CN111778484B - Reducing magnetic filtering plasma leading-out device and vacuum ion beam coating equipment - Google Patents
Reducing magnetic filtering plasma leading-out device and vacuum ion beam coating equipment Download PDFInfo
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- CN111778484B CN111778484B CN202010513293.9A CN202010513293A CN111778484B CN 111778484 B CN111778484 B CN 111778484B CN 202010513293 A CN202010513293 A CN 202010513293A CN 111778484 B CN111778484 B CN 111778484B
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- pipe body
- variable diameter
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- extraction device
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
Abstract
The embodiment of the application provides a reducing magnetic filtration plasma leading-out device and vacuum ion beam coating equipment. This reducing magnetic filtration plasma draws device includes: the size of the cross section of the pipe body between the first end and the second end is changed according to a preset rule; and the conductive wire is wound along the outer side wall of the tube body one by one to form a conductive solenoid on the outer wall of the tube body, wherein the conductive solenoid corresponds to the contour of the outer wall of the tube body. The magnetic field that provides of this application embodiment through the change setting of this body and conductor wire can solve current filtration cathode filter pipeline and magnetic circuit design difficulty, and large granule impurity filter effect is poor, and the unchangeable scheduling problem of deposit end ion beam facula can improve plasma's utilization efficiency simultaneously, can improve the quality and the homogeneity of the rete that the deposit formed.
Description
Technical Field
The application relates to the technical field of physical vapor deposition, in particular to a reducing magnetic filtration plasma leading-out device and vacuum ion beam coating equipment.
Background
The vacuum ion beam coating technology is widely applied to various industries, electromechanical, optical, aerospace and other fields. Among them, the ion beam material surface modification technology is one of the advanced material surface treatment technologies currently used as a common technology of Physical Vapor Deposition (PVD). The cathode vacuum arc source has the advantages of large beam current, high ionization rate, capability of extracting various ions and the like, and is widely applied to the field of material surface modification, wherein ion beam deposition and ion implantation are two main applications. The method has the characteristics of low process temperature, high sputtering speed, simple equipment, easy control, large coating area, strong adhesive force and the like, is very suitable for long-time batch production, and can be applied to high-end industries such as DLC (diamond-like carbon) or semiconductor film preparation and the like.
Plasma deposition has and is playing a significant and profound role in the study and application of material surface modification. The electric arc ion plating is that under the condition of high vacuum, a cathode vacuum arc source generates plasma by utilizing arc discharge between an anode and a cathode, and then the plasma is used for depositing and plating films. The conventional arc ion plating generates a plurality of target particles while generating plasma due to violent discharge, thereby greatly influencing the quality of a film layer. The document, Review of filtered vacuum arc process and materials disposition, P.J. Martin, A.Bendavid. Thin Solid Films 394(2001)1-15 reports the filtration method of cathode vacuum arc large particles, including straight tube filtration method, mechanical shielding method, bent tube magnetic filtration method, electrostatic deflection method, etc. Compared with other filtering methods, the bent pipe magnetic filtering method is a simple and effective filtering method, and can effectively filter out large particles in plasma so as to prepare a high-quality, compact and smooth coating. Aiming at a cathode vacuum arc source of a circular cathode target material, a circular-section bent pipe magnetic filtering device is usually adopted, so that large particles can be well filtered to prepare a high-performance coating. The cathode vacuum arc magnetic filter device of the circular cathode target material adopts a filter pipeline with a circular section, so that the extracted beam spot of the plasma is circular. For surface treatment which requires high filtration and ensures the deposition sectional area, a plurality of arc sources and a plurality of sets of circular-section bent pipe magnetic filtration devices are adopted to work simultaneously to solve the defect of the coating treatment capacity of a single beam spot. However, the adoption of the proposal not only has complex equipment and high cost, but also has uneven quality and thickness of the coating layer on the surface of the workpiece. A cathode vacuum arc source of a circular cathode target adopts a bent magnetic filtering pipeline with a circular section, so that an extracted beam spot of plasma is circular, but the defect of poor filtering effect of large-particle impurities exists.
In view of the above problems, no effective technical solution exists at present.
Disclosure of Invention
An object of the embodiment of the application is to provide a reducing magnetic filtration plasma extraction device and vacuum ion beam coating equipment, can solve current filtration cathode filter pipeline and magnetic circuit design difficulty, large granule impurity filter effect is poor, and deposit end ion beam facula is unchangeable scheduling problem, can improve plasma's utilization efficiency simultaneously, can improve the quality and the homogeneity of the rete of deposit formation.
In a first aspect, an embodiment of the present application provides a variable diameter magnetic filtration plasma extraction device, including:
the size of the cross section of the pipe body between the first end and the second end is changed according to a preset rule;
and the conductive wire is wound along the outer side wall of the tube body one by one to form a conductive solenoid on the outer wall of the tube body, wherein the conductive solenoid corresponds to the contour of the outer wall of the tube body.
Optionally, in the variable diameter magnetic filtration plasma lead-out device according to the embodiment of the present application, at least one sequentially connected flared tube section is formed between the first end and the second end of the tube body;
the cross-sectional dimension of each of the flared sections is reduced and then increased such that the cross-sectional dimension of the end portions of the flared sections is greater than the cross-sectional dimension of the portion between the end portions.
Optionally, in the variable diameter magnetic filtration plasma extraction device according to the embodiment of the present application, two connected flared tubes are formed between the first end and the second end of the tube.
Optionally, in the diameter-variable magnetic filtration plasma extraction device according to the embodiment of the present application, a cross section of the pipe body is circular, elliptical, rectangular, regular hexagonal, or square.
Optionally, in the variable diameter magnetic filtration plasma leading-out device according to the embodiment of the present application, variable diameter connection flanges are disposed at both ends of the pipe body.
Optionally, in the variable diameter magnetic filtration plasma extraction device according to an embodiment of the present application, the pipe body includes an inner pipe and an outer pipe that are coaxially disposed, the inner pipe and the outer pipe are both connected to the variable diameter connection flange, and a cooling interlayer channel for flowing a cooling liquid is formed between the inner pipe and the outer pipe.
Optionally, in the variable diameter magnetic filtration plasma extraction device according to the embodiment of the present application, a cooling pipe is wound in the cooling interlayer channel, and the cooling liquid circulates in the cooling pipe.
Optionally, in the variable diameter magnetic filtration plasma extraction device according to this embodiment of the present application, the inner tube and the outer tube have the same shape.
Optionally, in the variable diameter magnetic filtration plasma extraction device according to the embodiment of the present application, the pipe body is a nonmagnetic metal material pipe.
In a second aspect, an embodiment of the present application further provides a vacuum ion beam coating apparatus, which is characterized by including any one of the variable diameter magnetic filtering plasma leading-out devices described above.
This application embodiment changes the setting and adopts the magnetic field that provides of conductor wire through the cross-sectional area to this body, can solve current filtration cathode filter pipeline and magnetic circuit design difficulty, and large granule impurity filter effect is poor, and deposition end ion beam facula is unchangeable scheduling problem, can improve plasma's utilization efficiency simultaneously, can improve the quality and the homogeneity of the rete of deposit formation.
Additional features and advantages of the present application will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by the practice of the embodiments of the present application. The objectives and other advantages of the application may be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are required to be used in the embodiments of the present application will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and that those skilled in the art can also obtain other related drawings based on the drawings without inventive efforts.
Fig. 1 is a schematic structural diagram of a variable diameter magnetic filtering plasma extraction device according to an embodiment of the present disclosure.
Fig. 2 is another schematic structural diagram of a variable diameter magnetic filtration plasma extraction device provided in an embodiment of the present application.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only some embodiments of the present application, and not all embodiments. The components of the embodiments of the present application, as generally described and illustrated in the figures herein, could be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present application, presented in the accompanying drawings, is not intended to limit the scope of the claimed application, but is merely representative of selected embodiments of the application. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present application without making any creative effort, shall fall within the protection scope of the present application.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures. Meanwhile, in the description of the present application, the terms "first", "second", and the like are used only for distinguishing the description, and are not to be construed as indicating or implying relative importance.
Referring to fig. 1, fig. 1 is a schematic structural diagram of a variable diameter magnetic filtering plasma extracting apparatus according to some embodiments of the present disclosure, where the variable diameter magnetic filtering plasma extracting apparatus includes: a pipe body 10, a conducting wire 20 and two reducing connecting flanges 30.
The tube 10 comprises a first end 11 and a second end 12, and the size of the cross section of the tube 10 at the first end 11 and the second end 12 changes according to a preset rule; for example, the size is sequentially increased, decreased, and increased, but the present invention is not limited thereto. The conductive wire 20 is wound along the outer wall of the tube 10 one by one to form a conductive solenoid on the outer wall of the tube 10 corresponding to the contour of the outer wall of the tube 10. The two variable diameter connecting flanges 30 are respectively disposed at the first end 11 and the second end 12 of the pipe body 10.
Wherein, should predetermine the law and indicate the size of the cross section of this body constantly diminishes and the grow, and wherein, the number of times that diminishes and grow is unrestricted, can be in proper order grow, diminish, grow. Or become smaller and larger in sequence.
This application embodiment changes the setting and adopts the magnetic field that provides of conductor wire through the cross-sectional area to this body, can solve current filtration cathode filter pipeline and magnetic circuit design difficulty, and large granule impurity filter effect is poor, and the unchangeable scheduling problem of deposit end ion beam facula can improve plasma's utilization efficiency simultaneously, can improve the quality and the homogeneity of the rete that the deposit formed.
The sizes of the first end 11 and the second end 12 of the tube 10 and the length of the tube 10 can be adjusted according to actual requirements. Because the direction of the magnetic lines of force is perpendicular to the direction of the current, in order to make the plasma uniformly disperse in a fan shape along the magnetic lines of force, the magnetic field coil outside the tube body 10 is wound in an arc shape, so that the magnetic lines of force are uniformly dispersed in a fan shape. The size of the exciting current of the conductive solenoid can be adjusted according to actual needs.
Wherein the cross-sectional dimension of the first end 11 is equal to the cross-sectional dimension of the second end 12.
Of course, it will be appreciated that the first end 11 has a cross-sectional dimension that is less than the cross-sectional dimension of the second end 12, as shown in FIG. 2.
Specifically, at least one sequentially connected flared tube section is formed between the first end 11 and the second end 12 of the tube body 10; if the number of the flared tube sections is multiple, the flared tube sections are sequentially connected through the end parts, and of course, the flared tube sections are of an integrated structure. The tubular body 10 is shown in fig. 1 as a flared tubular section. The cross section size of each flared pipe section is reduced and then enlarged, so that the cross section size of the end part of each flared pipe section is larger than that of the part between the end parts. Of course, it is understood that in some embodiments, two connected flared tube sections are formed between the first end 11 and the second end 12 of the tube body 10, and 3 flared tube sections may be formed, and the ends of the 3 flared tube sections are connected in sequence. It is not limited thereto.
The cross section of the tube 10 may be circular, oval, rectangular, square, or regular hexagon, but is not limited thereto, and may also be other irregular shapes. The pipe 10 is a nonmagnetic metal material pipe, such as an aluminum pipe or a stainless steel pipe.
In some embodiments, the pipe 10 may include an inner pipe and an outer pipe coaxially disposed, wherein the conductive wire 20 is wound on an outer wall surface of the outer pipe. The ends of the inner and outer tubes are connected to the variable diameter connecting flanges 30 at the two ends, respectively. The inner pipe body and the outer pipe body are the same in shape and are arranged at intervals, so that a cooling clamping channel for cooling liquid to flow through is formed between the inner pipe body and the outer pipe body.
Of course, it will be understood that in some embodiments, the cooling sandwich channel is also spirally wound with a cooling pipe, such as a cooling pipe through which the cooling liquid flows, so as to achieve sufficient cooling of the plasma beam inside the inner tube of the tube body 10.
Wherein, the first end 11 of the tube 10 is connected with the magnetic filtering elbow or the arc source through the reducing connecting flange 30 in a sealing way, and the second end 12 of the tube 10 is connected with the vacuum chamber through the reducing connecting flange 30 in a sealing way. The plasma enters from the first end 11, is constrained and guided by the magnetic field generated by the conductive wire, is uniformly dispersed in a fan shape along the magnetic lines, and then enters the vacuum chamber from the second end 12 of the tube body 10. The exciting current of the conducting wire 20 can be adjusted according to actual needs.
The diameter of the reducing connecting flange 30 arranged on the first end 11 of the pipe body 10 is 260mm or 350mm, and the thickness is 18 mm. The diameter of the reducing connecting flange 30 arranged on the second end 12 is 350mm, and the thickness is 18 mm. The effective length (i.e. the height of the variable diameter) of the pipe body is 380 mm. The reducing pipeline and the connecting flange are made of stainless steel and are connected by welding. The outer wall of the inner pipe body of the pipe body is spot-welded with a cooling pipe with a thin copper sheet, so that heat is quickly conducted to the reducing connecting flanges 30 at two ends, and a loop through which cooling water passes is designed on the reducing connecting flanges 30 for cooling.
The embodiment of the application also provides vacuum ion beam coating equipment which comprises the reducing magnetic filtration plasma leading-out device.
The above description is only an example of the present application and is not intended to limit the scope of the present application, and various modifications and changes may be made to the present application by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.
Claims (9)
1. A reducing magnetic filtration plasma leading-out device is characterized by comprising:
the cooling device comprises a pipe body, a cooling device and a cooling device, wherein the pipe body comprises a first end and a second end, the size of the cross section of the pipe body between the first end and the second end is changed according to a preset rule, the preset rule is that the size of the cross section of the pipe body is changed continuously, the pipe body further comprises an inner pipe body and an outer pipe body which are coaxially arranged, the shapes of the inner pipe body and the outer pipe body are the same, and a cooling interlayer channel for cooling liquid to flow is formed between the inner pipe body and the outer pipe body;
and the conductive wire is wound along the outer side wall of the tube body one by one to form a conductive solenoid on the outer wall of the tube body, wherein the conductive solenoid corresponds to the contour of the outer wall of the tube body.
2. The variable diameter magnetic filtration plasma extraction device according to claim 1, wherein at least one flared section is formed between the first end and the second end of the tube body, the flared section being connected in series;
the cross-sectional dimension of each flared section is reduced and then increased, so that the cross-sectional dimension of the end portions of the flared sections is larger than the cross-sectional dimension of the portion between the end portions.
3. The variable diameter magnetic filtration plasma extraction device of claim 2, wherein two connected flare sections are formed between the first end and the second end of the tube.
4. The variable diameter magnetic filtration plasma extraction device of any one of claims 1 to 3, wherein the cross-section of the tube is circular, elliptical, rectangular, regular hexagonal or square.
5. The variable diameter magnetic filtration plasma extraction device according to any one of claims 1 to 3, wherein variable diameter connection flanges are provided at both ends of the pipe body.
6. The variable diameter magnetic filtration plasma extraction device of claim 5, wherein the inner and outer tubes are each connected to the variable diameter connection flange.
7. The variable diameter magnetic filtration plasma extraction device according to claim 6, wherein a cooling pipe is wound in the cooling interlayer channel, and the cooling liquid circulates in the cooling pipe.
8. The variable diameter magnetic filtration plasma extraction device of claim 1, wherein the pipe body is a nonmagnetic metal material pipe.
9. A vacuum ion beam coating apparatus comprising the variable diameter magnetic filtration plasma extraction device according to any one of claims 1 to 8.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010513293.9A CN111778484B (en) | 2020-06-08 | 2020-06-08 | Reducing magnetic filtering plasma leading-out device and vacuum ion beam coating equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010513293.9A CN111778484B (en) | 2020-06-08 | 2020-06-08 | Reducing magnetic filtering plasma leading-out device and vacuum ion beam coating equipment |
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| Publication Number | Publication Date |
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| CN111778484A CN111778484A (en) | 2020-10-16 |
| CN111778484B true CN111778484B (en) | 2022-07-15 |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5330628A (en) * | 1990-01-29 | 1994-07-19 | Varian Associates, Inc. | Collimated deposition apparatus and method |
| CN106676482A (en) * | 2017-01-22 | 2017-05-17 | 魏永强 | Lining step tube and porous baffle composite type multi-level magnetic field arc ion plating method |
| CN106756823A (en) * | 2017-01-22 | 2017-05-31 | 魏永强 | Liner positive bias conical pipe and the compound multi-stage magnetic field arc ions electroplating method of straight tube |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100651905B1 (en) * | 2005-03-29 | 2006-12-01 | 엘지전자 주식회사 | magnetron |
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2020
- 2020-06-08 CN CN202010513293.9A patent/CN111778484B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5330628A (en) * | 1990-01-29 | 1994-07-19 | Varian Associates, Inc. | Collimated deposition apparatus and method |
| CN106676482A (en) * | 2017-01-22 | 2017-05-17 | 魏永强 | Lining step tube and porous baffle composite type multi-level magnetic field arc ion plating method |
| CN106756823A (en) * | 2017-01-22 | 2017-05-31 | 魏永强 | Liner positive bias conical pipe and the compound multi-stage magnetic field arc ions electroplating method of straight tube |
Non-Patent Citations (1)
| Title |
|---|
| "A flexible curvilinear electromagnetic filter for direct current cathodic arc source";Hua Dai, et al.;《REVIEW OF SCIENTIFIC INSTRUMENTS》;20070921;第1-6页 * |
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| CN111778484A (en) | 2020-10-16 |
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