CN111683426A - Radio frequency excitation signal power modulation circuit, method and device - Google Patents

Radio frequency excitation signal power modulation circuit, method and device Download PDF

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Publication number
CN111683426A
CN111683426A CN202010586960.6A CN202010586960A CN111683426A CN 111683426 A CN111683426 A CN 111683426A CN 202010586960 A CN202010586960 A CN 202010586960A CN 111683426 A CN111683426 A CN 111683426A
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radio frequency
excitation signal
frequency excitation
signal
power
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CN111683426B (en
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郭敏
周玉勇
丁志钊
周辉
王尊峰
贾斌
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CETC 41 Institute
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B41/00Circuit arrangements or apparatus for igniting or operating discharge lamps
    • H05B41/14Circuit arrangements
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B41/00Circuit arrangements or apparatus for igniting or operating discharge lamps
    • H05B41/14Circuit arrangements
    • H05B41/36Controlling

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Abstract

The invention discloses a radio frequency excitation signal power modulation circuit, a method and a device, comprising a primary modulation unit, a secondary modulation unit and a control unit, wherein the primary modulation unit is connected with the control unit through a low-noise amplifier circuit to form a primary loop; the radio frequency signal generating unit generates an initial radio frequency excitation signal, and the control unit performs power modulation on the initial radio frequency excitation signal sequentially through the primary loop, the secondary loop and the tertiary loop according to a preset output power control signal; and the power output by each stage of loop is compared with a preset output power control signal, and enters the power modulation of the next stage of loop according to the comparison result. The power modulation based on a multi-stage loop is adopted to generate a plurality of radio frequency excitation signals with different frequency points for enabling atoms to be excited in a dynamic balance state, and the high-stability laser output frequency of the electrodeless discharge atomic lamp is realized.

Description

Radio frequency excitation signal power modulation circuit, method and device
Technical Field
The invention relates to the technical field of microwave testing, in particular to a radio frequency excitation signal power modulation circuit, a method and a device.
Background
The statements in this section merely provide background information related to the present disclosure and may not necessarily constitute prior art.
With the rapid development of new-generation information technology and equipment application, precision devices based on atomic physical mechanisms, such as atomic clocks, atomic magnetometers, atomic gyroscopes and the like, are adopted in many high-precision measurement devices. In these precision devices, an atomic lamp of an electrodeless discharge system is usually used to generate light with a specific wavelength as a light source or to excite atomic transition for measuring a magnetic field, and the quality of an output spectrum or the stability of the number of atoms in a metastable state directly affects the performance of high-precision measuring equipment. For example, a laser frequency stabilization technique with simple structure, excellent signal-to-noise ratio, sensitivity, long-term stability and other characteristics is to lock the laser frequency stabilization technique on an atomic transition spectrum line, the stability of the number of atoms (such as metastable helium atoms) directly determines the quality of the output wavelength (frequency) of the laser, and the key constraint factors for keeping the atoms in dynamic balance are the stability of radio frequency excitation signals in an electrodeless discharge system, namely, the power stability and the frequency stability.
In a laboratory environment, the control and the maintenance of the dynamic balance of atom stimulation are generally realized by adopting the traditional mode of accessories such as a universal radio frequency signal generating device, an external power amplifier and the like, so as to carry out principle verification on an atomic lamp of an electrodeless discharge system and an application technology thereof; however, the inventors have found that the above conventional method has the following problems:
(1) general radio frequency signal generating equipment, an external power amplifier and the like used in the traditional method are general testing equipment generally, have relatively large volume, cannot meet the actual application and equipment integration development of a supported atomic lamp based on an electrodeless discharge system and an application technology thereof, and do not have application functions and performances oriented to and adapted to the actual requirements of high-precision measurement;
(2) in the traditional method, the output power control of the universal radio frequency signal generating equipment adopts an Automatic Level Control (ALC) mode based on an analog circuit technology system, and meanwhile, the output signal of the equipment can be used for exciting atoms to generate transition after a signal channel is established by an external power amplifier, a test accessory and the like, and an atomic lamp and application equipment which are suitable for an electrodeless discharge system, such as an integral output power control mechanism of a laser frequency stabilization system, are not constructed, so that the stability performance of the atomic lamp and the application equipment cannot meet the relevant technical requirements of the integrated application of the atomic lamp and the application equipment based on the electrodeless discharge system;
(3) in the traditional method, the universal radio frequency signal generating equipment does not have the function of realizing cooperative work with the PID control feedback signal of the atomic lamp of the electrodeless discharge system and the application equipment thereof through an external control interface.
Disclosure of Invention
In order to solve the problems, the invention provides a radio frequency excitation signal power modulation circuit, a method and a device, the radio frequency excitation signal power modulation circuit, the method and the device adopt power modulation based on a multi-stage loop, a control unit carries out power modulation on the radio frequency excitation signal sequentially through three loops according to a preset output power control signal, the radio frequency excitation signals with a plurality of different frequency points are generated to enable atoms to be excited in a dynamic balance state, the application requirements of differential frequency can be met, the problem of stability of the atoms in the dynamic balance state due to the excitation is solved, and the high-stability laser output frequency of an electrodeless discharge atomic lamp is realized.
In order to achieve the purpose, the invention adopts the following technical scheme:
in a first aspect, the present invention provides a radio frequency excitation signal power modulation circuit, including: the device comprises a radio frequency signal generating unit, a control unit and a multi-level modulation unit; the system comprises a primary modulation unit, a secondary modulation unit, a power amplification circuit, a control unit and a primary circuit, wherein the primary modulation unit is connected with the control unit through the low-noise amplification circuit to form a primary circuit;
the radio frequency signal generating unit generates an initial radio frequency excitation signal, and the control unit performs power modulation on the initial radio frequency excitation signal sequentially through the primary loop, the secondary loop and the tertiary loop according to a preset output power control signal; and the power output by each stage of loop is compared with a preset output power control signal, and enters the power modulation of the next stage of loop according to the comparison result.
In a second aspect, the present invention provides a method for modulating power of a radio frequency excitation signal, including:
the radio frequency signal generating unit generates an initial radio frequency excitation signal, the control unit compares a preset output power control signal with a detection signal of the output power of the initial radio frequency excitation signal output by the low-noise discharge circuit, and the output power of the initial radio frequency excitation signal is adjusted in the primary modulation unit according to the comparison result to obtain a primary radio frequency excitation signal;
the control unit compares the output power control signal with a detection signal of the output power of the primary radio frequency excitation signal output by the power amplifier, and adjusts the output power of the primary radio frequency excitation signal in the secondary modulation unit according to the comparison result to obtain a secondary radio frequency excitation signal;
the control unit compares the output power control signal with a detection signal of the output power of the secondary radio frequency excitation signal, and regulates the output power of the secondary radio frequency excitation signal according to the comparison result in the three-stage modulation unit to output a target radio frequency excitation signal.
In a third aspect, the present invention provides a radio frequency excitation signal generating apparatus, including the radio frequency excitation signal power modulation circuit of the first aspect; or implementing the radio frequency excitation signal power modulation method according to the second aspect.
In a fourth aspect, the present invention provides an electrodeless discharge lamp, including the radio frequency excitation signal power modulation circuit of the first aspect, using the modulated radio frequency excitation signal to generate a light source with a specific wavelength;
or the radio frequency excitation signal power modulation method of the second aspect is adopted, and the modulated radio frequency excitation signal is used for generating a light source with a specific wavelength.
Compared with the prior art, the invention has the beneficial effects that:
the invention is suitable for the generation of radio frequency excitation signals of an electrodeless discharge system, adopts a multi-level signal modulation loop and a control unit for receiving externally input power control signals to realize comprehensive power control and signal conditioning with wide range and high stability, adopts step-by-step signal conditioning and closed-loop regulation control of the synthesis of an inner loop and an outer loop, realizes the remarkable improvement of the excitation signals on the noise coefficient, the frequency spectrum purity, the output power, the stability and the like on the basis of outputting larger radio frequency signal excitation power, and constructs an integrated closed-loop comprehensive control loop by controlling feedback input power control signals with a PID of an external system to realize the integral control of the atomic lamp of the electrodeless discharge system and application equipment thereof, such as a laser frequency stabilization system.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate exemplary embodiments of the invention and together with the description serve to explain the invention and not to limit the invention.
Fig. 1 is a schematic diagram of a power modulation structure of a radio frequency excitation signal according to embodiment 1 of the present invention.
The specific implementation mode is as follows:
the invention is further described with reference to the following figures and examples.
It is to be understood that the following detailed description is exemplary and is intended to provide further explanation of the invention as claimed. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of exemplary embodiments according to the invention. As used herein, the singular forms "a", "an", and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise, and it should be understood that the terms "comprises" and "comprising", and any variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
The embodiments and features of the embodiments of the present invention may be combined with each other without conflict.
Example 1
As shown in fig. 1, the present embodiment provides a radio frequency excitation signal power modulation circuit, including: the device comprises a radio frequency signal generating unit, a control unit and a multi-level modulation unit; the system comprises a primary modulation unit, a secondary modulation unit, a power amplification circuit, a control unit and a primary circuit, wherein the primary modulation unit is connected with the control unit through the low-noise amplification circuit to form a primary circuit;
the radio frequency signal generating unit generates an initial radio frequency excitation signal, and the control unit performs power modulation on the initial radio frequency excitation signal sequentially through the primary loop, the secondary loop and the tertiary loop according to a preset output power control signal; and the power output by each stage of loop is compared with a preset output power control signal, and enters the power modulation of the next stage of loop according to the comparison result.
In this embodiment, the radio frequency signal generating unit includes a plurality of constant temperature crystal oscillators, and a multi-frequency point radio frequency signal generating and controlling unit is formed by the radio frequency signal generating unit, the radio frequency switch combination and the switch combination;
specifically, the constant temperature crystal oscillator is a radio frequency signal generating unit with a specific frequency and a flexible replaceable combined form; it can be understood that the frequency of the constant temperature crystal oscillator can be customized;
a plurality of constant temperature crystal oscillators generate initial radio frequency excitation signals with a plurality of specific frequencies according to the actual application requirements.
The radio frequency switch combination is an output channel used for controlling an initial radio frequency excitation signal, and is a channel and a route gating unit of the radio frequency excitation signal;
in the embodiment, the radio frequency excitation signal channel with the corresponding specific frequency can be constructed and output by external operation switching and control according to the actual application requirement;
in the present embodiment, the rf switch combination is a 1-to-N rf switch combination.
The switch combination is used for controlling the direct current power supply of the constant-temperature crystal oscillator, and is a channel and route gating unit of the direct current power supply;
in the embodiment, the direct current power supply of a certain constant temperature crystal oscillator can be switched and controlled by external operation according to the actual application requirement, so that only a required radio frequency excitation signal exists in a constructed radio frequency excitation signal channel, and the interference influence of other signals on the whole circuit is avoided;
in the present embodiment, the switch combination is a 1-to-N switch combination.
In this embodiment, the multi-frequency-point rf signal generating and controlling unit can generate rf excitation signals of a plurality of different frequency points, so as to excite atoms in the atomic gas chamber in different matching states, such as metastable helium atoms, to be in a dynamic balance state, and to meet the application requirements of more differentiated frequencies, and meanwhile, the external manual control mode, the flexibly replaceable modular/combinational design, and the like simplify the circuit design, reduce the overall size of the circuit, and facilitate the support of the actual application and device integration development of the electrodeless discharge system-based atomic lamp and its application technology (such as laser frequency stabilization technology). The problem that the volume of general equipment is large and the integrated development of equipment based on an electrodeless discharge system cannot be supported in the existing method is solved, the generation and control of the multi-frequency-point radio frequency excitation signal meeting the requirements are realized in a miniaturized and flexibly-expandable platform form and in combination with the requirements, and the method has better universality and applicability;
in this embodiment, a multi-level modulation loop formed by a control unit and a multi-level modulation unit forms a radio frequency signal integrated conditioning control unit, and power control and signal conditioning based on a multi-level integrated loop (inner loop + outer loop) are adopted, where:
a first-stage comprehensive power control and signal conditioning loop is formed by 'first-stage conditioning + low-noise pre-amplification + comprehensive control processing', a digitized output power control feedback signal of external PID control feedback conversion is compared with a detection signal of the output power of an initial radio frequency excitation signal output by a low-noise discharge circuit, and the output power of the initial radio frequency excitation signal is adjusted in a first-stage modulation unit according to the comparison result to obtain a first-stage radio frequency excitation signal; the method specifically comprises the following steps:
the 'primary conditioning' is that the primary modulation unit comprises a plurality of modulators connected in series, and provides different degrees of attenuation for the signal power level through the increase or decrease of the equivalent resistance so as to realize the output power adjustment in a larger range (up to 30 dB);
the low-noise pre-amplifier comprises a low-noise amplifying circuit and a single-channel digital detection circuit, wherein the low-noise amplifying circuit amplifies an excitation signal to a power level required by a second-stage comprehensive power control and signal conditioning loop and keeps a better signal-to-noise ratio, and the single-channel digital detection circuit extracts a digital feedback signal representing the power level of the excitation signal;
the modulation unit of the comprehensive control processing comprises circuits facing to 'primary conditioning' such as digital/analog conversion, analog/digital conversion, comparison control and the like, comprehensive comparison operation and conversion are carried out on a digital feedback signal from 'low noise pre-amplification', a power reference signal and a digital feedback signal of PID control feedback conversion outside a laser frequency stabilization system respectively, an amplitude control voltage signal is generated and fed back to 'primary conditioning' for conditioning control of the signal, wide-range adjustment of the output power of a radio frequency excitation signal is realized, and the unstable state of out-of-control open loop of the whole comprehensive modulation loop is avoided.
A second-stage comprehensive power control and signal conditioning loop is formed by 'second-stage conditioning, power amplification and comprehensive control processing', the control unit compares an output power control signal with a detection signal of the output power of a first-stage radio frequency excitation signal output by the power amplifier, and the output power of the first-stage radio frequency excitation signal is adjusted in the second-stage modulation unit according to a comparison result to obtain a second-stage radio frequency excitation signal; the method specifically comprises the following steps:
the 'secondary conditioning' is that the secondary modulation unit comprises two modulators connected in series, and the improvement and the promotion of the control resolution of the output power of the radio frequency excitation signal are realized while the power adjustment range is reduced;
the power amplification circuit amplifies an excitation signal to a third-stage comprehensive power control and signal conditioning loop and finally outputs the power level required by the excitation signal and keeps a better signal-to-noise ratio, and the two-channel digital detection circuit obtains two paths of digital feedback signals for eliminating random influence through operation on the basis of simultaneously extracting digital feedback signals representing the power levels of the excitation signal and a power reference signal, so that the performance of amplitude control during the operation of the loop is further improved;
the comprehensive control processing comprises circuits such as digital/analog conversion, analog/digital conversion, comparison control and the like facing to secondary conditioning, two paths of digital feedback signals (containing power reference) which are respectively from power amplification and are subjected to random influence elimination and digital feedback signals of PID control feedback conversion outside the laser frequency stabilization system are subjected to comprehensive comparison operation and conversion, amplitude control voltage signals are generated and fed back to the secondary conditioning for conditioning control of the signals, the noise coefficient, the frequency spectrum purity and the stability of output power of the signals are further improved on the basis of improving the output power of the excitation signals, and more stable signal input is provided for a next-stage loop.
A third-stage comprehensive power control and signal conditioning loop is formed by three-stage conditioning and comprehensive control processing: the control unit compares the output power control signal with a detection signal of the output power of the secondary radio frequency excitation signal, and regulates the output power of the secondary radio frequency excitation signal according to the comparison result in the three-stage modulation unit to output a target radio frequency excitation signal; the method specifically comprises the following steps:
the three-level conditioning unit comprises a single-diode type modulator, provides finer attenuation control for the signal power level by adjusting and controlling the increase or decrease of the driving current, and further realizes the improvement and promotion of the control resolution of the output power of the radio frequency excitation signal;
the integrated double-channel digital detection circuit integrates double-channel digital detection in a chip, and further eliminates the influence of environment and double-channel device characteristic difference on the digital feedback signals on the basis of simultaneously extracting two paths of digital feedback signals representing the power levels of the excitation signal and the power reference signal and eliminating random influence by operation, thereby further improving the loop control performance;
the comprehensive control processing comprises circuits such as digital/analog conversion, analog/digital conversion, comparison control and the like facing to three-stage conditioning, two paths of digital feedback signals (containing power reference) from an integrated two-channel digital detection circuit and digital feedback signals of PID control feedback conversion outside a laser frequency stabilization system are compared, operated and converted, amplitude control voltage signals are generated and fed back to the three-stage conditioning circuit to perform conditioning control on the signals, the performance level of the loop on amplitude control is further improved, and an integral control mode cooperating with an atomic lamp of an electrodeless discharge system and application equipment (such as a laser frequency stabilization system) of the atomic lamp is constructed.
In the embodiment, the functions of generating the radio frequency excitation signal, conditioning the signal and controlling and applying the high-stability output power are realized by the multi-frequency-point radio frequency signal generating and controlling unit and the radio frequency signal comprehensive conditioning and controlling unit, and the radio frequency excitation signal with better technical characteristics such as spectral purity, output power and stability is provided for the stable state of the atom (such as metastable helium atom) in dynamic balance by excitation from the aspects of innovation, signal generation optimization, multi-level ring amplitude stabilization and signal conditioning control, so that the performance levels of the atomic lamp with the electrodeless discharge system and the application equipment thereof, such as the frequency stabilization performance of the laser, are supported and improved, and the universality is realized.
The embodiment adopts high-integration components and simplified circuit design, can generate a plurality of radio frequency excitation signals with technical characteristics of spectral purity, noise coefficient, output power, stability and the like to meet application requirements and related technical requirements while remarkably reducing the circuit volume, has good universality and flexible expandability, and can effectively solve the problems of stability and application of atoms (such as metastable helium atoms) in a dynamic balance state under excitation, thereby supporting high-performance work of an atomic lamp with an electrodeless discharge system and application equipment thereof, such as realizing high-stability laser output frequency performance to meet the application requirements of the atomic lamp in a plurality of high-precision measurement equipment.
Example 2
The embodiment provides a method for modulating the power of a radio frequency excitation signal, which comprises the following steps:
s1: the radio frequency signal generating unit generates an initial radio frequency excitation signal, the control unit compares a preset output power control signal with a detection signal of the output power of the initial radio frequency excitation signal output by the low-noise discharge circuit, and the output power of the initial radio frequency excitation signal is adjusted in the primary modulation unit according to the comparison result to obtain a primary radio frequency excitation signal;
s2: the control unit compares the output power control signal with a detection signal of the output power of the primary radio frequency excitation signal output by the power amplifier, and adjusts the output power of the primary radio frequency excitation signal in the secondary modulation unit according to the comparison result to obtain a secondary radio frequency excitation signal;
s3: the control unit compares the output power control signal with a detection signal of the output power of the secondary radio frequency excitation signal, and regulates the output power of the secondary radio frequency excitation signal according to the comparison result in the three-stage modulation unit to output a target radio frequency excitation signal.
In further embodiments, there is also provided:
a radio frequency excitation signal generating apparatus comprising the radio frequency excitation signal power modulation circuit described in embodiment 1.
A radio frequency excitation signal generating apparatus using the radio frequency excitation signal power modulation method described in embodiment 2.
An electrodeless discharge lamp comprises the radio frequency excitation signal power modulation circuit in embodiment 1, and performs power modulation on a generated initial radio frequency excitation signal with a specific frequency, and uses the modulated radio frequency excitation signal for generating a light source with a specific wavelength.
An electrodeless discharge lamp adopts the radio frequency excitation signal power modulation method described in embodiment 2 to perform power modulation on a generated initial radio frequency excitation signal with a specific frequency, and the modulated radio frequency excitation signal is used for generating a light source with a specific wavelength.
Those of ordinary skill in the art will appreciate that the various illustrative elements, i.e., algorithm steps, described in connection with the embodiments disclosed herein may be implemented as electronic hardware or combinations of computer software and electronic hardware. Whether such functionality is implemented as hardware or software depends upon the particular application and design constraints imposed on the implementation. Skilled artisans may implement the described functionality in varying ways for each particular application, but such implementation decisions should not be interpreted as causing a departure from the scope of the present application.
The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and various modifications and changes will occur to those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Although the embodiments of the present invention have been described with reference to the accompanying drawings, it is not intended to limit the scope of the present invention, and it should be understood by those skilled in the art that various modifications and variations can be made without inventive efforts by those skilled in the art based on the technical solution of the present invention.

Claims (10)

1. A radio frequency excitation signal power modulation circuit, comprising: the device comprises a radio frequency signal generating unit, a control unit and a multi-level modulation unit; the system comprises a primary modulation unit, a secondary modulation unit, a power amplification circuit, a control unit and a primary circuit, wherein the primary modulation unit is connected with the control unit through the low-noise amplification circuit to form a primary circuit;
the radio frequency signal generating unit generates an initial radio frequency excitation signal, and the control unit performs power modulation on the initial radio frequency excitation signal sequentially through the primary loop, the secondary loop and the tertiary loop according to a preset output power control signal; and the power output by each stage of loop is compared with a preset output power control signal, and enters the power modulation of the next stage of loop according to the comparison result.
2. The power modulation circuit of claim 1, wherein the rf signal generator comprises a plurality of thermostatted crystal oscillators, and the thermostatted crystal oscillators generate initial rf excitation signals of specific frequencies.
3. The power modulation circuit of claim 1, further comprising a switching combination and a radio frequency switching combination; the switch combination switches and controls the direct current power supply of the constant temperature crystal oscillator through external operation; the radio frequency switch combination is used for constructing an output channel corresponding to the frequency of the initial radio frequency excitation signal.
4. The power modulation circuit of claim 1, wherein said primary loop comprises: the control unit compares a preset output power control signal with a detection signal of the output power of the initial radio frequency excitation signal output by the low-noise discharge circuit, and adjusts the output power of the initial radio frequency excitation signal according to a comparison result in the primary modulation unit to obtain a primary radio frequency excitation signal.
5. The power modulation circuit of claim 4, wherein said secondary loop comprises: the control unit compares the output power control signal with a detection signal of the output power of the primary radio frequency excitation signal output by the power amplifier, and adjusts the output power of the primary radio frequency excitation signal in the secondary modulation unit according to the comparison result to obtain a secondary radio frequency excitation signal.
6. The radio frequency excitation signal power modulation circuit of claim 5, wherein the three-stage loop comprises: the control unit compares the output power control signal with a detection signal of the output power of the secondary radio frequency excitation signal, and regulates the output power of the secondary radio frequency excitation signal according to the comparison result in the three-stage modulation unit to output a target radio frequency excitation signal.
7. The power modulation circuit of claim 1, wherein the external PID control feedback signal received by the control unit is converted into the predetermined output power control signal.
8. A method for power modulation of a radio frequency excitation signal, comprising:
the radio frequency signal generating unit generates an initial radio frequency excitation signal, the control unit compares a preset output power control signal with a detection signal of the output power of the initial radio frequency excitation signal output by the low-noise discharge circuit, and the output power of the initial radio frequency excitation signal is adjusted in the primary modulation unit according to the comparison result to obtain a primary radio frequency excitation signal;
the control unit compares the output power control signal with a detection signal of the output power of the primary radio frequency excitation signal output by the power amplifier, and adjusts the output power of the primary radio frequency excitation signal in the secondary modulation unit according to the comparison result to obtain a secondary radio frequency excitation signal;
the control unit compares the output power control signal with a detection signal of the output power of the secondary radio frequency excitation signal, and regulates the output power of the secondary radio frequency excitation signal according to the comparison result in the three-stage modulation unit to output a target radio frequency excitation signal.
9. A radio frequency excitation signal generating apparatus comprising the radio frequency excitation signal power modulating circuit according to any one of claims 1 to 7; or implementing a radio frequency excitation signal power modulation method according to claim 8.
10. An electrodeless discharge lamp comprising the rf excitation signal power modulation circuit as defined in any one of claims 1 to 7, wherein the modulated rf excitation signal is used to generate a light source of a specific wavelength;
or using the radio frequency excitation signal power modulation method according to claim 8, using the modulated radio frequency excitation signal to generate a light source with a specific wavelength.
CN202010586960.6A 2020-06-24 2020-06-24 Radio frequency excitation signal power modulation circuit, method and device Active CN111683426B (en)

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