CN1117174C - Vacuum evaporation coating method and equipment for organic foamed material - Google Patents
Vacuum evaporation coating method and equipment for organic foamed material Download PDFInfo
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- CN1117174C CN1117174C CN 01119666 CN01119666A CN1117174C CN 1117174 C CN1117174 C CN 1117174C CN 01119666 CN01119666 CN 01119666 CN 01119666 A CN01119666 A CN 01119666A CN 1117174 C CN1117174 C CN 1117174C
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- electric arc
- foam
- organic foam
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- Physical Vapour Deposition (AREA)
- Cell Electrode Carriers And Collectors (AREA)
- Battery Electrode And Active Subsutance (AREA)
Abstract
The present invention relates to a vacuum vapor deposition method and equipment for organic foaming conducting treatment, which belongs to the preparation of an organic foaming conducting film in the manufacture of the foaming nickel of a battery electrode base plate. A set of arc targets and an auxiliary ionization device are respectively arranged on both sides of a coating chamber, which can simultaneously, evenly and directly implement continuous band-shaped foam conducting treatment for double faces by a vacuum vaporization coating method. The present invention has the advantages of low-temperature coating, high deposition rate and no basal body deformation, and overcomes the main disadvantages of a liquid phase method and a magnetron sputtering method. The organic foaming conducting film is used as an electroplating cathode to obtain continuous band-shaped foaming nickel, which has the advantages of strong tensile strength, small internal resistance and good flexibility. The present invention can be used as the vacuum coating of other materials of the battery electrode base plate.
Description
The invention belongs to the method and apparatus of producing in the continuous foam nickel the processing of organic foam conduction, particularly as the vacuum plating of electrode substrate for battery materials such as hydrogen nickel (Ni/MH) battery.
Nickel foam is a kind of porosity height, have the metallic substance of tridimensional network, can also can be used as multiple electrochemistry in industry reaction electrode and other associated batteries electrodes etc. as the electrode base board of hydrogen nickel (Ni/MH) battery etc.Especially continuous band-shaped nickel foam provides the foundation for the continuous automatic production battery electrode.China produces in the continuous band-shaped nickel foam technological process the processing of foamy conductionization, the main liquid phase process that adopts chemical nickel plating or dip-coating graphite based conducting glue exists that environmental pollution is big, impurity is many (contain P or contain C), complex process, cost height, causes that nickel foam tensile strength is low, resistivity is high, battery specific storage, specific energy and operating voltage are affected.With the immediate domestic technique of the vacuum vapour deposition of arc-over of the present invention be October 11 nineteen ninety-five Chinese State Patent Office disclosedly declare " a kind of preparation method of sponge nickel foam " (application number 95102640.2) by Jilin University; " preparation method of sponge nickel foam is used to do the preparation method of the nickel metal otter board of battery plate and nickel hydrogenation catalyst; use the polyetheramine ester of alligatoring to do substrate; make to electroplate with magnetically controlled sputter method and use negative electrode, make spongy foam nickel through processes such as plating nickel plating, washing and drying, thermal treatments " of this Fang Ming.With the immediate external prior art of the present invention be the patent application of a EUROPEAN PATENT OFFICE disclosed " Method for the production of a metal foam and ametal foam obtained ", (application number 93200510.1, open day on September 1st, 93, publication number EP0558142); This technology discloses " with the cathode sputtering method organic foam matrix plating conducting metal (copper or nickel) such as urethane, polyester, polystyrene, polypropylene is made to electroplate and use negative electrode, make metal foam through plating again ".The disclosed conductive foam made from magnetron sputtering method both at home and abroad though belong to vapour deposition process together, because sedimentation rate is too low, causes cost to increase, and metallic diaphragm is too thin in addition, and bonding force is not easy to keeping by force.
The objective of the invention is to replace the conduction processing of liquid phase method and magnetron sputtering method with the vacuum vapour deposition of arc-over, solve the problems referred to above that prior art exists, improve the sedimentation rate of arc evaporation, on the organic foam of electroplating with negative electrode, prepare wide cut (can 〉=1 * 200m) two-sided uniform conductive film.
Accompanying drawing is a structure iron of implementing devices of coiled vacuum coating machine main frame of the present invention.In single vacuum chamber, form by coating chamber, electric arc target, unwinding and rewinding chamber and roll shaft transmission mechanism four macrostructures.Among the figure: 1, vacuum chamber; 2, coating chamber; 3, auxiliary ionization device; 4, electric arc target; 5, foam traffic coverage; 6, roll shaft transmission mechanism; 7, rolling chamber; 8, unreel the chamber.
Technical scheme of the present invention is: in the inner physical vapor that adopts of vacuum chamber [1] of devices of coiled vacuum coating machine The vacuum vapour deposition of the arc discharge in deposition (PVD) technology, double-faced uniform ground is directly realized continuously simultaneously The conductive treatment of strip foaming. Coating chamber [2] each side has one group of electric arc target [4] and auxiliary ionization device [3], this electric arc target is preferably the plane arc target, organic foam from move therebetween by the time be deposited plated film [5]; The plated film target is highly purified nickel or is added with other micro-nickel alloy; The vacuum vapour deposition of arc discharge Main technique be: the coiled strip of packing into [8] → vacuum chamber is vacuumized and heats [1] → evaporation coating [2] → receipts Volume [7]; Vacuumize earlier before the plated film and heat, vacuum is (2～7) * 10-2Pa heats to 50～90 ℃, is filled with operating pressure (5～10) * 10 behind the argon gas-1Pa, arc current are 10～200A, and the vertical range between this two electrode of coiled material and electric arc flat target is 100～250mm, and coating speed is 1～5m2/ minute (be the plated film linear speed Degree is 1～5m/ minute), the rete deposit thickness is 200 ; The present invention can also prepare realization as the battery electricity The continuous band-shaped coiled material of other of electrode substrate (such as metal coiled material, woven fabric shape material or foam and nylon wire, The composite sheet material of nonwoven etc.) vacuum coating.
The liquid phase method and the magnetron sputtering method of the present invention and existing chemical nickel plating or dip-coating conductive resin relatively have following advantage: the one, and vacuum plating is compared non-environmental-pollution with liquid phase method.The 2nd, vacuum vapour deposition is than magnetron sputtering method sedimentation rate height, and electroconductibility is strong, bonding force good.The 3rd, vacuum vapour deposition technology is simple and direct, cost is low, sedimentation rate height during plated film, unit cost are lower than liquid phase method, magnetron sputtering method, to prepare the organic foam of conducting film as the made continuous band-shaped nickel foam of electroplating cathode, have the advantages that internal resistance is little, tensile strength is high, snappiness is good, and saved the input and the complicated technology that adopt many complete equipments in the liquid phase method, can reach the purpose that reduces production costs, improves continuous band-shaped nickel foam quality comprehensively.
Claims (6)
1, a kind of method that is used for the processing of organic foam conductionization is characterized in that the vacuum vapour deposition that it adopts arc-over, this method comprise the following steps: to pack into coiled strip → vacuum chamber is vacuumized and heats → evaporation coating → rolling; Vacuumize earlier before the plated film and heat, vacuum tightness is (2～7) * 10
-2Pa heats to 50～90 ℃, charges into operating pressure (2～10) * 10 behind the argon gas
-1Pa, arc current are 10～200A, and the vertical range between this two electrode of coiled material and electric arc target is 100～250mm, and coating speed is 1～5m
2/ minute, to the coiled material double-sided coating.
2, according to the method that is used for the processing of organic foam conductionization of claim 1, its feature also is: film deposition thickness is 200 .
3, according to the method that is used for the processing of organic foam conductionization of claim 1 or 2, its feature also is: can realize the vacuum plating as the compound continuous band-shaped coiled material of other metal coiled materials, woven shape material or the foam of electrode substrate for battery and nylon wire, non-woven fabrics.
4, a kind of winding-type vacuum coater that is exclusively used in claim 1,2 or 3 organic foam metallizing treatment process, its vacuum chamber mainly is made up of coating chamber, electric arc target, unwinding and rewinding chamber and roll shaft transmission mechanism four macrostructures, it is characterized in that: respectively be equipped with one group of electric arc target [4] in single coating chamber [2] both sides, parallel with operation organic foam therebetween respectively, opening the electric arc target of both sides can carry out plated film to the one side of organic foam respectively simultaneously, thereby realizes the double-sided coating to continuous coiled material.
5, equipment according to claim 4 is characterized in that: four macrostructures all are placed in the single vacuum chamber.
6,, it is characterized in that electric arc target is the plane electric arc target according to claim 4 or 5 described equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01119666 CN1117174C (en) | 2001-05-29 | 2001-05-29 | Vacuum evaporation coating method and equipment for organic foamed material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01119666 CN1117174C (en) | 2001-05-29 | 2001-05-29 | Vacuum evaporation coating method and equipment for organic foamed material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1327081A CN1327081A (en) | 2001-12-19 |
| CN1117174C true CN1117174C (en) | 2003-08-06 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 01119666 Expired - Fee Related CN1117174C (en) | 2001-05-29 | 2001-05-29 | Vacuum evaporation coating method and equipment for organic foamed material |
Country Status (1)
| Country | Link |
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| CN (1) | CN1117174C (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100412226C (en) * | 2004-10-18 | 2008-08-20 | 中华映管股份有限公司 | Method for manufacturing front substrate of plasma display, vapor deposition process and apparatus therefor |
| DE102009019146B4 (en) * | 2009-04-29 | 2014-07-24 | THEVA DüNNSCHICHTTECHNIK GMBH | Process and apparatus for high rate coating by high pressure evaporation |
| CN102212791A (en) * | 2011-06-02 | 2011-10-12 | 爱蓝天高新技术材料(大连)有限公司 | Equipment and method for performing magnetron-controlled sputter coating on polyester type polyurethane foam matrix |
| CN103065180B (en) * | 2011-10-18 | 2016-06-22 | 哈尔滨大东方新材料科技股份有限公司 | A kind of processing technology for chipless RFID radio-frequency (RF) tag |
| CN109518154A (en) * | 2019-01-16 | 2019-03-26 | 上海上创超导科技有限公司 | Superconducting strip cushion double-sided coating device |
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2001
- 2001-05-29 CN CN 01119666 patent/CN1117174C/en not_active Expired - Fee Related
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| Publication number | Publication date |
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| CN1327081A (en) | 2001-12-19 |
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