so that the pitching angle and the swaying angle of the vertical measuring head (402) are reflected; the center of the top calibration boss (302) is overlapped with the Z axis of the test piece coordinate system, the length, the width and the height of the top calibration boss are known characteristic values, the vertical calibration pieces (305) are fixed on four characteristic surfaces of the top calibration boss (302) in two groups, each group is composed of two pieces and symmetrically distributed relative to the top calibration boss (302), the calibration end surfaces of the four vertical calibration pieces (305) are parallel to the top calibration plane (303), the distances of the four vertical calibration pieces are equal to known fixed values, if the original point calibration of the vertical measurement head (402) has errors, the set abrupt change triggered by the vertical calibration pieces (305) is delayed or received in advance in the transverse and longitudinal detection process of the top calibration boss (302), so that the calibration errors of the original point of the vertical measurement head (402) are reflected, and the verification characteristics of the original point after the calibration of the vertical measurement head coordinate system are formed.
The thickness of the horizontal calibration piece (207) is equal to the diameter of a light spot at the focus of the horizontal measuring head (401), the thickness of the vertical calibration piece (305) is equal to the diameter of a light spot at the focus of the vertical measuring head (402), and the calibration pieces with different thicknesses can be suitable for point laser measuring heads with different types.
The peripheral alignment plane (203), the boss type step surface (204), the cross-shaped groove (205) and the peripheral alignment boss (206) of the horizontal measuring head calibration shaft section (II) are distributed at intervals of 90 degrees according to the station sequence in the calibration and calibration process.
The calibration test piece is combined with a horizontal calibration shaft section (II) and a vertical calibration shaft section (III) on the same shaft, and the axis of a calibration cylindrical surface (202) of the horizontal calibration shaft section (II) coincides with the axes of the vertical calibration shaft section (III) and the clamping shaft section (I); the origin of the coordinate system is positioned at the intersection point of the axis of the calibration cylindrical surface (202) and the horizontal symmetry plane of the cross-shaped groove (205); at least two prismatic surfaces of the clamping prismatic surface (102) are parallel to a plane where the boss type step surface (204) or the peripheral calibration boss (206) is located;
the origin of the coordinate system is arranged at the intersection point of the axis of the calibration cylindrical surface (202) and the horizontal symmetry plane of the cross-shaped groove (205), the axis of the coordinate system Z axis coincides with the axes of the calibration cylindrical surface (202) and the annular step surface (301), the direction of the pointing top alignment plane (303) is the coordinate system Z axis positive direction, the axis of the coordinate system Y axis is perpendicular to the peripheral alignment plane (203), the direction of the pointing peripheral alignment plane (203) is the coordinate system Y axis positive direction, and the coordinate system accords with the right-hand coordinate system rule.
The foregoing is only a preferred embodiment of the present invention. All equivalent changes and modifications made in accordance with the scope of the present invention shall fall within the scope of the present invention.

Claims (6)

1. The right-intersection point laser double-measuring-head pose calibration test piece is characterized by comprising a clamping shaft section (I), a horizontal measuring-head calibration shaft section (II) and a vertical measuring-head calibration shaft section (III);
the clamping shaft section (I) is positioned at the end part of the calibration test piece coordinate system in the negative Z-axis direction, and comprises a positioning cylindrical surface (101) and a clamping prismatic surface (102); the axis of the positioning cylindrical surface (101) coincides with the Z-axis of the test piece coordinate system, and the distance between the end surface of the positioning cylindrical surface and the X-axis reference surface of the test piece coordinate system is a known fixed value; the clamping prismatic surface (102) is a suction surface of the calibration test piece fixed on the detection device, and the axis of the suction surface coincides with the Z-axis of the test piece coordinate system;
the horizontal measuring head calibration shaft section (II) consists of a calibration eccentric cylindrical surface (201), a calibration cylindrical surface (202), a peripheral alignment plane (203), a boss type step surface (204), a cross-shaped groove (205), a peripheral calibration boss (206) and a horizontal calibration sheet (207); the calibration eccentric cylindrical surface (201) is positioned at the upper part of the clamping shaft section (I), and the axis of the calibration eccentric cylindrical surface deviates from a known fixed value along the direction of a test piece coordinate system X, Y; the calibration cylindrical surface (202) is positioned at the upper part of the calibration eccentric cylindrical surface (201), and the axis of the calibration cylindrical surface is overlapped with the Z axis of the test piece coordinate system to form a calibrated inspection characteristic surface of the horizontal measuring head coordinate system;
the peripheral alignment plane (203) is positioned at the upper part of the calibration cylindrical surface (202), is mutually perpendicular to the boss-type step surface (204), and has a distance to the Z axis of the test piece coordinate system of a known fixed value, in the calibration process, two points of a known interval distance are detected in the X direction of the peripheral alignment plane (203), and the difference value between the two points fed back by the horizontal measuring head (401) is utilized to calculate the rotation alignment angle of the calibration test piece around the Z axis, so as to form the calibration characteristic of the Y axis linear zero position of the horizontal measuring head coordinate system; each step surface of the boss-type step surfaces (204) is parallel to each other, the relative distance is known, and the transverse right-angle edge and the longitudinal right-angle edge of each boss-type step surface (204) are mutually perpendicular; the plane where the cross-shaped groove (205) is positioned is symmetrical to the peripheral alignment plane (203) about the test piece coordinate system XOZ reference plane, the cross section of the cross-shaped groove (205) is rectangular about the test piece coordinate system YOZ reference plane, the symmetry plane of the horizontal groove is coincident with the test piece coordinate system XOY reference plane, the groove width of the cross-shaped groove (205) is a known fixed value and is larger than the maximum spot size in the measuring range of the horizontal measuring head (401), and in the detection process, the transverse and longitudinal rectangular edges of the cross-shaped groove (205) trigger the abrupt change of the measuring value of the horizontal measuring head to form the calibration characteristic of the axial zero position of the horizontal measuring head coordinate system X, Z; the plane where the peripheral calibration boss (206) is located is symmetrical to the boss step surface (204) about a test piece coordinate system YOZ reference plane, the center of the peripheral calibration boss (206) coincides with the X axis of the test piece coordinate system, the top characteristic surface is parallel to the test piece coordinate system XOY reference plane, and the length, width and height of the peripheral calibration boss (206) are known characteristic values;
the vertical measuring head calibration shaft section (III) is positioned at the upper part of the horizontal measuring head calibration shaft section (II) and consists of a circular ring-shaped step surface (301), a top calibration boss (302), a top alignment plane (303), a T-shaped groove (304) and a vertical calibration sheet (305); the distance between the top alignment plane (303) and the X OY reference plane of the test piece coordinate system is a known fixed value, a calibration characteristic of the Z axis linear zero position of the vertical measuring head coordinate system is formed, if the calibration test piece has a deflection angle in the Z axis direction, the vertical measuring head (402) detects two points with known distance along the Y axis direction of the test piece coordinate system, and carries out secondary detection on the detected starting point and the detected end point along the X direction until the horizontal right angle edge of the T-shaped groove (304) triggers abrupt change, and if the second detection distance between the starting point and the detected end point has a position difference, the rotation alignment angle of the Z axis is calculated through the position difference and the known distance detected for the first time; the plane of the T-shaped groove (304) coincides with the top alignment plane (303), the cross section of the T-shaped groove is rectangular, the T-shaped groove (304) is symmetrical with respect to a test piece coordinate system XOZ reference plane, the symmetrical plane of the horizontal groove of the T-shaped groove (304) coincides with a test piece coordinate system YOZ reference plane, the groove width of the T-shaped groove (304) is a known fixed value and is larger than the maximum spot size in the measurement range of the vertical measuring head (402), and the right-angle edge of the T-shaped groove (304) triggers the abrupt change of the measurement value of the vertical measuring head (402) in the transverse and longitudinal detection process of the vertical measuring head (402), so that the characteristic of calibrating the axial zero position of the vertical measuring head coordinate system X, Y is formed; each of the annular step surfaces (301) are parallel to each other and have a known relative distance; the center of the top calibration boss (302) is overlapped with the Z axis of the test piece coordinate system, and the length, the width and the height of the top calibration boss are known characteristic values;
the thickness of the horizontal calibration piece (207) is equal to the diameter of a light spot at the focus of the horizontal measuring head (401), the thickness of the vertical calibration piece (305) is equal to the diameter of a light spot at the focus of the vertical measuring head (402), and the calibration pieces with different thicknesses can be suitable for point laser measuring heads with different types;
the peripheral alignment plane (203), the boss type step surface (204), the cross-shaped groove (205) and the peripheral calibration boss (206) of the horizontal measuring head calibration shaft section (II) are distributed at intervals of 90 degrees according to the station sequence in the calibration and calibration process.
2. The right-angle point laser dual-measuring-head pose calibration test piece according to claim 1, wherein the calibration test piece is combined with a horizontal measuring head calibration shaft section (II) and a vertical measuring head calibration shaft section (III) on the same shaft, and the axis of a calibration cylindrical surface (202) of the horizontal measuring head calibration shaft section (II) coincides with the axis of the vertical measuring head calibration shaft section (III) and the axis of a clamping shaft section (I).
3. The right-angle laser dual-gauge-head pose calibration test piece according to claim 1, wherein at least two prismatic surfaces of the clamping prismatic surface (102) are parallel to a plane of the boss-type stepped surface (204) or the peripheral calibration boss (206).
4. The right-angle laser dual-probe pose calibration test piece according to claim 1, wherein the horizontal calibration pieces (207) are fixed on four characteristic surfaces of the peripheral calibration boss (206) in two groups, each group is composed of two pieces and symmetrically distributed about the peripheral calibration boss (206), the calibration end surfaces of the four horizontal calibration pieces (207) are parallel to the top characteristic surface of the peripheral calibration boss (206), the distances between the four horizontal calibration pieces are equal to known fixed values, if an origin calibration of the horizontal measurement head (401) has errors, the horizontal measurement head (401) delays or receives a set mutation triggered by the horizontal calibration piece (207) in advance in the transverse and longitudinal detection process of the peripheral calibration boss (206), so that the calibration errors of the origin of the horizontal measurement head (401) are reflected, and the verification characteristics of the origin after the calibration of the horizontal measurement head coordinate system are formed.
5. The right-angle laser dual-probe pose calibration test piece according to claim 1, wherein the vertical calibration pieces (305) are fixed on four characteristic surfaces of the top calibration boss (302) in two groups, each group is composed of two pieces and symmetrically distributed about the top calibration boss (302), the calibration end surfaces of the four vertical calibration pieces (305) are parallel to the top calibration plane (303), the distances between the four calibration end surfaces are equal to a known fixed value, if an origin calibration of the vertical measurement head (402) has errors, the vertical measurement head (402) can delay or receive a set mutation triggered by the vertical calibration piece (305) in advance in the transverse and longitudinal detection process of the top calibration boss (302), so that the calibration errors of the origin of the vertical measurement head (402) are reflected, and the verification feature of the origin after the calibration of the vertical measurement head coordinate system is formed.
6. The right-angle laser dual-probe pose calibration test piece according to claim 1, wherein the origin of the coordinate system is at the intersection point of the axis of the calibration cylindrical surface (202) and the horizontal symmetry plane of the cross-shaped groove (205), the axis of the coordinate system Z axis coincides with the axes of the calibration cylindrical surface (202) and the circular-ring-shaped step surface (301), the direction of the pointing top alignment plane (303) is the positive direction of the coordinate system Z axis, the axis of the coordinate system Y axis is perpendicular to the peripheral alignment plane (203), the direction of the pointing peripheral alignment plane (203) is the positive direction of the coordinate system Y axis, and the coordinate system accords with the rule of a right-hand coordinate system.
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