CN111693565A - Dynamic detection system and detection method for electric heating performance - Google Patents
Dynamic detection system and detection method for electric heating performance Download PDFInfo
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- CN111693565A CN111693565A CN201910185444.XA CN201910185444A CN111693565A CN 111693565 A CN111693565 A CN 111693565A CN 201910185444 A CN201910185444 A CN 201910185444A CN 111693565 A CN111693565 A CN 111693565A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/20—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity
Abstract
The invention discloses a dynamic detection system and a dynamic detection method for electric heating performance. The method comprises the following steps: establishing a relation curve between the response signal output by the probe controller and the temperature of the thermal probe; applying an alternating voltage to the sample to carry out dynamic excitation; the thermal probe and the probe controller carry out real-time dynamic detection on a sample to be detected to obtain a dynamic response signal; the phase-locked amplifier carries out real-time processing on the dynamic response signal to obtain an amplitude value of the dynamic response signal; and the atomic force microscope controller is combined with the calibrated relation curve and the amplitude value of the dynamic response signal to analyze and obtain the electric heating performance parameters of the sample. The invention can realize the accurate measurement of weak electric heating response, and realize the purposes of detecting the dynamic change of the electric heating response of the material in real time and detecting the spatial distribution of the micro-scale electric heating performance of the material in real time.
Description
Technical Field
The invention relates to a dynamic detection system and a detection method for electric heating performance, in particular to a system and a method for directly measuring the electric heating performance of a material in real time.
Background
With the development of the electronic industry, people have higher and higher requirements on refrigeration and heat dissipation, and the traditional refrigeration and heat dissipation mode cannot meet the increasing refrigeration requirements, so that a novel refrigeration technology is urgently developed. The electric heating effect of the temperature change of the material is caused by the fact that the dipole order of the electrolyte material is changed under the action of an external electric field, and the electric heating refrigeration device is a potential novel refrigeration mode. The refrigeration device based on the electrothermal effect has the characteristics of integration, environmental friendliness, low noise and the like, so that the refrigeration device is a promising solid-state refrigeration mode, and the research and development of materials with high electrothermal performance are the main direction of electrothermal research at present. Thus, it is necessary to directly and dynamically detect the material properties in real time.
Currently, the direct detection method for electrothermal performance is mainly through the existing commercial instruments or devices, such as infrared thermometers, differential thermal analyzers, or thermocouples. However, the existing direct method mainly measures the electrothermal response in the time domain, has the disadvantages of long time consumption and large environmental influence, cannot monitor the change of the electrothermal performance of the material in real time, and cannot perform real-time dynamic in-situ measurement on the local electrothermal performance of the material. In addition, the existing electrothermal detection technology is difficult to detect weak electrothermal response signals, cannot measure dynamically-changed electrothermal response, cannot monitor the electrothermal performance in real time, and is difficult to expand to the electrothermal response detection of low-dimensional materials. This has seriously hampered the development of electrothermal refrigeration technology and the intensive study of electrothermal mechanism. Therefore, there is an urgent need to develop a new dynamic detection system and method for electrical heating performance.
Disclosure of Invention
The invention solves the problems in the prior art, and provides a dynamic detection system and a dynamic detection method for electric heating performance aiming at the defects of the prior art, which can directly and dynamically measure the electric heating performance of a material in real time, can quickly and accurately detect the change of the electric heating performance of the material, and have strong environmental interference resistance. The invention can detect weak electrothermal response signals, overcomes the problem that the weak electrothermal response signals are difficult to detect in the prior art, and can be popularized to various types of commercial atomic force microscope systems.
The technical scheme provided by the invention is as follows:
a dynamic detection system for electric heating performance comprises a sample stage, an excitation signal source, an excitation signal amplifier, a phase-locked amplifier, a thermal probe, an atomic force microscope controller and a probe controller;
the sample stage is used for bearing a sample to be tested and controlling the temperature of the thermal probe in the calibration process;
the driving signal source is used for generating an alternating voltage signal and a reference signal required by the phase-locked amplifier;
the excitation signal amplifier is used for amplifying an alternating voltage signal generated by the excitation signal source to obtain an excitation voltage, and applying the excitation voltage to electrodes at two ends of a sample to be tested to excite the sample to be tested to generate an electrothermal dynamic response;
the probe tip of the thermal probe is contacted with the sample table or a sample to be detected, and is used for detecting the temperature of the sample table or the sample to be detected and converting the temperature into an electric signal to be output;
the probe controller is used for applying an electric signal required by the operation of the thermal probe to the thermal probe, detecting the electric signal output by the thermal probe and outputting a corresponding response signal;
the phase-locked amplifier is used for carrying out real-time frequency locking processing on the dynamic response signal output by the probe controller in the detection process to obtain the amplitude value of the dynamic response signal and outputting the amplitude value to the atomic force microscope controller;
the atomic force microscope controller comprises a probe driving module and a data processing module, wherein the probe driving module is used for carrying out space positioning on the thermal probe, the data processing module is used for obtaining a relation curve of response signals changing along with temperature based on response signals output by the probe controller and the temperature change condition of the thermal probe (sample stage) in the calibration process, then obtaining an amplitude value output by the phase-locked amplifier in the detection process, obtaining a temperature value corresponding to the amplitude value according to the relation curve, and obtaining the electric heating performance data of the sample in real time by combining the size of the excitation voltage.
Further, the thermal probe comprises two cantilevers, the front ends of the two cantilevers are contacted to form a probe tip of the thermal probe, and the probe tip part is formed by a thermistor.
Further, the probe controller includes a signal detector and a signal amplifier;
the signal detector is used for detecting a response signal caused by the temperature change of the heat probe and outputting the response signal to the signal amplifier;
the signal amplifier is used for carrying out preliminary amplification (carrying out integral amplification on the received signal) on the response signal and outputting the response signal to the atomic force microscope controller and the phase-locked amplifier.
The signal detector adopts a Wheatstone bridge, and the signal amplifier adopts a differential amplifier. The Wheatstone bridge comprises four bridge arms, wherein two adjacent bridge arms are respectively provided with a constant value resistor, the other bridge arm is provided with a variable resistor, the thermal probe is arranged on the rest bridge arm, the four bridge arms form four nodes, the connecting node of the bridge arms where the two constant value resistors are located is taken as a signal input end and is connected with an input signal source (the output end of a signal generation module in an atomic force microscope controller), two nodes adjacent to the node where the signal input end is located are connected with the input end of a differential signal amplifier, and the rest node is connected with a grounding end;
the output end of the differential signal amplifier is connected with the atomic force microscope controller and the phase-locked amplifier, and the signal is amplified and then output to the atomic force microscope controller data processing module and the phase-locked amplifier.
Further, the atomic force microscope controller comprises a signal generating module, and the output end of the signal generating module is connected with the probe signal controller and is used for providing an electric signal required by the operation of the probe controller.
Further, the atomic force microscope controller comprises an imaging module which is used for displaying the electrothermal performance data obtained by the data processing module in real time.
Furthermore, two parallel electrodes are vertically arranged on the sample table, and a sample to be detected is placed between the two parallel electrodes for detection.
Furthermore, an electrode is horizontally arranged on the sample table, a sample to be detected is placed on the electrode for detection, and the thermal probe in contact with the upper surface of the sample to be detected is used as the other electrode.
A dynamic detection method for electric heating performance adopts the dynamic detection system for electric heating performance, and the detection method comprises the following steps:
setting the temperature of the sample stage; contacting the thermal probe with the sample stage, detecting the temperature of the sample stage, and converting the temperature into an electric signal; the probe controller detects the electric signal on the thermal probe and outputs a response signal to the atomic force microscope controller;
combining the temperature change condition of the sample stage by the atomic force microscope controller to obtain a relation curve of the response signal along with the temperature change;
placing a sample to be detected on a sample table;
generating an alternating voltage signal by an excitation signal source, and amplifying by an excitation signal amplifier to obtain an excitation voltage; applying an excitation voltage to a sample to be tested, and exciting the sample to be tested to generate an electrothermal dynamic response;
the thermal probe senses the dynamic temperature change of the surface of the sample to be measured in real time and converts the dynamic temperature change into a dynamic electric signal; the probe controller detects the dynamic electric signal on the thermal probe and outputs a dynamic response signal to the phase-locked amplifier;
the phase-locked amplifier processes the reference signal output by the excitation signal source and the dynamic response signal output by the probe controller in real time to obtain the amplitude value of the dynamic response signal, and inputs the amplitude value to the atomic force microscope controller;
and (3) acquiring the amplitude value by the atomic force microscope controller, acquiring a temperature change value corresponding to the amplitude value according to the relation curve obtained in the step (1), and acquiring the electric heating performance data of the sample in real time by combining the size of the excitation voltage.
Further, in the step 2, the excitation signal source generates an alternating voltage signal with a constant frequency, the atomic force microscope controller fixes the thermal probe at a certain point on the surface of the sample to be detected, and the dynamic change condition of the electrothermal performance of the point on the sample to be detected in the time domain is detected.
Further, the excitation signal source generates alternating voltage signals with different frequencies, the atomic force microscope controller fixes the thermal probe at a certain point on the surface of the sample to be detected, and the dynamic change condition of the electrothermal performance of the point on the sample to be detected in the frequency domain is detected.
Furthermore, the atomic force microscope controller controls the thermal probe to move on the surface of the sample to be detected, a certain area of the sample to be detected is scanned and measured, the frequency of the excitation voltage of the sample to be detected is kept unchanged, and the spatial distribution of the electrothermal performance of the sample to be detected is detected.
Further, the ratio of the temperature variation of the sample to be measured to the electric field variation between the two electrodes is used as the electric heating performance parameter of the sample to be measured, wherein the electric field value is the ratio of the excitation voltage value applied to the electrodes at the two ends of the sample to be measured to the distance between the two electrodes.
The method has the characteristics of high detection sensitivity, short time consumption, strong environmental interference resistance and the like, can realize the accurate measurement of weak electrothermal response, and realizes the purposes of detecting the dynamic change of electrothermal response of the material in real time and detecting the spatial distribution of the microscale electrothermal performance of the material in real time.
Has the advantages that:
the dynamic detection system and the detection method for the electric heating performance can directly and dynamically measure the electric heating response of the material in real time. The weak electric heating response signal is detected by using a frequency locking technology, the weak electric heating response signal submerged by noise can be captured, the amplitude of the weak electric heating response signal can be measured, the problem that the weak electric heating response signal is difficult to detect in the prior art is solved, the problem that the dynamically-changed electric heating response cannot be tested at present is solved, the problem that the test is easily influenced by the environment is eliminated, and the problem that the electric heating response cannot be directly measured in real time in the current testing method is solved. The method adopted by the invention realizes the real-time high-precision in-situ quantitative characterization of the electrothermal performance of the material. The method realizes the rapid and accurate real-time quantitative measurement of the electric heating performance of the material by calibrating the response signal and using the phase-locked amplification technology, and realizes the real-time dynamic measurement and the electric heating performance imaging of the electric heating response of the micro-area of the material. Provides a new way and a new method for researching the dynamic change of the electric heating performance of the material for researchers in the field of electric heating effect.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below. It is obvious that the drawings described below are only some embodiments of the invention, and that for a person skilled in the art, other drawings can be obtained from these drawings without inventive effort.
FIG. 1 is a schematic structural diagram of a dynamic detection system for electrical heating performance according to the present invention;
FIG. 2 is a schematic structural diagram of a dynamic electrothermal performance detection system according to a modification of the dynamic electrothermal performance detection system shown in FIG. 1, in which the excitation voltage is applied from the two electrodes shown in FIG. 1 to the sample bottom application shown in FIG. 2;
FIG. 3 is a flow chart of a dynamic detection method of electrical heating performance according to the present invention;
FIG. 4 is a graph illustrating the relationship between the response signal and the temperature calibrated by the dynamic detection system for electric heating performance shown in FIGS. 1 and 2;
FIG. 5 is a time domain graph of an electrothermal response signal of a sample to be measured under AC voltage excitation;
FIG. 6 is a frequency domain graph of the electrothermal response temperature change of a sample to be measured under AC voltage excitation;
FIG. 7 is a spatial distribution diagram of the electrothermal performance of the micro-area of the sample to be detected in real time;
description of reference numerals:
1. the device comprises a sample table, 2, electrodes, 3, a sample, 4, a thermal probe cantilever, 5, a thermistor, 6, a thermal probe, 7, an atomic force microscope controller, 8, a probe controller, 9, a phase-locked amplifier, 10, an excitation signal source, 11, an excitation signal amplifier, 12 and a bottom electrode.
Detailed Description
In order to make the implementation objects, technical solutions and advantages of the present invention clearer, the technical solutions in the embodiments of the present invention will be described in more detail below with reference to the accompanying drawings in the embodiments of the present invention. It is to be understood that the described embodiments are merely exemplary of some, and not necessarily all, embodiments of the invention. All other embodiments, which can be obtained by a person skilled in the art without inventive effort based on the embodiments of the present invention, are within the scope of the present invention.
As shown in fig. 1, fig. 1 is a schematic structural diagram of an embodiment of a dynamic detection system for electrical thermal performance according to the present invention. The dynamic detection system for the electric heating performance is used for detecting the electric heating performance change of a material in real time and comprises a sample table 1, an excitation signal source 10, an excitation signal amplifier 11, a phase-locked amplifier 9, a thermal probe 6, an atomic force microscope controller 7 and a probe controller 8. The sample table 1 is used for bearing and controlling the temperature of a sample 3 to be measured; the excitation signal source 10 is used for generating an alternating voltage signal required by electrothermal dynamic excitation and a reference signal required by the phase-locked amplifier 9; the excitation signal amplifier 11 is used for amplifying an alternating voltage signal generated by the excitation signal source 10 to obtain an excitation voltage, and then the excitation voltage is applied to the electrodes 2 at the two ends of the sample 3 to be tested to excite the sample 3 to be tested to generate an electrothermal effect; the needle tip of the thermal probe 6 is in contact with the sample 3 to be detected, and is used for sensing the temperature of the sample 3 to be detected and converting the temperature into an electric signal; the lock-in amplifier 9 is used for performing frequency locking processing on the dynamic response signal output by the probe controller 8 to obtain an amplitude value of the dynamic response signal, and inputting the amplitude value to the atomic force microscope controller 7; the atomic force microscope controller 7 is used for spatially positioning the thermal probe 6, providing voltage to drive the probe controller 8 to work, and imaging the amplitude value output by the phase-locked amplifier 9; the probe controller 8 is connected with the thermal probe 6 and is used for applying an electric signal required by the operation of the thermal probe 6, detecting the electric signal on the thermal probe and outputting a response signal to the phase-locked amplifier 9; and analyzing to obtain the electric heating performance value of the sample 3 to be detected according to the relationship between the response signal and the temperature and the applied electric heating exciting voltage.
As shown in fig. 1, the excitation signal source 10 generates an ac voltage signal, which is amplified by the excitation signal amplifier 11, applied to two ends of the sample 3 to be measured through the electrodes 2, and outputs a reference signal with the same frequency to the lock-in amplifier 9.
In a modified embodiment of fig. 1, as shown in fig. 2, the electrode 2 may be disposed at the bottom of the sample 3, an ac excitation voltage is applied from the bottom of the sample 3, as shown by a bottom electrode 12, and the bottom electrode 12 is supplied with an excitation voltage signal by an excitation signal amplifier 11.
The probe controller 8 is configured to apply an electrical signal required for operation of the thermal probe 6 to the thermal probe 6, detect an electrical signal output by the thermal probe 6, generate a corresponding response signal, and output the response signal to the lock-in amplifier 9 or the atomic force microscope controller 7.
The phase-locked amplifier 9 is used for performing real-time frequency locking processing on the dynamic response signal output by the probe controller 8 in the detection process, obtaining the amplitude value of the dynamic response signal, and outputting the amplitude value to the atomic force microscope controller 7.
The atomic force microscope controller 7 comprises a probe driving module and a data processing module, the probe driving module is used for spatially positioning the thermal probe 6, the data processing module is used for obtaining a relation curve of response signals along with temperature change based on response signals output by the probe controller 8 and temperature change conditions of the sample stage 3 (thermal probe 6) in a calibration process, obtaining an amplitude value output by the phase-locked amplifier 9 in a detection process, converting the amplitude value into a corresponding temperature value by combining the relation curve of the response signals, and obtaining electric heating performance data of the sample in real time by combining the magnitude of excitation voltage.
The thermal probe 6 is composed of a thermistor needle point 5 and a probe cantilever 4, and when the sample 3 to be detected changes in temperature due to an electrothermal effect caused by electrothermal excitation, an electric signal of the thermal probe 6 changes along with the electrothermal temperature change of the sample to be detected.
In this embodiment, when the sample 3 to be measured generates an electrothermal response, the thermal probe 6 detects the electrothermal response in real time and converts the electrothermal response into an electrical signal for output, the probe controller 8 detects the signal and outputs a corresponding response signal, the lock-in amplifier 9 processes the response signal in real time to obtain an amplitude value of the response signal, and obtains a temperature value corresponding to the amplitude value on a curve of a relationship between the response signal and the temperature, and then the applied excitation voltage is combined to obtain an electrothermal performance parameter of the sample 3 to be measured.
FIG. 3 is a flow chart of the dynamic detection method of electric heating performance of the present invention. The dynamic detection method of the electric heating performance can adopt the dynamic detection system of the electric heating performance. The dynamic detection method for the electric heating performance comprises the following steps:
and 5, analyzing and obtaining the electric heating performance parameters of the sample 3 by combining the calibrated relation curve and the amplitude value of the dynamic response signal by the atomic force microscope controller.
Specifically, in one embodiment, in step 1, the temperature of the sample stage 1 is set; contacting the thermal probe 6 with the sample table 1, sensing the temperature of the sample table 1, and converting the temperature into an electric signal; the probe controller 8 detects the electric signal on the thermal probe 6 and outputs a response signal to the atomic force microscope controller 7; adjusting the temperature of the sample table 1, and repeating the above process for multiple tests to obtain multiple groups of temperature-response signal values; the atomic force microscope controller 7 fits to obtain a curve of the response signal with respect to the temperature change as shown in fig. 4 based on a plurality of sets of temperature-response signal values.
In the step 2, the excitation signal source 9 generates an alternating voltage signal, the alternating voltage signal is amplified by the excitation signal amplifier 11 to obtain an excitation voltage, the excitation voltage is applied to the sample 3 to be tested, and the sample 3 to be tested is excited to generate an electrothermal effect.
In the step 3, the atomic force microscope controller 7 controls the thermal probe 6 to sense the temperature change of the surface of the sample 3 to be detected in real time at a certain position on the surface of the sample, and converts the temperature change into a dynamic electric signal; the probe controller 8 detects the dynamic electrical signal on the thermal probe 6 and outputs a dynamic response signal to the lock-in amplifier 9.
In step 4, the lock-in amplifier 9 processes the reference signal output by the excitation signal source 10 and the dynamic response signal output by the probe controller 8 in real time to obtain an amplitude value of the dynamic response signal, and inputs the amplitude value to the atomic force microscope controller 7.
In step 5, the atomic force microscope controller 7 analyzes the relation curve of the comparison amplitude value and the calibration to obtain an electrothermal response temperature change value. And analyzing and calculating to obtain the electric heating performance parameters of the sample 3 to be detected by combining the magnitude of the applied alternating current excitation voltage, and imaging in real time.
As shown in fig. 5, based on the dynamic detection system and the detection method for electric heating performance of the present invention, the excitation signal source 10 generates an ac voltage signal with a constant frequency, the atomic force microscope controller 7 positions the thermal probe 6 at a certain point on the surface of the sample 3 to be detected, and the dynamic change condition of the electric heating performance parameter at the point on the sample 3 to be detected in the time domain is detected.
As shown in fig. 6, based on the dynamic detection system and the detection method for electric heating performance of the present invention, the excitation signal source 10 generates ac voltage signals with different frequencies, the atomic force microscope controller 7 positions the thermal probe at a certain point on the surface of the sample 3 to be detected, and the dynamic change condition of the electric heating response temperature change value of the point on the sample 3 to be detected in the frequency domain is detected.
As shown in fig. 7, based on the dynamic detection system and the detection method for electric heating performance of the present invention, the atomic force microscope controller 7 controls the thermal probe 6 to move on the surface of the sample 3 to be detected, and performs scanning measurement on a certain area of the sample 3 to be detected, so as to obtain the real-time electric heating performance parameter spatial distribution condition of the sample 3 to be detected under dynamic excitation.
Compared with the prior art, the invention can directly and dynamically measure the electrothermal response of the material in real time, and the invention uses the frequency locking technology to detect the weak electrothermal response signal, thereby overcoming the problem that the weak electrothermal response signal is difficult to detect in the prior art, solving the problem that the dynamically-changed electrothermal response in the prior art can not be tested at present, eliminating the problem that the test in the prior art is easily influenced by the environment, and realizing the problem that the current test method can not directly and dynamically measure the electrothermal response in real time. The method adopted by the invention realizes the real-time high-precision in-situ quantitative characterization of the electrothermal performance of the material, and realizes the real-time dynamic measurement of the electrothermal response of the micro-area of the material and the imaging of the electrothermal performance. The system disclosed by the invention is simple in structure and strong in compatibility, is suitable for different commercial atomic force microscope systems, is a new technology and a new method which are easy to popularize and apply, and is expected to obtain important application in the field of research of electrothermal effect.
The previous description of the preferred embodiments is provided to enable any person skilled in the art to make or use the present invention. The modification of various parameters of these examples is simple and convenient for their scientific work. Therefore, equivalent changes made by the claims of the present invention are also within the scope of the present invention.
Claims (10)
1. A dynamic detection system for electric heating performance is characterized by comprising a sample stage, an excitation signal source, an excitation signal amplifier, a phase-locked amplifier, a thermal probe, an atomic force microscope controller and a probe controller;
the sample stage is used for bearing a sample to be tested and controlling the temperature of the thermal probe in the calibration process;
the driving signal source is used for generating an alternating voltage signal and a reference signal required by the phase-locked amplifier;
the excitation signal amplifier is used for amplifying an alternating voltage signal generated by the excitation signal source to obtain an excitation voltage, and applying the excitation voltage to electrodes at two ends of a sample to be tested to excite the sample to be tested to generate an electrothermal dynamic response;
the probe tip of the thermal probe is contacted with the sample table or a sample to be detected, and is used for detecting the temperature of the sample table or the sample to be detected and converting the temperature into an electric signal to be output;
the probe controller is used for applying an electric signal required by the operation of the thermal probe to the thermal probe, detecting the electric signal output by the thermal probe and outputting a corresponding response signal;
the phase-locked amplifier is used for carrying out real-time frequency locking processing on the dynamic response signal output by the probe controller in the detection process to obtain the amplitude value of the dynamic response signal and outputting the amplitude value to the atomic force microscope controller;
the atomic force microscope controller comprises a probe driving module and a data processing module, wherein the probe driving module is used for carrying out space positioning on the thermal probe, the data processing module is used for obtaining a relation curve of response signals changing along with temperature based on response signals output by the probe controller and the temperature change condition of the thermal probe in the calibration process, then obtaining an amplitude value output by the phase-locked amplifier in the detection process, obtaining a temperature value corresponding to the amplitude value according to the relation curve, and obtaining electric heating performance data of a sample in real time by combining the size of excitation voltage.
2. The dynamic electrothermal performance detection system of claim 1, wherein the thermal probe comprises two cantilevers, the front ends of the two cantilevers are in contact to form a tip of the thermal probe, and the tip of the thermal probe is formed by a thermistor. .
3. The dynamic electrothermal performance detection system of claim 1, wherein the probe controller comprises a signal detector and a signal amplifier;
the signal detector is used for detecting a response signal caused by the temperature change of the heat probe and outputting the response signal to the signal amplifier;
the signal amplifier is used for preliminarily amplifying the response signal and outputting the response signal to the atomic force microscope controller and the phase-locked amplifier.
4. The dynamic electrothermal performance detection system of claim 1, wherein the atomic force microscope controller comprises a signal generating module, an output of which is connected to the probe signal controller for providing an electrical signal required by the operation of the probe controller.
5. The dynamic electrothermal performance detection system of claim 1, wherein the atomic force microscope controller comprises an imaging module for displaying the electrothermal performance data obtained by the data processing module in real time.
6. A dynamic detection method for electric heating performance, which is characterized in that the dynamic detection system for electric heating performance of any one of claims 1 to 5 is adopted, and the detection method comprises the following steps:
step 1, calibrating;
setting the temperature of the sample stage; contacting the thermal probe with the sample stage, detecting the temperature of the sample stage, and converting the temperature into an electric signal; the probe controller detects the electric signal on the thermal probe and outputs a response signal to the atomic force microscope controller;
combining the temperature change condition of the sample stage by the atomic force microscope controller to obtain a relation curve of the response signal along with the temperature change;
step 2, detection;
placing a sample to be detected on a sample table;
generating an alternating voltage signal by an excitation signal source, and amplifying by an excitation signal amplifier to obtain an excitation voltage; applying an excitation voltage to a sample to be tested, and exciting the sample to be tested to generate an electrothermal dynamic response;
the thermal probe senses the dynamic temperature change of the surface of the sample to be measured in real time and converts the dynamic temperature change into a dynamic electric signal; the probe controller detects the dynamic electric signal on the thermal probe and outputs a dynamic response signal to the phase-locked amplifier;
the phase-locked amplifier processes the reference signal output by the excitation signal source and the dynamic response signal output by the probe controller in real time to obtain the amplitude value of the dynamic response signal, and inputs the amplitude value to the atomic force microscope controller;
and (3) acquiring the amplitude value by the atomic force microscope controller, acquiring a temperature change value corresponding to the amplitude value according to the relation curve obtained in the step (1), and acquiring the electric heating performance data of the sample in real time by combining the size of the excitation voltage.
7. The method according to claim 6, wherein in step 2, the excitation signal source generates an AC voltage signal with a constant frequency, the atomic force microscope controller fixes the thermal probe at a point on the surface of the sample to be tested, and the dynamic variation of the electrothermal performance of the point on the sample to be tested in the time domain is detected.
8. The dynamic detection method of electrothermal performance of claim 6, wherein the excitation signal source generates AC voltage signals of different frequencies, the atomic force microscope controller fixes the thermal probe at a point on the surface of the sample to be tested, and the dynamic variation of electrothermal performance of the point on the sample to be tested in the frequency domain is detected.
9. The dynamic detection method of electrothermal performance of claim 6, wherein the atomic force microscope controller controls the thermal probe to move on the surface of the sample to be tested, scans and measures a certain area of the sample to be tested, keeps the frequency of the excitation voltage to the sample to be tested constant, and detects the spatial distribution of electrothermal performance of the sample to be tested.
10. A dynamic detection method of electric heating performance according to any one of claims 6-9, characterized in that the ratio of the temperature variation of the sample to be tested to the electric field variation between two electrodes is used as the electric heating performance parameter of the sample to be tested, wherein the electric field value is the ratio of the excitation voltage value applied to the electrodes at two ends of the sample to be tested to the distance between the two electrodes.
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| CN113588990A (en) * | 2021-08-16 | 2021-11-02 | 深圳先进技术研究院 | Sample stage and test system for atomic force microscope |
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| CN113588990A (en) * | 2021-08-16 | 2021-11-02 | 深圳先进技术研究院 | Sample stage and test system for atomic force microscope |
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