CN111505906A - Gluing method - Google Patents
Gluing method Download PDFInfo
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- CN111505906A CN111505906A CN202010525375.5A CN202010525375A CN111505906A CN 111505906 A CN111505906 A CN 111505906A CN 202010525375 A CN202010525375 A CN 202010525375A CN 111505906 A CN111505906 A CN 111505906A
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- 238000000034 method Methods 0.000 title claims abstract description 113
- 238000004026 adhesive bonding Methods 0.000 title claims abstract description 18
- 239000000758 substrate Substances 0.000 claims abstract description 124
- 238000005507 spraying Methods 0.000 claims abstract description 71
- 238000012546 transfer Methods 0.000 claims abstract description 29
- 238000012545 processing Methods 0.000 claims abstract description 15
- 230000008569 process Effects 0.000 claims description 86
- 238000000576 coating method Methods 0.000 claims description 21
- 229920002120 photoresistant polymer Polymers 0.000 claims description 21
- 239000003292 glue Substances 0.000 claims description 16
- 239000011248 coating agent Substances 0.000 claims description 15
- 230000007480 spreading Effects 0.000 claims description 5
- 238000003892 spreading Methods 0.000 claims description 5
- 239000000853 adhesive Substances 0.000 claims 4
- 230000001070 adhesive effect Effects 0.000 claims 4
- 238000009826 distribution Methods 0.000 abstract description 11
- 230000002349 favourable effect Effects 0.000 abstract description 4
- 239000010408 film Substances 0.000 description 16
- 230000009286 beneficial effect Effects 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000012788 optical film Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000007619 statistical method Methods 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
- G03F7/162—Coating on a rotating support, e.g. using a whirler or a spinner
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
The invention provides a gluing method which comprises eccentric spraying treatment, centering spraying treatment and film forming treatment. The gluing method comprises the steps that firstly, the bottom center of a spraying part is enabled to be at a first position of the surface of a substrate to be processed through a position control part, the linear distance between the first position and the center of the substrate to be processed is larger than 0, and then the eccentric spraying processing is carried out; after the eccentric spraying treatment is finished, the center of the bottom of the spraying part is opposite to the center of the surface of the substrate to be treated so as to carry out the eccentric spraying treatment, which is favorable for forming annular and central point distribution of a pattern transfer medium on the surface of the substrate to be treated, and further forming a good uniform and color-difference-free light resistance on the surface of the substrate to be treated through the film forming treatment.
Description
Technical Field
The invention relates to the technical field of semiconductor equipment, in particular to a gluing method.
Background
The wafer coating photoresist equipment is one of the core equipments of the photolithography process in the semiconductor manufacturing field, in which the glue coating unit is the most important functional unit. After the wafer passes through the glue coating unit, the surface of the wafer is coated with a photoresist with a target thickness, and whether the photoresist is coated uniformly or not directly influences the stability of the line width in the subsequent exposure. With the continuous reduction of the line width of the semiconductor device, the requirement on the uniformity of the photoresist coating is more and more strict, so that the improvement of the process effect of the gluing unit is particularly important.
Patent application publication No. CN110879509A discloses a glue coating method, in which a shower head having a plurality of spray holes is disposed above a wafer, and then the wafer is rotated at a rotation speed and for a rotation time, so that the photoresist on the surface of the wafer has good uniformity. However, this method is only suitable for coating a photoresist with low dynamic viscosity, and a photoresist with high dynamic viscosity is easy to block the spray holes, so that the coating uniformity cannot be ensured, and even the normal coating process is hindered.
Therefore, it is necessary to develop a new glue application method to solve the above problems in the prior art.
Disclosure of Invention
The invention aims to provide a gluing method for uniformly and colorlessly coating a pattern transfer medium with dynamic viscosity not lower than 4000 centipoises on the surface of a substrate to be processed by a gluing device.
In order to achieve the above object, the glue spreading device of the present invention includes a carrier sheet portion, a spraying portion, a position control portion, and a rotation driving portion, and the glue spreading method includes:
s1: after the substrate to be processed is loaded on the loading piece part, the bottom center of the spraying part is enabled to be opposite to a first position of the surface of the substrate to be processed through the position control part, and the linear distance between the first position and the center of the substrate to be processed is larger than 0;
s2: the substrate to be processed is driven to rotate by the rotation driving part while the substrate to be processed is sprayed by the spraying part so as to carry out eccentric spraying processing;
s3: after the eccentric spraying treatment is finished, the bottom center of the spraying part is enabled to be opposite to the center of the surface of the substrate to be treated through the position control part;
s4: the substrate to be processed is driven to rotate by the rotary driving part while the substrate to be processed is sprayed by the spraying part so as to carry out centering spraying processing;
s5: and after the centering spraying treatment is finished, the rotation driving part drives the substrate to be treated to rotate so as to carry out film forming treatment.
The gluing method has the beneficial effects that: in the step S1, the position control part makes the bottom center of the spraying part directly face the first position of the surface of the substrate to be processed, the linear distance between the first position and the center of the substrate to be processed is greater than 0, so as to perform the eccentric spraying processing in the step S2, and after the eccentric spraying processing is completed, the bottom center of the spraying part is directly face the center of the surface of the substrate to be processed in the step S3, so as to further perform the centered spraying processing in the step S4, which is beneficial for a pattern transfer medium to form a ring-shaped and center point-shaped distribution on the surface of the substrate to be processed, so as to further form a good uniform and color-difference-free photoresist on the surface of the substrate to be processed through the film forming processing.
Preferably, the surface of the substrate to be processed is circular, and the diameter is 200-400 mm. The beneficial effects are that: is favorable for forming uniform and color-difference-free photoresist.
Further preferably, in step S1, the position controller sets a linear distance between the first position and the center of the surface of the substrate to be processed to 40 to 60% of the radius of the substrate to be processed. The beneficial effects are that: the method is favorable for the pattern transfer medium to form reasonable annular and central point-shaped distribution on the surface of the substrate to be processed.
Further preferably, the step S1 further includes the step of setting a vertical distance from the bottom of the spraying part to the surface of the substrate to be processed by the position control part to be 5-15 mm.
Further preferably, in step S2, the substrate to be processed is driven by the rotation driving part to continuously rotate at a speed of 30-100 rpm for 10-30 seconds, and the flow rate of the pattern transfer medium is controlled to be 0.2-4 ml/sec by the spraying part, so as to complete the eccentric spraying process. The beneficial effects are that: the method is favorable for the pattern transfer medium to form annular distribution on the surface of the substrate to be processed.
Further preferably, in step S4, the substrate to be processed is driven by the rotation driving part to continuously rotate at a speed of 30-100 rpm for 10-30 seconds, and the flow rate of the pattern transfer medium is controlled to be 0.2-4 ml/sec by the spraying part, so as to complete the centered spraying process. The beneficial effects are that: the pattern transfer medium is further beneficial to form central point distribution on the surface of the substrate to be processed.
Further preferably, in step S5, the number of film formation processes is at least 2 to control the thickness and uniformity of the formed photoresist.
Preferably, the film forming process includes a first film forming process, and in step S5, after the centering spraying process is completed, the to-be-processed substrate is subjected to a first driving process by the rotation driving portion to drive the to-be-processed substrate to rotate at a speed of 200-.
Further preferably, the film forming process further includes a second film forming process, and in step S5, after the first film forming process is completed, the to-be-processed substrate is subjected to a second driving process by the rotation driving portion, so as to drive the to-be-processed substrate to rotate at a speed of 1000-.
Further preferably, the substrates to be processed are rotated at the same rate in any one of the first drive process and the second drive process performed on the substrates to be processed by the rotation drive unit.
Further preferably, any one of the first drive processing and the second drive processing is composed of a plurality of sub drive processing performed in sequence, and the rotation drive section drives the substrate to be processed to rotate at different rates through different sub drive processing.
Further preferably, the rotation rate of the substrate to be processed is increased as the number of times of the sub-driving processes increases.
Drawings
FIG. 1 is a flow chart of a gluing method according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a glue spreading device according to an embodiment of the invention;
FIG. 3 is a schematic view illustrating an operating state of a substrate to be processed according to an embodiment of the present invention;
FIG. 4 is a schematic diagram illustrating a distribution of a pattern transfer medium on a surface of a substrate to be processed according to an embodiment of the present invention;
FIG. 5 is a schematic view of another distribution of a pattern transfer medium on a surface of a substrate to be processed according to an embodiment of the present invention;
fig. 6 is a photograph of a gummed substrate in accordance with an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below, and it is obvious that the described embodiments are a part of the embodiments of the present invention, but not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention. Unless defined otherwise, technical or scientific terms used herein shall have the ordinary meaning as understood by one of ordinary skill in the art to which this invention belongs. As used herein, the word "comprising" and similar words are intended to mean that the element or item listed before the word covers the element or item listed after the word and its equivalents, but does not exclude other elements or items.
Aiming at the problems in the prior art, the embodiment of the invention provides a gluing method, which is used for uniformly and colorlessly coating a pattern transfer medium with the dynamic viscosity not lower than 4000 centipoises on the surface of a substrate to be processed through a gluing device.
Fig. 1 is a flowchart of a gluing method according to an embodiment of the present invention. Referring to fig. 1, the gluing method includes:
s1: after the substrate to be processed is loaded on the loading piece part, the center of the bottom of the spraying part is enabled to be opposite to the first position of the surface of the substrate to be processed through the position control part;
s2: the substrate to be processed is driven to rotate by the rotation driving part while the substrate to be processed is sprayed by the spraying part so as to carry out eccentric spraying processing;
s3: after the eccentric spraying treatment is finished, the bottom center of the spraying part is enabled to be opposite to the center of the surface of the substrate to be treated through the position control part;
s4: the substrate to be processed is driven to rotate by the rotary driving part while the substrate to be processed is sprayed by the spraying part so as to carry out centering spraying processing;
s5: and after the centering spraying treatment is finished, the rotation driving part drives the substrate to be treated to rotate so as to carry out film forming treatment.
The centered spraying treatment in the embodiment of the invention refers to the spraying treatment which is carried out by the rotation driving part driving the substrate to be treated to rotate after the bottom center of the spraying part is over against the center of the substrate to be treated.
The eccentric spraying treatment in the embodiment of the invention refers to the spraying treatment which is carried out by the rotation driving part driving the substrate to be treated to rotate after the bottom center of the spraying part is over against the first position of the surface of the substrate to be treated.
Fig. 2 is a schematic structural diagram of a glue spreading device according to an embodiment of the invention. Fig. 3 is a schematic view illustrating an operating state of a substrate to be processed according to an embodiment of the present invention.
Referring to fig. 2 and 3, the glue application device 2 includes a carrier sheet portion 21, a spraying portion 22, a position control portion 23, and a rotation driving portion 24. A substrate 31 to be processed is loaded on the carrier sheet portion 21 to be coated with a pattern transfer medium. The meaning of the pattern transfer medium is: the desired pattern is transferred from the reticle to the medium on the substrate to be processed.
In some embodiments of the present invention, the diameter of the substrate 31 to be processed is 200-400 mm, and the kinematic viscosity of the pattern transfer medium is not lower than 4000 centipoises.
In embodiments 1 to 3 of the present invention, the substrate 31 to be processed is a wafer, the pattern transfer medium is a photoresist, the dynamic viscosity of each photoresist is 4000 centipoise, 5000 centipoise, and 6000 centipoise, and the diameter of each wafer is 200 millimeters, 300 millimeters, and 400 millimeters, respectively.
In step S1 of some embodiments of the present invention, the substrate 31 to be processed is loaded on the carrying sheet 21 by vacuum suction.
Specifically, referring to fig. 2 and 3, the carrier sheet portion 21 is connected to a vacuum pump 25 and includes a vacuum chuck (not shown) disposed at the top, and the vacuum chuck (not shown) is communicated with the vacuum pump 25 to pump air through the vacuum pump 25, so that the substrate 31 to be processed is adsorbed to the vacuum chuck (not shown) disposed at the top of the carrier sheet portion 21. The specific structure of the carrier part 21 is well known to those skilled in the art, and will not be described herein.
In step S1 of some embodiments of the present invention, the position control part 23 makes the bottom center of the spraying part 22 directly face a first position of the surface of the substrate 31 to be processed, and the linear distance from the first position to the center of the substrate 31 to be processed is greater than 0.
Referring to fig. 2 and 3, the spraying part 22 includes a nozzle 221 at a bottom, and the position control part 23 is connected to the spraying part 22 to drive the spraying part 22 to move, thereby controlling the position of the nozzle 221.
In some embodiments of the present invention, the position control part 23 includes a suspension arm and a driving electric cylinder connected to each other, and the specific structure and assembly manner are referred to in CN109807003A, which is not described herein again.
In some embodiments of the present invention, the step S1 further includes: the vertical distance from the bottom of the spraying part 22 to the surface of the substrate 31 to be processed is controlled to be 5-15 mm by the position control part 23.
In embodiments 1 to 3 of the present invention, the vertical distance from the bottom of the spraying part 22 to the wafer is controlled by the position control part 23 to be 10 mm.
FIG. 4 is a schematic diagram of a distribution of a pattern transfer medium on a surface of a substrate to be processed according to some embodiments of the present invention.
In the embodiment of the present invention, a linear distance between the first position and the center of the substrate 31 to be processed is greater than 0, so as to facilitate the annular distribution of the pattern transfer medium on the surface of the substrate 31 to be processed.
Specifically, referring to fig. 2 and 4, the surface of the substrate 31 to be processed is circular, the bottom center of the nozzle 221 faces the first position of the surface of the substrate 31 to form a projected point 41, and in step S1, the linear distance L between the projected point 41 and the center 311 of the surface of the substrate 31 to be processed is 40-60% of the radius of the substrate 31 to be processed by the position control unit 23, so as to facilitate the pattern transfer medium to be annularly distributed along the annular surface 42 on the surface of the substrate 31 to be processed during the eccentric spraying process performed in the subsequent step S2.
In embodiments 1 to 3 of the present invention, the linear distances between the first position and the wafer center are 40%, 50%, and 60% of the wafer diameter, respectively.
In step S2 of some embodiments of the present invention, the substrate 31 to be processed is driven by the rotation driving part 24 to continuously rotate at a speed of 30-100 rpm for 10-30 seconds, and the flow rate of the pattern transfer medium is controlled by the spraying part 22 to be 0.2-4 ml/sec, so as to complete the eccentric spraying process, thereby facilitating the pattern transfer medium to form a ring-shaped distribution on the surface of the substrate 31 to be processed.
Specifically, referring to fig. 2 and 3, the rotation driving portion 24 is connected to a vacuum chuck (not shown) at the top of the carrier portion 21 to drive the substrate 31 to be processed to rotate around its central axis. The specific structure and assembly of the rotation driving portion 24 are well known to those skilled in the art, and will not be described herein.
Further, the spraying part 22 further includes a liquid guide line 222 to supply the pattern transfer medium from an external container to the nozzle 221.
In step S2 of examples 1 to 3 of the present invention, the continuous rotation rates were 30 rpm/sec, 50 rpm/sec, and 100 rpm/sec, and the continuous rotation times were 20 sec, 10 sec, and 30 sec, respectively. The flow rate of the photoresist supplied from the nozzle 221 was 0.5 ml/sec.
FIG. 5 is a schematic view of another distribution of a pattern transfer medium on a surface of a substrate to be processed according to some embodiments of the present invention.
In step S3 of some embodiments of the present invention, referring to fig. 2 and 5, the center of the bottom of the nozzle 221 faces the center 311 of the substrate 31 to be processed, and then the center spraying process of step S4 is performed, so that the pattern transfer medium is distributed on the surface of the substrate 31 to be processed along the circular surface 51 in a center point shape.
In step S4 of some embodiments of the present invention, the substrate 31 to be processed is driven by the rotation driving part 24 to continuously rotate at a speed of 30-100 rpm for 10-30 seconds, and the flow rate of the pattern transferring medium is controlled to be 0.2-4 ml/sec by the spraying part 22, so as to complete the centered spraying process.
In step S4 of examples 1 to 3 of the present invention, the continuous rotation rates were 30 rpm/sec, 50 rpm/sec, and 100 rpm/sec, and the continuous rotation times were 20 sec, 10 sec, and 30 sec, respectively. The flow rate of the photoresist supplied from the nozzle 221 was 0.5 ml/sec.
In step S5 according to some embodiments of the present invention, the number of film forming processes is at least 2, so as to control the thickness and uniformity of the formed photoresist.
In some embodiments of the present invention, the film formation process includes a first film formation process and a second film formation process.
In some embodiments of the present invention, after the centered spraying process is completed, the rotation driving portion 24 performs a first driving process on the substrate 31 to be processed to drive the substrate 31 to be processed to rotate at a speed of 200-.
In the first film formation process according to some embodiments of the present invention, the substrates 31 to be processed rotate at the same speed during the first driving process of the substrates 31 to be processed by the rotation driving unit 24.
In the first film formation process according to some embodiments of the present invention, the first driving process includes a plurality of sub-driving processes, and the rotation driving unit 24 drives the substrate 31 to be processed to perform the plurality of sub-driving processes.
In some embodiments of the present invention, the first driving process is composed of a plurality of sub-driving processes performed sequentially, and the rotation driving portion 24 drives the substrate 31 to be processed to rotate at different speeds through different sub-driving processes.
During the first driving process of some embodiments of the present invention, the rotation rate of the substrate to be processed 31 increases as the number of times of the sub-driving processes increases. Specifically, the plurality of sub-driving processes are sequentially and continuously performed. The term "sequentially and continuously" means that the rotation of the substrate to be processed 31 is not stopped during the switching of the different sub-driving processes.
Specifically, the first driving process in examples 1 to 3 of the present invention is composed of the first sub-driving process and the second sub-driving process, which are sequentially and continuously performed.
In embodiment 1 of the present invention, the rotation driving unit 24 drives the wafer to rotate continuously for 5 seconds at a speed of 200 rpm to complete the first sub-driving process, and then the rotation speed is increased to 550 rpm to rotate continuously for 5 seconds to complete the second sub-driving process.
In embodiment 2 of the present invention, the rotation driving portion 24 drives the wafer to rotate continuously for 5 seconds at a speed of 300 rpm to complete the first sub-driving process, and then the rotation speed is increased to 700 rpm to rotate continuously for 5 seconds to complete the second sub-driving process.
In embodiment 3 of the present invention, the rotation driving portion 24 drives the wafer to rotate continuously for 5 seconds at a speed of 400 rpm to complete the first sub-driving process, and the rotation speed is increased to 800 rpm to rotate continuously for 5 seconds to complete the second sub-driving process.
In some embodiments of the present invention, after the first film formation process is completed, the rotation driving portion 24 performs a second driving process on the substrate 31 to be processed, so as to drive the substrate 31 to be processed to rotate at a speed of 1000-.
In some embodiments of the present invention, the second driving process is composed of a plurality of sub-driving processes performed sequentially, and the rotation driving portion 24 drives the substrate 31 to be processed to rotate at different speeds through different sub-driving processes.
During the second driving process of some embodiments of the present invention, the rotation rate of the substrate to be processed 31 increases as the number of times of the sub-driving processes increases. Specifically, the plurality of sub-driving processes are sequentially and continuously performed. The term "sequentially and continuously" means that the rotation of the substrate to be processed 31 is not stopped during the switching of the different sub-driving processes.
Specifically, the second driving process in examples 1 to 3 of the present invention is composed of the first sub-driving process and the second sub-driving process, which are sequentially and continuously performed.
In embodiment 1 of the present invention, the rotation driving unit 24 drives the wafer to rotate continuously for 5 seconds at a speed of 1000 rpm to complete the first sub-driving process, and then the rotation speed is increased to 1570 rpm to rotate continuously for 50 seconds to complete the second sub-driving process.
In embodiment 2 of the present invention, the rotation driving portion 24 drives the wafer to rotate continuously for 5 seconds at a speed of 1500 rpm to complete the first sub-driving process, and then the rotation speed is increased to 2050 rpm and rotates continuously for 50 seconds to complete the second sub-driving process.
In embodiment 3 of the present invention, the rotation driving portion 24 drives the wafer to rotate continuously at a speed of 1800 rpm for 5 seconds to complete the first sub-driving process, and then the rotation speed is increased to 3150 rpm and rotates continuously for 50 seconds to complete the second sub-driving process.
In the embodiment of the invention, the gummed substrate obtained by the gumming method is observed by using an optical microscope. The specific observation method is a conventional technical means used by those skilled in the art, and is not described herein in detail.
Fig. 6 is a photograph of the gummed substrate of example 1 of the present invention.
Taking the glue-coated substrate obtained in example 1 as an example, referring to fig. 6, the color of the photoresist on the surface of the glue-coated substrate 61 is uniform without color difference and without abnormal phenomena such as wind marks.
In the embodiment of the invention, an optical film thickness meter with the model number of F50 produced by American Filmetrics company is adopted to carry out annular 49-point measurement on the photoresist on the surface of the gluing substrate so as to count the average thickness and uniformity of the photoresist. The specific measurement and statistical methods are conventional technical means used by those skilled in the art and are not described herein in detail.
In the embodiment of the invention, the average thickness of the photoresist on the surface of the gluing substrate is 10-30 microns, the uniformity is less than 3%, and the mass production requirement can be met.
Specifically, in examples 1 to 3 of the present invention, the average thicknesses of the photoresist were 14.9 micrometers, 20.8 micrometers, and 26.3 micrometers, respectively, and the uniformity was less than 3%.
Although the embodiments of the present invention have been described in detail hereinabove, it is apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it is to be understood that such modifications and variations are within the scope and spirit of the present invention as set forth in the following claims. Moreover, the invention as described herein is capable of other embodiments and of being practiced or of being carried out in various ways.
Claims (12)
1. A glue coating method for coating a pattern transfer medium on the surface of a substrate to be processed by a glue coating device, wherein the glue coating device comprises a carrying sheet part, a spraying part, a position control part and a rotary driving part, and is characterized in that the dynamic viscosity of the pattern transfer medium is not lower than 4000 centipoises, and the glue coating method comprises the following steps:
s1: after the substrate to be processed is loaded on the loading piece part, the bottom center of the spraying part is enabled to be opposite to a first position of the surface of the substrate to be processed through the position control part, and the linear distance between the first position and the center of the substrate to be processed is larger than 0;
s2: the substrate to be processed is driven to rotate by the rotation driving part while the substrate to be processed is sprayed by the spraying part so as to carry out eccentric spraying processing;
s3: after the eccentric spraying treatment is finished, the bottom center of the spraying part is enabled to be opposite to the center of the surface of the substrate to be treated through the position control part;
s4: the substrate to be processed is driven to rotate by the rotary driving part while the substrate to be processed is sprayed by the spraying part so as to carry out centering spraying processing;
s5: and after the centering spraying treatment is finished, the rotation driving part drives the substrate to be treated to rotate so as to carry out film forming treatment.
2. The gluing method as recited in claim 1, wherein the substrate to be processed has a circular surface and a diameter of 200-400 mm.
3. The method according to claim 2, wherein in step S1, the linear distance between the first position and the center of the surface of the substrate to be processed is 40-60% of the radius of the substrate to be processed by the position control part.
4. The paste coating method according to claim 3, wherein the step S1 further comprises making the vertical distance from the bottom of the spraying part to the surface of the substrate to be processed by the position control part be 5-15 mm.
5. A method for coating adhesive according to claim 3, wherein in step S2, the substrate to be processed is driven by the rotary driving part to rotate continuously at a speed of 30-100 rpm for 10-30 seconds, and the flow rate of the pattern transfer medium is controlled by the spraying part to be 0.2-4 ml/sec, so as to complete the eccentric spraying process.
6. The glue spreading method according to claim 5, wherein in the step S4, the substrate to be processed is driven by the rotary driving part to continuously rotate at a speed of 30-100 rpm for 10-30 seconds, and the flow rate of the pattern transfer medium is controlled to be 0.2-4 ml/sec by the spraying part, so as to complete the centering spraying process.
7. The method for coating adhesive according to claim 3, wherein in step S5, the number of film forming processes is at least 2 to control the thickness and uniformity of the formed photoresist.
8. The method for coating adhesive according to claim 7, wherein the film forming process includes a first film forming process, and in step S5, after the center spraying process is completed, the to-be-processed substrate is subjected to a first driving process by the rotation driving part to drive the to-be-processed substrate to rotate at a speed of 200 and 1000 rpm until the pattern transfer medium is fully spread on the surface of the to-be-processed substrate to complete the first film forming process.
9. The method for gluing according to claim 8, wherein the film forming process further comprises a second film forming process, and in step S5, after the first film forming process is completed, the rotation driving part performs a second driving process on the substrate to be processed to drive the substrate to be processed to rotate at a speed of 1000 and 3500 rpm until the pattern transfer medium is uniformly coated on the surface of the substrate to be processed to complete the second film forming process.
10. A method for the coating of adhesive according to claim 9, wherein the substrate to be processed is rotated at the same speed in any one of the first driving process and the second driving process to the substrate to be processed by the rotation driving section.
11. The method according to claim 9, wherein any one of the first drive process and the second drive process is composed of a plurality of sub-drive processes performed in sequence, and the rotation drive section rotates the substrate to be processed at different rates by the different sub-drive processes.
12. The paste coating method according to claim 11, wherein the rotation rate of the substrate to be processed is increased as the number of times of the sub-driving processes increases.
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| CN202010525375.5A CN111505906B (en) | 2020-06-10 | 2020-06-10 | Gluing method |
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| CN202010525375.5A CN111505906B (en) | 2020-06-10 | 2020-06-10 | Gluing method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117492328A (en) * | 2023-12-29 | 2024-02-02 | 粤芯半导体技术股份有限公司 | Photoresist coating method, device, equipment and medium based on multiple spraying |
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| JP2002361156A (en) * | 2001-06-06 | 2002-12-17 | Tokyo Electron Ltd | Coating film forming device and its method |
| TW200710561A (en) * | 2005-07-28 | 2007-03-16 | Hoya Corp | Mask blank fabrication method and exposure mask fabrication method |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN117492328A (en) * | 2023-12-29 | 2024-02-02 | 粤芯半导体技术股份有限公司 | Photoresist coating method, device, equipment and medium based on multiple spraying |
| CN117492328B (en) * | 2023-12-29 | 2024-03-29 | 粤芯半导体技术股份有限公司 | Photoresist coating method, device, equipment and medium based on multiple spraying |
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|---|---|
| CN111505906B (en) | 2023-09-05 |
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