CN111693565B - Dynamic detection system and detection method for electrothermal performance - Google Patents
Dynamic detection system and detection method for electrothermal performance Download PDFInfo
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Abstract
The invention discloses an electrothermal performance dynamic detection system and a detection method. The method comprises the following steps: establishing a relation curve between a response signal output by the probe controller and the temperature of the thermal probe; applying alternating voltage to the sample for dynamic excitation; the thermal probe and the probe controller perform real-time dynamic detection on the sample to be detected to obtain a dynamic response signal; the phase-locked amplifier processes the dynamic response signal in real time to obtain an amplitude value of the dynamic response signal; and the atomic force microscope controller combines the calibrated relation curve with the amplitude value of the dynamic response signal, and analyzes and obtains the electrothermal performance parameters of the sample. The invention can realize the accurate measurement of weak electric thermal response, and realize the purposes of detecting the dynamic change of the electric thermal response of the material in real time and detecting the spatial distribution of the micro-scale electric heating performance of the material in real time.
Description
Technical Field
The invention relates to a dynamic detection system and a detection method for electric heating performance, in particular to a system and a method for directly measuring the electric heating performance of a material in real time.
Background
With the development of the electronic industry, people have higher demands for refrigeration and heat dissipation, and the traditional refrigeration and heat dissipation modes cannot cope with the ever-increasing refrigeration demands, so that novel refrigeration technologies are particularly urgently developed. The electric heating effect of the temperature change of the material is caused by the change of the dipole order degree of the electrolyte material under the action of an external electric field, so that the novel refrigeration mode is potential. The refrigeration device based on the electrothermal effect is a promising solid refrigeration mode due to the characteristics of integration, environmental friendliness, low noise and the like, and the research and development of materials with high electrothermal performance is the main direction of the current electrothermal research. Thus, it is indispensable to conduct a direct dynamic test of the material properties in real time.
Currently, the direct detection method of the electrothermal performance is mainly implemented by the existing commercial instruments or devices, such as infrared temperature measurement, differential thermal analyzer, or thermocouples. However, the existing direct method mainly measures the electrothermal response in the time domain, has the defects of long time consumption and great influence on environment, can not monitor the electrothermal performance change of the material in real time, and can not measure the local electrothermal performance of the material in real time and dynamically in situ. In addition, the current electrothermal detection technology is difficult to detect weak electrothermal response signals, can not measure dynamic electrothermal response, can not monitor electrothermal performance in real time, and is difficult to expand to electrothermal response detection of low-dimensional materials. This seriously hampers the development of electrothermal refrigeration technology and the intensive study of electrothermal mechanism. Therefore, research on novel electrothermal performance dynamic detection systems and detection methods is urgently needed.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides the electric heating performance dynamic detection system and the electric heating performance dynamic detection method, which can directly and dynamically measure the electric heating performance of the material in real time, can rapidly and accurately detect the electric heating performance change of the material, and have strong environment interference resistance. The invention can detect the weak electrothermal response signal, overcomes the problem that the weak electrothermal response signal is difficult to detect in the prior art, and can be popularized to various commercial atomic force microscope systems.
The technical scheme provided by the invention is as follows:
the dynamic electrothermal performance detecting system includes sample stage, exciting signal source, exciting signal amplifier, phase locking amplifier, thermal probe, atomic force microscope controller and probe controller;
the sample table is used for bearing a sample to be measured, and controlling the temperature of the thermal probe in the calibration process;
The excitation signal source is used for generating an alternating voltage signal and a reference signal required by the phase-locked amplifier;
The excitation signal amplifier is used for amplifying an alternating voltage signal generated by an excitation signal source to obtain excitation voltage, applying the excitation voltage to electrodes at two ends of a sample to be detected, and exciting the sample to be detected to generate electrothermal dynamic response;
The tip of the thermal probe is contacted with the sample table or the sample to be detected, and is used for detecting the temperature of the sample table or the sample to be detected and converting the temperature into an electric signal to be output;
the probe controller is used for applying the electric signals required by the work of the thermal probe, detecting the electric signals output by the thermal probe and outputting corresponding response signals;
The lock-in amplifier is used for carrying out real-time frequency locking processing on the dynamic response signal output by the probe controller in the detection process, obtaining the amplitude value of the dynamic response signal and outputting the amplitude value to the atomic force microscope controller;
The atomic force microscope controller comprises a probe driving module and a data processing module, wherein the probe driving module is used for spatially positioning the thermal probe, the data processing module is used for obtaining a relation curve of response signals along with temperature change based on response signals output by the probe controller and temperature change conditions of the thermal probe (sample stage) in the calibration process, obtaining an amplitude value output by the lock-in amplifier in the detection process, obtaining a temperature value corresponding to the amplitude value according to the relation curve, and obtaining the electrothermal performance data of a sample in real time by combining the magnitude of excitation voltage.
Further, the thermal probe comprises two cantilevers, the front ends of the two cantilevers are contacted, the thermal probe is formed into a needle point of the thermal probe, and the needle point part is formed by a thermistor.
Further, the probe controller comprises a signal detector and a signal amplifier;
The signal detector is used for detecting a response signal caused by the temperature change of the thermal probe and outputting the response signal to the signal amplifier;
the signal amplifier is used for carrying out preliminary amplification on the response signal (carrying out integral amplification on the received signal) and outputting the response signal to the atomic force microscope controller and the phase-locked amplifier.
The signal detector adopts a Wheatstone bridge, and the signal amplifier adopts a differential amplifier. The Wheatstone bridge comprises four bridge arms, wherein two adjacent bridge arms are respectively provided with a constant value resistor, the other bridge arm is provided with a variable resistor, a heat probe is arranged on the remaining bridge arm, the four bridge arms form four nodes, the bridge arm connecting node where the two constant value resistors are positioned is taken as a signal input end and is connected with an input signal source (the output end of a signal generating module in an atomic force microscope controller), two nodes adjacent to the node where the signal input end is positioned are connected with the input end of a differential signal amplifier, and the remaining node is connected with a grounding end;
The output end of the differential signal amplifier is connected with the atomic force microscope controller and the phase-locked amplifier, and the signals are amplified and then output to the atomic force microscope controller data processing module and the phase-locked amplifier.
Further, the atomic force microscope controller comprises a signal generation module, and the output end of the signal generation module is connected with the probe signal controller and is used for providing electric signals required by the operation of the probe controller.
Further, the atomic force microscope controller comprises an imaging module for displaying the electrothermal performance data obtained by the data processing module in real time.
Further, two parallel electrodes are vertically arranged on the sample table, and a sample to be detected is placed between the two parallel electrodes for detection.
Further, an electrode is horizontally arranged on the sample table, a sample to be detected is placed on the electrode for detection, and a thermal probe contacted with the upper surface of the sample to be detected is used as the other electrode.
The electric heating performance dynamic detection method adopts the electric heating performance dynamic detection system, and the detection method comprises the following steps:
step 1, calibrating;
Setting the temperature of a sample stage; the thermal probe is contacted with the sample stage, the temperature of the sample stage is detected, and the temperature of the sample stage is converted into an electric signal; the probe controller detects the electric signal on the thermal probe and outputs a response signal to the atomic force microscope controller;
The atomic force microscope controller combines the temperature change condition of the sample stage to obtain a relation curve of response signals along with the temperature change;
Step 2, detecting;
Placing a sample to be tested on a sample table;
generating an alternating voltage signal through an excitation signal source, and amplifying the alternating voltage signal through an excitation signal amplifier to obtain an excitation voltage; applying excitation voltage to the sample to be detected, and exciting the sample to be detected to generate electrothermal dynamic response;
the thermal probe senses the temperature dynamic change of the surface of the sample to be detected in real time and converts the temperature dynamic change into a dynamic electric signal; the probe controller detects dynamic electric signals on the thermal probe and outputs dynamic response signals to the lock-in amplifier;
the phase-locked amplifier is used for processing the reference signal output by the excitation signal source and the dynamic response signal output by the probe controller in real time to obtain the amplitude value of the dynamic response signal, and inputting the amplitude value to the atomic force microscope controller;
And (3) the atomic force microscope controller acquires the amplitude value, acquires a temperature change value corresponding to the amplitude value according to the relation curve acquired in the step (1), and acquires the electrothermal performance data of the sample in real time by combining the excitation voltage.
In step 2, the excitation signal source generates an ac voltage signal with a constant frequency, the afm controller fixes the thermal probe at a certain point on the surface of the sample to be tested, and detects the dynamic change of the electrothermal property of the point on the sample to be tested in the time domain.
Further, the excitation signal source generates alternating voltage signals with different frequencies, the atomic force microscope controller fixes the thermal probe at a certain point on the surface of the sample to be detected, and the dynamic change condition of the electric heating performance of the point on the sample to be detected under the frequency domain is detected.
Further, the atomic force microscope controller controls the thermal probe to move on the surface of the sample to be detected, a certain area of the sample to be detected is scanned and measured, the excitation voltage frequency of the sample to be detected is kept unchanged, and the spatial distribution of the electrothermal performance of the sample to be detected is detected.
Further, the ratio of the temperature variation of the sample to be measured to the electric field variation between the two electrodes is taken as the electrothermal performance parameter of the sample to be measured, wherein the electric field value is the ratio of the exciting voltage value applied to the electrodes at the two ends of the sample to be measured to the distance between the two electrodes.
The invention has the characteristics of high detection sensitivity, short time consumption, strong environment interference resistance and the like, can realize the accurate measurement of weak electrothermal response, and realizes the purposes of detecting the dynamic change of the electrothermal response of the material in real time and detecting the spatial distribution of the micro-scale electrothermal performance of the material in real time.
The beneficial effects are that:
The electric heating performance dynamic detection system and the detection method provided by the invention can be used for directly and dynamically measuring the electric heating response of the material in real time. The frequency locking technology is used for detecting the weak electrothermal response signals, the weak electrothermal response signals submerged by noise can be captured, the amplitude of the weak electrothermal response signals is measured, the problem that the weak electrothermal response signals are difficult to detect in the prior art is solved, the problem that the dynamic electrothermal response cannot be tested at present is solved, the problem that the test is easily affected by environment is solved, and the problem that the electrothermal response cannot be directly measured in real time in the conventional test method is solved. The method adopted by the invention realizes the real-time high-precision in-situ quantitative characterization of the electrothermal property of the material. The method of the invention realizes the rapid and accurate real-time quantitative measurement of the electrothermal performance of the material by calibrating the response signal and using the phase-locked amplification technology. Provides a new way and a new method for researching the dynamic change of the electrothermal property of the material for researchers in the field of electrothermal effect.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below. It is apparent that the drawings described below are only some embodiments of the present invention, and that other drawings may be obtained from these drawings without inventive effort for a person of ordinary skill in the art.
FIG. 1 is a schematic diagram of the structure of the dynamic detection system for electrothermal performance of the present invention;
FIG. 2 is a schematic structural diagram of the dynamic electrothermal performance detection system of FIG. 1 according to an alternative embodiment, in which the excitation voltage is changed from the two-electrode application mode shown in FIG. 1 to the sample bottom application mode shown in FIG. 2;
FIG. 3 is a flow chart of the electrothermal performance dynamic detection method of the present invention;
FIG. 4 is a graph showing the relationship between the response signal and the temperature calibrated by the dynamic detection system for electrothermal performance shown in FIGS. 1 and 2;
FIG. 5 is a graph of the time domain of the electrothermal response signal of the sample under test under AC voltage excitation;
FIG. 6 is a graph of the frequency domain of the electrothermal response temperature change of the sample to be measured under AC voltage excitation;
FIG. 7 is a graph showing the distribution of the electric heating performance of the micro-area of the sample to be measured in real time;
reference numerals illustrate:
1. The device comprises a sample platform, 2, electrodes, 3, a sample, 4, a thermal probe cantilever, 5, a thermistor, 6, a thermal probe, 7, an atomic force microscope controller, 8, a probe controller, 9, a lock-in amplifier, 10, an excitation signal source, 11, an excitation signal amplifier, 12 and a bottom electrode.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention become more apparent, the technical solutions in the embodiments of the present invention will be described in more detail with reference to the accompanying drawings in the embodiments of the present invention. It will be apparent that the described embodiments are only some, but not all, of the embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present invention without any inventive effort, are within the scope of the present invention.
Referring to fig. 1, fig. 1 is a schematic structural diagram of an embodiment of the dynamic electrothermal performance detection system according to the present invention. The dynamic electrothermal performance detection system is used for detecting electrothermal performance changes of materials in real time and comprises a sample stage 1, an excitation signal source 10, an excitation signal amplifier 11, a lock-in amplifier 9, a thermal probe 6, an atomic force microscope controller 7 and a probe controller 8. The sample table 1 is used for bearing and controlling the temperature of a sample 3 to be tested; the excitation signal source 10 is used for generating alternating voltage signals required by electrothermal dynamic excitation and reference signals required by the phase-locked amplifier 9; the excitation signal amplifier 11 is used for amplifying an alternating voltage signal generated by the excitation signal source 10 to obtain excitation voltage, and then applying the excitation voltage to the electrodes 2 at two ends of the sample 3 to be detected to excite the sample 3 to be detected to generate an electrothermal effect; the tip of the thermal probe 6 is contacted with the sample 3 to be detected, and is used for sensing the temperature of the sample 3 to be detected and converting the temperature into an electric signal; the lock-in amplifier 9 is used for performing frequency locking processing on the dynamic response signal output by the probe controller 8 to obtain an amplitude value of the dynamic response signal, and inputting the amplitude value into the atomic force microscope controller 7; the atomic force microscope controller 7 is used for spatially positioning the thermal probe 6, providing voltage to drive the probe controller 8 to work, and carrying out imaging processing on the amplitude value output by the lock-in amplifier 9; the probe controller 8 is connected with the thermal probe 6, and is used for applying electric signals required by the operation of the thermal probe 6, detecting the electric signals on the thermal probe and outputting response signals to the lock-in amplifier 9; and analyzing and obtaining the electrothermal performance value of the sample 3 to be tested according to the relation between the response signal and the temperature and the applied electrothermal excitation voltage.
As shown in fig. 1, the excitation signal source 10 generates an ac voltage signal, and after being amplified by the excitation signal amplifier 11, the ac voltage signal is applied to two ends of the sample 3 to be measured through the electrodes 2, and the reference signal with the same frequency is output to the phase-locked amplifier 9.
In a variant embodiment of fig. 1, as shown in fig. 2, the electrode 2 may be arranged at the bottom of the sample 3 to be measured, and an ac excitation voltage is applied from the bottom of the sample 3 to be measured, as shown by the bottom electrode 12, the bottom electrode 12 being supplied with an excitation voltage signal by an excitation signal amplifier 11.
The probe controller 8 is configured to apply an electrical signal required for the operation of the thermal probe 6, and detect an electrical signal output by the thermal probe 6, generate a corresponding response signal, and output the response signal to the lock-in amplifier 9 or the atomic force microscope controller 7.
The lock-in amplifier 9 is used for performing real-time frequency locking processing on the dynamic response signal output by the probe controller 8 in the detection process, obtaining the amplitude value of the dynamic response signal, and outputting the amplitude value to the atomic force microscope controller 7.
The atomic force microscope controller 7 comprises a probe driving module and a data processing module, wherein the probe driving module is used for spatially positioning the thermal probe 6, and the data processing module is used for obtaining a relation curve of response signals along with temperature change based on response signals output by the probe controller 8 and temperature change conditions of the sample stage 3 (the thermal probe 6) in the calibration process, obtaining an amplitude value output by the lock-in amplifier 9 in the detection process, combining the response signal relation curve to convert the amplitude value into a corresponding temperature value, and combining the magnitude of excitation voltage to obtain the electrothermal performance data of the sample in real time.
The thermal probe 6 is composed of a thermistor needle tip 5 and a probe cantilever 4, and when the sample 3 to be measured causes electrothermal effect temperature change due to electrothermal excitation, the electric signal of the thermal probe 6 changes along with the electrothermal temperature change of the sample to be measured.
In this embodiment, when the sample 3 to be tested generates an electrothermal response, the thermal probe 6 detects the electrothermal response in real time and converts the electrothermal response into an electrical signal for output, the probe controller 8 detects the signal and outputs a corresponding response signal, the lock-in amplifier 9 processes the response signal in real time to obtain an amplitude value thereof, and obtains a temperature value corresponding to the amplitude value on a curve of the relation between the response signal and temperature, and then the applied excitation voltage is combined, thereby obtaining the electrothermal performance parameters of the sample 3 to be tested.
FIG. 3 is a flow chart of the method for dynamically detecting electrothermal performance according to the present invention. The electrothermal performance dynamic detection method can adopt the electrothermal performance dynamic detection system. The electric heating performance dynamic detection method comprises the following steps:
Step1, calibrating, namely establishing a relation curve of response signals along with temperature changes;
step2, providing alternating voltage to electrically and dynamically excite the sample 3 to be tested;
Step3, carrying out real-time dynamic detection on the sample 3 to be detected by the thermal probe and the probe controller to obtain a dynamic response signal;
step 4, the phase-locked amplifier 9 processes the dynamic response signal in real time to obtain the amplitude value of the dynamic response signal;
And 5, analyzing and obtaining the electrothermal performance parameters of the sample 3 by combining the calibrated relation curve and the amplitude value of the dynamic response signal by the atomic force microscope controller.
Specifically, in one embodiment, in step 1, the temperature of the sample stage 1 is set; contacting the thermal probe 6 with the sample stage 1, sensing the temperature of the sample stage 1, and converting it into an electrical signal; the probe controller 8 detects the electric signal on the thermal probe 6 and outputs a response signal to the atomic force microscope controller 7; the temperature of the sample table 1 is regulated, the process is repeated for a plurality of times, and a plurality of groups of temperature-response signal values are obtained; the atomic force microscope controller 7 fits a relationship curve of response signals with temperature changes as shown in fig. 4 based on a plurality of sets of temperature-response signal values.
In step 2, the excitation signal source 9 generates an ac voltage signal, and the ac voltage signal is amplified by the excitation signal amplifier 11 to obtain an excitation voltage, and the excitation voltage is applied to the sample 3 to be measured to excite the sample 3 to be measured to generate an electrothermal effect.
In the step 3, the atomic force microscope controller 7 controls the thermal probe 6 to sense the temperature change of the surface of the sample 3 to be measured in real time at a certain position on the surface of the sample, and converts the temperature change into a dynamic electric signal; the probe controller 8 detects the dynamic electrical signal on the thermal probe 6 and outputs a dynamic response signal to the lock-in amplifier 9.
In step 4, the lock-in amplifier 9 processes the reference signal output by the excitation signal source 10 and the dynamic response signal output by the probe controller 8 in real time to obtain an amplitude value of the dynamic response signal, and inputs the amplitude value to the afm controller 7.
In step 5, the atomic force microscope controller 7 analyzes the relation curve between the contrast amplitude value and the calibration to obtain the electrothermal response temperature change value. And (3) analyzing and calculating to obtain the electrothermal performance parameters of the sample 3 to be detected by combining the applied alternating current excitation voltage, and imaging in real time.
As shown in fig. 5, based on the electrothermal performance dynamic detection system and detection method of the present invention, the excitation signal source 10 generates an ac voltage signal with a constant frequency, and the thermal probe 6 is positioned at a certain point on the surface of the sample 3 to be detected by the atomic force microscope controller 7, so as to detect the dynamic variation condition of the electrothermal performance parameter at the certain point on the sample 3 to be detected in the time domain.
As shown in fig. 6, based on the electrothermal performance dynamic detection system and detection method of the present invention, the excitation signal source 10 generates ac voltage signals with different frequencies, and the thermal probe is positioned at a certain point on the surface of the sample 3 to be detected by the atomic force microscope controller 7, so as to detect the dynamic change condition of the electrothermal response temperature change value of the certain point on the sample 3 to be detected in the frequency domain.
As shown in fig. 7, according to the system and method for dynamically detecting electrothermal performance of the present invention, the atomic force microscope controller 7 controls the thermal probe 6 to move on the surface of the sample 3 to be detected, and scan and measure a certain area of the sample 3 to be detected, so as to obtain the real-time spatial distribution of electrothermal performance parameters of the sample 3 to be detected under dynamic excitation.
Compared with the prior art, the method can be used for directly and dynamically measuring the electrothermal response of the material in real time, and the frequency locking technology is used for detecting the weak electrothermal response signal, so that the problem that the weak electrothermal response signal is difficult to detect in the prior art is solved, the problem that the electrothermal response which dynamically changes in the prior art cannot be tested at present is solved, the problem that the test in the prior art is easily influenced by environment is solved, and the problem that the electrothermal response cannot be directly and dynamically measured in real time in the current test method is realized. The method adopted by the invention realizes real-time high-precision in-situ quantitative characterization of the electrothermal property of the material and real-time dynamic measurement and imaging of the electrothermal property of the micro-area of the material. The system has simple structure and strong compatibility, is suitable for different commercial atomic force microscope systems, is a new technology and a new method which are easy to popularize and apply, and is expected to be applied to the research field of the electrothermal effect.
The foregoing description of the preferred embodiments is provided to enable any person skilled in the art to make and use the present invention. Various parameter modifications to these examples are simple and convenient for their scientific research work. Equivalent variations from the claims of the invention are therefore intended to be within the scope of the invention.
Claims (8)
1. The electric heating performance dynamic detection system is characterized by comprising a sample stage, an excitation signal source, an excitation signal amplifier, a phase-locked amplifier, a thermal probe, an atomic force microscope controller and a probe controller;
the sample table is used for bearing a sample to be measured, and controlling the temperature of the thermal probe in the calibration process;
The excitation signal source is used for generating an alternating voltage signal and a reference signal required by the phase-locked amplifier;
The excitation signal amplifier is used for amplifying an alternating voltage signal generated by an excitation signal source to obtain excitation voltage, applying the excitation voltage to electrodes at two ends of a sample to be detected, and exciting the sample to be detected to generate electrothermal dynamic response;
The thermal probe comprises two cantilevers, the front ends of the two cantilevers are contacted, the tip of the thermal probe is formed, and the tip part of the thermal probe is formed by a thermistor; the tip of the thermal probe is contacted with the sample table or the sample to be detected, and is used for detecting the temperature of the sample table or the sample to be detected and converting the temperature into an electric signal to be output;
the probe controller is used for applying the electric signals required by the work of the thermal probe, detecting the electric signals output by the thermal probe and outputting corresponding response signals; the probe controller comprises a signal detector and a signal amplifier; the signal detector is used for detecting a response signal caused by the temperature change of the thermal probe and outputting the response signal to the signal amplifier; the signal amplifier is used for carrying out preliminary amplification on the response signal and outputting the response signal to the atomic force microscope controller and the lock-in amplifier;
The lock-in amplifier is used for carrying out real-time frequency locking processing on the dynamic response signal output by the probe controller in the detection process, obtaining the amplitude value of the dynamic response signal and outputting the amplitude value to the atomic force microscope controller;
The atomic force microscope controller comprises a probe driving module and a data processing module, wherein the probe driving module is used for spatially positioning the thermal probe, the data processing module is used for obtaining a relation curve of response signals along with temperature change based on response signals output by the probe controller and temperature change conditions of the thermal probe in the calibration process, obtaining an amplitude value output by the lock-in amplifier in the detection process, obtaining a temperature value corresponding to the amplitude value according to the relation curve, and obtaining electrothermal performance data of a sample in real time by combining the magnitude of excitation voltage.
2. The dynamic electrothermal performance detection system according to claim 1, wherein the atomic force microscope controller comprises a signal generation module, and an output end of the signal generation module is connected with the probe signal controller and is used for providing an electrical signal required by the operation of the probe controller.
3. The dynamic electrothermal performance detection system of claim 1, wherein the atomic force microscope controller includes an imaging module for displaying the electrothermal performance data obtained by the data processing module in real time.
4. A dynamic detection method of electrothermal performance, characterized in that the dynamic detection system of electrothermal performance according to any one of claims 1 to 3 is adopted, and the detection method comprises the following steps:
step 1, calibrating;
Setting the temperature of a sample stage; the thermal probe is contacted with the sample stage, the temperature of the sample stage is detected, and the temperature of the sample stage is converted into an electric signal; the probe controller detects the electric signal on the thermal probe and outputs a response signal to the atomic force microscope controller;
The atomic force microscope controller combines the temperature change condition of the sample stage to obtain a relation curve of response signals along with the temperature change;
Step 2, detecting;
Placing a sample to be tested on a sample table;
generating an alternating voltage signal through an excitation signal source, and amplifying the alternating voltage signal through an excitation signal amplifier to obtain an excitation voltage; applying excitation voltage to the sample to be detected, and exciting the sample to be detected to generate electrothermal dynamic response;
the thermal probe senses the temperature dynamic change of the surface of the sample to be detected in real time and converts the temperature dynamic change into a dynamic electric signal; the probe controller detects dynamic electric signals on the thermal probe and outputs dynamic response signals to the lock-in amplifier;
the phase-locked amplifier is used for processing the reference signal output by the excitation signal source and the dynamic response signal output by the probe controller in real time to obtain the amplitude value of the dynamic response signal, and inputting the amplitude value to the atomic force microscope controller;
And (3) the atomic force microscope controller acquires the amplitude value, acquires a temperature change value corresponding to the amplitude value according to the relation curve acquired in the step (1), and acquires the electrothermal performance data of the sample in real time by combining the excitation voltage.
5. The method according to claim 4, wherein in the step 2, the excitation signal source generates an ac voltage signal with a constant frequency, the afm controller fixes the thermal probe at a certain point on the surface of the sample to be measured, and detects the dynamic change of the electrothermal property of the point on the sample to be measured in the time domain.
6. The method for dynamically detecting electrothermal properties according to claim 4, wherein the excitation signal source generates alternating voltage signals with different frequencies, the atomic force microscope controller fixes the thermal probe at a certain point on the surface of the sample to be detected, and the dynamic variation condition of the electrothermal properties at the certain point on the sample to be detected in the frequency domain is detected.
7. The method for dynamically detecting electrothermal properties according to claim 4, wherein the thermal probe is controlled to move on the surface of the sample to be detected by the atomic force microscope controller, a certain area of the sample to be detected is scanned and measured, the excitation voltage frequency of the sample to be detected is kept unchanged, and the spatial distribution of the electrothermal properties of the sample to be detected is detected.
8. The method according to any one of claims 4 to 7, wherein a ratio of a temperature variation of the sample to be measured to a variation of an electric field between two electrodes thereof is used as the electrothermal performance parameter of the sample to be measured, and the electric field value is a ratio of an excitation voltage value applied to the electrodes at both ends of the sample to be measured to a distance between the two electrodes.
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