CN111777244A - Ultrapure water preparation system and preparation process thereof - Google Patents
Ultrapure water preparation system and preparation process thereof Download PDFInfo
- Publication number
- CN111777244A CN111777244A CN202010781658.6A CN202010781658A CN111777244A CN 111777244 A CN111777244 A CN 111777244A CN 202010781658 A CN202010781658 A CN 202010781658A CN 111777244 A CN111777244 A CN 111777244A
- Authority
- CN
- China
- Prior art keywords
- water
- reverse osmosis
- filter
- water tank
- ultrapure water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910021642 ultra pure water Inorganic materials 0.000 title claims abstract description 32
- 239000012498 ultrapure water Substances 0.000 title claims abstract description 32
- 238000002360 preparation method Methods 0.000 title claims abstract description 16
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 102
- 238000001223 reverse osmosis Methods 0.000 claims abstract description 45
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 21
- 239000008399 tap water Substances 0.000 claims abstract description 13
- 235000020679 tap water Nutrition 0.000 claims abstract description 13
- 238000000108 ultra-filtration Methods 0.000 claims abstract description 13
- 238000010612 desalination reaction Methods 0.000 claims abstract description 12
- 238000000909 electrodialysis Methods 0.000 claims abstract description 10
- 238000005498 polishing Methods 0.000 claims abstract description 10
- 238000001914 filtration Methods 0.000 claims abstract description 8
- 230000015556 catabolic process Effects 0.000 claims abstract description 3
- 238000006731 degradation reaction Methods 0.000 claims abstract description 3
- 239000002245 particle Substances 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 10
- 239000002455 scale inhibitor Substances 0.000 claims description 10
- 230000007704 transition Effects 0.000 claims description 10
- 238000011144 upstream manufacturing Methods 0.000 claims description 10
- 238000012545 processing Methods 0.000 claims description 6
- 239000008213 purified water Substances 0.000 claims description 6
- 241000876443 Varanus salvator Species 0.000 claims description 5
- 230000000593 degrading effect Effects 0.000 claims description 3
- 238000002242 deionisation method Methods 0.000 claims description 3
- 238000011033 desalting Methods 0.000 claims description 3
- 229910021645 metal ion Inorganic materials 0.000 claims description 3
- 238000001471 micro-filtration Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000001064 degrader Substances 0.000 description 4
- 150000003839 salts Chemical class 0.000 description 4
- 239000012535 impurity Substances 0.000 description 3
- 241001089723 Metaphycus omega Species 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000001954 sterilising effect Effects 0.000 description 2
- 238000004659 sterilization and disinfection Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 241000894006 Bacteria Species 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 241000700605 Viruses Species 0.000 description 1
- 239000003011 anion exchange membrane Substances 0.000 description 1
- 230000001580 bacterial effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000003010 cation ion exchange membrane Substances 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 239000004927 clay Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000000084 colloidal system Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000009296 electrodeionization Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000013327 media filtration Methods 0.000 description 1
- 244000005700 microbiome Species 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012806 monitoring device Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- -1 silt Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F9/00—Multistage treatment of water, waste water or sewage
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/001—Processes for the treatment of water whereby the filtration technique is of importance
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/30—Treatment of water, waste water, or sewage by irradiation
- C02F1/32—Treatment of water, waste water, or sewage by irradiation with ultraviolet light
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
- C02F1/441—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis by reverse osmosis
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
- C02F1/444—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis by ultrafiltration or microfiltration
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/46—Treatment of water, waste water, or sewage by electrochemical methods
- C02F1/469—Treatment of water, waste water, or sewage by electrochemical methods by electrochemical separation, e.g. by electro-osmosis, electrodialysis, electrophoresis
- C02F1/4693—Treatment of water, waste water, or sewage by electrochemical methods by electrochemical separation, e.g. by electro-osmosis, electrodialysis, electrophoresis electrodialysis
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/66—Treatment of water, waste water, or sewage by neutralisation; pH adjustment
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
- C02F2001/427—Treatment of water, waste water, or sewage by ion-exchange using mixed beds
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
- C02F2103/02—Non-contaminated water, e.g. for industrial water supply
- C02F2103/04—Non-contaminated water, e.g. for industrial water supply for obtaining ultra-pure water
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2301/00—General aspects of water treatment
- C02F2301/08—Multistage treatments, e.g. repetition of the same process step under different conditions
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F5/00—Softening water; Preventing scale; Adding scale preventatives or scale removers to water, e.g. adding sequestering agents
- C02F5/08—Treatment of water with complexing chemicals or other solubilising agents for softening, scale prevention or scale removal, e.g. adding sequestering agents
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A20/00—Water conservation; Efficient water supply; Efficient water use
- Y02A20/124—Water desalination
- Y02A20/131—Reverse-osmosis
Abstract
The invention discloses an ultrapure water preparation system and a preparation process thereof, which comprises a pretreatment system, a desalination system and a fine treatment system which are sequentially connected, wherein the pretreatment system comprises a tap water tank, a multi-media filter tower, an activated carbon filter and a primary fine filter which are sequentially connected through pipelines, and the desalination system comprises a reverse osmosis device, a reverse osmosis water tank, an ultraviolet sterilizer, an electrodialysis device, a polishing mixed bed and a secondary fine filter which are sequentially connected through pipelines; the fine treatment system comprises an ultrafiltration water tank, a heat exchanger, a TOC degradation device and an ultrafilter which are sequentially connected through pipelines. The invention carries out multistage filtration, gradually improves the filtration precision, greatly improves the quality of ultrapure water and ensures that the ultrapure water finally prepared reaches the PPt level.
Description
Technical Field
The invention relates to the technical field of water treatment, in particular to an ultrapure water preparation system and a preparation process thereof.
Background
Ultrapure water, which is water having a resistivity of more than 18 M.OMEGA.cm or close to a limit value of 18.3 M.OMEGA.cm (25 ℃), is obtained by almost completely removing the conductive medium in water and removing colloidal substances, gases and organic substances which are not dissociated in water to a low degree. It is commonly used in the integrated circuit industry for cleaning semiconductor raw materials and utensils used, preparing photolithographic masks, and water vapor sources for silicon wafer oxidation, and in addition, ultrapure water is also used for manufacturing other solid-state electronic devices, thick and thin film circuits, printed circuits, vacuum tubes, and the like. Raw water in a raw water tank of the ultrapure water pretreatment system sequentially passes through a mechanical filter, an activated carbon filter and a softened water filter through a raw water pump, so that impurities (such as silt, clay, organic matters, microorganisms, mechanical impurities and the like) in the water are filtered; the water after being treated by the pretreatment system is desalted to obtain pure water, and colloid, particles, bacteria, viruses, heat sources and macromolecular organic matters in the water are filtered out mainly through an ultrafiltration host.
Most of process equipment adopted in the prior art adopts a softening and reverse osmosis process, so that only a part of salt and other impurities in water can be removed, but high-quality ultrapure water reaching national standards is far from being obtained.
Disclosure of Invention
Invention container
In view of the problems in the prior art, the invention discloses an ultrapure water preparation system which comprises a pretreatment system, a desalination system and a fine treatment system which are sequentially connected, wherein the pretreatment system comprises a tap water tank, a multi-medium filter tower, an activated carbon filter and a primary precision filter which are sequentially connected through pipelines, and the desalination system comprises a reverse osmosis device, a reverse osmosis water tank, an ultraviolet sterilizer, an electrodialysis device, a polishing mixed bed and a secondary precision filter which are sequentially connected through pipelines; the fine treatment system comprises an ultrafiltration water tank, a heat exchanger, a TOC degradation device and an ultrafilter which are sequentially connected through pipelines.
Preferably, a first water quality monitor and a first return pipeline are arranged at the downstream of the primary precision filter, and the water outlet end of the first return pipeline is connected with the multi-medium filter tower through a transition water tank.
Preferably, a second water monitor and a second return pipeline are arranged at the downstream of the second-stage precision filter, and the water outlet end of the second return pipeline is connected with the upstream of the reverse osmosis device through a transition water tank.
Preferably, a third water quality monitor and a third return pipeline are arranged at the downstream of the ultrafilter, and the water outlet end of the third return pipeline is connected with the ultrafiltration water tank through a transition water tank.
Preferably, the reverse osmosis device comprises a first reverse osmosis device and a second reverse osmosis device, and a pH adjusting device is arranged between the first reverse osmosis device and the second reverse osmosis device.
Preferably, the tap water tank is connected with the multi-medium filter tower through a booster pump, and a high-pressure pump is respectively arranged at the upstream of the first reverse osmosis device and the upstream of the second reverse osmosis device.
A preparation process of ultrapure water comprises the following steps:
(1) pretreatment: running water enters a multi-media filter tower and an activated carbon filter to remove larger particles in the water, and suspended particles larger than 5 microns are removed through a primary precision filter to obtain filtered water;
(2) desalting: removing particles with a diameter of more than 1 micron from the filtered water by two reverse osmosis devices, passing through an ultraviolet sterilizer, feeding into an electrodialysis device for electrolyzing metal ions and passing through a polishing mixed bed for deionization, and performing 0.5 micron precision filtration by a secondary precision filter to obtain purified water;
(3) fine processing: and (3) putting the desalted purified water into a heat exchanger to regulate the water temperature, degrading organic matters, and finally performing ultrafiltration through an ultrafilter to obtain ultrapure water. Preferably, in the step (1), after the water is subjected to ultraviolet sterilization, the scale inhibitor is added and mixed with the scale inhibitor.
Preferably, in the step (1), after the water is filtered by a first-stage precision filter, the scale inhibitor is added and mixed with the scale inhibitor.
Preferably, in the step (2), alkali is added between the two reverse osmosis devices to adjust the pH value of the water to 8.3.
Preferably, in step (3), 0.1 micron microfiltration is performed by an ultrafilter.
The invention has the beneficial effects that:
1. the invention adopts the pretreatment system, the desalination system and the fine treatment system to prepare pure water, and carries out multi-stage filtration, thereby gradually improving the filtration precision and greatly improving the quality of ultrapure water, and leading the ultrapure water finally obtained by preparation to reach ppt level.
2. The invention arranges a monitoring device in the follow-up of each step of treatment, can detect whether the quality of water reaches the standard at any time for returning to the upstream for treatment again, ensures that the water reaching the follow-up is the water meeting the processing requirement, and improves the treatment precision of each step.
3. The invention combines the pretreatment processes of reverse osmosis technology and continuous electrodeionization technology to effectively remove boron and silicon elements to obtain high-resistivity pure water, and the low-ion concentration water can reduce the burden of removing ion resin in the subsequent purification process.
Drawings
FIG. 1 is a schematic view of the structure of the present invention
In the figure: 1-a pretreatment system; 2-a desalination system; 3-a fine processing system; 4-a transition water tank; 5, a booster pump; 6-a high-pressure pump; 11-a tap water tank; 12-a multi-media filtration column; 13-an activated carbon filter; 14-first-stage precision filter; 15-a first water quality monitor; 16-a first return line; 20-a pH adjusting device; 21-a first reverse osmosis unit; 22-a second reverse osmosis unit; 23-a reverse osmosis water tank; 24-ultraviolet sterilizer; 25-an electrodialysis device; 26-polishing the mixed bed; 27-a two-stage precision filter; 28-a second water monitor; 29-a second return line; 31-an ultrafiltration water tank; 32-a heat exchanger; 33-TOC degrader; 34-an ultrafilter; 35-a third water quality monitor; 36-third return line.
Detailed Description
For further understanding of the present invention, the present invention will be described in detail with reference to examples, which are provided for illustration of the present invention but are not intended to limit the scope of the present invention.
Example 1
As shown in fig. 1, the embodiment discloses an ultrapure water preparation system, which comprises an ultrapure water preparation system comprising a pretreatment system 1, a desalination system 2 and a fine treatment system 3 which are connected in sequence, wherein the pretreatment system 1 comprises a tap water tank 11, a multi-media filter tower 12, an activated carbon filter 13 and a primary precision filter 14 which are connected in sequence through pipelines, and the desalination system 2 comprises a first reverse osmosis device 21, a second reverse osmosis device 22, a reverse osmosis water tank 23, an ultraviolet sterilizer 24, an electrodialysis device 25, a polishing mixed bed 26 and a secondary precision filter 27 which are connected in sequence through pipelines; the fine processing system 3 comprises an ultrafiltration water tank 31, a heat exchanger 32, a TOC degrader 33 and an ultrafilter 34 which are connected in sequence through pipelines.
A first water quality monitor 15 and a first return pipeline 16 are arranged at the downstream of the first-stage precision filter 14, and the water outlet end of the first return pipeline 16 is connected with the multi-media filter tower 12 through the transition water tank 4. And a second water monitor 28 and a second return pipeline 29 are arranged at the downstream of the second-stage precision filter 27, and the water outlet end of the second return pipeline 29 is connected with the upstream of the first reverse osmosis device 21 through the transition water tank 4. A third water quality monitor 35 and a third return pipeline 36 are arranged at the downstream of the ultrafilter 34, and the water outlet ends of the third return pipelines and 36 are connected with the ultrafiltration water tank 31 through the transition water tank 4. A pH adjusting device 20 is arranged between the first reverse osmosis device 21 and the second reverse osmosis device 22. The tap water tank 11 and the multi-medium filter tower 12 are connected through a booster pump 5, and a high-pressure pump 6 is respectively arranged at the upstream of the first reverse osmosis device 21 and the upstream of the second reverse osmosis device 22.
The working principle of the ultrapure water preparation system is as follows:
the method comprises the following steps: tap water in the tap water tank 1 is pretreated by sequentially passing through a multi-media filter tower 12, an activated carbon filter 13 and a primary precision filter 14 to remove particles with the size of 1-20 microns, organic matters and free chlorine in the tap water, a first water quality monitor 15 is used for detecting the quality of the pretreated water, and the detected water quality which does not meet the set standard after pretreatment can be returned to the multi-media filter tower 12 through a first return pipeline 16 for secondary filtration.
Step two: the pretreated water sequentially passes through a first reverse osmosis device 21, a second reverse osmosis device 22, a reverse osmosis water tank 23, an ultraviolet sterilizer 24, an electrodialysis device 25, a polishing mixed bed 26 and a secondary precision filter 27 along a pipeline for desalination treatment, 99% of bacterial particles and organic matters dissolved in the water can be removed, the principle of electrodialysis is that ions are selectively permeated by cation and anion exchange membranes under the action of an external direct current electric field, the desalination rate can reach more than 95%, the desalinated water passes through a second water monitor 28 for monitoring the water quality, enters the next step after reaching a set value, and otherwise returns to the first reverse osmosis device 21 through a second return pipeline 29.
Step three: the desalted water is sequentially subjected to fine treatment through an ultrafiltration water tank 31, a heat exchanger 32, a TOC degrader 33 and an ultrafilter 34 along a pipeline, the ultrafilter 36 can remove particles with the diameter larger than 0.1 micrometer, the particles with the diameter of 0.1 micrometer are smaller than 5 particles in each milliliter, the TOC degrader 34 decomposes organic carbon by ultraviolet rays with the wavelength of 185nm, finally ultra-pure water reaching the ppt level is obtained, the conductivity of the prepared ultra-pure water is smaller than 0.1 mu s/cm, and the residual salt content is smaller than 0.3 mg/L.
Example 2
The embodiment designs an ultrapure water preparation process, which comprises the following steps:
(1) pretreatment: running water enters a multi-media filter tower and an activated carbon filter to remove larger particles in the water, and suspended particles larger than 5 microns are removed through a primary precision filter to obtain filtered water;
(2) desalting: removing particles with a diameter of more than 1 micron from the filtered water by two reverse osmosis devices, passing through an ultraviolet sterilizer, feeding into an electrodialysis device for electrolyzing metal ions and passing through a polishing mixed bed for deionization, and performing 0.5 micron precision filtration by a secondary precision filter to obtain purified water;
(3) fine processing: and (3) putting the desalted purified water into a heat exchanger to regulate the water temperature, degrading organic matters, and finally performing ultrafiltration through an ultrafilter to obtain ultrapure water. Preferably, in the step (1), after the water is subjected to ultraviolet sterilization, the scale inhibitor is added and mixed with the scale inhibitor.
In the step (1), after water is filtered by a primary precision filter, adding a scale inhibitor and mixing the scale inhibitor and the water; in the step (2), adding alkali between the two reverse osmosis devices to adjust the pH value of water to 8.3; in the step (3), 0.1 μm microfiltration was performed through an ultrafilter.
The raw water source is Shanghai industrial tap water, the conductivity is 620 mu s/cm, the conductivity of the ultrapure water prepared by the process is 0.08 mu s/cm, and the residual salt content is 0.26 mg/L.
The raw water source is Guangzhou industrial tap water, the conductivity is 210 mu s/cm, the conductivity of the ultrapure water prepared by the process is 0.08 mu s/cm, and the residual salt content is 0.26 mg/L.
Although the present invention has been described in detail with reference to the specific embodiments, the present invention is not limited to the above embodiments, and various changes and modifications without inventive changes may be made within the knowledge of those skilled in the art without departing from the spirit of the present invention.
Claims (10)
1. An ultrapure water preparation system is characterized by comprising a pretreatment system, a desalination system and a fine treatment system which are sequentially connected, wherein the pretreatment system comprises a tap water tank, a multi-medium filter tower, an activated carbon filter and a primary fine filter which are sequentially connected through pipelines, and the desalination system comprises a reverse osmosis device, a reverse osmosis water tank, an ultraviolet sterilizer, an electrodialysis device, a polishing mixed bed and a secondary fine filter which are sequentially connected through pipelines; the fine treatment system comprises an ultrafiltration water tank, a heat exchanger, a TOC degradation device and an ultrafilter which are sequentially connected through pipelines.
2. The system for preparing ultrapure water as recited in claim 1 wherein a first water quality monitor and a first return line are provided downstream of the primary ultrafilter, and the water outlet end of the first return line is connected to the multi-media filter tower via a transition water tank.
3. The system as recited in claim 1, wherein a second water monitor and a second return line are provided downstream of said secondary polishing filter, and a water outlet of said second return line is connected upstream of said reverse osmosis unit via a transition water tank.
4. The system as claimed in claim 1, wherein a third water quality monitor and a third return line are provided downstream of the ultrafilter, and the water outlet end of the third return line is connected to the ultrafiltration water tank via a transition water tank.
5. The system as recited in claim 1, wherein the reverse osmosis unit comprises a first reverse osmosis unit and a second reverse osmosis unit, and a pH adjusting unit is disposed between the first reverse osmosis unit and the second reverse osmosis unit.
6. The system as recited in claim 5, wherein a booster pump is provided between said tap water tank and said multi-media filter tower, and a high pressure pump is provided upstream of said first reverse osmosis unit and upstream of said second reverse osmosis unit, respectively.
7. A process for producing ultrapure water using the ultrapure water production system of claims 1 to 6, which comprises the steps of:
(1) pretreatment: running water enters a multi-media filter tower and an activated carbon filter to remove larger particles in the water, and suspended particles larger than 5 microns are removed through a primary precision filter to obtain filtered water;
(2) desalting: removing particles with a diameter of more than 1 micron from the filtered water by two reverse osmosis devices, passing through an ultraviolet sterilizer, feeding into an electrodialysis device for electrolyzing metal ions and passing through a polishing mixed bed for deionization, and performing 0.5 micron precision filtration by a secondary precision filter to obtain purified water;
(3) fine processing: and (3) putting the desalted purified water into a heat exchanger to regulate the water temperature, degrading organic matters, and finally performing ultrafiltration through an ultrafilter to obtain ultrapure water.
8. The process for producing ultrapure water according to claim 7, wherein in the step (1), the scale inhibitor is added and mixed with the scale inhibitor after the water is filtered through the primary ultrafilter.
9. The process for producing ultrapure water according to claim 7 wherein in step (2) a base is added between the two reverse osmosis units to adjust the pH of the water to 8.3.
10. The process for producing ultrapure water according to claim 7, wherein in the step (3), the 0.1 μm microfiltration is carried out by an ultrafilter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010781658.6A CN111777244A (en) | 2020-08-06 | 2020-08-06 | Ultrapure water preparation system and preparation process thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010781658.6A CN111777244A (en) | 2020-08-06 | 2020-08-06 | Ultrapure water preparation system and preparation process thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111777244A true CN111777244A (en) | 2020-10-16 |
Family
ID=72766905
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010781658.6A Pending CN111777244A (en) | 2020-08-06 | 2020-08-06 | Ultrapure water preparation system and preparation process thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111777244A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114804467A (en) * | 2022-04-26 | 2022-07-29 | 成都优越科技有限公司 | Two-stage reverse osmosis double-pump double-membrane ultrapure water device and ultrapure water preparation process |
| US20230295027A1 (en) * | 2022-03-21 | 2023-09-21 | Taiwan Semiconductor Manufacturing Company | Systems and methods for producing ultrapure water for semiconductor fabrication processes |
-
2020
- 2020-08-06 CN CN202010781658.6A patent/CN111777244A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20230295027A1 (en) * | 2022-03-21 | 2023-09-21 | Taiwan Semiconductor Manufacturing Company | Systems and methods for producing ultrapure water for semiconductor fabrication processes |
| CN114804467A (en) * | 2022-04-26 | 2022-07-29 | 成都优越科技有限公司 | Two-stage reverse osmosis double-pump double-membrane ultrapure water device and ultrapure water preparation process |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI648093B (en) | Ultrapure water manufacturing device and method | |
| KR100976903B1 (en) | Method and apparatus for fluid treatment by reverse osmosis under acidic conditions | |
| CN1176032C (en) | Producing process and technology for electronic grade water by intergrated film process | |
| WO2015012054A1 (en) | Method and device for treating boron-containing water | |
| CN110451704B (en) | Method for treating fluorine-containing reuse water | |
| CN111252971A (en) | Ultrapure water manufacturing system and ultrapure water manufacturing method using same | |
| CN111777244A (en) | Ultrapure water preparation system and preparation process thereof | |
| JP2012245439A (en) | Apparatus for producing ultrapure water | |
| JP2014000575A (en) | Apparatus and method for producing purified water | |
| CN213295024U (en) | Ultrapure water preparation device | |
| CN212425742U (en) | Ultrapure water preparation system | |
| JP2017127875A (en) | Ultrapure water system and ultrapure water production method | |
| JPH0638953B2 (en) | High-purity water manufacturing equipment | |
| Singh | Production of high-purity water by membrane processes | |
| CN106396244A (en) | A waste water treating system suitable for an electronic factory | |
| WO2021215099A1 (en) | Waste water treatment method, ultrapure water production method, and waste water treatment apparatus | |
| TWI826657B (en) | Pure water production apparatus and pure water production method | |
| CN203976547U (en) | High specific resistance purified water treatment device | |
| US20170267550A1 (en) | Ultrapure water producing method | |
| CN218665653U (en) | Ultrapure water preparation system for anode and cathode material production | |
| CN212269740U (en) | Ultrapure water manufacturing system | |
| KR102176274B1 (en) | Method of desalinating seawater adopting photocatalyst and system for the same | |
| JP3727156B2 (en) | Desalination equipment | |
| CN211999298U (en) | Purified water preparation facilities | |
| CN212375084U (en) | Reverse osmosis system for ultrapure water manufacturing |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |