CN111351815A - System and method for detecting electric heating performance - Google Patents
System and method for detecting electric heating performance Download PDFInfo
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- CN111351815A CN111351815A CN201811570593.XA CN201811570593A CN111351815A CN 111351815 A CN111351815 A CN 111351815A CN 201811570593 A CN201811570593 A CN 201811570593A CN 111351815 A CN111351815 A CN 111351815A
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/20—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
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- G—PHYSICS
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- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
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Abstract
The invention provides an electrothermal performance detection system and an electrothermal performance detection method. The method comprises the following steps: calibrating the thermal probe through a temperature changing table; the high-voltage amplifier provides voltage to carry out electrothermal excitation on the sample to be tested; the thermal probe senses the temperature change of the sample to be detected and outputs the temperature change as an electric signal; the probe signal controller detects the electric signal output by the heat probe and the electric signal is acquired by the signal acquisition and processor; the signal acquisition and processor obtains the temperature change condition of the sample to be measured according to the acquired electric signal and the calibration data, and then combines the voltage applied on the sample to be measured to obtain the electric heating performance parameter of the sample to be measured. The invention can directly measure the micro and macro electric heating performance of the material, and has high accuracy and wide applicability.
Description
Technical Field
The invention provides a system and a method for detecting electric heating performance, and particularly relates to a system and a method for directly measuring the electric heating performance of a material.
Background
With the development of microelectronic technology, the traditional compression refrigeration technology cannot meet the heat dissipation requirement of microelectronic devices, and the development of a novel solid-state refrigeration method is particularly important. The electrothermal effect (electrocaloric) is that the polarization order degree of a dielectric material is changed under the action of an external electric field, so that entropy change related to polarization of the material is caused, the temperature of the material is changed, and refrigeration can be realized. The refrigerating device based on the electrothermal effect has the advantages of miniaturization, no noise, low cost and the like, is expected to become an ideal mode for refrigerating microelectronic equipment, and thus people are urgently required to research and develop materials with high-performance electrothermal effect. Along with this, a detection system and a detection method for the electrothermal performance of the material are indispensable.
At present, the detection method of the electric heating performance can be divided into an indirect method and a direct method. The indirect method is to measure the polarization intensity of the material to obtain the polarization values of the material under different electric fields and temperatures, and then calculate the temperature change value of the electrothermal effect of the material through fitting and numerical values, and the measurement accuracy and the applicability of the indirect method are questioned to a certain extent. The direct method is to directly measure the electrothermal response of the material by a thermocouple, a thermistor, a differential thermal analyzer or an infrared imaging mode, analyze the obtained measurement data to obtain the macroscopic electrothermal performance of the material, and the electrothermal response data obtained by the direct method is more intuitive and more reliable. However, the existing direct method cannot measure the local electrothermal performance of the material in situ, and the performance of the material is directly related to the microstructure of the material, so that the local electrothermal performance of the material is directly detected, the understanding of the microscopic mechanism of the electrothermal effect is facilitated, and a basis is provided for further improving the electrothermal performance of the material. In addition, the current direct electrothermal method measurement system is complex and inconvenient to popularize and apply, and the electrothermal performance of a thin film material with small thickness is difficult to measure. The research of people on the electric heating effect mechanism is greatly limited, and the development of the solid-state refrigeration technology is restricted.
Therefore, a new system and method for detecting electrical heating performance is needed.
Disclosure of Invention
The invention solves the problems in the prior art, and provides an electrothermal performance detection system and an electrothermal performance detection method aiming at the defects of the prior art, which can directly measure the microscopic and macroscopic electrothermal performance of a material, can quickly obtain the electrothermal performance of the material, and have high accuracy and wide applicability.
An electrothermal performance detection system comprises a signal generator, a high-voltage amplifier, a temperature changing table, a thermal probe, an atomic force microscope main controller, a probe signal controller and a signal acquisition and processor;
the signal generator is used for generating voltage signals with different waveforms and periods and inputting the voltage signals into the high-voltage amplifier;
the high-voltage amplifier is used for amplifying a voltage signal input by the signal generator, and then applying the voltage signal to a sample to be tested to excite the sample to be tested to generate an electrothermal effect;
the temperature changing platform is used for bearing a sample to be measured, adjusting the measuring environment and the temperature of the sample to be measured (the sample to be measured can be heated and cooled), and calibrating the thermal probe to obtain a change curve of an electric signal (the resistance value of the thermal probe/the voltage between bridges) on the thermal probe along with the temperature;
the probe tip of the thermal probe is contacted with a sample to be detected, and is used for sensing the temperature change of the sample to be detected and converting the temperature change into an electric signal;
the atomic force microscope main controller is connected with the thermal probe and is used for carrying out space positioning on the thermal probe;
the probe signal controller is connected with the heat probe and is used for applying an electric signal to the heat probe and detecting the change of the electric signal on the heat probe;
the signal acquisition and processor is connected with the probe signal controller and is used for acquiring and processing the electric signals detected by the probe signal controller on the thermal probe.
Further, the signal generator may generate a direct current wave, a sine wave, a triangular wave, a trapezoidal wave, a pulse wave, and an unshaped wave.
Further, the high voltage amplifier may amplify the direct current voltage and the alternating current voltage.
Further, the thermal probe comprises two cantilevers, the front ends of the two cantilevers are contacted to form a probe tip of the thermal probe, and the probe tip part is formed by a thermistor. The probe signal controller applies an electrical signal to the two cantilevers and senses a change in the electrical signal on the two cantilevers.
Further, the probe signal controller comprises a Wheatstone bridge and a differential signal amplifier;
the Wheatstone bridge comprises a first bridge arm, a second bridge arm, a third bridge arm and a fourth bridge arm, wherein a first constant value resistor is arranged on the first bridge arm, a second constant value resistor is arranged on the second bridge arm, a variable resistor is arranged on the third bridge arm, and a heat probe is connected to the fourth bridge arm; the connection point of the first bridge arm and the second bridge arm is recorded as a first node, the connection point of the second bridge arm and the third bridge arm is recorded as a second node, the connection point of the third bridge arm and the fourth bridge arm is recorded as a third node, and the connection point of the fourth bridge arm and the first bridge arm is recorded as a fourth node; the first node is connected with an input signal source, the second node is connected with the second input end of the differential signal amplifier, the third node is connected with the ground terminal, and the fourth node is connected with the first input end of the differential signal amplifier;
the output end of the differential signal amplifier is connected with the signal acquisition and processor, and the signal is amplified and then input into the signal acquisition and processor.
Further, the signal acquisition processor comprises a signal acquisition device and a signal processor; the signal collector is used for collecting the change of the electric signal on the cantilever sensed by the probe signal controller at a high speed, and the data point collecting time interval is less than 0.1 millisecond. The signal processor includes a filter for filtering the interference signal in the detection signal.
Furthermore, the atomic force microscope master controller comprises a signal generating module, wherein the output end of the signal generating module is connected with the probe signal controller, and the signal generating module is used as an input signal source of the probe signal controller and used for driving the probe signal controller.
Furthermore, two parallel electrodes are vertically arranged on the temperature changing table, and a sample to be detected is placed between the two parallel electrodes for detection.
Further, an electrode is horizontally arranged on the temperature changing table, and a sample to be detected is placed on the electrode for detection.
The invention also provides a method for detecting the electric heating performance, which adopts the system for detecting the electric heating performance, and the detection method comprises the following steps:
Furthermore, the thermal probe is positioned at a certain point on the surface of the sample to be detected through the atomic force microscope, and the time relaxation condition of the electrothermal performance parameters of the point on the sample to be detected is detected.
Furthermore, the atomic force microscope controls the thermal probe to move on the surface of the sample to be measured, and scanning measurement is carried out on a certain area of the sample to be measured, so that the spatial distribution condition of the electric heating performance parameters of the sample to be measured is obtained.
Furthermore, the atomic force microscope controls the thermal probe to move on the surface of the sample to be measured, scanning measurement is carried out on a certain area of the sample to be measured, the signal acquisition and processor carries out space imaging on the acquired electric signals (namely, electric heating response signals), the length and the width of an imaging plane correspond to the length and the width of a measuring area of the sample to be measured, and the color of each pixel point in the imaging plane represents the intensity of the electric signals measured at the corresponding position.
Further, taking Δ T/Δ E as an electric heating performance parameter, where Δ T represents a temperature change, Δ E represents an electric field change, Δ E ═ Δ U/d, Δ U is a change amount of an excitation voltage applied to a sample to be measured, and d is an inter-electrode distance; when two electrodes are arranged on the temperature changing platform and are positioned at two ends of a sample to be detected, d is equal to the length of the sample to be detected; when only one electrode is arranged on the temperature changing platform, the electrode is positioned at the bottom of the sample to be detected, and the needle point of the thermal probe is used as the other electrode, d is equal to the thickness of the sample to be detected.
Furthermore, the measurement of the electric heating performance parameters of the sample to be measured under the variable temperature and the variable excitation voltage can be realized by changing the heating/refrigerating temperature of the variable temperature platform and the voltage signal generated by the signal generator.
Has the advantages that:
according to the system and the method for detecting the electric heating performance, the electric heating response of a material is directly measured by using the heat probe, the extraction and amplification of a weak electric heating response signal are realized by using the differential amplifier, and the electric heating excitation of a sample to be detected is realized by using the signal generator and the high-voltage amplifier, so that the problem that the weak electric heating response signal is difficult to detect in the prior art is solved; the method adopted by the invention realizes the high-precision in-situ quantitative characterization of the electric heating performance of the material under the local scale, and simultaneously gives consideration to the measurement of the electric heating performance of the macro scale; the method realizes rapid and accurate quantitative measurement of the electric heating performance of the material by calibrating the temperature of the heat probe. The measuring system and the method of the invention overcome the unreliable measurement problem of the existing indirect method, solve the problem that the existing direct method can not measure the local micro-scale electrothermal response, especially realize the regional scanning measurement of the sample to be measured to obtain the electrothermal response distribution in the material space, and can be applied to the detection of the electrothermal performance of the low-dimensional material. The invention realizes the space imaging of the local electrothermal response of the material and realizes the quantitative characterization of the local electrothermal performance under variable temperature and variable excitation voltage. The invention provides a convenient and accurate measurement system and method for researching and analyzing the electric heating performance of a material by researchers in the field of electric heating effect.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below. It is obvious that the drawings described below are only some embodiments of the invention, and that for a person skilled in the art, other drawings can be obtained from these drawings without inventive effort.
FIG. 1 is a schematic diagram of an electrothermal performance detection system according to the present invention;
FIG. 2 is a schematic structural diagram of an alternative embodiment of the electrothermal performance detection system shown in FIG. 1, in which electrothermal excitation voltage is applied in a bottom-perpendicular manner as shown in FIG. 2 instead of in-plane manner as shown in FIG. 1;
FIG. 3 is a flow chart of a method of detecting electrothermal performance according to the present invention;
FIG. 4 is a graph of voltage versus temperature between bridges for the detection systems of FIGS. 1 and 2;
FIG. 5 is a graph of resistance versus temperature for the thermal probe shown in FIG. 1;
FIG. 6 is a characteristic curve diagram of relaxation of the electrothermal effect temperature change of a sample to be measured with time under the excitation of a 100V rectangular wave voltage;
FIG. 7 is a scanning diagram of the local electrothermal temperature-variation spatial distribution of a sample to be measured;
FIG. 8 is a graph of the variation of the electrical heating performance parameters of the sample to be measured with temperature;
FIG. 9 is a graph of the variation of the electrothermal performance parameters of the sample to be tested with the excitation voltage.
Description of reference numerals:
1. the device comprises a sample to be detected, 2, electrodes, 3, a temperature changing platform, 4, a thermal probe, 5, a high-voltage amplifier, 6, a signal generator, 7, a first constant value resistor, 8, a first bridge arm, 9, a fourth node, 10, a first node, 11, a second constant value resistor, 12, a second bridge arm, 13, a second node, 14, a third bridge arm, 15, a variable resistor, 16, a third node, 17, a fourth bridge arm, 18, a probe signal controller, 19, a Wheatstone bridge, 20, a first input end, 21, a second input end, 22, an output end, 23, a differential amplifier, 24, a signal collecting and processing unit, 25, a bottom electrode, 26, a first cantilever of the thermal probe, 27, a second cantilever of the thermal probe, 28, a master controller of an atomic force microscope, 29 and a thermistor.
Detailed Description
In order to make the implementation objects, technical solutions and advantages of the present invention clearer, the technical solutions in the embodiments of the present invention will be described in more detail below with reference to the accompanying drawings in the embodiments of the present invention. It is to be understood that the described embodiments are merely exemplary of some, and not necessarily all, embodiments of the invention. All other embodiments, which can be obtained by a person skilled in the art without inventive effort based on the embodiments of the present invention, are within the scope of the present invention.
As shown in fig. 1, fig. 1 is a schematic structural diagram of an embodiment of an electrothermal performance detection system according to the present invention. The electrothermal property detection system is used for detecting the electrothermal property of a material and comprises a thermal probe 4, a temperature changing table 3, a high-voltage amplifier 5, a signal generator 6, a probe signal controller 18, a signal acquisition and processing unit 24 and an atomic force microscope master controller 28. The temperature changing table 3 is used for bearing and changing the temperature of the sample 1 to be measured; the thermal probe 4 is used for carrying out in-situ real-time detection on an electrothermal effect temperature change signal of the sample 1 to be detected; the signal generator 6 is used for providing different excitation signals to the high-voltage amplifier 5; the high-voltage amplifier 5 is used for amplifying the excitation signal and applying the amplified excitation signal to the sample 1 to be detected; the atomic force microscope master controller 28 is used for controlling the spatial position of the thermal probe 4 and providing voltages required by the probe signal controller 18 to work; the probe signal controller 18 is used for detecting the signal change on the thermal probe 4 and outputting the signal change to the signal acquisition and processor 24; the signal acquisition and processing unit 24 is used for processing and analyzing the signal output by the probe signal controller 18; and obtaining the electric heating performance of the sample 1 to be tested according to the calibration data of the thermal probe 4.
As shown in fig. 1, the signal generator 6 generates a pulse square wave with a voltage of 1V, and after the pulse square wave is amplified to 100V by the high-voltage amplifier 5, the pulse square wave is applied to two ends of the sample 1 to be measured through the electrodes 2; the temperature changing table 3 adjusts the temperature of the sample 1 to be measured to the initial temperature of the sample to be measured required by measurement.
In a modified embodiment of fig. 1, as shown in fig. 2, the electrode 2 may be disposed between the sample 1 to be measured and the temperature changing stage 3, as shown by an electrode 25, an excitation voltage is applied from the bottom of the sample 1 to be measured, and the excitation voltage signal is provided from the high voltage amplifier 5 to the bottom electrode 25.
The probe signal controller 18 is used for adjusting and controlling the electric signal on the thermal probe 4, amplifying the electric heating response signal of the sample 1 to be detected by the thermal probe 4, and outputting the processed signal to the processor 24 through the output end 22 for signal acquisition.
The signal acquisition and processor 24 comprises a signal collector and a signal processor, and the signal collector is used for carrying out high-speed acquisition on the output signal of the probe signal controller 18; the signal processor comprises a filter for carrying out noise reduction processing on the signals collected by the signal collector.
The atomic force microscope master 28, which may include a probe driving module, a signal generating module, and the like. The probe driving module is used for controlling the spatial position of the thermal probe when the thermal probe scans the surface of the sample to be detected; the signal generating module is used for generating an electric signal required by the operation of the probe signal controller 18.
The thermal probe 4 is a thermistor type probe, the first cantilever 26 of the thermal probe 4 is connected with the fourth node 9, the second cantilever 27 is connected with the third node 16, and when the sample 1 to be measured generates an electrothermal effect to cause temperature change due to the application and removal of an electric field, the resistance value of the thermistor 29 changes along with the change of the temperature of the sample to be measured.
The probe signal controller 18 includes a wheatstone bridge 19 and a differential amplifier 23. The wheatstone bridge 19 includes a first fixed resistor 7, a second fixed resistor 11, and a variable resistor 15. The first fixed-value resistor 7 is located in the first bridge arm 8, and one end of the first fixed-value resistor is connected to a first node 10, and the other end of the first fixed-value resistor is connected to a fourth node 9. The second fixed-value resistor 11 is located in the second bridge arm 12, and one end of the second fixed-value resistor is connected to the first node 10, and the other end of the second fixed-value resistor is connected to the second node 13. The variable resistor 15 is located in the third arm 14, one end of the variable resistor is connected to the second node 13, the other end of the variable resistor is connected to the third node 16, the heat probe 4 is located in the fourth arm 17, the second cantilever 27 of the heat probe is connected to the third node 16, and the first cantilever 26 of the heat probe is connected to the fourth node 9. The first junction 10 is connected to the afm controller, and the third junction 16 is grounded. The differential amplifier 23 comprises a first input end 20, a second input end 21 and an output end 22, the first input end 20 is connected with the fourth node 9, the second input end 21 is connected with the second node, and the output end 22 is connected with the signal acquisition and processing unit.
In this embodiment, the resistance values of the first fixed-value resistor 7 and the second fixed-value resistor 11 may be equal to each other, and form a wheatstone bridge loop with the variable resistor 15 and the thermal probe 4, when the temperature of the sample 1 to be detected changes due to an electrothermal effect, the resistance of the thermal probe 4 changes, so that the balance of the wheatstone bridge loop changes, the potential difference between the second node 13 and the fourth node 9 is amplified by the differential amplifier 23 and then output to the signal acquisition and processor 24, and the relationship between the temperature and the detected electrothermal response signal is utilized to further obtain the electrothermal performance result of the sample 1 to be detected.
FIG. 3 is a flow chart of the method for detecting electrothermal performance of the present invention. The electric heating performance detection method can adopt the electric heating performance detection system. The method for detecting the electric heating performance comprises the following steps:
step S1, calibrating the heat probe 4;
step S2, providing voltage to excite the sample 1 to be tested;
step S3, the thermal probe 4 detects the sample 1 to be detected;
step S4, processing the signal detected by the heat probe 4;
and step S5, analyzing the electric heating performance of the sample 1 to be detected based on the detection electric heating response signal.
Specifically, in one embodiment, step S1 includes: the thermal probe 4 is in contact with the temperature changing table 3, and after the temperature is stabilized, the temperature of the probe is consistent with that of the heating table, so that the relationship between the resistance value and the temperature of the thermal probe 4 caused by the temperature change can be obtained, and the relationship curve chart shown in fig. 5 is obtained. And calibrating the relationship between the potential difference between the fourth node 9 and the second node 13 of the wheatstone bridge 19 along with the temperature change of the thermal probe 4 to obtain the relationship curve shown in fig. 4. Fig. 4 and 5 are graphs for subsequent analysis.
In step S2, the signal generator 6 generates an excitation signal waveform, which is amplified by the high voltage amplifier 5 and applied to the electrode 2 or the bottom electrode 25 in contact with the sample 1 to be measured, and the signal generator 6 can generate a dc signal and ac signals such as a sine wave, a triangular wave, a square wave, and an irregular wave.
In step S3, the thermal probe 4 and the sample 1 to be measured are in a contact mode, and the thermal probe 4 can detect the electrical heating performance of the sample 1 to be measured at a point on the surface of the sample 1 to be measured, or scan-measure the surface of the sample 1 to be measured to obtain the electrical heating performance of a certain area on the sample 1 to be measured.
In step S4, an inter-bridge voltage signal generated by the resistance change of the thermal probe 4 due to the electrothermal effect of the sample 1 to be detected is detected by the wheatstone bridge 19, amplified by the differential amplifier 23, and output to the signal acquisition and processor 24.
Step S5 includes: according to the electric heating response voltage signal of the sample 1 to be detected collected by the signal collecting and processing unit 24; and calculating to obtain an electrothermal response temperature change curve of the sample 1 to be tested shown in the figure 6 according to the relation curve of the figure 4 and the figure 5 obtained by calibration, and analyzing the electrothermal performance of the sample 1 to be tested.
As shown in fig. 7, based on the system and method for measuring electrothermal performance of the present invention, the thermal probe 4 scans the surface of the sample to be measured, so as to realize the scanning measurement of the electrothermal performance of the material at a local scale and obtain the spatial distribution of the electrothermal temperature change of the material.
As shown in fig. 8, based on the system and method for measuring electric heating performance of the present invention, a graph of electric heating performance parameter Δ T/Δ E of a sample to be measured along with temperature change can be conveniently obtained, where Δ T represents temperature change, Δ E represents electric field change, Δ E ═ Δ U/d, Δ U is variation of excitation voltage applied to the sample to be measured, and d is inter-electrode distance; when the electrodes are arranged in the manner of fig. 1, d is equal to the length of the sample, and when the electrodes are arranged in the manner of fig. 2, d is equal to the thickness of the sample.
As shown in FIG. 9, based on the system and method for measuring electric heating performance of the present invention, a curve graph of the electric heating performance parameter Δ T/Δ E of the sample to be measured varying with the excitation voltage of the sample to be measured can be conveniently obtained.
Compared with the prior art, the system for detecting the electrothermal performance of the material can detect the electrothermal response of macroscopic and microscopic regions of the material. The detection system has the advantages of high precision, high response speed and variable excitation voltage waveform, can be directly contacted with a sample to be detected to carry out electrothermal response measurement, can carry out regional scanning measurement on the sample to be detected to obtain electrothermal response distribution on a material space, expands the function of electrothermal effect performance characterization which is not possessed by the existing scanning probe system, and provides an important new characterization method for the deep development of related scanning probe technology and electrothermal effect research.
The previous description of the preferred embodiments is provided to enable any person skilled in the art to make or use the present invention. The modification of various parameters of these examples is simple and convenient for their scientific work. Therefore, equivalent changes made by the claims of the present invention are also within the scope of the present invention.
Claims (9)
1. An electrothermal performance detection system is characterized by comprising a signal generator, a high-voltage amplifier, a temperature changing table, a thermal probe, an atomic force microscope master controller, a probe signal controller and a signal acquisition and processor;
the signal generator is used for generating a voltage signal;
the high-voltage amplifier is used for amplifying a voltage signal input by the signal generator, and then applying the voltage signal to a sample to be tested to excite the sample to be tested to generate an electrothermal effect;
the temperature changing platform is used for bearing a sample to be measured, adjusting the temperature of the sample to be measured and calibrating the thermal probe to obtain a curve of an electric signal on the thermal probe along with the change of the temperature;
the probe tip of the thermal probe is contacted with a sample to be detected, and is used for sensing the temperature change of the sample to be detected and converting the temperature change into an electric signal;
the atomic force microscope main controller is connected with the thermal probe and is used for carrying out space positioning on the thermal probe;
the probe signal controller is connected with the heat probe and is used for applying an electric signal to the heat probe and detecting the change of the electric signal on the heat probe;
the signal acquisition and processor is connected with the probe signal controller and is used for acquiring and processing the electric signals detected by the probe signal controller on the thermal probe.
2. The system according to claim 1, wherein the thermal probe comprises two cantilevers, the front ends of the two cantilevers are in contact with each other to form a tip portion of the thermal probe, and the tip portion is formed of a thermistor.
3. The electrothermal performance detection system of claim 1, wherein the probe signal controller comprises a wheatstone bridge and a differential signal amplifier;
the Wheatstone bridge comprises a first bridge arm, a second bridge arm, a third bridge arm and a fourth bridge arm, wherein a first constant value resistor is arranged on the first bridge arm, a second constant value resistor is arranged on the second bridge arm, a variable resistor is arranged on the third bridge arm, and a heat probe is connected to the fourth bridge arm; the connection point of the first bridge arm and the second bridge arm is recorded as a first node, the connection point of the second bridge arm and the third bridge arm is recorded as a second node, the connection point of the third bridge arm and the fourth bridge arm is recorded as a third node, and the connection point of the fourth bridge arm and the first bridge arm is recorded as a fourth node; the first node is connected with an input signal source of the probe signal controller, the second node is connected with the second input end of the differential signal amplifier, the third node is connected with the ground terminal, and the fourth node is connected with the first input end of the differential signal amplifier;
the output end of the differential signal amplifier is connected with the signal acquisition and processor.
4. The system of claim 1, wherein the atomic force microscope master controller comprises a signal generating module, and an output terminal of the signal generating module is connected to the probe signal controller and serves as an input signal source of the probe signal controller for driving the probe signal controller.
5. An electrothermal performance detection method, characterized in that, by using the electrothermal performance detection system of any one of claims 1 to 4, the detection method comprises the following steps:
step 1, contacting a temperature changing platform with a heat probe, sensing the temperature change of the temperature changing platform by the heat probe, and converting the temperature change into an electric signal; the probe signal controller detects the electric signal output by the heat probe and the electric signal is acquired by the signal acquisition and processor; the signal acquisition and processor acquires a curve of the electric signal on the thermal probe along with the temperature change according to the acquired electric signal and the temperature change of the temperature changing table;
step 2, generating a voltage signal through a signal generator, amplifying the voltage signal by a high-voltage amplifier, and applying the amplified voltage signal to a sample to be detected to excite the sample to be detected to generate an electrothermal effect; the thermal probe senses the temperature change of the surface of the sample to be detected caused by the electrothermal effect and converts the temperature change into an electric signal; the probe signal controller detects the electric signal output by the heat probe and the electric signal is acquired by the signal acquisition and processor; the signal collecting and processing device firstly obtains the temperature change condition of the sample to be measured according to the collected electric signals and the curve of the electric signals on the thermal probe obtained in the step 1 along with the temperature change, and then combines the voltage applied on the sample to be measured to obtain the electric heating performance parameters of the sample to be measured.
6. The method of claim 5 wherein the thermal probe is positioned at a point on the surface of the sample under test by an atomic force microscope to measure the time relaxation of the electrical thermal performance parameter at the point on the sample under test.
7. The method of claim 5, wherein the atomic force microscope is used to control the thermal probe to move on the surface of the sample to be tested, and the spatial distribution of the electrical thermal performance parameters of the sample to be tested is obtained by scanning and measuring a certain area of the sample to be tested.
8. The method of claim 5 wherein the signal acquisition and processor data point acquisition time interval is less than 0.1 milliseconds.
9. The method according to any one of claims 5 to 8, wherein Δ T/Δ E is used as an electric heating performance parameter, where Δ T represents a temperature change, Δ E represents an electric field change, Δ E ═ Δ U/d, Δ U is a change amount of an excitation voltage applied to a sample to be measured, and d is an inter-electrode distance; when two electrodes are arranged on the temperature changing platform and are positioned at two ends of a sample to be detected, d is equal to the length of the sample to be detected; when only one electrode is arranged on the temperature changing platform, the electrode is positioned at the bottom of the sample to be detected, and the needle point of the thermal probe is used as the other electrode, d is equal to the thickness of the sample to be detected.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201811570593.XA CN111351815A (en) | 2018-12-21 | 2018-12-21 | System and method for detecting electric heating performance |
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| CN201811570593.XA CN111351815A (en) | 2018-12-21 | 2018-12-21 | System and method for detecting electric heating performance |
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