CN111751999A - Spectroscopic device, laser generating device, and scribing apparatus - Google Patents
Spectroscopic device, laser generating device, and scribing apparatus Download PDFInfo
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- CN111751999A CN111751999A CN201910250991.1A CN201910250991A CN111751999A CN 111751999 A CN111751999 A CN 111751999A CN 201910250991 A CN201910250991 A CN 201910250991A CN 111751999 A CN111751999 A CN 111751999A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/0988—Diaphragms, spatial filters, masks for removing or filtering a part of the beam
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/362—Laser etching
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- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
Abstract
The invention discloses a light splitting device, a laser generating device and scribing equipment, wherein the light splitting device comprises a light splitting plate, and a plurality of light holes are formed in the light splitting plate; the shading plate is provided with a first position and a second position, all the light holes are opened when the shading plate is positioned at the first position, one or more light holes are shielded when the shading plate is positioned at the second position, and the shading plate can move from the first position to the second position along the first direction; the light splitting plate is in a first state, and a connecting line between the first light hole and the second light hole is inclined relative to a first direction; the light shielding plate comprises a first edge, the first edge firstly shields the light transmission holes in the process that the light shielding plate moves from the first position to the second position, the first edge is inclined relative to the first direction, and the inclined direction of the first edge relative to the first direction is opposite to the inclined direction of a connecting line between the first light transmission hole and the second light transmission hole of the light splitting plate in the first state relative to the first direction.
Description
Technical Field
The invention relates to the technical field of mechanical equipment, in particular to a light splitting device, a laser generating device and scribing equipment.
Background
In the process of processing a photovoltaic chip, a part of a film layer is removed by adopting a scribing process, and the common scribing process is divided into mechanical scribing and laser scribing.
Laser scribing is to irradiate the surface of a workpiece with laser beams to locally melt and gasify the irradiated area, thereby achieving the purpose of removing the film layer. The main component of the laser scribing equipment is a laser generating device which comprises a light splitting plate, wherein a single laser beam penetrates through a plurality of light holes on the light splitting plate and is divided into a plurality of laser beams with preset intervals so as to perform scribing, and when the number of the required scribing is less than that of the light holes, a shading plate 20' is required to shield a part of the light holes so as to reduce laser beams for scribing.
As shown in fig. 1 and 2, the structure and the operation state of the light shielding plate 20' in the laser scribing apparatus in the related art are illustrated.
The light shielding plate 20 'in fig. 2 is driven by the driving unit 50' and moves left and right in the direction of the drawing sheet to shield or open the first light transmission hole 111 ', but the movement accuracy is poor and the error range is small, and the first light transmission hole 111' cannot be completely shielded because the movement is occasionally not in place.
The light shielding plate 20 ' in fig. 1, which is not in place, only shields a portion of the first light-transmitting hole 111 ', still transmits B light beams, which are thinner than the a light beams normally transmitted through the second light-transmitting hole 112 ', but still cuts a scribe line on the target film layer, resulting in a defective product.
Disclosure of Invention
In order to solve the above technical problem, according to an aspect of the present invention, there is provided a light splitting device, including a light splitting plate, the light splitting plate being provided with a plurality of light holes; the light splitting device also comprises a light shielding plate, wherein the light shielding plate is provided with a first position and a second position, when the light shielding plate is positioned at the first position, the light shielding plate opens all the light holes, when the light shielding plate is positioned at the second position, the light shielding plate shields one or more light holes, and the light shielding plate can move from the first position to the second position along the first direction; the light splitting plate is provided with a first state, and a connecting line between the first light hole and the second light hole is inclined relative to a first direction in the first state; the light shielding plate comprises a first edge, the first edge firstly shields the light transmission holes in the process that the light shielding plate moves from the first position to the second position, the first edge is inclined relative to the first direction, and the inclined direction of the first edge relative to the first direction is opposite to the inclined direction of a connecting line between the first light transmission hole and the second light transmission hole of the light splitting plate in the first state relative to the first direction.
According to another aspect of the present invention, there is also provided a laser generating apparatus, including a light source and a light splitting device, where the light splitting device is the above-mentioned light splitting device, and light emitted from the light source is emitted through a light-transmitting hole on a light splitting plate of the light splitting device.
According to another aspect of the present invention, there is also provided a scribing apparatus comprising a laser generating device, the laser generating device comprising the above light splitting device, or the laser generating device being the above laser generating device.
The first edge of the light screen of the light splitting device is obliquely arranged and is opposite to the oblique direction of the connecting line between the first light hole and the second light hole, so that the distance from the first edge to the second light hole along the first direction is greater than the shortest distance of the projection of the first light hole and the second light hole in the first direction, the allowable error range of the light screen is increased, the influence of the movement precision error of the light screen on the light shading effect of the light screen is reduced, and the reliability of the light splitting device is improved.
Additional features and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.
Drawings
The accompanying drawings are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the example serve to explain the principles of the invention and not to limit the invention.
FIG. 1 is a schematic diagram of a prior art scoring apparatus with a shutter plate not in place for scoring;
FIG. 2 is a schematic view showing the relationship between a light shielding plate and a light transmitting hole of the scribing apparatus shown in FIG. 1;
FIG. 3 is a schematic view of the laser generator of the scribing apparatus of the present invention for scribing;
FIG. 4 is a schematic diagram showing the structural relationship between the light shielding plate and the light hole of the light splitting device of the present invention;
FIG. 5 is a schematic view of the operation state of the light shielding plate of the light splitting device of the present invention;
fig. 6 is a schematic structural diagram of a light shielding plate of the light splitting device of the present invention.
Description of the drawings: the triangles in fig. 2, 4 and 6 are auxiliary lines for ease of calculation, are not solid structures, nor are they components of the light splitting device, laser generating device or scribing apparatus.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the drawings of the embodiments of the present invention. It is to be understood that the embodiments described are only a few embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the described embodiments of the invention without any inventive step, are within the scope of protection of the invention.
The use of "first," "second," and similar terms in the present application do not denote any order, quantity, or importance, but rather the terms are used to distinguish one element from another.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention.
In the present invention, unless otherwise expressly stated or limited, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through an intermediate. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.
In this document, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
According to an aspect of the present invention, there is provided a light splitting device, as shown in fig. 3 to 6, the light splitting device includes a light splitting plate 10, wherein a plurality of light transmission holes 11 are formed on the light splitting plate 10; the light splitting device further comprises a light shielding plate 20, wherein the light shielding plate 20 has a first position and a second position, when the light shielding plate 20 is located at the first position, the light shielding plate 20 opens all the light transmission holes 11, when the light shielding plate 20 is located at the second position, the light shielding plate 20 shields one or more light transmission holes 11, and the light shielding plate 20 can move from the first position to the second position along the first direction; the plurality of light holes 11 include a first light hole 111 and a second light hole 112, and the spectroscopic plate 10 has a first state in which a line connecting the first light hole 111 and the second light hole 112 of the spectroscopic plate 10 is inclined with respect to a first direction; the light shielding plate 20 includes a first edge 21, the first edge 21 first shields the light transmission hole 11 in the process of moving the light shielding plate 20 from the first position to the second position, the first edge 21 is inclined with respect to the first direction, and the inclination direction of the first edge 21 with respect to the first direction is opposite to the inclination direction of the connecting line between the first light transmission hole 111 and the second light transmission hole 112 of the spectroscopic plate 10 in the first state with respect to the first direction.
The first edge 21 of the light shielding plate 20 of the light splitting device is obliquely arranged and is opposite to the oblique direction of the connecting line between the first light transmission hole 111 and the second light transmission hole 112, so that the distance X2 of the first edge 21 moving from the first light transmission hole 111 to the second light transmission hole 112 along the first direction is greater than the shortest distance X1 of the projection of the first light transmission hole 111 and the second light transmission hole 112 in the first direction, the allowable error range of the light shielding plate 20 is increased, the influence of the movement precision error of the light shielding plate 20 on the light shielding effect of the light shielding plate 20 is reduced, and the reliability of the light splitting device is improved.
With reference to fig. 2, 4 and 6, the center distance between the first light transmission hole 111 and the second light transmission hole 112 is a, and the connecting line between the first light transmission hole 111 and the second light transmission hole 112 is inclined at an angle α ° with respect to the first direction, so that the center distance of the projection of the first light transmission hole 111 and the second light transmission hole 112 in the first direction is b.
As shown in fig. 2, the conventional light shielding plate 20 'has a rectangular shape, and the edge is perpendicular to the first direction, so that the practical allowable error range of the light shielding plate 20' running between the first light-transmitting hole 111 'and the second light-transmitting hole 112' is X1, where X1 is b-2r, where r is the radius of the light-transmitting hole. The first edge 21 of the light shielding plate 20 in fig. 4 is disposed obliquely with respect to the first direction, and the actual allowable error of the light shielding plate 20 ' in its operation between the first light transmission hole 111 ' and the second light transmission hole 112 ' is X2.
Theoretically, the range of the angle between the first edge 21 of the light shielding plate 20 and the line connecting the first light transmission hole 111 and the second light transmission hole 112 of the spectroscopic plate 10 in the first state is larger than 0 ° and smaller than 180 °.
On the premise that the connection line between the first light hole 111 and the second light hole 112 is inclined relative to the first direction and the inclination direction of the first edge 21 relative to the first direction is opposite to the first direction, the smaller the included angle between the first edge 21 and the connection line is, the smaller the allowable error range is, and otherwise, the larger the included angle is, the larger the allowable error range is.
Therefore, it is preferable that the range of the angle between the first edge 21 of the light shielding plate 20 and the line connecting the first light transmission hole 111 and the second light transmission hole 112 of the spectroscopic plate 10 in the first state is less than 180 ° and not less than 45 °, i.e., greater than or equal to 45 ° and less than 180 °.
Under the condition that the angle between the connecting line between the first light-transmitting hole 111 and the second light-transmitting hole 112 and the first direction is not changed, the larger the included angle between the first edge 21 and the connecting line between the first light-transmitting hole 111 and the second light-transmitting hole 112 is, the smaller the angle between the first edge 21 and the first direction is, and although the volume of the light shielding plate 20 is not changed, the larger the space occupied by the light shielding plate 20 in the mechanism is.
Therefore, it is preferable that the range of the included angle between the first edge 21 of the light shielding plate 20 and the line connecting the first and second light transmission holes 111 and 112 of the spectroscopic plate 10 in the first state is greater than 45 ° and not greater than 120 °, that is, greater than 45 ° and not greater than 120 °.
More preferably, an angle between the first edge 21 of the light shielding plate 20 and a line connecting the first light transmission hole 111 and the second light transmission hole 112 of the spectroscopic plate 10 in the first state is 90 °.
As shown in fig. 4, a line connecting the first light-transmitting hole 111 and the second light-transmitting hole 112 is inclined at an angle α with respect to the first direction, and a line connecting the first light-transmitting hole 111 and the second light-transmitting hole 112 is inclined at an angle β with respect to the first direction, the sum of which is 90 °. The two auxiliary triangles in fig. 4 are similar right-angled triangles, and according to the principle of similar triangles, X2/y is a/b, where y is a-2 r. Since the hypotenuse is larger than the cathetus, a > b, X2> y ═ (a-2r) > (b-2r) ═ X1, i.e., X2 is larger than X1.
In this embodiment, the light shielding plate 20 is a parallelogram, one long side of the light shielding plate 20 is the first edge 21, and one short side is connected to the driving part, and the driving part 50 is used for driving the light shielding plate 20 to move in the first direction. In other embodiments, which are not shown in the drawings, the light shielding plate 20 may have various shapes as long as the first edge 21 is inclined relatively and can shield the light transmission hole 11.
Preferably, the spectroscopic plate 10 has a second state in which the distance between the projections of the first light transmission hole 111 and the second light transmission hole 112 of the spectroscopic plate 10 in the first direction is larger than the distance between the projections of the first light transmission hole 111 and the second light transmission hole 112 of the spectroscopic plate 10 in the first state in the first direction, and the spectroscopic plate 10 is rotated along an axis perpendicular to the plate surface to move to the first state or the second state.
The light splitting device includes a rotation driving portion, which is connected to the light splitting plate 10 to drive the light splitting plate 10 to rotate, so as to adjust an included angle between a connection line between the first light hole 111 and the second light hole 112 and the first direction.
As shown in fig. 3, the distance projected by the light-transmitting holes 11 in the first direction is the pitch of the scribing line. As shown in fig. 5 and 6, the pitch of the scribing line can be controlled by adjusting the projection distance of the light transmission hole 11 in the first direction by rotating the spectroscopic plate 10.
Preferably, in the process of moving the spectroscopic plate 10 from the first state to the second state, the distance between the projections of the first light transmission hole 111 and the second light transmission hole 112 of the spectroscopic plate 10 in the second state in the first direction is the largest, the distance between the projections of the first light transmission hole 111 and the second light transmission hole 112 of the spectroscopic plate 10 in the first state in the first direction is the smallest, and the angle by which the spectroscopic plate 10 is rotated from the first state to the second state is greater than 0 ° and less than 90 °.
In practical application, the distance between the projections of the first light-transmitting hole 111 and the second light-transmitting hole 112 in the first direction cannot be smaller than the sum of the radii of the first light-transmitting hole and the second light-transmitting hole, that is, b <2r, and if the maximum rotation angle is θ, a × cos θ < b needs to be satisfied.
Preferably, the rotation center of the spectroscopic plate 10 is the center of a circle circumscribing the plurality of light transmission holes 11.
If the plurality of light-transmitting holes 11 are linearly arranged, the rotation center of the light-splitting plate 10 is the midpoint of the connecting line of the plurality of light-shielding holes 11.
In the embodiment shown in fig. 5, the light-splitting plate 10 is circular, the plurality of light-transmitting holes 11 are symmetrically arranged around the center of the light-splitting plate 10, and the light-splitting plate 10 rotates around the center of the light-splitting plate 10.
Preferably, the spectroscopic plate 10 has a second state in which a line connecting the first light transmission hole 111 and the second light transmission hole 112 of the spectroscopic plate 10 is parallel to the first direction.
Referring to the embodiment shown in fig. 5, the light-splitting plate 10 is provided with 4 light-transmitting holes 11, the solid line indicates the distribution of the light-transmitting holes 11 when the light-splitting plate 10 is in the second state, it can be seen that the distance of the projection of the light-transmitting holes 11 in the first direction is a, and the distance between the scribe lines after scribing in this state is a-2 r; the light transmission holes 11 shown by the dotted line are distributed when the spectroscopic plate 10 is in the first state, and it can be seen that the projection distance of the light transmission holes 11 in the first direction is the smallest b, and the distance between the scribe lines after scribing in this state is also the smallest b-2 r.
Preferably, the light splitting device further comprises a rotating portion connected to the light shielding plate 20 for rotating the light shielding plate 20 to change an angle between the first edge 21 and the first direction.
In some embodiments not shown in the drawings, the light shielding plate 20 is further connected to a rotating part, the rotating part may be disposed between the light shielding plate 20 and the driving part 50, and is used for rotating the light shielding plate 20 to change the inclination angle of the first edge 21, so as to match with the rotation of the spectroscopic plate 10, if the rotation angle of the spectroscopic plate 10 is small, that is, the included angle between the connection line between the first light transmission hole 111 and the second light transmission hole 112 and the first direction is large, the light shielding plate 20 may be driven by the rotating part, so that the included angle between the first edge 21 and the first direction is large, and the value of the allowable error range X2 of the movement of the light shielding plate 20 is controlled in a reasonable interval, thereby avoiding that the processing efficiency is affected by the excessive X2.
In an embodiment of the light splitting apparatus of the present invention, the distance between the light holes 11 on the light splitting plate 10 is 10mm, the diameter of the light holes is 1mm, and if the light splitting plate 10 splits the laser into light beams with a distance of 6mm, X1 is 4mm, X2 is 13.3mm, and the error range of the operation of the light shielding plate 20 increases. If the light shielding plate 20 does not move 1mm for 300 times, the existing light splitting device needs to be calibrated once when operating 1200 times, and the light splitting device of the invention needs to be calibrated once when operating 3990 times, so that the frequency of shutdown calibration is reduced, the labor cost is saved, and the production efficiency is improved.
According to another aspect of the present invention, there is also provided a laser generating apparatus, as shown in fig. 3, the laser generating apparatus includes a light source 30 and a light splitting device, the light splitting device is the above-mentioned light splitting device, and light emitted from the light source 30 is emitted through the light-transmitting hole 11 of the light splitting plate 10 of the light splitting device.
In this embodiment, the light source 30 is a laser light source, and the laser light emitted from the light source 30 is reflected by the reflector 40 and irradiated onto the beam splitter, and then divided into a plurality of laser beams by the beam splitter to perform laser scribing on the article to be scribed 100.
According to another aspect of the invention, there is also provided a scribing apparatus comprising a laser generating device, the laser generating device comprising the light splitting device, or the laser generating device being the laser generating device.
The scribing equipment comprises an object stage for bearing a workpiece to be processed and a positioning clamp for positioning and fixing the workpiece to be processed. After the workpiece to be machined enters the scribing equipment, the workpiece to be machined is fixed on the objective table by the positioning fixture, and then the laser generating device emits laser to remove the film layer on the workpiece to be machined so as to form a scribing line, namely scribing operation.
The scribing equipment can be applied to the production of photovoltaic cell panels, such as scribing of coating layers on glass substrates. And may be used in other fields including, but not limited to, chip manufacturing field, precision machining field, etc.
Although the embodiments of the present invention have been described above, the above description is only for the convenience of understanding the present invention, and is not intended to limit the present invention. It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (10)
1. The light splitting device comprises a light splitting plate (10), wherein a plurality of light holes (11) are formed in the light splitting plate (10); it is characterized in that the preparation method is characterized in that,
the light splitting device further comprises a light shielding plate (20), wherein the light shielding plate (20) has a first position and a second position, when the light shielding plate (20) is located at the first position, the light shielding plate (20) opens all the light transmission holes (11), when the light shielding plate (20) is located at the second position, the light shielding plate (20) shields one or more light transmission holes (11), and the light shielding plate (20) can move from the first position to the second position along a first direction;
the plurality of light transmission holes (11) include a first light transmission hole (111) and a second light transmission hole (112), and the spectroscopic plate (10) has a first state in which a line connecting the first light transmission hole (111) and the second light transmission hole (112) is inclined with respect to the first direction;
the light shielding plate (20) includes a first edge (21), the first edge (21) first shields the light transmission hole (11) during the movement of the light shielding plate (20) from the first position to the second position, the first edge (21) is inclined with respect to the first direction, and the inclination direction of the first edge (21) with respect to the first direction is opposite to the inclination direction of a connection line between the first light transmission hole (111) and the second light transmission hole (112) of the spectroscope (10) in the first state with respect to the first direction.
2. A spectroscopic apparatus according to claim 1 wherein the first edge (21) of the light shielding plate (20) makes an angle with a line connecting the first light transmitting hole (111) and the second light transmitting hole (112) of the spectroscopic plate (10) in the first state in a range of less than 180 ° and not less than 45 °.
3. A spectroscopic device according to claim 2, wherein the first edge (21) of the light shield (20) makes an angle of 90 ° with the line between the first light transmission hole (111) and the second light transmission hole (112) of the spectroscopic plate (10) in the first state.
4. A spectroscopic apparatus according to claim 1, wherein the spectroscopic plate (10) has a second state in which a distance between projections of the first light transmission hole (111) and the second light transmission hole (112) of the spectroscopic plate (10) in the first direction is larger than a distance between projections of the first light transmission hole (111) and the second light transmission hole (112) of the spectroscopic plate (10) in the first state in the first direction, and the spectroscopic plate (10) is rotated along an axis perpendicular to a plate surface to move to the first state or the second state.
5. A spectroscopic device according to claim 4, wherein during the movement of the spectroscopic plate (10) from the first state to the second state, the distance between the projections of the first light transmitting hole (111) and the second light transmitting hole (112) of the spectroscopic plate (10) in the first direction is largest in the second state, the distance between the projections of the first light transmitting hole (111) and the second light transmitting hole (112) in the first state in the first direction is smallest in the first state, and the angle by which the spectroscopic plate (10) is rotated from the first state to the second state is larger than 0 ° and smaller than 90 °.
6. A spectroscopic device according to claim 4, wherein the rotation center of the spectroscopic plate (10) is the center of a circle circumscribing the plurality of light transmission holes (11).
7. A spectroscopic device according to claim 1, wherein the spectroscopic plate (10) has a second state, and a line between the first light transmitting hole (111) and the second light transmitting hole (112) of the spectroscopic plate (10) in the second state is parallel to the first direction.
8. A spectroscopic device according to any one of claims 1 to 7 further comprising a rotation portion connected to the shutter plate (20) for rotating the shutter plate (20) to change the angle between the first edge (21) and the first direction.
9. A laser light generating device comprising a light source (30) and a light splitting device, wherein the light splitting device is the light splitting device according to any one of claims 1 to 8, and light emitted from the light source (30) is emitted through a light-transmitting hole (11) of a light splitting plate (10) of the light splitting device.
10. A scribing installation comprising a laser generating device, characterized in that the laser generating device comprises a light splitting device according to any one of claims 1 to 8, or is a laser generating device according to claim 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910250991.1A CN111751999A (en) | 2019-03-29 | 2019-03-29 | Spectroscopic device, laser generating device, and scribing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910250991.1A CN111751999A (en) | 2019-03-29 | 2019-03-29 | Spectroscopic device, laser generating device, and scribing apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111751999A true CN111751999A (en) | 2020-10-09 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910250991.1A Pending CN111751999A (en) | 2019-03-29 | 2019-03-29 | Spectroscopic device, laser generating device, and scribing apparatus |
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| Country | Link |
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| CN (1) | CN111751999A (en) |
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2019
- 2019-03-29 CN CN201910250991.1A patent/CN111751999A/en active Pending
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