CN111638222A - Defect detection system and method for optical filter - Google Patents

Defect detection system and method for optical filter Download PDF

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Publication number
CN111638222A
CN111638222A CN202010710171.9A CN202010710171A CN111638222A CN 111638222 A CN111638222 A CN 111638222A CN 202010710171 A CN202010710171 A CN 202010710171A CN 111638222 A CN111638222 A CN 111638222A
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light source
detection
optical filter
detection station
station
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CN202010710171.9A
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Chinese (zh)
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杨小冬
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Dongguan Ruitu Xinzhi Technology Co ltd
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Dongguan Ruitu Xinzhi Technology Co ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8806Specially adapted optical and illumination features
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8851Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8806Specially adapted optical and illumination features
    • G01N2021/8809Adjustment for highlighting flaws
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8851Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854Grading and classifying of flaws
    • G01N2021/888Marking defects
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8851Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8887Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9511Optical elements other than lenses, e.g. mirrors

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  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • Pathology (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Signal Processing (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

The invention discloses a defect detection system and method of an optical filter, wherein the system comprises a detection station arranged on a workbench and used for bearing the optical filter, and a detection module used for realizing optical filter detection is arranged on one side of the detection station; the detection module comprises a detection camera aligned with the detection station and a lower light source located below the detection station, and the irradiation angle of the lower light source is inclined to the vertical direction of the detection station. The invention adopts a different polishing mode from the upper light source in the prior art, and carries out defect detection by arranging the lower light source with an angle, so that a detection light beam is irradiated upwards from the lower direction of the optical filter to be detected to enter the camera, and the defects of film cracking, shallow dirt and the like can be more clearly detected; furthermore, the angled light source has better visualization of translucent light defects than parallel light, even comparable to the effect of human eyes observing defects under a microscope, thus further optimizing the imaging effect of light defects.

Description

Defect detection system and method for optical filter
Technical Field
The invention relates to the technical field of lens defect detection, in particular to a system and a method for detecting defects of an optical filter.
Background
The filter is an optical device disposed between a lens and a sensor inside a camera of a cellular phone, and has various types, such as an IR cut filter, a narrow band filter, and the like. The IR cut-off filter is the most widely used one, and is used to prevent external infrared light from entering the sensor, and because it is coated with an antireflection film, it can increase the luminous flux of visible light entering the sensor, and it is an indispensable key accessory in the current mobile phone camera module. With the development of the current smartphone photographing technology, the number of cameras on a single mobile phone is increased from the previous one to a plurality, so that the filter market meets new challenges in terms of production capacity and quality requirements.
The optical filter needs to be detected in the production process, main detection objects are dirt, scratches and the like on the optical filter, most of the optical filter detection in the current market is to install annular light or coaxial light and coaxial point light sources above the optical filter so as to detect defects on the optical filter, but the detection schemes are only suitable for obvious defects, and the detection effect is not ideal because the effect of slight defect imaging is low.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides a system and a method for detecting the defects of an optical filter, which solve the problem that the detection effect on the slight defects on the optical filter is not ideal in the prior art.
In order to achieve the above purpose, the present invention provides the following technical solutions:
a defect detection system of an optical filter comprises a workbench, wherein a detection station for bearing the optical filter is arranged on the workbench, and a detection module for realizing optical filter detection is arranged on one side of the workbench, which is positioned on the detection station;
the detection module includes:
the detection camera is positioned above the detection station and is aligned to the detection station and used for acquiring and outputting the image information of the optical filter;
the lower light source is positioned below the detection station, and the irradiation angle of the lower light source is inclined to the vertical direction of the detection station and is used for emitting a first light beam with an inclined angle to the detection station.
Optionally, the lower light source includes a plurality of first ring light sources, and each of the first ring light sources is formed by surrounding a plurality of light-emitting bodies;
in the same first ring light source, the irradiation angles of the luminous bodies are the same.
Optionally, the detection module is including locating first mounting bracket on the workstation, be equipped with first lift driving piece and mount pad on the first mounting bracket, the drive is connected on the first lift driving piece the mount pad, detect the camera install in on the mount pad.
Optionally, a second mounting frame is further arranged on the workbench, an adjusting driving piece is arranged on the second mounting frame, and the adjusting driving piece is in driving connection with the lower light source;
the lower light source can be driven to do lifting motion along the vertical direction of the detection station.
Optionally, the inspection device further comprises an upper light source located above the inspection station, and the upper light source is located between the inspection camera and the inspection station;
the irradiation angle of the upper light source is inclined to the vertical direction of the detection station and is used for emitting a second light beam with an inclined angle to the detection station.
Optionally, the upper light source includes a plurality of second ring light sources, and each of the second ring light sources is formed by surrounding a plurality of light emitters;
in the same second ring light source, the irradiation angles of the luminous bodies are the same.
Optionally, a second lifting driving part is further arranged on the mounting base, and the second lifting driving part is in driving connection with the upper light source.
The invention also provides a defect detection method of the optical filter, which is realized by adopting the optical filter defect system and comprises the following steps:
placing the optical filter to be detected on a detection station;
emitting a first light beam with an inclination angle to the detection station by using a lower light source;
and acquiring and outputting the image information of the optical filter to be detected by a detection camera.
Optionally, the method for detecting a defect of the optical filter further includes:
and emitting a second light beam with an inclined angle to the detection station by using the upper light source.
Optionally, the irradiation angle range of the lower light source is 10-85 degrees, and the distance range between the lower light source and the detection station is 10-350 mm; the irradiation angle range of the upper light source is 10-85 degrees.
Compared with the prior art, the invention has the following beneficial effects:
the invention provides a defect detection system and method of an optical filter, which adopt a different polishing mode from an upper light source in the prior art to detect defects by arranging a lower light source with an angle, so that a detection light beam is irradiated from the lower direction of the optical filter to be detected to enter a camera, and the defects of film cracking, shallow dirt and the like can be more clearly detected; furthermore, the angled light source has better visualization of translucent light defects than parallel light, even comparable to the effect of human eyes observing defects under a microscope, thus further optimizing the imaging effect of light defects.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without inventive exercise.
FIG. 1 is a schematic structural diagram of a detection module in a defect detection system for an optical filter according to the present invention;
FIG. 2 is a block diagram illustrating a method for detecting defects of an optical filter according to the present invention;
fig. 3 is a further flowchart of the method for detecting defects of an optical filter according to the present invention.
In the above figures: 12. a detection module; 120. a first mounting bracket; 121. an upper light source; 122. a lower light source; 123. detecting a camera; 124. a first lifting drive member; 125. a mounting seat; 126. a second mounting bracket; 127. a second lifting drive member; 128. the drive member is adjusted.
Detailed Description
In order to make the objects, features and advantages of the present invention more obvious and understandable, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the embodiments described below are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it is to be understood that when an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. When a component is referred to as being "disposed on" another component, it can be directly on the other component or intervening components may also be present.
Furthermore, the terms "long", "short", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of describing the present invention, but do not indicate or imply that the referred devices or elements must have the specific orientations, be configured to operate in the specific orientations, and thus are not to be construed as limitations of the present invention.
The technical scheme of the invention is further explained by the specific implementation mode in combination with the attached drawings.
Referring to fig. 1, an embodiment of the invention provides a defect detection system for an optical filter, including a stage. Wherein, be equipped with the detection station on the workstation, the workstation is located one side of detecting the station and is equipped with detection module 12. The workpiece to be detected can be placed on the detection station in a manual or mechanical automatic feeding mode, and blanking is achieved through a manual or mechanical automatic blanking mode after detection.
Specifically, the detection module 12 includes:
a detection camera 123 located above the detection station; the detection camera 123 is aligned with the detection station and used for collecting and outputting image information of the optical filter; it can be understood that the detection camera 123 collects the image information of the optical filter and transmits the image information to the image processing and analyzing system, so as to obtain the final image.
A lower light source 122 located below the inspection station; the lower light source 122 is disposed at an angle oblique to the vertical direction of the inspection station for emitting a first light beam having an oblique angle to the inspection station. The arrangement of the lower light source 122 changes the traditional arrangement mode of ring light, the defects of film cracking, shallow dirt and the like can be more clearly seen by utilizing the light refraction mirror surface to enter the camera, and the defects can not be shot in the normal light striking mode from top to bottom; the formed projection light with the direction has better directivity than the traditional diffusion surface light, so that more slight defects can be shown, and the purpose of imaging the slight defects is achieved.
Specifically, the lower light source 122 includes a plurality of first ring light sources, and each of the first ring light sources is formed by surrounding a plurality of light-emitting bodies. In the same first ring light source, the irradiation angles of the light-emitting bodies are the same, and in this embodiment, the irradiation angle range of each light-emitting body is 10 to 85 °, and more preferably 15 to 80 °.
Compared with parallel light, the directional projection optical fiber has better translucent slight defect display capability, can display more slight defects and even can be comparable to the effect of human eyes for observing the defects under a microscope, and therefore the imaging effect of the slight defects is further optimized.
In this embodiment, the detection module 12 includes a first mounting frame 120 disposed on the worktable, and the first mounting frame 120 is located at one side of the detection station; the first mounting bracket 120 is provided with a first lifting driving member 124 and a mounting base 125, and the first lifting driving member 124 is connected with the mounting base 125 in a driving manner, so that the mounting base 125 can be driven to perform lifting movement; the detection camera 123 is installed on the mounting base 125, and the height adjustment of the detection camera 123 is realized through the first lifting driving member 124, so that the detection camera is matched with the parameters of the workpiece to be detected, and a more accurate detection effect is achieved.
The second mounting rack 126 is further arranged on the workbench, an adjusting driving member 128 is arranged on the second mounting rack 126, and the adjusting driving member 128 is in driving connection with the lower light source 122. The adjusting driving member 128 includes a lifting adjusting driving member for driving the lower light source 122 to move up and down along the vertical direction of the detection station, and for adjusting the working distance between the lower light source 122 and the detection station according to the contrast requirement of the phenomena such as shallow dirt and film crack, which are photographed according to the requirement.
The height of the lower light source 122 is adjusted according to the mirror curvature parameters of the workpiece to be detected, so that the contrast of various defects on the workpiece to be detected is improved as much as possible, the defects which cannot be imaged originally on the surface of the optical filter are imaged clearly, the detection precision is improved, and the quality of the obtained product is further ensured.
Based on the above embodiment, in this embodiment, the inspection module 12 further includes the upper light source 121 located above the inspection station, and the upper light source 121 is located between the inspection camera 123 and the inspection station. It is understood that the upper light source 121 and the lower light source 122 may be symmetrical about the inspection station, and in other embodiments, the upper light source 121 and the lower light source 122 may be disposed in an asymmetrical state.
Wherein, the upper light source 121 irradiates a second light beam with an oblique angle to the inspection station, with the angle being oblique to the vertical direction of the inspection station.
Like the lower light source 122, the upper light source 121 includes a plurality of second ring light sources, and each of the second ring light sources is formed by surrounding a plurality of light emitters. In the same second ring light source, the illumination angles of the light emitters are the same, and in the present embodiment, the illumination angle range of each light emitter is 10 to 85 °, and more preferably 15 to 80 °, so that the same imaging effect as that of the lower light source 122 can be obtained.
Further, a second lifting driving member 127 is further disposed on the mounting base 125, and the second lifting driving member 127 is connected to the upper light source 121 in a driving manner. The second lifting driving member 127 is used for realizing the lifting adjustment of the upper light source 121, so that the height of the upper light source 121 can be matched with the parameters of the workpiece to be detected.
The second lifting driving member 127 is specifically used for realizing height adjustment of the upper light source 121 within a range of 10-120mm from the filter to be detected.
In addition, in one embodiment of the present embodiment, the adjusting driving member 128 may further include a lateral adjusting driving member for adjusting the position of the lower light source 122 in the lateral direction, so as to ensure that the lower light source 122 can be substantially aligned with the upper light source 121 and the detection camera 123. Specifically, the transverse adjustment driving member may be disposed on the second mounting frame 126, and the transverse adjustment driving member is in driving connection with the lifting adjustment driving member, and finally the lifting adjustment driving member is in driving connection with the lower light source 122, so that the position adjustment of the lower light source 122 in the transverse direction and the longitudinal direction can be simultaneously achieved.
In another embodiment of the present embodiment, the adjustment drive 128 is used to achieve positional adjustment of the lower light source 122 in the longitudinal direction. The adjusting driving member 128 is specifically used for adjusting the height of the lower light source 122 within a range of 10-120mm from the filter to be detected.
In this embodiment, the first lifting driving member 124, the second lifting driving member 127 and the adjusting driving member 128 may be implemented by using an air cylinder or a motor. In addition, the upper light source 121 and the lower light source 122 in this embodiment can be implemented by using a general ring light on the market, the model parameters and the like of the ring light are not limited too much, and the diameter of the ring light, the angle of the bead, the wavelength of the bead, the brightness of the bead and the like can be adjusted according to a workpiece to be detected.
Referring to fig. 2, based on the foregoing embodiments, an embodiment of the present invention provides a method for detecting a defect of an optical filter, which is implemented by using the optical filter defect system described above, and includes:
and S1, placing the optical filter to be detected on a detection station.
In this step, the loading can be performed manually or automatically by a machine. It can be understood that the defect detection method provided in this embodiment can be applied to filters made of various materials, including blue glass, white glass, and plexiglass.
S201, emitting a first light beam with an inclination angle to a detection station by using a lower light source.
In this step, the irradiation angle of the lower light source 122 is 10 to 85 °.
And S3, acquiring and outputting the image information of the optical filter to be detected through the detection camera 123.
The collected image information of the phrase to-be-detected optical filter can be subsequently transmitted to an image processing and analyzing system for processing, and the processing steps can specifically include:
(1) roughly positioning a mirror surface and a silk-screen area based on gray scale shape information Of a small piece and a surrounding background in image information, and extracting approximate ROI (Region Of Interest) Of the two areas;
(2) in the coarse positioning area, performing size accurate measurement by using sub-pixel contour segmentation; the dimensions include the transverse and longitudinal dimensions and the inclination angle;
(3) in the mirror surface and silk-screen ROI area, local threshold segmentation is used for screening out a defect area to be processed;
(4) performing BLOB (connected domain) analysis on a to-be-processed defect area, screening out real defects through preset characteristics, and marking small pieces with appearance defects as appearance NG;
(5) comparing the size measurement result of each small piece with a standard value preset by a client, and marking the small piece exceeding a preset acceptance range as a size NG;
(6) mapping maps corresponding to appearance NG and size NG are generated.
Referring to fig. 3, in another embodiment of the present invention, a method for detecting a defect of an optical filter includes the following steps:
and S1, placing the optical filter to be detected on a detection station.
In this step, the loading can be performed manually or automatically by a machine. It can be understood that the defect detection method provided in this embodiment can be applied to filters made of various materials, including blue glass, white glass, and plexiglass.
S201, emitting a first light beam with an inclination angle to a detection station by using a lower light source.
In this step, the irradiation angle of the lower light source 122 is 10 to 85 °.
And S202, emitting a second light beam with an inclination angle to the detection station by using an upper light source.
In this step, the irradiation angle of the upper light source 121 is in the range of 10 to 85 °.
And S3, acquiring and outputting the image information of the optical filter to be detected through the detection camera 123.
The invention provides a system and a method for detecting defects of an optical filter, which can realize clear imaging of slight defects on the optical filter by arranging a lower light source with an angle, improve the precision of defect detection and further achieve excellent detection effect.
The above-mentioned embodiments are only used for illustrating the technical solutions of the present invention, and not for limiting the same; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.

Claims (10)

1. The defect detection system of the optical filter is characterized by comprising a workbench, wherein a detection station for bearing the optical filter is arranged on the workbench, and a detection module for realizing optical filter detection is arranged on one side of the workbench, which is positioned at the detection station;
the detection module includes:
the detection camera is positioned above the detection station and is aligned to the detection station and used for acquiring and outputting the image information of the optical filter;
the lower light source is positioned below the detection station, and the irradiation angle of the lower light source is inclined to the vertical direction of the detection station and is used for emitting a first light beam with an inclined angle to the detection station.
2. The system of claim 1, wherein the lower light source includes a plurality of first ring light sources, each of the first ring light sources being surrounded by a plurality of light emitters;
in the same first ring light source, the irradiation angles of the luminous bodies are the same.
3. The system of claim 1, wherein the detection module includes a first mounting frame disposed on the worktable, the first mounting frame is provided with a first elevating driving member and a mounting seat, the first elevating driving member is connected to the mounting seat, and the detection camera is mounted on the mounting seat.
4. The optical filter defect detection system of claim 1, wherein a second mounting frame is further disposed on the worktable, and an adjusting driving member is disposed on the second mounting frame and is in driving connection with the lower light source;
the lower light source can be driven to do lifting motion along the vertical direction of the detection station.
5. The system of claim 1, further comprising an upper light source located above the inspection station and between the inspection camera and the inspection station;
the irradiation angle of the upper light source is inclined to the vertical direction of the detection station and is used for emitting a second light beam with an inclined angle to the detection station.
6. The system of claim 5, wherein the upper light source includes a plurality of second ring light sources, and each of the second ring light sources is formed by a plurality of light emitters;
in the same second ring light source, the irradiation angles of the luminous bodies are the same.
7. The system of claim 5, wherein a second lifting/lowering driving member is further disposed on the mounting base, and the second lifting/lowering driving member is connected to the upper light source.
8. A method for detecting defects of an optical filter, which is implemented by the optical filter defect system according to any one of claims 1 to 7, and comprises:
placing the optical filter to be detected on a detection station;
emitting a first light beam with an inclination angle to the detection station by using a lower light source;
and acquiring and outputting the image information of the optical filter to be detected by a detection camera.
9. The method for detecting an optical filter according to claim 8, further comprising:
and emitting a second light beam with an inclined angle to the detection station by using the upper light source.
10. The method for detecting the optical filter according to claim 9, wherein the irradiation angle range of the lower light source is 10-85 °, and the distance range between the lower light source and the detection station is 10 mm-350 mm; the irradiation angle range of the upper light source is 10-85 degrees.
CN202010710171.9A 2020-07-22 2020-07-22 Defect detection system and method for optical filter Pending CN111638222A (en)

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CN113109358A (en) * 2021-04-15 2021-07-13 宁波九纵智能科技有限公司 Single-incidence-angle universal detection device, method and system for products to be detected
CN113628161A (en) * 2021-07-06 2021-11-09 深圳市格灵精睿视觉有限公司 Defect detection method, defect detection device and computer-readable storage medium
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CN111272774A (en) * 2020-01-21 2020-06-12 宁波舜宇仪器有限公司 Detection module and detection system for optical filter defect detection
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CN110132981A (en) * 2019-05-21 2019-08-16 东莞市瑞图新智科技有限公司 Piece appearance and size integrated detection equipment and detection method in a kind of optical filter
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CN112629822A (en) * 2020-11-23 2021-04-09 惠州市富丽电子有限公司 Method for inspecting dirt in polarizer
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CN113109358A (en) * 2021-04-15 2021-07-13 宁波九纵智能科技有限公司 Single-incidence-angle universal detection device, method and system for products to be detected
WO2022257618A1 (en) * 2021-06-10 2022-12-15 广东奥普特科技股份有限公司 Wafer surface defect detection device and wafer surface defect detection method
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