CN111472037A - 一种单面电镀装置及其电镀工艺 - Google Patents
一种单面电镀装置及其电镀工艺 Download PDFInfo
- Publication number
- CN111472037A CN111472037A CN202010458204.5A CN202010458204A CN111472037A CN 111472037 A CN111472037 A CN 111472037A CN 202010458204 A CN202010458204 A CN 202010458204A CN 111472037 A CN111472037 A CN 111472037A
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- electroplating
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- 238000009713 electroplating Methods 0.000 title claims abstract description 230
- 238000000034 method Methods 0.000 title claims abstract description 28
- 230000008569 process Effects 0.000 title claims abstract description 27
- 239000007788 liquid Substances 0.000 claims abstract description 76
- 238000007747 plating Methods 0.000 claims abstract description 73
- 239000000126 substance Substances 0.000 claims abstract description 12
- 238000011282 treatment Methods 0.000 claims description 20
- 238000001914 filtration Methods 0.000 claims description 19
- 238000007789 sealing Methods 0.000 claims description 13
- 239000011248 coating agent Substances 0.000 claims description 12
- 238000000576 coating method Methods 0.000 claims description 12
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 8
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 6
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 6
- 238000001035 drying Methods 0.000 claims description 6
- 229910052759 nickel Inorganic materials 0.000 claims description 5
- 238000005238 degreasing Methods 0.000 claims description 4
- 238000007654 immersion Methods 0.000 claims description 4
- 239000004063 acid-resistant material Substances 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims description 3
- 230000007246 mechanism Effects 0.000 claims description 3
- QAOWNCQODCNURD-UHFFFAOYSA-N sulfuric acid Substances OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 3
- 230000003213 activating effect Effects 0.000 claims description 2
- 239000002699 waste material Substances 0.000 abstract description 11
- 239000002184 metal Substances 0.000 description 31
- 229910052751 metal Inorganic materials 0.000 description 31
- 150000001768 cations Chemical class 0.000 description 22
- 238000005406 washing Methods 0.000 description 9
- 239000002253 acid Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000005868 electrolysis reaction Methods 0.000 description 4
- 230000003628 erosive effect Effects 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 239000011148 porous material Substances 0.000 description 4
- 238000003756 stirring Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 230000004913 activation Effects 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 230000001965 increasing effect Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 2
- 230000002708 enhancing effect Effects 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- 238000006356 dehydrogenation reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007730 finishing process Methods 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000001579 optical reflectometry Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/02—Tanks; Installations therefor
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D21/00—Processes for servicing or operating cells for electrolytic coating
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D21/00—Processes for servicing or operating cells for electrolytic coating
- C25D21/10—Agitating of electrolytes; Moving of racks
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating Methods And Accessories (AREA)
Abstract
Description
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202010458204.5A CN111472037B (zh) | 2020-05-26 | 2020-05-26 | 一种单面电镀装置及其电镀工艺 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202010458204.5A CN111472037B (zh) | 2020-05-26 | 2020-05-26 | 一种单面电镀装置及其电镀工艺 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN111472037A true CN111472037A (zh) | 2020-07-31 |
CN111472037B CN111472037B (zh) | 2021-04-06 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN202010458204.5A Active CN111472037B (zh) | 2020-05-26 | 2020-05-26 | 一种单面电镀装置及其电镀工艺 |
Country Status (1)
Country | Link |
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CN (1) | CN111472037B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113046804A (zh) * | 2021-04-25 | 2021-06-29 | 山王电子(无锡)有限公司 | 一种连续电镀线特殊镀金密闭喷嘴装置 |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0483937A1 (de) * | 1990-10-24 | 1992-05-06 | ATOTECH Deutschland GmbH | Membranelektrolysemodul, Verfahren und dessen Verwendung |
EP1010781A1 (en) * | 1997-04-17 | 2000-06-21 | Sekisui Chemical Co., Ltd. | Conductive particles and method and device for manufacturing the same, anisotropic conductive adhesive and conductive connection structure, and electronic circuit components and method of manufacturing the same |
US20020084189A1 (en) * | 2001-01-03 | 2002-07-04 | Applied Materials, Inc. | Method and associated apparatus to mechanically enhance the deposition of a metal film within a feature |
US20050006244A1 (en) * | 2000-05-11 | 2005-01-13 | Uzoh Cyprian E. | Electrode assembly for electrochemical processing of workpiece |
CN201092588Y (zh) * | 2006-08-16 | 2008-07-30 | 铁军 | 一种实现方管结晶器连续差厚镀层的流镀装置 |
JP2012224891A (ja) * | 2011-04-18 | 2012-11-15 | Nippon Steel Engineering Co Ltd | 錫充填装置および錫充填方法 |
CN103305885A (zh) * | 2013-06-01 | 2013-09-18 | 北京工业大学 | 一种针对空心镀件内表面施镀的导流式辅助施镀装置及施镀方法 |
CN105714341A (zh) * | 2014-12-05 | 2016-06-29 | 温州市华夏电镀有限公司 | 一种单面电镀装置及其电镀工艺 |
CN208023097U (zh) * | 2018-07-13 | 2018-10-30 | 福建省福联集成电路有限公司 | 一种增加产能的电镀机 |
CN208346284U (zh) * | 2018-04-23 | 2019-01-08 | 苏州普瑞得电子有限公司 | 一种适应性高的单面电镀装置 |
-
2020
- 2020-05-26 CN CN202010458204.5A patent/CN111472037B/zh active Active
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0483937A1 (de) * | 1990-10-24 | 1992-05-06 | ATOTECH Deutschland GmbH | Membranelektrolysemodul, Verfahren und dessen Verwendung |
EP1010781A1 (en) * | 1997-04-17 | 2000-06-21 | Sekisui Chemical Co., Ltd. | Conductive particles and method and device for manufacturing the same, anisotropic conductive adhesive and conductive connection structure, and electronic circuit components and method of manufacturing the same |
US20050006244A1 (en) * | 2000-05-11 | 2005-01-13 | Uzoh Cyprian E. | Electrode assembly for electrochemical processing of workpiece |
US20020084189A1 (en) * | 2001-01-03 | 2002-07-04 | Applied Materials, Inc. | Method and associated apparatus to mechanically enhance the deposition of a metal film within a feature |
CN201092588Y (zh) * | 2006-08-16 | 2008-07-30 | 铁军 | 一种实现方管结晶器连续差厚镀层的流镀装置 |
JP2012224891A (ja) * | 2011-04-18 | 2012-11-15 | Nippon Steel Engineering Co Ltd | 錫充填装置および錫充填方法 |
CN103305885A (zh) * | 2013-06-01 | 2013-09-18 | 北京工业大学 | 一种针对空心镀件内表面施镀的导流式辅助施镀装置及施镀方法 |
CN105714341A (zh) * | 2014-12-05 | 2016-06-29 | 温州市华夏电镀有限公司 | 一种单面电镀装置及其电镀工艺 |
CN208346284U (zh) * | 2018-04-23 | 2019-01-08 | 苏州普瑞得电子有限公司 | 一种适应性高的单面电镀装置 |
CN208023097U (zh) * | 2018-07-13 | 2018-10-30 | 福建省福联集成电路有限公司 | 一种增加产能的电镀机 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113046804A (zh) * | 2021-04-25 | 2021-06-29 | 山王电子(无锡)有限公司 | 一种连续电镀线特殊镀金密闭喷嘴装置 |
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Publication number | Publication date |
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CN111472037B (zh) | 2021-04-06 |
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CB03 | Change of inventor or designer information |
Inventor after: Shen Guangsheng Inventor after: Zhu Yongan Inventor after: Shen Jinpeng Inventor after: Chen Gang Inventor before: Zhu Yongan Inventor before: Shen Jinpeng Inventor before: Chen Gang |
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Effective date of registration: 20210317 Address after: 245200 No.2, Weiyi Road, Shexian Circular Economy Park, Huangshan City, Anhui Province (building 19, Shexian Circular Economy Park) Applicant after: Huangshan Jintu surface treatment Co.,Ltd. Address before: 241070 No.189, Jiuhua South Road, Yijiang District, Wuhu City, Anhui Province Applicant before: Zhu Yongan |
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