CN209342758U - A kind of electric heating property detection system - Google Patents
A kind of electric heating property detection system Download PDFInfo
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- CN209342758U CN209342758U CN201822156433.2U CN201822156433U CN209342758U CN 209342758 U CN209342758 U CN 209342758U CN 201822156433 U CN201822156433 U CN 201822156433U CN 209342758 U CN209342758 U CN 209342758U
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Abstract
The utility model provides a kind of electric heating property detection system, and the system comprises signal generator, high-voltage amplifier, alternating temperature platform, thermal probe, atomic force microscope main controller, probe signals controller and Signal acquiring and processing devices.It the described method comprises the following steps: thermal probe being demarcated by alternating temperature platform；High-voltage amplifier provides voltage and carries out electric heating excitation to sample to be tested；Thermal probe perceives the temperature change of sample to be tested, and is exported with electric signal；The electric signal that probe signals controller exports thermal probe detects, and is acquired by Signal acquiring and processing device；Signal acquiring and processing device obtains the temperature variations of sample to be tested according to collected electric signal and nominal data, in conjunction with the voltage applied on sample to be tested, obtains its electric heating property parameter.The utility model can directly measure the micro and macro electric heating property of material, and accuracy is high, and applicability is wide.
Description
Technical field
The utility model provides a kind of electric heating property detection system, in particular to a kind of directly to measure material electric heating performance
System.
Background technique
With the development of microelectric technique, the heat dissipation that traditional Compressing Refrigeration can no longer meet microelectronic component is needed
It asks, the solid-state refrigerating method of Development of Novel is particularly important.Electrocaloric effect (electrocaloric) is dielectric substance in dispatch from foreign news agency
The polarization degree of order changes under the action of, so as to cause material Entropy Changes relevant to polarization, so that the temperature of material
It changes, therefore may be implemented to freeze.Refrigeration device based on electrocaloric effect has miniaturization, and noiseless, low cost etc. is excellent
Point is expected to become the ideal style of microelectronic device refrigeration, this has high-performance electric fuel factor with regard to urgent need people research and development
Material.Accompanying this, the detection system and detection method of material electric heating performance seem indispensable.
Currently, indirect method and two kinds of direct method can be divided into the detection method of electric heating property.Indirect method is by material
The measurement of polarization intensity obtains the polarization value of not same electric field material at a temperature of, then material is calculated by fitting and numerical value
Electrocaloric effect temperature variate, accuracy of measurement and applicability are by certain query.Direct method is by thermocouple, temperature-sensitive electricity
Resistance, differential thermal analyzer or infrared imaging mode directly measure the electro-thermal response of material, and analysis gained measurement data obtains material
Macroscopical electric heating property, the electro-thermal response data that direct method obtains are more intuitive and more reliable.But the direct method currently existed
Can not local electric heating property to material carry out measurement in situ, and the performance of material is directly related with its microstructure, directly
The local electric heating property of material is detected, facilitates the microcosmic mechanism for understanding electrocaloric effect, to further increase material
Electric heating property provides foundation.Also, current electric heating direct method measuring system is complicated, is not easy to promotion and application, and for thickness
The electric heating property for spending lesser thin-film material is difficult to measure.This significantly limits research of the people to electrocaloric effect mechanism, system
The about development of solid-state Refrigeration Technique.
It would therefore be highly desirable to the electric heating property detection system and detection method of Development of Novel.
Utility model content
The prior art problem that the utility model is solved proposes a kind of electric heating property in view of the deficiencies of the prior art
Detection system can directly measure the micro and macro electric heating property of material, can quickly obtain the electric heating property of material, and
Accuracy is high, and applicability is wide.
A kind of electric heating property detection system, including signal generator, high-voltage amplifier, alternating temperature platform, thermal probe, atomic force are aobvious
Micro mirror main controller, probe signals controller and Signal acquiring and processing device；
The signal generator is used to generate the voltage signal in different wave and period, and voltage signal is input to high pressure
In amplifier；
The voltage signal that the high-voltage amplifier is used to input signal generator amplifies, and is then applied to test sample
On product, for motivating sample to be tested to generate electrocaloric effect；
The temperature that the alternating temperature platform is used to carry sample to be tested, adjusting measurement environment and sample to be tested (can be to sample to be tested
Heated and freezed), and thermal probe is demarcated, the electric signal obtained on thermal probe is (electric between resistance value/bridge of thermal probe
Pressure) variation with temperature curve；
The needle point of the thermal probe is contacted with sample to be tested, for perceiving the temperature change of sample to be tested, and is converted to electricity
Signal；
The atomic force microscope main controller is connect with thermal probe, for carrying out space orientation to thermal probe；
The probe signals controller is connect with thermal probe, for applying electric signal to thermal probe, and is detected on thermal probe
Change in electric；
The Signal acquiring and processing device is connect with probe signals controller, for acquiring and handling probe signals controller
The electric signal on thermal probe detected.
Further, the signal generator can produce direct current wave, sine wave, triangular wave, trapezoidal wave, impulse wave and indefinite
Type wave.
Further, the high-voltage amplifier can amplify DC voltage and alternating voltage.
Further, the thermal probe includes two cantilevers, and the front end of two cantilevers is in contact, and is configured to the needle of thermal probe
Point, tip portion are made of thermistor.The probe signals controller applies electric signal to two cantilevers, and perceives two and hang
Change in electric on arm.
Further, the probe signals controller includes Wheatstone bridge and differential signal amplifier；
The Wheatstone bridge includes the first bridge arm, the second bridge arm, third bridge arm and four bridge legs, on first bridge arm
Equipped with the first fixed value resistance, second bridge arm is equipped with the second fixed value resistance, and the third bridge arm is equipped with variable resistance,
Thermal probe is connected on the four bridge legs；The tie point of first bridge arm and the second bridge arm is denoted as the first node, and described second
The tie point of bridge arm and third bridge arm is denoted as the second node, and the tie point of the third bridge arm and four bridge legs is denoted as third knot
The tie point of point, the four bridge legs and the first bridge arm is denoted as the 4th node；The first Node connectedness input signal source, it is described
Second input terminal of the second Node connectedness differential signal amplifier, the third Node connectedness ground terminal, the 4th node connect
Connect the first input end of differential signal amplifier；
The output end connection signal of the differential signal amplifier acquires and processor, is output to signal after signal is amplified
Acquisition and processor.
Further, the signal acquisition process device includes signal picker and signal processor；The signal picker
For the variation for the cantilever power on signal that high speed acquisition probe signals controller perceives, data point acquisition time interval is less than
0.1 millisecond.The signal processor includes filter, for filtering the interference signal in detection signal.
Further, the atomic force microscope main controller includes signal generating module, output end linking probe signal
Controller, as the input signal source of probe signals controller, for driving probe signals controller.
Further, two parallel poles are vertically arranged on the alternating temperature platform, sample to be tested is placed in two parallel electricity
It is detected between pole.
Further, it is horizontally disposed with an electrode on the alternating temperature platform, sample to be tested is placed on electrode and is examined
It surveys.
The working principle of above-mentioned electric heating property detection system are as follows:
Firstly, being contacted by alternating temperature platform with thermal probe, thermal probe perceives the temperature change of alternating temperature platform, and is converted into electricity
Signal；The electric signal that probe signals controller exports thermal probe detects, and is acquired by Signal acquiring and processing device；
Signal acquiring and processing device obtains the electric signal on thermal probe according to the temperature change of collected electric signal and alternating temperature platform
The curve varied with temperature；
Then, voltage signal is generated by signal generator, sample to be tested is applied to after high-voltage amplifier amplifies, motivated
Sample to be tested generates electrocaloric effect；Thermal probe perceive sample to be tested surface temperature change due to caused by electrocaloric effect, and by its
Be converted to electric signal；The electric signal that probe signals controller exports thermal probe detects, and by Signal acquiring and processing device
It is acquired；The electric signal on thermal probe that Signal acquiring and processing device is first obtained according to collected electric signal and step 1 with
The curve of temperature change obtains the temperature variations of sample to be tested, in conjunction with the voltage applied on sample to be tested, obtains its electricity
Thermal Parameter.
Thermal probe is located in sample to be tested surface certain point by atomic force microscope, can detecte should on sample to be tested
The time relaxation situation of point electric heating property parameter.
Thermal probe is controlled in the movement of sample to be tested surface by atomic force microscope, and sample to be tested certain area is swept
Measurement is retouched, the space distribution situation of sample to be tested electric heating property parameter can be obtained.
The voltage signal generated by the heating/refrigerating temperature and signal generator that change alternating temperature platform, may be implemented alternating temperature
With the measurement for becoming sample to be tested electric heating property parameter under driving voltage.
The utility model has the advantages that
A kind of electric heating property detection system provided by the utility model is carried out straight using electro-thermal response of the thermal probe to material
Measurement is connect, realizes that the extraction of faint electro-thermal response signal is amplified using difference amplifier, uses signal generator and high voltage amplifier
Device, which is realized, carries out electric heating excitation to sample to be tested, overcomes the prior art and is difficult to the problem of detecting to faint electro-thermal response signal；
The utility model realizes the high accuracy in-situ quantitatively characterizing to the electric heating property under material local scale, combines to macroscopic view
The electric heating property of scale measures；The utility model is arranged alternating temperature platform and carries out temperature calibration to thermal probe, realizes rapidly and accurately
The electric heating property of quantitative measurment material.Using the utility model, the unreliable problem of measurement of existing indirect method can be overcome, with
And solve the problems, such as that existing direct method is unable to measure local micro-scale electro-thermal response, it realizes and sample to be tested progress region is swept
Retouch measurement obtain material space on electro-thermal response distribution, the aerial image to material local electro-thermal response, realize alternating temperature with
Become the local electric heating property quantitatively characterizing under driving voltage, and the utility model can apply to the detection of low-dimensional materials electric heating property.
It is accurate that the utility model for the electric heating property of electrocaloric effect area research personnel's research and analysis material provides a kind of convenience
Measuring system.
Detailed description of the invention
It, below will be to implementation in order to illustrate more clearly of the utility model embodiment or technical solution in the prior art
Mode or attached drawing needed to be used in the description of the prior art are briefly described.It will be apparent that drawings discussed below is only
It is only some embodiments of the utility model, for those of ordinary skill in the art, what is do not made the creative labor
Under the premise of, it is also possible to obtain other drawings based on these drawings.
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is a kind of structure for the electric heating property detection system for changing embodiment of electric heating property detection system shown in Fig. 1
Schematic diagram, applying mode in the face of electric heating driving voltage as shown in Figure 1, is changed to the vertical applying mode in bottom shown in Fig. 2；
Fig. 3 is the flow chart that the utility model carries out electric heating property detection；
Fig. 4 be detection system shown in Fig. 1 and Fig. 2 bridge between voltage and temperature curve figure；
Fig. 5 is thermal probe resistance value shown in Fig. 1 and temperature curve figure；
Fig. 6 is the indicatrix that sample to be tested electrocaloric effect temperature becomes the relaxation at any time under the excitation of 100V square-wave voltage
Figure；
Fig. 7 is that sample to be tested local electric heating temperature becomes spatial distribution scanning figure；
Fig. 8 is the curve graph that sample to be tested electric heating property parameter varies with temperature；
Fig. 9 is the curve graph that sample to be tested electric heating property parameter changes with driving voltage.
Description of symbols:
1, sample to be tested, 2, electrode, 3, alternating temperature platform, 4, thermal probe, 5, high-voltage amplifier, 6, signal generator, 7, first
Fixed value resistance, the 8, first bridge arm, the 9, the 4th node, the 10, first node, the 11, second fixed value resistance, the 12, second bridge arm, 13,
Two nodes, 14, third bridge arm, 15, variable resistance, 16, third node, 17, four bridge legs, 18, probe signals controller,
19, Wheatstone bridge, 20, first input end, the 21, second input terminal, 22, output end, 23, difference amplifier, 24, signal acquisition
With processor, 25, hearth electrode, 26, the first cantilever of thermal probe, 27, the second cantilever of thermal probe, 28, atomic force microscope main controller,
29, thermistor.
Specific embodiment
To keep the purposes, technical schemes and advantages of the utility model implementation clearer, below in conjunction with the utility model
The technical solution in the utility model embodiment is described below in greater detail in attached drawing in embodiment.Obviously, it is retouched
The embodiment stated is only a part of embodiment of the utility model, rather than whole embodiments.It is practical new based on this
Embodiment in type, those of ordinary skill in the art's every other reality obtained under that premise of not paying creative labor
Mode is applied, is fallen within the protection scope of the utility model.
As shown in Figure 1, Fig. 1 is a kind of embodiment structure schematic diagram of the utility model.The electric heating property detection system
The electric heating property united for detecting material comprising thermal probe 4, alternating temperature platform 3, high-voltage amplifier 5, signal generator 6, probe letter
Number controller 18, Signal acquiring and processing device 24 and atomic force microscope main controller 28.The alternating temperature platform 3 is for carrying and changing
The temperature of sample to be tested 1；The thermal probe 4 is used to carry out sample to be tested 1 real-time detection in situ of electrocaloric effect temperature varying signal；
The signal generator 6 is for providing different pumping signals to high-voltage amplifier 5；The high-voltage amplifier 5 is for motivating letter
Sample to be tested 1 is applied to after number amplifying；The atomic force microscope main controller 28 is used for the control of 4 spatial position of thermal probe
It works required voltage with probe signals controller 18 is provided；The probe signals controller 18 is used to detect the letter on thermal probe 4
Number variation, and is output to Signal acquiring and processing device 24；The Signal acquiring and processing device 24 is used for probe signals controller
18 signals exported are handled and are analyzed；The electric heating of the sample to be tested 1 is obtained according to the nominal data to thermal probe 4
Energy.
As shown in Figure 1, it is 1V pulse square wave that the signal generator 6, which generates voltage, it is enlarged by high-voltage amplifier 5
After 100V, 1 both ends of sample to be tested are applied to by electrode 2；The temperature of sample to be tested 1 is adjusted to measurement institute by the alternating temperature platform 3
The sample to be tested initial temperature needed.
As shown in Fig. 2, the electrode 2 may be provided at sample to be tested 1 and alternating temperature in a kind of change embodiment of Fig. 1
Between platform 3, as shown in electrode 25, apply driving voltage from 1 bottom of sample to be tested, the hearth electrode 25 is by high-voltage amplifier
5 provide driving voltage signal.
The probe signals controller 18 is detected for the electric signal on regulation and control thermal probe 4, and to thermal probe 4
To 1 electro-thermal response signal of sample to be tested amplify, after processing signal by the output end 22 be output to signal acquisition in
Manage device 24.
The Signal acquiring and processing device 24 includes signal picker and signal processor, and the signal picker is to probe
18 output signal of signal controller carries out high speed acquisition；The signal processor includes filter, for adopting to signal picker
The signal collected carries out noise reduction process.
The atomic force microscope main controller 28 may include probe actuation module, signal generating module etc..The spy
Needle drive module is for controlling spatial position of the thermal probe in sample to be tested surface scan；The signal generating module is for producing
The raw probe signals controller 18 works required electric signal.
The thermal probe 4 is thermosensitive resistance type probe, and the first cantilever 26 of the thermal probe 4 is connect with the 4th node 9, the
Two cantilevers 27 are connect with third node 16, are produced electrocaloric effect when sample to be tested 1 is due to the application of electric field and removes and are caused
When temperature change, the resistance value of the thermistor 29 changes with the variation of sample to be tested temperature.
The probe signals controller 18 includes Wheatstone bridge 19 and difference amplifier 23.The Wheatstone bridge 19 wraps
Include the first fixed value resistance 7, the second fixed value resistance 11 and variable resistance 15.First fixed value resistance 7 is located at the first bridge arm
8, one end is connect with the first node 10, and the other end is connect with the 4th node 9.Second fixed value resistance 11 is located at the second bridge arm
12, one end is connect with the first node 10, and the other end is connect with the second node 13.The variable resistance 15 is located at third bridge arm
14, one end is connect with the second node 13, and the other end is connect with third node 16, and thermal probe 4 is located at four bridge legs 17, and second
Cantilever 27 is connect with third node 16, and the first cantilever 26 is connect with the 4th node 9.First node 10 and the atomic force are aobvious
Micromirror controller connection, the third node 16 are grounded.The difference amplifier 23 includes first input end 20, the second input terminal
21 and output end 22, first input end 20 connect with the 4th node 9, the second input terminal 21 and the second Node connectedness, output end 22
It is connect with Signal acquiring and processing device.
In the present embodiment, first fixed value resistance 7 and the second fixed value resistance 11, two fixed value resistance resistance values can phase
Deng a Wheatstone bridge circuit being formed with variable resistance 15 and thermal probe 4, when the sample to be tested 1 is due to electrocaloric effect
When temperature changes, the resistance of the thermal probe 4 is caused to change, so as to cause the flat of the Wheatstone bridge circuit
Weighing apparatus changes, and the potential difference between the second node 13 and the 4th node 9 is output to signal after being amplified by difference amplifier 23 and adopts
Collection using relationship between temperature and the electro-thermal response signal detected, and then can get described to test sample with processor 24
The electric heating property result of product 1.
Fig. 3 is the flow chart that the utility model carries out electric heating property detection, comprising the following steps:
Step S1: calibration thermal probe 4；
Step S2: voltage is provided, sample to be tested 1 is motivated；
Step S3: thermal probe 4 detects sample to be tested 1；
Step S4: the signal that processing thermal probe 4 detects；
Step S5: the electric heating property of the sample to be tested 1 is analyzed based on the detection electro-thermal response signal.
Specifically, in one embodiment, step S1 includes: that thermal probe 4 is contacted with alternating temperature platform 3, after stabilizing the temperature,
Probe is consistent with heating platen temperature, is obtained between 4 resistance of thermal probe and temperature due to caused by temperature change in this way
Relationship, obtain graph of relation as shown in Figure 5.And to potential between the 4th node 9 of Wheatstone bridge 19 and the second node 13
Difference is demarcated with 4 temperature change relationship of thermal probe, obtains relation curve as shown in Figure 4.After Fig. 4 and Fig. 5 relation curve supplies
Continuous analysis uses.
In step S2, the signal generator 6 generates excitation signal waveforms, is amplified by the high-voltage amplifier 5,
Be applied to the electrode 2 or hearth electrode 25 contacted with the sample to be tested 1, the signal generator 6 can produce direct current signal and
The AC signals such as sine wave, triangular wave, rectangular wave and indefinite form wave.
In step S3, thermal probe 4 and sample to be tested 1 be in contact mode, thermal probe 4 can 1 surface of sample to be tested a bit
The electric heating property for detecting sample to be tested can also be scanned 1 surface of sample to be tested a certain on measurement acquisition sample to be tested 1
The electric heating property in region.
In step S4, by Wheatstone bridge 19, detects 4 resistance of thermal probe as caused by 1 electrocaloric effect of sample to be tested and become
Voltage signal between the bridge that change generates, and Signal acquiring and processing device 24 is output to after the amplification of difference amplifier 23.
Step S5 includes: according to the collected 1 electro-thermal response voltage signal of sample to be tested of Signal acquiring and processing device 24；Root
The Fig. 4 and Fig. 5 relation curve obtained according to calibration, calculates and obtains 1 electro-thermal response temperature varied curve of sample to be tested shown in fig. 6, be used to
Analyze the electric heating property of sample to be tested 1.
As shown in fig. 7, the electric heating property measuring system based on the utility model, by thermal probe 4 on sample to be tested surface
Scanning, realizes the scanning survey to material local scale electric heating property, obtains the spatial distribution of material electric heating temperature change.
As shown in figure 8, the electric heating property measuring system based on the utility model, can easily obtain sample to be tested electric heating
The curve graph that energy parameter, Δ T/ Δ E is varied with temperature, wherein Δ T indicates electric heating temperature change, and Δ E indicates electric field change, Δ E=
Δ U/d, Δ U are the variable quantity for the driving voltage being applied on sample to be tested, and d is interelectrode distance；When electrode is using in Fig. 1
When set-up mode, d is equal to the length of sample, and when using set-up mode in Fig. 2, d is equal to the thickness of sample.
As shown in figure 9, electric heating property measuring system and method based on the utility model, can easily obtain sample to be tested
The curve graph that electric heating property parameter, Δ T/ Δ E changes with sample to be tested driving voltage.
Compared to the prior art, the material electric heating performance detecting system that is used for of the utility model can be to the macroscopical and micro- of material
Region electro-thermal response is seen to be detected.The utility model has precision high, and fast response time, variable excitation voltage waveform can be straight
It connects contact measured sample and carries out electro-thermal response measurement, the electricity in sector scanning measurement acquisition material space can be carried out to sample to be tested
Thermal response distribution, the function for the electrocaloric effect performance characterization that the existing scanning probe system of the technique extension does not have, to have
The deep development and electrocaloric effect research of the Scanning probe technique of pass provide important characterization new method.
Above provide the descriptions to preferred embodiments, so that scientific research personnel in the art can be used and utilize this practical new
Type.The various parameters modification of these examples is simple and convenient to its research work.Therefore according to the utility model claims
The equivalent variations done still falls within the range that the utility model is covered.
Claims (6)
1. a kind of electric heating property detection system, which is characterized in that visited including signal generator, high-voltage amplifier, alternating temperature platform, heat
Needle, atomic force microscope main controller, probe signals controller and Signal acquiring and processing device；
The signal generator is for generating voltage signal；
The voltage signal that the high-voltage amplifier is used to input signal generator amplifies, and is then applied to sample to be tested
On, for motivating sample to be tested to generate electrocaloric effect；
The alternating temperature platform is used to carry sample to be tested, adjusts the temperature of sample to be tested, and demarcates to thermal probe, obtains heat and visits
The curve that electric signal on needle varies with temperature；
The needle point of the thermal probe is contacted with sample to be tested, for perceiving the temperature change of sample to be tested, and is converted to electric signal；
The atomic force microscope main controller is connect with thermal probe, for carrying out space orientation to thermal probe；
The probe signals controller is connect with thermal probe, for applying electric signal to thermal probe, and detects the electricity on thermal probe
Signal intensity；
The Signal acquiring and processing device is connect with probe signals controller, for acquiring and handling the detection of probe signals controller
To thermal probe on electric signal.
2. electric heating property detection system according to claim 1, which is characterized in that the thermal probe includes two cantilevers,
The front end of two cantilevers is in contact, and is configured to the needle point of thermal probe, and tip portion is made of thermistor.
3. electric heating property detection system according to claim 1, which is characterized in that the probe signals controller includes favour
Stone electric bridge and differential signal amplifier；
The Wheatstone bridge includes the first bridge arm, the second bridge arm, third bridge arm and four bridge legs, and first bridge arm is equipped with
First fixed value resistance, second bridge arm are equipped with the second fixed value resistance, and the third bridge arm is equipped with variable resistance, described
Thermal probe is connected on four bridge legs；The tie point of first bridge arm and the second bridge arm is denoted as the first node, second bridge arm
The second node is denoted as with the tie point of third bridge arm, and the tie point of the third bridge arm and four bridge legs is denoted as third node, institute
The tie point for stating four bridge legs and the first bridge arm is denoted as the 4th node；The input of the first Node connectedness probe signals controller
Signal source, the second input terminal of the second Node connectedness differential signal amplifier, the third Node connectedness ground terminal are described
The first input end of 4th Node connectedness differential signal amplifier；
The output end connection signal of the differential signal amplifier acquires and processor.
4. electric heating property detection system according to claim 1, which is characterized in that the atomic force microscope main controller packet
Signal generating module is included, output end linking probe signal controller is used for as the input signal source of probe signals controller
Drive probe signals controller.
5. electric heating property detection system according to claim 1, which is characterized in that be vertically arranged two on the alternating temperature platform
Sample to be tested is placed between two parallel poles and detects by parallel pole.
6. electric heating property detection system according to claim 1, which is characterized in that be horizontally disposed with one on the alternating temperature platform
Sample to be tested is placed on electrode and detects by electrode.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110907489A (en) * | 2019-11-13 | 2020-03-24 | 中国科学院上海硅酸盐研究所 | Nanoscale thermal conductivity-electric domain in-situ characterization device based on atomic force microscope |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110907489A (en) * | 2019-11-13 | 2020-03-24 | 中国科学院上海硅酸盐研究所 | Nanoscale thermal conductivity-electric domain in-situ characterization device based on atomic force microscope |
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