CN111719124A - Combined target - Google Patents
Combined target Download PDFInfo
- Publication number
- CN111719124A CN111719124A CN201910218710.4A CN201910218710A CN111719124A CN 111719124 A CN111719124 A CN 111719124A CN 201910218710 A CN201910218710 A CN 201910218710A CN 111719124 A CN111719124 A CN 111719124A
- Authority
- CN
- China
- Prior art keywords
- target
- sliding rod
- driving
- gear
- mounting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000110 cooling liquid Substances 0.000 claims abstract description 16
- 238000001816 cooling Methods 0.000 claims abstract description 11
- 238000009434 installation Methods 0.000 claims abstract description 6
- 239000002131 composite material Substances 0.000 claims description 15
- 238000005286 illumination Methods 0.000 claims description 2
- 238000004544 sputter deposition Methods 0.000 description 5
- 238000005530 etching Methods 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000005477 sputtering target Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention provides a combined target, which comprises target posts and mounting plates, wherein the two mounting plates comprise two mounting plates, the two mounting plates are arranged at intervals from top to bottom, the target posts are arranged between the two mounting plates, the upper end and the lower end of each target post are respectively connected with the two mounting plates, a plurality of target posts are connected between the two mounting plates, and the adjacent target posts are arranged at intervals; the target column comprises a tubular target body, a tubular supporting body and an installation column, the supporting body is sleeved on the installation column, the target body is sleeved on the supporting body, a cooling cavity is arranged in the supporting body, the supporting body is provided with a cooling liquid inlet and a cooling liquid outlet, and the cooling liquid inlet and the cooling liquid outlet are respectively communicated with the cooling cavity.
Description
Technical Field
The present invention relates to a composite target.
Background
A target is understood to mean the material being sputtered in a cathode sputtering system. Most sputtering targets used in the past are so-called planar targets which are configured in a circular or rectangular manner. However, planar targets have the following disadvantages: only about 30% to 40% of the material constituting the planar target is effectively sputtered, and its effective utilization rate is low and its service life is short. The targets used at present are single target bodies, and the control beam is often designed optimally to obtain a large number of sputtering sources, but the optimization of the control beam often involves high cost and difficulty.
Disclosure of Invention
In view of the problems pointed out in the background art, the invention provides a combined target piece, which is formed by combining a plurality of single targets, can move in multiple directions, and is internally provided with a cooling structure, so that a large number of sputtering sources can be obtained at low cost, the utilization rate of the targets is improved, and the service life of the targets is prolonged.
The technical scheme of the invention is realized as follows:
a combined target comprises two mounting plates and target columns, wherein the two mounting plates are arranged at intervals up and down, the target columns are arranged between the two mounting plates, the upper ends and the lower ends of the target columns are respectively connected with the two mounting plates, a plurality of target columns are connected between the two mounting plates, and adjacent target columns are arranged at intervals;
the target column comprises a tubular target body, a tubular supporting body and an installation column, the supporting body is sleeved on the installation column, the target body is sleeved on the supporting body, a cooling cavity is arranged in the supporting body, the supporting body is provided with a cooling liquid inlet and a cooling liquid outlet, and the cooling liquid inlet and the cooling liquid outlet are respectively communicated with the cooling cavity.
The invention is further configured such that the target body is rotatable about its central axis.
The invention is further provided that the supporting body is fixedly connected with the mounting column, and the mounting column is connected with a first driving device for driving the mounting column to rotate.
The invention is further provided that the supporting body is rotatably connected with the mounting column, and the invention also comprises a driving mechanism for driving the supporting body to rotate.
The invention is further provided that the driving mechanism comprises a first gear, a second gear and a second driving device, wherein the first gear is coaxial with the bearing body and is in linkage arrangement, the second gear is meshed with the first gear, and the second driving device is connected with the second gear and is used for driving the second gear to rotate.
The invention is further provided that the combined target can be adjusted in position in the front, back, left, right, up and down directions, and the combined target can rotate around the central axis thereof.
The invention is further set up as that, the invention also includes a first slide bar and a second slide bar, the first slide bar and the second slide bar are arranged vertically, the first slide bar and the second slide bar form sliding fit, the second slide bar can slide along the length direction of the first slide bar, the first slide bar is provided with a third driving device for driving the second slide bar to move, the second slide bar is arranged above the combined target piece, the mounting plate arranged at the upper side is connected with the second slide bar in a sliding way, the mounting plate can move along the length direction of the second slide bar, and the second slide bar is provided with a fourth driving device for driving the mounting plate to slide; the sliding rod I is fixedly connected to the lower side of the fixing seat, a fifth driving device for driving the fixing seat to rotate is connected to the fixing seat, and a sixth driving device for driving the fixing seat to move up and down is connected to the fixing seat.
The present invention is further configured such that radiation directed at any angle from the horizontal toward the composite target is completely blocked by the target posts in the composite target.
The invention has the beneficial effects that:
the combined target piece provided by the invention is formed by combining a plurality of single targets, can move in multiple directions, is internally provided with a cooling structure, not only can obtain a large number of sputtering sources at low cost, but also improves the utilization rate of the targets and prolongs the service life of the targets. The single target column structure is tubular, when in use, the surface of the target can obtain more uniform etching effect by performing autorotation adjustment on the tubular target, and the etching area can basically cover the whole surface of the target by adjusting the position of the target body.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic structural view of the present invention;
FIG. 3 is a schematic structural view of a target according to the present invention;
FIG. 4 is a schematic structural view of a target according to the present invention;
FIG. 5 is a schematic structural view of a target according to the present invention;
fig. 6 is a schematic structural diagram of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention is described below with reference to fig. 1-6:
as shown in fig. 1 and 2, a combination target, including target post 100 and mounting panel 200, mounting panel 200 include two, two mounting panels 200 are from top to bottom the interval setting, target post 100 sets up between two mounting panels 200, the upper and lower both ends of target post 100 are connected with two mounting panels 200 respectively, be connected with a plurality of target post 100 between two mounting panels 200, the interval setting between the adjacent target post 100.
As shown in fig. 3, the target column 100 includes a tubular target body 1, a tubular supporting body 2 and a mounting column 3, the supporting body 2 is sleeved on the mounting column 3, the target body 1 is sleeved on the supporting body 2, a cooling cavity is arranged inside the supporting body 2, the supporting body 2 is provided with a cooling liquid inlet 21 and a cooling liquid outlet 22, and the cooling liquid inlet 21 and the cooling liquid outlet 22 are respectively communicated with the cooling cavity.
Wherein, the target body 1 can rotate around the central axis thereof.
As shown in fig. 4, the supporting body 2 is fixedly connected to the mounting column 3, a first driving device 4 for driving the mounting column 3 to rotate is connected to the mounting column 3, and the first driving device 4 may be a motor. During the in-service use, erection column 3 is connected with the mounting panel, and the motor is also installed suitable position on the mounting panel.
As shown in fig. 5, the supporting body 2 is rotatably connected to the mounting post 3, and further includes a driving mechanism for driving the supporting body 2 to rotate.
The driving mechanism comprises a first gear 5, a second gear 6 and a second driving device 7 (a motor), the first gear 5 is coaxial with the bearing body 2 and is in linkage arrangement, the second gear 6 is meshed with the first gear 5, and the second driving device 7 is connected with the second gear 6 and is used for driving the second gear 6 to rotate. During the in-service use, erection column 3 is connected with the mounting panel, and the motor is also installed suitable position on the mounting panel.
The combined target can be adjusted in position in the front, back, left, right, up and down directions, and can rotate around the central axis of the combined target. So that the combined target can move in multiple directions, one embodiment of the movement is disclosed as follows:
as shown in fig. 6, the device further comprises a first sliding rod 101 and a second sliding rod 102, wherein the first sliding rod 101 and the second sliding rod 102 are arranged perpendicular to each other, the first sliding rod 101 and the second sliding rod 102 form a sliding fit, the second sliding rod 102 can slide along the length direction of the first sliding rod 101, and a third driving device (an air cylinder) for driving the second sliding rod 102 to move is arranged on the first sliding rod 101.
The second sliding rod 102 is positioned above the combined target, the mounting plate 200 positioned at the upper side is in sliding connection with the second sliding rod 102, the mounting plate 200 can move along the length direction of the second sliding rod 102, and the second sliding rod 102 is provided with a fourth driving device (air cylinder) for driving the mounting plate 200 to slide.
The device is characterized by further comprising a fixed seat 103, the first sliding rod 101 is fixedly connected to the lower side of the fixed seat 103, a fifth driving device 104 (motor) for driving the first sliding rod to rotate is connected to the fixed seat 103, and a sixth driving device 105 (air cylinder) for driving the first sliding rod to move up and down is connected to the fixed seat 103.
Any angle of illumination directed at the composite target in the horizontal direction will be completely blocked by the target pillars in the composite target. The arrangement positions of the target posts in the combined target are limited in the technical scheme, and the arrangement density of the target posts must ensure that the irradiated irradiation beams cannot penetrate through gaps among the target posts.
The invention has the beneficial effects that:
the combined target piece provided by the invention is formed by combining a plurality of single targets, can move in multiple directions, is internally provided with a cooling structure, not only can obtain a large number of sputtering sources at low cost, but also improves the utilization rate of the targets and prolongs the service life of the targets. The single target column 100 is in a tubular structure, so that the surface of the target can obtain more uniform etching effect by performing autorotation adjustment on the tubular target during use, and the etching area can cover the whole surface of the target basically by adjusting the position of the target body 1.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (8)
1. A composite target, comprising: the device comprises two mounting plates and target columns, wherein the two mounting plates are arranged at intervals up and down, the target columns are arranged between the two mounting plates, the upper ends and the lower ends of the target columns are respectively connected with the two mounting plates, a plurality of target columns are connected between the two mounting plates, and adjacent target columns are arranged at intervals;
the target column comprises a tubular target body, a tubular supporting body and an installation column, the supporting body is sleeved on the installation column, the target body is sleeved on the supporting body, a cooling cavity is arranged in the supporting body, the supporting body is provided with a cooling liquid inlet and a cooling liquid outlet, and the cooling liquid inlet and the cooling liquid outlet are respectively communicated with the cooling cavity.
2. A composite target according to claim 1, wherein: the target body can rotate around the central axis thereof.
3. A composite target according to claim 2, wherein: the bearing body is fixedly connected with the mounting column, and a first driving device for driving the mounting column to rotate is connected to the mounting column.
4. A composite target according to claim 2, wherein: the bearing body and the mounting column are rotatably connected, and the bearing device also comprises a driving mechanism for driving the bearing body to rotate.
5. A composite target according to claim 4, wherein: the driving mechanism comprises a first gear, a second gear and a second driving device, the first gear is coaxial with the bearing body and is in linkage arrangement, the second gear is meshed with the first gear, and the second driving device is connected with the second gear and is used for driving the second gear to rotate.
6. A composite target according to any one of claims 1 to 5, wherein: the combined target can be adjusted in position in the front, back, left, right, up and down directions, and can rotate around the central axis of the combined target.
7. A composite target according to claim 6, wherein: the combined target piece is characterized by further comprising a first sliding rod and a second sliding rod, wherein the first sliding rod and the second sliding rod are perpendicular to each other, the first sliding rod and the second sliding rod form sliding fit, the second sliding rod can slide along the length direction of the first sliding rod, a third driving device for driving the second sliding rod to move is arranged on the first sliding rod, the second sliding rod is arranged above the combined target piece, a mounting plate arranged on the upper side of the first sliding rod is in sliding connection with the second sliding rod, the mounting plate can move along the length direction of the second sliding rod, and a fourth driving device for driving the mounting plate; the sliding rod I is fixedly connected to the lower side of the fixing seat, a fifth driving device for driving the fixing seat to rotate is connected to the fixing seat, and a sixth driving device for driving the fixing seat to move up and down is connected to the fixing seat.
8. A composite target according to claim 6, wherein: any angle of illumination directed at the composite target in the horizontal direction will be completely blocked by the target pillars in the composite target.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910218710.4A CN111719124A (en) | 2019-03-21 | 2019-03-21 | Combined target |
| PCT/CN2019/081183 WO2020186557A1 (en) | 2019-03-21 | 2019-04-03 | Combined target member |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910218710.4A CN111719124A (en) | 2019-03-21 | 2019-03-21 | Combined target |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111719124A true CN111719124A (en) | 2020-09-29 |
Family
ID=72519527
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910218710.4A Pending CN111719124A (en) | 2019-03-21 | 2019-03-21 | Combined target |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN111719124A (en) |
| WO (1) | WO2020186557A1 (en) |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08260138A (en) * | 1995-03-22 | 1996-10-08 | Sony Corp | Target adjusting jig of sputtering device |
| US20080241409A1 (en) * | 2007-03-30 | 2008-10-02 | Guo G X | Deposition system with improved material utilization |
| CN102884222A (en) * | 2010-06-28 | 2013-01-16 | 日本爱发科泰克能株式会社 | Target mounting mechanism |
| KR20130047302A (en) * | 2011-10-31 | 2013-05-08 | 한국기계연구원 | A high efficiency suptteing appartus |
| CN103328682A (en) * | 2010-11-24 | 2013-09-25 | 普兰西公司 | Bonding composition for a rotary target for sputtering and bonding method of a rotary target using same |
| CN105603371A (en) * | 2015-10-29 | 2016-05-25 | 杭州立昂微电子股份有限公司 | Magnetic sputtering target material |
| CN107771224A (en) * | 2015-03-18 | 2018-03-06 | 尤米科尔公司 | The method for forming rotary sputtering target |
| CN208308947U (en) * | 2018-04-28 | 2019-01-01 | 广东鼎泰高科精工科技有限公司 | A kind of detachable cylinder target seat structure |
| CN208545486U (en) * | 2018-08-01 | 2019-02-26 | 合肥鑫晟光电科技有限公司 | Magnetic control sputtering device and magnetic control sputtering system with it |
| CN210065896U (en) * | 2019-03-21 | 2020-02-14 | 广东太微加速器有限公司 | Combined target |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI480403B (en) * | 2010-10-26 | 2015-04-11 | Hon Hai Prec Ind Co Ltd | Deposition device |
| CN103993275B (en) * | 2014-05-09 | 2016-08-17 | 浙江上方电子装备有限公司 | A kind of quasistatic coating system and utilize its method carrying out quasistatic plated film |
| CN104532200B (en) * | 2014-12-24 | 2017-05-17 | 四川亚力超膜科技有限公司 | Columnar rotation magnetic control sputtering target |
| CN104694892A (en) * | 2015-03-27 | 2015-06-10 | 京东方科技集团股份有限公司 | Sputtering device |
| CN106319465B (en) * | 2016-08-25 | 2018-11-09 | 京东方科技集团股份有限公司 | A kind of rotary target and magnetic control sputtering device |
-
2019
- 2019-03-21 CN CN201910218710.4A patent/CN111719124A/en active Pending
- 2019-04-03 WO PCT/CN2019/081183 patent/WO2020186557A1/en active Application Filing
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08260138A (en) * | 1995-03-22 | 1996-10-08 | Sony Corp | Target adjusting jig of sputtering device |
| US20080241409A1 (en) * | 2007-03-30 | 2008-10-02 | Guo G X | Deposition system with improved material utilization |
| CN102884222A (en) * | 2010-06-28 | 2013-01-16 | 日本爱发科泰克能株式会社 | Target mounting mechanism |
| CN103328682A (en) * | 2010-11-24 | 2013-09-25 | 普兰西公司 | Bonding composition for a rotary target for sputtering and bonding method of a rotary target using same |
| KR20130047302A (en) * | 2011-10-31 | 2013-05-08 | 한국기계연구원 | A high efficiency suptteing appartus |
| CN107771224A (en) * | 2015-03-18 | 2018-03-06 | 尤米科尔公司 | The method for forming rotary sputtering target |
| CN105603371A (en) * | 2015-10-29 | 2016-05-25 | 杭州立昂微电子股份有限公司 | Magnetic sputtering target material |
| CN208308947U (en) * | 2018-04-28 | 2019-01-01 | 广东鼎泰高科精工科技有限公司 | A kind of detachable cylinder target seat structure |
| CN208545486U (en) * | 2018-08-01 | 2019-02-26 | 合肥鑫晟光电科技有限公司 | Magnetic control sputtering device and magnetic control sputtering system with it |
| CN210065896U (en) * | 2019-03-21 | 2020-02-14 | 广东太微加速器有限公司 | Combined target |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2020186557A1 (en) | 2020-09-24 |
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