CN102394277A - Laser counterpoint equipment and laser counterpoint method - Google Patents

Laser counterpoint equipment and laser counterpoint method Download PDF

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Publication number
CN102394277A
CN102394277A CN 201110318271 CN201110318271A CN102394277A CN 102394277 A CN102394277 A CN 102394277A CN 201110318271 CN201110318271 CN 201110318271 CN 201110318271 A CN201110318271 A CN 201110318271A CN 102394277 A CN102394277 A CN 102394277A
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cavity
laser
counterpoint
group
target
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CN 201110318271
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Chinese (zh)
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余超平
刘惠森
范继良
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东莞宏威数码机械有限公司
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Abstract

The invention discloses laser counterpoint equipment which comprises a laser group and a transparent objective target, wherein targets corresponding to the numbers and arrangement of the lasers in the laser group are arranged on the transparent objective target; the cavities in the cavity group are arranged sequentially, the cavity at the beginning end serves as a criteria cavity, and the cavity behind the criteria cavity serves as a counterpoint cavity; the criteria cavity and the counterpoint cavity are both provided with butt joint parts used for butting and communication; the laser group is arranged at the butt joint part of the criteria cavity; the transparent objective target are arranged at the butt joint parts of the counterpoint cavity; a light passage is reserved between the laser group and the transparent objective target; and the lights emitted by the lasers in the laser group pass through the light passage and sequentially penetrate the corresponding targets on the transparent objective target through adjusting the positions of the criteria cavity and the counterpoint cavity. The laser counterpoint equipment provided by the invention can perform accurate counterpoint to the coating technology cavity group in an OLED (Organic Light Emitting Diode) coating product line. The invention further provides a laser counterpoint method.

Description

激光对位设备及激光对位方法 Laser alignment equipment and laser alignment method

技术领域 FIELD

[0001] 本发明涉及OLED生产制造领域,更具体地涉及一种对镀膜工艺腔体组进行精确对位的激光对位设备及对位方法。 [0001] The present invention relates to the field of OLED manufacturing, and more particularly relates to a coating process chamber and set of equipment for the accurate location of the laser alignment method bit pairs.

背景技术 Background technique

[0002] 现阶段,平板显示技术不断发展。 [0002] At this stage, the development of flat panel display technology. 有机发光显示屏,0LED,即有机发光二极管(Organic Light-Emitting Diode),又禾尔为有机电激光显不(Organic Electroluminesence Display, OELD)。 The organic light emitting display, 0LED, i.e., the organic light emitting diode (Organic Light-Emitting Diode), and Wo is an organic laser Seoul not significant (Organic Electroluminesence Display, OELD). 因为具备轻薄、省电等特性,OLED显示技术与传统的IXD显示方式不同,无需背光灯,采用非常薄的有机材料涂层和玻璃基板,当有电流通过时,这些有机材料就会发光。 Because light is provided, power and other characteristics, different from the OLED display technology and traditional IXD display, no backlight, the very thin coating of organic material and the glass substrate, when a current is passed, these organic materials will be light. 而且OLED显示屏幕可以做得更轻更薄,可视角度更大,并且能够显著节省电能。 And the OLED display can be made lighter and thinner, larger viewing angle, and can significantly save power. OLED 的基本结构是由一薄而透明具半导体特性之铟锡氧化物(ITO),与电力之正极相连,再加上另一个金属阴极,包成如三明治的结构。 The basic structure of an OLED is formed by a thin transparent indium tin oxide having semiconductor characteristics of (ITO), is connected to the positive electrode of the power, plus another metal cathode, such as a sandwich structure into a package. 整个结构层中包括了:空穴传输层(HTL)、发光层(EL)与电子传输层(ETL)。 Throughout the structural layer comprises: hole transport layer (HTL), emitting layer (EL) and the electron transport layer (ETL). 当电力供应至适当电压时,正极空穴与阴极电荷就会在发光层中结合,产生光亮,依其配方不同产生红、绿和蓝RGB三原色,构成基本色彩。 When the power supply to a suitable voltage, will charge the positive holes and the cathode in the light emitting layer, light is generated, according to their different formulations produce red, green and blue three primary colors of RGB, constitute the basic color. OLED的特性是自己发光,不像TFT LCD需要背光,因此可视度和亮度均高,其次是电压需求低且省电效率高,加上反应快、重量轻、厚度薄,构造简单,成本低等,被视为21世纪最具前途的产品之 OLED features its own light, unlike the TFT LCD needs a backlight, so visibility and brightness are high, followed by a low voltage and a high demand for power efficiency, coupled with fast response, light weight, thin, simple structure, low cost etc., it is regarded as the 21st century's most promising products

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[0003] OLED内部的各个结构层的离不开成型于镀膜工艺,OLED镀膜生产线,每个需要工艺真空的独立腔体联结,腔体之间轨道有较高的位置要求,必须对腔体位置在连接之前进行对位。 [0003] inseparable structure forming the respective layers in the coating process inside the OLED, OLED coating production lines, each process requires a separate vacuum chamber coupled to the track with a higher position required between the cavity, the cavity must position alignment is performed before connecting. 类似OLED镀膜生产线,对每个独立的镀膜腔体进行连接,为保证彼此轨道位置,而且在其连接后不应力集中即是各个独立设备处于地板支撑的自然状态,就必须先把每个设备调整到同一高度,然后靠近用螺钉连接固定。 Similarly OLED coating production line, for each individual coating chamber are connected, in order to ensure the track position to each other, but not the stress concentration in the natural state that is connected independently of each device is supported by a floor, it is necessary to first adjust each device to the same height, and connected and fixed by screws near. 而众所周知,激光束的集中性极强,因此能够很好的应用在对位领域。 And it is well known, highly focused laser beam, can be applied in a good position on the field.

[0004] 因此亟需一能够将OLED镀膜生产线中,对镀膜生产线上的若干镀膜工艺用腔体组进行精确对位的激光对位设备及激光对位方法。 [0004] Thus a need can be OLED coating production line, several film coating process line for precise alignment of the laser position alignment device and method for a laser cavity group.

发明内容 SUMMARY

[0005] 本发明的目的是提供一能够将OLED镀膜生产线中,对镀膜生产线上的若干镀膜工艺用腔体组进行精确对位的激光对位设备。 [0005] The object of the present invention is to provide an OLED capable of coating production line, several film coating process line apparatus for precise alignment of the laser cavity with a bit group.

[0006] 本发明的另一目的是提供一能够将OLED镀膜生产线中,对镀膜生产线上的若干镀膜工艺用腔组体进行精确对位的激光对位方法。 [0006] Another object of the present invention is to provide an OLED capable of coating production line, several coating process with the coating chamber body line group for precise alignment of the laser method of bits.

[0007] 为了实现上述目的,本发明提供一种激光对位设备,用于对OLED镀膜生产线上的若干镀膜工艺用腔体组进行精确对位,所述激光对位设备包括激光器组及透明目标靶,所述激光器组至少包括两个平行设置的激光器,所述透明目标靶上设置有与所述激光器组中的激光器的数量及排布相对应的靶标,所述腔体组中的腔体依次排列,位于起始端的腔体形成基准腔体,位于所述基准腔体之后的腔体形成对位腔体,所述基准腔体及对位腔体均具有对接连通用的对接部,所述激光器组设置于所述基准腔体上的对接部,所述透明目标靶分布设置于所述对位腔体上的对接部,所述激光器组与所述透明目标靶之间预留有光线通道,调节所述基准腔体及对位腔体的位置使所述激光器组中的激光器发射出的激光通过所述光线通道依次对应穿过所述透明目标靶的靶标。 [0007] To achieve the above object, the present invention is to provide a laser alignment apparatus for coating process with several groups OLED coating chamber on the production line to accurately position the laser device comprises a laser alignment target group and transparent target, the laser comprises at least two lasers arranged in parallel, provided with the laser in the laser set the number and arrangement corresponding to the target on the transparent target by the cavity of the cavity groups sequentially arranged, located at the end of the reference cavity is formed a cavity, the cavity located in the cavity after the reference position is formed of a cavity, the cavity and the reference position of the cavity has a mating portion of the common succession, the said laser set to the mating portion provided on said reference cavity, a transparent target of interest in the profile of the mating portion provided on the bit body cavity, between the reserve and the laser set the target of interest with a light transparent channel, adjusting the position of the reference cavity and the position of the laser cavity group corresponding to laser emits laser light through the transparent target of interest by the Fiber channel target sequence.

[0008] 较佳地,所述腔体组底部设置进行升降调节的调节支撑脚。 [0008] Preferably, the bottom of the cavity height-adjustable setting group of adjustable support feet. 通过所述调节支撑脚对所述腔体组进行粗调节,有利于所述激光对位设备对所述腔体组进行精准的对位。 By adjusting the support leg of the cavity group coarse adjustment, facilitate alignment of the laser device for precision alignment of the cavity group.

[0009] 较佳地,还包括激光器安装座,所述激光器安装座固定在所述基准腔体上,所述激光器组装设于所述激光器安装座上。 [0009] Preferably, the mount further comprising a laser, the laser mount fixed to the reference cavity, a laser assembly disposed on said laser mounting seat. 设置所述激光器安装座能够很好的安装所述激光器对位设备,不容易产生位移。 Setting said laser mount the mounting well laser alignment device is not easily displaced.

[0010] 较佳地,所述激光器组的激光器呈水平等间隔的并排平行设置于所述激光器安装座上。 Side by side parallel to the [0010] Preferably, the laser of the laser set horizontally disposed at equal intervals of the laser mounting seat. 并排平行设置所述激光器组的激光器能够有利于所述激光对位设备对所述腔体组进行精准的对位。 Disposed side by side in parallel with the laser set of lasers can facilitate alignment of the laser device for precision alignment of the cavity group.

[0011] 较佳地,所述透明目标靶包括的靶标呈圆形。 [0011] Preferably, the target of interest comprises a transparent circular target.

[0012] 本发明还提供一种激光对位方法,用于对OLED镀膜生产线上的若干镀膜工艺用腔体组进行精确对位其特征在于,包括以下步骤: [0012] The present invention also provides a laser alignment method for coating a plurality of line OLED coating process for precise alignment characterized by, comprising the step of cavity groups:

[0013] (1)提供激光器组及透明目标靶,所述激光器组至少包括两个平行设置的激光器, 所述透明目标靶上设置有与所述激光器组中的激光器的数量及排布相对应的靶标; [0013] (1) providing a laser array and a transparent target by the laser, the laser comprises at least two parallel disposed, is provided on the transparent with a target of interest with the laser in the laser set number and arrangement corresponding to the It targets;

[0014] (2)将腔体依次排列,并将位于起始端的腔体作为基准腔体,位于所述基准腔体之后的腔体作为对位腔体; [0014] (2) sequentially arranged cavities, and the cavity located at the top as a reference cavity, is located in the cavity after the cavity as a reference position of the cavity;

[0015] (3)将所述激光器组设置于所述基准腔体上的对接部,将所述透明目标靶分布设置于所述对位腔体上的对接部; [0015] (3) disposed in the laser array portion abutting on said reference cavity, the transparent profile is provided to the target of interest mating portion of the upper bits of the cavity;

[0016] (4)调节所述基准腔体及对位腔体的位置使所述激光器组中的激光器发射出的激光依次对应穿过所述透明目标靶的靶标。 Laser [0016] (4) adjusting the position of the reference position and the cavity of the laser cavity in the laser emits set sequentially through the transparent target of interest corresponding to a target.

[0017] 与现有技术相比,在本发明激光对位设备中,所述激光器组设置于所述基准腔体上的对接部,所述透明目标靶分布设置于所述对位腔体上的对接部,所述激光器与所述透明目标靶之间预留有光线通道,调节所述基准腔体及对位腔体的位置,当所述激光器组中的激光器发射出的激光通过所述光线通道依次对应穿过所述透明目标靶的靶标时,表明所述对位腔体已经和所述基准腔体完成了对位,通过本发明激光对位设备对镀膜用工艺腔体组进行对位的流程简单、操作方法简便易于实现。 [0017] Compared with the prior art, the present invention in the laser alignment apparatus mating portion, the laser array is disposed on the reference chamber, the transparent distributed target disposed on the target position of the chamber docking portion, the reserved between the target and the transparent laser light with a target channel, adjusting the position of the reference cavity and the cavity of the bit, the laser light when the laser emits laser set out by the when the Fiber channel target sequence corresponding to the target through the transparent target, indicating that the position of the reference cavity, and the cavity has been completed the position, alignment of the apparatus for coating by the process of the group by a laser cavity according to the present invention, bit process is simple, the operation method is simple and easy to implement.

[0018] 通过以下的描述并结合附图,本发明将变得更加清晰,这些附图用于解释本发明的实施例。 [0018] the following description in conjunction with the accompanying drawings, the present invention will become apparent from these drawings to explain an embodiment of the present invention.

附图说明 BRIEF DESCRIPTION

[0019] 图1为本发明激光对位设备装设于腔体组上的一个实施例的结构示意图。 [0019] Figure 1 is for a laser alignment device mounted on the cavity structure of a group of schematic embodiment.

[0020] 图2为本发明激光对位设备的激光器装设于激光器安装座的俯视图。 Laser [0020] FIG. 2 of the present invention to position the laser device is mounted on a top view of a laser mount.

[0021] 图3为本发明透明目标靶的结构示意图。 [0021] Fig 3 a schematic view of the structure of the present invention, a transparent target of interest.

具体实施方式 detailed description

[0022] 现在参考附图描述本发明的实施例,附图中类似的元件标号代表类似的元件。 [0022] Referring now to the accompanying drawings of embodiments of the present invention, the accompanying drawings in which like numerals represent like element elements throughout. 如上所述,如图1-3所示,本实施例提供的激光对位设备100,用于对OLED镀膜生产线上的若干镀膜工艺用腔体组10进行精确对位,所述激光对位设备100包括激光器组1及透明目标靶40,所述激光器组1包括三个平行设置的激光器la、lb及lc,对应的所述透明目标靶40 上设置有与所述激光器组1中的激光器la、lb及Ic排布相对应的靶标40,所述腔体组10 包括依次排列的位于起始端的基准腔体10a,位于所述基准腔体IOa之后对位腔体IOb及10c,所述基准腔体10a、对位腔体IOb及10c,均具有对接连通用的对接部20,所述激光器组1设置于所述基准腔体IOa上的对接部20,所述透明目标靶40分布设置于所述对位腔体IOb及IOc上的对接部,所述激光器组1与所述透明目标靶40之间预留有光线通道2,调节所述基准腔体IOa及对位腔体IOb及IOc的位置使所述激光器组1中的激光器发射出的激光通过所 As described above, 1-3, according to this embodiment of the laser alignment apparatus 100, a process for coating a plurality of OLED coating chamber group line 10 for accurate alignment of the laser alignment device 1 includes a laser array 100 and the transparent target of interest 40, the laser includes a laser 1 la three groups arranged in parallel, LB and LC, the corresponding 40 disposed on the transparent laser with a target of interest in the laser set la with 1 after, Ic and LB arranged corresponding target 40, the chamber 10 comprises a set of reference cavity 10a located at the starting end of the sequentially arranged, in said reference cavity chamber IOa para-IOb and 1OC, the reference chamber 10a, and the alignment cavity IOb 1OC, each having a mating portion 20, the laser array 1 is arranged in succession on a common abutment portion IOa the reference cavity 20, the transparent profile is provided in the target of interest 40 the mating portion of the cavity on the bit and IOc IOb, and the laser array 1 40 reserved between the target of interest with a transparent Fiber channel 2, adjusting the reference position of the cavity and the cavity IOa IOb and IOc 1 in a position of the laser so that the laser emits laser set by the 述光线通道2依次对应穿过所述透明目标靶40的靶标3。 2 sequentially corresponding to said light passage through the transparent target of interest of the target 340.

[0023] 较佳者,如图1所示,所述腔体组10底部设置进行升降调节的调节支撑脚11。 [0023] Preferably persons, as illustrated, the bottom of the cavity 10 is provided with a set of adjustment for height-adjustable support leg 11. 通过所述调节支撑脚11对所述腔体组10进行粗调节,有利于所述激光对位设备100对所述腔体组10进行精准的对位。 By adjusting the support leg the group 11 of the cavity 10 for coarse adjustment, facilitate alignment of the laser device 100 of the cavity 10 is set precise alignment.

[0024] 如图2所示,还包括激光器安装座4,所述激光器安装座4固定在所述基准腔体IOa上,所述激光器组1装设于所述激光器安装座4上。 [0024] 2, further comprising a laser mount 4, the laser is mounted on the holder 4 is fixed in the cavity IOa of reference, the laser array 1 is mounted on the mounting seat 4 laser. 设置所述激光器安装座4能够很好的安装所述激光器对位设备100,不容易产生位移。 Setting said laser mount 4 is mounted well the laser alignment apparatus 100, is not easily displaced.

[0025] 较佳者,如图2所示,所述激光器组1的激光器la、lb及Ic呈水平等间隔的并排平行设置于所述激光器安装座4上。 [0025] Preferably those shown in Figure 2, the laser of laser 1 group la, Ic and LB horizontally spaced parallel side by side and so disposed on said laser mounting seat 4. 并排平行设置所述激光器组1的激光器la、lb及Ic 能够有利于所述激光对位设备100对所述腔体10进行精准的对位。 Disposed side by side in parallel with the laser set of laser la 1, lb and Ic can facilitate alignment of the laser device 100 of the cavity 10 for precise alignment.

[0026] 较佳者,所述透明目标靶40包括的靶标3呈圆形。 [0026] Preferably by the target of interest 40 comprises a transparent target 3 has a circular shape.

[0027] 本发明还提供一种激光对位方法,用于对OLED镀膜生产线上的若干镀膜工艺用腔体组进行精确对位其包括以下步骤: [0027] The present invention also provides a laser alignment method for coating a plurality of OLED coating process on a production line comprising the steps of precise alignment with a cavity group:

[0028] SOOl :提供激光器组及透明目标靶,所述激光器组至少包括两个平行设置的激光器,所述透明目标靶上设置有与所述激光器组中的激光器的数量及排布相对应的靶标; [0028] SOOl: providing a transparent and laser set target by the laser set comprises at least two lasers arranged in parallel, provided on the transparent target objectives and the number of lasers in the laser set and corresponding arrangement target;

[0029] S002:将腔体依次排列,并将位于起始端的腔体作为基准腔体,位于所述基准腔体之后的腔体作为对位腔体; [0029] S002: The sequentially arranged cavities, and the cavity located at the top as a reference cavity, is located in the cavity after the cavity as a reference position of the cavity;

[0030] S003 :将所述激光器组设置于所述基准腔体上的对接部,将所述透明目标靶分布设置于所述对位腔体上的对接部; [0030] S003: The laser array is provided on the mating portion of the reference cavity, the transparent profile is provided to the target of interest on the mating portion of the cavity position;

[0031] S004:调节所述基准腔体及对位腔体的位置使所述激光器组中的激光器发射出的激光依次对应穿过所述透明目标靶的靶标。 [0031] S004: laser cavity and adjusting the position of the reference position of the laser cavity in the laser emits set sequentially through the transparent target of interest corresponding to a target.

[0032] 结合图1-3所示,在本发明激光对位设备100,所述激光器组1设置于所述基准腔体IOa上的对接部20,所述透明目标靶40分布设置于所述对位腔体IOb及IOc上的对接部20,所述激光器组1与所述透明目标靶40之间预留有光线通道2,调节所述基准腔体IOa 及对位腔体IOb及IOc的位置,当所述激光器组1中的激光器la、lb及Ic发射出的激光通过所述光线通道2依次对应穿过所述透明目标靶40的靶标3时,表明所述对位腔体IOb及IOc已经和所述基准腔体IOa完成了对位,通过本发明激光对位设备10对镀膜用工艺腔体组进行对位的流程简单、操作方法简便易于实现。 [0032] in conjunction with FIGS. 1-3, in the present invention, the laser 100, the laser array 1 is provided with abutment portions 20 bit device on the reference cavity IOa of the transparent distributed target disposed on said target 40 abutting portions of the upper bits of the cavity 20 is IOc and IOb, is reserved for the laser light path 40 between the groups 1 and 2 of the transparent target of interest, adjusting the reference position of the cavity and the cavity IOa and IOc of IOb position of the laser when the laser set laser 1 la, lb and Ic emitted by the corresponding light passage 2 passes through the transparent target 3 target of interest 40, indicating that the alignment cavity and IOb IOc and said reference cavity has been completed IOa bits, for bits of the process is simple, easy to operate and easy to implement the method of coating the alignment device 10 by the process set by the laser cavity of the present invention.

[0033] 以上结合最佳实施例对本发明进行了描述,但本发明并不局限于以上揭示的实施例,而应当涵盖各种根据本发明的本质进行的修改、等效组合。 [0033] or more with the preferred embodiments of the present invention has been described, but the present invention is not limited to the embodiments disclosed above, but should cover various modifications included within the spirit of the present invention, equivalent combinations.

Claims (10)

  1. 1. 一种激光对位设备,用于对OLED镀膜生产线上的若干镀膜工艺用腔体组进行精确对位,其特征在于:所述激光对位设备包括激光器组及透明目标靶,所述激光器组至少包括两个平行设置的激光器,所述透明目标靶上设置有与所述激光器组中的激光器的数量及排布相对应的靶标,所述腔体组中的腔体依次排列,位于起始端的腔体形成基准腔体,位于所述基准腔体之后的腔体形成对位腔体,所述基准腔体及对位腔体均具有对接连通用的对接部,所述激光器组设置于所述基准腔体上的对接部,所述透明目标靶分布设置于所述对位腔体上的对接部,所述激光器组与所述透明目标靶之间预留有光线通道,调节所述基准腔体及对位腔体的位置使所述激光器组中的激光器发射出的激光通过所述光线通道依次对应穿过所述透明目标靶的靶标。 A laser alignment apparatus for coating a plurality of OLED coating process line for precise alignment with a cavity group, wherein: said laser comprises a laser alignment device and a transparent set target by the laser group includes at least two lasers arranged in parallel, provided with the laser in the laser set the number and arrangement corresponding to the target on the transparent target by the cavity of the cavity in order of priority groups, situated from starting end forming a reference cavity chamber, located in the cavity after the cavity is formed on the reference position of the cavity, the cavity and the reference position of the cavity has a mating portion of the common succession, disposed in a laser set the mating portion on the reference chamber, the transparent profile is provided to the target of interest on the mating portion on the bit body cavities, is reserved for passage of light between the laser array and the transparent target by adjusting the reference position and position of the cavity of the laser cavity group corresponding to laser emits laser light through the transparent target of interest by the Fiber channel target sequence.
  2. 2.如权利要求1所述的激光对位设备,其特征在于:所述腔体组底部设置进行升降调节的调节支撑脚。 The laser according to claim 1 alignment apparatus, wherein: a bottom of said tank group provided for adjusting the height-adjustable support foot.
  3. 3.如权利要求1所述的激光对位设备,其特征在于:还包括激光器安装座,所述激光器安装座固定在所述基准腔体上,所述激光器组装设于所述激光器安装座上。 The laser according to claim 1 alignment apparatus, characterized by: further comprising a laser mount, the laser mount fixed to the reference cavity, a laser assembly disposed on said laser mounting seat .
  4. 4.如权利要求3所述的激光对位设备,其特征在于:所述激光器组的激光器呈水平等间隔的并排平行设置于所述激光器安装座上。 The laser according to claim 3, wherein the alignment device, characterized in that: the laser as a laser set of equally spaced parallel side by side horizontally disposed on said laser mounting seat.
  5. 5.如权利要求1所述的激光对位设备,其特征在于:所述透明目标靶包括的靶标呈圆形。 The laser according to claim 1 alignment apparatus, wherein: said target comprises a target transparent circular target.
  6. 6. 一种激光对位方法,用于对OLED镀膜生产线上的若干镀膜工艺用腔体组进行精确对位其特征在于,包括以下步骤:(1)提供激光器组及透明目标靶,所述激光器组至少包括两个平行设置的激光器,所述透明目标靶上设置有与所述激光器组中的激光器的数量及排布相对应的靶标;(2)将腔体依次排列,并将位于起始端的腔体作为基准腔体,位于所述基准腔体之后的腔体作为对位腔体;(3)将所述激光器组设置于所述基准腔体上的对接部,将所述透明目标靶分布设置于所述对位腔体上的对接部;(4)调节所述基准腔体及对位腔体的位置使所述激光器组中的激光器发射出的激光依次对应穿过所述透明目标靶的靶标。 A laser alignment method for coating a plurality of line OLED coating process is carried out with precise alignment cavity group wherein, comprising the steps of: (1) providing a laser array and a transparent target by the laser group includes at least two lasers arranged in parallel, provided with the laser in the laser set the number and arrangement corresponding to the target on the transparent target of interest; (2) sequentially arranged cavities, and located at the top as a reference cavity chamber, located in the cavity after the cavity as a reference position of the cavity; abutting portion (3) to the laser array is disposed on the reference chamber, the target of interest transparent distribution of the mating portion provided in the upper position of the cavity; (4) adjust the laser cavity and the reference position so that the alignment of the laser cavity groups corresponding to the laser light emitted through the transparent target sequence target target. .
  7. 7.如权利要求6所述的激光对位方法,其特征在于:所述腔体组底部设置进行升降调节的调节支撑脚。 The laser alignment method according to claim 6, wherein: a bottom of said tank group provided for adjusting the height-adjustable support foot.
  8. 8.如权利要求6所述的激光对位方法,其特征在于:还包括激光器安装座,所述激光器安装座固定在所述基准腔体上,所述激光器组装设于所述激光器安装座上。 8. The laser alignment method according to claim 6, characterized in that: further comprising a laser mount, the laser mount fixed to the reference cavity, a laser assembly disposed on said laser mounting seat .
  9. 9.如权利要求8所述的激光对位方法,其特征在于:所述激光器组的激光器呈水平等间隔的并排平行设置于所述激光器安装座上。 9. The laser alignment method according to claim 8, wherein: said laser laser set of horizontal spaced parallel side by side and so disposed in said laser mounting seat.
  10. 10.如权利要求6所述的激光对位方法,其特征在于:所述透明目标靶包括的靶标呈圆形。 10. The laser alignment method according to claim 6, wherein: said target comprises a target transparent circular target.
CN 201110318271 2011-10-19 2011-10-19 Laser counterpoint equipment and laser counterpoint method CN102394277A (en)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5686996A (en) * 1995-05-25 1997-11-11 Advanced Micro Devices, Inc. Device and method for aligning a laser
CN1477373A (en) * 2002-08-23 2004-02-25 芝加哥钢带公司 A laser alignment device
CN201196949Y (en) * 2006-10-13 2009-02-18 应用材料股份有限公司 System and target for aligning semiconductor device processing equipment

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5686996A (en) * 1995-05-25 1997-11-11 Advanced Micro Devices, Inc. Device and method for aligning a laser
CN1477373A (en) * 2002-08-23 2004-02-25 芝加哥钢带公司 A laser alignment device
CN201196949Y (en) * 2006-10-13 2009-02-18 应用材料股份有限公司 System and target for aligning semiconductor device processing equipment

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