CN111736356A - Variable multi-beam MOPA laser output system and method based on light field regulation - Google Patents
Variable multi-beam MOPA laser output system and method based on light field regulation Download PDFInfo
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Abstract
The invention provides a variable multi-beam MOPA laser output system and method based on light field regulation, which comprises the following steps: expanding the emitted laser; modulating the expanded laser by utilizing a hologram to obtain multi-beam laser with preset light field distribution; performing energy amplification on the multi-beam laser to obtain high-power multi-beam laser; the laser can flexibly regulate and control light beams and amplify power, can meet various laser applications, is a laser technology with high flexibility, high power and high quality, and can well meet the requirement of flexible manufacturing.
Description
Technical Field
The invention belongs to the technical field of laser amplification and laser application, and particularly relates to a variable multi-beam MOPA laser output system and method based on light field regulation.
Background
The laser processing has the characteristics of high precision, small heat affected zone, wide range of processing materials and the like, and is widely applied to the field of industrial processing. The laser is an essential key component in laser processing, and determines the precision level of laser processing. In the laser processing field, it is often necessary to process large-area groups of holes with various shapes and quantities, and the groups of holes have extremely high requirements on the precision and quality of the micro holes, such as depth-diameter ratio, roundness, taper and the like, and also require high overall processing efficiency. Moreover, researches show that different light field distributions such as Bessel light, vector light, flat top light, super Gaussian light and the like have different processing effects on laser processing, and the precision and the quality of the laser processing can be further improved. Therefore, laser processing using multi-beam lasers having different optical field distributions can realize high-precision, high-quality, and high-efficiency laser processing.
Laser emitted by lasers produced at home and abroad is a single-point Gaussian beam, and the laser processing process often has the defects of low processing efficiency, low energy utilization rate, poor adaptation and the like, so various complex optical elements are often required to be added for beam shaping and laser beam splitting after laser is emitted, and the energy after beam shaping is limited due to limited damage thresholds of optical shaping elements such as a spatial light modulator, a digital micromirror device and the like, so that high-power, high-efficiency and high-precision laser processing is difficult to realize, and therefore, the research on the variable multi-beam MOPA laser output system and method based on light field regulation and control has important significance.
Disclosure of Invention
The invention aims to provide a variable multi-beam MOPA laser output system and method based on light field regulation, which solve the defects of single laser output mode, high modulation complexity and insufficient energy utilization in the current laser technology.
In order to achieve the purpose, the invention adopts the technical scheme that:
the invention provides a variable multi-beam MOPA laser output method based on light field regulation, which comprises the following steps:
expanding the emitted laser;
modulating the expanded laser by utilizing a hologram to obtain multi-beam laser with preset light field distribution;
and amplifying the energy of the multi-beam laser to obtain the high-power multi-beam laser.
Preferably, the optical modulation module is used for expanding the beam and modulating the hologram of the laser emitted by the seed laser to obtain multi-beam laser with preset light field distribution; and then, the obtained multi-beam laser is incident to a laser amplification module, and the energy of the multi-beam laser is amplified through the laser amplification module to obtain the high-power multi-beam laser.
Preferably, the optical modulation module comprises a lambda/2 wave plate, a beam expander, a diffractive optical element and a fourier lens, wherein laser output by the seed laser is incident to the beam expander through the lambda/2 wave plate; the beam expanded by the beam expander is incident to the diffraction optical element; the multi-beam laser output by the diffraction optical element is incident to the laser amplification module through the Fourier lens.
Preferably, the laser amplification module comprises a first polarization beam splitter, a laser amplification unit and a pump source, wherein the multi-beam laser output by the optical modulation module is incident to the first polarization beam splitter; the multi-beam laser output by the first polarization beam splitter is incident to the connecting laser amplification unit; and laser output by the pumping source is incident to the laser amplification unit.
Preferably, the laser amplification unit comprises a gain medium, a lambda/4 wave plate and a second reflecting mirror, wherein the multi-beam laser output by the first polarization beam splitter is incident to the second reflecting mirror after passing through the gain medium and the lambda/4 wave plate in sequence; the laser output by the second reflecting mirror is reflected to the first polarization beam splitter through the lambda/4 wave plate and the gain medium in sequence; and laser output by the pump source is incident to the gain medium.
Preferably, the laser amplification unit comprises an optical parametric amplifier, a λ/4 wave plate and a second polarization beam splitter, wherein the laser output by the first polarization beam splitter passes through the optical parametric amplifier and the λ/4 wave plate in sequence and is incident to the second polarization beam splitter; the laser output by the second polarization beam splitter is reflected to the first polarization beam splitter through the lambda/4 wave plate and the optical parametric amplifier in sequence; and laser output by the pump source is incident to the second polarization beam splitter.
A variable multi-beam MOPA laser output system based on light field regulation comprises a seed laser, an optical modulation module and a laser amplification module, wherein the seed laser is used for generating laser and is incident on the beam modulation module; the light beam modulation module is used for modulating the received laser to generate multi-beam laser with preset light field distribution; the obtained multi-beam laser is incident to a laser amplification module; the laser amplification module is used for carrying out energy amplification on the received multi-beam laser to obtain high-power multi-beam laser output.
Preferably, the optical modulation module comprises a lambda/2 wave plate, a beam expander, a diffractive optical element and a fourier lens, wherein laser output by the seed laser is incident to the beam expander through the lambda/2 wave plate; the beam expanded by the beam expander is incident to the diffraction optical element; the multi-beam laser output by the diffraction optical element is incident to the laser amplification module through the Fourier lens.
Preferably, the laser amplification module comprises a first polarization beam splitter, a laser amplification unit and a pump source, wherein the multi-beam laser output by the optical modulation module is incident to the first polarization beam splitter; the multi-beam laser output by the first polarization beam splitter is incident to the connecting laser amplification unit; and laser output by the pumping source is incident to the laser amplification unit.
Preferably, the laser amplification unit comprises an optical parametric amplifier, a λ/4 wave plate and a second polarization beam splitter, wherein the laser output by the first polarization beam splitter passes through the optical parametric amplifier and the λ/4 wave plate in sequence and is incident to the second polarization beam splitter; the laser output by the second polarization beam splitter is reflected to the first polarization beam splitter through the lambda/4 wave plate and the optical parametric amplifier in sequence; and laser output by the pump source is incident to the second polarization beam splitter.
Compared with the prior art, the invention has the beneficial effects that:
according to the variable multi-beam MOPA laser output system and method based on light field regulation, the light field distribution of the laser beams can be freely regulated and controlled through the change of the hologram loaded by the diffractive optical element, and variable multi-beam laser output is realized; the laser amplification module is adopted to amplify the multiple beams, so that the influence caused by the threshold value and the diffraction loss of the beam shaping element is reduced, and high-power and high-quality multiple-beam laser output is realized; in addition, the invention can output any light field distribution according to the user requirement through space light shaping, and can directly access an optical element at the rear of the system for application. The laser device can flexibly regulate and control the light beam and amplify the power, can meet various laser applications, is a laser device technology with high flexibility, high power and high quality, and can well meet the requirement of flexible manufacturing.
Drawings
FIG. 1 is a schematic diagram of a system according to an embodiment of the present invention;
FIG. 2 is a system configuration diagram of embodiment 1 of the present invention
FIG. 3 is a system configuration diagram of embodiment 2 of the present invention
FIG. 4 is a system configuration diagram of embodiment 3 of the present invention
FIG. 5 is a 5-hologram generated by a computational holography algorithm according to an embodiment of the present invention;
the laser device comprises a seed laser 1, a seed laser 2, an optical modulation module 3, a laser amplification module 4, a computer 6, a spatial light modulator 8, a laser shaping beam splitter 9, a gain medium 10, a pumping source 11, a lambda/2 wave plate 12, a beam expander 13, a first reflector 14, a Fourier lens 15, a first polarization beam splitter 16, a lambda/4 wave plate 17, a second laser reflector 18, an optical parametric amplifier 19 and a second polarization beam splitter.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
In order to solve the defects of single laser output mode, high modulation complexity, insufficient energy utilization and the like in the current laser technology, the invention provides a variable multi-beam MOPA laser output system and method based on light field regulation.
As shown in fig. 1, the variable multi-beam MOPA laser output system based on optical field regulation provided by the present invention includes a basic module including a seed laser 1, an optical modulation module 2, a laser amplification module 3 and a computer 4, wherein the seed laser 1 is used for generating laser light and making the laser light incident on the beam modulation module 2; the beam modulation module 2 is used for modulating the received laser to generate multi-beam laser with preset light field distribution; the obtained multi-beam laser is incident to the laser amplification module 3; the laser amplification module 3 is used for performing energy amplification on the received multi-beam laser to obtain high-power multi-beam laser output; the computer 4 is respectively connected with the seed laser 1, the optical modulation module 2 and the laser amplification module 3 and is used for controlling the generation of laser, the regulation and control of an optical field and the amplification power of the laser.
The pulse width of the seed laser 1 can be changed according to requirements; a continuous laser, a quasi-continuous laser, a nanosecond laser, a picosecond laser and a femtosecond laser can be used as seed sources, and the energy and the frequency of the seed lasers can be adjusted.
The optical modulation module 2 comprises a diffractive optical element which is a spatial light modulator 6, a digital micro-mirror device or a laser shaping beam splitter 8.
The laser amplification module 3 mainly comprises a laser gain medium and a pumping source, wherein the laser gain medium mainly comprises a laser crystal (such as Nd: YAG, Nd: YVO4, titanium-doped sapphire and other solid crystals), a nonlinear crystal (LBO crystal or KDP crystal and other crystals) and an optical fiber gain medium (such as Yb3+ gain fiber, Nd3+ gain fiber and other crystals).
The pump source 10 is primarily a semiconductor pump laser or flash lamp pump.
The pumping mode of the laser amplification module 3 can adopt end pumping or side pumping according to the beam quality and energy requirements, and adopt the end pumping to output multi-beam high-quality laser and adopt the side pumping to output multi-beam high-energy laser.
The optical modulation module 2 comprises a lambda/2 wave plate 11, a beam expander 12, a diffractive optical element and a Fourier lens 14, wherein laser output by the seed laser 1 is incident to the beam expander 12 through the lambda/2 wave plate 11; the expanded light beam output by the beam expander 12 is incident on the diffractive optical element; the multibeam laser light output from the diffractive optical element is incident on the laser amplification module 3 through the fourier lens 14.
The diffraction optical element is a spatial light modulator 6, a digital micromirror device or a laser shaping beam splitter 8, wherein holograms are loaded on the spatial light modulator 6 and the digital micromirror device; when the diffractive optical element is the spatial light modulator 6 or the digital micromirror device, and when the diffractive optical element is the spatial light modulator 8 or the digital micromirror device, the light beam output by the beam expander 14 is incident to the spatial light modulator 8 or the digital micromirror device through the first reflecting mirror 13.
The laser amplification module 3 comprises a first polarization beam splitter 15, a laser amplification unit and a pumping source 10, wherein the multi-beam laser output by the optical modulation module 2 is incident to the first polarization beam splitter 15; the multi-beam laser output by the first polarization beam splitter 15 is incident to the connecting laser amplification unit; the laser light output from the pump source 10 is incident on a laser amplification unit.
The laser amplification unit comprises a gain medium 9, a lambda/4 wave plate 16 and a second reflecting mirror 17, wherein the multi-beam laser output by the first polarization beam splitter 15 sequentially passes through the gain medium 9 and the lambda/4 wave plate 16 to be incident on the second reflecting mirror 17; the laser output by the second reflecting mirror 17 is reflected to the first polarization beam splitter 15 through the lambda/4 wave plate 16 and the gain medium 9 in sequence; the laser light output from the pump source 10 is incident on the gain medium 9.
The laser amplification unit comprises an optical parametric amplifier 18, a lambda/4 wave plate 16 and a second polarization beam splitter 19, wherein laser output by the first polarization beam splitter 15 sequentially passes through the optical parametric amplifier 18 and the lambda/4 wave plate 16 to be incident to the second polarization beam splitter 19; the laser output by the second polarization beam splitter 19 is reflected to the first polarization beam splitter 15 through the lambda/4 wave plate 16 and the optical parametric amplifier 18 in sequence; the laser light output from the pump source 10 is incident on the second polarization beam splitter 19.
Example 1
As shown in fig. 2, the method for outputting variable multi-beam MOPA laser based on optical field regulation provided by the present invention includes the following steps:
the computed holography algorithm shown in step 1 is an iterative fourier transform algorithm, such as GS algorithm, GSW algorithm, ORA algorithm, and MRAF algorithm.
The spatial light modulator 6 loaded with the hologram in the step 1 can regulate and control the amplitude, the phase and the polarization state of the light beam; the digital micro-mirror device loaded with the hologram can regulate and control the amplitude and the phase of the light beam.
and 3, the modulated multi-beam is incident into the gain medium 9, the first polarization beam splitter 15 and the second reflector 17 serve as resonant cavities, the pumping source 10 is used for generating population inversion or completing phase matching with the laser emitted by the seed laser 1, the lambda/4 wave plate 16 is used for changing the polarization state of the laser, and the multi-beam is continuously folded back in the polarization beam splitter 15 and the second reflector 17, so that high-quality and high-power multi-beam laser is generated.
Example 2
As shown in fig. 3, the method for outputting variable multi-beam MOPA laser based on optical field regulation provided by the present invention includes the following steps:
and 3, the modulated multi-beam is incident into the gain medium 9, the first polarization beam splitter 15 and the second reflector 17 serve as resonant cavities, the pumping source 10 is used for generating population inversion or completing phase matching with the laser emitted by the seed laser 1, the lambda/4 wave plate 16 is used for changing the polarization state of the laser, and the multi-beam is continuously folded back in the first polarization beam splitter 15 and the second reflector 17, so that high-quality and high-power multi-beam laser is generated.
Example 3
As shown in fig. 4, the method for outputting variable multi-beam MOPA laser based on optical field regulation provided by the present invention includes the following steps:
and 3, the modulated multiple beams are incident into the optical parametric amplifier 18, the first polarization beam splitter 15 and the second polarization beam splitter 19 serve as resonant cavities, the pumping source 10 and the seed laser generate phase matching in the optical parametric amplifier 18 for power amplification, the lambda/4 wave plate 16 is used for changing the polarization state of the laser, and the multiple beams are continuously folded back in the first polarization beam splitter 15 and the second polarization beam splitter 19, so that the high-quality and high-power multiple beam laser is generated.
Although the seed laser 1, the optical modulation module 2, the laser amplification module 3, the computer 4, the spatial light modulator 6, the laser shaping beam splitter 8, the gain medium 9, the pump source 10, the λ/2 wave plate 11, the beam expander 12, the first mirror 13, the fourier lens 14, the first polarization beam splitter 15, the λ/4 wave plate 16, the second laser mirror 17, the optical parametric amplifier 18, and the second polarization beam splitter 19 are used more extensively in this specification, the possibility of using other terms is not excluded, and these terms are used merely to more conveniently describe the essence of the present invention, and they are to be construed as being against the spirit of the present invention with any additional limitation.
It should be understood that parts of the specification not set forth in detail are well within the prior art.
The above embodiments are preferred embodiments of the present invention, but the present invention is not limited to the above embodiments, and any other changes, modifications, substitutions, combinations, and simplifications which do not depart from the spirit and principle of the present invention and are intended to be equivalent substitutions are included in the scope of the present invention.
Claims (10)
1. A variable multi-beam MOPA laser output method based on optical field regulation is characterized by comprising the following steps:
expanding the emitted laser;
modulating the expanded laser by utilizing a hologram to obtain multi-beam laser with preset light field distribution;
and amplifying the energy of the multi-beam laser to obtain the high-power multi-beam laser.
2. The variable multi-beam MOPA laser output method based on light field regulation and control of claim 1 is characterized in that the laser emitted by the seed laser (1) is expanded and modulated by a hologram through the optical modulation module (2) to obtain multi-beam laser with preset light field distribution; then, the obtained multi-beam laser is incident to a laser amplification module (3), and the energy of the multi-beam laser is amplified through the laser amplification module (3), so that the high-power multi-beam laser is obtained.
3. The variable multi-beam MOPA laser output method based on the light field regulation is characterized in that the optical modulation module (2) comprises a lambda/2 wave plate (11), a beam expander (12), a diffractive optical element and a Fourier lens (14), wherein laser output by the seed laser (1) is incident to the beam expander (12) through the lambda/2 wave plate (11); the beam expander (12) outputs expanded light beams to be incident to the diffraction optical element; the multibeam laser light output from the diffractive optical element is incident on a laser amplification module (3) through a Fourier lens (14).
4. The variable multi-beam MOPA laser output method based on the optical field regulation is characterized in that the laser amplification module (3) comprises a first polarization beam splitter (15), a laser amplification unit and a pump source (10), wherein the multi-beam laser output by the optical modulation module (2) is incident to the first polarization beam splitter (15); the multi-beam laser output by the first polarization beam splitter (15) is incident to a connecting laser amplification unit; the laser output by the pump source (10) is incident to a laser amplification unit.
5. The variable multi-beam MOPA laser output method based on the light field regulation is characterized in that a laser amplification unit comprises a gain medium (9), a lambda/4 wave plate (16) and a second reflecting mirror (17), wherein the multi-beam laser output by the first polarization beam splitter (15) is incident to the second reflecting mirror (17) through the gain medium (9) and the lambda/4 wave plate (16) in sequence; the laser output by the second reflector (17) is reflected to the first polarization beam splitter (15) through the lambda/4 wave plate (16) and the gain medium (9) in sequence; the laser light output by the pump source (10) is incident on the gain medium (9).
6. The variable multi-beam MOPA laser output method based on the light field regulation is characterized in that a laser amplification unit comprises an optical parametric amplifier (18), a lambda/4 wave plate (16) and a second polarization beam splitter (19), wherein laser output by the first polarization beam splitter (15) sequentially passes through the optical parametric amplifier (18) and the lambda/4 wave plate (16) and is incident to the second polarization beam splitter (19); the laser output by the second polarization beam splitter (19) is reflected to the first polarization beam splitter (15) through a lambda/4 wave plate (16) and an optical parametric amplifier (18) in sequence; the laser light output by the pump source (10) is incident to a second polarization beam splitter (19).
7. A variable multi-beam MOPA laser output system based on optical field regulation is characterized by comprising a seed laser (1), an optical modulation module (2) and a laser amplification module (3), wherein the seed laser (1) is used for generating laser and enabling the laser to be incident on the beam modulation module (2); the light beam modulation module (2) is used for modulating the received laser to generate multi-beam laser with preset light field distribution; the obtained multi-beam laser is incident to a laser amplification module (3); the laser amplification module (3) is used for carrying out energy amplification on the received multi-beam laser to obtain high-power multi-beam laser output.
8. The variable multi-beam MOPA laser output system based on the light field regulation is characterized in that the optical modulation module (2) comprises a lambda/2 wave plate (11), a beam expander (12), a diffraction optical element and a Fourier lens (14), wherein laser output by the seed laser (1) is incident to the beam expander (12) through the lambda/2 wave plate (11); the beam expander (12) outputs expanded light beams to be incident to the diffraction optical element; the multibeam laser light output from the diffractive optical element is incident on a laser amplification module (3) through a Fourier lens (14).
9. The variable multi-beam MOPA laser output system based on optical field regulation according to claim 7, wherein the laser amplification module (3) comprises a first polarization beam splitter (15), a laser amplification unit and a pump source (10), wherein the multi-beam laser output by the optical modulation module (2) is incident to the first polarization beam splitter (15); the multi-beam laser output by the first polarization beam splitter (15) is incident to a connecting laser amplification unit; the laser output by the pump source (10) is incident to a laser amplification unit.
10. The variable multi-beam MOPA laser output system based on light field regulation and control of claim 9 is characterized in that the laser amplification unit comprises an optical parametric amplifier (18), a lambda/4 wave plate (16) and a second polarization beam splitter (19), wherein the laser output by the first polarization beam splitter (15) sequentially passes through the optical parametric amplifier (18) and the lambda/4 wave plate (16) and is incident to the second polarization beam splitter (19); the laser output by the second polarization beam splitter (19) is reflected to the first polarization beam splitter (15) through a lambda/4 wave plate (16) and an optical parametric amplifier (18) in sequence; the laser light output by the pump source (10) is incident to a second polarization beam splitter (19).
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| CN113219805A (en) * | 2021-04-23 | 2021-08-06 | 西安中科微星光电科技有限公司 | Linear regulation and control method and device for planar multi-beam laser and storage medium |
| CN114185175A (en) * | 2021-11-23 | 2022-03-15 | 西安中科微星光电科技有限公司 | Laser beam shaping device and method |
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