CN111501001A - Film coating device for irregular polyhedron one-furnace method film coating - Google Patents
Film coating device for irregular polyhedron one-furnace method film coating Download PDFInfo
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- CN111501001A CN111501001A CN202010440849.6A CN202010440849A CN111501001A CN 111501001 A CN111501001 A CN 111501001A CN 202010440849 A CN202010440849 A CN 202010440849A CN 111501001 A CN111501001 A CN 111501001A
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- connecting rod
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4581—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber characterised by material of construction or surface finish of the means for supporting the substrate
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Coating Apparatus (AREA)
Abstract
The invention discloses a film coating device for irregular polyhedron one-furnace method film coating, and belongs to the technical field of optical element film coating devices. The film coating device for the irregular polyhedron one-furnace coating comprises a workpiece disc, wherein the center of the bottom of the workpiece disc is rotatably connected with a first connecting rod, the bottom end of the first connecting rod is fixedly connected with a baffle, the top end of the first connecting rod penetrates through the workpiece disc and is connected with a clamp through a second connecting rod, at least one end of the second connecting rod is hinged, one side of the clamp, which is far away from the second connecting rod, is fixedly connected with a third connecting rod, and the third connecting rod is fixedly connected with an output shaft of an external motor; the workpiece disc is also provided with a plurality of windows which are in one-to-one correspondence with the shapes and sizes of the coating surfaces required by the polyhedral workpiece. According to the film coating device for the one-furnace coating of the irregular polyhedron, provided by the invention, the one-furnace coating of the polyhedron workpiece can be realized only by one-time clamping operation on the polyhedron workpiece in the whole film coating process, and the film coating efficiency is higher.
Description
Technical Field
The invention relates to the technical field of optical element coating devices, in particular to a coating device for irregular polyhedron one-furnace coating.
Background
The aim of improving the coating efficiency and the coating quality and expanding the coating application range is to pursue in the technical field of vacuum coating. In recent years, with the rapid development of the photoelectric industry, people have made higher demands on the coating technology. Among them, how to be able to accommodate substrates of different sizes and shapes without affecting the lateral uniformity is one of the important points in the development of the plating technology. In order to improve the uniformity of the film thickness of each surface of the polyhedron, people usually take out and turn over the polyhedron after plating one surface and then plate other surfaces, and the polyhedron workpiece needs to be repeatedly clamped, so that the time and capital cost is increased undoubtedly, and the film plating risk and the film plating difficulty are also improved.
Disclosure of Invention
The invention aims to provide a coating device for irregular polyhedron one-furnace coating, which aims to solve the problem that the time and the capital cost are increased because a polyhedron workpiece needs to be taken out, turned over and clamped after one surface is coated when the polyhedron workpiece is coated at present.
In order to solve the technical problem, the invention provides a film coating device for irregular polyhedron one-furnace coating, which comprises a workpiece disc, wherein the center of the bottom of the workpiece disc is rotatably connected with a first connecting rod, the bottom end of the first connecting rod is fixedly connected with a baffle, the top end of the first connecting rod penetrates through the workpiece disc and is connected with a clamp through a second connecting rod, at least one end of the second connecting rod is hinged, the clamp is used for placing a polyhedron workpiece to be coated, one side of the clamp, far away from the second connecting rod, is fixedly connected with a third connecting rod, and the third connecting rod is fixedly connected with an output shaft of an external motor; the workpiece disc is also provided with a plurality of windows, and the windows correspond to the shapes and the sizes of the coating surfaces of the polyhedral workpiece one by one.
Optionally, the second link and the third link are respectively located on two opposite edges or faces of the clamp.
Optionally, the workpiece tray is a cylindrical shell with an opening at one end, a plurality of positioning grooves are formed in the side wall of the workpiece tray, the positioning grooves correspond to the windows one to one, and the far end of the third connecting rod penetrates through the positioning grooves to be connected with an external motor.
Optionally, a positioning nut is fixedly connected to a distal end of the third connecting rod, and an outer diameter of the positioning nut is greater than a width of the positioning groove.
Optionally, a spring is movably sleeved on the outer surface of the third connecting rod, the spring is in a compressed state in an initial state, and two ends of the spring respectively abut against the inner walls of the fixture and the workpiece tray; the positioning nut is connected to the outer surface of the far end of the third connecting rod through threads.
Optionally, the baffle is fan-shaped.
Optionally, the fixture is of a frame structure, the shape and the size of the fixture are consistent with those of the polyhedral workpiece to be coated, a placing plate is hinged to one surface of the fixture, and edges of other surfaces of the fixture are angle steel.
Optionally, the polyhedral workpiece is a triangular prism, the placing plate is arranged on the side face of the fixture, the placing plate is fixedly connected with the third connecting rod, and the edge opposite to the placing plate is hinged to the second connecting rod.
Optionally, the workpiece tray is provided with 4 windows.
The coating device for the irregular polyhedron one-furnace coating provided by the invention has the following beneficial effects:
(1) the coating device for the irregular polyhedron one-furnace coating has the advantages that the coating device has the function of supporting a polyhedron workpiece, and can be immediately turned over to the next surface for coating after the polyhedron is coated with one surface, the whole coating process only needs to finish one-time clamping operation on the polyhedron workpiece, the one-furnace coating on the polyhedron workpiece can be realized, the structure is simple, the operation is convenient, and the coating device has higher coating efficiency compared with the conventional coating mode;
(2) the clamping and coating operation can be carried out on polyhedral workpieces with different sizes and shapes, and the application range is wide.
Drawings
FIG. 1 is a schematic structural diagram of a coating device for one-furnace coating of irregular polyhedrons, provided by the invention;
FIG. 2 is a schematic bottom structure diagram of a coating device for one-furnace coating of irregular polyhedrons according to the present invention.
Detailed Description
The following describes a coating device for irregular polyhedron one-furnace coating according to the present invention in further detail with reference to the accompanying drawings and specific examples. Advantages and features of the present invention will become apparent from the following description and from the claims. It is to be noted that the drawings are in a very simplified form and are not to precise scale, which is merely for the purpose of facilitating and distinctly claiming the embodiments of the present invention.
Example one
The invention provides a coating device for irregular polyhedron one-furnace coating, which has a structure shown in figure 1. The device comprises a workpiece disc 1, wherein a first connecting rod 2 is rotatably connected to the center of the bottom of the workpiece disc 1, a baffle 3 is fixedly connected to the bottom end of the first connecting rod 2, the top end of the first connecting rod 2 penetrates through the workpiece disc 1 and is connected with a clamp 5 through a second connecting rod 4, at least one end of the second connecting rod 4 is hinged, the clamp 5 is used for placing a polyhedral workpiece 6 to be coated, a third connecting rod 7 is fixedly connected to one side, away from the second connecting rod 4, of the clamp 5, and the third connecting rod 7 is fixedly connected with an output shaft of an external motor; the workpiece disc 1 is also provided with a plurality of windows 8, and the windows 8 correspond to the shapes and sizes of the coating surfaces required by the polyhedral workpiece 6 one by one. Preferably, the baffle 3 is fan-shaped. The baffle 3 can prevent the molecules of the coating material from evaporating during coating and depositing on the back of the polyhedral workpiece 6 through the window 8.
In particular, the second link 4 and the third link 7 are located on two opposite edges or faces, respectively, of the clamp 5.
A spring 11 is movably sleeved on the outer surface of the third connecting rod 7, the spring 11 is in a compressed state in an initial state, and two ends of the spring 11 respectively abut against the clamp 5 and the inner wall of the workpiece disc 1; the positioning nut 10 is screwed to the outer surface of the distal end of the third link 7. The positioning nut 10 can adjust the protruding length of the third connecting rod 7, so that the clamp can be suitable for polyhedral workpieces and clamps 5 with different sizes.
The fixture 5 is of a frame structure, the shape and the size of the fixture are consistent with those of the polyhedral workpiece 6 to be coated, one surface of the fixture 5 is hinged with a placing plate 50, edges of other surfaces are all angle steel, and preferably, the placing plate 50 is opened and closed through a lock catch (not shown in the figure).
The clamp 5 can be made into different sizes and shapes so as to clamp polyhedral workpieces with different sizes and shapes. Correspondingly, the shape of the window 8 in the workpiece tray 1 can also be different.
In the first embodiment, the polyhedral workpiece 6 is a triangular prism, and the overall shape of the jig 5 is also a triangular prism. The placing plate 50 is arranged on the side surface of the clamp 5, the placing plate 50 is fixedly connected with the third connecting rod 7, and the opposite edges of the placing plate 50 are hinged with the second connecting rod 4. The workpiece disc 1 is provided with 4 windows 8, and the 4 windows 8 are respectively triangular, rectangular and rectangular in shape.
The working principle is as follows:
when coating is needed, the polyhedral workpiece 6 to be coated is placed in the clamp 5, the surface to be coated of the polyhedral workpiece faces the bottom surface of the clamp 5, the third connecting rod 7 is supported and rotates relative to the workpiece disc 1, so that the bottom surface of the clamp 5 is placed on the window 8 needed to be used, the baffle 3 is rotated, and the window 8 needed to be used is exposed; and coating one surface of the polyhedral workpiece 6. After one surface is plated, starting an external motor, and turning over the clamp 5; and repeating the steps until the coating operation is finished on the polyhedral workpiece 6.
When coating the films on the polyhedral workpieces with different shapes, the clamp 5 with the corresponding size and shape is used, each surface of the clamp 5 is aligned to the corresponding window 8 by adjusting the positioning nut 10, and the steps are repeated.
The coating device for the irregular polyhedron one-furnace coating has the function of supporting the polyhedron workpiece, and can be immediately turned to the next surface for coating after the polyhedron is coated with one surface, and the whole coating process only needs to finish one-time clamping operation on the polyhedron workpiece, so that the one-furnace coating of the polyhedron workpiece can be realized, the structure is simple, the operation is convenient, and the coating device has higher coating efficiency compared with the conventional coating mode.
The above description is only for the purpose of describing the preferred embodiments of the present invention, and is not intended to limit the scope of the present invention, and any variations and modifications made by those skilled in the art based on the above disclosure are within the scope of the appended claims.
Claims (9)
1. The coating device for the one-furnace coating of the irregular polyhedron is characterized by comprising a workpiece disc (1), wherein the center of the bottom of the workpiece disc (1) is rotatably connected with a first connecting rod (2), the bottom end of the first connecting rod (2) is fixedly connected with a baffle (3), the top end of the first connecting rod penetrates through the workpiece disc (1) and is connected with a clamp (5) through a second connecting rod (4), at least one end of the second connecting rod (4) is hinged, the clamp (5) is used for placing a polyhedral workpiece (6) to be coated, one side, far away from the second connecting rod (4), of the clamp (5) is fixedly connected with a third connecting rod (7), and the third connecting rod (7) is fixedly connected with an output shaft of an external motor; the workpiece disc (1) is also provided with a plurality of windows (8), and the windows (8) correspond to the shapes and sizes of the coating surfaces required by the polyhedral workpiece (6) one by one.
2. The coating device for irregular polyhedron one-furnace coating according to claim 1, characterized in that the second connecting rod (4) and the third connecting rod (7) are respectively located on two opposite edges or faces of the fixture (5).
3. The coating device for irregular polyhedron one-furnace coating according to claim 1, wherein the workpiece tray (1) is a cylindrical shell with an opening at one end, a plurality of positioning grooves (9) are formed in the side wall of the workpiece tray (1), the positioning grooves (9) correspond to the positions of the windows (8) one by one, and the far end of the third connecting rod (7) penetrates through the positioning grooves (9) and is connected with an external motor.
4. The coating device for irregular polyhedron one-furnace coating according to claim 3, wherein the distal end of the third connecting rod (7) is fixedly connected with a positioning nut (10), and the outer diameter of the positioning nut (10) is larger than the width of the positioning groove (9).
5. The coating device for irregular polyhedron one-furnace coating according to claim 4, characterized in that the outer surface of the third connecting rod (7) is movably sleeved with a spring (11), the spring (11) is in a compressed state in an initial state, and two ends of the spring respectively abut against the clamp (5) and the inner wall of the workpiece tray (1); the positioning nut (10) is connected to the outer surface of the far end of the third connecting rod (7) through threads.
6. The coating device for irregular polyhedron one-furnace coating according to claim 1, characterized in that the baffle (3) is fan-shaped.
7. The coating device for the one-furnace coating of the irregular polyhedrons, according to claim 1, is characterized in that the fixture (5) is of a frame structure, the shape and the size of the fixture are consistent with those of the polyhedral workpiece (6) to be coated, one surface of the fixture (5) is hinged with a placing plate (50), and edges of other surfaces are all angle steel.
8. The coating device for irregular polyhedron one-furnace coating according to claim 7, wherein the polyhedron workpiece (6) is a triangular prism, the placing plate (50) is arranged on the side of the clamp (5), the placing plate (50) is fixedly connected with the third connecting rod (7), and the opposite edges of the placing plate (50) are hinged with the second connecting rod (4).
9. The coating device for irregular polyhedron one-furnace coating according to claim 8, characterized in that 4 windows (8) are opened on the workpiece tray (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010440849.6A CN111501001B (en) | 2020-05-22 | 2020-05-22 | Film coating device for irregular polyhedron one-furnace method film coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010440849.6A CN111501001B (en) | 2020-05-22 | 2020-05-22 | Film coating device for irregular polyhedron one-furnace method film coating |
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| Publication Number | Publication Date |
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| CN111501001A true CN111501001A (en) | 2020-08-07 |
| CN111501001B CN111501001B (en) | 2022-05-06 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202010440849.6A Active CN111501001B (en) | 2020-05-22 | 2020-05-22 | Film coating device for irregular polyhedron one-furnace method film coating |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06264226A (en) * | 1993-03-15 | 1994-09-20 | Nikon Corp | Ion plating device |
| CN102644058A (en) * | 2012-04-23 | 2012-08-22 | 北京遥测技术研究所 | Substrate overturning device for vacuum coating equipment |
| CN208980788U (en) * | 2018-09-09 | 2019-06-14 | 天宫真空科技(广州)有限公司 | Turningover using with two sides film-coating mechanism |
| CN209039577U (en) * | 2018-11-07 | 2019-06-28 | 广东省新材料研究所 | A kind of vacuum coating fixture |
| CN110423993A (en) * | 2019-09-06 | 2019-11-08 | 浙江舜宇光学有限公司 | A kind of film coating jig |
| CN210367897U (en) * | 2019-07-16 | 2020-04-21 | 腾景科技股份有限公司 | Coating structure suitable for short-wave wavelength direct control coating |
-
2020
- 2020-05-22 CN CN202010440849.6A patent/CN111501001B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06264226A (en) * | 1993-03-15 | 1994-09-20 | Nikon Corp | Ion plating device |
| CN102644058A (en) * | 2012-04-23 | 2012-08-22 | 北京遥测技术研究所 | Substrate overturning device for vacuum coating equipment |
| CN208980788U (en) * | 2018-09-09 | 2019-06-14 | 天宫真空科技(广州)有限公司 | Turningover using with two sides film-coating mechanism |
| CN209039577U (en) * | 2018-11-07 | 2019-06-28 | 广东省新材料研究所 | A kind of vacuum coating fixture |
| CN210367897U (en) * | 2019-07-16 | 2020-04-21 | 腾景科技股份有限公司 | Coating structure suitable for short-wave wavelength direct control coating |
| CN110423993A (en) * | 2019-09-06 | 2019-11-08 | 浙江舜宇光学有限公司 | A kind of film coating jig |
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| Publication number | Publication date |
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| CN111501001B (en) | 2022-05-06 |
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