CN116973753B - Device and method for detecting counter electromotive force of magnetic suspension molecular pump motor - Google Patents
Device and method for detecting counter electromotive force of magnetic suspension molecular pump motor Download PDFInfo
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- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
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- G—PHYSICS
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- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
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Abstract
The application discloses a device and a method for detecting counter electromotive force of a magnetic suspension molecular pump motor, and belongs to the field of motor detection. The technical key points are as follows: the detection station assembly includes: a sealing flange and a gas rod assembly; the air rod assembly drives the sealing flange to lift up and down; the sealing flange can seal a pump port of the magnetic suspension molecular pump; the vacuum pipeline assembly comprises: a backing pump, a vacuum bellows, a vacuum baffle valve and a tee joint; one end of the vacuum bellows is connected with the backing pump, and the other end of the vacuum bellows is connected with one end of the tee joint; the other two ends of the tee joint are respectively connected with a vacuum baffle valve and a magnetic suspension molecular pump; the analog data acquisition and central control module is used for controlling the power-on of the magnetic suspension molecular pump and recording waveforms of the free speed reduction process of the motor. By adopting the technical scheme of the application, the problem that the counter electromotive force of the magnetic suspension molecular pump motor is difficult to measure can be solved.
Description
Technical Field
The application relates to the field of detection of magnetic suspension molecular pump motors, in particular to a device and a method for detecting counter electromotive force of a magnetic suspension molecular pump motor.
Background
The magnetic suspension molecular pump is a high-precision vacuum pump combining the magnetic suspension technology and the molecular pump technology, has the characteristics of low vibration, low noise, high pumping speed, long service life and the like, and is widely applied to the fields of semiconductors, photovoltaics, flat panel displays, LEDs and the like.
The motor is used as one of the most critical components in the magnetic suspension molecular pump, the advantages and disadvantages of the performance parameters of the motor have great influence on the working stability of the magnetic suspension molecular pump, and in the development and design of the motor, the counter electromotive force parameters are parameters which are particularly important for the performance of the motor.
In the magnetic suspension molecular pump, the counter potential of the motor has influence on acceleration and braking time, power, follow current time and the like of the magnetic suspension molecular pump, and the follow current time is prolonged to cause that the motor cannot output normal rotating speed pulses to the magnetic bearing, so that the magnetic bearing is unstable. The test of the counter-potential of the motor in the magnetic suspension molecular pump is particularly important.
For motor back emf testing, most are directed to mechanical bearing motors, such as:
document 1: CN109001629a, a back electromotive force test method for a motor.
Document 2: CN114879034a, a method for testing no-load back electromotive force of linear motor.
Document 3: CN113125952a, a method for testing back electromotive force of permanent magnet rotor motor.
Document 4: CN109143064A, a back electromotive force testing device and a method in the reversing process of a permanent magnet synchronous motor.
Therefore, for the back electromotive force of the magnetic levitation molecular pump motor, the development has the following two problems:
(1) The prior art lacks a back electromotive force measuring device for a magnetic levitation molecular pump motor.
(2) Compared with the traditional mechanical bearing motor, the back electromotive force value of the magnetic suspension molecular pump motor is difficult to evaluate, because the main shaft of the magnetic suspension molecular pump motor is flexibly connected, the position of the main shaft in the stator core is changed along with the current change in the upper magnetic bearing and the lower magnetic bearing at any time, the position change of the main shaft is relatively small (in the micron order) in the normal operation of the magnetic suspension molecular pump, but when the magnetic suspension molecular pump motor stops supplying power, namely, in the rotor deceleration process, the rotor eccentricity is random. In some cases, a larger eccentric amount is generated, so that the magnetic flux density of the air gap of the magnetic suspension molecular pump is changed, and the accuracy of the counter potential measurement result is affected. However, the counter electromotive force value which is used as a relatively accurate counter electromotive force value has relatively valuable reference parameters in the aspects of evaluating the stability of the controller to motor control, the bonding coaxiality of the surface-mounted main shaft magnetic shoe, the performances of the stator iron core, the rotor iron core and the stator winding and the like. Therefore, back electromotive force which is randomly grabbed in the motor deceleration process must be compensated for counter electromotive force loss caused by the eccentric position of the rotor, and the actual back electromotive force of the magnetic suspension molecular pump can be accurately evaluated. That is, how the measurement result of the back electromotive force of the magnetic levitation molecular pump is modified is also lack of data.
Disclosure of Invention
The application aims to overcome the defects of the prior art, and provides a magnetic suspension molecular pump motor back electromotive force detection device.
The application further aims to provide a method for detecting the counter electromotive force of the magnetic suspension molecular pump motor.
A magnetic levitation molecular pump motor back electromotive force detection device comprises: the device comprises a detection station assembly, a simulation data acquisition and central control module and a vacuum pipeline assembly;
wherein, detect station subassembly and include: a sealing flange and a gas rod assembly; the air rod assembly drives the sealing flange to lift up and down; the sealing flange can seal a pump port of the magnetic suspension molecular pump;
wherein, the vacuum line assembly includes: a backing pump, a vacuum bellows, a vacuum baffle valve and a tee joint; one end of the vacuum bellows is connected with the backing pump, and the other end of the vacuum bellows is connected with one end of the tee joint; the other two ends of the tee joint are respectively connected with a vacuum baffle valve and a magnetic suspension molecular pump;
the analog data acquisition and central control module is used for controlling the electrifying of the magnetic suspension molecular pump and recording waveforms of the free speed reduction process of the motor.
Further, the inspection station assembly further includes: the device comprises a detection station frame, an adapter flange, a connecting column and a support plate;
a detection station rack top plate is arranged at the top of the detection station rack;
the upper surface of the fixed end of the air rod assembly is fixedly connected with the lower surface of the top plate of the detection station rack, and the lower surface of the movable end of the air rod assembly is fixedly connected with the upper surface of the supporting plate; the fixed end of the air rod assembly is above the movable end of the air rod assembly;
the lower surface of the supporting plate is fixedly connected with the upper surface of the connecting column, the lower surface of the connecting column is fixedly connected with the upper surface of the adapter flange, and the lower surface of the adapter flange is fixedly connected with the upper surface of the sealing flange;
the lower surface of the sealing flange is provided with a dovetail groove, and a 0-shaped ring is arranged in the dovetail groove and is used for sealing a pump port of the magnetic suspension molecular pump;
the sealing flange is matched with the shape of a pump port of the magnetic suspension molecular pump.
Further, the method further comprises the following steps: a transfer assembly;
the transfer assembly includes: a conveying component rack, a conveying plate and POM roller bars; the conveying plate moves on the conveying component rack through the POM roller bars;
the magnetic suspension molecular pump motor is carried on the conveying plate.
A method for detecting the back electromotive force of a magnetic suspension molecular pump motor comprises the following steps:
s100, a magnetic suspension molecular pump motor is in a vertical state, and is placed on a detection station:
placing the assembled magnetic suspension molecular pump on a conveying plate of a conveying assembly in a vertical posture; transmitting the magnetic suspension molecular pump to the position of the detection station assembly through the POM roller bar;
s200, communicating the tee joint with a magnetic suspension molecular pump;
s300, the air rod assembly drives the sealing flange to be tightly pressed on a pump port of the magnetic suspension molecular pump and seals the pump port;
s400, starting a backing pump to maintain the vacuum degree in the magnetic suspension molecular pump between 5 and 20 pa;
s500, starting a magnetic suspension molecular pump motor to enable the rotating speed of the magnetic suspension molecular pump to be increased to 150Hz;
S600the magnetic suspension molecular pump motor is powered off and is allowed to freely slow down, and the analog data acquisition and central control module acquires the effective value E of the alternating voltage of the current magnetic suspension molecular pump motor when the rotor of the magnetic suspension molecular pump motor is slowed down to 100Hz 100 And its corresponding frequency f 100 Meanwhile, a plane rectangular x-y coordinate system is established by using the section of the motor stator, the origin of the plane rectangular x-y coordinate system is the center of the section of the motor stator, and the XY sensor and the AB sensor measure to obtain the position information of the centers of the rotor main shafts corresponding to the two sensors, wherein the position information is respectively as follows: (x) 1 ，y 1 ），（x 2 ，y 2 ）；
S700, calculating actual measurement counter electromotive force E of the motor;
s701, calculating actual measurement back electromotive force coefficient K of motor EMF ：K EMF = E 100 ·P/（60·f 100 ) The method comprises the steps of carrying out a first treatment on the surface of the P represents the pole pair number of the rotor motor of the magnetic suspension molecular pump;
s702, calculating actual measurement counter electromotive force E 0 ：E 0 =n·K EMF The method comprises the steps of carrying out a first treatment on the surface of the n is the rated rotation speed of the motor;
s800, pair E 0 Correcting to obtain counter electromotive force E under zero eccentricity x ：
S801, calculating the eccentric amount a of the rotor through an XY sensor and an AB sensor;
the distance between the XY sensor and the AB sensor is H, and the distance between the stator coil and the AB sensor is H;
the eccentric amount a of the rotor is:
a={[x 2 +h/H（x 1 - x 2 ）] 2 +[y 2 +h/H（y 1 - y 2 ）] 2 } 0.5 ；
s802, calculating eccentricity Ω:
Ω=a/δ; delta represents the designed air gap length;
s803, calculate E x ：
E x =E 0 （1+Ω）。
The application has the beneficial effects that:
(1) The application provides a magnetic levitation molecular pump motor back electromotive force detection device, which solves the problem that the magnetic levitation molecular pump motor back electromotive force detection device is not available in the prior art.
The application relates to a magnetic suspension molecular pump motor back electromotive force detection device, which is characterized in that:
1.1, the air rod assembly drives the sealing flange to lift up and down; the sealing flange can seal a pump port of the magnetic suspension molecular pump;
1.2, a vacuum line assembly comprising: a backing pump, a vacuum bellows, a vacuum baffle valve and a tee joint; one end of the vacuum bellows is connected with the backing pump, and the other end of the vacuum bellows is connected with one end of the tee joint; the other two ends of the tee joint are respectively connected with a vacuum baffle valve and a magnetic suspension molecular pump;
and 1.3, the analog data acquisition and central control module is used for controlling the electrifying of the magnetic suspension molecular pump and recording waveforms of the free speed reduction process of the motor.
(2) In the detection of the counter electromotive force of the motor, during free deceleration, the rotor spindle is eccentric greatly due to the power failure of the suspension system, and the counter electromotive force E measured under the condition 0 Unlike the case in actual power-on use: when actually energized, the levitation system will have a small range of eccentricity to the rotor (approximately zero eccentricity). Thus E is 0 Must be corrected to E x Can be used.
For E x For the correction of (a), it was found by research that:
at different omega, E 0 The following conditions are satisfied: e (E) 0 (1+Ω) =constant; for the above conditions, let Ω=0; e (E) x =constant; from this, it can be seen that: e (E) x =E 0 （1+Ω）。
The correction method has universality for correcting the back electromotive force of the magnetic suspension molecular pump.
Drawings
The application is described in further detail below in connection with the embodiments in the drawings, but is not to be construed as limiting the application in any way.
Fig. 1 is a schematic three-dimensional design diagram of a magnetic levitation molecular pump motor back electromotive force detection device according to the first embodiment.
Fig. 2 is a schematic three-dimensional design diagram of a magnetic levitation molecular pump motor back electromotive force detection device according to the first embodiment under another view angle.
Fig. 3 is a schematic three-dimensional design of a inspection station assembly according to the first embodiment.
Fig. 4 is a schematic three-dimensional design of a vacuum line assembly according to the first embodiment.
Fig. 5 is a schematic diagram of a magnetic levitation molecular pump.
FIG. 6 is E 0 Schematic diagram of the relationship of omega.
FIG. 7 is E 0 (1+Ω) - Ω.
Fig. 8 is a flowchart of a method for detecting counter electromotive force of a magnetic levitation molecular pump motor according to the present application.
The reference numerals in fig. 1-8 are as follows:
the magnetic suspension molecular pump 100, the XY magnetic bearing 101, the XY sensor 102, the motor stator 103, the AB magnetic shaft 104, the AB sensor 105 and the rotor assembly 106;
a transfer assembly 200, a transfer assembly frame 201, a transfer plate 202, and a POM roller bar 203;
the device comprises a detection station assembly 300, a sealing flange 301, an adapter flange 302, a connecting column 303, a supporting plate 304, an air rod assembly 305, a detection station frame 306, a horizontal limiting plate 307 and a detection station frame top plate 308;
the analog data acquisition and central control module 400;
a vacuum line assembly 500, a backing pump 501, a vacuum bellows 502, a vacuum flapper valve 503, and a tee joint 504.
Detailed Description
In order to make the objects, technical solutions and advantages of the present application more apparent, the technical solutions of the present application will be clearly and completely described below with reference to specific embodiments of the present application and corresponding drawings. It will be apparent that the described embodiments are only some, but not all, embodiments of the application. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.
Example 1
A magnetic levitation molecular pump motor back electromotive force detection device comprises: the device comprises a conveying assembly 200, a detection station assembly 300, an analog data acquisition and central control module 400 and a vacuum pipeline assembly 500;
wherein the transfer assembly 200 comprises: a transport assembly frame 201, a transport plate 202, and POM roller bars 203; the conveying plate 202 is driven to move on the conveying component rack 201 by the POM roller bar 203;
wherein, detect station assembly 300 includes: sealing flange 301, adapter flange 302, connecting post 303, support plate 304, gas lever assembly 305, and inspection station frame 306;
a detection station frame top plate 308 is arranged at the top of the detection station frame 306;
the upper surface of the fixed end of the air bar assembly 305 is fixedly connected with the lower surface of the top plate 308 of the detection station frame, and the lower surface of the movable end of the air bar assembly is fixedly connected with the upper surface of the supporting plate 304; the fixed end of the gas stick assembly 305 is above the movable end of the gas stick assembly 305;
the lower surface of the supporting plate 304 is fixedly connected with the upper surface of the connecting column 303, the lower surface of the connecting column 303 is fixedly connected with the upper surface of the adapting flange 302, and the lower surface of the adapting flange 302 is fixedly connected with the upper surface of the sealing flange 301;
the lower surface of the sealing flange 301 is provided with a dovetail groove, and a 0-shaped ring is arranged in the dovetail groove and is used for sealing a pump port of the magnetic suspension molecular pump (the shape of the sealing flange 301 is matched with that of the pump port of the magnetic suspension molecular pump);
the movable end of the gas lever assembly 305 moves up/down to drive the support plate 304, the connecting post 303, the adapter flange 302, and the sealing flange 301 together.
The supporting plate 304 is adapted to the upright post of the detection station frame 306, that is, the supporting plate 304 and the upright post of the detection station frame 306 can guide the moving direction of the air bar assembly 305;
the middle part of the upright post of the detection station rack 306 is also fixedly provided with a horizontal limiting plate 307, the horizontal limiting plate 307 is arranged below the supporting plate 304, and the horizontal limiting plate 307 is used for limiting the downward moving distance of the movable end of the air bar assembly 305. A through hole is provided in the horizontal stopper 307 so that the connection post 303 passes therethrough.
Wherein, the analog data acquisition and central control module 400 is electrically connected with the magnetic suspension molecular pump motor to be detected;
wherein, vacuum line assembly 500 comprises: a backing pump 501, a vacuum bellows 502, a vacuum flapper valve 503, a tee joint 504; one end of the vacuum bellows 502 is connected with the backing pump 501, and the other end is connected with one end of the tee joint 504; the other two ends of the tee joint 504 are respectively connected with a vacuum baffle valve 503 and the magnetic levitation molecular pump 100.
As shown in fig. 8, a method for detecting counter electromotive force of a magnetic levitation molecular pump motor includes the following steps:
s100, a magnetic suspension molecular pump motor is in a vertical state, and is placed on a detection station:
placing the assembled magnetic levitation molecular pump on the transfer plate 202 of the transfer assembly in a vertical posture; the magnetic suspension molecular pump is conveyed to the position of the detection station assembly 300 through the POM roller bar 103;
s200, communicating the tee joint 504 with the magnetic suspension molecular pump 100;
s300, the air rod assembly 305 drives the sealing flange 301 to be tightly pressed on the pump port of the magnetic suspension molecular pump and seals the pump port;
s400, starting the backing pump 501 to maintain the vacuum degree in the magnetic molecular pump 100 between 5 pa and 20 pa;
s500, starting a magnetic suspension molecular pump motor to enable the rotating speed of the magnetic suspension molecular pump to be increased to 150Hz;
s600, the magnetic suspension molecular pump motor is powered off and is enabled to be free to slow down, and the analog data acquisition and central control module 400 acquires and records waveforms of the magnetic suspension motor in the process;
to the rotor of the magnetic levitation molecular pump motor is decelerated to 100Hz, the analog data acquisition and central control module 400 acquires the effective value E of the alternating voltage of the current magnetic levitation molecular pump motor 100 And its corresponding frequency f 100 ；
S700, calculating actual measurement counter electromotive force E of the motor;
s701, calculating actual measurement back electromotive force coefficient K of motor EMF ：K EMF = E 100 / V t = E 100 ·P/（60·f 100 ) The method comprises the steps of carrying out a first treatment on the surface of the P represents the pole pair number of the rotor motor of the magnetic suspension molecular pump; v (V) t To grasp E 100 The rotational speed of the magnetic molecular pump at the time of value was (60. F) 100 ）/P；
S702, calculating actual measurement counter electromotive force E 0 ：E 0 =n·K EMF The method comprises the steps of carrying out a first treatment on the surface of the n is the rated rotation speed of the motor;
s800, calculating and outputting the back electromotive force of the magnetic suspension molecular pump at the rated rotation speed after rotor displacement compensation by using a linear compensation method;
compared with the traditional motor, the front and rear bearings of the magnetic suspension motor are of flexible connection structures, and the rotor of the magnetic suspension motor has a difference from an ideal rotor air gap model in operation according to feedback of a position sensor of a magnetic suspension system, so that actual measured counter electromotive force needs to be compensated;
s900, after the magnetic levitation molecular pump stops rotating, closing the front-stage mechanical pump, and opening a vacuum baffle valve to deflate so as to keep the pressure inside and outside the cavity balanced;
s1000, the air rod assembly 305 drives the sealing flange 301 to lift, so that the sealing flange 301 is separated from a pump port of the magnetic suspension molecular pump.
< Compensation principle >
The magnetic suspension molecular pump motor is shown in fig. 5: comprising the following steps: an XY magnetic bearing 101, an XY sensor 102, a motor stator 103, an AB magnetic axis 104, an AB sensor 105, and a rotor assembly 106;
the XY magnetic bearing 101 and the AB magnetic axis 104 are used as a suspension system, and the motor stator 103 is used as a driving system.
(1) The eccentricity a of the rotor is calculated by the XY sensor 102 and the AB sensor 105;
a plane rectangular x-y coordinate system is established by taking the center of a circle of a section of a stator coil as an origin, and a rotor spindle corresponding to an XY sensor and an AB sensor is arranged on the rotor spindleThe position information of the center is respectively: (x) 1 ，y 1 ），（x 2 ，y 2 ) The method comprises the steps of carrying out a first treatment on the surface of the The distance between the XY sensor and the AB sensor is H; the distance between the stator coil and the AB sensor is h;
from this, the eccentric amount a of the rotor is:
x offset of deflection = x 2 +h/H（x 1 - x 2 ）；
y Offset of deflection = y 2 +h/H（y 1 - y 2 ）；
a=（x Offset of deflection 2 +y Offset of deflection 2 ） 0.5 。
(2) FIG. 6 shows measured counter-electromotive force E of different eccentricities 0 Relationship between them.
The eccentricity is: Ω=a/δ; where δ represents the air gap length (which is the difference/2 of the inner diameter of the motor stator minus the outer diameter of the rotor spindle of the drive system).
As can be seen from fig. 6: at less than 15% (Ω above 15%, rotor instability occurs, its measurement data is meaningless): e (E) 0 Omega corresponds to a linear relationship. Naturally: e (E) x The magnitude of the back emf after correction (i.e., back emf without eccentricity) can be expressed as:
E x = E 0 +k slope of Ω。
However, for different magnetic levitation molecular pump motors, k Slope of And not the same value. Thus, if the above is adopted for E x The correction is performed, and the general type is not good.
The research and development team found, as shown in fig. 7, that the following formula is satisfied:
E 0 (1+Ω) =constant.
When a=0, Ω=0, then there is: e (E) x =constant.
Namely: e (E) 0 （1+Ω）=E x 。
H, and δ are known.
The above examples are provided for convenience of description of the present application and are not to be construed as limiting the application in any way, and any person skilled in the art will make partial changes or modifications to the application by using the disclosed technical content without departing from the technical features of the application.
Claims (2)
1. The method for detecting the back electromotive force of the magnetic suspension molecular pump motor is characterized in that a device for detecting the back electromotive force of the magnetic suspension molecular pump motor is used for detecting the magnetic suspension molecular pump motor to be detected;
the magnetic suspension molecular pump motor back electromotive force detection device comprises: the device comprises a detection station assembly, a simulation data acquisition and central control module, a vacuum pipeline assembly and a transmission assembly;
wherein, detect station subassembly includes: a sealing flange and a gas rod assembly; the air rod assembly drives the sealing flange to lift up and down; the sealing flange can seal a pump port of the magnetic suspension molecular pump; the detection station assembly further comprises: the device comprises a detection station frame, an adapter flange, a connecting column and a support plate; a detection station rack top plate is arranged at the top of the detection station rack; the upper surface of the fixed end of the air rod assembly is fixedly connected with the lower surface of the top plate of the detection station rack, and the lower surface of the movable end of the air rod assembly is fixedly connected with the upper surface of the supporting plate; the fixed end of the air rod assembly is above the movable end of the air rod assembly; the lower surface of the supporting plate is fixedly connected with the upper surface of the connecting column, the lower surface of the connecting column is fixedly connected with the upper surface of the adapter flange, and the lower surface of the adapter flange is fixedly connected with the upper surface of the sealing flange; the lower surface of the sealing flange is provided with a dovetail groove, and a 0-shaped ring is arranged in the dovetail groove and is used for sealing a pump port of the magnetic suspension molecular pump; the sealing flange is matched with the shape of a pump port of the magnetic suspension molecular pump;
wherein, the vacuum line assembly includes: a backing pump, a vacuum bellows, a vacuum baffle valve and a tee joint; one end of the vacuum bellows is connected with the backing pump, and the other end of the vacuum bellows is connected with one end of the tee joint; the other two ends of the tee joint are respectively connected with a vacuum baffle valve and a magnetic suspension molecular pump;
the simulation data acquisition and central control module is used for controlling the electrifying of the magnetic suspension molecular pump and recording waveforms of the free speed reduction process of the motor;
wherein the transfer assembly comprises: a conveying component rack, a conveying plate and POM roller bars; the conveying plate moves on the conveying component rack through the POM roller bars; a magnetic suspension molecular pump motor is carried on the conveying plate;
the method comprises the following steps:
s100, a magnetic suspension molecular pump motor is in a vertical state, and is placed on a detection station:
s200, communicating the tee joint with a magnetic suspension molecular pump;
s300, the air rod assembly drives the sealing flange to be tightly pressed on a pump port of the magnetic suspension molecular pump and seals the pump port;
s400, starting a backing pump to maintain the vacuum degree in the magnetic suspension molecular pump between 5 and 20 pa;
s500, starting a magnetic suspension molecular pump motor to enable the rotating speed of the magnetic suspension molecular pump to be increased to 150Hz;
s600, the magnetic suspension molecular pump motor is powered off and is allowed to freely slow down, the rotor of the magnetic suspension molecular pump motor is slowed down to 100Hz, and the analog data acquisition and central control module acquires the effective value E of the alternating voltage of the current magnetic suspension molecular pump motor 100 And its corresponding frequency f 100 ；
The method comprises the steps of establishing a plane rectangular x-y coordinate system by using the section of a motor stator, wherein the origin of the plane rectangular x-y coordinate system is the center of the section of the motor stator, and the position information of the centers of rotor spindles corresponding to the two sensors obtained by measuring by an XY sensor and an AB sensor is respectively as follows: (x) 1 ，y 1 ），（x 2 ，y 2 ）；
S700, calculating actual measurement counter electromotive force E of the motor;
s701, calculating actual measurement back electromotive force coefficient K of motor EMF ：K EMF = E 100 ·P/（60·f 100 ) The method comprises the steps of carrying out a first treatment on the surface of the P represents magnetic suspension molecular pump rotationPole pair numbers of the sub-motors;
s702, calculating actual measurement counter electromotive force E 0 ：E 0 =n·K EMF The method comprises the steps of carrying out a first treatment on the surface of the n is the rated rotation speed of the motor;
s800, pair E 0 Correcting to obtain counter electromotive force E under zero eccentricity x ：
S801, calculating the eccentric amount a of the rotor through an XY sensor and an AB sensor;
the distance between the XY sensor and the AB sensor is H, and the distance between the stator coil and the AB sensor is H;
the eccentric amount a of the rotor is:
a={[x 2 +h/H（x 1 - x 2 ）] 2 +[y 2 +h/H（y 1 - y 2 ）] 2 } 0.5 ；
s802, calculating eccentricity Ω:
Ω=a/δ; delta represents the designed air gap length;
s803, calculate E x ：
E x =E 0 （1+Ω）。
2. The method for detecting the back electromotive force of the magnetic suspension molecular pump motor according to claim 1, wherein the method comprises the following steps:
the step S100 further includes: placing the assembled magnetic suspension molecular pump on a conveying plate of a conveying assembly in a vertical posture; and conveying the magnetic suspension molecular pump to the position of the detection station assembly through the POM roller bar.
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| CN202311234148.7A CN116973753B (en) | 2023-09-24 | 2023-09-24 | Device and method for detecting counter electromotive force of magnetic suspension molecular pump motor |
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| CN202311234148.7A CN116973753B (en) | 2023-09-24 | 2023-09-24 | Device and method for detecting counter electromotive force of magnetic suspension molecular pump motor |
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Citations (12)
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