CN111457833B - Flexible bending sensor based on three-dimensional electrode structure and processing method - Google Patents
Flexible bending sensor based on three-dimensional electrode structure and processing method Download PDFInfo
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- CN111457833B CN111457833B CN202010237738.5A CN202010237738A CN111457833B CN 111457833 B CN111457833 B CN 111457833B CN 202010237738 A CN202010237738 A CN 202010237738A CN 111457833 B CN111457833 B CN 111457833B
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- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
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- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
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- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
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Abstract
The embodiment of the invention provides a flexible bending sensor based on a three-dimensional electrode structure and a processing method, wherein the sensor comprises the following components: the flexible substrate layer is positioned on the conductive medium layer and the three-dimensional electrode on the substrate layer, and the outer packaging and wrapping protective layer; the number of the three-dimensional electrodes is at least two, and the three-dimensional electrodes have a preset thickness to support the wrapping layer so as to prevent the conductive medium layer from contacting with the wrapping layer; a plurality of gaps are formed among the three-dimensional electrodes, and the conductive medium of the conductive medium layer is tightly filled among the gaps of the three-dimensional electrodes. The sensor supports the wrapping layer through the three-dimensional electrode, so that the conductive medium layer is prevented from contacting with the wrapping layer, the conductive medium layer can be prevented from being interfered by extrusion force, an electric signal generated by the sensor during bending can be reflected visually, and the precision and the reliability of the sensor are improved. A plurality of gaps are formed among the three-dimensional electrodes, and the conductive medium of the conductive medium layer is tightly filled among the gaps of the three-dimensional electrodes, so that the three-dimensional electrode has high sensitivity and can respond to deformation of a small angle in time.
Description
Technical Field
The invention relates to the field of flexible bending sensors, in particular to a flexible bending sensor based on a three-dimensional electrode structure and a processing method.
Background
With the rapid development of sensor technology, computer software and hardware and the internet of things industry, intelligent and portable wearable equipment has gained wide attention. Wearable equipment has wide application prospect, if the flexible bending sensor of perception object deformation takes place, it has good pliability and ductility, can laminate to the object surface well on. Such sensors play an important role in many fields, in the field of physical movement and health monitoring, such as gesture recognition, limb rehabilitation, portable medical devices and the like. In addition, the method also has important application in the field of human-computer interaction, such as intelligent gloves, VR game interaction, robot simulation action and the like.
Bending sensors that are being studied are largely divided into bending sensors based on optical principles and bending sensors based on electrical principles. The optical principle-based bending sensor has the advantages that the precision is higher, the stability is better, but the optical fiber cost is higher and the service life is shorter because the optical fiber is sensitive and fragile, and the bending angle is limited. The bending sensor based on the electrical principle can be divided into a resistance type, a capacitance type, a piezomagnetic type and an inductance type, the bending deformation of the sensor is converted into the change of an electric signal, the bending angle and the change of the electric signal have a linear corresponding relation, the sensor hardly needs additional circuit equipment, the cost is low, and one or more layers of conductive materials are usually processed on a flexible substrate and have good flexibility and ductility.
The existing resistance type bending sensor has some problems that (1) the existing sensor has low sensitivity and can not respond to deformation of a tiny angle; (2) the existing sensor can be packaged with a protective film outside the sensor in order to improve the stability of the sensor and protect a conductive medium layer, however, the protective film can affect the bending sensor in the using process, when the sensor is bent, the sensor can be stressed by the pressure from a packaging and wrapping protective layer, the coupling force of the pressure and the bending force is generated, and the change of an electric signal cannot accurately correspond to the bending degree of the sensor.
Disclosure of Invention
In order to solve the above problems, embodiments of the present invention provide a flexible bending sensor based on a three-dimensional electrode structure and a processing method thereof.
In a first aspect, an embodiment of the present invention provides a flexible bending sensor based on a three-dimensional electrode structure, including: the flexible substrate layer is positioned on the conductive medium layer and the three-dimensional electrode on the substrate layer, and the outer packaging and wrapping protective layer; the number of the three-dimensional electrodes is at least two, and the three-dimensional electrodes have a preset thickness to support the packaging and wrapping protective layer so as to prevent the conductive medium layer from contacting with the packaging and wrapping protective layer; a plurality of gaps are formed among the three-dimensional electrodes, and the conductive medium of the conductive medium layer is tightly filled among the gaps of the three-dimensional electrodes.
Furthermore, the conductive medium layer is made of a nano-scale sheet-shaped conductive material, including a single-layer graphene sheet and a titanium carbide nanosheet.
Further, the packaging and wrapping protective layer is a dense polymer film layer.
Further, the base material of the flexible base layer comprises any one of polyvinylidene fluoride, silicon rubber and polyimide.
In a second aspect, an embodiment of the present invention provides a method for processing a flexible bending sensor based on a three-dimensional electrode structure, where the method includes: after impurities are processed on the flexible substrate, liquid metal solidification is carried out on the substrate to obtain a three-dimensional electrode; transferring the prepared conductive medium layer with the preset thickness to a substrate with a three-dimensional electrode, and pressing the conductive medium layer to be in contact with the substrate, wherein the preset thickness is smaller than the thickness of the three-dimensional electrode; and packaging and wrapping the sensor with a protective layer.
Further, the solid electrode obtained by solidifying the liquid metal on the substrate comprises: starting a preheating function of the liquid metal printer to heat the metal printing material into a liquid state; and printing according to the electrode diagram, standing after the electrode diagram is finished, and waiting for the liquid metal to be solidified to form a three-dimensional electrode.
Further, the conductive medium is graphene; correspondingly, before the prepared conductive medium layer with the preset thickness is transferred to the substrate with the three-dimensional electrode, the method further comprises the following steps: filling a graphene dispersion liquid with a preset concentration into a filtering container; connecting an air suction port of a suction filter by using a vacuum compressor, and clamping a mixed fiber resin filter membrane between the solution and the suction filter for suction filtration to cover the filter membrane with a graphene layer with a preset thickness; and washing off the mixed fiber resin filter membrane by using a solvent, and drying to obtain the graphene film.
Further, the preset thickness is controlled according to the suction filtration time.
Further, after the flexible substrate is processed with impurities and before the liquid metal solidification is performed on the substrate, the method further includes: and coating a layer of isocationic ions on the surface of the flexible substrate layer.
Further, the packaging and protecting layer for the sensor comprises: and a compact polymer film layer is coated on the surface of the sensor through a vacuum vapor deposition process.
According to the flexible bending sensor based on the three-dimensional electrode structure and the processing method thereof, the packaging and wrapping protective layer is supported by the three-dimensional electrode, so that the conductive medium layer is prevented from contacting with the packaging and wrapping protective layer, the conductive medium layer can be prevented from being interfered by extrusion force, an electric signal generated by the sensor during bending can be reflected visually, and the precision and the reliability of the sensor are improved. A plurality of gaps are formed among the three-dimensional electrodes, and the conductive medium of the conductive medium layer is tightly filled among the gaps of the three-dimensional electrodes, so that the sensitivity is high, and the response to the deformation of a small angle can be timely carried out.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and those skilled in the art can also obtain other drawings according to the drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a flexible bending sensor based on a three-dimensional electrode structure according to an embodiment of the present invention;
fig. 2 is a schematic perspective electrode diagram of a flexible bending sensor based on a three-dimensional electrode structure according to an embodiment of the present invention;
FIG. 3 is a bending schematic diagram of a flexible bending sensor based on a three-dimensional electrode structure according to an embodiment of the present invention;
FIG. 4 is a diagram illustrating a comparison between the effects of a flexible bending sensor based on a three-dimensional electrode structure according to an embodiment of the present invention;
fig. 5 is a flowchart of a method for processing a flexible bending sensor based on a three-dimensional electrode structure according to an embodiment of the present invention;
fig. 6 is a schematic flow chart of a graphene film processing method according to an embodiment of the present invention;
fig. 7 is a graph of a sensor resistance value of a flexible bending sensor based on a three-dimensional electrode structure according to an embodiment of the present invention along with a bending angle;
description of reference numerals: 101. a flexible substrate layer; 102. a conductive dielectric layer; 103. a stereoscopic electrode; 104. and (7) a wrapping layer.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Aiming at the problems that the existing sensor is low in sensitivity and can be interfered by the pressure of an encapsulation layer, the embodiment of the invention provides a flexible bending sensor based on a three-dimensional electrode structure. Fig. 1 is a schematic structural diagram of a flexible bending sensor based on a three-dimensional electrode structure according to an embodiment of the present invention, and as shown in fig. 1, the embodiment of the present invention provides a flexible bending sensor based on a three-dimensional electrode structure, including: the flexible substrate layer 101, a conductive medium layer 102 and a three-dimensional electrode 103 which are positioned on the substrate layer, and an outer packaging and wrapping protective layer (wrapping layer for short) 104; the number of the three-dimensional electrodes 103 is at least two, and the wrapping layer 104 is supported so as to prevent the conductive medium layer 102 from contacting with the wrapping layer 104; a plurality of gaps are formed between the stereo electrodes 103, and the conductive medium is tightly filled between the gaps of the stereo electrodes 104.
Fig. 2 is a schematic perspective electrode diagram of a flexible bending sensor based on a three-dimensional electrode structure according to an embodiment of the present invention, as shown in fig. 2. On the left side of fig. 2 is a stereo electrode 103 processed on a flexible substrate, and as an alternative embodiment, the flexible substrate material comprises polyvinylidene fluoride, silicon rubber and polyimide. It should be noted that there are many processing schemes for the stereo electrodes 103, and the shape is not limited to that shown in fig. 2, and the right side of fig. 2 is a sensor in which the gaps between the stereo electrodes 103 are filled with a conductive medium layer 102 formed by a conductive substance. The design of the three-dimensional electrode can improve the sensitivity of the sensor, the three-dimensional electrode with the thickness can better protect a sensor coating from being influenced by the pressure of the packaging layer, and the bending angle can be accurately judged. The number of the conventional electrodes is two, and a plurality of electrodes can be arranged according to the actual application requirement.
As an alternative embodiment, the conductive medium layer is made of a nano-scale sheet-shaped conductive material, including a single-layer graphene sheet and a titanium carbide nanosheet. In this embodiment, the conductive medium layer 102 is a graphene layer, and this will be described as an example below. The sensitivity of the graphene sensor to bending depends on the contact condition between graphene sheets, and the sensitivity is improved by designing a three-dimensional electrode structure. Graphene is a two-dimensional structured nano material, and single-layer carbon atoms are arranged into a hexagonal honeycomb crystal structure in an sp2 hybridization mode. Due to the special structure in the crystal, the graphene has excellent conductivity and extremely high stability. Fig. 3 is a bending schematic diagram of a flexible bending sensor based on a three-dimensional electrode structure according to an embodiment of the present invention, as shown in fig. 3, in a natural state, single graphene layers are stacked closely together, there is a large contact area between the graphene layers, a graphene conductive dielectric layer is formed, and around the three-dimensional electrode 103, the graphene layers are in close contact with the electrode, and have good electrical conductivity and a stable initial resistance. When the flexible sensor is bent, partial graphene sheets on the surface of the substrate are separated to generate a plurality of micro cracks, so that the contact area between the graphene sheets is reduced, some graphene is separated from the three-dimensional electrode, the contact area between the dielectric layer and the three-dimensional electrode is reduced, the resistance of the conductor is inversely proportional to the cross-sectional area, and the resistance value of the sensor is increased. When the sensor is bent, the internal structure of the conducting layer is changed, and the contact between the conducting layer and the three-dimensional electrode is changed, so that the sensitivity of the sensor is improved by the mechanism principle. Along with the angle that the sensor is crooked constantly increases, the crack that graphite alkene layer produced will be more, will have more graphite alkene piece and three-dimensional electrode to take place to break away from, and the resistance of sensor also can constantly increase, and sensitivity constantly reduces. And the resistance value change of the sensor and the bending angle of the sensor are in a linear mapping relation, and the bending angle can be calculated according to the resistance value during bending.
In addition, the three-dimensional electrode structure can protect the conductive medium layer and protect the conductive medium layer from being influenced by external force. Taking a common graphene sensor without a three-dimensional electrode structure as an example, fig. 4 is a comparison graph of the effect of a flexible bending sensor based on a three-dimensional electrode structure provided by an embodiment of the present invention, as shown in part a of fig. 4, a wrapping layer tightly wraps a graphene layer and a flexible substrate layer, and when the flexible bending sensor is bent, the sensor is subjected to both bending force and extrusion force from the wrapping layer, so that the reason for generating an electrical signal by the sensor is the coupling force of the bending force and the extrusion force, and the bending angle cannot be calculated according to the electrical signal at this time. The long-term extrusion force can also cause the graphene layer to deform, and the precision and the performance of the sensor are influenced. After the three-dimensional electrode designed by the embodiment of the invention is added, the effect diagram is shown in part B of fig. 4, and it can be seen that after the three-dimensional electrode is added, the wrapping layer is supported by the three-dimensional electrode to avoid direct contact with the conductive medium layer, the extrusion force of the wrapping layer directly acts on the three-dimensional electrode during bending to avoid the graphene layer from being interfered by other forces, and the measured data is an electric signal generated by the sensor during bending, so that the precision and the reliability of the sensor are improved.
According to the flexible bending sensor based on the three-dimensional electrode structure, the wrapping layer is supported through the three-dimensional electrode, so that the conductive medium layer is prevented from being in contact with the wrapping layer, the conductive medium layer can be prevented from being interfered by extrusion force, an electric signal generated by the sensor during bending can be reflected visually, and the precision and the reliability of the sensor are improved. A plurality of gaps are formed among the three-dimensional electrodes, and the conductive medium of the conductive medium layer is tightly filled among the gaps of the three-dimensional electrodes, so that the sensitivity is high, and the response to the deformation of a small angle can be timely carried out.
Based on the above description of the embodiments, as an alternative embodiment, the encapsulation and wrapping protection layer is a dense polymer film layer. A compact polymer film layer is wrapped on the surface of the sensor to serve as a wrapping layer, so that water vapor, corrosion and the like can be isolated under severe conditions, and the stability and durability of the sensor are improved.
Fig. 5 is a flowchart of a method for processing a flexible bending sensor based on a three-dimensional electrode structure according to an embodiment of the present invention, and as shown in fig. 5, the embodiment of the present invention provides a method for processing a flexible bending sensor based on a three-dimensional electrode structure, including:
501. and after impurities are processed on the flexible substrate, liquid metal solidification is carried out on the substrate to obtain the three-dimensional electrode.
The whole sensor is processed on a flexible substrate, and a Polyimide (PI) film is taken as an example for illustration. Processing on a PI film with the thickness of 15mm, firstly cutting the PI film into a required size, then cleaning impurities on the surface of the PI film, for example, placing the PI film in an isopropanol solution, cleaning for 15 minutes by using an ultrasonic cleaner, flushing the isopropanol solution by using deionized water, blowing water beads on the surface of the PI film by using nitrogen for drying, placing on a heating table, and evaporating water molecules on the surface of the PI film by using 130 ℃. And (4) processing the three-dimensional electrode on the PI film after the PI film is cleaned. There are also many ways to process the three-dimensional electrode, such as processing the three-dimensional electrode by a liquid metal printer.
502. Transferring the prepared conductive medium layer with the preset thickness to a substrate with a three-dimensional electrode, and pressing the conductive medium layer to be in contact with the substrate, wherein the preset thickness is smaller than the thickness of the three-dimensional electrode.
And transferring the prepared conductive medium layer to a PI substrate with a three-dimensional electrode, and slightly pressing the conductive medium layer to make the conductive medium layer better contact with the PI substrate. The thickness of the conductive medium layer is smaller than that of the three-dimensional electrode, the three-dimensional electrode with the thickness can better protect the conductive medium layer of the sensor when the sensor is bent, the influence of the pressure of the packaging layer is avoided, and the bending angle is accurately judged.
503. And packaging and wrapping the sensor with a protective layer.
In order to prevent the conductive medium layer from being separated in the bending process, the sensor is considered to be packaged, for example, a dense polymer film layer is wrapped on the surface of the sensor, so that water vapor, corrosion and the like can be isolated under severe conditions, and the stability and durability of the sensor are improved.
According to the flexible bending sensor processing method based on the three-dimensional electrode structure, the three-dimensional electrode supports the wrapping layer through the preset thickness smaller than the thickness of the three-dimensional electrode, so that the conductive medium layer is prevented from being in contact with the wrapping layer, the conductive medium layer can be prevented from being interfered by extrusion force, the electric signal change generated by the sensor during bending can be accurately reflected, and the precision and the reliability of the sensor are improved. A plurality of gaps are formed among the three-dimensional electrodes, and the conductive medium of the conductive medium layer is tightly filled among the gaps of the three-dimensional electrodes, so that the sensitivity is high, and the response to the deformation of a small angle can be timely carried out.
Based on the content of the foregoing embodiment, as an alternative embodiment, the solidifying of the liquid metal on the substrate to obtain the three-dimensional electrode includes: guiding the designed electrode diagram into a liquid metal printer; starting a preheating function of the liquid metal printer to heat the metal printing material into a liquid state; and printing according to the electrode diagram, standing after the electrode diagram is finished, and waiting for the liquid metal to be solidified to form a three-dimensional electrode.
There are many methods for processing the three-dimensional electrode, and a liquid metal printer is used for processing the three-dimensional electrode as an example. Firstly, designing an electrode pattern to be printed by using computer software, for example, inserting finger electrodes with the gap width of 3mm, guiding a pattern file to a liquid metal printer, starting a preheating function of the liquid metal printer, and heating a metal printing material into a liquid state, wherein the metal material used by the metal printer is synthetic metal with a low melting point. After preheating is complete, the printing of the liquid electrodes as designed can begin. After printing, the liquid metal is allowed to stand at room temperature for 30 minutes, and the liquid metal can be solidified into a solid metal electrode. The three-dimensional electrode is processed through the liquid metal printer, and the rapid processing of the three-dimensional electrode is realized.
Based on the content of the foregoing embodiment, as an alternative embodiment, the conductive medium is graphene; correspondingly, before the prepared conductive medium layer with the preset thickness is transferred to the substrate with the three-dimensional electrode, the method further comprises the following steps: filling a graphene dispersion liquid with a preset concentration into a filtering container; connecting an air suction port of a suction filter by using a vacuum compressor, and clamping a mixed fiber resin filter membrane between the solution and the suction filter for suction filtration to cover the filter membrane with a graphene layer with a preset thickness; and washing off the mixed fiber resin filter membrane by using a solvent, and drying to obtain the graphene film.
Since graphene has good mechanical properties and electrical properties and is a commonly used material for resistive bending sensors, a graphene film is selected as a conductive medium layer. Fig. 6 is a schematic flow chart of a graphene film processing method provided by an embodiment of the present invention, and as shown in fig. 6, the selected method is a vacuum filtration method for preparing a graphene film, and the specific steps are to fill a graphene dispersion liquid with a concentration not too high into a filtration container, connect an extraction opening of a suction filter with a vacuum compressor, sandwich a mixed fiber resin filter membrane (with an aperture of 0.45um) between the solution and the suction filter, and perform suction filtration for 2 hours under a pressure of 0.08MPa, during the suction filtration, graphene sheets gradually and automatically deposit on the filter membrane along with liquid dropping, gradually and uniformly cover the whole filter membrane, control the suction filtration time according to the required thickness of the film, obtain a graphene layer with a uniform film on the filter membrane, then wash off the mixed fiber resin filter membrane with acetone, and place the graphene layer in a vacuum drying oven at 60 ℃, and heat for 2 hours, thereby obtaining the graphene film. And transferring the prepared graphene film to a PI substrate with a three-dimensional electrode, and slightly pressing the graphene film to make the graphene film better contact with the PI substrate.
Based on the above description of the embodiments, as an optional embodiment, the preset thickness is controlled according to the pumping filtration time. In the suction filtration process, the suction filtration time can be controlled according to the thickness of a required film, the graphene layer with the uniform film on the filter membrane is obtained, the method realizes effective control of the thickness of the graphene layer, and the graphene layer with the preset thickness can be prepared according to requirements.
Based on the content of the foregoing embodiment, as an optional embodiment, after the flexible substrate is processed with the impurities, before the liquid metal solidification is performed on the substrate, the method further includes: and coating a layer of isocationic ions on the surface of the flexible substrate layer. In order to enable the metal electrode to have good adhesion with the PI film, a layer of plasma oxygen ions is needed to be sprayed on the surface of the PI film by a plasma oxygen plasma cleaner before liquid metal solidification is carried out on the substrate, so that adhesion between the three-dimensional metal electrode and the PI film is facilitated.
Based on the content of the foregoing embodiment, as an optional embodiment, the encapsulating and protecting layer for the sensor includes: and a compact polymer film layer is coated on the surface of the sensor through a vacuum vapor deposition process.
In order to prevent the graphene layer from being separated in the bending process, the embodiment of the invention considers that the sensor is packaged, the packaging process uses a vacuum vapor deposition process, and the surface of the sensor is coated with a compact polymer film layer, so that water vapor, corrosion and the like can be isolated under severe conditions, and the stability and durability of the sensor are improved.
And (4) carrying out a bending experiment by using the flexible bending sensor processed by the previous processing technology. Connecting two lead wires of the sensor with a direct current resistance analyzer respectively, manually bending the sensor, measuring the bending angle by using a protractor, and recording the resistance values of different bending angles. Fig. 7 is a graph of a sensor resistance value of a flexible bending sensor based on a three-dimensional electrode structure according to an embodiment of the present invention, which is plotted with respect to a bending angle, and a data result is plotted as fig. 7. At the beginning of the experiment, the sensor was left in its natural state for 10 seconds, and the initial resistance of the sensor was found to be 8.5k Ω. In the first experiment, the sensor is slowly bent by 10 degrees, a slow resistance value change process can be seen from the graph, the resistance peak value is 8.8k omega, and the fact that the sensitivity of the sensor can be improved through the three-dimensional electrode structure can be shown, and the small angle change of 10 degrees can be tested. Next, the sensor is bent twice for 20 °, and it can be seen that the resistance peak value of the sensor is close, which indicates that the recognition rate of the sensor for the same angle is high. In order to verify the stability of the sensor, the sensor is bent for 30 degrees in succession, and the resistance peak value of each bending is very close without large drift, so that the high stability of the sensor is verified. The sensor is subjected to bending experiments at different angles, wherein the bending experiments are 60 degrees, 90 degrees, 80 degrees and 70 degrees, the resistance peak value at 90 degrees is 16.1k omega, the resistance change rate is 89.4 percent, and the sensor is proved to have high sensitivity and a large measurement range. After the bending test is finished, the sensor returns to the natural state, the measured final resistance value is 9.1k omega, and the sensor generates a tiny resistance value drift phenomenon, but the resistance value drift phenomenon is within an acceptable error range for the bending sensor.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (10)
1. A flexible bending sensor based on a three-dimensional electrode structure, which is characterized by comprising:
the flexible substrate layer is positioned on the conductive medium layer and the three-dimensional electrode on the substrate layer, and the outer packaging and wrapping protective layer;
the number of the three-dimensional electrodes is at least two, and the three-dimensional electrodes have a preset thickness to support the packaging and wrapping protective layer so as to prevent the conductive medium layer from contacting with the packaging and wrapping protective layer;
a plurality of gaps are formed among the three-dimensional electrodes, and the conductive medium of the conductive medium layer is tightly filled among the gaps of the three-dimensional electrodes;
the conductive medium layer is in close contact with the electrode, and has conductivity and stable initial resistance; when the flexible sensor is bent, partial conductive media on the surface of the substrate are separated to generate a plurality of micro cracks, so that the contact area between the conductive media is reduced, meanwhile, partial conductive media are separated from the three-dimensional electrodes, the contact area between the conductive medium layer and the three-dimensional electrodes is reduced, the resistance of the conductor is inversely proportional to the cross-sectional area, and the resistance value of the sensor is increased.
2. The flexible bending sensor based on the three-dimensional electrode structure is characterized in that the conductive medium layer is made of a nano-scale flaky conductive material and comprises a single-layer graphene sheet and a titanium carbide nanosheet.
3. The flexible bend sensor based on three-dimensional electrode structure of claim 1, wherein the packaging and packaging protection layer is a dense polymer film layer.
4. The flexible bending sensor based on the three-dimensional electrode structure as claimed in claim 1, wherein the base material of the flexible base layer comprises any one of polyvinylidene fluoride, silicone rubber and polyimide.
5. A method for processing a flexible bending sensor based on a three-dimensional electrode structure according to any one of claims 1 to 4, comprising:
after impurities are processed on the flexible substrate, liquid metal solidification is carried out on the substrate to obtain a three-dimensional electrode;
transferring the prepared conductive medium layer with the preset thickness to a substrate with a three-dimensional electrode, and pressing the conductive medium layer to be in contact with the substrate, wherein the preset thickness is smaller than the thickness of the three-dimensional electrode;
and packaging and wrapping the sensor with a protective layer.
6. The method for processing the flexible bending sensor based on the three-dimensional electrode structure as claimed in claim 5, wherein the solidifying of the liquid metal on the substrate to obtain the three-dimensional electrode comprises:
guiding the designed electrode diagram into a liquid metal printer;
starting a preheating function of the liquid metal printer to heat the metal printing material into a liquid state;
and printing according to the electrode diagram, standing after the electrode diagram is finished, and waiting for the liquid metal to be solidified to form a three-dimensional electrode.
7. The method for processing the flexible bending sensor based on the three-dimensional electrode structure according to claim 5, wherein the conductive medium is graphene;
correspondingly, before the prepared conductive medium layer with the preset thickness is transferred to the substrate with the three-dimensional electrode, the method further comprises the following steps:
filling a graphene dispersion liquid with a preset concentration into a filtering container;
connecting an air suction port of a suction filter by using a vacuum compressor, and clamping a mixed fiber resin filter membrane between the solution and the suction filter for suction filtration to cover the filter membrane with a graphene layer with a preset thickness;
and washing off the mixed fiber resin filter membrane by using a solvent, and drying to obtain the graphene film.
8. The method for processing the flexible bending sensor based on the three-dimensional electrode structure is characterized in that the preset thickness is controlled according to the suction filtration time.
9. The method for processing the flexible bending sensor based on the three-dimensional electrode structure according to claim 5, wherein after the flexible substrate is processed with impurities and before the liquid metal solidification is performed on the substrate, the method further comprises:
and coating a layer of isocationic ions on the surface of the flexible substrate layer.
10. The method for processing the flexible bending sensor based on the three-dimensional electrode structure according to claim 5, wherein the step of packaging and wrapping the sensor with a protective layer comprises the steps of:
and a compact polymer film layer is coated on the surface of the sensor through a vacuum vapor deposition process.
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| CN113008124B (en) * | 2021-02-20 | 2023-10-17 | 宁波诺丁汉新材料研究院有限公司 | Multimode sensor and preparation method thereof |
| CN113483716B (en) * | 2021-05-21 | 2022-08-30 | 重庆大学 | Curved surface part machining method based on flexible sensor |
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