CN111272774A - Detection module and detection system for optical filter defect detection - Google Patents
Detection module and detection system for optical filter defect detection Download PDFInfo
- Publication number
- CN111272774A CN111272774A CN202010069790.4A CN202010069790A CN111272774A CN 111272774 A CN111272774 A CN 111272774A CN 202010069790 A CN202010069790 A CN 202010069790A CN 111272774 A CN111272774 A CN 111272774A
- Authority
- CN
- China
- Prior art keywords
- detection
- light source
- module
- angle
- detection device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9511—Optical elements other than lenses, e.g. mirrors
Abstract
The invention relates to a detection module and a detection system for optical filter defect detection, wherein the module comprises a first detection device (10a) and a second detection device (10b), the first detection device and the second detection device both comprise a lens (1) and an image sensor (2) arranged at the image side end of the lens (1), the object side end of the lens (1) of the second detection device (10b) is connected with a single-angle annular light source (3b), and the object side end of the lens (1) of the first detection device (10a) is connected with a multi-angle annular light source (3 a). The detection module and the system can automatically detect the defects of the optical filter, thereby avoiding various problems of manual detection.
Description
Technical Field
The invention relates to the field of optical device detection equipment, in particular to a detection module and a detection system for optical filter defect detection.
Background
The optical filter is an optical device for selecting a required radiation wave band and is widely applied to the field of optics. The optical filters can be divided into different types according to functions and respectively applied to different fields, and assembly products made of the optical filters are all suitable for the system. According to the current manufacturing process of the optical filter component, various appearance defects such as scratches, dirt, burrs, edge breakage and the like can be generated in the process. However, the detection mode of domestic manufacturers is to detect and sort the defects by manual visual inspection under a microscope, and the mode has the following problems: the efficiency is slow, only one product can be detected manually at a time, and the detection efficiency is low due to fatigue caused by long-term repetitive work. The subjectivity of manual detection is strong, and the quality of the product to be removed is uneven due to the fact that the types of defects are more and the standards of each person for the defects are different. The missing detection phenomenon exists, part of defects which are difficult to detect by human eyes are easy to ignore, and unnecessary loss is caused to manufacturers and customers if the products are delivered. The dust-free environment can still generate unnecessary new dust fall even in a dust-free workshop and a clean bench in the manual detection process. After the detection is finished, NG products and OK products need to be sorted manually, and the efficiency is reduced again. With the maturity of technologies of automation equipment, image processing and the like, the detection of the optical filter component can be performed by using automation optical equipment, and how to apply the detection system and the detection equipment to the detection optical filter component in an efficient, reliable and universal manner becomes an application problem.
Disclosure of Invention
The invention aims to provide a detection module and a detection system capable of automatically detecting the defects of an optical filter.
In order to achieve the above object, the present invention provides a detection module and a detection system for detecting defects of an optical filter, wherein the module comprises a first detection device and a second detection device, both of which comprise a lens and an image sensor arranged at the lens image side end, the lens object side end of the second detection device is connected with a single-angle annular light source, and the lens object side end of the first detection device is connected with a multi-angle annular light source.
According to one aspect of the invention, the multi-angle annular light source and the single-angle annular light source each comprise a plug and a bead layer;
the multi-angle annular light source further comprises a multi-angle lampshade, and the single-angle annular light source further comprises a single-angle lampshade.
According to one aspect of the invention, each layer of the lamp bead layer is composed of lamp beads with the same inclination angle, the lamp beads are arranged along the circumferential direction of the lamp shade to form a lamp bead row, and the lamp bead row is further arranged along the axial direction of the lamp shade to form the lamp bead layer;
the integral inclination angle of a lamp bead layer arranged in the multi-angle lamp shade is gradually increased towards the direction close to the lens along the axial direction of the multi-angle lamp shade, and the larger the integral inclination angle is, the more the number of lamp bead rows in the lamp bead layer is;
the whole inclination angle of the lamp bead layer arranged in the single-angle lamp shade is the same.
According to an aspect of the present invention, the first detection device further includes a point light source disposed on a lens barrel of the lens.
According to an aspect of the invention, the first detection device and the second detection device each further comprise a driving member for driving the lens and the image sensor to focus.
According to one aspect of the invention, an antireflection film corresponding to the single-angle annular light source is plated on the lens of the second detection device.
The system comprises a feeding module, a sorting module, a discharging module, a material tray circulation mechanism and at least two detection modules, wherein the material tray circulation mechanism is used for enabling samples to flow from the feeding module to the discharging module, and the detection modules are arranged side by side and located between the feeding module and the sorting module.
According to one aspect of the invention, the first detection device and the second detection device in the detection module are respectively positioned at the upper side and the lower side of the tray circulating mechanism and are oppositely arranged.
According to one aspect of the invention, the first detection device shoots downwards and is used for detecting an IR effective area, a glue line area, a silk screen area and a microscope base area of the optical filter and microscope base assembly;
the second detection device shoots upwards and is used for detecting the effective area of the back IR and the area of the back glue line of the optical filter and the mirror base assembly.
According to one aspect of the invention, the distance between the multi-angle annular light source and the sample in the tray circulation mechanism is 30 mm;
the distance between the single-angle annular light source and the sample in the tray circulation mechanism is 70 mm;
the distance between the lens in the first detection device and the second detection device and the sample in the tray circulation mechanism is 110 +/-5 mm.
According to one aspect of the invention, the system further comprises a sampling module positioned between the detection module and the sorting module;
the spot inspection module comprises a third light source, an optical fiber receiver, a spectrometer and a light shielding plate, wherein the third light source and the optical fiber receiver are positioned on two sides of the tray flowing mechanism;
the light shielding plate is positioned between the third light source and the optical fiber receiver and is provided with a light through hole with the diameter smaller than that of the optical filter.
According to one aspect of the invention, the third light source is a halogen lamp having a light emission wavelength comprised between 160nm and 1000 nm;
the diameter of the light through hole on the light screen is 1mm-2 mm.
According to one aspect of the invention, a moving platform for moving the first detection device and the second detection device is further included.
According to one scheme of the invention, the multi-angle lampshade is basically a semi-circular shell, the lamp beads can be arranged at intervals layer by layer along the inner wall of the multi-angle lampshade, the lamp bead layers are sequentially arranged from bottom to top, the integral inclination angle of the lamp bead layer is larger as the lamp bead layers go upwards, and the number of the lamp bead rows in the lamp bead layer is larger as the integral inclination angle is larger. So, multi-angle annular light source can provide the annular light of multi-angle, and the directive property of lamp pearl all keeps at the light source center. In addition, the mode that this kind of multilayer interval set up the lamp pearl makes the lamp pearl comparatively compact, and the lamp pearl that can hold in limited multi-angle lamp shade's inner space is more to can increase light source luminance, reduce required exposure time, increase detection efficiency. Meanwhile, the problems that images are smeared due to equipment vibration under long-time exposure and the like can be solved. The arrangement mode of the lamp beads can enable the light angles provided by the multi-angle annular light source to be rich, so that the detection device can clearly identify various defects possibly existing in the optical filter.
According to one scheme of the invention, the first detection device and the second detection device in the detection system are positioned on the upper side and the lower side of the material tray. And the distance between the multi-angle annular light source in the first detection device and the sample in the tray is 30mm, and the distance between the single-angle annular light source in the second detection device and the sample is 70 mm. The distance between the lens and the sample in the two detection devices is 110 +/-5 mm. By means of the distance setting, the detection devices on the two sides can be ensured to sequentially trigger detection, and light rays cannot influence the optical system on the other side, so that the detection devices on the upper side and the lower side do not need to be staggered for shooting, and the highest efficiency of the system can be ensured. And the distance setting described above makes the overall optical system most sensitive to defects.
According to one scheme of the invention, the detection system consisting of the feeding module, the sorting module, the discharging module, the material tray circulation mechanism, the detection module and the sampling module can realize automatic defect detection on the optical filter. Therefore, the detection efficiency can be greatly improved, and the manual detection efficiency is about 700 plus 800pcs/h according to the average speed calculation of a workshop worker for detecting the optical filter. After the automatic equipment is used, the detection speed can be improved to 7000 and 8000pcs/h, and the detection speed is improved by nearly 10 times. And the defect detection can be made consistent by using automated equipment to perform defect processing. And the detection system can reduce the missing detection phenomenon from 5% to 0.5% artificially, thereby greatly reducing the loss caused by the missing detection. The sample to be detected is an assembly of the filter and the lens holder, so that the lens holder area can be detected in the detection process.
Drawings
FIG. 1 is a perspective view schematically illustrating a first detection device according to an embodiment of the present invention;
FIG. 2 is a perspective view schematically illustrating a second sensing device according to an embodiment of the present invention;
FIG. 3 is a front view schematically illustrating a multi-angle annulus light source according to an embodiment of the present invention;
FIG. 4 is a cross-sectional view schematically illustrating a single angle annular light source, in accordance with an embodiment of the present invention;
FIG. 5 is a perspective view schematically illustrating a detection system according to one embodiment of the present invention;
FIG. 6 is a schematic representation of a workstation of an inspection system according to one embodiment of the present invention;
FIG. 7 is a schematic diagram that schematically illustrates a spot check module, in accordance with an embodiment of the present invention.
Detailed Description
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments will be briefly described below. It is obvious that the drawings in the following description are only some embodiments of the invention, and that for a person skilled in the art, other drawings can be derived from them without inventive effort.
In describing embodiments of the present invention, the terms "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in an orientation or positional relationship that is based on the orientation or positional relationship shown in the associated drawings, which is for convenience and simplicity of description only, and does not indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and thus, the above-described terms should not be construed as limiting the present invention.
The present invention is described in detail below with reference to the drawings and the specific embodiments, which are not repeated herein, but the embodiments of the present invention are not limited to the following embodiments.
Fig. 1 and 2 schematically show perspective views of first and second detection devices, respectively. Referring to fig. 1 and 2, the detecting module 10 (see fig. 5) of the present invention includes a first detecting device and a second detecting device. Both detection devices comprise a lens 1, an image sensor 2 and a ring light source. The image sensor 2 (i.e. camera) is arranged at the image side end of the lens 1, and the annular light source is arranged at the object side end of the lens 1. The difference is that the annular light source in the first detection device 10a is a multi-angle annular light source 3a, which can provide annular light at least two angles, i.e. multi-angle annular light, thereby ensuring that each defect of the optical filter can be clearly identified; and the ring light source in the second detecting device 10b is a single angle ring light source 3a, which can provide ring light of a specific angle. The wave band of the annular light source can be set according to the type of the detected optical filter, for example, when the detected product is a blue glass optical filter, a blue light wave band is adopted, and when the detected product is an infrared narrow-band optical filter, a near-infrared wave band light source is adopted, so that the reflectivity of the light source on the product can be improved, and the contrast of defects is obviously increased. Because the optical filter is detected in a front-back detection mode, the high-resolution telecentric lens 1 is also subjected to antireflection film plating treatment aiming at the light source wave band (in the invention, only the lens 1 in the second detection device 10b on the lower shooting is plated with an antireflection film corresponding to the single-angle annular light source 3b), so that the reflection of the light source corresponding to the wave band is reduced, and the imaging of another optical system is prevented from being influenced. The difference between the first and second detection means is whether a point light source 4 is provided or not and the configuration of the annular light source. And the annular light source is mainly used for detecting the defects of an IR effective area, a silk-screen area and a lens base area of the optical filter. Dirt, smudges, spotting (i.e., dust fall), scratches on the IR active area; ink shortage, ink overflow, sawtooth and light leakage in a silk-screen area; scratch, damage, adhesive residue and chip falling requirements of the lens base area (namely whether the optical filter and the lens base deviate or not); other defects such as material mixing, empty material discs, different directions of the lens base, falling of the IR sheet and the like are effectively detected. And the point light source 4 is used for detecting the glue line area besides the positioning function: short glue, overflow glue, air bubbles, broken glue, edge chipping, corner chipping, IR raw edges, air groove (i.e. vent hole) and film crack defects in the IR effective area. The IR effective area and the back glue line area on the back of the filter usually do not have defects that need to be detected by the point light source 4, so the second detection device 10b without the point light source 4 as shown in fig. 2 is more suitable for detecting the back defects of the filter. On the other hand, in the case of detecting a defect on the front surface of the filter, it is necessary to provide a point light source 4 capable of providing a coaxial point light as in the first detection device 10a shown in fig. 1. In the embodiment, the point light source 4 is arranged on the lens barrel of the lens 1, the lens barrel is provided with a coaxial port, the point light source 4 can be fixed in a jackscrew mode and the like, and the light of the point light source 4 is reflected out through a reflector in the lens 1, so that the vertical uniformity of the light source is ensured. The point light source 4 is arranged in such a manner that the point light source 4 is directly connected to the lens barrel, so that the whole optical system has good compatibility.
FIGS. 3 and 4 schematically illustrate block diagrams of a multi-angle ring light source and a single-angle ring light source, respectively. In summary, the front of the filter has many possible defects, so the annular light source in the first detecting device 10a is required to provide annular light at multiple angles. The multi-angle annular light source shown in FIG. 3 can provide annular light at three angles, while the single-angle annular light source 3b of FIG. 4 can provide annular light at one particular angle. As shown in fig. 3, in the present embodiment, the ring light source 3 includes a multi-angle lamp shade 31a, a plug 32, and a lamp bead (not shown) disposed inside the multi-angle lamp shade 31 a. The multi-angle lampshade 31a of the embodiment is basically a semicircular shell, the inner wall of the shell is divided into three sections, and three lamp bead layers with different integral inclination angles are respectively installed on the three sections. The lamp beads are arranged along the circumferential direction of the multi-angle lampshade 31a to form a row of lamp bead rows. And the lamp bead rows are arranged along the axial direction of the multi-angle lamp shade 31a to form a lamp bead layer. However, the inclination angle (i.e. the included angle with the horizontal plane) of the lamp beads in each lamp bead layer is the same, that is, the pointing direction of the lamp beads in each lamp bead layer is the same, but is different from other lamp bead layers, that is, the overall inclination angles of the three lamp bead layers are different. In fig. 3, three bead layers sequentially include 3, 4 and 5 rows of bead rows from bottom to top, and the included angle between the 5 rows of beads at the top and the horizontal plane is the largest. The whole inclination on each layer of lamp pearl layer is towards the direction that is close to camera lens 1 and increases gradually promptly, and whole inclination is the more lamp pearl row quantity in the lamp pearl layer more that is big more. So set up, lamp pearl is arranged layer upon layer along its inner wall, can provide the annular light of multi-angle, and the directive property of lamp pearl all keeps at the light source center. In addition, the mode that multilayer interval set up the lamp pearl like this makes the lamp pearl comparatively compact, and the lamp pearl that can hold in limited multi-angle lamp shade 31 a's inner space is more to can increase light source brightness, reduce required exposure time, increase detection efficiency. Meanwhile, the problems that images are smeared due to equipment vibration under long-time exposure and the like can be solved. In the single-angle annular light source 3b shown in fig. 4 (plug 32 is not shown), the lamp beads 33 are also arranged in the single-angle lampshade 31b layer by layer at intervals, but the angles of each layer of lamp beads 33 are the same and are all 31 °, and a conical arrangement is formed, so that single annular light rays with specific angles can be provided, and it can also be understood that the single-angle annular light source 3b only comprises one lamp bead layer. And because the multi-angle annular light source 3a and the single-angle annular light source 3b both adopt a wide-mouth form, the caliber of the multi-angle annular light source 3a can reach 180mm, and the caliber of the single-angle annular light source 3b can reach 115 mm. Therefore, a large-caliber light source can be provided, the distance between the light source and a sample does not need to be too far, the size of the whole equipment can be reduced, and the lamp bead arrangement mode can provide high-uniformity illumination. Since the back of the filter may have fewer defects, it is not necessary to use a multi-angle ring light source, so the ring light source of the detection device (i.e. the second detection device 10b) in the downward shot is the single-angle ring light source 3b, and the ring light source of the detection device (i.e. the first detection device 10a) in the upward shot is the multi-angle ring light source 3 a. The present invention also provides a driving member 5 to drive the lens 1 and the image sensor 2 for focusing, and according to an embodiment of the present invention, the driving member 5 is a servo motor.
FIG. 5 is a perspective view schematically illustrating a detection system according to one embodiment of the present invention (without the spot check module 11); FIG. 6 is a schematic diagram schematically illustrating a station of an inspection system according to one embodiment of the invention. With reference to fig. 5 and 6, the detection system of the present invention includes a feeding module 6, a sorting module 7, a discharging module 8, a tray circulation mechanism 9, a detection module 10, and a sampling module 11. Currently, the optical filter is usually assembled with the lens base for use, and the prior art optical filter defect detection step is usually performed before the optical filter is assembled with the lens base, so that the defects of the lens base or the fit of the optical filter cannot be detected. The detection of the invention aims at the assembled optical filter, so that the defects of the lens base can be detected. As shown in fig. 6, the tray circulation mechanism 11 penetrates through the whole detection system, and is used for circulating the trays containing the samples from the feeding module 6 to the discharging module 8. As shown in fig. 5 and 6, the present invention has two sets of detection modules 10 arranged side by side on the left and right, and the two sets of detection modules include two first detection devices 10a and two second detection devices 10b, so that the first detection devices and the second detection devices are respectively arranged on the upper side and the lower side of the moving plane of the tray circulating mechanism 9, and are respectively used for detecting the front side and the back side of the optical filter. The same set of detection modules 10 is used to detect a sample assembly, such that the two sets of detection modules 10 can improve efficiency, i.e., UPH. The two first detection means 10a for detecting the front side of the filter are according to the embodiment shown in fig. 1, while the two second detection means 10b for detecting the rear side of the filter are according to the embodiment shown in fig. 2. In the present invention, when the tray is moved to the station of the detection module 10. In the first detecting device 10a, the multi-angle annular light source 3a is 30mm away from the sample in the tray, and in the second detecting device 10b, the single-angle annular light source 3b is 70mm away from the sample. The distance between the lens 1 and the sample in the two detection devices is 110 +/-5 mm. By means of the distance setting, the detection devices on two sides can be ensured to be sequentially triggered to detect, and light rays cannot influence the optical system on the other side, so that the detection devices on the upper side and the lower side are not required to be staggered for shooting, and the highest efficiency of the system can be ensured. And the distance setting described above makes the overall optical system most sensitive to defects. However, as can be seen from the above, since the light source has a wide-mouth structure and thus a large size, the distance between the annular light source and the sample does not need to be adjusted regardless of the size of the sample, and the distance can be directly fixed, so that the step of adjustment can be omitted. Because a plurality of optical filters to be detected are arranged in the material tray, the first detection device and the second detection device are required to be moved to detect the optical filters one by one, and the invention is also provided with a moving platform 12 with a servo motor as shown in figures 1 and 2 to drive the first detection device and the second detection device to move in the directions of x and y axes (namely to move in a plane parallel to the material tray), and the material tray is static during detection. Thus, the first detection device 10a can detect the defects of dirt, water marks, scratches, film cracks and the like in the IR effective area, the defects of short glue, overflow glue, broken glue, edge breakage, IR burrs and the like in the glue line area, the defects of less ink, overflow ink, sawteeth and the like in the silk screen area, and the defects of scratches, damage, adhesive residue, poor piece falling, material mixing and the like in the lens base area. And the second detection device 10b can detect dirt, water marks, dots and scratches of the back IR effective area and the glue overflow defects of the back glue line area.
As shown in fig. 6, the sampling module 11 is located between the detection module 10 and the sorting module 7 (the sampling module 11 is not shown in fig. 5), and is used for sampling the transmission spectrum of the optical filter. The sampling module 11 includes a third light source 11a, a fiber optic receiver 11b, a spectrometer 11c, and a light shield. The third light source 11a is a halogen lamp light source, but may be other light sources with wide wavelength, and the light emitting wavelength includes 160nm to 1000 nm. The third light source 11a and the optical fiber receiver 11b are positioned on both sides of the tray circulation mechanism 9. The light shielding plate is positioned between the third light source 11a and the optical fiber receiver 11b and is provided with a light through hole with the diameter smaller than that of the optical filter. The optical fiber receiver 11b receives the light signal and then the spectrometer 11c performs spectrum analysis, and the spectrum is seen through software at the computer end. Wherein, a light shielding plate (not shown in the figure) is needed to shield between the third light source 11a and the optical fiber receiver 11b, the light shielding plate and the optical filter are in the same plane, and a light through hole with a diameter smaller than that of the optical filter is arranged on the light shielding plate, and in the invention, the diameter of the light through hole is 1mm-2 mm. Of course, in the present invention, the sampling module 11 is an unnecessary component, and can be selectively configured according to actual requirements. The second detecting device 10b can also be an optional component, because if the product a is a normal filter (IR cut filter), all possible defects can be detected from the front side of the filter without performing back side detection. If the product A is an infrared narrow-band filter, the front and the back of the filter need to be detected. Therefore, whether to turn on the second detecting means 10b can be selected according to the type of the filter during the actual detection.
The detection steps of the detection system arranged as above are that the sample is delivered to the station of the detection module 10 through the feeding module 6, and the four detection devices jointly detect two material trays. After the material tray is moved to the right position by the material tray moving mechanism 9, the two detection devices positioned at the upper side detect the front surface of the sample, and the annular light source 3 and the point light source 4 are triggered in sequence. If the product a is a common filter (IR cut filter), the second detection device 10b may not work, and may be used as an optional module; if the product A is an infrared narrow-band filter, the detection devices on the upper side and the lower side are sequentially triggered to shoot images and drive the servo motor of the mobile platform 12 to move the detection devices. And then the flow is transferred to a spot check module 11 for spectrum spot check (also used as a matching detection module according to actual requirements). The first and second detection devices for detecting the upper and lower parts of the same material tray correspond to each other, and are processed to generate an MAP (namely a position diagram of the optical filter in the material tray) in the shooting process. After the detection of one box of material tray is finished, the material tray is conveyed to the sorting module 7 through the material tray circulation mechanism 9. And the sorting module 7 sorts the OK products and the NG products of the samples in the material box according to the MAP. And after sorting, the materials are divided into NG products and OK products which are respectively fed by a feeding module 8.
The above description is only one embodiment of the present invention, and is not intended to limit the present invention, and it is apparent to those skilled in the art that various modifications and variations can be made in the present invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (13)
1. The utility model provides a detect module for optical filter defect detection, includes first detection device (10a) and second detection device (10b), and the both include camera lens (1), set up in image sensor (2) of camera lens (1) side end, camera lens (1) object side end of second detection device (10b) is connected with single angle annular light source (3b), its characterized in that, camera lens (1) object side end of first detection device (10a) is connected with multi-angle annular light source (3 a).
2. The detection module according to claim 1, wherein the multi-angle ring light source (3a) and the single-angle ring light source (3b) each comprise a plug (32) and a bead layer;
the multi-angle annular light source (3a) further comprises a multi-angle lampshade (31a), and the single-angle annular light source (3b) further comprises a single-angle lampshade (31 b).
3. The detection module according to claim 2, wherein each layer of the bead layer is composed of beads (33) with the same inclination angle, the beads (33) are arranged along the circumferential direction of the lampshade to form a bead row, and the bead row is further arranged along the axial direction of the lampshade to form the bead layer;
the integral inclination angle of a lamp bead layer arranged in the multi-angle lamp shade (31a) is gradually increased towards the direction close to the lens (1) along the axial direction of the multi-angle lamp shade (31a), and the larger the integral inclination angle is, the more the number of lamp bead rows in the lamp bead layer is;
the integral inclination angles of the lamp bead layers arranged in the single-angle lamp shade (31b) are the same.
4. A detection module according to any one of claims 1 to 3, characterized in that said first detection means (10a) further comprise a point light source (4) arranged on the barrel of the lens (1).
5. A detection module according to any one of claims 1-3, characterized in that the first detection means (10a) and the second detection means (10b) each further comprise a drive member (5) for driving the lens (1) and the image sensor (2) into focus.
6. A detection module according to any one of claims 1-3, wherein the lens (1) of the second detection device (10b) is coated with an anti-reflection film corresponding to the single-angle annular light source (3 b).
7. A detection system comprising a module according to any one of claims 1 to 6, comprising a loading module (6), a sorting module (7), an unloading module (8) and a tray circulation mechanism (9) for circulating a sample from the loading module (6) to the unloading module (8), characterized in that it further comprises at least two sets of detection modules (10) arranged side by side and located between the loading module (6) and the sorting module (7).
8. The detection system according to claim 7, wherein the first detection device (10a) and the second detection device (10b) in the detection module (10) are respectively located at the upper side and the lower side of the tray circulation mechanism (9) and are oppositely arranged.
9. A detection system according to claim 8, wherein the first detection means (10a) is photographed downwards for detecting the IR active area, the glue line area, the silk screen area and the mirror base area of the filter and mirror base assembly;
the second detection device (10b) shoots upwards and is used for detecting an IR effective area and a back glue line area on the back of the optical filter and the mirror base assembly.
10. The detection system according to claim 9, wherein the multi-angle annular light source (3a) is 30mm away from the sample in the tray circulation mechanism (9);
the distance between the single-angle annular light source (3b) and a sample in the tray circulation mechanism (9) is 70 mm;
the distance between the lens (1) in the first detection device (10a) and the second detection device (10b) and the sample in the tray circulation mechanism (9) is 110 +/-5 mm.
11. The detection system according to claim 7, characterized in that it further comprises a spot-check module (11) located between the detection module (10) and the sorting module (7);
the sampling inspection module (11) comprises a third light source (11a), an optical fiber receiver (11b), a spectrometer (11c) and a light shielding plate, wherein the third light source (11a) and the optical fiber receiver (11b) are positioned on two sides of the material tray circulation mechanism (9);
the light shielding plate is positioned between the third light source (11a) and the optical fiber receiver (11b), and is provided with a light through hole with the diameter smaller than that of the optical filter.
12. A detection system according to claim 11, wherein the third light source (11a) is a halogen lamp having a light emission wavelength comprised between 160nm and 1000 nm;
the diameter of the light through hole on the light screen is 1mm-2 mm.
13. A detection system according to any one of claims 7-12, further comprising a moving platform (12) for moving the first detection device (10a) and the second detection device (10 b).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202010069790.4A CN111272774A (en) | 2020-01-21 | 2020-01-21 | Detection module and detection system for optical filter defect detection |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202010069790.4A CN111272774A (en) | 2020-01-21 | 2020-01-21 | Detection module and detection system for optical filter defect detection |
Publications (1)
Publication Number | Publication Date |
---|---|
CN111272774A true CN111272774A (en) | 2020-06-12 |
Family
ID=71003325
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202010069790.4A Pending CN111272774A (en) | 2020-01-21 | 2020-01-21 | Detection module and detection system for optical filter defect detection |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN111272774A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111638222A (en) * | 2020-07-22 | 2020-09-08 | 东莞市瑞图新智科技有限公司 | Defect detection system and method for optical filter |
CN114871140A (en) * | 2022-05-10 | 2022-08-09 | 苏州天准科技股份有限公司 | Electrode double-side detection device, detection method and electrode comprehensive detection equipment |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101539529A (en) * | 2009-04-28 | 2009-09-23 | 江苏大学 | Light source system for online detection of minitype fruits based on LED |
JP2010054231A (en) * | 2008-08-26 | 2010-03-11 | Kirin Techno-System Co Ltd | Device and system for inspecting foreign matter |
CN104990512A (en) * | 2015-07-20 | 2015-10-21 | 清华大学 | Transparent container bottle opening thread defect detection system and method |
CN205806973U (en) * | 2016-07-22 | 2016-12-14 | 东莞乐视自动化科技有限公司 | A kind of multi-angle annular light source |
CN106525869A (en) * | 2016-11-09 | 2017-03-22 | 芜湖东旭光电科技有限公司 | Glass edge defect detection method, as well as device and system thereof |
CN106530315A (en) * | 2016-12-27 | 2017-03-22 | 浙江大学常州工业技术研究院 | Full-angle target extraction system and method for small and medium-sized object |
CN207096079U (en) * | 2017-07-28 | 2018-03-13 | 东莞科视自动化科技有限公司 | A kind of multichannel, multi-angle, multi partition control light supply apparatus |
CN110132981A (en) * | 2019-05-21 | 2019-08-16 | 东莞市瑞图新智科技有限公司 | Piece appearance and size integrated detection equipment and detection method in a kind of optical filter |
CN110632087A (en) * | 2019-11-06 | 2019-12-31 | 合肥泰禾光电科技股份有限公司 | Surface defect detection device |
-
2020
- 2020-01-21 CN CN202010069790.4A patent/CN111272774A/en active Pending
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010054231A (en) * | 2008-08-26 | 2010-03-11 | Kirin Techno-System Co Ltd | Device and system for inspecting foreign matter |
CN101539529A (en) * | 2009-04-28 | 2009-09-23 | 江苏大学 | Light source system for online detection of minitype fruits based on LED |
CN104990512A (en) * | 2015-07-20 | 2015-10-21 | 清华大学 | Transparent container bottle opening thread defect detection system and method |
CN205806973U (en) * | 2016-07-22 | 2016-12-14 | 东莞乐视自动化科技有限公司 | A kind of multi-angle annular light source |
CN106525869A (en) * | 2016-11-09 | 2017-03-22 | 芜湖东旭光电科技有限公司 | Glass edge defect detection method, as well as device and system thereof |
CN106530315A (en) * | 2016-12-27 | 2017-03-22 | 浙江大学常州工业技术研究院 | Full-angle target extraction system and method for small and medium-sized object |
CN207096079U (en) * | 2017-07-28 | 2018-03-13 | 东莞科视自动化科技有限公司 | A kind of multichannel, multi-angle, multi partition control light supply apparatus |
CN110132981A (en) * | 2019-05-21 | 2019-08-16 | 东莞市瑞图新智科技有限公司 | Piece appearance and size integrated detection equipment and detection method in a kind of optical filter |
CN110632087A (en) * | 2019-11-06 | 2019-12-31 | 合肥泰禾光电科技股份有限公司 | Surface defect detection device |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111638222A (en) * | 2020-07-22 | 2020-09-08 | 东莞市瑞图新智科技有限公司 | Defect detection system and method for optical filter |
CN114871140A (en) * | 2022-05-10 | 2022-08-09 | 苏州天准科技股份有限公司 | Electrode double-side detection device, detection method and electrode comprehensive detection equipment |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US8120654B2 (en) | Device and method for detecting defect on end face of glass sheet | |
CN111272774A (en) | Detection module and detection system for optical filter defect detection | |
KR101318483B1 (en) | Inspection system and method for identifying surface and body defects in a glass sheet | |
US8532364B2 (en) | Apparatus and method for detecting defects in wafer manufacturing | |
EP2602763B1 (en) | Method for monitoring the quality of the primer layer applied on a motor-vehicle body before painting | |
KR20050013488A (en) | Systems and methods for identifying foreign objects and debris(fod) and defects during fabrication of a composite structure | |
CN1849508A (en) | Method and device for detecting defects of glass sheet | |
CN108680343B (en) | Flexible screen detection method and detection device | |
TW201610417A (en) | An optical inspection apparatus for multi-defect detection | |
CN110987970A (en) | Object surface defect detection system and detection method | |
CN108362713A (en) | A kind of optical detection imaging system | |
CN103697422A (en) | Coaxial lighting AOI (automatic optic inspection) light source device | |
CN111077165A (en) | Perovskite thin film quality online detection device and method based on machine vision | |
CN210690434U (en) | Circuit board through hole defect final inspection equipment | |
CN115165736A (en) | AOI module automatic check out test set | |
CN111307421B (en) | Lens defect detection system | |
CN212844296U (en) | Defect detection system of optical filter | |
CN1675005A (en) | Automatic analysis or inspection system for object travelling on a support | |
CN211014053U (en) | High-precision automatic object surface flaw image capturing device | |
CN112945988A (en) | Lens defect detection system and detection method | |
KR20200089416A (en) | Inspection system for cover glass of display panel | |
CN217369288U (en) | Defect detection device for polyhedral material | |
CN217426680U (en) | Optical device for visual inspection of tin ball chip product | |
CN218349762U (en) | Detection equipment | |
CN209565256U (en) | A kind of plastic cement tube vision inspection device |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination |