CN111490700A - Multi-mode hybrid drive two-dimensional parallel motion platform and control method thereof - Google Patents
Multi-mode hybrid drive two-dimensional parallel motion platform and control method thereof Download PDFInfo
- Publication number
- CN111490700A CN111490700A CN202010324395.6A CN202010324395A CN111490700A CN 111490700 A CN111490700 A CN 111490700A CN 202010324395 A CN202010324395 A CN 202010324395A CN 111490700 A CN111490700 A CN 111490700A
- Authority
- CN
- China
- Prior art keywords
- clamping
- mode
- power
- piezoelectric
- clamping mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 5
- 230000007246 mechanism Effects 0.000 claims abstract description 46
- 235000014676 Phragmites communis Nutrition 0.000 claims abstract description 30
- 238000006073 displacement reaction Methods 0.000 claims abstract description 22
- 238000009825 accumulation Methods 0.000 claims description 10
- 230000009471 action Effects 0.000 claims description 3
- 230000008855 peristalsis Effects 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 2
- 230000003044 adaptive effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
Abstract
The invention discloses a multi-mode hybrid drive two-dimensional parallel motion platform and a control method thereof. The multi-mode piezoelectric actuator is composed of a first power-off clamping mechanism, a second power-off clamping mechanism, a piezoelectric linear propulsion group and a displacement output rod. The first power-off clamping mechanism consists of a first clamping piezoelectric stack and a first clamping reed, and consists of a second clamping piezoelectric stack and a clamping reed. The linear propelling group consists of a linear propelling piezoelectric stack and an elastic return reed. The two-dimensional platform respectively realizes two linear and stepping working modes through a structural design and a control mode, so that the two-dimensional platform is endowed with the characteristics of large working stroke, high pointing precision, capability of realizing power-off clamping and the like, and is expected to meet the application requirements of the two-dimensional platform in the future.
Description
Technical Field
The invention relates to the technical field of two-dimensional parallel motion platforms, in particular to a multi-mode hybrid drive two-dimensional parallel motion platform and a control method thereof.
Background
The two-dimensional parallel motion platform is an indispensable part in an optical system, can be used for correcting a tilt error in a light path in an adaptive optical system by adopting a reflector to accurately control the direction of a light beam between a light source and a receiver, and can also be used for stabilizing the direction of the light beam line.
Disclosure of Invention
In order to solve the problems in the prior art, the invention aims to provide a multi-mode hybrid-driven two-dimensional parallel motion platform, which respectively realizes two linear and stepping working modes through a structural design and a control mode, so that the two-dimensional platform has the characteristics of large working stroke, high pointing accuracy, capability of realizing Power-off clamping (Power off clamping) and the like, and is expected to meet the application requirements of the two-dimensional platform in the future.
In order to achieve the above purpose, the invention adopts the following technical scheme: the utility model provides a two-dimentional parallel motion platform of multi-mode hybrid drive, includes inclined to one side revolving stage 1 for the flexible restraint structure 2 of circumference that the platform radial motion is deflected in the restraint, along 1 axial motion's of inclined to one side revolving stage 4 multi-mode piezoelectric actuator that have the same structure, be first multi-mode piezoelectric actuator 3, second multi-mode piezoelectric actuator 4, third multi-mode piezoelectric actuator 5 and fourth multi-mode piezoelectric actuator 6 respectively.
The multi-mode piezoelectric actuator is composed of a first power-off clamping mechanism 3-1, a second power-off clamping mechanism 3-2, a piezoelectric linear propulsion group 3-3 and a displacement output rod 3-4. The first power-off clamping mechanism 3-1 is composed of a first clamping piezoelectric stack 3-1-1 and a first clamping reed 3-1-2, the second power-off clamping mechanism 3-2 and the first power-off clamping mechanism 3-1 have the same structure, and the second power-off clamping mechanism 3-2-1 is composed of a second clamping piezoelectric stack 3-2-1 and a clamping reed 3-2-2. The linear propulsion group 3-3 consists of a linear propulsion piezoelectric stack 3-3-1 and an elastic return reed 3-3-2.
The two-dimensional platform adopts a hybrid driving mode, so that the two-dimensional platform has three working modes:
the first working mode is as follows: when the two-dimensional platform needs small-range rapid high-precision deflection, a linear working mode is entered: at this time, the second power-off clamping mechanism 3-2 is energized, and at the same time, the second clamping piezoelectric stack 3-2-1 is energized to extend, and the second clamping reed 3-2-2 is jacked up to release the clamping state. And the first power-off clamping mechanism 3-1 is still in the power-off clamping state at the moment, so that the multi-mode piezoelectric actuator drives the deflection table to deflect only through the linear propulsion group 3-3 through the displacement output rod 3-4 at the moment. The linear propulsion group 3-3 acts as a linear actuator, giving the two-dimensional platform a higher pointing accuracy, although with a smaller working range.
And a second working mode: when the two-dimensional platform deflection posture needs to be continuously stabilized at a certain angle, the 4 multi-mode piezoelectric actuators with the same structure keep the positions of the multi-mode piezoelectric actuators unchanged through the power-off clamping state of the first power-off clamping mechanism 3-1 and the second power-off clamping mechanism 3-2, so that the two-dimensional platform can keep the deflection posture when the power is off.
And a third working mode: when the two-dimensional platform needs to work in a large range, a stepping working mode is entered, and the 4 multi-mode piezoelectric actuators perform motion accumulation through multi-mode peristalsis, so that the large-range deflection of the two-dimensional platform is realized, wherein the multi-mode motion accumulation modes of the 4 multi-mode piezoelectric actuators are as follows:
in the initial state, the multi-mode piezoelectric actuator is in a power-off clamping state. After the movement is started, completing the accumulation of one movement according to the following six steps:
the first step is as follows: the second power-off clamping mechanism 3-2 is electrified, and simultaneously the second clamping piezoelectric stack 3-2-1 is electrified and extends, so that the clamping reed 3-2-2 is jacked up to release the clamping state.
The second step is that: and electrifying the linear propulsion group 3-3, electrifying the linear propulsion piezoelectric stack 3-3-1 to extend, and pushing the front part of the displacement output rod to output displacement in one step.
The third step: the second power-off clamping mechanism 3-2 is powered off, and simultaneously the second clamping piezoelectric stack 3-2-1 is powered off and shortened, so that the clamping reed 3-2-2 returns to a clamping state.
The fourth step: the first power-off clamping mechanism 3-1 is electrified, and simultaneously the first clamping piezoelectric stack 3-1-1 is electrified and extended, and the clamping reed 3-1-2 is jacked up to release the clamping state.
The fifth step: the linear propulsion group 3-3 is powered off, the linear propulsion piezoelectric pile 3-3-1 is powered off and shortened, and the displacement output rod is pulled under the action of the elastic return reed 3-3-2 to move one step forward.
And a sixth step: the second power-off clamping mechanism 3-2 is powered off, and simultaneously the second clamping piezoelectric stack 3-2-1 is powered off and shortened, so that the clamping reed 3-2-2 returns to a clamping state. The multi-mode piezoelectric actuator returns to the initial state.
And accumulating the output displacement of the linear propulsion group 3-3 to form large displacement output through continuous cycle repetition of the six steps.
When the two-dimensional platform deflects at a low speed and in a large range of angles, the two piezoelectric multi-mode actuators in the same axis move according to opposite movement time sequences, so that the large-angle deflection is formed.
Compared with the prior art, the invention has the following advantages:
(1) the working principle of the multi-mode piezoelectric actuator is different from that of a linear actuator commonly used for the two-dimensional platform at present in nature, and motion accumulation is realized through worm-type motion, so that the working stroke of the piezoelectric actuator is greatly increased, and a precondition is provided for driving the large-diameter two-dimensional platform to realize large-angle work.
(2) The multi-mode self-deflection two-dimensional parallel motion platform has double working mode switching capability, can change the initial working position by using the power-off clamping mechanism, and then drives the two-dimensional platform by using the piezoelectric linear propulsion group to realize high-frequency response.
(3) The multi-mode piezoelectric actuator comprises two power-off clamping mechanisms, so that the current deflection angle of the two-dimensional platform can be maintained during power-off, and compared with the conventional two-dimensional platform, the multi-mode piezoelectric actuator has the characteristic that the required power consumption is greatly reduced.
(4) The working characteristics of the multi-mode piezoelectric actuator and the application characteristics of the two-dimensional parallel motion platform are combined, and the working mode of the multi-mode piezoelectric actuator is designed according to the application requirements of the two-dimensional parallel motion platform, so that the working performance of the current two-dimensional parallel motion platform is greatly improved, and the contradiction between the large working stroke and the pointing accuracy of the current two-dimensional parallel motion platform is solved.
Drawings
FIG. 1 is a block diagram of a multi-mode hybrid-driven two-dimensional parallel motion platform according to the present invention;
FIG. 2 is a schematic diagram of a multi-mode piezoelectric actuator according to the present invention;
FIG. 3 is a schematic diagram of an operation mode;
fig. 4 is a schematic diagram of three principles of the bit operation mode.
Detailed Description
The invention is described in further detail below with reference to the figures and the embodiments.
As shown in fig. 1, the multi-mode hybrid driving two-dimensional parallel motion platform comprises a deflection table 1, a circumferential flexible constraint structure 2 for constraining radial motion of the deflection table, and 4 multi-mode piezoelectric actuators with the same structure and moving along the axial direction of the deflection table 1, namely a first multi-mode piezoelectric actuator 3, a second multi-mode piezoelectric actuator 4, a third multi-mode piezoelectric actuator 5 and a fourth multi-mode piezoelectric actuator 6.
As shown in figures 2-4, the multi-mode piezoelectric actuator is composed of a first power-off clamping mechanism 3-1, a second power-off clamping mechanism 3-2, a piezoelectric linear propelling group 3-3 and a displacement output rod 3-4. The first power-off clamping mechanism 3-1 is composed of a first clamping piezoelectric stack 3-1-1 and a first clamping reed 3-1-2, the second power-off clamping mechanism 3-2 and the first power-off clamping mechanism 3-1 have the same structure, and the second power-off clamping mechanism 3-2-1 is composed of a second clamping piezoelectric stack 3-2-1 and a clamping reed 3-2-2. The linear propulsion group 3-3 consists of a linear propulsion piezoelectric stack 3-3-1 and an elastic return reed 3-3-2. The two-dimensional platform adopts a hybrid driving mode, so that the two-dimensional platform has three working modes:
the first working mode is as follows: when the two-dimensional platform needs small-range rapid high-precision deflection, a linear working mode is entered: at this time, the second power-off clamping mechanism 3-2 is energized, and at the same time, the second clamping piezoelectric stack 3-2-1 is energized to extend, and the second clamping reed 3-2-2 is jacked up to release the clamping state. And the first power-off clamping mechanism 3-1 is still in the power-off clamping state at the moment, so that the multi-mode piezoelectric actuator drives the deflection table to deflect only through the linear propulsion group 3-3 through the displacement output rod 3-4 at the moment. The linear propulsion group 3-3 acts as a linear actuator, giving the two-dimensional platform a higher pointing accuracy, although with a smaller working range.
And a second working mode: when the two-dimensional platform deflection posture needs to be continuously stabilized at a certain angle, the 4 multi-mode piezoelectric actuators with the same structure keep the positions of the multi-mode piezoelectric actuators unchanged through the power-off clamping state of the first power-off clamping mechanism 3-1 and the second power-off clamping mechanism 3-2, so that the two-dimensional platform can keep the deflection posture when the power is off.
And a third working mode: when the two-dimensional platform needs to work in a large range, a stepping working mode is entered, and the 4 multi-mode piezoelectric actuators perform motion accumulation through multi-mode peristalsis, so that the large-range deflection of the two-dimensional platform is realized, wherein the multi-mode motion accumulation modes of the 4 multi-mode piezoelectric actuators are as follows:
in the initial state, the multi-mode piezoelectric actuator is in a power-off clamping state. After starting the exercise, one exercise accumulation is completed according to the following 6 steps:
the first step is as follows: the second power-off clamping mechanism 3-2 is electrified, and simultaneously the second clamping piezoelectric stack 3-2-1 is electrified and extends, so that the clamping reed 3-2-2 is jacked up to release the clamping state.
The second step is that: and electrifying the linear propulsion group 3-3, electrifying the linear propulsion piezoelectric stack 3-3-1 to extend, and pushing the front part of the displacement output rod to output displacement in one step.
The third step: the second power-off clamping mechanism 3-2 is powered off, and simultaneously the second clamping piezoelectric stack 3-2-1 is powered off and shortened, so that the clamping reed 3-2-2 returns to a clamping state.
The fourth step: the first power-off clamping mechanism 3-1 is electrified, and simultaneously the first clamping piezoelectric stack 3-1-1 is electrified and extended, and the clamping reed 3-1-2 is jacked up to release the clamping state.
The fifth step: the linear propulsion group 3-3 is powered off, the linear propulsion piezoelectric pile 3-3-1 is powered off and shortened, and the displacement output rod is pulled under the action of the elastic return reed 3-3-2 to move one step forward.
And a sixth step: the second power-off clamping mechanism 3-2 is powered off, and simultaneously the second clamping piezoelectric stack 3-2-1 is powered off and shortened, so that the clamping reed 3-2-2 returns to a clamping state. The multi-mode piezoelectric actuator returns to the initial state.
And accumulating the output displacement of the linear propulsion group 3-3 to form large displacement output through the continuous cycle repetition of the 6 steps.
When the two-dimensional platform deflects at a low speed and in a large range of angles, the two piezoelectric multi-mode actuators in the same axis move according to opposite movement time sequences, so that the large-angle deflection is formed.
Claims (3)
1. A multi-mode hybrid drive two-dimensional parallel motion platform is characterized in that: including revolving stage (1) partially for the flexible restraint structure of circumference (2) of the radial motion of restraint platform deflects, along the 4 multi-mode piezoelectric actuator that have the same structure of revolving stage (1) axial motion partially, be first multi-mode piezoelectric actuator (3), second multi-mode piezoelectric actuator (4), third multi-mode piezoelectric actuator (5) and fourth multi-mode piezoelectric actuator (6) respectively.
2. The multi-mode hybrid driven two-dimensional parallel motion platform of claim 1, wherein: the first multi-mode piezoelectric actuator (3) consists of a first power-off clamping mechanism (3-1), a second power-off clamping mechanism (3-2), a piezoelectric linear propulsion group (3-3) and a displacement output rod (3-4), the first power-off clamping mechanism (3-1) consists of a first clamping piezoelectric stack (3-1-1) and a first clamping reed (3-1-2), the second power-off clamping mechanism (3-2) has the same structure as the first power-off clamping mechanism (3-1) and consists of a second clamping piezoelectric stack (3-2-1) and a clamping reed (3-2-2), the linear propulsion group (3-3) consists of a linear propulsion piezoelectric stack (3-3-1) and an elastic return reed (3-3-2).
3. A control method of a multimode hybrid-driven two-dimensional parallel motion platform is based on the multimode hybrid-driven two-dimensional parallel motion platform disclosed by claim 1, and the multimode hybrid-driven two-dimensional parallel motion platform adopts a hybrid driving mode and has the following three working modes:
the first working mode is as follows: when the two-dimensional platform needs small-range rapid high-precision deflection, a linear working mode is entered: at the moment, the second power-off clamping mechanism (3-2) is electrified, and meanwhile, the second clamping piezoelectric stack (3-2-1) is electrified and extends to jack up the second clamping reed (3-2-2) to release the clamping state; at the moment, the first power-off clamping mechanism (3-1) is still in a power-off clamping state, so that the multi-mode piezoelectric actuator only drives the deflection platform to deflect through the linear propulsion group (3-3) through the displacement output rod (3-4); at the moment, the linear propulsion group (3-3) acts as a linear actuator, and the two-dimensional platform can be endowed with higher pointing accuracy although the working range is smaller;
and a second working mode: when the deflection posture of the two-dimensional platform needs to be continuously stabilized at a certain angle, the 4 multi-mode piezoelectric actuators with the same structure keep the positions of the multi-mode piezoelectric actuators unchanged by the fact that the first power-off clamping mechanism (3-1) and the second power-off clamping mechanism (3-2) are in the power-off clamping state, and therefore the two-dimensional platform can keep the deflection posture when the power is off;
and a third working mode: when the two-dimensional platform needs to work in a large range, a stepping working mode is entered, and the 4 multi-mode piezoelectric actuators perform motion accumulation through multi-mode peristalsis, so that the large-range deflection of the two-dimensional platform is realized, wherein the multi-mode motion accumulation modes of the 4 multi-mode piezoelectric actuators are as follows:
in the initial state, the multi-mode piezoelectric actuator is in a power-off clamping state, and after the multi-mode piezoelectric actuator starts to move, one-time movement accumulation is completed according to the following six steps:
the first step is as follows: electrifying the second power-off clamping mechanism (3-2), electrifying the second clamping piezoelectric stack (3-2-1) to extend, and jacking up the clamping reed (3-2-2) to release the clamping state;
the second step is that: electrifying the linear propulsion group (3-3), electrifying the linear propulsion piezoelectric stack (3-3-1) to extend, and pushing the front part of the displacement output rod to output displacement in one step;
the third step: the second power-off clamping mechanism (3-2) is powered off, and meanwhile, the second clamping piezoelectric stack (3-2-1) is powered off and shortened, so that the clamping reed (3-2-2) returns to a clamping state;
the fourth step: electrifying the first power-off clamping mechanism (3-1), electrifying the first clamping piezoelectric stack (3-1-1) to extend, and jacking up the clamping reed (3-1-2) to release the clamping state;
the fifth step: the linear propulsion group (3-3) is powered off, the linear propulsion piezoelectric pile (3-3-1) is powered off and shortened, and the displacement output rod is pulled under the action of the elastic return reed (3-3-2) to move one step forward;
and a sixth step: the second power-off clamping mechanism (3-2) is powered off, and meanwhile, the second clamping piezoelectric stack (3-2-1) is powered off and shortened, so that the clamping reed (3-2-2) returns to the clamping state, and the multi-mode piezoelectric actuator returns to the initial state again;
accumulating the output displacement of the linear propulsion group (3-3) to form large displacement output through continuous cycle repetition of the six steps;
when the two-dimensional platform deflects at a low speed and in a large range of angles, the two piezoelectric multi-mode actuators in the same axis move according to opposite movement time sequences, so that the large-angle deflection is formed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010324395.6A CN111490700B (en) | 2020-04-23 | 2020-04-23 | Multi-mode hybrid drive two-dimensional parallel motion platform and control method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010324395.6A CN111490700B (en) | 2020-04-23 | 2020-04-23 | Multi-mode hybrid drive two-dimensional parallel motion platform and control method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111490700A true CN111490700A (en) | 2020-08-04 |
| CN111490700B CN111490700B (en) | 2023-09-19 |
Family
ID=71811156
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010324395.6A Active CN111490700B (en) | 2020-04-23 | 2020-04-23 | Multi-mode hybrid drive two-dimensional parallel motion platform and control method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111490700B (en) |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102361411A (en) * | 2011-10-25 | 2012-02-22 | 哈尔滨工业大学深圳研究生院 | Piezoelectric linear driver |
| CN102664554A (en) * | 2012-05-15 | 2012-09-12 | 哈尔滨工业大学 | Passive clamping type piezoelectric actuator |
| CN204314540U (en) * | 2014-12-20 | 2015-05-06 | 中国科学院西安光学精密机械研究所 | A kind of six degree of freedom based on piezo stack block time mirror adjustment mechanism |
| CN105301763A (en) * | 2015-10-30 | 2016-02-03 | 西安交通大学 | Two-dimensional rapid deflection apparatus and method based on secondary bridge type displacement amplifier |
| US20160373029A1 (en) * | 2013-10-18 | 2016-12-22 | Shanghai Jiaotong University | Piezo ceramic planar motor and driving method thereof |
| CN107705821A (en) * | 2017-09-14 | 2018-02-16 | 山东大学 | A kind of two degrees of freedom Inchworm type micro-nano locating platform |
| CN109217724A (en) * | 2018-09-19 | 2019-01-15 | 宁波大学 | A kind of full displacement equations formula piezoelectricity looper linear platform |
| CN109546887A (en) * | 2018-12-05 | 2019-03-29 | 哈尔滨工业大学 | A kind of symmetrical structure Piezoelectric Driving two dimension direction regulating mechanism and rotatable platform angle regulation method |
| CN109723945A (en) * | 2019-01-10 | 2019-05-07 | 北京机械设备研究所 | A kind of accurate direction platform based on flexible parallelogram mechanism |
| CN110289785A (en) * | 2019-07-12 | 2019-09-27 | 哈尔滨工业大学 | A kind of power-off keeps Three Degree Of Freedom piezoelectricity to be directed toward adjustment device and platform courses method |
-
2020
- 2020-04-23 CN CN202010324395.6A patent/CN111490700B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102361411A (en) * | 2011-10-25 | 2012-02-22 | 哈尔滨工业大学深圳研究生院 | Piezoelectric linear driver |
| CN102664554A (en) * | 2012-05-15 | 2012-09-12 | 哈尔滨工业大学 | Passive clamping type piezoelectric actuator |
| US20160373029A1 (en) * | 2013-10-18 | 2016-12-22 | Shanghai Jiaotong University | Piezo ceramic planar motor and driving method thereof |
| CN204314540U (en) * | 2014-12-20 | 2015-05-06 | 中国科学院西安光学精密机械研究所 | A kind of six degree of freedom based on piezo stack block time mirror adjustment mechanism |
| CN105301763A (en) * | 2015-10-30 | 2016-02-03 | 西安交通大学 | Two-dimensional rapid deflection apparatus and method based on secondary bridge type displacement amplifier |
| CN107705821A (en) * | 2017-09-14 | 2018-02-16 | 山东大学 | A kind of two degrees of freedom Inchworm type micro-nano locating platform |
| CN109217724A (en) * | 2018-09-19 | 2019-01-15 | 宁波大学 | A kind of full displacement equations formula piezoelectricity looper linear platform |
| CN109546887A (en) * | 2018-12-05 | 2019-03-29 | 哈尔滨工业大学 | A kind of symmetrical structure Piezoelectric Driving two dimension direction regulating mechanism and rotatable platform angle regulation method |
| CN109723945A (en) * | 2019-01-10 | 2019-05-07 | 北京机械设备研究所 | A kind of accurate direction platform based on flexible parallelogram mechanism |
| CN110289785A (en) * | 2019-07-12 | 2019-09-27 | 哈尔滨工业大学 | A kind of power-off keeps Three Degree Of Freedom piezoelectricity to be directed toward adjustment device and platform courses method |
Non-Patent Citations (3)
| Title |
|---|
| FANGXIN CHEN等: "A PZT Actuated 6-DOF Positioning System for Space Optics Alignment", 《IEEE/ASME TRANSACTIONS ON MECHATRONICS》 * |
| 卢倩等: "一众高精度大行程2R1T并联定位平台", 《仪器仪表学报》 * |
| 徐骁等: "一种垂直运动精密微定位平台的设计与分析", 《机械设计与研究》 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN111490700B (en) | 2023-09-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108818495B (en) | Flexible robot based on piezoelectric drive and control method thereof | |
| CN110752769B (en) | Bidirectional inertia type piezoelectric actuator driven by symmetrical sawtooth waves and actuating method | |
| CN109586611B (en) | Alternate stepping piezoelectric stick-slip driver with anisotropic friction surface | |
| CN111490700A (en) | Multi-mode hybrid drive two-dimensional parallel motion platform and control method thereof | |
| CN103303386B (en) | A kind of Single-degree-of-fredouble-mode double-mode rolling six-bar mechanism | |
| US7547867B2 (en) | Positioning device and positiioning method | |
| CN209313746U (en) | A kind of alternating step piezoelectric stick-slip driver with anisotropy friction surface | |
| CN2365816Y (en) | Creeping piezoelectric/electrostrictive micro-feeding positioning apparatus | |
| CN112072950A (en) | Jumping type robot and control method thereof | |
| CN1119735C (en) | Creeping type piezoelectric/electrostrictive microfeed positioner | |
| CN112865593B (en) | Bionic impact piezoelectric driver with high output performance and control method thereof | |
| CN211343699U (en) | Planar three-degree-of-freedom precision positioning platform | |
| CN111427386B (en) | Photoelectric equipment rapid turning method combining bang-bang control and overshoot-free prediction control | |
| CN112594243B (en) | Piezoelectric electrohydraulic servo valve and control method thereof | |
| CN109895077B (en) | Multi-working-condition pneumatic robot | |
| CN212564356U (en) | Gear shifting mechanism for transmission | |
| CN108482511B (en) | Inchworm type micro-motion walking robot | |
| CN113489369B (en) | Stepping piezoelectric driver and robot | |
| CN218335612U (en) | Self-reciprocating stepping actuator | |
| CN217156915U (en) | Driving part for realizing light path focusing based on lens axial displacement | |
| CN214325216U (en) | Harvester steering device with automatic centering function | |
| CN113276985B (en) | Driver control method for automatically zeroing steering wheel by using incremental encoder motor | |
| CN109586613B (en) | Opposite friction tangential resistance-reducing type rotary piezoelectric motor and control method thereof | |
| US7236309B1 (en) | Bifocal double group lens assembly | |
| US20060232162A1 (en) | Electrically driven mechanical actuators and methods of operating same |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |