CN212834008U

CN212834008U - Vacuum coating upset frock

Info

Publication number: CN212834008U
Application number: CN202021162634.4U
Authority: CN
Inventors: 白秋云
Original assignee: Chengdu Ultra Pure Applied Material Co ltd
Current assignee: Chengdu Ultra Pure Applied Material Co ltd
Priority date: 2020-06-20
Filing date: 2020-06-20
Publication date: 2021-03-30
Anticipated expiration: 2030-06-20

Abstract

The utility model relates to the technical field of tool fixtures, in particular to a vacuum coating overturning tool, which comprises a fixture with adjustable clamping radius, a support frame for supporting the fixture and an overturning mechanism for overturning the fixture; two ends of the clamp are respectively and rotatably connected with the supporting frame through rotating shafts; tilting mechanism includes gear and regulating plate, the gear with one pivot coaxial coupling, the regulating plate is equipped with the bar tooth, the bar tooth with gear engagement is in order to drive gear revolve. The utility model discloses in, this upset frock includes anchor clamps, is provided with tilting mechanism on this anchor clamps, and this tilting mechanism includes gear and regulating plate, gear and pivot coaxial coupling, and the regulating plate is equipped with the bar tooth, through the meshing of bar tooth and gear for drive gear revolve, and then drive the upset of anchor clamps upset in order to realize the upset of basement, the convenient multiaspect to the basement carries out the coating film.

Description

Vacuum coating upset frock

Technical Field

The utility model relates to a frock clamp technical field particularly, relates to a vacuum coating upset frock.

Background

In semiconductor etching, a substrate is usually used, and a layer of film is coated on the substrate to improve the corrosion resistance of the substrate.

When a substrate is coated, a tool fixture is usually used to fix the substrate, and then the fixed substrate is placed in a vacuum chamber of a coating machine for coating. At present, the fixture for fixing the substrate has a single function, when the substrate needs to be subjected to double-sided film coating, the fixture and the substrate need to be taken out of a vacuum cavity, the substrate needs to be turned over and then subjected to secondary film coating, two times of vacuum pumping are needed, and the operation is complex. And for the bases with different sizes, different clamps are needed for fixing, the applicable flexibility degree of the clamps is low, clamps with multiple specifications need to be prepared, and the production cost is increased.

Disclosure of Invention

An object of the utility model is to provide a vacuum coating upset frock through tilting mechanism, with anchor clamps upset 180, is convenient for carry out the multiaspect coating film to the basement.

The utility model provides a vacuum coating overturning tool, which comprises a clamp with adjustable clamping radius, a support frame for supporting the clamp and an overturning mechanism for overturning the clamp;

two ends of the clamp are respectively and rotatably connected with the supporting frame through rotating shafts;

tilting mechanism includes gear and regulating plate, the gear with one pivot coaxial coupling, the regulating plate is equipped with the bar tooth, the bar tooth with gear engagement is in order to drive gear revolve.

Further, the clamp comprises a clamp body, a screw rod and a support, the support is provided with a sliding groove, the screw rod is located in the sliding groove, and the screw rod is rotatably connected with the support;

the clamp body comprises a first clamping arm and a second clamping arm which are used for clamping a substrate, and the first clamping arm and the second clamping arm are symmetrically arranged; one end of the first clamping arm and/or one end of the second clamping arm are/is in threaded connection with the screw rod, so that the distance between the first clamping arm and the second clamping arm can be adjusted.

Furthermore, the first clamping arm and the second clamping arm respectively comprise a connecting block and an arm body, one end of the connecting block is in threaded connection with the screw, one end of the connecting block, which is close to the screw, is located in the sliding groove, and the other end of the connecting block is detachably connected with the arm body;

and the opposite sides of the arm body of the first clamping arm and the arm body of the second clamping arm are both concavely provided with accommodating grooves for accommodating the edge of the substrate.

Further, the arm body is connected with the connecting block through a bolt.

Further, the anchor clamps body is a plurality of, and a plurality of anchor clamps body is along the axial interval setting of screw rod.

Furthermore, one end of the adjusting plate penetrates through the top wall of the vacuum coating machine, and a fixing nut is arranged at one end of the adjusting plate, which is located outside the vacuum cavity, and is used for fixing the height of the adjusting plate.

Compared with the prior art, the utility model discloses following beneficial effect has:

the utility model discloses in, this upset frock includes anchor clamps, is provided with tilting mechanism on this anchor clamps, and this tilting mechanism includes gear and regulating plate, gear and pivot coaxial coupling, and the regulating plate is equipped with the bar tooth, through the meshing of bar tooth and gear for drive gear revolve, and then drive the upset of anchor clamps upset in order to realize the upset of basement, the convenient multiaspect to the basement carries out the coating film.

Drawings

In order to more clearly illustrate the technical solution of the present invention, the drawings that are required to be used in the present invention will be briefly described below, it should be understood that the following drawings only illustrate certain embodiments of the present application and therefore should not be considered as limiting the scope, and that for a person skilled in the art, other relevant drawings can be obtained from these drawings without inventive effort.

Fig. 1 is a first schematic plan view of a vacuum coating turnover tool provided by the present invention;

fig. 2 is a schematic top view of a vacuum coating turnover tool provided by the present invention;

FIG. 3 is a schematic top view of the clamp body of FIG. 2 after it has been inverted;

FIG. 4 is a schematic cross-sectional view taken along the line A-A in FIG. 1;

fig. 5 is a schematic sectional view of the coating turnover tool of the present invention installed in a vacuum coating machine.

Icon: 1-clamp body, 11-first clamping arm, 111-connecting block, 112-arm body, 113-accommodating groove, 12-second clamping arm, 2-screw rod, 3-bracket, 31-first bracket, 32-second bracket, 33-cross frame, 331-chute, 34-first rotating shaft, 35-second rotating shaft, 36-third rotating shaft, 37-fourth rotating shaft, 4-supporting frame, 5-turnover mechanism, 51-gear, 52-adjusting plate, 53-fixing nut, 6-vacuum chamber, 7-coating source and 8-substrate.

Detailed Description

The technical solution of the present invention will be described below with reference to the accompanying drawings.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures. Meanwhile, in the description of the present application, the terms "first", "second", and the like are used only for distinguishing the description, and are not to be construed as indicating or implying relative importance.

Example (b): as shown in figures 1-5

The embodiment provides a vacuum coating overturning tool, which comprises a clamp with an adjustable clamping radius, a support frame 4 for supporting the clamp and an overturning mechanism 5 for overturning the clamp;

two ends of the clamp are respectively and rotatably connected with the support frame 4 through rotating shafts; specifically, in this embodiment, the rotating shafts include a first rotating shaft 34 and a second rotating shaft 35, and both the first rotating shaft 34 and the second rotating shaft 35 are rotatably connected to the supporting frame 4, as shown in fig. 5, the first rotating shaft 34 is located at the right end of the fixture, and the second rotating shaft 35 is located at the left end of the fixture.

As shown in fig. 3 and 5, in the present embodiment, the turnover mechanism 5 includes a gear 51 and an adjusting plate 52, the gear 51 is coaxially connected to the first rotating shaft 34, and the adjusting plate 52 is provided with a rack-shaped tooth, and the rack-shaped tooth is engaged with the gear 51 to drive the gear 51 to rotate. Also, to facilitate the use of the vacuum chamber 6 as a roll-over jig, one end of the adjustment plate 52 penetrates through the top wall of the vacuum chamber 6, and a fixing nut 53 is provided at the end for fixing the position of the adjustment plate 52. The lower end of the fixing nut 53 abuts on the outer wall of the vacuum chamber 6 to prevent the adjustment plate 52 from falling down, thereby fixing the adjustment plate 52.

In order to conveniently place the substrate 8, a third rotating shaft 36 is arranged at one end of the clamp close to the first rotating shaft 34, and the third rotating shaft 36 is detachably connected with the first rotating shaft 34 through a coupler; similarly, the other end of the clamp is provided with a fourth rotating shaft 37, and the fourth rotating shaft 37 and the second rotating shaft 35 are detachably connected through a coupler. In other embodiments of the present invention, the first rotating shaft 34, the third rotating shaft 36, the second rotating shaft 35 and the fourth rotating shaft 37 can also be connected by other detachable connection methods.

When in actual use, the supporting frame 4 and the turnover mechanism 5 are arranged in the vacuum coating cavity, when the substrate 8 is installed, the clamp and the support can be separated, the clamp is taken out of the vacuum cavity 6, after the substrate 8 is installed on the clamp, the clamp is installed on the supporting frame 4, the installation is convenient, and meanwhile, the working efficiency of the vacuum coating machine is also improved. In the process of coating, after the coating on one side is finished, the adjusting plate 52 is moved upwards or downwards, and the adjusting plate 52 drives the gear 51 to rotate, so as to drive the fixture to turn over.

Specifically, the clamp comprises a clamp body 1, a screw rod 2 and a support 3, wherein the support 3 is provided with a sliding groove 331, the screw rod 2 is positioned in the sliding groove 331, and the screw rod 2 is rotatably connected with the support 3;

specifically, in this embodiment, the bracket 3 includes a first bracket 31, a second bracket 32 and a cross frame 33, which are oppositely disposed, one end of the cross frame 33 is connected to the first bracket 31, and the other end of the cross frame 33 is connected to the second bracket 32; the chute 331 is disposed on the cross frame 33, one end of the screw rod 2 is rotatably connected to the first bracket 31, and the other end of the screw rod 2 is rotatably connected to the second bracket 32.

The clamp body 1 comprises a first clamping arm 11 and a second clamping arm 12 for clamping the substrate 8; first centre gripping arm 11 with second centre gripping arm 12 all includes connecting block 111 and arm body 112, the one end of connecting block 111 with screw rod 2 threaded connection, just connecting block 111 is close to the one end of screw rod 2 is located in spout 331, the other end of connecting block 111 with arm body 112 passes through the bolt and can dismantle the connection. In addition, in this embodiment, two sections of threads with opposite rotation directions are disposed on the screw rod 2, the connecting block 111 of the first clamping arm 11 is connected to one section of the screw rod 2, the connecting block 111 of the second clamping arm 12 is connected to the other section of the screw rod 2, and by rotating the screw rod 2, under the limiting effect of the sliding groove 331, the first clamping arm 11 and the second clamping arm 12 move simultaneously and approach or separate from each other, so as to adjust the distance between the first clamping arm 11 and the second clamping arm 12.

In the utility model discloses in other embodiments, can also be, connecting block 111 and the support 3 fixed connection of first centre gripping arm 11, connecting block 111 and the 2 threaded connection of screw rod of second centre gripping arm 12, through rotating screw rod 2, first centre gripping arm 11 follows the motion of screw rod 2, is close to or keeps away from second centre gripping arm 12.

In this embodiment, as shown in fig. 1 to 3, the first holding arm 11 and the second holding arm 12 are disposed opposite to each other, and a receiving groove 113 for receiving an edge of the substrate 8 is recessed in each of opposite sides of the arm body 112.

When the substrate clamping device is used, the screw rod 2 is rotated, the position between the first clamping arm 11 and the second clamping arm 12 is adjusted to be a proper size, the edges of the two sides of the substrate 8 are respectively clamped into the accommodating groove 113 from the side far away from the screw rod 2, the screw rod 2 is rotated, the first clamping arm 11 and the second clamping arm 12 are enabled to be close, and the substrate 8 is fixed between the first clamping arm 11 and the second clamping arm 12.

In order to improve the utility model discloses a utilization ratio of anchor clamps, in this embodiment, as shown in fig. 1-3, should anchor clamps body 1 is a plurality of, a plurality of anchor clamps body 1 is followed the axial interval of screw rod 2 sets up. It should be noted that, the interval between two adjacent fixture bodies 1 can be set according to actual requirements, so as to satisfy the position adjustment between the first clamping arm 11 and the second clamping arm 12.

Further, a plurality of screws 2 may be provided on the holder 3, the plurality of screws 2 may be provided at intervals, and a plurality of jig bodies 1 may be provided on the same screw 2.

The above description is only for the specific embodiments of the present application, but the scope of the present application is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present application, and shall be covered by the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.

Claims

1. The vacuum coating overturning tool is characterized by comprising a clamp with an adjustable clamping radius, a support frame (4) for supporting the clamp and an overturning mechanism (5) for overturning the clamp;

two ends of the clamp are respectively and rotatably connected with the support frame (4) through rotating shafts;

tilting mechanism (5) include gear (51) and regulating plate (52), gear (51) and one pivot coaxial coupling, regulating plate (52) are equipped with the bar tooth, the bar tooth with gear (51) meshing, in order to drive gear (51) rotate.

2. The vacuum coating overturning tool according to claim 1, wherein the clamp comprises a clamp body (1), a screw rod (2) and a bracket (3), the bracket (3) is provided with a sliding groove (331), the screw rod (2) is positioned in the sliding groove (331), and the screw rod (2) is rotatably connected with the bracket (3);

the clamp body (1) comprises a first clamping arm (11) and a second clamping arm (12) which are used for clamping a substrate (8), and the first clamping arm (11) and the second clamping arm (12) are symmetrically arranged; one end of the first clamping arm (11) and/or one end of the second clamping arm (12) are in threaded connection with the screw (2) so as to adjust the distance between the first clamping arm (11) and the second clamping arm (12).

3. The vacuum coating overturning tool according to claim 2, wherein each of the first clamping arm (11) and the second clamping arm (12) comprises a connecting block (111) and an arm body (112), one end of the connecting block (111) is in threaded connection with the screw rod (2), one end of the connecting block (111) close to the screw rod (2) is located in the sliding groove (331), and the other end of the connecting block (111) is detachably connected with the arm body (112);

and accommodating grooves (113) for accommodating the edges of the substrates (8) are formed in the opposite sides of the arm body (112) of the first clamping arm (11) and the arm body (112) of the second clamping arm (12) in a concave mode.

4. The vacuum coating overturning tool according to claim 3, wherein the arm body (112) is connected with the connecting block (111) through a bolt.

5. The vacuum coating overturning tool according to claim 2, wherein the number of the clamp bodies (1) is multiple, and the multiple clamp bodies (1) are arranged at intervals along the axial direction of the screw rod (2).

6. The vacuum coating overturning tool according to claim 1, wherein the rotating shaft comprises a first rotating shaft (34) and a second rotating shaft (35), and the first rotating shaft (34) is coaxially connected with the gear (51); a third rotating shaft (36) is arranged at one end, close to the first rotating shaft (34), of the clamp, and the third rotating shaft (36) is detachably connected with the first rotating shaft (34); the other end of anchor clamps is equipped with fourth pivot (37), fourth pivot (37) with second pivot (35) can dismantle the connection.