CN111433558B - Laser alignment system and laser alignment method - Google Patents
Laser alignment system and laser alignment method Download PDFInfo
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- CN111433558B CN111433558B CN201780097401.5A CN201780097401A CN111433558B CN 111433558 B CN111433558 B CN 111433558B CN 201780097401 A CN201780097401 A CN 201780097401A CN 111433558 B CN111433558 B CN 111433558B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B38/00—Ancillary operations in connection with laminating processes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
- G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
Abstract
A laser alignment system (100), comprising: a laser emitting device (30) for emitting a laser beam; a first driving device (81) for driving a first substrate (10) on which a first target (12) is provided; a second driving device (83) for driving a second substrate (50) on which a second target (52) is provided corresponding to the first target; the laser receiving device (70) and the laser emitting device are respectively positioned at two sides of the first substrate and the second substrate and are used for receiving laser beams emitted by the laser emitting device; and the control device (85) is used for controlling the laser emitting device, the first driving device, the second driving device and the laser receiving device. A laser alignment method of the laser alignment system is also provided.
Description
Technical Field
The invention relates to a laser alignment system and a laser alignment method.
Background
Alignment is required before the substrates are attached and assembled, for example, a glass cover plate in a display device is attached to a touch screen, or circuit boards are attached to each other. Two alignment methods are usually adopted, one is manual alignment, and the accuracy is low; the other is CCD camera alignment, but CCD camera alignment has high requirement on the precision of making marks.
Disclosure of Invention
In order to solve the above problems, an embodiment of the present invention discloses a laser alignment system and a laser alignment method.
A laser alignment system, comprising:
a laser emitting device for emitting a laser beam; the first driving device is used for driving a first substrate to move on a first positioning platform so as to change the relative position between the first substrate and the laser emitting device, and a first target corresponding to the laser emitting device is arranged on the first substrate;
the second driving device is used for driving a second substrate to move on a second positioning platform so as to change the relative position mode between the second substrate and the laser emitting device, a second target is arranged on the second substrate, and the second target corresponds to the first target;
the laser receiving device and the laser emitting device are respectively positioned on two sides of the first substrate and the second substrate and are used for receiving laser beams emitted by the laser emitting device; and
the control device is used for controlling the laser emitting device, the first driving device, the second driving device and the laser receiving device, and the control device judges the positions of the first substrate and the second substrate according to the intensity value of the laser beam received by the laser receiving device;
the laser alignment system further comprises a storage device, and a preset first intensity value and a preset second intensity value are stored in the storage device; when the intensity value of the laser beam received by the laser receiving device is equal to the first intensity value, the control device determines that the laser beam emitted by the laser emitting device passes through the center of the corresponding first target, the first substrate is located at a first position, and the center of the first target is located at a first center position; when the intensity value of the laser beam received by the laser receiving device is equal to the second intensity value, the control device determines that the laser beam emitted by the laser emitting device passes through the center of the corresponding second target, the second substrate is located at the second position, and the center of the second target is located at the second center position.
A laser alignment method is used for realizing alignment of a first substrate and a second substrate and comprises the following steps
step 3, controlling a second driving device to move the second substrate so as to adjust the relative position of the second substrate and the laser emitting device, wherein a second target is arranged on the second substrate corresponding to the first target, when the strength value of the laser beam received by the laser receiving device is determined to be consistent with a second strength value, the laser beam of the laser emitting device passes through the second target, the second substrate is located at a second position, and the center of the second target is located at a corresponding second central position;
and 4, controlling the first driving device to move the first substrate from the waiting area back to the first position, and returning the center of the first target to the first center position.
According to the laser alignment system and the laser alignment method thereof, provided by the invention, the first substrate and the second substrate are aligned by using the laser with strong concentration, and no mark is required to be arranged, so that the problems of manual alignment and low CCD alignment precision are well solved.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a block diagram of a laser alignment system according to an embodiment of the present invention.
Fig. 2 is a schematic view of the first substrate and the second substrate aligned.
Fig. 3 is a side view of the first substrate and the second substrate aligned with each other.
FIG. 4 is a schematic plan view of a first target and a second target.
Fig. 5 is a flowchart of a laser alignment method according to an embodiment of the invention.
Fig. 6 is a flowchart of step 1 shown in fig. 5.
Fig. 7 is a flowchart of step 101 shown in fig. 6.
Fig. 8 is a schematic diagram of the laser beam emitted by the laser emitting device in the step 102 shown in fig. 6 as the first laser beam.
Fig. 9 is a schematic diagram of the laser beam emitted by the laser emitting device in the step 103 shown in fig. 6 as the second laser beam.
Fig. 10 is a flowchart of step 3 shown in fig. 5.
Fig. 11 is a flowchart of step 301 shown in fig. 10.
Fig. 12 is a schematic diagram illustrating that the laser beam emitted by the laser emitting device in step 302 of fig. 10 is a third laser beam.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1, a laser alignment system 100 is provided. Referring to fig. 2 and 3, the laser alignment system 100 is used for aligning the first substrate 10 and the second substrate 50. The first substrate 10 is provided with at least one first target 12 for positioning. The second substrate 50 is also provided with a second target 52 for positioning at a position corresponding to the first target 12, that is, the first target 12 on the first substrate 10 corresponds to the second target 52 on the second substrate 50. The laser alignment system 100 includes: at least one laser emitting device 30, at least one laser receiving device 70, a first driving device 81, a second driving device 83, and a control device 85. Wherein the laser emitting device 30 can emit a laser beam.
The first driving device 81 drives the first substrate 10 to move on a first positioning platform (not shown), so that the relative position between the first substrate 10 and the laser emitting devices 30 is changed, and each first target 12 corresponds to one laser emitting device 30.
The second driving device 83 drives the second substrate 50 to move on the second positioning platform (not shown) so that each second target 52 corresponds to one laser emitting device 30. It is understood that the position of the laser emitting device 30 is fixed.
The laser receiving device 70 and the laser emitting device 30 are respectively located at two sides of the first substrate 10 and the second substrate 50, and are used for receiving the laser beams emitted by the corresponding laser emitting devices 30, and sending intensity values of the received laser beams to the control device 85. The intensity value of the laser beam can be characterized by the energy value of the laser, and the intensity value of the laser beam is proportional to the energy of the laser, that is, the stronger the received laser beam, the larger the energy value of the laser beam.
The control device 85 is connected to the laser emitting device 30, the first driving device 81, the second driving device 83, and the laser receiving device 70. The control device 85 receives the intensity value of the laser beam transmitted by the laser receiving device 70 and determines whether the first substrate 10 and the second substrate 50 are accurately positioned according to the intensity value of the laser beam. In this embodiment, the control device 85 may be a device with data processing capability, such as a server or a terminal device. In other embodiments, the control device 85 may be a Processor capable of performing data processing, such as a Central Processing Unit (CPU) of a device.
Specifically, the laser alignment system 100 includes a storage device 87. The storage device 87 stores a preset first intensity value and a preset second intensity value. When the intensity value of the laser beam received by each laser receiving device 70 is consistent with the first intensity value, the control device 85 determines that the laser beam of each laser emitting device 30 passes through the center of the corresponding first target 12, and at this time, the control device 85 determines that the first substrate 10 is located at the preset first position, and the center of each first target 12 is located at the first center position. When the intensity value of the laser beam received by each of the laser receiving devices 70 is consistent with the second intensity value, the control device 85 determines that the laser beam of each of the laser emitting devices 30 passes through the center of the corresponding second target 52, and at this time, the control device 85 determines that the second substrate 50 is located at the preset second position, and the center of each of the second targets 52 is located at the second center position. In this embodiment, the second intensity value is less than the first intensity value. In other embodiments, the second intensity value is greater than the first intensity value.
In the present embodiment, the laser receiver 70 is a laser power device. The intensity value of the laser beam is proportional to the power of the laser power. When the intensity value of the laser beam is larger, the power of the laser power device is also larger, and the corresponding output signal is also stronger. Therefore, the laser power device will send signals with different intensity values to the control device 85 according to the intensity value of the received laser beam. In a specific embodiment, when the intensity value of the laser beam received by the laser power device is consistent with the first laser intensity value, a first signal is sent to the control device 85; when the intensity value of the light beam received by the laser power device is consistent with the second laser intensity value, a second signal is sent to the control device 85; if the intensity value is other, no signal is sent to the control device 85. Wherein the first signal and the second signal have different intensity values.
The first substrate 10 is substantially rectangular. In the present embodiment, the first substrate 10 is a glass cover plate in a display panel (not shown) for protecting a display screen in a display device. Each first target 12 is disposed on the alignment region of the first substrate 10. The number of the first targets 12 is two, and the two first targets 12 are located on a diagonal of the first substrate 10. Referring to fig. 4, each of the first targets 12 includes a light-transmitting area 122 and a light-blocking area 124. A light blocking area 124 surrounds the light transmitting area 122, the light blocking area 124 being capable of blocking the passage of the laser beam. The first target 12 is circular, the light-transmitting area 122 is circular, the light-blocking area 124 is circular, and the first target 12 is attached to the first substrate 10. The outer circumference of the light blocking area 124 is the outer circumference of the first target 12. The center of the light-transmissive region 122 is the center of the first target 12.
The second substrate 50 is substantially rectangular. In the present embodiment, the second substrate 50 is a touch panel of a display panel. Each second target 52 is disposed on the second substrate 50 at the alignment area, and each second target 52 is disposed corresponding to a first target 12. The number of the second targets 52 is two, and two second targets 52 are located on a diagonal of the second substrate 50. Each second target 52 includes a light transmissive region 522 and a light blocking region 524. The light blocking area 524 surrounds the light transmitting area 522, and the light blocking area 524 can block the laser beam from passing therethrough. The second target 52 is circular, the light transmissive region 522 is located at the center of the second target 52, and the light transmissive region 522 is circular. The light blocking region 124 is a circular ring shape surrounding the light transmitting region 522.
Further, the storage device 87 stores therein a preset range of intensity values for determining the laser beam received by the laser receiving device 70 when the self-alignment between the laser emitting device 30 and the laser receiving device 70 is achieved. When the intensity value of the laser beam received by the laser receiving device 70 is within the preset intensity value range, the control device 85 determines that laser self-alignment is achieved between the laser emitting device 30 and the corresponding laser receiving device 70. When the intensity value of the laser beam received by the laser receiving device 70 is out of the preset intensity value range, the control device 85 controls the laser emitting device 30 and/or the corresponding laser receiving device 70 to move, and adjusts the relative positions of the laser emitting device 30 and the corresponding laser receiving device 70 until the laser intensity value received by the laser receiving device 70 is within the preset intensity value range. When the laser emitting device 30 and the laser receiving device 70 are self-aligned, the positions of the laser emitting device 30 and the laser receiving device 70 are fixed.
Before each laser emitting device 30 is aligned with the corresponding first target 12, each laser emitting device 30 and the corresponding laser receiving device 70 perform self-alignment, and when the laser receiving device 70 receives that the intensity value of the laser beam emitted by the corresponding laser emitting device 30 is within the preset intensity value range, the control device 85 determines that the laser self-alignment between the laser emitting device 30 and the corresponding laser receiving device 70 is achieved.
Each laser emitting device 30 is set to a first emitting position before being aligned with a corresponding first target 12. In the present embodiment, the first emission position is a position where each laser emitting device 30 is located after each laser emitting device 30 and the corresponding laser receiving device 70 perform laser self-alignment. The control device 85 can calculate a first pre-alignment position of the first substrate 10 according to the first emitting position, where the first substrate 10 is located when the central axis of the laser beam emitted from the laser emitting device 30 passes through the center of the corresponding first target 12 on the first substrate 10.
When the first substrate 10 and the second substrate 50 are aligned, the control device 85 controls the first driving device 81 to drive the first substrate 10 to move so as to adjust the relative position between the first substrate 10 and the laser emitting device 30. When the intensity value of the laser beam received by each laser receiving device 70 is the first intensity value, it indicates that the laser beam emitted by each laser emitting device 30 passes through the corresponding first target 12, and the center of each first target 12 is coaxial with the central axis of the laser beam emitted by the corresponding laser emitting device 30. That is, the first substrate 10 is located at the first pre-alignment position. The first pre-alignment position is the same as the first position.
The control device 85 can calculate a second pre-alignment position according to the first emission position, where the second substrate 50 is located when the central axis of the laser beam emitted from the laser emitting device 30 passes through the center of the second target 52. Specifically, the control device 85 controls the first driving device 81 to move the first substrate 10 to the waiting area, and at this time, the control device 85 records the moving path of the first substrate 10 from the first position to the waiting area. In another embodiment, the control device 85 records the driving manner of the first driving device 81 including the driving direction and the driving power when the first substrate 10 moves from the first position to the waiting area. After the first substrate 10 moves to the waiting area, the control device 85 controls the second driving device 83 to drive the second substrate 50 to move, so as to adjust the relative position between the second substrate 50 and the laser emitting device 30. When the intensity value of the laser beam received by each laser receiving device 70 is a second intensity value, the second substrate 50 is moved to the second position. At this time, the center of each second target 52 is coaxial with the central axis of the laser beam emitted by the corresponding laser emitting device 30.
Further, the control device 85 determines a first predetermined path of the first substrate 10 according to a first center position of a first target 12, and determines a second predetermined path of the second substrate 50 according to a second target 52 at a corresponding second center position. The control device 85 controls the first driving device 81 to drive the first substrate 10 to move along the first predetermined path, and/or the second driving device 83 drives the second substrate 50 to move along the second predetermined path until the first substrate 10 and the second substrate 50 are attached together. The first preset path and the second preset path are parallel to a straight line passing through the first central position and the corresponding second central position. In this embodiment, the first driving device 81 drives the first substrate 10 to move downward along the first predetermined path; the second driving device 83 drives the second substrate 50 to move upward along the second predetermined path.
In one embodiment, the control device 85 determines the predetermined moving path according to a first center position of a first target 12 and a second center position of a corresponding second target 52, and the control device 85 controls at least one of the first substrate 10 and the second substrate 50 to move along the predetermined moving path until the first substrate 10 and the second substrate 50 are attached together. Wherein the preset moving path is a straight line passing through the center of the first target 12 and the center of the corresponding second target 52.
In one embodiment, the storage device 87 stores a preset first detection value. The control device 85 controls the first driving device 81 to move slowly, so that the position of the first substrate 10 is slightly adjusted. When the laser intensity value received by the laser receiving device 70 is equal to the first detection value, the control device 85 determines that the laser receiving device 70 captures a detection point on the outer circumference of the corresponding first target 12. The control device 85 continuously controls the first driving device 81 to move slowly and slightly adjust the position of the first substrate 10, and the control device 85 compares the intensity value of the laser beam received by the laser receiving device 70 with the first detection value until the control device 85 determines that the laser receiving device 70 captures the positions of at least three different detection points on the corresponding first target 12. The control device 85 calculates the position of the center of the corresponding first target 12 according to the at least three detection points and the radius of the first target 12.
In one embodiment, the control device 85 stores a preset first detection value, and when the laser intensity value received by the laser receiving device 70 is equal to the first detection value, the control device 85 determines that the first detection point captured by the laser receiving device 70 is located on the outer circumference of the first target 12. The control device 85 continues to control and adjust the position of the first substrate 10, and the control device 85 controls the laser receiving device 70 to obtain the intensity value of the received laser beam in real time and compare the intensity value with the first detection value until the control device 85 determines that the laser receiving device 70 captures the positions of at least two first detection points on the corresponding first target 12. The positions of the first detection points captured are different. The control device 85 continues to control and adjust the position of the first substrate 10, and when the laser intensity value received by the laser receiving device 70 is equal to the second detection value, the control device 85 determines that the second detection point captured by the laser receiving device 70 is located at the boundary between the light transmitting area 122 and the light blocking area 124 of the first target 12. The control device 85 can control the fine-tuning laser emitting device 30 to obtain at least two first detection points on the first target 12 and at least two second detection points on the first target 12, and the control device 85 calculates the position of the center of the corresponding first target 12 according to the at least two first detection points on the first target 12, the at least two second detection points on the first target 12, the radius of the first target 12 and the radius of the light-transmitting area 122. The first detection points captured are located at different positions on the outer circumference of the first target 12, and the second detection points captured are located at different positions on the boundary.
In one embodiment, the storage device 87 stores a predetermined first detection range for determining that the laser beam emitted from the laser emitting device 30 passes through a detection point on the outer circumference of the first target 12. The control device 85 controls the first driving device 81 to drive the first substrate 10 to move slightly, and controls the laser receiving device 70 to obtain the intensity value of the received laser beam in real time during the process that the first substrate 10 moves slightly. When the intensity value of the laser beam received by the laser receiving device 70 is within the first detection range, the control device 85 determines that the laser receiving device 70 captures a detection point. And continuously micro-adjusting the position of the first substrate 10 until at least three different detecting points are captured. The captured detection points are located at different positions on the outer circumference of the first target 12, and the control device 85 calculates the position of the center of the corresponding first target 12 according to at least three detection points and the radius of the first target 12.
In one embodiment, the storage device 87 pre-stores a second detection range for determining at least three detection points where the laser beam emitted by the laser emitting device 30 passes through the light transmitting area 122 and the light blocking area 124 of the first target 12. The first driving device 81 is controlled to drive the position of the first substrate 10 to change gradually, and the intensity value of the laser beam acquired by the laser receiving device 70 is acquired in real time while the position of the first substrate 10 changes gradually. When the intensity value of the laser beam received by the laser receiving device 70 is within the second detection range, the control device 85 determines that the laser receiving device 70 acquires a detection point of the boundary, the control device 85 continues to control the first driving device 81 to fine-tune the position of the first substrate 10, the control device 85 controls the laser receiving device 70 to acquire the intensity value of the received laser beam in real time until at least three detection points are captured, and the captured detection points are located at different positions of the boundary, so that the control device 85 can calculate the position of the center of the first target 12 according to the three detection points on the light-transmitting area 122 and the radius of the light-transmitting area 122.
In an embodiment, the laser alignment system 100 further includes a CCD camera connected to the control device 85, the CCD camera collects an image of the first target 12, and the control device 85 processes and analyzes the image of the first target 12 to calculate the position of the center of the first target 12.
In one embodiment, a preset third detection range is stored in the storage device 87. The third detection range is used to determine that the laser receiving device 70 captures a detection point on the outer circumference of the second target 52. When the second substrate 50 is aligned, the control device 85 controls the second driving member 83 to drive the position of the second substrate 50 to be slightly adjusted, and obtains the intensity value of the laser beam received by the laser receiving device in the process of fine adjustment of the position of the second substrate 50. When the intensity value of the laser beam received by the laser receiving device 70 is within the third detection range, the control device 85 determines that the laser receiving device 70 captures one detection point on the outer circumference of the second target 52. Fine-tuning the position of the second substrate 50 is continued until at least three of the detection points are captured. The control device 85 calculates the position of the center of the corresponding second target 52 according to the at least three detection points and the radius of the second target 52.
In one embodiment, the storage device 87 stores a preset fourth detection range value, and the fourth detection range is used for determining at least three detection points at the boundary between the light-transmitting area 522 of the second target 52 and the light-blocking area 524 of the second target 52 captured by the laser receiving device 70. The second driving device 83 is continuously controlled to drive the position of the second substrate 50 to change slowly, and the intensity value of the laser beam acquired by the laser receiving device 70 is acquired in real time while the position of the second substrate 50 changes slowly. When the intensity value of the laser beam received by the laser receiving device 70 is within the fourth detection range, the control device 85 determines that the laser receiving device 70 acquires at least three detection points on the boundary between the light transmitting area 522 of the second target 52 and the light blocking area 524 of the second target 52, so that the control device 85 can calculate the position of the center of the second target 12 according to the three detection points on the light transmitting area 522 and the radius of the light transmitting area 522. In an embodiment, the laser alignment system 100 further includes a CCD camera, the CCD camera collects an image of the second target 52, and the control device 85 processes and analyzes the image of the second target 52 to calculate the position of the center of the second target 52.
Further, the control device 85 also presets a first preset compensation range, and the control device 85 can control the first driving device 81 to drive the first substrate 10 to move so as to adjust the relative position between the first substrate 10 and the laser emitting device 30, and when it is determined that the difference value between the maximum intensity value of the laser receiving device 70 and the first intensity value is within the first preset compensation range, the center of the corresponding first target 12 is located at the first center position.
Further, the control device 85 also presets a second preset compensation range. The control device 85 can control the first driving device 81 to drive the second substrate 50 to move so as to adjust the relative position between the second substrate 50 and the laser emitting device 30. When it is determined that the difference between the maximum intensity value and the second intensity value of the laser receiving device 70 is within the second preset compensation range, the center of the corresponding second target 52 is located at the second center position.
The laser transmitter 30 includes a driving mechanism (not shown) connected to the control device 85 to move under the control of the control device 85. The laser light receiving device 70 includes a driving mechanism (not shown) connected to the control device 85 to move under the control of the control device 85. It is to be understood that two or more laser emitting devices 30 are driven by a common driving mechanism; two or more laser receivers 70 are driven by a common drive mechanism.
Referring to fig. 5, a laser alignment method using the laser alignment system 100 is provided. The laser alignment method is applied to the laser alignment system, and alignment between at least two substrates is realized. The laser alignment method comprises the following steps:
Specifically, the control device 85 prestores a preset first intensity value, the control device 85 controls the first driving device 81 to drive the first substrate 10 to move, so as to adjust the relative position between the first substrate 10 and at least one laser emitting device 30, and when the control device 85 determines that the intensity value of the received laser beam is consistent with the first intensity value, the control device 85 determines that the laser beam of each laser emitting device 30 passes through the corresponding first target 12, the first substrate 10 is located at the first position, and the center of the first target 12 is located at the corresponding first center position. In this embodiment, the first central position is a position where the center of the corresponding first target 12 is located when the laser beam of the laser emitting device 30 passes through the center of the corresponding first target 12.
Specifically, the first driving device 81 is controlled by the control device 85 to drive the first substrate 10 to move from the first position to the waiting area. The control device 85 records the moving path of the first substrate 10 from the first position to the waiting area. In another embodiment, the control device 85 records the driving manner of the first driving device 81 including the driving direction and the driving power when the first substrate 10 moves from the first position to the waiting area.
And 3, controlling the second driving device 83 to move the second substrate 50 to adjust the relative positions of the second substrate 50 and the laser emitting devices 30, wherein at least one second target 52 is arranged on the second substrate 50 corresponding to at least one first target 12, when the intensity value of the laser beam received by each laser receiving device 70 is determined to be consistent with the second intensity value, the laser beam of each laser emitting device 30 passes through the corresponding second target 52, the second substrate 50 is located at the second position, and the center of each second target 52 is located at the corresponding second center position.
Specifically, the second driving device 83 is controlled by the control device 85 to drive the second substrate 50 to move, so as to adjust the relative position of the second substrate 50 and the laser emitting device 30. The second target 52 is disposed in an alignment area on the second substrate 50. In this embodiment, the second central position is a position where the center of the corresponding second target 52 is located when the laser beam of the laser emitting device 30 passes through the center of the corresponding second target 52; the second target 52 is identical in structure to the first target 12.
And 4, controlling the first driving device 81 to move the first substrate 10 back to the first position from the waiting area, and returning the center of each first target to the corresponding first center position.
The control device 85 controls the first driving device 81 to move the center of each first target 12 of the first substrate 10 to return to the corresponding first center position.
Referring to fig. 6, the step 1 specifically includes the following steps:
And 104, controlling the first driving device 81 to fine-adjust the position of the first substrate 12, and when the intensity value of the laser beam received by each laser receiving device 70 is determined to be consistent with the first intensity value, the laser beam emitted by each laser emitting device 30 passes through the corresponding first target 12, the first substrate 10 is located at the first position, and the center of each first target 12 is located at the corresponding first center position.
Referring to fig. 7, it is assumed that each laser emitting device 30 is located at a first emitting position before aligning with the first target 12, and the step 101 specifically includes the following steps:
in step 1011, the first pre-alignment position is calculated according to the first emitting position where each laser emitting device 30 is located.
The first preset alignment position is a theoretical position where the first substrate 10 is located when the central axis of the laser beam emitted by the laser emitting device 30 passes through the center of the corresponding first target 12, which is calculated by the control device 85 according to the corresponding first emitting position.
In this embodiment, since the first substrate 10 is a transparent substrate, in the step 102, when at least a part of the laser beam is blocked by the light blocking area 124 of the first target 12, the approximate position of the corresponding first target 12 can be determined.
Further, the radius of the laser beam is larger than the radius of the transparent area 122 of the first target 12, and the laser beam can at least partially pass through the transparent area 122 of the first target 122, so that when the laser receiving device 70 detects the intensity value of the laser beam, the approximate location of the corresponding first target 12 can be determined.
In step 103, determining the position of the center of each first target 12 includes: controlling the first driving device 81 to fine-adjust the position of the first substrate 10, determining to capture a detection point on the outer circumference of the corresponding first target 12 when the intensity value of the laser beam received by the laser receiving device 70 is equal to the first detection value, continuing to control the first driving device 81 to fine-adjust the position of the first substrate 10, and calculating to obtain the position of the center of the corresponding first target according to at least three detection points and the radius of the first target after capturing at least three detection points. For example, by capturing the detection points a, B and C shown in fig. 3 and based on the radius of the first target 12, the position of the center of the first target 12 can be calculated.
In one embodiment, the step 103 includes: capturing at least two first detection points and at least two second detection points, wherein the first detection points are located on the outer circumference of the first target 12, and the second detection points are located on the boundary of the light blocking area 124 of the first target 12 and the light transmitting area 12 of the first target 12; and calculating the position of the center of the first target through at least two first detection points and at least two second detection points. Wherein, the capturing at least two first detection points and at least two second detection points comprises:
controlling the first driving device 81 to fine-adjust the position of the first substrate 10, determining to capture a first detection point on the outer circumference of the first target 12 when the intensity value of the laser beam received by the laser receiving device 70 is equal to the first detection value, and continuing to fine-adjust the position of the first substrate 10 until at least two first detection points are captured; continuously controlling the first driving device 81 to micro-adjust the position of the first substrate 10, and obtaining the corresponding intensity value of the laser receiving device 70, when the intensity value of the laser beam received by the laser receiving device 70 is equal to a second detection value, determining that one second detection point is captured, and continuously controlling the micro-adjustment of the position of the first substrate 10 until at least two second detection points are captured; after at least two first detection points and at least two second detection points are captured, the position of the center of the corresponding first target 12 is calculated according to the at least two first detection points and the at least two second detection points. In other embodiments, the first detection point and the second detection point on the first target 12 can be used as feature labels, and the detection device collects information, such as a CCD camera, and then performs calculation processing to obtain the detection point position.
In one embodiment, in the step 103, an image including the first target 12 is acquired by the CCD camera, and the image of the first target 12 is processed and analyzed, and the position of the center of the corresponding first target 12 is calculated according to the position of a laser emitting device 30. Since the first substrate 10 is a transparent substrate, the light blocking area 124 and the light transmitting area 122 of the first target 12 in the image of the first target 12 collected by the CCD camera have obvious boundaries, and after processing and analysis, the position of the center of the corresponding first target 12 can be calculated according to the position of the laser emitting device 30.
Further, in the step 102, referring to fig. 8, each laser emitting device 30 is controlled to emit a first laser beam, the radius of the first laser beam is greater than the radius of the transparent area 122 of the first target 12, the radius of the first laser beam is smaller than the radius of the first target 12, and the radius of the laser beam is greater than the difference between the radius of the transparent area 122 of the first target 12 and the radius of the first target 12; the position of the first substrate 10 is controlled to be fine-adjusted according to the first laser beam emitted from the laser emitting device 30, and if the intensity value of the laser beam is detected by the corresponding laser receiving device 70, it is determined that the first laser beam at least partially passes through the light-transmitting region 122 of the corresponding first target 12. Since the radius of the first laser beam is larger than the radius of the transparent area 122, the light blocking area 124 of the first target 12 can block at least a portion of the first laser beam when the laser emitting device 30 is moved, so as to quickly determine the position of the first target 12.
In the step 103 and the step 104, referring to fig. 9, each laser emitting device 30 is controlled to emit a second laser beam, a radius of the second laser beam is not less than a radius of the transparent area 122 of the first target 12, the radius of the second laser beam is greater than a difference between the radius of the transparent area 122 of the first target 12 and the radius of the first target 12, and the radius of the second laser beam is less than the radius of the first laser beam; and controlling to fine-adjust the position of the first substrate 10 according to the second laser beams emitted by the laser emitting devices 30, when it is determined that the intensity value of the second laser beam detected by each of the laser receiving devices 70 is equal to the first intensity value, the laser beam emitted by each of the laser emitting devices 30 passes through the corresponding first target 12, and the center of each of the first targets 12 is located at the corresponding first center position. Because the radius of the second laser beam is greater than the difference between the radius of the light-transmitting area 122 of the first target 12 and the radius of the first target 12, and the radius of the second laser beam is smaller than the radius of the first laser beam, the detection point can be captured quickly, and the alignment accuracy is improved.
Wherein, in the step 104, the following steps are specifically included: and controlling the first driving device 81 to slightly adjust the position of the first substrate 10, and determining that the first substrate 10 is located at the first position when the difference value between the maximum intensity value generated by each laser receiving device 70 and a first intensity value is determined to be within a first preset compensation range, and the center of each first target 12 is located at the corresponding first center position.
In the step 103, although the center of the first target 12 is determined by calculation, it is still difficult to ensure the central axis of the laser beam passing through the first target 12 and the laser emitting device 30 of the first target 12, and the position of the first substrate 10 is further fine-adjusted to compensate, so as to achieve fine adjustment and improve the alignment accuracy.
In step 3, please refer to fig. 10, which specifically includes the following steps:
And step 302, controlling each laser emitting device 30 to emit a laser beam, controlling the second driving device 83 to fine-adjust the position of the second substrate 50, and determining that the laser beam at least partially passes through the corresponding second target 52 when the corresponding laser receiving device 70 detects the intensity value of the laser beam.
The location of the center of each second target 52 is determined 303.
And 304, controlling the second driving device 83 to fine-adjust the second substrate 52, when it is determined that the intensity value of the laser beam received by each laser receiving device 70 is consistent with the second intensity value, the central axis of the laser beam emitted by each laser emitting device 30 passes through the center of the corresponding second target 52, the second substrate 50 is located at the second position, and the center of each second target 52 is located at the corresponding second center position.
The step 301, please refer to fig. 11, specifically includes the following steps:
calculating the second pre-alignment position according to the first emitting position where each laser emitting device 30 is located; and controlling the second driving device 83 to move the second substrate 50 to the second pre-alignment position.
The second preset alignment position is a theoretical position where the second substrate 50 is located when the central axis of the laser beam emitted by the laser emitting device 30 passes through the center of the corresponding second target 52, which is calculated by the control device 85 according to the corresponding first emitting position.
In this embodiment, since the second substrate 50 is a transparent substrate, in the step 302, when at least a portion of the laser beam is blocked by the light blocking area 524 of the second target 52, the approximate position of the corresponding second target 52 can be determined.
Further, the radius of the laser beam is larger than the radius of the light-transmitting area 522 of the second target 52, and the laser beam can at least partially pass through the light-transmitting area 522 of the second target 522, so that when the laser receiver 70 detects the intensity value of the laser beam, the approximate location of the corresponding second target 52 can be determined.
Further, in the step 302, referring to fig. 12, each laser emitting device 30 is controlled to emit a third laser beam, the radius of the third laser beam is greater than the radius of the light-transmitting area 522 of the second target 52, the radius of the third laser beam is smaller than the radius of the second target 52, and the radius of the third laser beam is greater than the difference between the radius of the light-transmitting area 522 of the second target 52 and the radius of the second target 52; and controlling to adjust the position of the second substrate 50 according to the third laser beam emitted by the laser emitting device 30, and determining that the third laser beam at least partially passes through the corresponding light-transmitting area 522 of the second target 52 if the corresponding laser receiving device 70 detects the intensity value of the third laser beam. Since the radius of the third laser beam is larger than the radius of the light-transmitting area 522, the light-blocking area 524 of the second target 52 can block at least a portion of the third laser beam when the laser emitting device 30 is moved, so as to quickly determine the position of the second target 52.
In the step 304, each laser emitting device 30 is controlled to emit a fourth laser beam, a radius of the fourth laser beam is not less than a radius of the light-transmitting area 522 of the second target 52, the radius of the fourth laser beam is greater than a difference between the radius of the light-transmitting area 522 of the second target 52 and the radius of the second target 52, and the radius of the fourth laser beam is less than the radius of the third laser beam, so that the alignment accuracy can be improved. In this embodiment, the third laser beam has the same radius as the first laser beam, and the fourth laser beam has the same radius as the second laser beam.
The step of determining the location of the center of each of the second targets 52 is similar to step 102.
The step 304 specifically includes: and controlling the position of at least one of the laser emitting device 30 and the second substrate 10 to be fine-tuned, and when the difference value between the maximum intensity value and the second intensity value generated by each laser receiving device 70 is determined to be within a second preset compensation range, determining that the center of each second target 52 is located at the corresponding second center position.
In the step 303, although the position of the center of the second target 52 is determined through calculation, it is still difficult to ensure that the central axis of the laser beam passing through the second target 52 is coaxial with the center of the second target 52, and the position of the second substrate 50 and/or the corresponding laser emitting device 30 is further fine-adjusted to perform compensation, so that fine adjustment is achieved, and the alignment accuracy is improved.
In one embodiment, the first substrate 10 is not a transparent substrate, and may be a substrate such as a printed circuit board, and the first target 12 may be a through hole opened on the first substrate 10.
In one embodiment, the second substrate 50 is not a transparent substrate, and may be a substrate such as a printed circuit board, and the second target 52 may be a through hole opened on the second substrate 50.
In an embodiment, the first substrate 10 is not a transparent substrate, and may be a substrate such as a printed circuit board, a through hole is formed in the first substrate 10 at the alignment area, the first target 12 is attached to the first substrate 10 corresponding to the through hole, and the transparent area 122 of the first substrate 10 is disposed corresponding to the through hole.
In an embodiment, the second substrate 50 is not a transparent substrate, and may be a substrate such as a printed circuit board, a through hole is formed in the alignment area of the second substrate 50, the second target 52 is attached to the second substrate 50 corresponding to the through hole, and the transparent area 522 of the second substrate 50 is disposed corresponding to the through hole.
In one embodiment, the first target 12 and the second target 52 may not be identical in size or shape.
In one embodiment, the first substrate 10 may be a touch screen or other substrate in a display panel, and the second substrate 50 may be a glass cover plate or other substrate in a display panel.
Further, after the step 4, the method further comprises the steps of: and controlling to move at least one of the first substrate 10 and the second substrate 50 along a preset moving path until the first substrate 10 and the second substrate 50 are attached together, wherein, during the movement, the center of one first target 12 and the center of the corresponding second target 52 are always located on the preset moving path.
Further, before step 1, the method further comprises the steps of: and performing laser self-alignment on each laser emitting device 30 and the corresponding laser receiving device 70, and when the intensity value of the laser beam received by one laser receiving device 70 is within a preset range for judging the intensity value of the laser beam received by the laser receiving device 70 when the self-alignment between the laser emitting device 30 and the laser receiving device 70 is realized, determining that the laser emitting device 30 and the corresponding laser receiving device 70 realize the laser self-alignment.
According to the laser alignment method and the laser alignment system 100 provided by the invention, the first substrate 10 and the second substrate 50 are aligned by using the laser with strong concentration, no mark is required to be arranged, and the problems of manual alignment and low CCD alignment precision are well solved. In addition, in the alignment process, the laser is used to determine the respective positions of the centers of the first target 12 and the second target 52, and then the first substrate 10 and the second substrate 50 are aligned, so that the alignment accuracy is further improved. Further, in the alignment process, compensation alignment is performed, so that the accuracy is further improved, and the bonding accuracy of the first substrate 10 and the second substrate 50 is further improved. Furthermore, the first target 12 and the second target 52 have the same structure, and therefore can be prepared by the same mask, thereby saving the manufacturing cost.
While the foregoing is directed to the preferred embodiment of the present invention, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention.
Claims (15)
1. A laser alignment system, comprising:
a laser emitting device for emitting a laser beam; the first driving device is used for driving a first substrate to move on a first positioning platform so as to change the relative position between the first substrate and the laser emitting device, and a first target corresponding to the laser emitting device is arranged on the first substrate;
the second driving device is used for driving a second substrate to move on a second positioning platform so as to change the relative position between the second substrate and the laser emitting device, a second target is arranged on the second substrate, and the second target corresponds to the first target;
the laser receiving device and the laser emitting device are respectively positioned on two sides of the first substrate and the second substrate and are used for receiving laser beams emitted by the laser emitting device; and
the control device is used for controlling the laser emitting device, the first driving device, the second driving device and the laser receiving device, and the control device judges the positions of the first substrate and the second substrate according to the intensity value of the laser beam received by the laser receiving device;
the laser alignment system further comprises a storage device, and a preset first intensity value and a preset second intensity value are stored in the storage device; when the intensity value of the laser beam received by the laser receiving device is equal to the first intensity value, the control device determines that the laser beam emitted by the laser emitting device passes through the center of the corresponding first target, the first substrate is located at a first position, and the center of the first target is located at a first center position; when the intensity value of the laser beam received by the laser receiving device is equal to the second intensity value, the control device determines that the laser beam emitted by the laser emitting device passes through the center of the corresponding second target, the second substrate is located at the second position, and the center of the second target is located at the second center position.
2. The laser alignment system according to claim 1, wherein the storage device further stores therein a range of intensity values of the laser beam received by the laser receiving device when determining that the self-alignment between the laser emitting device and the corresponding laser receiving device is achieved; before the first substrate and the second substrate are aligned, the control device controls the laser receiving device and the corresponding laser emitting device to perform self-alignment; when the intensity value of the laser beam received by the laser receiving device is within the preset intensity value range, the control device determines that laser self-alignment is achieved between the laser emitting device and the laser receiving device.
3. The laser alignment system of claim 1, wherein the storage device further pre-stores a first preset compensation range, the control device controls the first driving device to adjust the position of the first substrate, and when the control device determines that the difference between the maximum intensity value of the laser receiver and the first intensity value is within the first preset compensation range, the control device determines that the first substrate is located at the first position and the center of the first target is located at the corresponding first center position.
4. The laser alignment system of claim 1, wherein the control device calculates a predetermined moving path according to a first center position of the first target and a corresponding second center position of the second target, and the control device controls the first driving device to drive the first substrate and/or the second driving device to drive the second substrate to move along the predetermined moving path until the first substrate and the second substrate are attached together, wherein the predetermined moving path passes through a straight line where a center of the first target and a center of the corresponding second target are located.
5. The laser alignment system of claim 1, wherein the first target is circular, the storage device stores a preset first detection value, the control device controls the first driving device to fine-tune the position of the first substrate, when the intensity value of the laser beam received by the laser receiving device is equal to the first detection value, the control device determines that the laser receiving device captures a detection point on the outer circumference of the first target, the control device continues to control the first driving device to fine-tune the position of the first substrate, the control device controls the laser receiving device to obtain the intensity value of the received laser beam in real time and compare the intensity value with the first detection value until the control device determines that the laser receiving device captures at least three different detection points, and calculating the position of the center of the corresponding first target by the control device according to the at least three detection points and the radius of the first target.
6. The laser alignment system of claim 1, wherein each of the first targets includes a light-transmissive region and a light-blocking region, the light-transmissive region being located at a center of the first target, and the light-blocking region surrounding the light-transmissive region.
7. The laser alignment system of claim 6, wherein the first target is circular, the transparent area of the first target is circular, and the control device calculates the position of the center of the first target by using at least two first detection points, at least two second detection points and the radius of the first target, wherein the first detection points are located on the outer circumference of the first target, and the second detection points are located on the boundary between the light blocking area of the first target and the transparent area of the first target.
8. The laser alignment system of claim 7, wherein the storage device stores a preset first detection value and a preset second detection value, the control device controls the first driving device to fine-tune the position of the first substrate, when the intensity value of the laser beam received by the laser receiving device is equal to the first detection value, the control device determines that the laser receiving device captures one of the first detection points, the control device continues to control the first driving device to fine-tune the position of the first substrate, and the control device compares the intensity value of the laser beam received by the laser receiving device with the first detection value until the control device determines that the laser receiving device captures at least two first detection points; when the intensity value of the laser beam received by the laser receiving device is equal to the second detection value, the control device determines that the laser receiving device captures one second detection point, the control device continues to control the first driving device to finely adjust the position of the first substrate, and the control device controls the laser receiving device to obtain the intensity value of the received laser beam in real time and compare the intensity value with the first detection value until the control device determines that the laser receiving device captures at least two second detection points.
9. The laser alignment system of claim 6, wherein the storage device stores a second detection range for determining at least three detection points at the intersection of the light-transmitting area of the first target and the light-blocking area of the first target, through which the laser beam emitted by the laser emitting device passes, and when the intensity value of the laser beam received by the laser receiving device is within the second detection range, the control device determines that the laser receiving device captures one of the detection points at the intersection, the control device continues to control the first driving device to fine-adjust the position of the first substrate, the control device controls the laser receiving device to obtain the intensity value of the received laser beam in real time until at least three of the detection points are captured, and the control device controls the laser receiving device to obtain the intensity value of the received laser beam in accordance with the at least three detection points at the light-transmitting area of the first target, and calculating the radius of the light-transmitting area of the first target to obtain the position of the center of the first target.
10. The laser alignment system of claim 1, further comprising a CCD camera connected to the control device, wherein the CCD camera collects an image of the first target, and the control device processes and analyzes the image of the first target to calculate a position of the center of the first target.
11. A laser alignment method is used for realizing alignment of a first substrate and a second substrate, and comprises the following steps:
step 1, controlling a first driving device to move a first substrate so as to adjust the relative positions of the first substrate and a laser emitting device, wherein the first substrate is provided with a first target, when the strength value of a laser beam received by a laser receiving device is determined to be consistent with a first strength value, the laser beam of the laser emitting device passes through the center of the first target, the first substrate is located at a first position, and the center of each first target is located at a corresponding first center position;
step 2, controlling the first driving device to move the first substrate from the first position to a waiting area;
step 3, controlling a second driving device to move the second substrate so as to adjust the relative position of the second substrate and the laser emitting device, wherein a second target is arranged on the second substrate corresponding to the first target, when the strength value of the laser beam received by the laser receiving device is determined to be consistent with a second strength value, the laser beam of the laser emitting device passes through the second target, the second substrate is located at a second position, and the center of the second target is located at a corresponding second central position;
and 4, controlling the first driving device to move the first substrate from the waiting area back to the first position, and returning the center of the first target to the first center position.
12. The laser alignment method of claim 11, wherein the step 1 comprises the steps of:
controlling the first driving device to move the first substrate to a first pre-alignment position so as to pre-align the first target and the laser emitting device;
controlling the laser emitting device to emit a laser beam, controlling the first driving device to finely adjust the position of the first substrate, and determining that the laser beam at least partially passes through the first target when the laser receiving device detects the intensity value of the laser beam;
determining the position of the center of the first target; and
and controlling the first driving device to finely adjust the position of the first substrate, wherein when the intensity value of the laser beam received by the laser receiving device is determined to be consistent with the first intensity value, the laser beam emitted by the laser emitting device passes through the first target, the first substrate is located at the first position, and the center of the first target is located at the first central position.
13. The laser alignment method of claim 12, wherein said controlling the first driving device to move the first substrate to a first pre-alignment position for pre-aligning the first target with the laser emitting device comprises:
calculating to obtain the first pre-alignment position according to the first emission position where the laser emission device is located; and
and controlling the first driving device to move the first substrate to the first pre-alignment position.
14. The laser alignment method as claimed in claim 11, wherein, after the step 4, the laser alignment method further comprises: and controlling to move at least one of the first substrate and the second substrate along a preset moving path until the first substrate and the second substrate are attached together, wherein the center of the first target and the center of the second target are always positioned on the preset moving path in the moving process.
15. The laser alignment method as claimed in claim 11, wherein, prior to the step 1, the laser alignment method further comprises: and when the intensity value of the laser beam received by the laser receiving device is within a preset range for judging the intensity value of the laser beam received by the laser receiving device when the self-alignment between the laser emitting device and the laser receiving device is realized, determining that the laser self-alignment between the laser emitting device and the laser receiving device is realized.
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| PCT/CN2017/120253 WO2019127522A1 (en) | 2017-12-29 | 2017-12-29 | Laser alignment system and laser alignment method |
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