CN111721436A - Over-temperature detection circuit of power device - Google Patents

Over-temperature detection circuit of power device Download PDF

Info

Publication number
CN111721436A
CN111721436A CN202010433667.6A CN202010433667A CN111721436A CN 111721436 A CN111721436 A CN 111721436A CN 202010433667 A CN202010433667 A CN 202010433667A CN 111721436 A CN111721436 A CN 111721436A
Authority
CN
China
Prior art keywords
over
triode
temperature detection
detection circuit
power device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202010433667.6A
Other languages
Chinese (zh)
Other versions
CN111721436B (en
Inventor
王飞
王云
郑鲲鲲
郝炳贤
任广辉
薛静
王桂磊
亨利·阿达姆松
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Guangdong Greater Bay Area Institute of Integrated Circuit and System
Original Assignee
Guangdong Greater Bay Area Institute of Integrated Circuit and System
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Guangdong Greater Bay Area Institute of Integrated Circuit and System filed Critical Guangdong Greater Bay Area Institute of Integrated Circuit and System
Priority to CN202010433667.6A priority Critical patent/CN111721436B/en
Publication of CN111721436A publication Critical patent/CN111721436A/en
Application granted granted Critical
Publication of CN111721436B publication Critical patent/CN111721436B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/42Circuits effecting compensation of thermal inertia; Circuits for predicting the stationary value of a temperature
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/16Special arrangements for conducting heat from the object to the sensitive element
    • G01K1/18Special arrangements for conducting heat from the object to the sensitive element for reducing thermal inertia
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/01Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using semiconducting elements having PN junctions

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Semiconductor Integrated Circuits (AREA)

Abstract

The invention discloses an over-temperature detection circuit of a power device, which belongs to the technical field of over-temperature detection circuits, wherein a PN junction emitter of a triode and a field effect transistor share one PGND, corresponding comparison levels also correspond to the same electric potential, the heat energy of the field effect transistor can be transmitted to the emitter of the triode by bypassing a DTI through a metal connecting wire of the PGND, then the PGND and a B end and a C end node of the triode form a finger-inserting capacitor structure on an NPN layout, the finger-inserting capacitor structure is used for heating the metal connecting wires at the B end and the C end of the NPN, so that the NPN is heated, and the area of all the metal layers needs to completely cover the NPN to realize the optimal heat conduction.

Description

Over-temperature detection circuit of power device
Technical Field
The invention relates to an over-temperature detection circuit, in particular to an over-temperature detection circuit of a power device, and belongs to the technical field of over-temperature detection circuits.
Background
In power integrated circuits, excessive current flow in the power devices can cause the power modules to heat up dramatically resulting in device damage. For safety reasons, over-temperature detection circuits are introduced to prevent such failures.
Taking a low-side DMOS as an example (figure 1) and used for detecting the temperature of the DMOS, wherein Vref is a band gap reference to generate a temperature insensitive level, an alarm mechanism under a specific temperature is realized by utilizing the negative temperature characteristic of a PN junction point voltage, when the temperature rises, the voltage of VBE is reduced to Vref and is an over-temperature detection point (figure 2), a PN junction of an over-temperature detection circuit is placed on the edge of the DMOS of a power device, and when the DMOS is heated and heated, the temperature of the PN junction is raised by heat conduction on the surface of a wafer. A DTI process is introduced into a DMOS process, an isolation layer of the existing DTI process is realized by air isolation and direct deep-digging groove physical isolation, an oxidation layer is firstly formed in a groove and then is filled with a conducting layer, and in any structure, the DTI is thermal isolation, the heat of a power device is limited in the DTI of the DMOS, so that the heat can not be conducted to a detection PN junction outside the DTI, and further the temperature rise of the DMOS can not be detected.
Disclosure of Invention
The main object of the present invention is to provide an over-temperature detection circuit of a power device (fig. 3), wherein a PN junction emitter of a triode and a field effect transistor share one PGND, a corresponding comparison level also corresponds to the same potential, heat energy of the field effect transistor can bypass a DTI through a metal connection line of the PGND and be transmitted to the emitter of the triode, then the PGND and a B and C end node of the triode form a finger-inserted capacitor structure on an NPN layout, which is used for heating the metal connection lines of the B and C ends of the NPN, thereby heating the NPN transistor, and the areas of all the metal layers need to completely cover the NPN transistor to realize optimal heat conduction (fig. 4, the left side is a DMOS, and the right side is an NPN).
The purpose of the invention can be achieved by adopting the following technical scheme:
the utility model provides a power device's excess Temperature detection circuitry, includes field effect transistor, triode, resistance R0 and signal amplifier, the external load of drain electrode of field effect transistor, field effect transistor's source ground, field effect transistor's grid connects drive circuit, field effect transistor's source electric connection the projecting pole of triode, the external bias current of collecting electrode of triode, the positive pole of projecting pole and comparator is connected to the base of triode, the one end of the negative pole connecting resistance R0 of comparator, the projecting pole of triode is connected to resistance R0's the other end, bias current is connected to resistance R0's one end, just comparator output alarm signal OT (Over Temperature, excess Temperature).
Preferably, the outside production of the field effect transistor is introduced into a BCD (bipolar, CMOS and DMOS) process by a Deep Trench Isolation (DTI) process.
Preferably, when the DTI process is incorporated into the BCD process, thermal isolation of the DTI is avoided so that thermal energy can be conducted to the externally detected PN junction.
Preferably, the emitter of the PN junction in the triode and the field effect transistor share one PGND, and the corresponding comparison level also corresponds to the same potential.
Preferably, the heat energy of the field effect transistor is transmitted to the emitter of the triode by bypassing the DTI through the metal wire of the PGND.
Preferably, the PGND and the B and C end nodes of the triode form a finger-like capacitor structure on the NPN layout.
Preferably, the area of the metal layer completely covers the NPN tube.
Preferably, the PGND and the B and C end nodes of the triode form a finger-like capacitor structure on the NPN layout.
The invention has the beneficial technical effects that:
according to the over-temperature detection circuit of the power device, a PN junction emitter of a triode and a field effect transistor share one PGND, corresponding comparison levels correspond to the same potential, heat energy of the field effect transistor can bypass a DTI through a metal connecting wire of the PGND and is transmitted to the emitter of the triode, then the PGND and a B end node and a C end node of the triode form a finger-inserting capacitor structure on an NPN layout, the finger-inserting capacitor structure is used for heating the metal connecting wires of the B end and the C end of the NPN, the NPN is heated, and the area of all metal layers needs to completely cover the NPN to achieve optimal heat conduction (fig. 4, the left side is a DMOS, and the right side is an NPN).
Drawings
FIG. 1 is a circuit diagram of an over-temperature detection circuit in the prior art;
FIG. 2 is a prior art over-temperature detection circuit layout;
FIG. 3 is an over-temperature detection circuit diagram of a preferred embodiment of an over-temperature detection circuit of a power device according to the present invention;
fig. 4 is a thermal conductive layout of a preferred embodiment of an over-temperature detection circuit of a power device according to the present invention.
Detailed Description
In order to make the technical solutions of the present invention more clear and definite for those skilled in the art, the present invention is further described in detail below with reference to the examples and the accompanying drawings, but the embodiments of the present invention are not limited thereto.
As shown in fig. 3-4, in this embodiment, an Over-Temperature detection circuit of a power device includes a field-effect transistor, a resistor R0 and a signal amplifier, where a drain of the field-effect transistor is externally connected to a load, a source of the field-effect transistor is grounded, a gate of the field-effect transistor is connected to a driving circuit, a source of the field-effect transistor is electrically connected to an emitter of the transistor, a collector of the transistor is externally connected to a bias current, a base of the transistor is connected to the emitter and an anode of a comparator, a cathode of the comparator is connected to one end of a resistor R0, the other end of the resistor R0 is connected to the emitter of the transistor, one end of the resistor R0 is connected to the bias current, and an output end of the comparator is used for providing an alarm signal OT (.
The emitter of the PN junction of the triode and the field effect transistor share one PGND, the corresponding comparison level corresponds to the same potential, the heat energy of the field effect transistor can bypass the DTI through the metal connecting wire of the PGND and is transmitted to the emitter of the triode, and then the PGND and the B and C end nodes of the triode form a finger-inserting capacitor structure on the NPN layout for heating the metal connecting wires at the B and C ends of the NPN so as to heat the NPN, and the area of all the metal layers needs to completely cover the NPN to realize the optimal heat conduction.
In this embodiment, the outside production of the field effect transistor is by introducing a DTI process into the BCD process.
In this embodiment, when the DTI process is introduced into the BCD process, the thermal isolation of the DTI is avoided so that thermal energy can be conducted to the externally detected PN junction.
In this embodiment, the emitter of the PN junction in the transistor shares a PGND with the fet, and the corresponding comparison level corresponds to the same potential.
In this embodiment, the thermal energy of the fet is transferred to the emitter of the transistor through the PGND metal wire, bypassing the DTI.
In the embodiment, the PGND and the B and C end nodes of the triode form a finger-like capacitor structure on the NPN layout.
In this embodiment, the area of the metal layer completely covers the NPN transistor.
In the embodiment, the PGND and the B and C end nodes of the triode form a finger-like capacitor structure on the NPN layout.
The above description is only for the purpose of illustrating the present invention and is not intended to limit the scope of the present invention, and any person skilled in the art can substitute or change the technical solution of the present invention and its conception within the scope of the present invention.

Claims (10)

1. An over-temperature detection circuit of a power device, characterized in that: including field effect transistor, triode, resistance R0 and signal amplifier, the external load of drain electrode of field effect transistor, field effect transistor's source ground, field effect transistor's grid connects drive circuit, field effect transistor's source electric connection the projecting pole of triode, the external bias current of collecting electrode of triode, the positive pole of projecting pole and comparator is connected to the base of triode, the one end of resistance R0 is connected to the negative pole of comparator, and the projecting pole of triode is connected to resistance R0's the other end, bias current is connected to resistance R0's one end, just comparator output end alarm signal OT (Over Temperature).
2. The over-temperature detection circuit of a power device according to claim 1, wherein: the outside production of the field effect transistor is introduced by a Deep Trench Isolation (DTI) process into a BCD (bipolar, CMOS and DMOS) process.
3. The over-temperature detection circuit of a power device according to claim 2, wherein: when the DTI process is introduced into the BCD process, the thermal isolation effect of the DTI is avoided, so that the heat energy can be conducted to the PN junction to be detected.
4. The over-temperature detection circuit of a power device according to claim 1, wherein: the emitter of the PN junction in the triode and the field effect transistor share one PGND (Power GND), and the corresponding comparison level corresponds to the same potential.
5. The over-temperature detection circuit of a power device according to claim 1, wherein: the heat energy of the field effect transistor bypasses the DTI through the metal connecting wire of the PGND and is transmitted to the emitting electrode of the triode.
6. The over-temperature detection circuit of a power device according to claim 1, wherein: and the PGND and the B and C end nodes of the triode form a similar finger-inserting capacitance structure on the NPN layout.
7. The over-temperature detection circuit of a power device according to claim 1, wherein: the area of the metal layer completely covers the NPN tube.
8. The over-temperature detection circuit of a power device according to claim 1, wherein: and the PGND and the B and C end nodes of the triode form a similar finger-inserting capacitance structure on the NPN layout.
9. The over-temperature detection circuit of a power device according to claim 1, wherein: all the areas of the above metal layers completely cover the NPN transistor.
10. The over-temperature detection circuit of a power device according to claim 1, wherein: and the PGND and the B and C end nodes of the triode form a similar finger-inserting capacitance structure on the NPN layout.
CN202010433667.6A 2020-05-21 2020-05-21 Over-temperature detection circuit of power device Active CN111721436B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202010433667.6A CN111721436B (en) 2020-05-21 2020-05-21 Over-temperature detection circuit of power device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202010433667.6A CN111721436B (en) 2020-05-21 2020-05-21 Over-temperature detection circuit of power device

Publications (2)

Publication Number Publication Date
CN111721436A true CN111721436A (en) 2020-09-29
CN111721436B CN111721436B (en) 2021-11-23

Family

ID=72564880

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202010433667.6A Active CN111721436B (en) 2020-05-21 2020-05-21 Over-temperature detection circuit of power device

Country Status (1)

Country Link
CN (1) CN111721436B (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102394237A (en) * 2011-12-06 2012-03-28 电子科技大学 Composite VDMOS device possessing temperature sampling and over-temperature protection function
CN104362595A (en) * 2014-11-10 2015-02-18 深圳市卓能新能源科技有限公司 Battery pack power supply circuit capable of achieving over-temperature protection
US20150325694A1 (en) * 2014-05-12 2015-11-12 Macronix International Co., Ltd. Semiconductor device, method of manufacturing the same and method of operating the same
CN109638774A (en) * 2018-12-24 2019-04-16 中国电子科技集团公司第五十八研究所 A kind of thermal-shutdown circuit

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102394237A (en) * 2011-12-06 2012-03-28 电子科技大学 Composite VDMOS device possessing temperature sampling and over-temperature protection function
US20150325694A1 (en) * 2014-05-12 2015-11-12 Macronix International Co., Ltd. Semiconductor device, method of manufacturing the same and method of operating the same
CN104362595A (en) * 2014-11-10 2015-02-18 深圳市卓能新能源科技有限公司 Battery pack power supply circuit capable of achieving over-temperature protection
CN109638774A (en) * 2018-12-24 2019-04-16 中国电子科技集团公司第五十八研究所 A kind of thermal-shutdown circuit

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
MOHAMMAD A. HUQUE 等: "A 200 °C Universal Gate Driver Integrated Circuit for Extreme Environment Applications", 《IEEE》 *
T. VANHOUCKE: "A new analytical model for the thermal resistance of deep-trench bipolar transistors", 《IEEE》 *

Also Published As

Publication number Publication date
CN111721436B (en) 2021-11-23

Similar Documents

Publication Publication Date Title
US6144085A (en) Power transistor device having hot-location and cool-location temperature sensors
KR100471521B1 (en) Power semiconductor devices with a temperature sensor circuit
JP2521783B2 (en) Semiconductor device and manufacturing method thereof
CN104601019A (en) Smart power module, power device and temperature detection circuit and method of power device
CN109742139B (en) LIGBT-based single-gate control voltage and current sampling device
CN111721436B (en) Over-temperature detection circuit of power device
CN108627744A (en) A kind of PN junction breakdown voltage test system and method for igbt chip
JP4006902B2 (en) Semiconductor device
KR870006569A (en) Field Programmable Devices
CN104596655A (en) Intelligent power module, power device and temperature detection circuit and method of power device
JP3679297B2 (en) Power supply system
JPS5848963A (en) Semiconductor element for temperature sensor
CN203719790U (en) NTC identification circuit with high return difference
CN109087944A (en) A kind of RC-IGBT of integrated MOS current sample structure
JP2018046136A5 (en)
JP2633585B2 (en) Semiconductor device
CN107293583B (en) The BJT pipe amplifier with self-powered function of internet of things oriented
CN102347326B (en) Power transistor unit with electrostatic protection and low dropout regulator using same
CN109347063B (en) Overheat detection protection circuit of power device
CN109786450B (en) Grid-controlled sampling device based on LIGBT
CN106207966B (en) A kind of thermal-shutdown circuit
CN203813743U (en) Impedance control circuit for integrated circuit node
CN218829885U (en) Power semiconductor device of integrated temperature control circuit
CN118173513B (en) H bridge device structure of integrated NMOS tube
CN107846758B (en) A kind of dedicated temperature-control circuit of low-power consumption teaching equipment

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant