CN111770624A - Radio frequency plasma torch with discharge protection device for manufacturing nano powder - Google Patents
Radio frequency plasma torch with discharge protection device for manufacturing nano powder Download PDFInfo
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- CN111770624A CN111770624A CN202010553498.XA CN202010553498A CN111770624A CN 111770624 A CN111770624 A CN 111770624A CN 202010553498 A CN202010553498 A CN 202010553498A CN 111770624 A CN111770624 A CN 111770624A
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
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Abstract
A radio frequency plasma torch with a discharge protection device for manufacturing nano powder relates to the field of nano material manufacturing, and comprises a plasma torch body and air preparation and blowing equipment; the plasma torch body comprises a powder feeding pipe, an inner layer pipe, a middle pipe, an outer layer pipe and an induction coil which are sleeved from inside to outside, wherein the outer sides of the upper end and the lower end of the outer layer pipe are respectively sleeved with an upper sealing ring seat and a lower sealing ring seat, and first sealing rings are arranged between the upper sealing ring seat and the outer layer pipe and between the lower sealing ring seat and the outer layer pipe; an air supply glass cover is sleeved outside the induction coil, the bottom end of the air supply glass cover is open, the top end of the air supply glass cover is hermetically fixed with the bottom end of the upper sealing ring seat, and a plurality of air supply outlets are formed in the outer side wall of the upper sealing ring seat; a flame blocking ring sleeve for blocking plasma flame light is arranged between the middle pipe and the outer layer pipe which are close to the lower sealing ring seat; the radio frequency plasma torch can prevent the turn-to-turn discharge of the high-frequency induction coil, increase the cooling effect, prevent the sealing ring from being damaged by heating and prolong the service life.
Description
Technical Field
The invention relates to the field of nano material manufacturing, in particular to a radio frequency plasma torch with a discharge protection device for nano powder manufacturing.
Background
The known equipment for preparing the nano powder by using the radio frequency plasma as a heat source is widely applied to the nano material manufacturing industry and has the characteristics of high energy utilization rate, high yield, no pollution and good safety; the radio frequency plasma powder manufacturing equipment mainly comprises a radio frequency plasma torch, a radio frequency plasma power supply, a gas and powder supplying system, a reaction chamber, a collecting chamber, a vacuum pumping system, a water chilling unit and an electric control and measurement system; in a radio frequency plasma torch, inert gas (such as argon) is ionized under the action of electromagnetic waves generated by a high-frequency induction coil to form stable high-temperature inert gas plasma, raw material powder is sprayed into the plasma torch through a powder feeder by carrier gas, powder particles absorb a large amount of heat in the high-temperature plasma, are rapidly melted and enter a reactor at a very high speed, are rapidly cooled and solidified into new powder under inert atmosphere, and nano powder with different particle sizes can be prepared or only the surface of the raw material powder is melted to prepare spherical powder under the action of surface tension by changing the voltage and frequency of the coil, the shape of plasma flame, the powder feeding speed and other process parameters; in a word, the radio frequency plasma torch is used as a plasma generating place and plays a vital role in the process of manufacturing the nano powder;
the traditional plasma torch is generally vertically arranged and comprises a powder feeding pipe, an inner pipe, a middle pipe and an outer pipe which are coaxially sleeved from inside to outside in a clearance manner, an upper connecting seat and a lower connecting seat which are used for fixing the upper end and the lower end of a multilayer sleeve, wherein the upper connecting seat of the plasma torch is connected with an upstream gas supply and powder feeding system, the lower connecting seat is connected with a downstream reaction chamber and a downstream collecting chamber, in order to observe the shape of plasma flame, facilitate image analysis and adjust process parameters, generally the inner pipe, the middle pipe and the outer pipe all use transparent glass pipes, and a high-frequency induction coil is annularly sleeved outside the outer pipe; however, such a conventional plasma torch has the following two problems:
firstly, in order to meet the preparation requirement of high-temperature inert gas plasma, the energizing voltage of an induction coil is very high and reaches 6000-30000V, and high-frequency electromagnetic oscillation of several megahertz can be generated, once air is punctured to generate inter-turn discharge, the coil does not work internally, argon ionization is influenced, and if the coil discharges to a glass tube or other parts of a plasma torch, equipment can be damaged, so that serious loss is caused; especially in dry working environment, the breakdown voltage of air can be greatly reduced, and the occurrence probability of accidents is increased;
second, go up the connecting seat and pass through sealing washer sealing connection with the both ends of outer pipe respectively with lower connecting seat, because the temperature of high frequency plasma flame is very high, even it has the cooling gas cooling to lead to between intermediate tube and outer pipe, also can cause the influence to the life-span of sealing washer, because plasma flame is blown from the top down, the connecting seat is far away on the distance, it is less to the sealing washer influence of going up the connecting seat, but the sealing washer of connecting seat is because of high temperature damage easily down, influence the sealed effect of whole plasma cavity, and then can influence the manufacturing quality of the nanometer product.
Disclosure of Invention
In order to overcome the defects in the background art, the invention discloses a radio frequency plasma torch with a discharge protection device for manufacturing nano powder, which can prevent the turn-to-turn discharge of a high-frequency induction coil, increase the cooling effect, prevent a sealing ring from being damaged by heating and prolong the service life.
In order to achieve the purpose, the invention adopts the following technical scheme:
a radio frequency plasma torch with a discharge protection device for manufacturing nano powder comprises a plasma torch body and an air preparation blowing device, wherein the plasma torch body and the air preparation blowing device are vertically arranged; the plasma torch body comprises a powder feeding pipe, an inner layer pipe, a middle pipe, an outer layer pipe and an induction coil, wherein the powder feeding pipe, the inner layer pipe, the middle pipe and the outer layer pipe are coaxially sleeved from inside to outside in a clearance mode, the induction coil is used for ionizing inert gas to generate plasma, an upper sealing ring seat and a lower sealing ring seat are respectively sleeved on the outer sides of the upper end and the lower end of the outer layer pipe, and first sealing rings for sealing are arranged between the upper sealing ring seat and the outer layer pipe and between the lower sealing ring seat and the; a cylindrical air supply glass cover is sleeved outside the induction coil with a gap, the bottom end of the air supply glass cover is open, the top end of the air supply glass cover is fixed with the bottom end of the upper sealing ring seat in a sealing manner, and a plurality of air supply outlets communicated with the inner cavity of the air supply glass cover are uniformly and annularly arranged on the outer side wall of the upper sealing ring seat; the air preparing and blowing equipment comprises a gas distributor, a fan and a humidifier for preparing humid air, wherein an air outlet of the humidifier is connected with an inlet of the fan, an outlet of the fan is connected with a total inlet of the gas distributor, the gas distributor is provided with a plurality of branch outlets corresponding to air supply ports, and the branch outlets are communicated with corresponding air supply ports through hoses; a flame-blocking ring sleeve for blocking plasma flame light is arranged between the middle pipe and the outer layer pipe which are close to the lower sealing ring seat.
Furthermore, the bottom end face of the upper sealing ring seat is provided with a groove matched with the top end of the air supply glass cover in an inserted mode, a second sealing ring is arranged between the inner wall of the groove and the outer wall of the air supply glass cover, and the outer side of the top end of the air supply glass cover is sleeved with a sealing pressing plate which is detachably and fixedly connected with the outer end face of the upper sealing ring seat and used for pressing the second sealing ring.
Furthermore, the outer wall of the air supply glass cover is provided with a plurality of rows of through holes corresponding to the induction coils along the axial direction, and the number of the through holes in each row is set to be a plurality of through holes which are uniformly distributed along the circumferential direction of the air supply glass cover.
Further, the distance between the inner wall of the air supply glass cover and the outer wall of the induction coil is less than 30 mm.
Furthermore, a step hole for allowing a middle pipe to pass through is formed in the center of the lower end face of the lower sealing ring seat, a gap is reserved between the flame blocking ring sleeve and the middle pipe, a circular ring matched with a counter bore of the step hole extends outwards at a right angle from the lower end of the flame blocking ring sleeve, and the upper end of the flame blocking ring sleeve penetrates through a through hole of the step hole and is higher than a first sealing ring located on the lower sealing ring seat; the outer edge surface of the step hole is detachably and fixedly connected with an annular pressing plate used for pressing and fixing the flame blocking ring sleeve, and a gap is reserved between the annular pressing plate and the middle pipe.
Further, gaps are reserved between the flame blocking ring sleeve and the outer layer pipe and between the flame blocking ring sleeve and the through hole of the step hole, a vertical vent hole is formed in the circular ring of the flame blocking ring sleeve, an oblique angle used for communicating the vent hole with the inner cavity of the outer layer pipe is formed in the step surface of the step hole in a sinking mode, and the annular pressing plate is correspondingly abutted to the surface of the circular ring outside the vent hole.
Further, the humidifier comprises a buffer tube, a heating water tank and a control cabinet; the side wall of the heating water tank is provided with an electric heating device, a liquid level meter and a water temperature detection device, the bottom of the heating water tank is provided with a drain pipe, a drain valve is arranged on the drain pipe, the top of the heating water tank is provided with a water inlet pipe, a steam outlet pipe and a pressure relief pipe, and the water inlet pipe, the steam outlet pipe and the pressure relief pipe are respectively provided with an electromagnetic valve, a first electric regulating valve and a switch valve; an air inlet pipe and an air outlet pipe are respectively arranged at two ends of the buffer pipe, and a second electric regulating valve is installed on the air inlet pipe; the pipe wall of the buffer pipe close to one end of the air inlet pipe is communicated with the heating water tank through a steam outlet pipe, a cooling device for cooling air in the buffer pipe is arranged on the pipe wall of the middle part of the buffer pipe, and a first temperature detector and a first humidity detector are arranged on the pipe wall of the other end of the buffer pipe; the electric heating device, the liquid level meter, the water temperature detection device, the electromagnetic valve, the first electric regulating valve, the second electric regulating valve, the first temperature detector and the first humidity detector are respectively in signal connection with the control cabinet.
Furthermore, the cooling device comprises a jacket, and an electric water inlet valve and an electric water outlet valve which are respectively connected with the control cabinet through signals, wherein the electric water inlet valve and the electric water outlet valve are respectively arranged on a cooling water inlet pipe and a cooling water outlet pipe which are arranged on the outer walls of the two ends of the jacket.
Further, the humidifier contains the shell, heating water tank and switch board are located shell inner chamber lower part both sides respectively, the buffer tube is located shell inner chamber upper portion.
Further, a steam-water separator is arranged between the humidifier and the fan.
Due to the adoption of the technical scheme, the invention has the following beneficial effects:
the invention discloses a radio frequency plasma torch with a discharge protection device for manufacturing nano powder.A blowing glass cover is sleeved outside an induction coil, plasma flame observed in the torch is not influenced, the top end of the blowing glass cover is sealed and fixed by utilizing an upper sealing ring seat, high-speed gas is introduced into the blowing glass cover through a fan, the induction coil and an outer layer pipe can be cooled, free electrons near the induction coil can be blown away, the inter-turn discharge phenomenon of the induction coil is prevented, water molecules fed into the high-speed gas can be increased through a humidifier, the capacity of capturing the free electrons is improved, and the breakdown voltage of the air is further improved; compared with the traditional plasma torch, the invention not only increases the cooling effect of the induction coil and the outer layer tube, but also reduces the risk that other parts of the glass tube or the plasma torch are damaged, and ensures the safe production process of the preparation of the nano powder;
after the inert gas is ionized by the induction coil to form high-temperature flame in the intermediate tube, the high-temperature flame can spread from the spray head of the powder feeding tube to the lower end of the intermediate tube under the blowing of the inert gas, and the excessive radiation heat of the plasma flame can be prevented from being transmitted to the first sealing ring arranged between the outer tube and the lower sealing ring seat by arranging the flame blocking ring sleeve between the lower end of the outer tube and the intermediate tube, so that the service life of the first sealing ring is shortened, even the first sealing ring is damaged, and meanwhile, the gap between the flame blocking ring sleeve and the intermediate tube does not hinder the flow of cooling gas between the intermediate tube and the outer tube; therefore, the invention can prevent the first sealing ring from being damaged by heating, has better sealing effect, reduces the loss and ensures the safe production process of nano powder manufacturing.
Drawings
FIG. 1 is a schematic view of the present invention;
FIG. 2 is an enlarged schematic view of section A of FIG. 1;
FIG. 3 is an enlarged schematic view of section B of FIG. 1;
fig. 4 is a schematic structural view of the humidifier.
In the figure: 1. a powder feeding pipe; 2. an inner layer tube; 3. an intermediate pipe; 4. an outer tube; 5. a blast glass cover; 6. an induction coil; 7. a gas distributor; 8. a fan; 9. a humidifier; 901. a second electric control valve; 902. a buffer tube; 903. a cooling device; 904. a first temperature detector; 905. a first humidity detector; 906. a first electric control valve; 907. heating the water tank; 908. an electric heating device; 10. an upper seal ring seat; 11. a flame blocking ring sleeve; 12. a first seal ring; 13. a lower seal ring seat; 14. an air supply outlet; 15. a second seal ring; 16. sealing the pressure plate; 17. a vent hole; 18. and an annular pressure plate.
Detailed Description
The present invention will be explained in detail by the following examples, which are intended to disclose the invention and protect all technical improvements within the scope of the invention, and the invention is not limited to the following examples; in the description of the present invention, it should be understood that, if there is an orientation or positional relationship indicated by the terms "upper", "lower", "front", "rear", "left", "right", etc., which corresponds to the drawings of the present application, the present invention is described for convenience, but does not indicate or imply that the indicated device or element must have a particular orientation:
the radio frequency plasma torch with the discharge protection device for manufacturing the nano powder comprises a plasma torch body and an air preparation blowing device, wherein the plasma torch body and the air preparation blowing device are vertically arranged; the plasma torch body comprises a powder feeding pipe 1, an inner layer pipe 2, a middle pipe 3, an outer layer pipe 4 and an induction coil 6, wherein the powder feeding pipe 1, the middle pipe 3 and the outer layer pipe 4 are coaxially sleeved from inside to outside in a clearance mode, the induction coil 6 is used for ionizing inert gas to generate plasma, the powder feeding pipe 1 is used for spraying raw material powder, argon gas used for being ionized into the plasma is introduced between the powder feeding pipe 1 and the inner layer pipe 2, the argon gas is introduced between the inner layer pipe 2 and the middle pipe 3 to limit plasma flame, the high-temperature plasma flame is prevented from contacting the middle pipe 3, meanwhile, the speed of introducing the argon gas can be controlled, the shape of the plasma flame is changed, and the argon gas is also introduced between the middle pipe 3 and the outer layer; an upper sealing ring seat 10 and a lower sealing ring seat 13 are respectively sleeved on the outer sides of the upper end and the lower end of the outer layer tube 4, a first sealing ring 12 for sealing is arranged between each of the upper sealing ring seat 10 and the lower sealing ring seat 13 and the outer layer tube 4, and the outer layer tube 4 is a barrier for preventing argon in the radio frequency plasma torch from leaking, so that two ends of the outer layer tube 4 need to be sealed, and the nano powder is prevented from being polluted in the preparation process;
a cylindrical air supply glass cover 5 is sleeved outside the induction coil 6 with a gap, and the air supply glass cover 5 is a transparent cylindrical glass cover, so that the manufacturing and the installation are convenient, and the observation of plasma flame is not hindered; the bottom end of the air supply glass cover 5 is open, and the top end of the air supply glass cover 5 is fixed with the bottom end of the upper sealing ring seat 10 in a sealing way; according to the requirement, a groove which is adaptive to the insertion of the top end of the air supply glass cover 5 is formed in the bottom end face of the upper sealing ring seat 10, a plurality of second sealing rings 15 are arranged between the inner wall of the groove and the outer wall of the air supply glass cover 5, a sealing pressing plate 16 which is detachably and fixedly connected with the outer end face of the upper sealing ring seat 10 and used for pressing the second sealing rings 15 is sleeved on the outer side of the top end of the air supply glass cover 5, the sealing pressing plate 16 can be connected with the outer end face of the upper sealing ring seat 10 through screws, the sealing tightness is guaranteed, the connection is stable, and the air supply glass cover 5 is prevented from; a plurality of air supply outlets 14 communicated with the inner cavity of the air supply glass cover 5 are uniformly and annularly arranged on the outer side wall of the upper sealing ring seat 10, so that air supply is uniform, high-speed gas is introduced into the air supply glass cover 5 through the air supply outlets 14, the induction coil 6 and the outer layer pipe 4 can be cooled, free electrons near the induction coil 6 can be blown away, and the inter-turn discharge phenomenon of the induction coil 6 is prevented; in addition, the outer wall of the air supply glass cover 5 is provided with a plurality of rows of through holes corresponding to the induction coil 6 along the axial direction, the number of the through holes in each row is set to be a plurality of through holes and the through holes are uniformly distributed along the circumferential direction of the air supply glass cover 5, so that free electrons can be gradually released outwards from the through holes, a large number of free electrons are prevented from being collected to the lower sealing ring seat 13 at the lower end of the outer-layer pipe 4 through the bottom opening end of the air supply glass cover 5, the lower sealing ring seat 13 is generally made of metal materials, and preferably, the lower sealing ring seat 7 is; preferably, part of the coil of the induction coil 6 is exposed out of the blast glass cover 5, preferably only one to two turns of the coil are exposed, also for early release of free electrons out of the blast glass cover 5; preferably, the distance between the inner wall of the air supply glass cover 5 and the outer wall of the induction coil 6 is less than 30mm, so that the air supply efficiency and the benefit are increased, the cooling effect is improved, and the distance is generally set to 10 mm;
the air preparing and blowing equipment comprises a gas distributor 7, a fan 8 and a humidifier 9 for preparing humid air, wherein an air outlet of the humidifier 9 is connected with an inlet of the fan 8, an outlet of the fan 8 is connected with a total inlet of the gas distributor 7, the gas distributor 7 is provided with a plurality of branch outlets corresponding to an air supply port 14, the branch outlets are communicated with corresponding air supply ports through hoses, the fan 8 is used for pumping air and blowing the air to an induction coil 6 of the radio frequency plasma torch through the gas distributor 7, free electrons around the induction coil 6 are blown away while the temperature is reduced, inter-turn discharge of the induction coil 6 is prevented, water molecules sent into the air can be increased through the humidifier 9, the capacity of capturing the free electrons is improved, and further the breakdown voltage of the air is improved; in addition, a steam-water separator is arranged between the humidifier 9 and the fan 8, so that large-particle water drops are prevented from being taken away when the wind speed of the fan 8 is too high; according to the requirement, the humidifier comprises a buffer tube 902, a heating water tank 907 and a control cabinet, in addition, the humidifier 9 comprises a shell, the heating water tank 907 and the control cabinet are respectively arranged at two sides of the lower part of the inner cavity of the shell, and the buffer tube 902 is arranged at the upper part of the inner cavity of the shell, so that the modular structure is convenient for saving space, and is also convenient for water and dust prevention and mobile transportation; an electric heating device 908, a liquid level meter and a water temperature detection device are mounted on the side wall of the heating water tank 907, a drain pipe is arranged at the bottom of the heating water tank 907, a drain valve is mounted on the drain pipe, a water inlet pipe, a steam outlet pipe and a pressure relief pipe are arranged at the top of the heating water tank 907, an electromagnetic valve, a first electric control valve 906 and a switch valve are mounted on the water inlet pipe, the steam outlet pipe and the pressure relief pipe respectively, the water inlet pipe is connected with an external water source, the liquid level meter is used for detecting the water level in the heating water tank 907, and when the water level; heating water in the heating water tank 907 by using the electric heating device 908 to prepare water vapor, and opening a switch valve in the heating process to ensure that the heating water tank 907 is heated at normal pressure and prevent the heating water tank 907 from being damaged; when the water in the heating water tank 907 boils, the temperature is detected by the water temperature detection device, and the electric heating device 908 is controlled to stop heating or be in a heat preservation state, so that energy is saved; the delivery amount of the water vapor is controlled by controlling the opening of the first electric control valve 906, thereby controlling the humidity of the blown air;
an air inlet pipe and an air outlet pipe are respectively arranged at two ends of the buffer pipe 902, a second electric regulating valve 901 is arranged on the air inlet pipe, and the air inflow of external air can be regulated by regulating the opening degree of the second electric regulating valve 901; the wall of the buffer tube 902 close to one end of the air inlet tube is communicated with the heating water tank 907 through a steam outlet tube, so that water vapor and external air can be uniformly mixed at the end part of the buffer tube 902, and the overall humidity of the air is increased; a cooling device 903 for cooling air in the buffer tube 902 is arranged on the middle tube wall of the buffer tube 902, in addition, the cooling device 903 comprises a jacket, and an electric water inlet valve and an electric water outlet valve which are respectively connected with the control cabinet through signals, the electric water inlet valve and the electric water outlet valve are respectively arranged on a cooling water inlet tube and a cooling water outlet tube which are arranged on the outer walls of the two ends of the jacket, and a jacket cooling structure is adopted for cooling air by blowing; in addition, the cooling device 903 is a chip cooling system in signal connection with the control cabinet, the chip cooling system is a novel contact type cooling system, and the temperature control is stable; a first temperature detector 904 and a first humidity detector 905 are installed on the wall of the other end of the buffer tube 902, and can be used for detecting the external environment before cooling or humidifying, and can only be used for detecting the temperature and the humidity of the air blown from the tail end after cooling or humidifying; the electric heating device 908, the liquid level meter, the water temperature detection device, the electromagnetic valve, the first electric regulating valve 906, the second electric regulating valve 901, the first temperature detector 904 and the first humidity detector 905 are respectively in signal connection with the control cabinet, and the temperature and the humidity of the blown air are controlled by detecting the temperature and the humidity of the external environment and the voltage value of the induction coil 6 set by the radio frequency plasma torch according to the preparation requirement of the nano powder, so that the blowing effect can be ensured, the energy can be saved, and the cost can be reduced;
a flame-proof ring sleeve 11 for blocking plasma flame light is arranged between the middle pipe and the outer layer pipe close to the lower sealing ring seat 13, and the flame-proof ring sleeve 11 is made of high-temperature-resistant ceramic or metal materials, so that the heat-insulating and light-insulating effects are better; according to the requirement, a step hole for the middle pipe 3 to pass through is formed in the center of the lower end face of the lower sealing ring seat 13, a gap is reserved between the flame blocking ring sleeve 11 and the middle pipe 3, cooling gas can pass through the gap conveniently, and the temperature of the flame blocking ring sleeve 11 and the middle pipe 3 is reduced; the lower end of the flame blocking ring sleeve 11 extends outwards at a right angle to form a circular ring matched with a counter bore of the step hole, and the upper end of the flame blocking ring sleeve 11 penetrates through the through hole of the step hole and is higher than the first sealing ring 12 positioned on the lower sealing ring seat 13, so that excessive radiation heat of plasma flame is prevented from being transmitted to the first sealing ring 12, and the service life of the first sealing ring 12 is prevented from being influenced; the outer edge surface of the step hole is detachably and fixedly connected with an annular pressure plate 18 used for pressing and fixing the flame-blocking ring sleeve 11, and a gap is reserved between the annular pressure plate 18 and the middle pipe 3; in addition, gaps are respectively reserved between the flame-blocking ring sleeve 11 and the outer layer pipe 4 and between the flame-blocking ring sleeve 11 and the step hole through hole, a vertical vent hole 17 is formed in a circular ring of the flame-blocking ring sleeve 11, an oblique angle used for communicating the vent hole 17 with the inner cavity of the outer layer pipe is formed in the step surface of the step hole in a sinking mode, and the annular pressing plate 18 is correspondingly abutted to the surface of the circular ring outside the vent hole 17, so that the flame-blocking ring sleeve 11 is not directly contacted with the outer layer pipe 4, cooling gas can also flow between the flame-blocking ring sleeve 11 and the outer layer pipe 4, and the first sealing ring 12 is more; according to needs, be equipped with annular water tank in the lower seal ring seat 13, through letting in the circulating water in annular water tank, can carry out cooling to pipe fitting, connecting piece and first sealing washer 12 around lower seal ring seat 13 and the lower seal ring seat 13.
The present invention is not described in detail in the prior art.
Claims (10)
1. A radio frequency plasma torch with a discharge protection device for manufacturing nano powder comprises a plasma torch body and an air preparation blowing device, wherein the plasma torch body and the air preparation blowing device are vertically arranged; plasma torch body contains from inside to outside coaxial and clearance cover establish send whitewashed pipe (1), inlayer pipe (2), intervalve (3), outer pipe (4) and be used for ionizing inert gas to produce induction coil (6) of plasma, the end outside is equipped with respectively on outer pipe (4) upper and lower seal ring seat (10) and lower seal ring seat (13), upper seal ring seat (10) and lower seal ring seat (13) all with outer pipe (4) between be equipped with first sealing washer (12) that are used for sealed, its characterized in that: a cylindrical air supply glass cover (5) is sleeved on the outer side of the induction coil (6) with a gap, the bottom end of the air supply glass cover (5) is open, the top end of the air supply glass cover (5) is fixed with the bottom end of an upper sealing ring seat (10) in a sealing manner, and a plurality of air supply outlets (14) communicated with the inner cavity of the air supply glass cover (5) are uniformly and annularly arranged on the outer side wall of the upper sealing ring seat (10); the air preparation and blowing equipment comprises a gas distributor (7), a fan (8) and a humidifier (9) for preparing humid air, wherein an air outlet of the humidifier (9) is connected with an inlet of the fan (8), an outlet of the fan (8) is connected with a total inlet of the gas distributor (7), the gas distributor (7) is provided with a plurality of branch outlets corresponding to the air supply openings (14), and the branch outlets are communicated with the corresponding air supply openings through hoses; a flame-blocking ring sleeve (11) for blocking plasma flame light is arranged between the middle pipe and the outer pipe close to the lower sealing ring seat (13).
2. The rf plasma torch with a discharge protection device for manufacturing nano-powder according to claim 1, wherein: the bottom face of going up sealing ring seat (10) is equipped with adaptation air supply glass cover (5) top male recess, be equipped with second sealing washer (15) between recess inner wall and air supply glass cover (5) outer wall, air supply glass cover (5) top outside cover is equipped with and can dismantle fixed connection with the outer terminal surface of last sealing ring seat (10) to a sealing pressure plate (16) for compressing tightly second sealing washer (15).
3. The rf plasma torch with a discharge protection device for manufacturing nano-powder according to claim 1, wherein: the outer wall of the air supply glass cover (5) is provided with a plurality of rows of through holes corresponding to the induction coils (6) along the axial direction, and the number of the through holes in each row is set to be a plurality of through holes and is uniformly distributed along the circumferential direction of the air supply glass cover (5).
4. The rf plasma torch with a discharge protection device for manufacturing nano-powder according to claim 1, wherein: the distance between the inner wall of the air supply glass cover (5) and the outer wall of the induction coil (6) is less than 30 mm.
5. The rf plasma torch with a discharge protection device for manufacturing nano-powder according to claim 1, wherein: a step hole for the middle pipe (3) to pass through is formed in the center of the lower end face of the lower sealing ring seat (13), a gap is reserved between the flame blocking ring sleeve (11) and the middle pipe (3), a circular ring matched with a counter bore of the step hole extends outwards from the lower end of the flame blocking ring sleeve (11) in a right angle mode, and the upper end of the flame blocking ring sleeve (11) penetrates through a through hole of the step hole and is higher than a first sealing ring (12) located on the lower sealing ring seat (13); the outer edge surface of the step hole is detachably and fixedly connected with an annular pressing plate (18) used for pressing and fixing the flame blocking ring sleeve (11), and a gap is reserved between the annular pressing plate (18) and the intermediate pipe (3).
6. The RF plasma torch with a discharge protection device for manufacturing nanopowder according to claim 5, wherein: keep off flame ring cover (11) respectively with outer pipe (4) and step hole through-hole between all leave the clearance, be equipped with vertical air vent (17) on the ring of keeping off flame ring cover (11), the step face in step hole is sunk and is equipped with the oblique angle that is used for communicateing air vent (17) and outer pipe inner chamber, annular clamp plate (18) are contradicted with the ring surface correspondence in air vent (17) outside.
7. The rf plasma torch with a discharge protection device for manufacturing nano-powder according to claim 1, wherein: the humidifier comprises a buffer tube (902), a heating water tank (907) and a control cabinet; an electric heating device (908), a liquid level meter and a water temperature detection device are mounted on the side wall of the heating water tank (907), a drain pipe is arranged at the bottom of the heating water tank (907), a drain valve is mounted on the drain pipe, a water inlet pipe, a steam outlet pipe and a pressure relief pipe are arranged at the top of the heating water tank (907), and an electromagnetic valve, a first electric regulating valve (906) and a switch valve are mounted on the water inlet pipe, the steam outlet pipe and the pressure relief pipe respectively; an air inlet pipe and an air outlet pipe are respectively arranged at two ends of the buffer pipe (902), and a second electric regulating valve (901) is installed on the air inlet pipe; the pipe wall of the buffer pipe (902) close to one end of the air inlet pipe is communicated with a heating water tank (907) through a steam outlet pipe, a cooling device (903) for cooling air in the buffer pipe (902) is arranged on the pipe wall of the middle part of the buffer pipe (902), and a first temperature detector (904) and a first humidity detector (905) are mounted on the pipe wall of the other end of the buffer pipe (902); the electric heating device (908), the liquid level meter, the water temperature detection device, the electromagnetic valve, the first electric regulating valve (906), the second electric regulating valve (901), the first temperature detector (904) and the first humidity detector (905) are respectively in signal connection with the control cabinet.
8. The rf plasma torch with a discharge protection device for nanopowder manufacture of claim 7, wherein: the cooling device (903) comprises a jacket, and an electric water inlet valve and an electric water outlet valve which are respectively connected with the control cabinet through signals, wherein the electric water inlet valve and the electric water outlet valve are respectively arranged on a cooling water inlet pipe and a cooling water outlet pipe which are arranged on the outer walls of the two ends of the jacket.
9. The rf plasma torch with a discharge protection device for nanopowder manufacture of claim 7, wherein: the humidifier (9) comprises a shell, the heating water tank (907) and the control cabinet are respectively arranged on two sides of the lower portion of the inner cavity of the shell, and the buffer tube (902) is arranged on the upper portion of the inner cavity of the shell.
10. The rf plasma torch with a discharge protection device for manufacturing nano-powder according to claim 1, wherein: and a steam-water separator is arranged between the humidifier (9) and the fan (8).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010553498.XA CN111770624A (en) | 2020-06-17 | 2020-06-17 | Radio frequency plasma torch with discharge protection device for manufacturing nano powder |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010553498.XA CN111770624A (en) | 2020-06-17 | 2020-06-17 | Radio frequency plasma torch with discharge protection device for manufacturing nano powder |
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| Publication Number | Publication Date |
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| CN111770624A true CN111770624A (en) | 2020-10-13 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115468914A (en) * | 2022-11-11 | 2022-12-13 | 中国科学院沈阳自动化研究所 | Signal excitation and sampling probe for high-temperature melt composition analysis |
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2020
- 2020-06-17 CN CN202010553498.XA patent/CN111770624A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115468914A (en) * | 2022-11-11 | 2022-12-13 | 中国科学院沈阳自动化研究所 | Signal excitation and sampling probe for high-temperature melt composition analysis |
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