CN111483795A - Flexible silicon wafer cracking and spacing method and corresponding device - Google Patents
Flexible silicon wafer cracking and spacing method and corresponding device Download PDFInfo
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- CN111483795A CN111483795A CN202010500438.1A CN202010500438A CN111483795A CN 111483795 A CN111483795 A CN 111483795A CN 202010500438 A CN202010500438 A CN 202010500438A CN 111483795 A CN111483795 A CN 111483795A
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- battery piece
- conveyer belt
- flexible
- assembly line
- conveying belt
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
- B65G47/26—Devices influencing the relative position or the attitude of articles during transit by conveyors arranging the articles, e.g. varying spacing between individual articles
- B65G47/30—Devices influencing the relative position or the attitude of articles during transit by conveyors arranging the articles, e.g. varying spacing between individual articles during transit by a series of conveyors
- B65G47/31—Devices influencing the relative position or the attitude of articles during transit by conveyors arranging the articles, e.g. varying spacing between individual articles during transit by a series of conveyors by varying the relative speeds of the conveyors forming the series
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G15/00—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration
- B65G15/10—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration comprising two or more co-operating endless surfaces with parallel longitudinal axes, or a multiplicity of parallel elements, e.g. ropes defining an endless surface
- B65G15/12—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration comprising two or more co-operating endless surfaces with parallel longitudinal axes, or a multiplicity of parallel elements, e.g. ropes defining an endless surface with two or more endless belts
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G15/00—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration
- B65G15/30—Belts or like endless load-carriers
- B65G15/58—Belts or like endless load-carriers with means for holding or retaining the loads in fixed position, e.g. magnetic
Abstract
The invention provides a method for flexibly cracking and spacing a silicon wafer, which is used for carrying out continuous flexible cracking operation on the silicon wafer through a production line and outputting cracked battery pieces at equal intervals. The battery piece advances along the trompil conveyer belt of assembly line, the battery piece is adsorbed in the trompil conveyer belt, the transport end of assembly line is provided with the burst area, the position that the trompil conveyer belt corresponds to the burst area is provided with flexible split piece, the trompil conveyer belt advances along the upper surface drive battery piece of flexible split piece, the inner chamber of flexible split piece is two evacuation chambeies of keeping apart each other, flexible split piece structure upper surface is become by two kinds of different curvature radius surfaces of anterior plane and rear portion and is held the battery piece and make the battery piece split naturally after advancing along flexible split piece upper surface through the evacuation, the equidistant output conveyer belt in rear is carried to the battery piece after splitting, the operation linear velocity of equidistant output conveyer belt is greater than the operation linear velocity of trompil conveyer belt, export the battery piece at equidistant interval through different velocity difference.
Description
Technical Field
The invention relates to the technical field of battery piece splitting, in particular to a method for flexibly splitting and spacing a silicon chip.
Background
In the prior art, when a large cell is divided into a plurality of small cells, the large cell is cut by laser in advance to form an inwards concave cutting line, then the large cell is adsorbed on a plane, and then a small part of the large cell is broken by a cylinder at a certain angle, so that the small cell is cracked along the cutting line.
Disclosure of Invention
Aiming at the problems, the invention provides a flexible splitting and spacing method for silicon wafers, which is used for carrying out continuous flexible splitting operation on the silicon wafers through a production line and outputting the split battery pieces at equal intervals, so that the splitting production efficiency is high, and the product quality is ensured.
A method for flexibly cracking and spacing a silicon wafer is characterized by comprising the following steps: the battery piece is conveyed to the assembly line from a station with a last cutting line, the battery piece advances along an opening conveyer belt of the assembly line, the battery piece is adsorbed on the opening conveyer belt, a splitting area is arranged at the conveying tail end of the assembly line, a flexible splitting block is arranged at the position of the opening conveyer belt corresponding to the splitting area, the opening conveyer belt drives the battery piece to advance along the upper surface of the flexible splitting block, the inner cavity of the flexible splitting block is two mutually isolated vacuum pumping chambers, the upper surface of the flexible splitting block is composed of a front plane and a rear plane with two different curvature radius surfaces, a plurality of adsorption holes are formed in the upper surface of the flexible splitting block, the battery piece naturally splits after the battery piece advances along the upper surface of the flexible splitting block through vacuum pumping, wherein the two vacuum pumping chambers of the flexible splitting block have different pressures, the rear section has high pressure and forms pressure difference with the front section, and the split battery piece is conveyed to a rear equidistant output conveyer belt, the equidistant output conveying belt is driven by an independent second driving motor, the running linear speed of the equidistant output conveying belt is greater than that of the perforated conveying belt, the battery pieces are output at equal intervals through different speed difference values, and the equidistant output conveying belt is used for splitting the battery pieces with 30% -70% of cutting depth.
It is further characterized in that:
the two sides of the width direction of the assembly line are respectively provided with a perforated conveying belt, a cavity is dug out from the interior of a conveying belt supporting plate, gas is pumped by an air pump to form vacuum, the rear section of the conveying belt supporting plate is an independent flexible splitting block, the upper surface of the conveying belt supporting plate is provided with an adsorption hole, a battery piece is adsorbed on the surface of the perforated conveying belt, the battery piece enters a guide area of the assembly line through a width direction centering guide structure for transition, the battery piece is input into the flexible splitting block by the perforated conveying belt, the perforated conveying belt drives the battery piece to advance along the upper surface of the flexible splitting block, the battery piece is further split along a cutting line through different arc surface differences and pressure differences, and an air blowing structure is additionally arranged above the splitting area to apply arc surface common splitting of a;
the equidistant output conveyer belt is also for adsorbing the transport, including anterior slant transition absorption part and rear portion horizontal adsorption conveying part, for making things convenient for follow-up work station to get the piece, so with the battery piece through anterior slant transition absorption part flow down reach rear portion horizontal adsorption conveying part, equidistant output conveyer belt is last to be opened has the absorption connecting hole, and its segmentation backup pad that corresponds all is the adsorption plate of extraction vacuum, adsorbs to carry and ensures the transmission precision.
It is further characterized in that:
the carrying module sucks a battery piece from the previous station and moves to the upper part of the assembly line, the carrying module descends the battery piece to the plane of the assembly line, the battery piece falls on the feeding starting end of the perforated conveying belt and then drives the perforated conveying belt to advance, a centering guide structure is formed towards the width direction of the battery piece on the assembly line and enters a guide area of the assembly line for transition after centering and positioning in the width direction, then the battery piece sequentially passes through a plane section, a first arc surface section and a second arc surface section along the upper surface of the flexible splitting block, first vacuum pressure corresponding to the plane section is lower than second vacuum pressure of the first arc surface section and the second arc surface section, the battery piece is automatically split along a cutting line, and the split small battery piece is separated from vacuum adsorption, enters a rear spaced interval conveying station, is arranged at equal intervals and then is adsorbed and conveyed backwards;
the width direction centering positioning comprises guide wheels at two sides for guiding positioning and closing-up guide plates at two sides, the guide wheels are arranged at the incoming material end of the closing-up guide plates in the advancing direction of the battery piece, and the battery piece is accurately centered along the closing-up guide plates in the width direction after being guided and positioned by the guide wheels;
the equidistant output conveyer belt is compatible with different splinter requirements, the whole splinter is split into N small splinter pieces which are all separated into the N small splinter pieces through the equidistant output conveyer belt to finish the equidistant conveying, wherein N is a natural number which is more than or equal to 2.
An apparatus for flexibly cleaving and spacing a silicon wafer, comprising: the assembly line comprises an assembly line frame, wherein a plurality of holes which are penetrated through in the thickness direction are arranged on the two sides of the assembly line frame in the width direction respectively, a plurality of conveying belt rollers are arranged at the front end, the middle end and the rear end of the assembly line frame respectively, one group of the conveying belt rollers are connected with an output shaft of a driving motor through a transmission mechanism, the opening conveying belt is wrapped on the conveying belt rollers arranged along the assembly line frame to form an upper conveying surface in a closed manner, a separated conveying frame is further arranged behind the assembly line frame, a plurality of equidistant output conveying belts are arranged on the upper surface of the separated conveying frame, a plurality of adsorption connecting holes which are penetrated through in the thickness direction are arranged on the equidistant output conveying belt, a first distribution supporting plate and a second distribution supporting plate are arranged on the separated conveying frame, and a transition guide wheel is arranged below the first distribution supporting plate and the second distribution supporting plate, the inner cavities of the first arrangement supporting plate and the second arrangement supporting plate are vacuum cavities and externally connected with air pumps, and the conveying line speed of the perforated conveying belt is smaller than that of the equidistant output conveying belt; the first arrangement supporting plate is a guide structure with a downward inclination, the equidistant output conveying belt is arranged along the arrangement of the first arrangement supporting plate, the transition guide wheel and the second arrangement supporting plate, and the equidistant output conveying belt is driven by an independent second driving motor; the flexible battery piece cutting device is characterized by further comprising a conveying belt supporting plate and a flexible splitting block, wherein the tail end of the conveying belt supporting plate is connected with the starting end of the flexible splitting block, an adsorption hole is formed in the upper surface of the conveying belt supporting plate, the adsorption hole is formed in the upper surface of the flexible splitting block, the inner cavity of the conveying belt supporting plate is a vacuum cavity and an external air pump, the upper surface of the flexible splitting block is sequentially provided with a plane section, a first cambered surface section and a second cambered surface section, the inner cavity of the splitting plate passing through the flexible splitting block is two mutually isolated vacuum pumping cavities, specifically a first vacuum pumping cavity and a second vacuum pumping cavity, the first vacuum pumping cavity corresponds to adsorption of the plane section, the second vacuum pumping cavity corresponds to adsorption of the first cambered surface section and the second cambered surface section, and the pressure of the second vacuum pumping cavity is greater than that of the first vacuum pumping cavity and is used for splitting a battery piece with a cutting.
It is further characterized in that:
the assembly line frame is sequentially provided with a battery piece blanking area, a battery piece width centering area and a battery piece splitting area along the length direction, the battery piece width centering area comprises guide wheels on two sides and closing-up guide plates on two sides, a bottom mounting shaft of each guide wheel is fixedly arranged at a position corresponding to the assembly line frame through a mounting bracket, each closing-up guide plate comprises a front closing-up guide plate and a rear linear parallel plate, the front closing-up plate is used for centering the battery piece in the width direction, and the rear linear parallel plate ensures that the battery piece stably travels in a centering way;
the conveying device is characterized by further comprising a driving wheel, the driving wheel is fixedly arranged below the assembly line rack, the perforated conveying belt is driven by the driving wheel to be arranged along a conveying belt roller, the driving motor is fixedly arranged below the assembly line rack, an output shaft of the driving motor is connected with an input shaft of the driving wheel through a transmission device, and the driving motor synchronously drives the perforated conveying belts on two sides to move;
the perforated conveyer belt and the equidistant output conveyer belt are belts;
the first cambered surface section is a large-diameter cambered section, the second cambered surface section is a guide cambered section which is connected with the tail end of the large-diameter cambered section and a falling vertical surface, the initial height of the falling vertical surface is lower than the height of the tail end of the first cambered surface section, so that the battery pieces are enabled to crack along the cutting line through different cambered surface differences and pressure differences, and the cracked battery pieces enter the equidistant output conveying belt after being separated from adsorption;
the starting end of the first arrangement supporting plate is connected with the guide arc section to ensure that the battery pieces are directly transited to the corresponding equidistant output conveying belt on the upper surface of the first arrangement supporting plate;
the spacing between each of the cleaved pieces is adjusted by adjusting the difference in the relative travel speeds of the equally spaced output conveyor relative to the apertured conveyor.
After the flexible split sheet structure is adopted, the battery piece with the cut line is conveyed to a conveying line which is conveyed along the direction vertical to the cut line, the battery piece advances along an opening conveying belt of a production line, the battery piece is adsorbed on the opening conveying belt, a split sheet area is arranged at the conveying tail end of the production line, a flexible split sheet block is arranged at the position, corresponding to the split sheet area, of the opening conveying belt, the opening conveying belt drives the battery piece to advance along the upper surface of the flexible split sheet block, the inner cavity of the flexible split sheet block is two mutually isolated vacuum pumping chambers, the upper surface of the flexible split sheet block structure is composed of a front plane and a rear plane with different curvature radius surfaces, a plurality of adsorption holes are formed in the upper surface of the flexible split sheet block structure, the battery piece naturally splits after the battery piece advances along the upper surface of the flexible split sheet block through vacuum pumping, the pressure of the two vacuum pumping chambers of the flexible, Forming a pressure difference with the front section; the battery piece is through different cambered surface differences and pressure differential with the battery piece along the line of cut fracture, the equidistant output conveyer belt at rear is carried to the battery piece after the fracture, equidistant output conveyer belt is through independent second driving motor drive, the operation linear velocity of equidistant output conveyer belt is greater than the operation linear velocity of trompil conveyer belt, export the equidistant interval of battery piece through different speed difference, it carries out continuous flexible lobe of a leaf operation with the silicon chip through the production line, and the equidistant output of battery piece after will cracking, it makes the production efficiency of lobe of a leaf high, and ensure product quality.
Drawings
FIG. 1 is a perspective view of the assembled apparatus and front carrier module of the present invention (with battery cells);
FIG. 2 is a schematic perspective view of the apparatus of the present invention (with the equidistant output conveyor belts removed);
FIG. 3 is a schematic perspective view of a flexible split block of the present invention (with one side panel removed);
FIG. 4 is a schematic cross-sectional view of a conveyor support plate of the present invention;
FIG. 5 is a schematic structural view of a perspective view of the present invention provided with a blowing structure;
the names corresponding to the sequence numbers in the figure are as follows:
the device comprises a production line frame 1, a cell blanking area 101, a cell width centering area 102, a cell splitting area 103, an open hole conveyor belt 2, a conveyor belt roller 3, a driving motor 4, a conveyor belt support plate 5, a flexible splitting block 6, a plane section 61, a first cambered surface section 62, a second cambered surface section 63, a falling vertical surface 64, a vacuum cavity 7, a first vacuum pumping cavity 8, a second vacuum pumping cavity 9, a guide wheel 10, a closing guide plate 11, a front closing guide plate 111, a rear linear parallel plate 112, a mounting support 12, a driving wheel 13, a spacing conveyor frame 14, an adsorption connecting hole 15, an arrangement support plate 16, a second driving motor 17, a second arrangement support plate 18, a transition guide wheel 19, a cell 20, a production line 30, a splitting area 40, a conveying module 50, an equidistant output conveyor belt 60 and a blowing structure 70.
Detailed Description
A method of flexibly cleaving and spacing a silicon wafer, see fig. 1-5: the battery piece 20 is conveyed to the assembly line 30 from a station with a last cutting line, the battery piece 20 advances along an opening conveyer belt of the assembly line 30, the battery piece 20 is adsorbed on the opening conveyer belt 2, a splitting area 40 is arranged at the conveying tail end of the assembly line 30, a flexible splitting block 5 is arranged at the position, corresponding to the splitting area 40, of the opening conveyer belt 2, the opening conveyer belt 2 drives the battery piece 20 to advance along the upper surface of a flexible splitting block 6, an inner cavity of the flexible splitting block 1 is two mutually isolated vacuum pumping chambers, the upper surface of the flexible splitting block 6 is composed of a front plane and a rear plane with different curvature radius surfaces, a plurality of adsorption holes are formed in the upper surface of the flexible splitting block structure, the battery piece naturally splits after the battery piece advances along the upper surface of the flexible splitting block through vacuum pumping, wherein the two vacuum pumping chambers of the flexible splitting block have different pressures, the rear section has a high pressure and forms a pressure difference with the front section, the cracked battery pieces are conveyed to the rear equidistant output conveying belt, the equidistant output conveying belt 60 is driven by the independent second driving motor 17, the running linear speed of the equidistant output conveying belt 60 is larger than that of the perforated conveying belt 2, and the battery pieces are output at equal intervals through different speed difference values.
The two sides of the width direction of the assembly line 30 are respectively provided with a perforated conveyer belt 2, a cavity is dug out from the interior of a conveyer belt supporting plate 5 to pump gas through an air pump to form vacuum, the rear section of the conveyer belt supporting plate 5 is an independent flexible splitting block 6, the upper surface of the conveyer belt supporting plate 5 is provided with adsorption holes to adsorb the battery piece 20 on the surface of the perforated conveyer belt 2, the battery piece 20 enters a guide area of the assembly line through a width direction centering guide structure to be transited, the battery piece 20 is input to the flexible splitting block 6 through the perforated conveyer belt, the perforated conveyer belt 2 drives the battery piece to advance along the upper surface of the flexible splitting block 6 to split the battery piece along a cutting line through different arc surface differences and pressure differences, and an air blowing structure 70 is additionally arranged above the splitting area to apply positive pressure to match with the common splitting block (see fig.;
equidistant output conveyer belt 60 is the adsorption transport equally, includes anterior slant transition adsorption part and rear portion horizontal adsorption transport part, for making things convenient for follow-up worker station to get the piece, so flow down the battery piece through anterior slant transition adsorption part and reach rear portion horizontal adsorption transport part, equidistant output conveyer belt 60 is last to be opened has the adsorption connecting hole 15, and its segmentation backup pad that corresponds all is the adsorption plate of extraction vacuum, and the adsorption transport guarantees the transmission precision.
The carrying module 50 sucks a battery piece from the previous station and moves to the upper side of the assembly line 30, the carrying module 50 lowers the battery piece to the plane of the assembly line 30, the battery piece 20 falls on the feeding starting end of the perforated conveyor belt 2 and then drives the perforated conveyor belt 2 to advance, a centering guide structure is formed towards the width direction of the battery piece 20 on the assembly line 30, the battery piece is centered and positioned in the width direction and then enters a guide area of the assembly line 30 for transition, the battery piece sequentially passes through the plane section 61, the first cambered surface section 62 and the second cambered surface section 63 along the upper surface of the flexible splitting block 6, the first vacuum pressure corresponding to the plane section 61 is lower than the second vacuum pressure of the first cambered surface section 62 and the second cambered surface section 63, the battery piece 20 is automatically split along the cutting line, and the split small battery piece is separated from vacuum adsorption and enters a rear station;
the width direction centering positioning comprises guide wheels at two sides for guiding positioning and closing-up guide plates at two sides, the guide wheels are arranged at the incoming material end of the closing-up guide plates in the advancing direction of the battery piece, and the battery piece is accurately centered along the closing-up guide plates in the width direction after being guided and positioned by the guide wheels;
the equidistant output conveyer belt 60 is compatible with different splinter requirements, and the whole splinter is split into N small splinter pieces which are all separated into the N small splinter pieces through the equidistant output conveyer belt 60, wherein N is a natural number more than or equal to 2.
An apparatus for flexibly cleaving and spacing a silicon wafer, see fig. 1-4: the assembly line comprises an assembly line rack 1, wherein two sides of the assembly line rack 1 in the width direction are respectively provided with a perforated conveyer belt 2, a plurality of holes which are penetrated through in the thickness direction are arranged on the surface of the perforated conveyer belt 2, conveyer belt rollers 3 are arranged at the front end, the middle end and the rear end of the assembly line rack 1, one group of the conveyer belt rollers 3 are connected with an output shaft of a driving motor 4 through a transmission mechanism, the perforated conveyer belt 2 is coated on the conveyer belt rollers 3 arranged along the assembly line rack 1 in a sealing way to form an upper conveying surface, a separated conveying rack 14 is further arranged behind the assembly line rack 1, equidistant output conveyer belts 60 are arranged on the upper surface of the separated conveying rack 14, a plurality of adsorption connecting holes 15 which are penetrated through in the thickness direction are arranged on the equidistant output conveyer belt 60, a first distribution support plate 16, a second distribution support plate 18, a, A transition guide wheel 19 is arranged below the second arrangement supporting plates 1, the inner cavities of the first arrangement supporting plates 16 and the second arrangement supporting plates 18 are vacuum cavities and are externally connected with an air pump, and the conveying line speed of the perforated conveying belt 2 is smaller than that of an equidistant output conveying belt 60; the first arrangement support plate 16 is a guide structure with a downward inclination, and the equidistant output conveyer belt 60 is arranged along the arrangement of the first arrangement support plate 16, the transition guide wheel 19 and the second arrangement support plate 18; the equidistant output conveyer belt is driven by an independent second driving motor; the conveying line speed of the perforated conveying belt 2 is less than that of the equidistant output conveying belt 60; the flexible split piece conveying device is characterized by further comprising a conveying belt supporting plate 5 and a flexible split piece 6, the tail end of the conveying belt supporting plate 5 is connected with the starting end of the flexible split piece 6, an adsorption hole is formed in the upper surface of the conveying belt supporting plate 5, the upper surface of the flexible split piece 6 is provided with the adsorption hole, the inner cavity of the conveying belt supporting plate 5 is a vacuum cavity 7 and is externally connected with an air pump, the upper surface of the flexible split piece 6 is sequentially provided with a plane section 61, a first arc surface section 62 and a second arc surface section 63, the inner cavity of the split piece passing plate 5 is two mutually isolated vacuum pumping cavities, specifically the first vacuum pumping cavity 8 and the second vacuum pumping cavity 9, the first vacuum pumping cavity 8 corresponds to adsorption of the plane section 61, the second vacuum pumping cavity 9 corresponds to adsorption of the first arc surface section 62 and the second arc surface section 63, and the pressure of the second vacuum pumping cavity 9.
The assembly line rack 1 is sequentially provided with a battery piece blanking area 101, a battery piece width middle-aligning area 102 and a battery piece splitting area 103 along the length direction, the battery piece width middle-aligning area 102 comprises guide wheels 10 on two sides and closing-up guide plates 11 on two sides, a mounting shaft at the bottom of each guide wheel 10 is fixedly arranged at a corresponding side position of the assembly line rack 1 through a mounting bracket 12, each closing-up guide plate 11 comprises a front closing-up guide plate 111 and a rear linear parallel plate 112, the front closing-up guide plate 111 is used for aligning the battery piece 20 in the width direction, and the rear linear parallel plate 112 ensures that the battery piece 20 stably aligns and advances;
the conveying device also comprises a driving wheel 13, wherein the driving wheel 13 is fixedly arranged below the assembly line rack 1, the perforated conveying belt 2 is driven by the driving wheel 13 to be arranged along the conveying belt roller 3, the driving motor 4 is fixedly arranged below the assembly line rack 1, an output shaft of the driving motor 4 is connected with an input shaft of the driving wheel 13 through a transmission device, and the driving motor 4 synchronously drives the perforated conveying belts 2 on the two sides to act;
the perforated conveyer belt 2 and the equidistant output conveyer belt 60 are specifically belts;
the first arc surface section 62 is a large-diameter arc section with the radius larger than 200mm, the second arc surface section 63 is a guide arc section which connects the tail end of the large-diameter arc section with the falling vertical surface 64, the initial height of the falling vertical surface 64 is lower than the height of the tail end of the first arc surface section 62, so that the battery piece 20 is enabled to crack along the cutting line through different arc surface differences and pressure differences, and the cracked battery piece 20 enters the equidistant output conveying belt 60 after being separated from adsorption;
the starting end of the first arrangement support plate 16 is connected with the guide arc section arrangement to ensure that the battery pieces 20 are directly transited to the corresponding equidistant output conveyer belt 60 on the upper surface of the first arrangement support plate 16;
the spacing between each cleaved piece is adjusted by adjusting the relative travel speed difference of the equally spaced output conveyor 60 relative to the apertured conveyor 2.
In another embodiment, see fig. 5, the addition of the blow structure 70 above the splitting area applies positive pressure to match the cambered co-splitting of the flexible split blocks 6 above the cell sheet 20.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (12)
1. A method for flexibly cracking and spacing a silicon wafer is characterized by comprising the following steps: the battery piece is conveyed to the assembly line from a station with a last cutting line, the battery piece advances along an opening conveyer belt of the assembly line, the battery piece is adsorbed on the opening conveyer belt, a splitting area is arranged at the conveying tail end of the assembly line, a flexible splitting block is arranged at the position of the opening conveyer belt corresponding to the splitting area, the opening conveyer belt drives the battery piece to advance along the upper surface of the flexible splitting block, the inner cavity of the flexible splitting block is two mutually isolated vacuum pumping chambers, the upper surface of the flexible splitting block is composed of a front plane and a rear plane with two different curvature radius surfaces, a plurality of adsorption holes are formed in the upper surface of the flexible splitting block, the battery piece naturally splits after the battery piece advances along the upper surface of the flexible splitting block through vacuum pumping, wherein the two vacuum pumping chambers of the flexible splitting block have different pressures, the rear section has high pressure and forms pressure difference with the front section, and the split battery piece is conveyed to a rear equidistant output conveyer belt, the equidistant output conveying belt is driven by an independent second driving motor, the running linear speed of the equidistant output conveying belt is greater than that of the perforated conveying belt, the battery pieces are output at equal intervals through different speed difference values, and the equidistant output conveying belt is used for splitting the battery pieces with 30% -70% of cutting depth.
2. A method of flexibly cleaving and spacing a silicon wafer according to claim 1, wherein: the width direction both sides of assembly line are provided with the trompil conveyer belt respectively, the inside die cavity of drawing out of conveyer belt backup pad passes through the air pump and extracts gaseous formation vacuum, the back end of conveyer belt backup pad is independent flexible lobe block, the adsorption hole has been seted up to the upper surface of conveyer belt backup pad, adsorb the battery piece on the surface of trompil conveyer belt, the battery piece passes through the regional back of transition of direction that width direction centering guide structure got into the assembly line, the battery piece is input flexible lobe block by the trompil conveyer belt, the trompil conveyer belt drives the battery piece and advances along the upper surface of flexible lobe block, and then through the poor and pressure differential of different cambered surfaces with the battery piece along the line of cut fracture, the regional top of lobe block increases the common lobe block of cambered surface that the structure of.
3. A method of flexibly cleaving and spacing a silicon wafer according to claim 1, wherein: the equidistant output conveyer belt is also for adsorbing the transport, including anterior slant transition absorption part and rear portion horizontal adsorption conveying part, for making things convenient for follow-up work station to get the piece, so with the battery piece through anterior slant transition absorption part flow down reach rear portion horizontal adsorption conveying part, equidistant output conveyer belt is last to be opened has the absorption connecting hole, and its segmentation backup pad that corresponds all is the adsorption plate of extraction vacuum, adsorbs to carry and ensures the transmission precision.
4. A method of flexibly cleaving and spacing a silicon wafer according to claim 2, wherein: the carrying module absorbs the battery piece from last work station and removes to the assembly line top, the carrying module descends the battery piece to the assembly line plane, the battery piece falls on the pay-off initial end of trompil conveyer belt, later drive trompil conveyer belt marchs, battery piece on the assembly line is towards width direction centering guide structure formation, after width direction centering location, get into the guide area transition of assembly line, later the battery piece passes through the plane section along the upper surface of flexible split piece in proper order, first cambered surface section, the second cambered surface section, the first vacuum pressure that the plane section corresponds is less than first cambered surface section, the second vacuum pressure of second cambered surface section, the battery piece is cracked along the line of cut is automatic, the little battery piece that splits apart breaks away from the spacing interval transport station at vacuum adsorption entering rear, after the equidistant arranging is adsorbed and is carried backward.
5. A method of flexibly cleaving and spacing a silicon wafer according to claim 4, wherein: the width direction centering positioning comprises guide wheel guiding positioning at two sides and closing-up guide plates at two sides, the guide wheels are arranged at the incoming material ends of the battery pieces in the advancing direction of the closing-up guide plates, and the battery pieces are accurately centered along the closing-up guide plates in the width direction after being guided and positioned by the guide wheels.
6. A method of flexibly cleaving and spacing a silicon wafer according to claim 4, wherein: the equidistant output conveyer belt is compatible with different splinter requirements, the whole splinter is split into N small splinter pieces which are all separated into the N small splinter pieces through the equidistant output conveyer belt to finish the equidistant conveying, wherein N is a natural number which is more than or equal to 2.
7. An apparatus for flexibly cleaving and spacing a silicon wafer, comprising: the assembly line comprises an assembly line frame, wherein a plurality of holes which are penetrated through in the thickness direction are arranged on the two sides of the assembly line frame in the width direction respectively, a plurality of conveying belt rollers are arranged at the front end, the middle end and the rear end of the assembly line frame respectively, one group of the conveying belt rollers are connected with an output shaft of a driving motor through a transmission mechanism, the opening conveying belt is wrapped on the conveying belt rollers arranged along the assembly line frame to form an upper conveying surface in a closed manner, a separated conveying frame is further arranged behind the assembly line frame, a plurality of equidistant output conveying belts are arranged on the upper surface of the separated conveying frame, a plurality of adsorption connecting holes which are penetrated through in the thickness direction are arranged on the equidistant output conveying belt, a first distribution supporting plate and a second distribution supporting plate are arranged on the separated conveying frame, and a transition guide wheel is arranged below the first distribution supporting plate and the second distribution supporting plate, the inner cavities of the first arrangement supporting plate and the second arrangement supporting plate are vacuum cavities and externally connected with air pumps, and the conveying line speed of the perforated conveying belt is smaller than that of the equidistant output conveying belt; the first arrangement supporting plate is a guide structure with a downward inclination, the equidistant output conveying belt is arranged along the arrangement of the first arrangement supporting plate, the transition guide wheel and the second arrangement supporting plate, and the equidistant output conveying belt is driven by an independent second driving motor; the flexible battery piece cutting device is characterized by further comprising a conveying belt supporting plate and a flexible splitting block, wherein the tail end of the conveying belt supporting plate is connected with the starting end of the flexible splitting block, an adsorption hole is formed in the upper surface of the conveying belt supporting plate, the adsorption hole is formed in the upper surface of the flexible splitting block, the inner cavity of the conveying belt supporting plate is a vacuum cavity and an external air pump, the upper surface of the flexible splitting block is sequentially provided with a plane section, a first cambered surface section and a second cambered surface section, the inner cavity of the splitting plate passing through the flexible splitting block is two mutually isolated vacuum pumping cavities, specifically a first vacuum pumping cavity and a second vacuum pumping cavity, the first vacuum pumping cavity corresponds to adsorption of the plane section, the second vacuum pumping cavity corresponds to adsorption of the first cambered surface section and the second cambered surface section, and the pressure of the second vacuum pumping cavity is greater than that of the first vacuum pumping cavity and is used for splitting a battery piece with a cutting.
8. A flexible cleaving and spacing device as claimed in claim 7, wherein: the assembly line frame has arranged battery piece blanking district, battery piece width to zhong district, battery piece fracture district in order along length direction, battery piece width centering district includes the leading wheel of both sides, the binding off deflector of both sides, the bottom installation axle of leading wheel admittedly install in the corresponding side position of assembly line frame through the installing support, the binding off deflector includes anterior binding off deflector, rear portion straight line parallel plate, anterior binding off board is used for the width direction centering of battery piece, rear portion straight line parallel plate ensures that the stable centering of battery piece is advanced.
9. A flexible cleaving and spacing device as claimed in claim 7, wherein: the conveying device is characterized by further comprising a driving wheel, the driving wheel is fixedly arranged below the assembly line rack, the perforated conveying belt is arranged along the conveying belt roller wheel through driving of the driving wheel, the driving motor is fixedly arranged below the assembly line rack, an output shaft of the driving motor is connected with an input shaft of the driving wheel through a transmission device, and the driving motor synchronously drives the perforated conveying belt on two sides to move.
10. A flexible cleaving and spacing device as claimed in claim 7, wherein: the perforated conveying belt and the equidistant output conveying belt are belts.
11. A flexible cleaving and spacing device as claimed in claim 7, wherein: the first cambered surface section is a large-diameter cambered section, the second cambered surface section is a guide cambered section which is connected with the tail end of the large-diameter cambered section and a falling vertical surface, and the initial height of the falling vertical surface is lower than the height of the tail end of the first cambered surface section; the starting end of the first arrangement supporting plate is connected with the guide arc section.
12. A flexible cleaving and spacing device as claimed in claim 7, wherein: the spacing between each of the cleaved pieces is adjusted by adjusting the difference in the relative travel speeds of the equally spaced output conveyor relative to the apertured conveyor.
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| CN202010500438.1A CN111483795A (en) | 2020-06-04 | 2020-06-04 | Flexible silicon wafer cracking and spacing method and corresponding device |
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| CN202010500438.1A CN111483795A (en) | 2020-06-04 | 2020-06-04 | Flexible silicon wafer cracking and spacing method and corresponding device |
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| CN111483795A true CN111483795A (en) | 2020-08-04 |
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| CN113353598A (en) * | 2021-08-05 | 2021-09-07 | 江苏伟森家居有限公司 | Automatic plank processing turning device of transportation material |
| CN113385438A (en) * | 2021-08-02 | 2021-09-14 | 苏州三熙智能科技有限公司 | Battery piece check out test set |
| CN113458687A (en) * | 2021-07-07 | 2021-10-01 | 宁夏小牛自动化设备有限公司 | Pitch device, welding head, welding device and welding method |
| CN113715481A (en) * | 2021-09-18 | 2021-11-30 | 无锡奥特维旭睿科技有限公司 | Battery slicing printing device and printing method |
| CN114275503A (en) * | 2021-11-24 | 2022-04-05 | 淮北仕欧网络科技有限公司 | Bidirectional material shifting and spacing device for 3C electronic welding |
| CN114435917A (en) * | 2022-02-24 | 2022-05-06 | 北京华康诚信医疗科技有限公司 | Finished infusion bag reason material device |
| CN115911189A (en) * | 2023-03-14 | 2023-04-04 | 苏州智慧谷激光智能装备有限公司 | Battery piece distance adjusting device and method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113458687A (en) * | 2021-07-07 | 2021-10-01 | 宁夏小牛自动化设备有限公司 | Pitch device, welding head, welding device and welding method |
| CN113458687B (en) * | 2021-07-07 | 2022-06-10 | 宁夏小牛自动化设备有限公司 | Pitch device, welding head, welding device and welding method |
| CN113385438A (en) * | 2021-08-02 | 2021-09-14 | 苏州三熙智能科技有限公司 | Battery piece check out test set |
| CN113353598A (en) * | 2021-08-05 | 2021-09-07 | 江苏伟森家居有限公司 | Automatic plank processing turning device of transportation material |
| CN113715481A (en) * | 2021-09-18 | 2021-11-30 | 无锡奥特维旭睿科技有限公司 | Battery slicing printing device and printing method |
| CN114275503A (en) * | 2021-11-24 | 2022-04-05 | 淮北仕欧网络科技有限公司 | Bidirectional material shifting and spacing device for 3C electronic welding |
| CN114435917A (en) * | 2022-02-24 | 2022-05-06 | 北京华康诚信医疗科技有限公司 | Finished infusion bag reason material device |
| CN115911189A (en) * | 2023-03-14 | 2023-04-04 | 苏州智慧谷激光智能装备有限公司 | Battery piece distance adjusting device and method |
| CN117293075A (en) * | 2023-11-24 | 2023-12-26 | 苏州小牛自动化设备有限公司 | Battery piece conveying system, battery string laying method and device |
| CN117293075B (en) * | 2023-11-24 | 2024-03-01 | 苏州小牛自动化设备有限公司 | Battery piece conveying system, battery string laying method and device |
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