CN111485070A - 一种减摩耐磨齿轮零件的制备工艺 - Google Patents
一种减摩耐磨齿轮零件的制备工艺 Download PDFInfo
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Abstract
本发明属于齿轮制造技术领域，具体涉及一种减摩耐磨齿轮零件的制备工艺，通过物理气相沉积技术进行表面渗碳及涂层处理以制备减摩耐磨高压液压泵的方法，将碳化物涂层、PVD方法与渗碳技术相结合，在碳化物涂层与工件基体间通过离子溅射的方法制备一个渗碳扩散层，即对工件表面先通过离子溅射的方法进行表面渗碳处理，然后再采用离子镀和磁控溅射复合方法沉积成分梯度变化的VCrWSiC/Cr碳化物涂层，以减缓涂层与基体材料的物理性能差异，提高基体材料的硬度，增强涂层与基体的附着性能，从而改善齿轮零件减摩耐磨等综合性能，有效提高表面处理效率和工件的使用寿命。
Description
技术领域
本发明属于齿轮制造技术领域，具体涉及一种减摩耐磨齿轮零件的制备工艺。
背景技术
齿轮传动是机械传动中的最主要的形式，具有传动效率高、传动比稳定、可靠性高、寿命长等优点，应用极其广泛，是机械工业的重要基础件。随着现代工业水平的不断提高，对齿轮传动提出的要求也越来越苛刻，如航空、航天和潜海领域，要求齿轮具有大的传动比大、高效率、重量轻、维护周期长等特点。为提高齿轮承载能力，通常采用降低齿轮单位面积应力和提高轮齿单位面积强度的途径提高齿轮的承载能力和可靠性，其中通过增大齿轮尺寸来降低齿轮表面应力会增加齿轮的体积和重量；采用传统的表面热处理方法提高齿面硬度的同时会伴随较大的变形，甚至会因为传统热处理后的硬度不足而导致齿轮在高速、重载条件下出现齿面过早磨损、点蚀、胶合。因此，开发新的齿轮表面改性技术、降低齿轮的摩擦和磨损，对于提高齿轮的承载能力、延长齿轮的使用寿命具有重要的意义。
碳化物涂层具备高硬度，高强度，化学性质稳定，耐热，耐磨损等优良特性，尤其是多元碳化物具有更加优异的综合使用性能，因此有望通过在零件表面制备碳化物涂层或通过金属表层的碳化处理来提高零件的耐磨性。
目前制备碳化物涂层的技术主要有喷涂、渗碳以及气相沉积等方法。其中，喷涂是指借助压力或离心力，将涂层材料喷射到工件的表面，该方法制备涂层虽然具有较高的喷涂效率，但是涂层与工件基体的结合力很差，而且涂层的表面非常粗糙，不适合高速的恶劣工况条件；渗碳是指使碳原子渗入到钢类工件表层的过程，从而使工件表面获得很高的表面硬度，提高其耐磨性能。但是由于渗碳温度达到800℃以上，渗碳后工件仍要进行淬火和回火，使得工件表面发生较大变形，无法保证零件的尺寸和形状精度，处理完的零件仍需修磨和再加工，而且渗碳及后续热处理时间通常达到30小时以上，效率低下；气相沉积法，尤其是物理气相沉积(PVD)，制备的涂层表面具有极高的硬度、强度，以及良好的热稳定性和耐磨性，而且该制备工艺温度可控制在400℃以下，不会导致零件基体组织变化，表面尺寸和形状精度也不受影响。因此，物理气相沉积技术(PVD)在表面处理领域极具潜力。但是，直接在齿轮零件表面制备PVD碳化物涂层，会由于基体硬度、弹性模量、热膨胀系数等性能与涂层材料相差较大，无法获得较高结合力的PVD涂层，使得PVD涂层过早脱落和失效。中国专利CN101058870A模具表面采用单一的PVD涂层，涂层与基体的结合力差以及PVD涂层同基体的力学匹配差是限制PVD涂层高硬度及低摩擦系数等优势发挥的重要因素。中国专利CN103727180A直接在碳钢表面制备了耐磨陶瓷涂层和金刚石涂层，由于基体较软的硬度无法支撑涂层以及基体与涂层之间明显的性能差异导致制备的涂层使用性能无法满足诸多实际使用要求，尤其是高速、重载、交变载荷工况条件下涂层很快脱落和磨损。
发明内容
本发明目的在于提供一种减摩耐磨齿轮零件的制备工艺，能提高齿轮零件基体材料的硬度，减缓基体表面沉积涂层与基体材料的物理性能差异，增强沉积涂层与基体的附着性能，从而改善齿轮零件减摩耐磨的综合性能，有效提高表面处理效率和工件的使用寿命。
本发明所述的减摩耐磨齿轮零件的制备工艺，齿轮零件基体经过淬火、高温回火、粗精加工后采用离子镀方法进行渗碳处理，然后再通过离子镀和磁控溅射复合方法沉积表面的VCrWSiC/Cr多层复合涂层，沉积时采用2个C离子镀靶，1个V磁控溅射靶，1个Cr磁控溅射靶，1个W磁控溅射靶和1个Si磁控溅射靶；
具体包括以下步骤：
(1)零件加工：零件基体毛坯→淬火→高温回火→粗加工→半精加工→去应力回火→精加工，通过淬火及高温回火处理能够保证芯部足够的韧性和抗冲击变形能力；
(2)零件表面预处理：采用金属清洗剂去除工件表面油污，漂洗烘干；
(3)零件表面处理：将零件依次放入酒精和丙酮中，超声清洗各30min，去除表面杂质和其它附着物，干燥充分后迅速放入PVD复合镀膜机，抽真空至5.0×10-3Pa，加热至285℃，保温25min；
(4)表面辉光清洗：通Ar气，其压力为1.8-2.0Pa，温度285℃，打开偏压电源电压700V，占空比0.2，表面辉光放电清洗20min；
(5)表面离子清洗：偏压调至610V，占空比0.2，Ar气压2.2Pa，温度275℃，开启离子源，离子清洗20min，开启电弧C靶电源，C靶电流110A，离子轰击3～4min；
(6)离子镀渗碳：C靶离子镀电源调为110A，Ar气压1.0～1.2Pa，基体偏压调至420V，温度265℃，进行离子渗碳25-30min；
(7)沉积Cr涂层：Ar气压调为0.9～1.0Pa，偏压降为190V，沉积温度220℃，关闭C靶电流，打开磁控溅射Cr靶电流60A，沉积Cr涂层1～1.5min；
(8)沉积VCrWSiC涂层：Ar气压调为0.8～0.9Pa，偏压降为180V，沉积温度220℃，打开C靶电流至45A，打开磁控溅射V靶电流75A，磁控溅射Cr靶电流60A，磁控溅射W靶电流50A，磁控溅射Si靶电流40A，沉积VCrWSiC涂层1～1.5min；其它参数不变，增加C靶电流，C靶电流每次增加2A，沉积VCrWSiC/Cr复合层1～1.5min，直至C靶电流增至90A，再沉积VCrWSiC/Cr复合层1～1.5min；
(9)重复(7)、(8)、(7)……：交替沉积Cr涂层、VCrWSiC涂层、Cr涂层、VCrWSiC涂层、……、Cr涂层、VCrWSiC涂层共40min；
(10)后处理：关闭各靶电源、离子源及气体源，涂层结束。
齿轮零件基体材料为20Cr，20MnB，20CrMo,20CrMnTi,20CrMnMo,20CrNi2MoNb，22CrNi2MoNb，20NiCrMoH，22CrNi2MoNbH，30CrMnSi,35SiMn中低碳钢及其合金钢中的一种。
所制得的齿轮零件具有以下结构：在零件基体表面向外依次具有表面渗碳扩散层、Cr涂层、VCrWSiC涂层、VCrWSiC/Cr交替的复合涂层。
本发明通过物理气相沉积技术进行表面渗碳及涂层处理以制备减摩耐磨齿轮的方法，将碳化物涂层、PVD方法与渗碳技术相结合，在碳化物涂层与工件基体间通过离子溅射的方法制备一个渗碳扩散层，即对工件表面先通过离子溅射的方法进行表面渗碳处理，然后再采用离子镀和磁控溅射复合方法沉积成分梯度变化的VCrWSiC/Cr碳化物涂层，以减缓涂层与基体材料的物理性能差异，提高基体材料的硬度，增强涂层与基体的附着性能，从而改善齿轮零件的综合性能，有效提高表面处理效率和工件的使用寿命。
本发明与现有技术相比，具有以下有益效果。
本发明通过表面离子渗碳处理，使碳原子渗入到零件基体内部，并随着深度的增加，碳原子的浓度逐渐减小，有利于形成高硬度和强度的碳化物梯度扩散层，从而为后续VCrWSiC/Cr碳化物涂层的制备提供强有力的支撑基体以及良好的结合性能；同时，该VCrWSiC/Cr多层复合涂层结构的层间界面可阻止涂层柱状晶的生长，阻碍裂纹和缺陷的扩展，提高涂层的硬度、韧性和耐冲击性。另外，该VCrWSiC/Cr碳化物多层复合涂层中，C元素可降低涂层表面的摩擦系数，降低齿轮工作过程中的噪音和摩擦磨损，加入V元素提高了涂层的抗磨损性，Cr元素对涂层起到固溶强化作用，改善涂层的抗氧化性能，W元素改善了涂层硬度和抗化学扩散性能，提高了涂层的抗氧化性能，Si元素改善了涂层硬度和抗化学扩散性能。
本发明制得的齿轮零件可增强涂层与基体的附着性能2倍以上，减小工作过程中的摩擦和粘结，表面硬度提高3倍以上，由于采用物理气相沉积技术进行渗碳和涂层处理，缩短工艺处理时间90％以上，延长齿轮的使用寿命一倍以上，降低齿轮的维护和保养成本70％以上。同时，由于该制备工艺温度可控制在300℃以下，不会导致零件基体组织性能退化，表面尺寸和形状精度不受影响，处理完后无需进行修磨和再加工，可作为零件的最终处理工艺。
附图说明
图1为本发明实施例1制得的减摩耐磨齿轮零件的表面结构示意图。
图中：1、零件基体2、表面渗碳扩散层3、Cr涂层4、VCrWSiC涂层5、VCrWSiC/Cr交替的复合涂层。
具体实施方式
下面给出本发明的两个最佳实施例。
本发明所述的齿轮零件制备方法为可用于生产制造各种形状和规格的齿轮的金属零件。
实施例1
本发明所述的耐磨齿轮零件的制备方法，齿轮零件基体材料为22CrNi2MoNbH，齿轮零件基体经过淬火、高温回火、粗精加工后采用离子镀方法进行渗碳处理，然后再通过离子镀和磁控溅射复合方法沉积表面的VCrWSiC/Cr多层复合涂层，沉积时采用2个C离子镀靶，1个V磁控溅射靶，1个Cr磁控溅射靶，1个W磁控溅射靶和1个Si磁控溅射靶；
具体包括以下步骤：
(1)零件加工：零件基体毛坯→淬火(835～885℃，水冷)→高温回火(525～565℃，水冷)→粗加工→半精加工→去应力回火(505～565℃，空冷)→精加工(表面粗糙度Ra1.6μm，加工尺寸：公差下限)；
(2)零件表面预处理：采用金属清洗剂去除工件表面油污，漂洗烘干；
(3)零件表面处理：将零件依次放入酒精和丙酮中，超声清洗各30min，去除表面杂质和其它附着物，干燥充分后迅速放入PVD复合镀膜机，抽真空至5.0×10-3Pa，加热至285℃，保温25min；
(4)表面辉光清洗：通Ar气，其压力为1.8-2.0Pa，温度285℃，打开偏压电源电压700V，占空比0.2，表面辉光放电清洗20min；
(5)表面离子清洗：偏压调至610V，占空比0.2，Ar气压2.2Pa，温度275℃，开启离子源，离子清洗20min，开启电弧C靶电源，C靶电流110A，离子轰击3～4min；
(6)离子镀渗碳：C靶离子镀电源调为110A，Ar气压1.0～1.2Pa，基体偏压调至420V，温度265℃，进行离子渗碳25-30min；
(7)沉积Cr涂层：Ar气压调为0.9～1.0Pa，偏压降为190V，沉积温度220℃，关闭C靶电流，打开磁控溅射Cr靶电流60A，沉积Cr涂层1～1.5min；
(8)沉积VCrWSiC涂层：Ar气压调为0.8～0.9Pa，偏压降为180V，沉积温度220℃，打开C靶电流至45A，打开磁控溅射V靶电流75A，磁控溅射Cr靶电流60A，磁控溅射W靶电流50A，磁控溅射Si靶电流40A，沉积VCrWSiC涂层1～1.5min；其它参数不变，增加C靶电流，C靶电流每次增加2A，沉积VCrWSiC/Cr复合层1～1.5min，直至C靶电流增至90A，再沉积VCrWSiC/Cr复合层1～1.5min；
(9)重复(7)、(8)、(7)……：交替沉积Cr涂层、VCrWSiC涂层、Cr涂层、VCrWSiC涂层、……、Cr涂层、VCrWSiC涂层共40min；
(10)后处理：关闭各靶电源、离子源及气体源，涂层结束。
如图1所示，本发明制得的耐磨齿轮零件具有以下结构：在零件基体1表面向外依次具有表面渗碳扩散层2、Cr涂层3、VCrWSiC涂层4、VCrWSiC/Cr交替的复合涂层5。
本实施例制备的具有VCrWSiC/Cr耐磨涂层的齿轮零件表面显微硬度达到HV2795，相比单独传统渗碳工艺的表面硬度(HV650)提高3倍多；结合强度为81-87N，相比单纯PVD涂层的结合强度(28-34N)提高了约170％；涂层厚度为2.13μm，涂层表面粗糙度达到Ra79nm。在相同的摩擦实验条件下(CETRUMT球盘摩擦磨损试验机，往复直线运动，对磨球为表面硬度HRC55-60的轴承钢，加载载荷80N，滑动速度10mm/s，对磨时间30min),本发明制备的减摩抗磨涂层的表面摩擦系数为0.32-0.34，磨损率为1.98-2.16×10-6mm3/N·m；与目前使用广泛的未加渗碳层的TiAlN氮化物涂层相比，表面摩擦系数降低了约40％，磨损率降低了约37-42％。整个有效渗碳及涂层时间为1.3h，不足传统渗碳工艺处理时间的5％，而且没有后续的修磨和再加工工序。
实施例2
本发明所述的耐磨齿轮零件的制备方法，齿轮零件基体材料为20MnB，齿轮零件基体经过淬火、高温回火、粗精加工后采用离子镀方法进行渗碳处理，然后再通过离子镀和磁控溅射复合方法沉积表面的VCrWSiC/Cr多层复合涂层，沉积时采用2个C离子镀靶，1个V磁控溅射靶，1个Cr磁控溅射靶，1个W磁控溅射靶和1个Si磁控溅射靶；
具体包括以下步骤：
(1)零件加工：零件基体毛坯→淬火(900～945℃，油淬)→高温回火(525～600℃，空冷)→粗加工→半精加工→去应力回火(555～595℃，油冷)→精加工(表面粗糙度Ra1.6μm，加工尺寸：公差下限)；
(2)零件表面预处理：采用金属清洗剂去除工件表面油污，漂洗烘干；
(3)零件表面处理：将零件依次放入酒精和丙酮中，超声清洗各30min，去除表面杂质和其它附着物，干燥充分后迅速放入PVD复合镀膜机，抽真空至5.0×10-3Pa，加热至285℃，保温25min；
(4)表面辉光清洗：通Ar气，其压力为1.8-2.0Pa，温度285℃，打开偏压电源电压700V，占空比0.2，表面辉光放电清洗20min；
(5)表面离子清洗：偏压调至610V，占空比0.2，Ar气压2.2Pa，温度275℃，开启离子源，离子清洗20min，开启电弧C靶电源，C靶电流110A，离子轰击3～4min；
(6)离子镀渗碳：C靶离子镀电源调为110A，Ar气压1.0～1.2Pa，基体偏压调至420V，温度265℃，进行离子渗碳25-30min；
(7)沉积Cr涂层：Ar气压调为0.9～1.0Pa，偏压降为190V，沉积温度220℃，关闭C靶电流，打开磁控溅射Cr靶电流60A，沉积Cr涂层1～1.5min；
(8)沉积VCrWSiC涂层：Ar气压调为0.8～0.9Pa，偏压降为180V，沉积温度220℃，打开C靶电流至45A，打开磁控溅射V靶电流75A，磁控溅射Cr靶电流60A，磁控溅射W靶电流50A，磁控溅射Si靶电流40A，沉积VCrWSiC涂层1～1.5min；其它参数不变，增加C靶电流，C靶电流每次增加2A，沉积VCrWSiC/Cr复合层1～1.5min，直至C靶电流增至90A，再沉积VCrWSiC/Cr复合层1～1.5min；
(9)重复(7)、(8)、(7)……：交替沉积Cr涂层、VCrWSiC涂层、Cr涂层、VCrWSiC涂层、……、Cr涂层、VCrWSiC涂层共40min；
(10)后处理：关闭各靶电源、离子源及气体源，涂层结束。
制备的VCrWSiC/Cr耐磨涂层表面显微硬度达到HV2785，结合强度为77-83N，涂层厚度为2.16μm，涂层表面粗糙度达到Ra83nm，整个有效渗碳及涂层时间约为1.3h。
Claims (3)
1.一种减摩耐磨齿轮零件的制备工艺，其特征在于：齿轮零件基体经过淬火、高温回火、粗精加工后采用离子镀方法进行渗碳处理，然后再通过离子镀和磁控溅射复合方法沉积表面的VCrWSiC/Cr多层复合涂层，沉积时采用2个C离子镀靶，1个V磁控溅射靶，1个Cr磁控溅射靶，1个W磁控溅射靶和1个Si磁控溅射靶；
具体包括以下步骤：
(1)零件加工：零件基体毛坯→淬火→高温回火→粗加工→半精加工→去应力回火→精加工；
(2)零件表面预处理：采用金属清洗剂去除工件表面油污，漂洗烘干；
(3)零件表面处理：将零件依次放入酒精和丙酮中，超声清洗各30min，去除表面杂质和其它附着物，干燥充分后迅速放入PVD复合镀膜机，抽真空至5.0×10-3Pa，加热至285℃，保温25min；
(4)表面辉光清洗：通Ar气，其压力为1.8-2.0Pa，温度285℃，打开偏压电源电压700V，占空比0.2，表面辉光放电清洗20min；
(5)表面离子清洗：偏压调至610V，占空比0.2，Ar气压2.2Pa，温度275℃，开启离子源，离子清洗20min，开启电弧C靶电源，C靶电流110A，离子轰击3～4min；
(6)离子镀渗碳：C靶离子镀电源调为110A，Ar气压1.0～1.2Pa，基体偏压调至420V，温度265℃，进行离子渗碳25-30min；
(7)沉积Cr涂层：Ar气压调为0.9～1.0Pa，偏压降为190V，沉积温度220℃，关闭C靶电流，打开磁控溅射Cr靶电流60A，沉积Cr涂层1～1.5min；
(8)沉积VCrWSiC涂层：Ar气压调为0.8～0.9Pa，偏压降为180V，沉积温度220℃，打开C靶电流至45A，打开磁控溅射V靶电流75A，磁控溅射Cr靶电流60A，磁控溅射W靶电流50A，磁控溅射Si靶电流40A，沉积VCrWSiC涂层1～1.5min；其它参数不变，增加C靶电流，C靶电流每次增加2A，沉积VCrWSiC/Cr复合层1～1.5min，直至C靶电流增至90A，再沉积VCrWSiC/Cr复合层1～1.5min；
(9)重复(7)、(8)、(7)……：交替沉积Cr涂层、VCrWSiC涂层、Cr涂层、VCrWSiC涂层、……、Cr涂层、VCrWSiC涂层共40min；
(10)后处理：关闭各靶电源、离子源及气体源，涂层结束。
2.根据权利要求1所述的减摩耐磨齿轮零件的制备工艺，其特征在于：齿轮零件基体材料为20Cr，20MnB，20CrMo,20CrMnTi,20CrMnMo,20CrNi2MoNb，22CrNi2MoNb，20NiCrMoH，22CrNi2MoNbH，30CrMnSi,35SiMn中低碳钢及其合金钢中的一种。
3.根据权利要求1所述的减摩耐磨齿轮零件的制备工艺，其特征在于：所制得的齿轮零件具有以下结构：在零件基体1表面向外依次具有表面渗碳扩散层2、Cr涂层3、VCrWSiC涂层4、VCrWSiC/Cr交替的复合涂层5。
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