CN111562670B - Display panel with eye tracking function and preparation method thereof - Google Patents

Display panel with eye tracking function and preparation method thereof Download PDF

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Publication number
CN111562670B
CN111562670B CN202010511880.4A CN202010511880A CN111562670B CN 111562670 B CN111562670 B CN 111562670B CN 202010511880 A CN202010511880 A CN 202010511880A CN 111562670 B CN111562670 B CN 111562670B
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layer
electrode layer
light emitting
display panel
light
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CN111562670A (en
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杜晓松
周文斌
李高敏
郭丰
孙剑
高裕弟
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Kunshan Mengxian Electronic Technology Co ltd
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Kunshan Mengxian Electronic Technology Co ltd
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0093Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means for monitoring data relating to the user, e.g. head-tracking, eye-tracking
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/01Head-up displays
    • G02B27/0101Head-up displays characterised by optical features
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/1201Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/60OLEDs integrated with inorganic light-sensitive elements, e.g. with inorganic solar cells or inorganic photodiodes
    • H10K59/65OLEDs integrated with inorganic image sensors

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  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroluminescent Light Sources (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

The embodiment of the invention discloses a display panel with an eye-tracking function and a preparation method thereof. The display panel includes: a drive back plate; the light-emitting units and the image sensing units are positioned on the driving backboard and are arranged in an array manner; the light emitting unit emits light according to the received signal, the signal received by the light emitting unit is associated with the signal output by the image sensing unit, and the light emitting unit is configured to emit light according to the object identified by the image sensing unit. When the display panel provided by the embodiment of the invention is applied to an AR/VR display device, the movement of human eyes can be tracked and the display picture can be adjusted, the dizziness caused by the existing display device is relieved, the immersion of a user when using the display device is enhanced, the display effect of the display device is optimized, the biological recognition performance of the display device is improved, and the man-machine interaction performance of the display device is enhanced.

Description

Display panel with eye tracking function and preparation method thereof
Technical Field
The embodiment of the invention relates to the technical field of display, in particular to a display panel with an eye tracking function and a preparation method thereof.
Background
Virtual Reality (VR) is a technology in which a computer simulates a Virtual environment to give an environmental immersion. Augmented reality (Augmented Reality, AR), a technology that ingeniously merges virtual information with the real world.
At present, the display device based on AR/VR has the problems of easy user dizziness, insufficient immersion feeling and poor man-machine interaction performance.
Disclosure of Invention
The invention provides a display panel with an eye tracking function and a preparation method thereof, which are used for optimizing the display effect of the display panel and enhancing the man-machine interaction performance.
In a first aspect, an embodiment of the present invention provides a display panel with an eye tracking function, including:
a drive back plate;
the light-emitting units and the image sensing units are positioned on the driving backboard and are arranged in an array manner;
the light emitting unit emits light according to the received signal, the signal received by the light emitting unit is associated with the signal output by the image sensing unit, and the light emitting unit is configured to emit light according to the target identified by the image sensing unit.
Optionally, the light emitting unit includes a first light emitting unit, a second light emitting unit, and a third light emitting unit, and the first light emitting unit, the second light emitting unit, the third light emitting unit, and the image sensing unit are arranged in a shape of a Chinese character 'tian'.
Optionally, the driving back plate includes a first electrode layer and a second electrode layer;
the display panel includes:
the organic light-emitting layer is positioned on the driving backboard and covers the first electrode layer;
the third electrode layer is positioned at one side of the organic light-emitting layer away from the driving backboard;
the packaging layer is positioned at one side of the third electrode layer far away from the driving backboard;
a first protective layer disposed around the organic light emitting layer, the third electrode layer, and the sidewalls of the encapsulation layer;
the quantum dot layer is positioned on one side of the packaging layer away from the driving backboard;
the sensing layer and the fourth electrode layer are positioned on one side, far away from the driving backboard, of the second electrode layer, and the sensing layer is positioned between the second electrode layer and the fourth electrode layer;
wherein the first electrode layer, the organic light-emitting layer, the quantum dot layer, and the third electrode constitute the light-emitting unit;
the second electrode layer, the sensor, and the fourth electrode layer constitute the image sensing unit.
Optionally, the material of the first protection layer includes silicon nitride.
Optionally, the first electrode layer is arranged on the same layer as the second electrode layer.
Optionally, the quantum dot layer includes red quantum dots and green quantum dots.
Optionally, an insulating layer and a common electrode layer are further included;
the insulating layer covers the second electrode layer, the sensing layer and the fourth electrode layer;
the common electrode layer is located on one side, far away from the driving backboard, of the insulating layer, and the common electrode layer is connected with the third electrode layer and the fourth electrode layer through a via hole.
Optionally, the display device further comprises a pixel definition layer, wherein the pixel definition layer comprises a first groove, the pixel definition layer is positioned on one side of the common electrode layer away from the driving backboard, and the quantum dot layer is positioned in the first groove;
a second groove is further formed between adjacent first grooves of the pixel definition layer, and the display panel further comprises a second protection layer, a third protection layer and a lens;
the second protection layer and the third protection layer are sequentially arranged on one side, far away from the driving backboard, of the pixel definition layer, and the third protection layer at least covers the second groove;
the lens is positioned on one side of the second protective layer away from the pixel definition layer and corresponds to the area where the image sensing unit is positioned.
Optionally, the protective cover further comprises a first adhesive layer and a cover plate, wherein the cover plate is connected with the second protective layer through the first adhesive layer.
In a second aspect, an embodiment of the present invention further provides a method for manufacturing a display panel with an eye tracking function, including:
forming a driving backboard;
and forming a light emitting unit and an image sensing unit on the driving backboard, so that the light emitting unit and the image sensing unit are arranged in an array on the driving backboard.
Optionally, forming the driving back plate includes:
providing a silicon-based backboard, and forming a first electrode layer and a second electrode layer on the silicon-based backboard;
forming a light emitting unit and an image sensing unit on the driving back plate, so that the light emitting unit and the image sensing unit are arranged in an array on the driving back plate, comprising:
evaporating an organic light-emitting layer on the driving backboard to enable the organic light-emitting layer to cover the first electrode layer;
evaporating a third electrode layer on one side of the organic light-emitting layer far away from the driving backboard;
evaporating an encapsulation layer on one side of the third electrode layer far away from the driving backboard;
forming a first protection layer around the organic light-emitting layer, the third electrode layer and the side wall of the packaging layer, and etching;
electrofluidic printing a quantum dot layer on one side of the packaging layer away from the driving backboard;
and forming a sensing layer and a fourth electrode layer on one side of the second electrode layer away from the driving backboard and patterning the sensing layer and the fourth electrode layer.
According to the technical scheme, the light emitting units and the image sensing units are arranged on the display panel in an array mode, so that the image sensing units can directly realize target identification on the display side, and the accuracy of target identification results can be improved through the plurality of image sensing units in the display panel, so that the display panel can accurately control the light emitting units to emit light according to the identification results of the image sensing units. When the display panel provided by the embodiment of the invention is applied to an AR/VR display device, the movement of human eyes can be tracked and the display picture can be adjusted, the dizziness caused by the existing display device is relieved, the immersion of a user when using the display device is enhanced, the display effect of the display device is optimized, the biological recognition performance of the display device is improved, and the man-machine interaction performance of the display device is enhanced.
Drawings
Fig. 1 is a schematic cross-sectional view of a display panel according to an embodiment of the present invention;
fig. 2 is a schematic top view of a display panel according to an embodiment of the invention;
FIG. 3 is a schematic cross-sectional view of another display panel according to an embodiment of the present invention;
FIG. 4 is a schematic cross-sectional view of another display panel according to an embodiment of the present invention;
fig. 5 is a schematic flow chart of a method for manufacturing a display panel according to an embodiment of the present invention;
fig. 6 to 15 are schematic structural diagrams of a display panel according to an embodiment of the present invention in each manufacturing step.
Detailed Description
The invention is described in further detail below with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting thereof. It should be further noted that, for convenience of description, only some, but not all of the structures related to the present invention are shown in the drawings.
As described in the background art, the conventional display device has problems of easy dizziness, insufficient immersion, and poor man-machine interaction performance. Aiming at the technical problems, the embodiment of the invention provides a display panel with an eye tracking function. Fig. 1 is a schematic cross-sectional view of a display panel according to an embodiment of the present invention; fig. 2 is a schematic top view of a display panel according to an embodiment of the invention. Referring to fig. 1 and 2, the display panel includes a driving back plate 10, a light emitting unit 20, and an image sensing unit 30; the light emitting units 20 and the image sensing units 30 are positioned on the driving backboard 10 and are arranged in an array; the light emitting unit 20 emits light according to the received signal, the signal received by the light emitting unit 20 is associated with the signal output by the image sensing unit 30, and the light emitting unit 20 is configured to emit light according to the object identified by the image sensing unit 30.
Referring to fig. 1 and 2, a display panel provided by an embodiment of the present invention may be an Organic Light-Emitting Diode (OLED) display panel or an Organic Light-Emitting Diode Micro display panel (Micro-OLED) or the like. The driving back plate 10 may be a silicon-based back plate, and may provide buffering, protection or support for the display panel. The driving back plate 10 is further provided with a driving circuit, such as a pixel driving circuit or a CMOS driving circuit, and the light emitting unit 20 and the image sensing unit 30 can be connected with signal wires in the driving circuit through the via hole 110, so that the driving circuit can drive the light emitting unit 20 to emit light for displaying, and drive the image sensing unit 30 to perform image recognition.
Referring to fig. 1 and 2, the light emitting units 20 and the image sensing units 30 are integrated on the display panel and are alternately arranged in an array in the display area. In this embodiment, the operation principle of the display panel will be described by taking an example that the display panel is applied to an AR/VR display device based on an eye tracking technology, for example, a head-mounted display device. In the operation process of the display panel, after external ambient light, such as sunlight or lamplight, irradiates the human eyes, the image sensing units 30 arranged at all positions in the display panel can sense the light of all positions of the human eyes so as to determine pupil position information and eye movement data of the human eyes in real time. The image sensing unit 30 may output a signal based on the pupil position information and the eye movement data, so that the driving backboard 10 may output a control signal to the light emitting unit 20 according to the signal output by the image sensing unit 30, and the light emitting unit 20 performs light emitting display according to the received control signal, so that the picture displayed by the display device may be adjusted in real time according to the pupil position and the eye movement condition of the human eye.
In addition, human-computer interaction may be performed according to the pupil position and the eye movement data of the human eye, for example, when the sensing layer 310 detects that the human eye moves up and down, a confirmation (YES) is indicated; when the sensing layer 310 detects a left-right movement of the human eye, a Negative (NO) is indicated; as another example, when sensing layer 310 detects a low frequency blink motion in the human eye, a confirmation (YES) is indicated; when the sensing layer 310 detects a high frequency blink motion in the human eye, a Negative (NO) is indicated; when the sensing layer 310 detects that the human eye moves up and down, the page is turned up and down; when the sensing layer 310 detects a left-right movement of the human eye, it indicates a left-right page turn or an up-down menu selection, etc. Therefore, the display panel provided by the embodiment of the invention can also replace the traditional interaction processes such as touch control, mouse or keyboard input and the like according to the pupil position and eye movement data of human eyes, so that the human-computer interaction is more intelligent.
According to the technical scheme provided by the embodiment of the invention, the light emitting units 20 and the image sensing units 30 are arranged on the display panel in an array manner, so that the image sensing units 30 can directly realize target identification on the display side, and the accuracy of target identification results can be improved by the plurality of image sensing units 30 in the display panel, so that the display panel can accurately control the light emitting units 20 to emit light for display according to the identification results of the image sensing units 30. When the display panel in the embodiment of the invention is applied to an AR/VR display device, the movement of human eyes can be tracked and the display picture can be adjusted, the dizziness caused by the existing display device is relieved, the immersion of a user when using the display device is enhanced, the display effect of the display device is optimized, the biological recognition performance of the display device is improved, and the man-machine interaction performance of the display device is enhanced.
Referring to fig. 1 and 2, the light emitting unit 20 may be provided to include a first light emitting unit 21, a second light emitting unit 22, and a third light emitting unit 23, and the first light emitting unit 21, the second light emitting unit 22, the third light emitting unit 23, and the image sensing unit 30 are arranged in a delta shape. Fig. 1 and 2 exemplarily provide that the first light emitting unit 21 is a red light emitting unit, the second light emitting unit 22 is a green light emitting unit, and the third light emitting unit 23 is a blue light emitting unit. The image sensing unit 30 does not perform light emission display, and may be provided in a transparent or semi-transparent structure, and thus may be approximately regarded as a unit displaying white color. In the pixel arrangement structure shown in fig. 2, a plurality of first and second repeating pixel units PX10 and PX20 are included. The first repeated pixel unit PX10 includes a first sub-pixel unit PX11 and a second sub-pixel unit PX12, each of the light emitting units or the image sensing units forms a sub-pixel, and the first repeated pixel unit PX10 has eight sub-pixels in total. The first sub-pixel unit PX11 includes four sub-pixels of different colors, which are equally divided into two rows. The second sub-pixel unit PX12 includes four sub-pixels arranged in a row direction in mirror image with the arrangement of the four sub-pixels of the first sub-pixel unit PX 11. The second repeating pixel unit PX20 includes eight sub-pixels, and is disposed in mirror image with the arrangement of the eight sub-pixels of the first repeating pixel unit PX10 in the column direction. The plurality of first repeated pixel units PX10 are repeatedly arranged in the row direction, and the plurality of second repeated pixel units PX20 and the first repeated pixel units PX10 are alternately and repeatedly arranged in the column direction, forming a field-shaped arrangement structure.
Referring to fig. 2, each subpixel and adjacent subpixels of three different colors constitute one display pixel, as shown by PX11 or PX 12. In this embodiment, the shape of the display pixel is square, the four sub-pixels are respectively located at four top corners of the square, and are respectively a red sub-pixel R, a green sub-pixel G, a blue sub-pixel B and a sensing area S, and the sensing area S formed by the image sensing unit 30 approximates to a white sub-pixel, so that the brightness of the display pixel can be improved. In the same display pixel, the red sub-pixel R is disposed diagonally to the sensing region S, and the blue sub-pixel B is disposed diagonally to the green sub-pixel G. Preferably, the four sub-pixels have the same area and are arranged so as to control the color displayed by the display pixels.
In addition, as shown in the pixel unit PX30, in the present embodiment, four red sub-pixel units R are adjacently disposed and arranged in a field shape; the four pixel green sub-pixel units G are adjacently arranged and are arranged in a shape like a Chinese character 'tian'; the four blue sub-pixel units B are adjacently arranged and are arranged in a shape like a Chinese character 'tian'; the four sensing areas S (image sensing units 30) are adjacently disposed in a field-like arrangement. In this way, four sub-pixel units with the same color are arranged in a concentrated manner, and in the manufacturing process of the display panel, the four sub-pixel units with the same color can be formed in one process; the four sensing regions S are collectively arranged so that the sensing layer 310 and the fourth electrode layer 320 of the image sensing unit 30 in the four sensing regions S can also be formed in one process. Compared with the preparation mode that each sub-pixel unit is processed and formed one by one, and the sensing layer 310 and the fourth electrode layer 320 of each image sensing unit 30 are processed and formed one by one, the pixel arrangement structure provided by the embodiment is applied, the number of sub-pixels in a unit area is increased under the condition that the process precision is reduced, the pixel density requirement of the micro display device is met, meanwhile, the size of the image sensing unit 30 can be reduced, and the integration of the image sensing unit 30 in the pixel unit is facilitated.
Fig. 3 is a schematic cross-sectional structure of another display panel according to an embodiment of the present invention, and may specifically be a schematic cross-sectional structure of a portion of the display panel during a manufacturing process. As shown in fig. 3, in the present embodiment, the driving back plate 10 is provided to include the first electrode layer 120 and the second electrode layer 130, and the display panel includes the organic light emitting layer 210, the third electrode layer 220, the encapsulation layer 230, the first protection layer 240, the quantum dot layer 250, the sensing layer 310, and the fourth electrode layer 320. The organic light emitting layer 210 is located on the driving back plate 10 and covers the first electrode layer 120; the third electrode layer 220 is located at a side of the organic light emitting layer 210 away from the driving back plate 10; the encapsulation layer 230 is located on one side of the third electrode layer 220 away from the driving back plate 10; the first protective layer 240 is disposed around the sidewalls of the organic light emitting layer 210, the third electrode layer 220, and the encapsulation layer 230; the quantum dot layer 250 is located on one side of the encapsulation layer 230 away from the driving back plate 10; the sensing layer 310 and the fourth electrode layer 320 are located at a side of the second electrode layer 130 away from the driving backplate 10, and the sensing layer 310 is located between the second electrode layer 130 and the fourth electrode layer 320. Wherein the first electrode layer 120, the organic light emitting layer 210, the quantum dot layer 250, and the third electrode constitute the light emitting unit 20; the second electrode layer 130, the sensor, and the fourth electrode layer 320 constitute the image sensing unit 30.
Referring to fig. 3, specifically, the first electrode layer 120 is an electrode layer disposed in a patterned manner corresponding to the light emitting unit 20, for example, the first electrode layer 120 is an anode layer of the light emitting unit 20. The second electrode layer 130 is an electrode layer of the image sensing unit 30, for example, the second electrode layer 130 is an anode layer of the image sensing unit 30. The first electrode layer 120 and the second electrode layer 130 may have a three-layer structure, wherein the first layer and the third layer may be metal oxide layers such as Indium Tin Oxide (ITO), indium Zinc Oxide (IZO), aluminum Zinc Oxide (AZO), and the second layer may be a metal layer (such as silver or copper). The organic light emitting layer 210 may include only a single film layer, that is, only an organic light emitting material layer, or may include a multi-layered structure formed of a hole injection layer, a hole transport layer, a light emitting material layer, an electron transport layer, an electron injection layer, and the like, which are stacked from the first electrode layer 120 to the third electrode layer 220. The sensing layer 310 may be a photosensitive structure in the image sensing unit 30, and the material of the sensing layer 310 may be amorphous Silicon (amorphous Silicon, a-Si), low temperature polysilicon (Low Temperature Poly-Silicon, LTPS, also called p-Si), or reduced graphene oxide (reduced Graphene Oxide, rGO). The third electrode layer 220 is an electrode layer of the light emitting unit 20, for example, the third electrode layer 220 is a cathode layer of the light emitting unit 20. The fourth electrode layer 320 is an electrode layer of the image sensing unit 30, for example, the fourth electrode layer 320 is a cathode layer of the image sensing unit 30. The third electrode layer 220 and the fourth electrode layer 320 may be ITO transparent electrodes or magnesium-silver alloy.
With continued reference to fig. 3, the quantum dot layer 250 may serve as a filter layer, and may emit monochromatic light of various colors according to the diameter of the quantum dot when the quantum dot layer 250 is stimulated by electricity or light. Illustratively, the organic light emitting layer 210 is a blue light emitting layer, and the quantum dot layer 250 includes red quantum dots 251 and green quantum dots 252. The first electrode layer 120, the organic light emitting layer 210, the quantum dot layer 251, and the third electrode constitute a light emitting unit 21, the first electrode layer 120, the organic light emitting layer 210, the quantum dot layer 252, and the third electrode constitute a light emitting unit 22, and the first electrode layer 120, the organic light emitting layer 210, and the third electrode constitute a light emitting unit 23. The pixel driving circuit in the driving back plate 10 can be electrically connected with the first electrode layer 120 in each light emitting unit through the via hole 110, and provides a driving voltage for the first electrode layer 120 to drive the organic light emitting layer 210 to emit light. Blue light emitted from the organic light emitting layer 210 may be converted into red light by the red quantum dots 251 such that the light emitting unit 21 forms a red light emitting unit; blue light emitted from the organic light emitting layer 210 may be converted into green light by the green quantum dots 252 such that the light emitting unit 22 forms a green light emitting unit; the organic light emitting layer 210 may also directly emit blue light outward so that the light emitting unit 23 forms a blue light emitting unit, and the display panel thus realizes three color display of red, green, and blue.
The driving circuit in the driving back plate 10 may also be electrically connected to the second electrode layer 130 in the image sensing unit 30 through the via hole 110, to provide a driving voltage for the second electrode layer 130, so as to drive the image sensing unit 30 to identify the target. When the display panel works, external ambient light irradiates the recognition target, and the sensing layer 310 in the image sensing unit 30 can sense the recognition target, so that the resistance of the sensing layer 310 changes, and the signal output by the image sensing unit 30 is caused to change. The processor in the display device can convert the signals output by the plurality of image sensing units 30 in the display panel into position data and motion data of the recognition target, thereby controlling the light emitting unit 20 to perform light emitting display according to the position data and the motion data of the recognition target.
In this embodiment, the first electrode layer 120 and the second electrode layer 130 may be arranged on the same layer, so as to ensure that the light emitting unit 20 and the image sensing unit 30 are located on the same plane of the display panel, which is convenient for the integration of the light emitting unit 20 and the image sensing unit 30 in the display panel, and is also beneficial for the collection of the reflected light of the recognition target by the image sensing unit 30, without designing a complex light path, and reduces the production difficulty and the production cost.
Referring to fig. 3, the encapsulation layer 230 may be a Thin-film encapsulation (Thin-Film Encapsulation, TFE) layer, and the material of the encapsulation layer 230 may be an organic film, an inorganic film, or an inorganic film stacked on the organic film, and the specific material may be, for example, silicon dioxide. The encapsulation layer 230 covers the light emitting unit 20 to encapsulate the completed light emitting unit 20, thereby protecting the light emitting unit 20 from water oxygen. The first protection layer 240 is disposed around the sidewalls of the organic light emitting layer 210, the third electrode layer 220 and the encapsulation layer 230, and preferably, the material of the first protection layer 240 includes silicon nitride, and by disposing the first protection layer 240, the sidewalls of the light emitting unit 20 can be protected, thereby further preventing the light emitting unit 20 from being failed due to attack by water and oxygen.
With continued reference to fig. 3, an insulating layer 260 and a common electrode layer 270 may also be provided in the display panel; the insulating layer 260 covers the second electrode layer 130, the sensing layer 310, and the fourth electrode layer 320; the common electrode layer 270 is positioned at a side of the insulating layer 260 remote from the driving backplate 10, and the common electrode layer 270 connects the third electrode layer 220 and the fourth electrode layer 320 through the via hole. The insulating layer 260 may be an interlayer insulating layer for insulating each film layer from other film layers in the image sensing unit 30. The common electrode layer 270 covers the encapsulation layer 230, the first protection layer 240, and a side of the insulating layer 260 away from the driving backplate 10, and a via hole may be opened at a side of the encapsulation layer 230 and the insulating layer 260 away from the driving backplate 10 such that the common electrode layer 270 can be connected with the third electrode layer 220 and the fourth electrode layer 320 through the via hole. The common electrode layer 270 may serve as a common electrode of the light emitting unit 20 and the image sensing unit 30, for example, as a common cathode, and an electrical signal may be simultaneously transmitted to the light emitting unit 20 and the image sensing unit 30 through the common electrode layer 270. Preferably, the material of the common electrode layer 270 may be a semitransparent conductive material, such as aluminum, silver, or other metal materials. The advantage of this arrangement is that the problem of crosstalk of light emitted from the light emitting unit 20 to the image sensing unit 30 during light emitting display can be prevented, so that crosstalk between the emitted light of the light emitting unit 20 and the light reflected by the recognition target to the image sensing unit 30 is prevented, thereby affecting the recognition result of the image sensing unit 30.
Fig. 4 is a schematic cross-sectional structure of another display panel according to an embodiment of the present invention, and may specifically be a schematic cross-sectional structure of a portion of the display panel during a manufacturing process. Referring to fig. 3 and 4, the display panel further includes a pixel defining layer 280, a second protective layer 292, a third protective layer 291, and a lens 330; the pixel defining layer 280 includes a first groove 281, the pixel defining layer 280 is located on one side of the common electrode layer 270 away from the driving back plate 10, the quantum dot layer 250 is located in the first groove 281, and a second groove 282 is further disposed between adjacent first grooves 281 of the pixel defining layer 280; the second protection layer 292 and the third protection layer 291 are sequentially disposed on a side of the pixel defining layer 280 away from the driving backplate 10, and the third protection layer 291 covers at least the second recess 282; the lens 330 is disposed on a side of the second protection layer 292 away from the pixel defining layer 280 and corresponds to a region of the image sensing unit 30.
In conjunction with fig. 3 and 4, in particular, the pixel defining layer 280 covers the common electrode layer 270, and realizes packaging of the light emitting unit 20 and the image sensing unit 30. The first recess 281 is formed in a side of the pixel defining layer 280 away from the driving backplate 10, and corresponds to the positions of the first light emitting unit 21 and the second light emitting unit 22, so that the emitted light of the organic light emitting layer 210 can be irradiated outwards through the quantum dot layer 250 in the first recess 281, and the conversion of the light emitting color is achieved. Preferably, the pixel defining layer 280 is made of a transparent material, which has the advantage that the light emitted from the organic light emitting layer 210 may be directly emitted to the outside through the pixel defining layer 280 in a region where the first recess 281 is not provided in the pixel defining layer 280, for example, in a region where the third light emitting unit 23 is located, so that the light emitting colors of the first light emitting unit 21, the second light emitting unit 22, and the third light emitting unit 23 are different.
Referring to fig. 4, a second protective layer 292 is used to protect the quantum dot layer 250. Preferably, the material of the second protection layer 292 is alumina, and the thickness of the second protection layer 292 is 50nm. The third protective layer 291 covers at least the second groove 282 to prevent light crosstalk from occurring between adjacent light emitting units, thereby affecting the display effect of the display panel. Preferably, the material of the third protection layer 291 is aluminum, and the thickness of the third protection layer 291 is 100nm. The Lens 330 may be a Micro Lens (Micro Lens) disposed corresponding to an area where the image sensing unit 30 is located, for converging reflected light of the recognition target of the image sensing unit 30. Because the display panel includes the image sensing units 30 arranged in an array, each image sensing unit 30 is correspondingly provided with one lens 330, so that a micro lens array is formed in the display panel to collect the reflected light rays of each direction of the identification target, thereby facilitating the accurate identification of the position information and the motion information of the identification target, enabling the light emitting unit 20 to emit light according to the position information and the motion information of the identification target, facilitating the optimization of the display effect of the display device, and improving the man-machine interaction performance of the display device.
With continued reference to fig. 4, the display panel further includes a first adhesive layer 40 and a cover plate 50, where the cover plate 50 is connected to the second protective layer 292 through the first adhesive layer 40. The first adhesive layer 40 may be a shadowless adhesive (uv adhesive), also called photosensitive adhesive or uv curable adhesive. The cover plate 50 may be a glass cover plate, and the cover plate 50 is connected to the second protection layer 292 through the first adhesive layer 40 to implement packaging of the display panel.
The embodiment of the invention also provides a preparation method of the display panel with the eye tracking function. Fig. 5 is a schematic flow chart of a method for manufacturing a display panel according to an embodiment of the present invention, as shown in fig. 5, the method for manufacturing a display panel includes:
s110, forming a driving backboard.
S120, forming a light emitting unit and an image sensing unit on the driving back plate.
S130, arranging the light emitting units and the image sensing units on the driving backboard in an array mode.
Referring to fig. 1 and 2, a driving back plate 10 is formed, and a light emitting unit 20 and an image sensing unit 30 are formed on the driving back plate 10 such that the light emitting unit 20 and the image sensing unit 30 are arrayed on the driving back plate 10. According to the technical scheme provided by the embodiment of the invention, the light emitting units 20 and the image sensing units 30 are arranged on the display panel in an array manner, so that the image sensing units 30 can directly realize target identification on the display side, and the accuracy of target identification results can be improved by the plurality of image sensing units 30 in the display panel, so that the display panel can accurately control the light emitting units 20 to emit light for display according to the identification results of the image sensing units 30. When the display panel in the embodiment of the invention is applied to an AR/VR display device, the movement of human eyes can be tracked and the display picture can be adjusted, the dizziness caused by the existing display device is relieved, the immersion of a user when using the display device is enhanced, the display effect of the display device is optimized, the biological recognition performance of the display device is improved, and the man-machine interaction performance of the display device is enhanced.
In this embodiment, step S110 may specifically include: providing a silicon-based backboard, and forming a first electrode layer and a second electrode layer on the silicon-based backboard.
Fig. 6 to 15 are schematic structural diagrams of a display panel according to an embodiment of the present invention in each manufacturing step. Referring to fig. 6, the driving backplate 10 may be fabricated from a silicon-based backplate on which a plurality of first electrode layers 120 and second electrode layers 130 are formed.
In this embodiment, step S120 may specifically include:
s310, evaporating an organic light-emitting layer on the driving backboard to enable the organic light-emitting layer to cover the first electrode layer.
S320, evaporating a third electrode layer on one side of the organic light-emitting layer away from the driving backboard.
S330, evaporating an encapsulation layer on one side of the third electrode layer away from the driving backboard.
Specifically, referring to fig. 7, in step S310 to step 330, a metal Mask (Open Mask) is used to evaporate the organic light-emitting layer 210 on the driving back plate 10, so that the organic light-emitting layer 210 covers the first electrode layer 120. The third electrode layer 220 and the encapsulation layer 230 are sequentially evaporated on the organic light emitting layer 210 such that the organic light emitting layer 210, the third electrode layer 220, and the encapsulation layer 230 cover the display region of the display panel.
Referring to fig. 8, after step S330, the method of manufacturing a display panel may further include: the organic light emitting layer 210, the third electrode layer 220, and the encapsulation layer 230 are etched to leave the organic light emitting layer 210, the third electrode layer 220, and the encapsulation layer 230 in the region where the light emitting unit is located in the display panel, and the second electrode layer 130 is exposed.
S340, forming a first protection layer around the organic light-emitting layer, the third electrode layer and the side wall of the packaging layer, and etching.
With continued reference to fig. 8, the first protection layer 240 may be a silicon nitride (SiN) layer, and the SiN layer may be grown around the organic light emitting layer 210, the third electrode layer 220, and the encapsulation layer 230, and a sidewall etching (spacer etch) process is used to perform dry etching, remove the SiN layer on top of the encapsulation layer 230, and retain the SiN layers on the sidewalls of the organic light emitting layer 210, the third electrode layer 220, and the encapsulation layer 230, so as to form a sidewall protection for the light emitting unit, and prevent the light emitting unit from being corroded by water and oxygen.
And S350, forming a sensing layer and a fourth electrode layer on one side of the second electrode layer away from the driving backboard and patterning.
Referring to fig. 9, a sensing layer 310 and a fourth electrode layer 320 are sequentially formed on a side of the second electrode layer 130 remote from the driving backplate 10 and patterned such that the second electrode layer 130, the sensing layer 310 and the fourth electrode layer 320 constitute the image sensing unit 30.
S360, electrically and fluidically printing the quantum dot layer on one side of the packaging layer away from the driving backboard.
Before step S360, the method for manufacturing a display panel may further include:
and S410, forming an insulating layer on one side of the fourth electrode layer away from the driving backboard, and enabling the insulating layer to cover the second electrode layer, the sensing layer and the fourth electrode layer.
S420, forming a via hole on one side of the packaging layer and the insulating layer away from the driving backboard so as to expose the third electrode layer and the fourth electrode layer.
Referring to fig. 9, an insulating layer 260 is formed over the fourth electrode layer 320 such that the insulating layer 260 covers the second electrode layer 130, the sensing layer 310, and the fourth electrode layer 320; referring to fig. 10, vias are opened above the encapsulation layer 230 and the insulating layer 260, respectively, to expose the third electrode layer 220 and the fourth electrode layer 320.
And S430, forming a common electrode layer on one side of the insulating layer away from the driving backboard, and enabling the common electrode layer to be connected with the third electrode layer and the fourth electrode layer through the through hole.
Referring to fig. 11, a common electrode layer 270 is prepared through a mask plate above the encapsulation layer 230 and the insulating layer 260 in the display area, such that the common electrode layer 270 covers the encapsulation layer 230, the first protective layer 240, and a side of the insulating layer 260 remote from the driving backplate 10, and such that the common electrode layer 270 is connected to the third electrode layer 220 and the fourth electrode layer 320 through vias.
S440, forming a pixel definition layer on one side of the common electrode layer away from the driving backboard.
S450, etching the pixel definition layer, and forming a first groove and a second groove on one side of the pixel definition layer away from the driving backboard.
Referring to fig. 12, the pixel definition layer 28 is formed over the common electrode layer 270. Referring to fig. 13, the first recess 281 and the second recess 282 may be formed by etching over the pixel defining layer 28 through a photolithography process and a reactive ion etching process (Reactive Ion Etching, RIE) to ensure etching accuracy.
Step S360 may specifically include: and electrofluidic printing the quantum dot layer in the first groove.
Referring to fig. 3, in particular, red quantum dots 251 are formed using an electrofluidic printing technique in the first grooves 281 provided corresponding to the light emitting units 21, and green quantum dots 252 are formed using an electrofluidic printing technique in the first grooves 281 provided corresponding to the light emitting units 22.
After step S360, the method for manufacturing a display panel may further include:
s510, sequentially forming a second protective layer and a third protective layer on one side of the pixel definition layer away from the driving backboard.
And S520, etching the third protective layer to enable the third protective layer to at least cover the second groove.
Referring to fig. 14, a second protective layer 292 may be formed over the pixel defining layer 280 through aluminum oxide material to protect the quantum dot layer 250. A third protection layer 291 is formed over the second protection layer 292 through an aluminum material, and referring to fig. 15, the third protection layer 291 is precisely etched using a yellow light process and a reactive ion etching process, and a portion of the third protection layer 291 other than the second groove 282 is removed, so that the third protection layer 291 covers at least the second groove 282 and does not cover the quantum dot layer 250, to prevent occurrence of light crosstalk between adjacent light emitting units.
S530, forming a lens at one side of the second protection layer away from the pixel definition layer, corresponding to the area where the image sensing unit is located.
S540, coating a first adhesive layer on one side of the second protective layer far away from the pixel definition layer, and packaging a cover plate on one side of the first adhesive layer far away from the pixel definition layer.
Referring to fig. 4, a lens 330 is prepared above a second protective layer 292 corresponding to an area where the image sensing unit 30 is located, a first adhesive layer 40 is coated on the second protective layer 292, a cover plate 50 is disposed above the first adhesive layer 40, and the cover plate 50 and the display panel are connected through the first adhesive layer 40, so that the package of the display panel is completed.
The preparation method of the display panel provided by the embodiment of the invention can be used for preparing the display panel according to any embodiment of the invention, so that the preparation method also has the corresponding beneficial effects of the display panel, and the description is omitted here.
Note that the above is only a preferred embodiment of the present invention and the technical principle applied. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, while the invention has been described in connection with the above embodiments, the invention is not limited to the embodiments, but may be embodied in many other equivalent forms without departing from the spirit or scope of the invention, which is set forth in the following claims.

Claims (10)

1. A display panel equipped with an eye tracking function, comprising:
a drive back plate;
the light-emitting units and the image sensing units are positioned on the driving backboard and are arranged in an array manner;
the light emitting unit emits light according to the received signal, the signal received by the light emitting unit is associated with the signal output by the image sensing unit, and the light emitting unit is configured to emit light according to the target identified by the image sensing unit;
the light-emitting units comprise first light-emitting units, second light-emitting units and third light-emitting units with different light-emitting colors, the first light-emitting units, the second light-emitting units, the third light-emitting units and the image sensing units are arranged in a shape of a Chinese character 'tian' and form repeated pixel units, the repeated pixel units are arranged in an array in the display panel, and two adjacent repeated pixel units are in mirror symmetry.
2. The display panel of claim 1, wherein the display panel comprises,
the driving backboard comprises a first electrode layer and a second electrode layer;
the display panel includes:
the organic light-emitting layer is positioned on the driving backboard and covers the first electrode layer;
the third electrode layer is positioned at one side of the organic light-emitting layer away from the driving backboard;
the packaging layer is positioned at one side of the third electrode layer far away from the driving backboard;
a first protective layer disposed around the organic light emitting layer, the third electrode layer, and the sidewalls of the encapsulation layer;
the quantum dot layer is positioned on one side of the packaging layer away from the driving backboard;
the sensing layer and the fourth electrode layer are positioned on one side, far away from the driving backboard, of the second electrode layer, and the sensing layer is positioned between the second electrode layer and the fourth electrode layer;
wherein the first electrode layer, the organic light-emitting layer, the quantum dot layer, and the third electrode constitute the light-emitting unit;
the second electrode layer, the sensing layer, and the fourth electrode layer constitute the image sensing unit.
3. The display panel of claim 2, wherein the material of the first protective layer comprises silicon nitride.
4. The display panel of claim 2, wherein the first electrode layer is co-layer with the second electrode layer.
5. The display panel of claim 2, wherein the quantum dot layer comprises red quantum dots and green quantum dots.
6. The display panel according to claim 2, further comprising an insulating layer and a common electrode layer;
the insulating layer covers the second electrode layer, the sensing layer and the fourth electrode layer;
the common electrode layer is located on one side, far away from the driving backboard, of the insulating layer, and the common electrode layer is connected with the third electrode layer and the fourth electrode layer through a via hole.
7. The display panel of claim 6, further comprising a pixel definition layer comprising a first recess, the pixel definition layer being located on a side of the common electrode layer remote from the drive backplate, the quantum dot layer being located in the first recess,
a second groove is further formed between adjacent first grooves of the pixel definition layer, and the display panel further comprises a second protection layer, a third protection layer and a lens;
the second protection layer and the third protection layer are sequentially arranged on one side, far away from the driving backboard, of the pixel definition layer, and the third protection layer at least covers the second groove;
the lens is positioned on one side of the second protective layer away from the pixel definition layer and corresponds to the area where the image sensing unit is positioned.
8. The display panel of claim 7, further comprising a first glue layer and a cover plate, the cover plate being connected to the second protective layer through the first glue layer.
9. A method for manufacturing a display panel with eye tracking function is characterized by comprising the following steps:
forming a driving backboard;
forming a light emitting unit and an image sensing unit on the driving backboard, so that the light emitting unit and the image sensing unit are arranged in an array on the driving backboard;
the light emitting units comprise first light emitting units, second light emitting units and third light emitting units with different light emitting colors, the first light emitting units, the second light emitting units, the third light emitting units and the image sensing units are arranged in a shape of a Chinese character 'tian', and the first light emitting units, the second light emitting units, the third light emitting units and the image sensing units form repeated pixel units which are arranged in an array in the display panel; and two adjacent repeated pixel units are in mirror symmetry.
10. The method of claim 9, wherein the step of determining the position of the substrate comprises,
forming a drive back plate, comprising:
providing a silicon-based backboard, and forming a first electrode layer and a second electrode layer on the silicon-based backboard;
forming a light emitting unit and an image sensing unit on the driving back plate, so that the light emitting unit and the image sensing unit are arranged in an array on the driving back plate, comprising:
evaporating an organic light-emitting layer on the driving backboard to enable the organic light-emitting layer to cover the first electrode layer;
evaporating a third electrode layer on one side of the organic light-emitting layer far away from the driving backboard;
evaporating an encapsulation layer on one side of the third electrode layer far away from the driving backboard;
forming a first protection layer around the organic light-emitting layer, the third electrode layer and the side wall of the packaging layer, and etching;
electrofluidic printing a quantum dot layer on one side of the packaging layer away from the driving backboard;
and forming a sensing layer and a fourth electrode layer on one side of the second electrode layer away from the driving backboard and patterning the sensing layer and the fourth electrode layer.
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