CN111678422A - Wear sensor, wear sensor device, bearing, and method for installing bearing - Google Patents

Wear sensor, wear sensor device, bearing, and method for installing bearing Download PDF

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Publication number
CN111678422A
CN111678422A CN201911123937.7A CN201911123937A CN111678422A CN 111678422 A CN111678422 A CN 111678422A CN 201911123937 A CN201911123937 A CN 201911123937A CN 111678422 A CN111678422 A CN 111678422A
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CN
China
Prior art keywords
wear
wiring
bearing
conduction
detection
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Granted
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CN201911123937.7A
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Chinese (zh)
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CN111678422B (en
Inventor
冈田义之
山下拓马
金井晖裕
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Mitsubishi Heavy Industries Ltd
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Mitsubishi Heavy Industries Ltd
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Publication of CN111678422A publication Critical patent/CN111678422A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/34Measuring arrangements characterised by the use of electric or magnetic techniques for measuring roughness or irregularity of surfaces
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M13/00Testing of machine parts
    • G01M13/04Bearings

Abstract

A wear sensor, a wear sensor device, a bearing, and a method of installing a bearing, the wear sensor including: a wiring group (12) including conduction check wirings (21-25) and a grounding wiring (26) which are arranged at intervals in the (X) direction from the side surface (11b) to the side surface (11c) of the insulating substrate (11); and a wear detection wiring (13) formed on a wiring formation surface (11d) of the insulating substrate (11) and connecting front ends (21A-25A) of the conduction inspection wirings (21-25) located on the front end surface (11A) side of the insulating substrate (11) and a front end (26A) of the grounding wiring (26), wherein the front ends (21A-26A) are arranged in a manner of gradually receding from the front end surface (11A) to the rear end side of the insulating substrate (11) as going from the side surface (11b) to the side surface (11 c).

Description

Wear sensor, wear sensor device, bearing, and method for installing bearing
Technical Field
The invention relates to a wear sensor, a wear sensor device, a bearing, and a method of installing the bearing.
Background
As a sensor for detecting wear of a wear surface of an industrial machine, a wear sensor is used (see patent documents 1 and 2).
Patent document 1 discloses a wear sensor in which a conductive film serving as a wear detection wiring is formed on a block having a stepped shape.
Patent document 2 discloses a wear sensor in which wear detection wires are formed on one surface of each of a plurality of substrates, and the plurality of substrates on which the wear detection wires are formed are stacked.
Patent document 1: japanese patent No. 4072914
Patent document 2: japanese patent No. 6083960
Disclosure of Invention
Problems to be solved by the invention
However, in the case of the wear sensor disclosed in patent document 1, the resolution of the wear measurement depends on the processing accuracy of the block, and thus it is difficult to improve the resolution of the wear measurement.
In the case of the wear sensor disclosed in patent document 2, since a lamination error occurs when a plurality of substrates are laminated, it is difficult to improve the resolution of wear measurement.
Accordingly, an object of the present invention is to provide a wear sensor, a wear sensor device, a bearing, and a method of installing a bearing, which can improve the resolution of wear measurement.
Means for solving the problems
In order to solve the above problem, a wear sensor according to an aspect of the present invention includes: an insulating substrate having a front end surface disposed on a side where wear occurs with a wear proceeding direction as a longitudinal direction, a pair of side surfaces disposed in a width direction orthogonal to the longitudinal direction and connected to the front end surface, and a wiring forming surface surrounded by the front end surface and the pair of side surfaces and extending in the longitudinal direction; a wiring group including a plurality of conduction check wirings and at least one grounding wiring, which are formed on the wiring forming surface so as to extend in the wear advancing direction and are arranged at intervals in a direction from one side surface toward the other side surface; and a wear detection wire formed on the wire formation surface and connecting front ends of the plurality of conduction check wires on the front end surface side and front ends of the ground wires on the front end surface side, wherein the front ends of the plurality of conduction check wires and the front ends of the ground wires are arranged so as to gradually recede from the front end surface toward a rear end side of the insulating substrate as going from one side surface toward the other side surface, and the wear detection wire has a plurality of detection wire portions electrically connected to front ends of two wires adjacent to each other among the plurality of conduction check wires and the ground wires.
According to the present invention, a wear sensor includes: a wiring group including a plurality of conduction check wirings and at least one grounding wiring arranged at intervals in a direction from one side surface of the insulating substrate toward the other side surface; and a wear detection wire formed on the wire forming surface of the insulating substrate and connecting the front ends of the plurality of conduction check wires and the front ends of the grounding wires positioned on the front end surface side of the insulating substrate, wherein the front ends of the plurality of conduction check wires and the front ends of the grounding wires are arranged in a manner that the front ends of the plurality of conduction check wires and the front ends of the grounding wires gradually recede from the front end surface to the rear end side of the insulating substrate as going from one side surface to the other side surface, and the wear detection wire has a plurality of detection wire portions electrically connected to the front ends of two wires adjacent to each other among the plurality of conduction check wires and the grounding wires, thereby eliminating the need to form a gap for electrically insulating the detection wire portions from each other in the wear proceeding direction.
This makes it possible to reduce the distance in the longitudinal direction of the insulating substrate from the position where one detection wiring portion is removed by abrasion to the position where the next detection wiring portion is removed, and thus the resolution of abrasion measurement can be improved.
Further, since the detection wiring portions adjacent to each other can be partially arranged so as to overlap each other in the friction advancing direction, the resolution of the wear measurement can be made smaller than the width of the detection wiring portions.
In the wear sensor according to the above aspect of the present invention, the plurality of detection wiring portions may extend in a direction orthogonal to the wear proceeding direction, and the wear detection wiring may have a stepped shape.
In this way, by forming the plurality of detection wiring portions extending in the direction orthogonal to the wear progression direction in a stepped shape, it is possible to shift the timing at which each detection wiring portion is completely removed by wear without forming a gap in the wear progression direction.
In the wear sensor according to the above aspect of the present invention, the plurality of detection wiring portions may be arranged to be inclined with respect to the distal end surface.
By arranging the plurality of detection wiring portions so as to be inclined with respect to the distal end surface in this manner, it is possible to shift the timing at which each detection wiring portion is completely removed by wear without forming a gap in the direction in which wear progresses.
In the wear sensor according to the above aspect of the present invention, the plurality of detection wiring portions may be inclined at a constant angle with respect to the distal end surface.
In this way, by inclining the plurality of detection wiring portions at a constant angle with respect to the distal end surface, the wear resolution in the friction progress direction can be made constant.
In the wear sensor according to the above aspect of the present invention, the detection wiring portion may be in contact with an angular point of a tip end of the conduction check wiring disposed on the other side surface side, of the two conduction check wirings disposed adjacent to each other in the width direction.
In this way, by making contact with the corner point of the tip of the conduction check wiring line arranged on the other side surface side of the two conduction check wiring lines arranged in the positions adjacent to each other in the width direction, disconnection of the two conduction check wiring lines arranged in the positions adjacent to each other can be performed at a point, and therefore, the measurement accuracy of wear can be improved.
Further, since the region in which the wiring width of the conduction check wiring decreases becomes smaller as the angle toward the tip of the conduction check wiring disposed on the other side surface side is increased, a rapid resistance change can be generated at the time of disconnection. This improves the S/N ratio, and thus can improve the accuracy of wear measurement.
In order to solve the above problem, a wear sensor device according to an aspect of the present invention includes: the above-mentioned wear sensor; and a wear amount obtaining device including a conduction detection unit configured to detect a conduction state by applying a voltage between the plurality of conduction inspection wires and the grounding wire, a storage unit configured to store data relating to a wear amount of the wear sensor corresponding to the conduction state, and a wear amount obtaining unit configured to obtain the wear amount of the wear sensor based on the conduction state detected by the conduction detection unit and the data.
According to the present invention, by providing the wear sensor and the wear amount acquisition device having the above-described configuration, the wear amount of the object to be worn can be acquired based on the wear amount of the wear sensor.
In order to solve the above problem, a bearing according to an aspect of the present invention includes: the above-described wear sensor device; and a bearing main body having a wear surface worn by a rotating body and a housing portion housing the wear sensor, wherein the wear amount acquisition portion acquires a wear amount of the bearing main body based on a wear amount of the wear sensor.
According to the present invention, by providing the wear sensor device and the bearing body having the above-described configurations, the amount of wear of the bearing body can be obtained.
In order to solve the above problem, a method of installing a bearing according to an aspect of the present invention includes: a sensor arrangement step of arranging the wear sensor in a housing portion of the bearing body such that a part of a tip of the wear sensor protrudes from a wear surface of the bearing body; a machining step of removing a tip end side of the wear sensor and the wear surface side of the bearing body so that a tip end surface of the wear sensor is flush with the wear surface; and a conduction check step, subsequent to the processing step, of performing conduction check by the wear amount obtaining device to specify the detection wiring portion from which the detection wiring portion is removed, wherein in the sensor arranging step, a part of the detection wiring portions is arranged in the accommodating portion, and a remaining portion is arranged outside the accommodating portion.
According to the present invention, by providing the sensor arrangement step, the processing step, and the conduction check step, it is possible to eliminate a region where the amount of wear cannot be detected (a region from the front end surface of the insulating substrate to the detection wiring portion closest to the front end surface of the insulating substrate), and to specify the detection wiring portion removed by the removal.
This makes it possible to obtain the wear amount even when the wear amount of the wear surface of the bearing main body is small.
In order to solve the above problem, a bearing according to an aspect of the present invention includes: a bearing main body having a cylindrical shape, an inner circumferential surface for rotatably supporting the rotating body being a wear surface, and a first cut-out portion formed by cutting out in a direction recessed radially outward from the wear surface; a laminate formed in the first cut portion and formed by alternately laminating an insulating layer and a wiring pattern; a pad for conduction inspection connected to the wiring pattern; and a ground pad used in a conduction test, the wiring pattern being drawn out to a region other than the wear surface of the bearing body through the insulating layer, the ground pad being connected to the wiring pattern in the region, and the ground pad being disposed in the region in a state separated from the ground pad.
According to the present invention, the thickness of the insulating layer and the thickness of the wiring pattern in the radial direction of the bearing body can be reduced by providing the laminate in which the insulating layer and the wiring pattern connected to the conduction check pad are alternately laminated in the first cutout portion formed in the bearing body, and processing the insulating layer and the wiring pattern by using a semiconductor device manufacturing technique such as a photolithography technique, a sputtering technique, a CVD technique, an evaporation technique, or a dry etching technique while making the outer surface of the laminate flush with the wear surface of the bearing body.
This can shorten the wear resolution, which is the depth (distance) from the position where one wiring pattern on the wear surface side is broken by wear to the position where the next wiring pattern is broken, and thus can improve the resolution of wear measurement.
Further, the wiring pattern is drawn out to the region other than the wear surface of the bearing body through the insulating layer, the conduction check pad is connected to the wiring pattern in the region other than the wear surface, and the ground pad is disposed in the region other than the wear surface in a state of being separated from the conduction check pad, whereby the wiring used in the conduction check can be easily connected to the conduction check pad and the ground pad. This makes it possible to easily perform the conduction check.
In order to solve the above problem, a bearing according to an aspect of the present invention includes: a bearing main body having a cylindrical shoe back portion and a cylindrical shoe portion disposed on an inner peripheral surface of the shoe back portion and having an inner peripheral surface for rotatably supporting a rotating body as a wear surface; a laminate formed on an inner peripheral surface of the tile back and formed by alternately laminating insulating layers and wiring patterns; a pad for conduction inspection connected to the wiring pattern; and a ground pad used in a conduction test, wherein the pad portion is formed of a metal film covering the laminate, the inner peripheral surface is a smooth curved surface having no level difference, the wiring pattern is drawn out to a region other than the wear surface in the bearing body through the insulating layer, the ground pad is connected to the wiring pattern in the region, and the ground pad is disposed in the region in a state of being separated from the ground pad.
According to the present invention, the thickness of the insulating layer and the thickness of the wiring pattern in the radial direction of the bearing body can be made thin by providing the laminated body in which the insulating layer and the wiring pattern connected to the conduction check pad are alternately laminated on the inner peripheral surface of the pad back portion, and processing the insulating layer and the wiring pattern by using a semiconductor device manufacturing technique such as photolithography, sputtering, CVD, vapor deposition, or dry etching while making the outer surface of the laminated body and the wear surface of the bearing body coplanar.
This can shorten the wear resolution, which is the depth (distance) from the position where one wiring pattern on the wear surface side is broken by wear to the position where the next wiring pattern is broken, and thus can improve the resolution of wear measurement.
Further, the wiring pattern is drawn out to the region other than the wear surface of the bearing body through the insulating layer, the conduction check pad is connected to the wiring pattern in the region other than the wear surface, and the ground pad is disposed in the region other than the wear surface in a state of being separated from the conduction check pad, whereby the wiring used in the conduction check can be easily connected to the conduction check pad and the ground pad. This makes it possible to easily perform the conduction check.
Further, by forming the laminate on the inner peripheral surface of the shoe back portion and then forming the shoe portion made of the metal film, the step of forming the recess portion and the notch portion for housing the laminate in the shoe portion can be omitted.
In the bearing according to the above aspect of the present invention, the region may be an end surface of the bearing main body.
In this way, by disposing the conduction check land and the grounding land on the end surface of the bearing main body, the wiring used in the conduction check can be easily connected to the conduction check land and the grounding land.
In the bearing according to the above aspect of the present invention, the region may be a second notch portion formed outside the first notch portion in the longitudinal direction of the bearing body and having a depth deeper than the first notch portion with the wear surface as a reference.
In this way, by arranging the conduction check land and the ground land in the second notch portion having a depth with respect to the wear surface that is deeper than the depth of the first notch portion, the wiring used in the conduction check can be easily connected to the conduction check land and the ground land.
Effects of the invention
According to the present invention, the resolution of wear measurement can be improved.
Drawings
Fig. 1 is a view showing a main part of a bearing according to a first embodiment of the present invention.
Fig. 2 is a view schematically showing a state where one detection wiring portion of the wear sensor is removed due to wear of the wear surface of the bearing main body shown in fig. 1.
Fig. 3 is a diagram showing a wear sensor according to a modification of the first embodiment of the present invention.
Fig. 4 is (one of) a diagram for explaining a method of installing a bearing according to a second embodiment of the present invention, and is a diagram for explaining a sensor arrangement step.
Fig. 5 is a diagram (two) for explaining a method of installing a bearing according to a second embodiment of the present invention, and is a diagram for explaining a machining process and a conduction check process.
Fig. 6 is a side view of a bearing according to a third embodiment of the present invention.
Fig. 7 is a view of one end surface of the bearing shown in fig. 6 viewed from the view K.
FIG. 8 is N for the bearing shown in FIG. 71-N2A cross-sectional view in the line direction.
FIG. 9 is N for the bearing shown in FIG. 73-N4A cross-sectional view in the line direction.
FIG. 10 is N for the bearing shown in FIG. 75-N6A cross-sectional view in the line direction.
FIG. 11 is N of the bearing shown in FIG. 77-N8A cross-sectional view in the line direction.
Fig. 12 is a view of the plurality of wiring patterns shown in fig. 8 to 10 as viewed from the inner peripheral surface side of the bearing main body, and is a schematic view of each wiring pattern.
Fig. 13 is a sectional view (one of) a bearing according to a fourth embodiment of the present invention.
Fig. 14 is a sectional view (two) of a bearing according to a fourth embodiment of the present invention.
Fig. 15 is a schematic view of the plurality of wiring patterns, the plurality of conduction testing pads, and the grounding pad shown in fig. 13 and 14, as viewed from the inside in the radial direction of the bearing main body.
Fig. 16 is a sectional view of a main portion of a bearing according to a fifth embodiment of the present invention.
Description of reference numerals:
4 … a rotating body;
4a, 87b …;
5. 80, 105, 115 … bearings;
6. 76, 116 … bearing body;
6a, 76a, 116a … wear surface;
6A … enclosure;
7 … wear sensor device;
8. 55 … wear sensor;
9 … abrasion measuring device;
11 … insulating substrate;
11a … front face;
11b, 11c … side;
11d … wiring forming surface;
12. 56 … wiring group;
13. 59 … wear detection wiring;
21 to 25, 61 to 65 … are connected to the inspection wiring;
26. 66 … a ground wiring;
21A-26A, 61A-66A … front end;
31 to 35, 71 to 75 … detection wiring part;
31A-35A, 31B-35B, 71A-75A, 71B-75B … end portions;
41-46 …;
48 … abrasion loss acquisition device body;
a 48a … storage section;
48B … conduction detection unit;
a 48C … wear amount acquisition unit;
76b, 87c, 88a … end faces;
76a … second cut-out portion;
78 … a laminate;
81-83 … conduction inspection pads;
84 … ground pad;
87. 117 … a bushing portion;
87a, 117a …;
87A … hollow;
87B … first cut-out portion;
88 … watt backs;
91. 93, 95, 97 … insulating layers;
92. 94, 96 … wiring patterns;
92A, 94A, 96a … end;
92B, 94B, 96B …;
a … wear progression direction;
b … first amount of wear;
c … second wear amount;
d … resolution;
DE1, DE2 … depth;
the J … region;
the O … axis.
Detailed Description
Hereinafter, embodiments to which the present invention is applied will be described in detail with reference to the drawings.
(first embodiment)
A bearing 5 according to a first embodiment will be described with reference to fig. 1 and 2. In fig. 1, for convenience of explanation, the rotary body 4, which is not a constituent element of the bearing 5, is illustrated, and only the bearing main body 6 is illustrated in a cross-sectional view.
In fig. 1, B represents a first wear amount (hereinafter referred to as "first wear amount B") when the entire detection wiring portion 31 disposed at a position closest to the distal end surface 11a in the Y direction among the plurality of detection wiring portions 31 to 35 is removed, C represents a wear amount (hereinafter referred to as "second wear amount C") from the removal of the entire detection wiring portion of one of the detection wiring portions 32 to 35 to the removal of the entire detection wiring portion next, and D represents a resolution (hereinafter referred to as "resolution D") of the wear sensor 8 in a portion where the wear detection wiring 13 is formed. The resolution D is equal to the second wear amount C.
In fig. 1 and 2, a indicates a direction in which wear of the bearing main body 6 and the wear sensor 8 progresses due to contact with the outer peripheral surface 4a of the rotating body 4 (hereinafter referred to as "wear progress direction a"), an X direction indicates a width direction of the insulating substrate 11, and a Y direction indicates a longitudinal direction of the insulating substrate 11 orthogonal to the X direction (a direction including a direction opposite to the wear progress direction a).
In fig. 1 and 2, the upper side of the drawing is the front end side of the insulating substrate 11, and the lower side of the drawing is the rear end side of the insulating substrate 11. Fig. 1 and 2 show, as an example, a state in which the other end of the wiring 41 is connected to the conduction check wiring 21 and the other end of the wiring 46 is connected to the grounding wiring 26.
In the first embodiment, the following description will be given, by way of example, of a case where the wear sensor 8 is provided in the bearing body 6 so that the distal end surface 11a of the insulating substrate 11 is flush with the wear surface 6a of the bearing body 6.
The bearing 5 has a bearing body 6 and a wear sensor device 7.
The bearing body 6 is provided outside the outer peripheral surface 4a of the rotating body 4 having a cylindrical shape. The bearing body 6 has a cylindrical shape surrounding the outer peripheral surface 4a of the rotor 4.
The bearing body 6 has a wear surface 6a (inner circumferential surface) that rotatably supports the rotary body 4. The wear surface 6a is a surface that contacts the outer peripheral surface 4a of the rotating body 4.
The wear sensor device 7 includes a wear sensor 8 and a wear amount acquiring device 9.
The wear sensor 8 includes an insulating substrate 11, a wiring group 12, and a wear detection wiring 13. The insulating substrate 11 is a rectangular plate-shaped substrate. The insulating substrate 11 has a front end surface 11a, a rear end surface (not shown), a pair of side surfaces 11b and 11c, and a wiring forming surface 11 d.
The distal end surface 11a is a surface perpendicular to the Y direction and facing the outer peripheral surface 4a of the rotating body 4. That is, the distal end surface 11a is formed on the side where wear occurs, and is exposed from the bearing body 6.
Immediately after the wear sensor 8 is mounted to the bearing main body 6, the front end surface 11a is coplanar with the wear surface 6a of the bearing main body 6.
The front end surface 11a is worn together with the wear surface 6a by contact with the outer peripheral surface 4a of the rotating body 4. The distal end surface 11a retreats from the position before the wear toward the radial outside of the bearing body 6 together with the wear surface 6a due to the wear.
The rear end surface (not shown) is formed on the opposite side of the front end surface 11a in the Y direction.
The side surface 11b is a side surface formed on one side in the X direction (one side surface). The side surface 11c is formed on the other side surface in the X direction (the other side surface). The side surfaces 11b and 11c are surfaces arranged in the X direction and connected to the distal end surface 11 a.
The wiring formation surface 11d is one of two surfaces surrounded by the front end surface 11a, the rear end surface (not shown), and the pair of side surfaces 11b and 11 c. The wiring formation surface 11d is a surface parallel to the X direction and the Y direction. The wiring formation surface 11d extends in the Y direction with the Y direction as the longitudinal direction.
The wiring group 12 includes conduction testing wirings 21 to 25 (a plurality of conduction testing wirings) and one grounding wiring 26.
The conduction check wirings 21 to 25 and the grounding wiring 26 are wirings extending in the Y direction and formed on the wiring forming surface 11 d.
The conduction check wires 21 to 25 and the grounding wire 26 are arranged in the order of the conduction check wire 21, the conduction check wire 22, the conduction check wire 23, the conduction check wire 24, the conduction check wire 25 and the grounding wire 26 with a gap in the direction from the side surface 11b to the side surface 11 c.
The leading ends 21A-25A of the conduction check wires 21-25 and the leading end 26A of the grounding wire 26 are disposed on the leading end surface 11A side. The distal ends 21A to 26A are parallel to the distal end surface 11A. That is, the tips 21A to 26A are parallel to the X direction and orthogonal to the Y direction.
The distal ends 21A to 26A are arranged so that the distance from the distal end surface 11A to the distal ends 21A to 26A increases from the side surface 11b toward the side surface 11c and gradually recedes from the distal end surface 11A toward the rear end.
The wear detection wiring 13 is formed on the wiring forming surface 11d so as to connect the leading ends 21A to 25A of the conduction check wirings 21 to 25 and the leading end 26A of the grounding wiring 26.
The wear detection wiring 13 is disposed on the front end surface 11a side of the positions where the conduction inspection wirings 21 to 25 and the grounding wiring 26 are formed.
The wear detection wiring 13 has a plurality of detection wiring parts 31-35.
The detection wiring portion 31 extends in the X direction orthogonal to the wear proceeding direction a. The detection wiring portion 31 has an end portion 31A disposed on the side of the side surface 11B and an end portion 31B disposed on the side of the side surface 11 c. The end 31A is connected to the tip 21A of the conduction check wire 21.
The detection wiring portion 32 extends in the X direction orthogonal to the wear proceeding direction a, and is connected to the tip 22A of the conduction check wiring 22. The detection wiring portion 32 has an end portion 32A disposed on the side of the side surface 11B and an end portion 32B disposed on the side of the side surface 11 c.
The end portion 32A has a portion narrower in width in the Y direction than the end portion 32B. The end portion 32A is connected to the end portion 31B of the detection wiring portion 31. Thus, the detection wiring portion 31 is electrically connected to the conduction check wiring 22 via the end portion 32A.
The detection line portion 32 is disposed at a position farther from the front end surface 11a toward the rear end side than the formation position of the detection line portion 31 in the Y direction.
The detection wiring portion 33 extends in the X direction orthogonal to the wear proceeding direction a, and is connected to the leading end 23A of the conduction check wiring 23. The detection wiring portion 33 has an end portion 33A disposed on the side of the side surface 11B and an end portion 33B disposed on the side of the side surface 11 c.
The end portion 33A has a portion narrower in width in the Y direction than the end portion 33B. The end portion 33A is connected to the end portion 32B of the detection wiring portion 32. Thus, the detection wiring portion 32 is electrically connected to the conduction check wiring 23 via the end portion 33A.
The detection line portion 33 is disposed at a position farther from the front end surface 11a toward the rear end side than the formation position of the detection line portion 32 in the Y direction.
The detection wiring portion 34 extends in the X direction orthogonal to the wear proceeding direction a, and is connected to the tip 24A of the conduction check wiring 24. The detection wiring portion 34 has an end portion 34A disposed on the side of the side surface 11B and an end portion 34B disposed on the side of the side surface 11 c.
The end portion 34A has a portion narrower in width in the Y direction than the end portion 34B. The end portion 34A is connected to the end portion 33B of the detection wiring portion 33. Thereby, the detection wiring portion 33 is electrically connected to the conduction check wiring 24 via the end portion 34A.
The detection line portion 34 is disposed at a position farther from the front end surface 11a toward the rear end side than the formation position of the detection line portion 33 in the Y direction.
The detection wiring portion 35 extends in the X direction orthogonal to the wear proceeding direction a, and is connected to the tip 25A of the conduction check wiring 25. The detection wiring portion 35 has an end portion 35A disposed on the side of the side surface 11B and an end portion 35B disposed on the side of the side surface 11 c.
The end 35A has a portion narrower in width in the Y direction than the end 35B. The end portion 35A is connected to the end portion 34B of the detection wiring portion 34. Thus, the detection wiring portion 34 is electrically connected to the conduction check wiring 25 via the end portion 35A. End portion 35B is connected to tip 26A of grounding conductor 26.
The detection line portion 35 is disposed at a position farther from the front end surface 11a toward the rear end side than the formation position of the detection line portion 34 in the Y direction.
The abrasion loss amount obtaining device 9 includes wirings 41 to 46 and an abrasion loss amount obtaining device main body 48.
One end of the wiring 41 is electrically connected to the wear amount obtaining device main body 48. The other end of the wiring 41 is connected to the conduction check wiring 21 when it is checked whether or not the conduction check wiring 21 and the grounding wiring 26 are conductive (the state shown in fig. 1 and 2).
When the conduction between the conduction check wiring 21 and the grounding wiring 26 is established, it is determined that the detection wiring portion 31 remains. On the other hand, when there is no conduction between the conduction check wiring 21 and the grounding wiring 26, it is determined that the entire detection wiring 31 is chipped off due to abrasion.
One end of the wiring 42 is electrically connected to the wear amount obtaining device main body 48. The other end of the wiring 42 is connected to the conduction check wiring 22 when it is checked whether or not the conduction check wiring 22 and the grounding wiring 26 are conductive.
One end of the wiring 43 is electrically connected to the wear amount obtaining device main body 48. The other end of the wiring 43 is connected to the conduction check wiring 23 when it is checked whether or not the conduction check wiring 23 and the grounding wiring 26 are conductive.
One end of the wiring 44 is electrically connected to the wear amount obtaining device main body 48. The other end of the wiring 44 is connected to the conduction check wiring 24 when it is checked whether or not the conduction check wiring 24 and the grounding wiring 26 are conductive.
One end of the wiring 45 is electrically connected to the wear amount obtaining device main body 48. The other end of the wiring 45 is connected to the conduction check wiring 25 when it is checked whether or not the conduction check wiring 25 and the grounding wiring 26 are conductive.
One end of the wiring 46 is electrically connected to the wear amount obtaining device main body 48. The other end of the wiring 46 is connected to any one of the conduction testing wirings 21 to 25 when it is checked whether conduction between the conduction testing wirings 21 to 25 and the grounding wiring 26 is established.
The wear amount obtaining device body 48 includes a storage unit 48A, a conduction detection unit 48B, and a wear amount obtaining unit 48C.
The storage unit 48A stores information related to the first wear amount and the second wear amount B, C. The first wear amount and the second wear amount B, C are data relating to the wear amount of the wear sensor 8 corresponding to the conduction state of the wiring group 12.
The conduction detector 48B detects the conduction state by applying a voltage between each of the conduction inspection wires 21 to 25 and the grounding wire 26, and transmits information on the conduction state to the wear amount acquisition unit 48C.
The wear amount acquisition unit 48C acquires the wear amount (hereinafter referred to as "wear amount X") of the wear sensor 8 based on the information on the on state detected by the conduction detection unit 48B and the first and second wear amounts B, C.
For example, when the conduction check wiring 21 and the grounding wiring 26 are not in conduction and the conduction check wiring 22 and the grounding wiring 26 are in conduction (the state shown in fig. 2), the result of adding the first wear amount B and the second wear amount C is obtained as the wear amount E as shown in the following expression (1).
E=B+C···(1)
When the conduction check wires 21 and 22 and the grounding wire 26 are not in conduction and the conduction check wire 23 and the grounding wire 26 are in conduction, the result of adding 2 times the first wear amount B and the second wear amount C is obtained as the wear amount E as shown in the following expression (2).
E=B+2×C···(2)
When the conduction check wires 21 to 23 and the grounding wire 26 are not in conduction and the conduction check wire 24 and the grounding wire 26 are in conduction, the result of adding 3 times the first wear amount B and the second wear amount C is obtained as the wear amount F as shown in the following expression (3).
E=B+3×C···(3)
In this way, the wear amount acquiring unit 48C acquires the wear amount E of the wear sensor 8 from the initial state (the state where the front end surface 11a of the insulating substrate 11 is not worn by the rotating body 4).
The wear amount acquisition unit 48C acquires the wear amount F of the bearing body 6 on the wear surface 6a side based on the wear amount E of the wear sensor 8.
In the case of the first embodiment, the wear sensor 8 is provided in the housing portion 6A of the bearing body 6 such that the wear surface 6A of the bearing body 6 is flush with the front end surface 11a of the wear sensor 8. Therefore, the wear amount F of the bearing main body 6 is equal to the wear amount E of the wear sensor 8. Therefore, by acquiring the wear amount E of the wear sensor 8, the wear amount F of the bearing main body 6 can be acquired.
The wear sensor 8 according to the first embodiment includes: a wiring group 12 including conduction test wirings 21 to 25 and a grounding wiring 26 arranged at intervals in an X direction from a side surface 11b toward a side surface 11c of an insulating substrate 11; and a wear detection wiring 13 formed on the wiring formation surface 11d of the insulating substrate 11, connecting the front ends 21A to 25A of the conduction check wirings 21 to 25 positioned on the side of the front end surface 11A of the insulating substrate 11 and the front end 26A of the grounding wiring 26, and being arranged such that the front ends 21A to 26A gradually recede from the front end surface 11A toward the rear end side of the insulating substrate 11 as going from the side surface 11b toward the side surface 11c, the wear detection wiring 13 having detection wiring portions 31 to 35 electrically connected to the front ends of two wirings adjacent to each other of the conduction check wirings 21 to 25 and the grounding wiring 26, thereby eliminating the need to form gaps for electrically insulating the detection wiring portions from each other in the wear proceeding direction a.
This can reduce the distance in the longitudinal direction (Y direction) of the insulating substrate 11 from the position where one detection wiring portion is removed to the position where the next detection wiring portion is removed due to wear, and thus can improve the resolution D of wear measurement.
In addition, since the detection wiring portions 31 to 35 adjacent to each other can be partially arranged to overlap each other in the rubbing direction a, the resolution D of the wear measurement can be made smaller than the width (width in the Y direction) of the detection wiring portions.
Further, by arranging the detection line portions 31 to 35 so as to extend in the direction orthogonal to the wear advancing direction a and forming the wear detection line 13 in a stepped shape, it is possible to shift the timing at which the detection line portions 31 to 35 are removed by wear without forming a gap in the wear advancing direction a.
Further, the wear sensor device 7 according to the first embodiment includes: the above-described wear sensor 8; and a wear amount acquisition device 9 having a conduction detection unit 48B for detecting a conduction state by applying a voltage between the conduction inspection wires 21 to 25 and the grounding wire 26, a storage unit 48A for storing data relating to the first wear amount and the second wear amount B, C of the wear sensor corresponding to the conduction state, and a wear amount acquisition unit 48C for acquiring the wear amount E of the wear sensor 8 based on the conduction state detected by the conduction detection unit 48B and the first wear amount and the second wear amount B, C, whereby the wear amount F of the wear object can be acquired based on the wear amount E of the wear sensor 8.
Further, according to the bearing 5 of the first embodiment, the wear amount F of the bearing body 6 can be obtained by providing the wear sensor device 7, the wear surface 6A worn by the rotating body 4, and the bearing body 6 having the housing portion 6A housing the wear sensor 8.
In the first embodiment, the case where 5 conduction check wires 21 to 25, 1 grounding wire 26, and 5 detection wire portions 31 to 35 are provided is described as an example, but the number of conduction check wires, grounding wires 26, and detection wire portions is not limited to the number shown in fig. 1 and 2, and at least one of them may be provided.
Next, a wear sensor 55 according to a modification of the first embodiment will be described with reference to fig. 3. In fig. 3, the same components as those of the structure shown in fig. 1 are denoted by the same reference numerals.
The wear sensor 55 is configured in the same manner as the wear sensor 8 except that a wiring group 56 formed on the wiring formation surface 11d of the insulating substrate 11 is provided instead of the wiring group 12 configuring the wear sensor 8 of the first embodiment.
The wiring group 56 includes the conduction testing wirings 61 to 65 (a plurality of conduction testing wirings) and one grounding wiring 66.
The conduction check wires 61 to 65 and the grounding wire 66 are arranged in the order of the conduction check wire 61, the conduction check wire 62, the conduction check wire 63, the conduction check wire 64, the conduction check wire 65, and the grounding wire 66 with a space in the direction from the side surface 11b to the side surface 11 c.
The conduction check wires 61 to 65 and the ground wire 66 have the same configuration as the conduction check wires 21 to 25 and the ground wire 26 described above, except that the distal ends 61A to 66A disposed on the distal end surface 11A side are inclined with respect to the distal end surface 11A.
The distal ends 61A to 66A are inclined in the same direction (downward right in the paper of fig. 3). The front ends 61A to 66A are inclined at the same angle with respect to the front end surface 11A.
The distal ends 61A to 66A are arranged so as to recede from the distal end surface 11A so that the distance from the distal end surface 11A to the distal ends 61A to 66A increases as going from the side surface 11b to the side surface 11 c.
The wear detection wiring 59 is formed on the wiring formation surface 11d so as to connect the leading ends 61A to 65A of the conduction check wirings 61 to 65 and the leading end 66A of the grounding wiring 66.
The wear detection wiring 59 is inclined at the same inclination angle as the leading ends 61A to 65A, and extends in the same direction. The wear detection wiring 59 is disposed on the front end surface 11a side of the positions where the conduction inspection wirings 61 to 65 and the grounding wiring 66 are formed.
The wear detection wiring 59 has detection wiring portions 71 to 75 (a plurality of detection wiring portions).
The detection wiring portions 71 to 75 are arranged linearly in the direction in which the wear detection wiring 59 extends. The detection wiring portions 71 to 75 are arranged in the order of the detection wiring portion 71, the detection wiring portion 72, the detection wiring portion 73, the detection wiring portion 74, and the detection wiring portion 75 in the direction from the side surface 11b toward the side surface 11 c.
By arranging the detection line portions 71 to 75 linearly in the direction in which the wear detection line 59 extends in this manner, it is possible to shift the timing at which the respective detection line portions 71 to 75 are completely removed by wear without forming a gap in the wear advancing direction a.
The detection wiring portions 71 to 75 are inclined at a constant angle with respect to the front end surface 11 a. By inclining the plurality of detection wiring portions 71 to 75 at a constant angle with respect to the distal end surface 11a in this manner, the resolution of the wear performance in the friction progress direction a can be made constant.
The detection wiring portion 71 constitutes an end portion of the wear detection wiring 59 located on the side surface 11b side. The detection wiring portion 71 has an end portion 71A disposed on the side of the side surface 11B and an end portion 71B disposed on the side of the side surface 11 c.
The end portion 71A is connected to the entire distal end 61A of the conduction check wire 61. The end portion 71B contacts an angular point on the side surface 11B side of the leading end 62A of the conduction check wiring 62.
The detection wiring portion 71 having the above-described configuration is connected to the conduction check wirings 61 and 62.
The detection wiring portion 72 has an end portion 72A disposed on the side of the side surface 11B and an end portion 72B disposed on the side of the side surface 11 c.
The end portion 72A is connected to the end portion 71A of the detection wiring portion 71 and a portion of the leading end 62A of the conduction check wiring 62 that is not in contact with the end portion 71B.
The end portion 72B contacts an angular point on the side surface 11B side of the leading end 63A of the conduction check wiring 63.
The detection wiring portion 72 having the above-described configuration is connected to the conduction check wirings 62 and 63.
The detection wiring portion 73 has an end 73A disposed on the side of the side surface 11B and an end 73B disposed on the side of the side surface 11 c.
The end portion 73A is connected to the end portion 72A of the detection wiring portion 72 and a portion of the leading end 63A of the conduction check wiring 63 which is not in contact with the end portion 72B.
The end portion 73B contacts an angular point on the side surface 11B side of the leading end 64A of the conduction check wiring 64.
The detection wiring portion 73 having the above-described configuration is connected to the conduction check wirings 63 and 64.
The detection wiring portion 74 has an end portion 74A disposed on the side of the side surface 11B and an end portion 74B disposed on the side of the side surface 11 c.
The end portion 74A is connected to the end portion 73A of the detection wiring portion 73 and a portion of the leading end 64A of the conduction check wiring 64 which is not in contact with the end portion 73B.
The end portion 74B contacts an angular point on the side surface 11B side of the leading end 65A of the conduction check wiring 65.
The detection wiring portion 74 having the above-described configuration is connected to the conduction check wirings 64 and 65.
The detection wiring portion 75 has an end portion 75A disposed on the side of the side surface 11B and an end portion 75B disposed on the side of the side surface 11 c.
The end portion 75A is connected to the end portion 74A of the detection wiring portion 74 and a portion of the leading end 65A of the conduction check wiring 65 which does not contact the end portion 74B. The end portion 74B is in contact with the entire tip 66A of the grounding conductor 66.
The detection wiring portion 75 having the above-described configuration is connected to the conduction check wiring 65 and the grounding wiring 66.
The detection wiring portions 71 to 75 are inclined in the same direction as the leading ends 61A to 66A at the same angle as the leading ends 61A to 66A.
According to the wear sensor 55 of the modification of the first embodiment, the wear detection wiring 59 including the plurality of detection wiring portions 71 to 75 inclined in the same direction with respect to the distal end surface 11a is provided, and the corners of the distal ends 62A to 65A of the conduction check wirings 62 to 65 arranged in the X direction and arranged on the side surface 11c side among the two conduction check wirings 61 to 65 arranged in the adjacent positions to each other are brought into point contact with the detection wiring portions 71 to 74, whereby the two conduction check wirings 61 to 65 arranged in the adjacent positions to each other can be disconnected at a point, and therefore, the accuracy of measuring the wear can be improved.
Further, the region in which the wiring width of the conduction check wirings 61 to 65 decreases with the angle toward the side surface 11c at which the leading ends 61A to 65A of the conduction check wirings 61 to 65 are disposed, and therefore, a rapid resistance change can occur at the time of disconnection. This improves the S/N ratio, and thus can improve the accuracy of wear measurement.
(second embodiment)
A method of installing the bearing 5 according to the second embodiment will be described with reference to fig. 4 and 5. In the second embodiment, a case where the wear sensor 8 of the first embodiment is provided in the bearing main body 6 is given as an example.
J shown in fig. 4 indicates a region where the wear amount cannot be detected (hereinafter referred to as "region J"). In fig. 4 and 5, the same components as those of the structure shown in fig. 1 and 2 are denoted by the same reference numerals.
First, in the step shown in fig. 4, the wear sensor 8 is disposed in the housing portion 6A of the bearing body 6 such that a part of the tip of the wear sensor 8 protrudes from the wear surface 6A of the bearing body 6 (sensor disposing step).
In the sensor disposing step, some of the detection wiring portions 31 to 35 (the detection wiring portions 32 to 35 in the case of fig. 4, for example) are disposed in the housing portion 6A, and the remaining portion (the detection wiring portion 31 in the case of fig. 4, for example) is disposed outside the housing portion 6A.
Next, in the step shown in fig. 5, the tip end side of the wear sensor 8 protruding from the wear surface 6a and the wear surface 6a side of the bearing main body 6 are removed, and the tip end surface 11a of the wear sensor 8 is made flush with the wear surface 6a (machining step). In the processing step, not only the insulating substrate 11 but also a part of the wiring group 12 is removed.
As a method of removing a part of the wear sensor 8 and the bearing body 6, for example, a cutting method, a grinding method, or the like can be used.
Next, the conduction state between the conduction check wiring and the grounding wiring is checked by using the wear amount acquisition device 9, and the removed detection wiring portion (in the case of fig. 5, the detection wiring portion 31) is identified (conduction check step).
In the conduction check step, a voltage is sequentially applied between the conduction check wires 21 to 25 and the grounding wire 26 to check whether or not a current flows, thereby specifying the removed detection wire portion.
In the case of fig. 5, the conduction check wiring 21 is separated from the structure composed of the remaining wear detection wiring 13 and the conduction check wirings 22 to 25, and therefore, no current flows between the conduction check wiring 21 and the grounding wiring 26. Therefore, in this case, it is determined that the detection wiring portion 31 has been removed.
On the other hand, in the case of fig. 5, the remaining wear detection wiring 13 and the conduction check wirings 22 to 25 are integrated, and therefore, a current flows between the conduction check wiring 22 and the grounding wiring 26. Therefore, in this case, it is determined that the detection wiring portion 32 remains in a state in which the conduction check wiring 22 and the conduction check wiring 23 can be connected.
Therefore, at the time point when the wear sensor 8 is installed in the bearing body 6, the detection wiring portions capable of detecting the amount of wear of the wear surface 6a become the detection wiring portions 32 to 35 from which the detection wiring portion 31 is removed. The wear surface 6a shown in fig. 5 is a reference surface for detecting wear caused by the rotating body.
According to the method of installing the bearing 5 of the second embodiment, including the sensor arrangement step, the machining step, and the conduction check step described above, the region J (the region from the front end surface 11a of the insulating substrate 11 to the detection wiring portion 31 closest to the front end surface 11a) where the wear amount cannot be detected can be eliminated, and the detection wiring portion 31 removed by the elimination can be specified.
This enables the wear amount to be obtained even when the wear amount of the wear surface 6a of the bearing body 6 is small.
In the second embodiment, the case where the wear sensor 8 of the first embodiment is provided in the bearing main body 6 is described as an example, but the same effect as that of the second embodiment can be obtained also in the case where the wear sensor 55 of the modification of the first embodiment is provided in the bearing main body 6 instead of the wear sensor 8.
(third embodiment)
A bearing 80 according to a third embodiment will be described with reference to fig. 6 to 12. In fig. 6 and 7, O denotes an axis of the bearing 80 (hereinafter referred to as "axis O"). In fig. 6 to 12, the same components are denoted by the same reference numerals.
A bearing 80 of the third embodiment includes a bearing main body 76, a laminated body 78, conduction test pads 81-83, and a grounding pad 84.
The bearing main body 76 has a shoe portion 87 and a shoe back portion 88. The pad portion 87 has a cylindrical shape. The bushing portion 87 has a hollow portion 87A into which the rotating body is inserted, an inner peripheral surface 87A defining the hollow portion 87A, an outer peripheral surface 87B, an end surface 87c, and a first notch portion 87B.
The inner peripheral surface 87a constitutes a wear surface 76a of the bearing main body 76. The wear surface 76a is a surface worn by contact with a rotating body (not shown).
The end surface 87c is disposed on one side in the axis O direction. The end surface 87c constitutes a part of the end surface 76b of the bearing main body 76 disposed on one side in the axis O direction.
The first cut portion 87B is formed by cutting the pad portion 87 in a direction recessed radially outward from the wear surface 76 a.
The shoe back 88 is constructed of a metallic material. The shoe back 88 is cylindrical. The pad back portion 88 is provided outside the pad portion 87 so as to cover the outer peripheral surface 87b of the pad portion 87.
The shoe back portion 88 has an end surface 88a disposed on one side in the axis O direction. The end surface 88a is disposed coplanar with the end surface 87 c. End surface 88a constitutes the remainder of end surface 76 b. That is, the end face 76b is constituted by the end face 87c and the end face 88 a.
The stacked body 78 is provided in the first cut portion 87B. The laminate 78 has insulating layers 91, 93, 95, 97 and wiring patterns 92, 94, 96.
The insulating layers 91, 93, 95, and 97 and the wiring patterns 92, 94, and 96 are stacked in this order on the bottom surface 87Ba of the first cutout 87B, the insulating layer 91, the wiring pattern 92, the insulating layer 93, the wiring pattern 94, the insulating layer 95, the wiring pattern 96, and the insulating layer 97. That is, the laminate 78 is formed by alternately laminating the insulating layers 91, 93, 95, and 97 and the wiring patterns 92, 94, and 96.
The insulating layer 91 constitutes the lowermost layer of the stacked body 78. The insulating layer 97 constitutes the uppermost layer of the stacked body 78. The outer surface 97a of the insulating layer 97 is configured to be coplanar with the wear surface 76 a.
As the insulating layers 91, 93, 95, and 97, for example, SiO formed by a cvd (chemical Vapor deposition) method or the like which is one of semiconductor device manufacturing techniques can be used2Layers, SiN layers, etc.
The wiring patterns 92, 94, and 96 are wirings for conduction test, and have a curved shape. By forming the wiring patterns 92, 94, and 96 in a curved shape in this way, the area of each wiring pattern 92, 94, and 96 in the first notch portion 87B can be increased. Accordingly, when the wear surface 76a is worn, the area in which the wiring patterns 92, 94, and 96 are worn can be increased, and therefore the accuracy of the wear amount of the wear surface 76a can be improved.
The wiring pattern 92 has a portion covered with the insulating layers 91 and 93, and one end 92A and the other end 92B exposed from the insulating layer 93. The one end 92A and the other end 92B are disposed on the end surface 76B side of the bearing main body 76.
The wiring pattern 94 has a portion covered with the insulating layers 93 and 95, and one end 94A and the other end 94B exposed from the insulating layer 95. The one end 94A and the other end 94B are disposed on the end face 76B side of the bearing main body 76.
Wiring pattern 96 has a portion covered with insulating layers 95 and 97, and one end 96A and the other end 96B exposed from insulating layer 97. The one end 96A and the other end 96B are disposed on the end surface 76B side of the bearing main body 76.
The wiring patterns 92, 94, and 96 can be formed by using a semiconductor device manufacturing technique (fine processing technique) such as photolithography, sputtering, vapor deposition, and dry etching.
The conduction check pad 81 is provided on the end face 76b of the bearing main body 76 via the insulating layer 91. The conduction check pad 81 is connected to one end 92A of the wiring pattern 92. The conduction check pad 81 is a pad used together with the ground pad 84 when conducting a conduction check of the wiring pattern 92.
The conduction check land 82 is provided on the end face 76b of the bearing main body 76 via an insulating layer 93. The conduction check pad 82 is connected to one end 94A of the wiring pattern 94. The conduction check pad 82 is a pad used together with the grounding pad 84 when conducting a conduction check of the wiring pattern 94.
The conduction check land 83 is provided on the end face 76b of the bearing main body 76 via the insulating layer 95. The conduction check pad 83 is connected to one end 96A of the wiring pattern 96. The conduction check pad 83 is a pad used together with the ground pad 84 when conducting a conduction check of the wiring pattern 96.
The grounding land 84 is provided on the end face 76b of the bearing main body 76 via an insulating layer 91. The ground pad 84 is connected to the other ends 92B, 94B, and 96B of the wiring patterns 92, 94, and 96.
The pads 81-83 for conduction inspection and the pad 84 for grounding are arranged along the circumferential direction of the bearing main body 76 so that the pads do not overlap.
According to the bearing 80 of the third embodiment, the insulating layers 91, 93, 95, and 97 and the wiring patterns 92, 94, and 96 are formed by using the semiconductor device manufacturing technique described above, so that the thicknesses of the insulating layers 91, 93, 95, and 97 and the thicknesses of the wiring patterns 92, 94, and 96 in the radial direction of the bearing main body 76 can be reduced.
This can shorten the wear resolution, which is the depth (distance) from the position where one wiring pattern 94, 96 on the wear surface 76a side is broken to the position where the next wiring pattern 92, 94 is broken, and thus can improve the resolution of wear measurement.
Further, the wiring used for the conduction test can be easily connected to the conduction test pads 81 to 83 and the ground pad 84 by connecting the conduction test pads 81 to 83 to one ends 92A, 94A, 96A of the wiring patterns 92, 94, 96 and connecting the ground pad 84 to the other ends 92B, 94B, 96B of the wiring patterns 92, 94, 96 at the end face 76B which is the region other than the wear surface 76A. This makes it possible to easily perform the conduction check.
(fourth embodiment)
A bearing 105 according to a fourth embodiment will be described with reference to fig. 13 to 15. In fig. 13, DE1 indicates the depth of the first cut-out portion 87B with reference to the wear surface 76A (hereinafter referred to as "depth DE 1"), and DE2 indicates the depth of the second cut-out portion 76A with reference to the wear surface 76A (hereinafter referred to as "depth DE 2"). Fig. 13 is a view corresponding to the cross section taken along line P1-P2 shown in fig. 15. Fig. 14 is a view corresponding to a cross section taken along line Q1-Q2 shown in fig. 15.
In fig. 13 to 15, the same components as those of the structure shown in fig. 7 to 12 are denoted by the same reference numerals.
The bearing 105 is configured in the same manner as the bearing 80 except that a second notch 76A is formed in the bearing body 76 constituting the bearing 80 of the third embodiment, the wiring patterns 92, 94, and 96 are led out to the second notch 76A, and the pads 81 to 83 for conduction check and the pad 84 for grounding are disposed in the second notch 76A.
The second notch portion 76A is formed in the pad portion 87 and the pad back portion 88 located outside the first notch portion 87B in the longitudinal direction of the bearing main body 6. The second cutout portion 76A is formed to extend to an end surface 88a of the shoe back portion 88. The first and second cut portions 87B and 76A are continuous cut portions.
The depth DE2 of the second cutout portion 76A is deeper than the depth DE1 of the first cutout portion 87B.
The other ends 92B, 94B of the wiring patterns 92, 94 are connected to the wiring pattern 96 at the boundary portion between the first notch portion 87B and the second notch portion 76A.
According to the bearing 105 of the fourth embodiment, the conduction check pads 81 to 83 and the ground pad 84 are disposed in the second notch portion 76A having the depth DE2 deeper than the depth DE1 of the first notch portion with respect to the wear surface 76A, whereby the wiring used for the conduction check can be easily connected to the conduction check pads 81 to 83 and the ground pad 84. That is, the same effect as the bearing 80 of the third embodiment can be obtained.
(fifth embodiment)
A bearing 115 according to a fifth embodiment will be described with reference to fig. 16. In fig. 16, the pads 81 to 83 for conduction inspection and the pad 84 for grounding constituting the bearing 115 are not shown.
The bearing 115 is configured similarly to the bearing 80 except that the bearing 115 includes a bearing main body 116 instead of the bearing main body 76 constituting the bearing 80 of the third embodiment, and the laminated body 78 is formed on the inner peripheral surface 88b of the shoe back portion 88 constituting the bearing main body 116.
The bearing main body 116 has: a tile back 88 having a cylindrical shape; and a cylindrical pad portion 117 disposed on the inner peripheral surface 88b of the pad back portion 88, and an inner peripheral surface 117a rotatably supporting the rotating body is a wear surface 116 a.
The pad portion 117 is formed as follows: after the laminate 78 is formed on the inner peripheral surface 88b of the tile back portion 88, a metal film is formed on the inner peripheral surface 88b so as to cover the laminate 78, and then the surface of the metal film is polished.
The inner peripheral surface is 117a and is a smooth curved surface without a height difference.
Although not shown, the wiring patterns 92, 94, and 96 are drawn out to a region other than the wear surface 116a of the bearing body 116 through the insulating layers 91, 93, and 95, each of the conduction check pads is connected to one of the wiring patterns 92, 94, and 96 in the region, and the ground pad is disposed in the region in a state of being separated from the conduction check pad.
According to the bearing 115 of the fifth embodiment, the same effects as those of the bearing 80 of the third embodiment described above can be obtained.
Further, by forming the laminated body 78 on the inner peripheral surface 88b of the shoe back portion 88 and then forming the shoe portion 117 made of a metal film, the step of forming a recess or a notch portion for housing the laminated body 78 in the shoe portion 117 can be omitted.
While the preferred embodiments of the present invention have been described in detail, the present invention is not limited to the specific embodiments, and various modifications and changes can be made within the scope of the present invention described in the claims.
In the third embodiment, the end surface 76b of the bearing main body 76 is taken as an example of a region other than the wear surface 76A, and in the fourth embodiment, the second notch portion 76A is taken as an example of a region other than the wear surface 76A, but the region other than the wear surface 76A is not limited to these.

Claims (12)

1. A wear sensor, wherein,
the wear sensor includes:
an insulating substrate having a front end surface disposed on a side where wear occurs with a wear proceeding direction as a longitudinal direction, a pair of side surfaces disposed in a width direction orthogonal to the longitudinal direction and connected to the front end surface, and a wiring forming surface surrounded by the front end surface and the pair of side surfaces and extending in the longitudinal direction;
a wiring group including a plurality of conduction check wirings and at least one grounding wiring, which are formed on the wiring forming surface so as to extend in the wear advancing direction and are arranged at intervals in a direction from one side surface toward the other side surface; and
a wear detection wiring formed on the wiring formation surface and connecting the leading ends of the plurality of conduction check wirings on the leading end surface side and the leading ends of the grounding wirings on the leading end surface side,
the leading ends of the plurality of conduction check wires and the leading ends of the grounding wires are arranged so as to gradually recede from the leading end surface toward the rear end side of the insulating substrate as going from one of the side surfaces toward the other side surface,
the wear detection wiring has a plurality of detection wiring portions electrically connected to the front ends of two adjacent wirings of the plurality of conduction check wirings and the grounding wiring.
2. The wear sensor of claim 1,
the plurality of detection wiring portions extend in a direction orthogonal to the wear proceeding direction,
the wear detection wiring has a stepped shape.
3. The wear sensor of claim 1,
the plurality of detection wiring portions are arranged to be inclined with respect to the front end surface.
4. The wear sensor of claim 3,
the plurality of detection wiring portions are inclined at a constant angle with respect to the front end surface.
5. The wear sensor of claim 4,
the detection wiring portion is in contact with an angular point of a tip end of the conduction check wiring arranged on the other side surface side, of the two conduction check wirings arranged adjacent to each other in the width direction.
6. A wear sensor device, wherein,
the wear sensor device is provided with:
the wear sensor of any one of claims 1 to 5; and
and a wear amount obtaining device including a conduction detection unit that detects a conduction state by applying a voltage between the plurality of conduction inspection wires and the grounding wire, a storage unit that stores data relating to a wear amount of the wear sensor according to the conduction state, and a wear amount obtaining unit that obtains the wear amount of the wear sensor based on the conduction state detected by the conduction detection unit and the data.
7. A bearing, wherein,
the bearing is provided with:
the wear sensor device of claim 6; and
a bearing body having a wear surface worn by the rotating body and a housing portion housing the wear sensor,
the wear amount acquisition unit acquires a wear amount of the bearing main body based on a wear amount of the wear sensor.
8. A method of setting a bearing according to claim 7, wherein,
the setting method of the bearing comprises the following steps:
a sensor arrangement step of arranging the wear sensor in a housing portion of the bearing body such that a part of a tip of the wear sensor protrudes from a wear surface of the bearing body;
a machining step of removing a tip end side of the wear sensor and the wear surface side of the bearing body so that a tip end surface of the wear sensor is flush with the wear surface; and
a conduction inspection step of performing conduction inspection by the abrasion amount obtaining device to identify the detection wiring portion from which the abrasion amount is removed,
in the sensor disposing step, a part of the plurality of detection wiring portions is disposed in the housing portion, and the remaining portion is disposed outside the housing portion.
9. A bearing, wherein,
the bearing is provided with:
a bearing main body having a cylindrical shape, an inner circumferential surface for rotatably supporting the rotating body being a wear surface, and a first cut-out portion formed by cutting out in a direction recessed radially outward from the wear surface;
a laminate formed in the first cut portion and formed by alternately laminating an insulating layer and a wiring pattern;
a pad for conduction inspection connected to the wiring pattern; and
a ground pad used for conduction check,
the wiring pattern is drawn out to a region other than the wear surface in the bearing main body via the insulating layer,
the conduction check pad is connected to the wiring pattern in the region, and the ground pad is disposed in the region in a state of being separated from the conduction check pad.
10. A bearing, wherein,
the bearing is provided with:
a bearing main body having a cylindrical shoe back portion and a cylindrical shoe portion disposed on an inner peripheral surface of the shoe back portion and having an inner peripheral surface for rotatably supporting a rotating body as a wear surface;
a laminate formed on an inner peripheral surface of the tile back and formed by alternately laminating insulating layers and wiring patterns;
a pad for conduction inspection connected to the wiring pattern; and
a ground pad used for conduction check,
the pad section is formed of a metal film covering the laminate,
the inner peripheral surface is a smooth curved surface having no level difference,
the wiring pattern is drawn out to a region other than the wear surface in the bearing main body via the insulating layer,
the conduction check pad is connected to the wiring pattern in the region, and the ground pad is disposed in the region in a state of being separated from the conduction check pad.
11. The bearing of claim 9 or 10,
the region is an end face of the bearing body.
12. The bearing of claim 9,
the region is a second notch portion formed outside the first notch portion in the longitudinal direction of the bearing main body and having a depth deeper than the first notch portion with the wear surface as a reference.
CN201911123937.7A 2019-03-11 2019-11-14 Wear sensor, wear sensor device, bearing, and method for installing bearing Active CN111678422B (en)

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Application Number Priority Date Filing Date Title
JP2019044255 2019-03-11
JP2019-044255 2019-03-11

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Publication Number Publication Date
CN111678422A true CN111678422A (en) 2020-09-18
CN111678422B CN111678422B (en) 2022-03-11

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