WO2019210644A1

WO2019210644A1 - Standard component used for three-dimensional white light scanning device and calibration method therefor

Info

Publication number: WO2019210644A1
Application number: PCT/CN2018/109476
Authority: WO
Inventors: 余劲松; 胡明建; 方明
Original assignee: 苏州玻色智能科技有限公司
Priority date: 2018-05-04
Filing date: 2018-10-09
Publication date: 2019-11-07
Also published as: KR102190471B1; CN110440708B; CN110440708A; JP2020521942A; KR20190127684A; JP6797439B2

Abstract

A standard component used for a three-dimensional white light scanning device, the standard component being provided thereon with a standard plane (1), and the standard plane (1) being provided thereon with a first V-shaped groove (2) and a second V-shaped groove (3), the first V-shaped groove (2) and the second V-shaped groove (3) being close to two ends of the standard component respectively; an intersection line between two groove walls on the first V-shaped groove (2) and an intersection line between two groove walls on the second V-shaped groove (3) are both vertical to a connecting line between two ends of the standard component, i.e., the length direction of the standard component. The standard component may verify the existing precision of a three-dimensional white light scanning device and may compensate the deviation caused by a motion mechanism.

Description

Standard part for three-dimensional white light scanning device and calibration method thereof

Technical field

The invention relates to the field of three-dimensional parameter calibration, in particular to a standard component for a three-dimensional white light scanning device and a calibration method thereof.

Background technique

The three-dimensional white light scanning device mainly scans and measures the three-dimensional coordinate point set of the physical surface, and the obtained set of a large number of coordinate points is called a point cloud. The data measured by the three-dimensional white light scanning device is a three-dimensional point cloud, which is a set of three coordinate points containing XYZ; therefore, the three-dimensional white light scanning device belongs to three-dimensional scanning, and the spatial range of the three-dimensional scanning needs to be calibrated and verified, and The original calibration method is only to calibrate the plane and height. The motion mechanism on the equipment cannot be calibrated together, and the calibration accuracy is low.

The measuring angle of the measuring head on the 3D white light scanning device is less than 25°, and the depth of field is also less than 10mm. It has the characteristics of small measuring angle and small depth of field, so the traditional standard ball calibration method cannot be used because the measured standard The ball data is too small, less than 1/5, and has not been calibrated and verified. In the traditional method of measuring the block, since the two measured faces of the gauge block are perpendicular to the measurement direction, the results cannot be measured by the existing equipment.

In summary, the three-dimensional white light scanning device requires a standard component that can calibrate the three-dimensional spatial scanning data, and a calibration method to which the standard component is applied.

Summary of the invention

The technical problem to be solved by the present invention is to provide a standard component for a three-dimensional white light scanning device, which can verify the existing precision of the three-dimensional white light scanning device and can compensate for the deviation caused by the moving mechanism.

In order to solve the above technical problem, a technical solution adopted by the present invention is to provide a standard component for a three-dimensional white light scanning device, wherein the standard component has a standard plane, and the standard plane is further provided with a first V-shaped groove and a second V-shaped groove, the first V-shaped groove and the second V-shaped groove are respectively adjacent to the two ends of the standard member, the intersection between the two groove walls on the first V-shaped groove and the two grooves on the second V-shaped groove The line of intersection between the walls is perpendicular to the length of the line connecting the standard members, that is, the standard members.

Preferably, the angle between the two groove walls on the first V-shaped groove and the two groove walls on the second V-shaped groove are both 130°-180°.

Preferably, the flatness of the standard plane is less than or equal to 0.009 mm.

Preferably, a plurality of third V-shaped grooves are equally distributed on the standard plane between the first V-shaped groove and the second V-shaped groove, and the first V-shaped groove and the third V-shaped adjacent thereto The distance between the grooves, the distance between the second V-shaped groove and the third V-shaped groove adjacent thereto are equal to the distance between the two V-shaped grooves.

Preferably, the first V-shaped groove and the second V-shaped groove are the same; the third V-shaped groove is the same as the first V-shaped groove; and the distance between the two second-shaped V-shaped grooves It is 10mm.

Preferably, the distance between the first V-shaped groove and the second V-shaped groove is 200 mm, and the groove depth of the first V-shaped groove and the groove depth of the second V-shaped groove are both 1 mm. 5mm.

A calibration method for a three-dimensional white light scanning device adopts the above standard parts, and the method is as follows:

The standard component is mounted on the measuring fixture of the three-dimensional white light scanning device, and the three-dimensional white light scanning device is operated, and the probe of the three-dimensional white light scanning device can scan out a set of point clouds; the scanned point cloud uses software to distinguish the planar point cloud and V-groove point cloud, and use the standard Gaussian mathematical algorithm to fit the point cloud plane F;

Calculate the flatness FD of the point cloud plane F. The flatness FD is the deviation range of all points on the point cloud plane F. The data of the flatness FD is derived from two deviations, one is the acquisition deviation of the probe on the three-dimensional white light scanning device, and the other is One is the jitter of the motion mechanism of the three-dimensional white light scanning device during linear motion. These two values are determined by the performance of the device, that is, the uncertainty of the measuring device; when the flatness FD is not within the normal range, it can be passed. Adjusting the probe on the three-dimensional white light scanning device or adjusting the motion mechanism or both to adjust the flatness FD to meet the requirements;

Flatness FD is the single point probe error PF;

Calculating the intersection line L1 of the two groove walls on the first V-shaped groove, calculating the intersection line L2 of the two groove walls on the second V-shaped groove, and measuring the distance LE between the intersection line L1 and the intersection line L2;

The deviation E is the deviation of the three-dimensional white light scanning device in the longitudinal direction. The source of the deviation E is the deviation of the linear motor on the motion mechanism, which is the deviation between the theoretical movement distance and the actual movement distance; when the deviation E is not within the normal range, By adjusting the linear motor on the moving mechanism, the deviation E meets the requirements within the specified range;

The deviation E can be calculated according to the following formula:

E=|LE-LD|

Wherein, LD is the actual distance between the first V-shaped groove and the second V-shaped groove on the standard member;

According to the single point probe error PF and the deviation E in the length direction, the combination precision A of the three-dimensional white light scanning device can be obtained, and the combination precision A can be calculated as follows:

A=PF+E*L/LD

Where L is the length of the object to be tested, and the object to be tested is the actual product to be measured by the three-dimensional white light scanning device.

The invention has the beneficial effects that the invention can verify the existing precision of the three-dimensional white light scanning device and can compensate the deviation caused by the moving mechanism; the structure is simple, the use is convenient, and the measuring precision is high.

DRAWINGS

1 is a perspective view of a preferred embodiment of a standard component for a three-dimensional white light scanning device according to the present invention;

2 is a top plan view showing a standard part of a three-dimensional white light scanning device of the present invention;

3 is a front view showing the structure of a standard member for a three-dimensional white light scanning device according to the present invention;

Figure 4 is an enlarged schematic view showing a partial structure of A in Figure 3;

5 is a schematic perspective structural view of another embodiment of a standard member for a three-dimensional white light scanning device according to the present invention;

6 is a schematic perspective view of a three-dimensional white light scanning device of the present invention.

The components of the drawings are marked as follows: 1. Standard plane; 2. First V-shaped groove; 3. Second V-shaped groove; 4. Third V-shaped groove; 5. Movement mechanism; 6. Measuring fixture; 7, the probe; 8, the measured object.

detailed description

The preferred embodiments of the present invention are described in detail below with reference to the accompanying drawings, in which the advantages and features of the invention can be more readily understood by those skilled in the art.

Referring to FIG. 1 to FIG. 6 , an embodiment of the present invention includes:

Embodiment 1: A standard member for a three-dimensional white light scanning device, the standard member is of a long strip type, and the standard member has a structure for facilitating clamping and fixing; the standard member has a standard of 0.001 mm flatness. Plane 1, the standard plane 1 is further provided with a first V-shaped groove 2 and a second V-shaped groove 3, the first V-shaped groove 2 and the second V-shaped groove 3 are respectively adjacent to both ends of the standard member, the first V-shaped The line of intersection between the two groove walls on the groove 2 and the two groove walls on the second V-shaped groove 3 are perpendicular to the line connecting the two ends of the standard member, and the connection between the two ends of the standard member is The direction is the length direction of the standard part.

The distance between the first V-shaped groove 2 and the second V-shaped groove 3 is 200 mm; the angle between the two groove walls on the first V-shaped groove 2 and the second V-shaped groove 3 The angle between the two groove walls is 150°, so that the two groove walls can be detected by the probe 7 of the three-dimensional white light scanning device; the angle of the angle here mainly depends on the sensor on the probe 7, according to The sensing angle of the sensor changes accordingly and is not limited. The groove depth of the first V-shaped groove 2 and the groove depth of the second V-shaped groove 3 are both 3 mm, and the groove depth here may also depend on the sensor, so that the groove surface data of the V-shaped groove can be better detected. . The first V-shaped groove 2 and the second V-shaped groove 3 are the same; of course, the structure of the first V-shaped groove 2 may be different from the structure of the second V-shaped groove 3, which is not limited;

A plurality of third V-shaped grooves 4 are equally distributed on the standard plane 1 between the first V-shaped groove 2 and the second V-shaped groove 3, and the first V-shaped groove 2 and the third adjacent thereto The distance between the V-grooves 4, the distance between the second V-groove 3 and the third V-groove 4 adjacent thereto are equal to the distance between the two V-grooves 4. In order to adapt to the calibration of different sizes of products, two V-shaped grooves can be selected as the space precision according to the actual length of the product; of course, the standard parts can also be lengthened, and the length of the standard parts is not limited here, and the length of the standard parts mainly depends on The length of the product with the actual measurement. The third V-shaped groove 4 is the same as the first V-shaped groove 2; of course, the structure of the third V-shaped groove 4 may be different from the structure of the first V-shaped groove 2 and the second V-shaped groove 3. This is not limited. The distance between the two of the third V-shaped grooves 4 is 10 mm. However, the third V-groove 4 on the standard member is not necessary, and the presence or absence of the third V-groove 4 on the standard member does not affect the use of the standard member.

The standard component is mounted on the measuring fixture 6 of the three-dimensional white light scanning device, and the three-dimensional white light scanning device is operated. The probe 7 of the three-dimensional white light scanning device can scan out a set of point clouds; the scanned point cloud uses software to distinguish the planar point. Cloud and V-slot point cloud, and use the standard Gaussian mathematical algorithm to fit the point cloud plane F;

Calculate the flatness FD of the point cloud plane F (equivalent to the single point repeatability of the measurement equipment), and the flatness FD is the deviation range of all points on the point cloud plane F; the data of the flatness FD is derived from two deviations, one is The acquisition deviation of the probe 7 on the three-dimensional white light scanning device, and the other is the jitter deviation of the motion mechanism 5 on the three-dimensional white light scanning device during linear motion, which are determined by the performance of the device, that is, the uncertainty of the measurement device. When the flatness FD is not in the normal range, the flatness FD can be adjusted by adjusting the probe 7 on the three-dimensional white light scanning device or adjusting the motion mechanism 5 or both;

Flatness FD is the single point probe error PF;

Calculate the intersection line L1 of the two groove walls on the first V-shaped groove 2, calculate the intersection line L2 of the two groove walls on the second V-shaped groove 3, and measure the distance LE between the intersection line L1 and the intersection line L2 (space Accuracy);

The deviation E is the deviation of the three-dimensional white light scanning device in the longitudinal direction. The source of the deviation E is the deviation of the linear motor on the motion mechanism 5, which is the deviation between the theoretical movement distance and the actual movement distance; when the deviation E is not within the normal range, The deviation E can be made to meet the requirements within a prescribed range by adjusting the linear motor on the moving mechanism 5;

The deviation E can be calculated according to the following formula:

E=|LE-LD|

Wherein, LD is the actual distance between the first V-shaped groove 2 and the second V-shaped groove 3 on the standard member;

A=PF+E*L/LD

Where L is the length of the object to be tested 8, and the object to be tested 8 is the actual product to be measured by the three-dimensional white light scanning device. According to this formula, the measurement accuracy of the product to be measured on the three-dimensional white line scanning device can be calculated.

Embodiment 2: A standard member for a three-dimensional white light scanning device, the standard member is of a long strip type, and the standard member has a structure for facilitating clamping and fixing; the standard member has a standard of flatness of 0.009 mm. Plane 1, the standard plane 1 is further provided with a first V-shaped groove 2 and a second V-shaped groove 3, the first V-shaped groove 2 and the second V-shaped groove 3 are respectively adjacent to both ends of the standard member, the first V-shaped The line of intersection between the two groove walls on the groove 2 and the two groove walls on the second V-shaped groove 3 are perpendicular to the line connecting the two ends of the standard member, and the connection between the two ends of the standard member is The direction is the length direction of the standard part.

The distance between the first V-shaped groove 2 and the second V-shaped groove 3 is 200 mm; the angle between the two groove walls on the first V-shaped groove 2 and the second V-shaped groove 3 The angle between the two groove walls is 130°, so that the two groove walls can be detected by the probe 7 of the three-dimensional white light scanning device; the angle of the angle here mainly depends on the sensor on the probe 7, according to The sensing angle of the sensor changes accordingly and is not limited. The groove depth of the first V-shaped groove 2 and the groove depth of the second V-shaped groove 3 are both 5 mm, and the groove depth here may also depend on the sensor, so that the groove surface data of the V-shaped groove can be better detected. . The first V-shaped groove 2 and the second V-shaped groove 3 are the same; of course, the structure of the first V-shaped groove 2 may be different from the structure of the second V-shaped groove 3, which is not limited;

Calculate the flatness FD of the point cloud plane F. The flatness FD is the deviation range of all points on the point cloud plane F; the data of the flatness FD is derived from two deviations, and the other is the acquisition deviation of the probe 7 on the three-dimensional white light scanning device. The other is the jitter deviation of the motion mechanism 5 on the three-dimensional white light scanning device during linear motion. These two values are determined by the performance of the device, that is, the uncertainty of the measurement device; when the flatness FD is not within the normal range, The flatness FD can be adjusted by adjusting the probe 7 on the three-dimensional white light scanning device or adjusting the motion mechanism 5 or both;

Flatness FD is the single point probe error PF;

Calculating the intersection line L1 of the two groove walls on the first V-shaped groove 2, calculating the intersection line L2 of the two groove walls on the second V-shaped groove 3, and measuring the distance LE between the intersection line L1 and the intersection line L2;

The deviation E can be calculated according to the following formula:

E=|LE-LD|

A=PF+E*L/LD

Embodiment 3: A standard member for a three-dimensional white light scanning device, the standard member is of a long strip type, and the standard member has a structure for facilitating clamping and fixing; the standard member has a standard of 0.005 mm flatness. Plane 1, the standard plane 1 is further provided with a first V-shaped groove 2 and a second V-shaped groove 3, the first V-shaped groove 2 and the second V-shaped groove 3 are respectively adjacent to both ends of the standard member, the first V-shaped The line of intersection between the two groove walls on the groove 2 and the two groove walls on the second V-shaped groove 3 are perpendicular to the line connecting the two ends of the standard member, and the connection between the two ends of the standard member is The direction is the length direction of the standard part.

The distance between the first V-shaped groove 2 and the second V-shaped groove 3 is 200 mm; the angle between the two groove walls on the first V-shaped groove 2 and the second V-shaped groove 3 The angle between the two groove walls is 170°, so that the two groove walls can be detected by the probe 7 of the three-dimensional white light scanning device; the angle of the angle here mainly depends on the sensor on the probe 7, according to The sensing angle of the sensor changes accordingly and is not limited. The groove depth of the first V-shaped groove 2 and the groove depth of the second V-shaped groove 3 are both 1 mm, and the groove depth here may also depend on the sensor, so that the groove surface data of the V-shaped groove can be better detected. . The first V-shaped groove 2 and the second V-shaped groove 3 are the same; of course, the structure of the first V-shaped groove 2 may be different from the structure of the second V-shaped groove 3, which is not limited;

A plurality of third V-shaped grooves 4 are equally distributed on the standard plane 1 between the first V-shaped groove 2 and the second V-shaped groove 3, and the first V-shaped groove 2 and the third adjacent thereto The distance between the V-grooves 4, the distance between the second V-groove 3 and the third V-groove 4 adjacent thereto are equal to the distance between the two V-grooves 4. In order to adapt to the calibration of different sizes of products, two V-shaped grooves can be selected as the space precision according to the actual length of the product; of course, the standard parts can also be lengthened, and the length of the standard parts is not limited here, and the length of the standard parts mainly depends on The length of the product with the actual measurement. The third V-shaped groove 4 is the same as the first V-shaped groove 2; of course, the structure of the third V-shaped groove 4 may be different from the structure of the first V-shaped groove 2 and the second V-shaped groove 3. This is not limited. The distance between the two of the third V-shaped grooves 4 is 10 mm.

Flatness FD is the single point probe error PF;

The deviation E can be calculated according to the following formula:

E=|LE-LD|

A=PF+E*L/LD

The invention can verify the existing precision of the three-dimensional white light scanning device, and can compensate the deviation caused by the motion mechanism 5; the structure is simple, the use is convenient, and the measurement precision is high.

The above is only the embodiment of the present invention, and is not intended to limit the scope of the invention, and the equivalent structure or equivalent process transformation of the present invention and the contents of the drawings may be directly or indirectly applied to other related technologies. The fields are all included in the scope of patent protection of the present invention.

Claims

A standard part for a three-dimensional white light scanning device, characterized in that: the standard part has a standard plane, and the standard plane is further provided with a first V-shaped groove and a second V-shaped groove, the first V-shaped groove and The second V-shaped grooves are respectively adjacent to the two ends of the standard member, and the intersection between the intersection between the two groove walls on the first V-shaped groove and the two groove walls on the second V-shaped groove is the standard part The lengths of the wires at the ends, that is, the standard members, are perpendicular to each other.
A standard component for a three-dimensional white light scanning device according to claim 1, wherein: an angle between two groove walls on the first V-shaped groove and two on the second V-shaped groove The angle between the groove walls is 130° to 180°.
A standard member for a three-dimensional white light scanning device according to claim 1, wherein the standard plane has a flatness of less than or equal to 0.009 mm.
A standard member for a three-dimensional white light scanning device according to claim 1 or 2 or 3, wherein: a standard plane equal portion between the first V-shaped groove and the second V-shaped groove a plurality of third V-shaped grooves are distributed, a distance between the first V-shaped groove and a third V-shaped groove adjacent thereto, and a distance between the second V-shaped groove and a third V-shaped groove adjacent thereto The distance between the two sides of the third V-shaped groove is equal.
A standard member for a three-dimensional white light scanning device according to claim 4, wherein said first V-shaped groove and said second V-shaped groove are identical; said third V-shaped groove is said The first V-shaped grooves are the same; the distance between the two V-shaped grooves is 10 mm.
A standard member for a three-dimensional white light scanning device according to claim 1 or 2 or 3 or 5, wherein the distance between the first V-shaped groove and the second V-shaped groove is 200 mm The groove depth of the first V-shaped groove and the groove depth of the second V-shaped groove are both 1 mm to 5 mm.
A calibration method for a three-dimensional white light scanning device, characterized in that: a standard component for a three-dimensional white light scanning device according to any of the above claims is as follows:

The standard component is mounted on the measuring fixture of the three-dimensional white light scanning device, and the three-dimensional white light scanning device is operated, and the probe of the three-dimensional white light scanning device can scan out a set of point clouds; the scanned point cloud uses software to distinguish the planar point cloud and V-groove point cloud, and use the standard Gaussian mathematical algorithm to fit the point cloud plane F;

Calculate the flatness FD of the point cloud plane F. The flatness FD is the deviation range of all points on the point cloud plane F. The data of the flatness FD is derived from two deviations, one is the acquisition deviation of the probe on the three-dimensional white light scanning device, and the other is One is the jitter of the motion mechanism of the three-dimensional white light scanning device during linear motion. These two values are determined by the performance of the device, that is, the uncertainty of the measuring device; when the flatness FD is not within the normal range, it can be passed. Adjusting the probe on the three-dimensional white light scanning device or adjusting the motion mechanism or both to adjust the flatness FD to meet the requirements;

Flatness FD is the single point probe error PF;

Calculating the intersection line L1 of the two groove walls on the first V-shaped groove, calculating the intersection line L2 of the two groove walls on the second V-shaped groove, and measuring the distance LE between the intersection line L1 and the intersection line L2;

The deviation E is the deviation of the three-dimensional white light scanning device in the longitudinal direction. The source of the deviation E is the deviation of the linear motor on the motion mechanism, which is the deviation between the theoretical movement distance and the actual movement distance; when the deviation E is not within the normal range, By adjusting the linear motor on the moving mechanism, the deviation E meets the requirements within the specified range;

The deviation E can be calculated according to the following formula:

E=|LE-LD|

Wherein, LD is the actual distance between the first V-shaped groove and the second V-shaped groove on the standard member;

According to the single point probe error PF and the deviation E in the length direction, the combination precision A of the three-dimensional white light scanning device can be obtained, and the combination precision A can be calculated as follows:

A=PF+E*L/LD

Where L is the length of the object to be tested, and the object to be tested is the actual product to be measured by the three-dimensional white light scanning device.