CN111735571A - Molecular pump dynamic balance adjusting device and adjusting method - Google Patents
Molecular pump dynamic balance adjusting device and adjusting method Download PDFInfo
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- CN111735571A CN111735571A CN202010695942.1A CN202010695942A CN111735571A CN 111735571 A CN111735571 A CN 111735571A CN 202010695942 A CN202010695942 A CN 202010695942A CN 111735571 A CN111735571 A CN 111735571A
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- 239000000725 suspension Substances 0.000 claims abstract description 34
- 238000001514 detection method Methods 0.000 claims abstract description 23
- 238000012360 testing method Methods 0.000 claims abstract description 10
- 238000006073 displacement reaction Methods 0.000 claims description 31
- 230000001939 inductive effect Effects 0.000 claims description 31
- 238000007789 sealing Methods 0.000 claims description 9
- 238000009826 distribution Methods 0.000 claims description 7
- 239000000523 sample Substances 0.000 claims description 5
- 238000005086 pumping Methods 0.000 claims description 4
- 230000001965 increasing effect Effects 0.000 description 2
- 238000010923 batch production Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M1/00—Testing static or dynamic balance of machines or structures
- G01M1/30—Compensating imbalance
- G01M1/36—Compensating imbalance by adjusting position of masses built-in the body to be tested
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Abstract
The invention provides a molecular pump dynamic balance adjusting device and an adjusting method, which comprises a magnetic suspension motor, wherein a vacuum cover is arranged on one side of the magnetic suspension motor, the vacuum cover is connected to a mechanical pump through a vacuum pipeline, an impeller and an electromagnetic spindle are arranged in the vacuum cover, the spindle of the magnetic suspension motor is connected to one end of the electromagnetic spindle, the other end of the electromagnetic spindle is provided with the impeller, the electromagnetic spindle is provided with an upper radial bearing detection position and a lower radial bearing detection position, the end part of the impeller is provided with a first dynamic balance weighting hole and a second dynamic balance weighting hole, a detection unit is arranged outside the vacuum cover and used for detecting the unbalance of the electromagnetic spindle and transmitting signals to an upper computer. The dynamic balance adjusting device and the adjusting method of the molecular pump greatly improve the dynamic balance testing efficiency of the molecular pump, have high precision and save a large amount of debugging time.
Description
Technical Field
The invention belongs to the field of vacuum obtaining equipment, and particularly relates to a dynamic balance adjusting device and method for a molecular pump.
Background
The molecular pump belongs to a high-precision precise instrument, is a high-end product in vacuum obtaining equipment, and has the working principle that gas molecules in a working environment are directionally beaten by an impeller rotating at a high speed, so that the gas molecules are discharged out of a vacuum cavity according to design requirements to obtain a clean high-vacuum environment. Therefore, the requirement of the molecular pump impeller on the rotating speed is high, the linear velocity of the edge of the impeller is required to be more than 400m/s, and the molecular pump is required not to have large vibration, so that the relative vibration quantity of the pump opening is required to be controlled within 0.1 μm. Under the requirement, the dynamic balance precision of the molecular pump impeller generally needs to reach more than G0.4. The existing molecular pump dynamic balance method mainly comprises two types: one method is to use a conventional dynamic balancing machine to adjust at a low speed, such as 3000rpm, and the method is simple to operate, but the effect is not ideal, because the operating speed of the molecular pump is generally above 20000rpm, the state of the impeller at the moment is not identical to the state at the low speed, and the dynamic balancing precision of the method is difficult to reach G0.4 and only can be used marginally. The other is the dynamic balance of the machine, which needs to be operated by a high-precision dynamic balancer or displacement monitoring software of a magnetic suspension molecular pump, the method can realize the dynamic balance at a high speed, ensure the dynamic balance precision of the molecular pump at a rated rotating speed and generally easily reach more than G0.4, but the method is time-consuming, because the time for the molecular pump to accelerate and decelerate is long, generally about 20 minutes is needed for accelerating and decelerating once, and the time for completing the dynamic balance of one pump is almost half a day; the operation is also relatively complex, requiring disassembly of the pump casing back and forth to address the unbalanced mass of the impeller.
Disclosure of Invention
In view of the above, the present invention is directed to a dynamic balance adjustment device for a molecular pump, so as to solve the problems of low dynamic balance precision, complex operation and long time consumption of the molecular pump.
In order to achieve the purpose, the technical scheme of the invention is realized as follows:
the utility model provides a molecular pump dynamic balance adjusting device, including magnetic suspension motor, mechanical pump, impeller and electromagnetism main shaft, magnetic suspension motor side-mounting vacuum cover, vacuum cover is connected to mechanical pump through the vacuum pipe, inside impeller and the electromagnetism main shaft of being equipped with of vacuum cover, magnetic suspension motor's spindle connection is to electromagnetism main shaft one end, electromagnetism main shaft other end installation impeller, it detects position and lower journal bearing detection position to be equipped with radial bearing on the electromagnetism main shaft, the tip of impeller is equipped with first dynamic balance and adds heavy hole and second dynamic balance and add heavy hole, the vacuum cover outside is equipped with detecting element, detecting element is used for detecting the unbalanced mass of electromagnetism main shaft, and transmit the signal for the host computer.
Further, the upper computer is a computer.
Furthermore, a vacuum sealing device is arranged between the spindle of the magnetic suspension motor and the shell of the magnetic suspension motor.
Further, the mechanical pump is a backing pump.
Further, the vacuum pipeline is a corrugated pipe.
Furthermore, the detection unit is an inductive displacement sensor, the inductive displacement sensor comprises a first inductive displacement sensor and a second inductive displacement sensor, the first inductive displacement sensor is aligned with the lower radial bearing detection position, and the second inductive displacement sensor is aligned with the upper radial bearing detection position.
Compared with the prior art, the molecular pump dynamic balance adjusting device has the following advantages:
(1) according to the molecular pump dynamic balance adjusting device, the impeller and the electromagnetic main shaft are used as a whole to perform dynamic balance adjustment, so that the impeller and the electromagnetic main shaft can be separated from the pump body independently to realize whole dynamic balance, high-speed dynamic balance adjustment can be realized quickly, and the dynamic balance efficiency is improved greatly.
(2) The molecular pump dynamic balance adjusting device is simple to operate, easy for batch production, and beneficial to reducing the labor input of enterprises, the production cost and the loss of other supporting resources.
The invention also aims to provide a dynamic balance adjusting method of the molecular pump, so as to solve the problems of low dynamic balance precision, complex operation and long time consumption of the molecular pump.
In order to achieve the purpose, the technical scheme of the invention is realized as follows:
a dynamic balance adjusting method of a molecular pump specifically comprises the following steps:
the method comprises the following steps: the impeller and the electromagnetic spindle are fixed on a magnetic suspension motor as a whole;
step two: aligning the probe of the inductive displacement sensor to the inductive part of the electromagnetic main shaft and connecting the probe to an upper computer;
step three: starting a magnetic suspension motor to enable the impeller and the electromagnetic spindle to reach a low-speed dynamic balance test rotating speed, wherein the low-speed rotating speed range is 3000rpm to 5000 rpm;
step four: the inductive displacement sensor transmits the acquired data to an upper computer, the upper computer judges whether the unbalanced mass of the whole impeller and the electromagnetic main shaft is less than 1 gram or not, and if the unbalanced mass is more than 1 gram, dynamic balance adjustment is carried out; if the unbalanced mass is less than 1 g, directly entering the step five;
step five: roughly pumping the vacuum cover to a vacuum degree of 10Pa by using a mechanical pump, enabling the rotating speed of the impeller and the electromagnetic main shaft to reach a rated operating rotating speed by using a magnetic suspension motor, calculating by using an upper computer to obtain unbalanced mass distribution, judging whether the integral unbalance of the impeller and the electromagnetic main shaft is less than 0.001 g or not, and finishing the test if the integral unbalance of the impeller and the electromagnetic main shaft is less than 0.001 g; and if the unbalanced mass is more than 0.001 g, the unbalanced mass of the impeller and the electromagnetic main shaft is adjusted in a weighting mode until the unbalanced mass is less than 0.001 g.
Further, the specific process of dynamic balance adjustment is as follows: and carrying out low-speed dynamic balance debugging on the impeller and the electromagnetic main shaft in a rigid state, wherein the low-speed rotating speed range is 3000 rpm-5000 rpm, and weighting compensation is adopted for the unbalanced mass until the unbalanced mass is less than 1 g.
Further, the software installed in the upper computer is matlab computing software.
Compared with the prior art, the method for adjusting the dynamic balance of the molecular pump has the following advantages:
(1) the dynamic balance adjusting method of the molecular pump is driven by a high-power high-speed magnetic suspension motor, the impeller and the electromagnetic main shaft are arranged in the vacuum cover, the displacement vibration quantity of the impeller and the electromagnetic main shaft is read by the inductive displacement sensor, the unbalanced mass distribution is calculated by adopting a matlab algorithm, and the unbalanced mass distribution is found and then the unbalanced mass is adjusted by adopting a weighting method, so that the dynamic balance testing efficiency and the precision of the molecular pump are greatly improved, a large amount of debugging time is saved, and the overall technical level of the industry is favorably improved.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate an embodiment of the invention and, together with the description, serve to explain the invention and not to limit the invention. In the drawings:
FIG. 1 is a top view of a dynamic balance adjustment apparatus of a molecular pump when a vacuum pump opens an upper cover according to an embodiment of the present invention;
FIG. 2 is a cross-sectional view of portion A of FIG. 1;
FIG. 3 is a cross-sectional view of portion B of FIG. 1;
FIG. 4 is a schematic structural diagram of a dynamic balance adjustment apparatus of a molecular pump when an upper cover is opened by a vacuum pump according to an embodiment of the present invention;
FIG. 5 is a cross-sectional view of section C of FIG. 4;
fig. 6 is a flowchart of a method for adjusting dynamic balance of a molecular pump according to an embodiment of the present invention.
Description of reference numerals:
1-a magnetic suspension motor; 2-a mechanical pump; 3-a vacuum pipeline; 4-a first inductive displacement sensor; 5-a second inductive displacement sensor; 6-an upper computer; 7-an impeller; 8-a first dynamic balance weighting hole; 9-a second dynamic balance weighting hole; 10-upper radial bearing detection position; 11-an electromagnetic spindle; 12-lower radial bearing detection position; 13-a connector; 14-vacuum sealing device; 15-vacuum hood.
Detailed Description
It should be noted that the embodiments and features of the embodiments may be combined with each other without conflict.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.
The present invention will be described in detail below with reference to the embodiments with reference to the attached drawings.
A molecular pump dynamic balance adjusting device is shown in figures 1 to 3 and comprises a magnetic suspension motor 1, a mechanical pump 2, a vacuum pipeline 3, an impeller 7, an upper radial bearing detection position 10, an electromagnetic spindle 11, a lower radial bearing detection position 12, a vacuum sealing device 14 and a vacuum cover 15, wherein a vacuum cover 15 is installed on one side of the magnetic suspension motor 1, the impeller 7, the electromagnetic spindle 11 and the vacuum sealing device 14 are arranged inside the vacuum cover 15, the spindle of the magnetic suspension motor 1 is connected to one end of the electromagnetic spindle 11 through a connecting piece 13, the impeller 7 is installed on the other end of the electromagnetic spindle 11, the upper radial bearing detection position 10 and the lower radial bearing detection position 12 are arranged on the electromagnetic spindle 11, a first dynamic balance weighting hole 8 and a second dynamic balance weighting hole 9 are arranged at the end part of the impeller 7, the vacuum cover 15 is connected to the mechanical pump 2 through the vacuum pipeline 3, a plurality of inductive displacement sensors are arranged outside the vacuum, the inductive displacement sensors are aligned with the upper radial bearing detection position 10 and the lower radial bearing detection position 12, and each inductive displacement sensor is connected with the upper computer 6 through signals.
A vacuum sealing device is arranged between the main shaft of the magnetic suspension motor 1 and the shell of the magnetic suspension motor.
The upper computer 6 is a computer, matlab computing software is installed in the upper computer 6, the process that the matlab computing software acquires data through a sensor is a common means in the prior art, and the upper computer and the matlab computing software are both used by the common means, so that the device is wide in application range, does not need special training before use, and can be quickly used for industrial production.
The vacuum sealing device 14 is a labyrinth sealing ring, and the sealing performance is stronger.
The inductive displacement sensor comprises a first inductive displacement sensor 4 and a second inductive displacement sensor 5, wherein the first inductive displacement sensor 4 is aligned with the lower radial bearing detection position 12, and the second inductive displacement sensor 5 is aligned with the upper radial bearing detection position 10.
The mechanical pump 2 is a backing pump.
The vacuum pipeline 3 is a corrugated pipe, the length is adjustable, the flexibility is higher, and the universality is stronger.
The vacuum cover 15 is an openable structure, and the impeller 7 and the electromagnetic main shaft 11 are convenient to install.
The magnetic suspension motor 1 is a high-power high-speed magnetic suspension motor, and the specification of the magnetic suspension motor is 3000rpm to 50000 rmp.
The debugging process of the dynamic balance adjusting device of the molecular pump comprises the following steps:
firstly, carrying out low-speed dynamic balance debugging on the impeller 7 and the electromagnetic main shaft 11 in a rigid state, and selecting a state with a relatively stable displacement track between 3000rpm and 5000rpm for adjusting the low-speed rotating speed range, wherein the aim is to control the unbalanced mass within 1 g. And secondly, after the target of the first step is finished or the impeller 7 and the electromagnetic main shaft 11 reach the requirement that the unbalanced mass is within 1 gram, high-speed dynamic balance adjustment is carried out, in order to reduce the influence of atmosphere on the impeller 7, a mechanical pump 2 is used for roughly pumping the vacuum cover 15 to a vacuum degree of about 10Pa, then the whole speed is increased to a rated working speed through the impeller 7 and the electromagnetic main shaft 11, the rated rotating speed is 20000rpm to 45000rmp, and the speed increasing time is less than 1 minute due to the adoption of the high-power magnetic suspension motor 1, so that the working efficiency is greatly improved. The distribution of the unbalanced mass is read and adjusted, so that the unbalanced mass is controlled within 0.001G, and the dynamic balance precision is far higher than G0.4.
The molecular pump dynamic balance adjusting device performs dynamic balance adjustment on the whole of the impeller 7 and the electromagnetic main shaft 11, and in order to improve the precision better, the impeller 7 and the electromagnetic main shaft 11 need to keep lower vibration in the adjusting process, and the vibration quantity can be reflected by the distribution of unbalanced mass. The application requires that the unbalanced mass of the impeller 7 and the electromagnetic main shaft 11 is within 1 gram in a low-speed state, and dynamic balance debugging in a high-speed state can be carried out.
A method for adjusting dynamic balance of a molecular pump, as shown in fig. 4, specifically comprising the following steps:
the method comprises the following steps: the impeller 7 and the electromagnetic main shaft 11 are fixed as a whole;
step two: the impeller 7 and the electromagnetic spindle 11 are integrally fixed on the magnetic suspension motor 1 by a fastening tool;
step three: aligning the probe of the inductive displacement sensor to the inductive part of the electromagnetic spindle 11, and starting matlab calculation software of an upper computer;
step four: starting the magnetic suspension motor 1 to enable the impeller 7 and the electromagnetic spindle 11 to reach a low-speed dynamic balance test rotating speed (between 3000rpm and 5000 rpm);
step five: judging whether the unbalanced mass of the impeller 7 and the electromagnetic main shaft 11 is less than 1 gram or not through an upper computer, and if the unbalanced mass is more than 1 gram, performing dynamic balance adjustment; if the weight is less than 1 gram, directly entering the step six;
if the unbalanced mass is more than 1 g, the specific process of dynamic balance adjustment is as follows: carrying out low-speed (selected between 3000rpm and 5000 rpm) dynamic balance debugging on the impeller 7 and the electromagnetic spindle 11 in a rigid state, and carrying out weighted compensation on the unbalanced mass until the unbalanced mass is less than 1 g;
step six: roughly pumping the vacuum cover 15 to a vacuum degree of 10Pa by using a mechanical pump 2, enabling the rotating speed of the impeller 7 and the electromagnetic spindle 11 to reach a rated operation rotating speed (between 20000rpm and 45000 rmp) by using a magnetic suspension motor 1, calculating out unbalanced mass distribution by using an upper computer, judging whether the integral unbalance of the impeller 7 and the electromagnetic spindle 11 is less than 0.001 g or not, and finishing the test if the integral unbalance is less than 0.001 g; and if the unbalanced mass is more than 0.001 g, the unbalanced mass of the impeller 7 and the electromagnetic spindle 11 is adjusted in a weighting mode until the unbalanced mass is less than 0.001 g.
In practical tests, the dynamic balance can be adjusted by applying the method, the dynamic balance can be completed within about 1 hour generally, the dynamic balance precision can reach more than G0.4, and the pump port vibration amount test of the mechanical pump 2 is within 0.05 μm.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (8)
1. A molecular pump dynamic balance adjusting device is characterized in that: the device comprises a magnetic suspension motor, a mechanical pump, an impeller and an electromagnetic spindle, wherein a vacuum cover is arranged on one side of the magnetic suspension motor and is connected to the mechanical pump through a vacuum pipeline, the impeller and the electromagnetic spindle are arranged in the vacuum cover, the spindle of the magnetic suspension motor is connected to one end of the electromagnetic spindle, the impeller is arranged on the other end of the electromagnetic spindle, an upper radial bearing detection position and a lower radial bearing detection position are arranged on the electromagnetic spindle, a first dynamic balance weighting hole and a second dynamic balance weighting hole are arranged at the end part of the impeller, a detection unit is arranged outside the vacuum cover and is used for detecting the unbalanced mass of the electromagnetic spindle, and transmitting the signal to an upper computer, wherein the detection unit is an inductive displacement sensor, the inductive displacement sensor comprises a first inductive displacement sensor and a second inductive displacement sensor, the first inductive displacement sensor is aligned with the detection position of the lower radial bearing, and the second inductive displacement sensor is aligned with the detection position of the upper radial bearing.
2. The dynamic balance adjustment device for molecular pump according to claim 1, wherein: the upper computer is a computer.
3. The dynamic balance adjustment device for molecular pump according to claim 1, wherein: a vacuum sealing device is arranged between the spindle of the magnetic suspension motor and the shell of the magnetic suspension motor.
4. The dynamic balance adjustment device for molecular pump according to claim 1, wherein: the mechanical pump is a backing pump.
5. The dynamic balance adjustment device for molecular pump according to claim 1, wherein: the vacuum pipeline is a corrugated pipe.
6. A dynamic balance adjusting method of a molecular pump is characterized in that: the method specifically comprises the following steps:
the method comprises the following steps: the impeller and the electromagnetic spindle are fixed on a magnetic suspension motor as a whole;
step two: aligning the probe of the inductive displacement sensor to the inductive part of the electromagnetic main shaft and connecting the probe to an upper computer;
step three: starting a magnetic suspension motor to enable the impeller and the electromagnetic spindle to reach a low-speed dynamic balance test rotating speed, wherein the low-speed rotating speed range is 3000rpm to 5000 rpm;
step four: the inductive displacement sensor transmits the acquired data to an upper computer, the upper computer judges whether the unbalanced mass of the whole impeller and the electromagnetic main shaft is less than 1 gram or not, and if the unbalanced mass is more than 1 gram, dynamic balance adjustment is carried out; if the unbalanced mass is less than 1 g, directly entering the step five;
step five: roughly pumping the vacuum cover to a vacuum degree of 10Pa by using a mechanical pump, enabling the rotating speed of the impeller and the electromagnetic main shaft to reach a rated operating rotating speed by using a magnetic suspension motor, calculating by using an upper computer to obtain unbalanced mass distribution, judging whether the integral unbalance of the impeller and the electromagnetic main shaft is less than 0.001 g or not, and finishing the test if the integral unbalance of the impeller and the electromagnetic main shaft is less than 0.001 g; and if the unbalanced mass is more than 0.001 g, the unbalanced mass of the impeller and the electromagnetic main shaft is adjusted in a weighting mode until the unbalanced mass is less than 0.001 g.
7. The method according to claim 6, wherein the dynamic balance of the molecular pump is adjusted by: the specific process of dynamic balance adjustment is as follows: and carrying out low-speed dynamic balance debugging on the impeller and the electromagnetic main shaft in a rigid state, wherein the low-speed rotating speed range is 3000 rpm-5000 rpm, and weighting compensation is adopted for the unbalanced mass until the unbalanced mass is less than 1 g.
8. The method according to claim 6, wherein the dynamic balance of the molecular pump is adjusted by: the software installed in the upper computer is matlab computing software.
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| CN202010695942.1A CN111735571B (en) | 2020-07-20 | 2020-07-20 | Molecular pump dynamic balance adjusting device and adjusting method |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114526864A (en) * | 2021-12-27 | 2022-05-24 | 苏州中科科仪技术发展有限公司 | Dynamic balance debugging pump shell and debugging device and method with same |
| CN116973753A (en) * | 2023-09-24 | 2023-10-31 | 苏州中科科仪技术发展有限公司 | Device and method for detecting counter electromotive force of magnetic suspension molecular pump motor |
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