CN111399125A - Adjustable optical delay line of silicon-based coupling waveguide and adjustable optical delay method - Google Patents
Adjustable optical delay line of silicon-based coupling waveguide and adjustable optical delay method Download PDFInfo
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 40
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 40
- 239000010703 silicon Substances 0.000 title claims abstract description 40
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000005253 cladding Methods 0.000 description 3
- 230000003139 buffering effect Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
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- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/2804—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers
- G02B6/2861—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers using fibre optic delay lines and optical elements associated with them, e.g. for use in signal processing, e.g. filtering
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Abstract
The invention discloses an adjustable light delay line of a silicon-based coupling waveguide, which comprises a runway type silicon waveguide structure, an input waveguide, an output waveguide and a delay regulation part, wherein the runway type silicon waveguide structure, the input waveguide, the output waveguide and the delay regulation part are arranged on the upper surface of an SOI substrate. Through a coupling wave principle, namely two parallel adjacent coupling waveguides with the same parameters and almost no loss, if the phases are matched, the energy exchange can reach 99.9 percent. After the two waveguides are coupled with each other, the optical signal can be continuously transmitted in the multi-ring runway structure, so that the optical delay effect is generated. The light delay time is regulated and controlled by utilizing the characteristics of the phase change material GST. The adjustable light delay line can still enable the output bandwidth to be larger on the premise of compact structure, and is more beneficial to integration; the loss is only 2.96dB, the delay time reaches 58.8ps, multi-stage regulation can be realized according to requirements, and the overall size is only 0.006mm2。
Description
Technical Field
The invention belongs to the field of silicon-based photonics, and particularly relates to an adjustable optical delay line of a silicon-based coupling waveguide and an optical delay method.
Background
Silicon-based photonic devices are a hot research spot in recent years, and the delay of optical signals is a basic function in the time domain optical signal processing. Photons cannot be stored and so optical buffering is implemented by delaying the optical signal in the light-conducting medium for a period of time. "optical buffering" can be started from two aspects: firstly, the propagation speed of light is slowed down; another aspect is to extend the optical transmission path. The currently proposed full optical buffer is of two main types: one type is a slow light type all-optical buffer; the other is an optical fiber delay line or an optical fiber ring type all-optical buffer. The EIT technology utilizes quantum coherence effect to eliminate medium influence in the process of electromagnetic wave propagation, and has complex experimental system, high cost and difficult realization at room temperature. Based on the light cache by adopting the light delay line, the multi-ring runway type structure is provided, so that the input light signal can generate delay amount with higher delay precision, the loss of input light is reduced, the bandwidth is increased, and the regulation and control functions of multilevel different delay time are realized.
Disclosure of Invention
In view of the above, the present invention provides a tunable optical delay line of a silicon-based coupling waveguide, which is small in size, low in loss, and wide in operating bandwidth.
In order to solve the above technical problems, the present invention provides a tunable optical delay line of a silicon-based coupling waveguide, comprising a racetrack-type silicon waveguide structure having an input end and at least one output end, the racetrack-type silicon waveguide structure further comprising a first main track and a second main track arranged in parallel, a first curved track and a second curved track respectively arranged on two sides of the first main track and the second main track, and a plurality of curved coupling waveguides arranged between the first main track and the second main track, wherein the first main track and the second main track comprise a plurality of waveguides with different widths, and adjacent waveguides have a difference of 1 level in width, two ends of the first curved track are connected to the first main track and the second main track, one end of the second curved track is connected to the second main track, and the other end of the second curved track is arranged at a position where an optical signal can be coupled and transmitted into the first main track, the plurality of curved coupling waveguides are positioned such that optical signals transmitted in the first and second mainchannels can be coupled into and transmitted by the corresponding curved coupling waveguides.
Preferably, the plurality of waveguides with different widths on the first main channel and the second main channel increase step by step and then decrease step by step along the optical signal transmission direction, wherein the first main channel arranges the waveguides with the waveguide modes of TE0, TE1, TE2, TE3 and TE4 in sequence along the optical signal transmission direction from the input end, and then the waveguides with the waveguide modes of TE4 to TE3 to TE2 to TE1 to TE0 from the TE3, and the second main channel arranges the waveguides with the waveguide modes of TE0, TE1, TE2, TE3 in sequence along the optical signal transmission direction from the first bend, and then the waveguides with the waveguide modes of TE3 to TE2 to TE1 to TE0 from the TE 3.
Preferably, the number of the plurality of curved coupling waveguides is 6, the 6 curved coupling waveguides all transmit optical signals in the TE0 mode, and each of the curved coupling waveguides is coupled to a respective one of the waveguides on the first main channel and the second main channel.
Preferably, the distance between the coupling end of each curved coupling waveguide and the first main track and the second main track is within the coupling action range.
Preferably, the coupling end length of each of the curved coupling waveguides satisfies a coupling length formula of coupling the optical signal between two adjacent waveguides.
Preferably, the curved coupling waveguide and each of the waveguides on the first and second main channels have TE wave modes with different dispersion curves, and the dispersion curves intersect at a phase-matched wavelength node.
Preferably, the racetrack silicon waveguide structure is fabricated on an SOI substrate, and each waveguide in the racetrack silicon waveguide structure is a ridge waveguide.
Preferably, the optical waveguide further comprises at least 1 output end, wherein a phase change switch is arranged on the output end, and the phase change switch is used for leading out an optical signal on the waveguide under voltage excitation.
Preferably, the number of the output ends is 4, 4 phase change switches are arranged corresponding to the 4 output ends, and the positions of the 4 phase change switches meet the condition that light runs through the positions of 1 circle, 2 circles, 3 circles and 4 circles on the adjustable optical delay line respectively.
According to the invention, the runway-type silicon waveguide structure is characterized in that an optical signal firstly passes through the first main road, the first bend, the second main road and the second bend from the input end in a TE0 mode, then the TE0 mode optical signal is coupled into the TE1 mode waveguide of the first main road close to the second bend by the second bend, the transition from the TE0 mode to the TE1 mode is completed, next-turn transmission is carried out, the TE1 is transitioned into the TE2 mode and returns to the first main road, and the above processes are repeated until the optical signal is transitioned into the TE4 mode or is led out by any one of the output ends.
Compared with the prior art, the technical scheme of the invention has the beneficial effects that:
(1) the coupling waveguide optical delay line is manufactured on the basis of an SOI substrate, so that the coupling waveguide optical delay line has the characteristic of stable performance;
(2) the output bandwidth can be still larger on the premise of compact structure, and the integration is more facilitated;
(3) the loss is only 2.96dB, the delay time reaches 58.8ps, and the overall size is about 0.006mm2；
(4) The delay time can be regulated and controlled by using the phase change material GST.
Drawings
Fig. 1 is a schematic view of the track-type silicon waveguide structure of the present invention.
FIG. 2 is a TE0, TE4 waveguide coupling schematic.
Fig. 3 is a schematic diagram of an adjustable functional structure.
Fig. 4 is a partial cross-sectional view of a racetrack silicon waveguide.
Detailed Description
For the sake of easy understanding, the technical principle of the present invention will be explained below. Referring to fig. 2 and 3, fig. 2 is a schematic diagram of optical signal hopping between two different waveguides based on the coupled wave principle. As shown, the coupled wave principle is the transfer of energy from one waveguide to another. In a continuous waveguide, energy is transferred from one part of the waveguide to another for optical signals in different modes, e.g. from TE0 mode to TE4 mode, energy of one mode being transferred from one part of the waveguide to the otherConversion to another mode energy, and coupling only when two optical waveguides with different dispersion curves intersect at a phase-matched wavelength node, i.e., mode field matching and effective index are satisfied at the same time, are close together, the graph in the upper right of FIG. 2 is a schematic representation of the coupling of the TE0 mode to the TE4 mode, LcThe coupling length can be calculated by formula (1). The lower left portion of fig. 2 is a waveguide mode corresponding to the difference in coupling of the TE0 mode with the TE4 mode in the upper right portion, with different waveguide widths and different effective indices, provided that the mode field matching and the effective index are the same. For example, when the curved coupling waveguide is close to the main waveguide section to about 500nm, through the coupling wave principle, in two parallel adjacent coupling waveguides with the same parameters and almost no loss, if the phases are matched, the optical powers of the two optical fields alternate back and forth, and the energy exchange reaches 99.9%. The coupling length is represented by formula (1)
Wherein Δn＝n1-n2，n1、n2The effective refractive index of the two coupled silicon waveguides.
Referring to fig. 3 again, fig. 3 is a schematic diagram of transmission between two different waveguides of an optical signal jump designed based on the above principle. As shown, the waveguide 11 is a TE0 mode waveguide, the waveguide 131 is a TE1 mode waveguide, and the waveguide 16 is a TE0 mode waveguide. When a waveguide of TE0 mode is input into the waveguide 11, if the waveguide 16 is transmitted into the waveguide 16 through the waveguide 131, the optical signal of TE0 mode transmitted in the waveguide 16 is coupled into the waveguide 131 and transmitted as an optical signal of TE1 mode if the waveguide 16 satisfies the coupling condition with the waveguide 131. If a switch is provided on the waveguide 131, and the switch is opened when the TE1 mode light passes through the switch, the optical signal is led out, and a delay cycle of the optical signal is completed.
The invention is further illustrated with reference to the following figures and examples without thereby limiting the scope of the invention.
Referring to fig. 1, fig. 1 is a schematic structural diagram of a light delay line according to the present invention. As shown, the optical delay line includes a racetrack-type silicon waveguide structure having an input end 11 and at least one output end 12, a first main track 13 and a second main track 14 arranged in parallel, a first bend 15 and a second bend 16 arranged on both sides of the first main track 13 and the second main track 14, respectively, and a plurality of curved coupling waveguides 17 arranged between the first main track 13 and the second main track 14.
The first main channel 13 and the second main channel 14 include a plurality of waveguides with different widths, the widths of adjacent waveguides are different by 1 step, and the waveguides with different widths increase step by step and then decrease step by step along the optical signal transmission direction. As shown in the figure, the first main channel 13 includes four waveguides 131, 132, 133, and 134, the number of the stages of each waveguide differs by 1 stage, the waveguide 131 is in TE1 mode, the waveguide 132 is in TE2 mode, the waveguide 133 is in TE3 mode, the waveguide 134 is in TE4 mode, and the waveguide mode input by the input end 11 is in TE0 mode, so that the waveguides are arranged in sequence from the input end 11 along the optical signal transmission direction in the modes of TE0, TE1, TE2, TE3, and TE4, and then from TE4 to TE3 to TE2 to TE1 to TE 0. The second main road 14 comprises three waveguides 141, 142 and 143, the waveguide 141 is in a TE1 mode, the waveguide 142 is in a TE2 mode, and the waveguide 143 is in a TE3 mode, and since the first bend 15 inputs the TE0 mode, the waveguides sequentially connecting the waveguide modes TE0, TE1, TE2, and TE3 from TE3 to TE2 to TE1 to TE0 along the optical signal transmission direction from the first bend 15.
The first bend 15 is connected to the first main track 13 and the second main track 14 at two ends, the second bend 16 is connected to the second main track 14 at one end, and is disposed at a position capable of coupling and transmitting an optical signal into the first main track 13 at the other end, and the first bend 15 and the second bend 16 transmit the optical signal in TE0 mode.
The plurality of curved coupling waveguides 17 are positioned such that optical signals transmitted in the first and second main channels 13 and 14 can be coupled into the corresponding curved coupling waveguides and transmitted. In the illustrated embodiment, the number of these curved coupling waveguides 17 is 6, the 6 curved coupling waveguides 17 all transmit optical signals in the TE0 mode, and each of the curved coupling waveguides 17 is coupled to a respective one of the waveguides on the first and second main channels 13 and 14. Such as between the waveguide 132 on the right side of the first main track 13 and the waveguide 142 on the right side of the second main track, a jump transmission of the optical signal can be achieved by bending the coupling waveguide 17. The jump transmission is based on the coupled wave principle, when the distance between the coupling end of each curved coupling waveguide 17 and the first main channel 13 and the second main channel 14 is within the coupling action range, and the length of the coupling end of each curved coupling waveguide 17 satisfies the coupling length formula that the optical signal is coupled between two adjacent waveguides.
Further, the TE wave modes having different dispersion curves in the curved coupling waveguide 17 and the respective waveguides on the first main channel 13 and the second main channel 14, and the dispersion curves intersect at the phase-matched wavelength node. With this arrangement, the optical signal can be caused to jump-circulate within the racetrack silicon waveguide structure until it is tapped off by the switch at the output 12.
Referring to fig. 1 again, at least one output end 12 is provided on the whole optical delay line, and the output end 12 is provided with a phase change switch (Ge2Sb2Te 5; GST) for regulation and control, and the phase change switch guides out the optical signal on the waveguide under voltage excitation, so that the optical signal which travels a circle in the racetrack waveguide does not continue to be transmitted forward any more but is coupled with the adjacent output waveguide at the position to output in a mode corresponding to the current waveguide. In the example shown in the figure, there are a total of 4 outputs and corresponding 4 phase change switches, wherein the first phase change switch 121 is disposed on the second bend 16, the second phase change switch 122 is disposed on the waveguide 141, the third phase change switch 123 is disposed on the waveguide 142, and the fourth phase change switch 124 is disposed on the waveguide 134 of the first main track 13, and the positions of the 4 phase change switches are such that the light runs for 1, 2, 3, and 4 turns on the delay line, respectively, and if the light runs for one turn for 30ps, the four-step delay results in a total of five-step dynamically adjustable control of 0ps, 30ps, 60ps, 90ps, and 120 ps.
Referring to fig. 4, fig. 4 is a partial cross-sectional view of a racetrack silicon waveguide structure, which includes an SOI substrate 21, a plurality of waveguides 22, a silicon oxide cladding layer 23 and a phase-change material layer 24, wherein the silicon waveguides 22 are formed on the SOI substrate 21, and each waveguide 22 in the racetrack silicon waveguide structure is a ridge waveguide. The silica cladding encapsulates the plurality of silicon waveguides 22, making them fixed on the substrate. The phase change material layer 24 is used to change the transmission properties of the waveguide 22, so that the optical signal of the waveguide 22 is guided out to realize the function of each output end in fig. 1. The phase change material layer 24 includes a gold film disposed on the silica cladding, and a GST phase change material layer covering the gold film, and due to the difference of optical constants in the amorphous state and the crystalline state, the resonance frequency of the plasma changes corresponding to the plasma being in different voltages, so that the peak wavelengths of the absorption spectrum, the reflection spectrum and the transmission spectrum shift, and further the transmittance of the device changes in different phase states. The electric pulse is used to induce the film to generate phase change so as to achieve the function similar to that of an optical switch, so that the optical signal which travels a circle in the runway type waveguide does not continue to be transmitted forwards but enters the output waveguide from the adjacent output waveguide through close coupling to be output.
When the optical delay line is used for adjusting and controlling the optical delay, in the track-type silicon waveguide structure, an optical signal firstly passes through the first main channel 13, the first bend 15, the second main channel 14 and the second bend 16 from the input end 11 in a TE0 mode, then the optical signal in the TE0 mode is coupled into the TE1 mode waveguide 131 of the first main channel 13 close to the second bend by the second bend 16, the transition from the TE0 mode to the TE1 mode is completed, next-round transmission is performed, the TE1 is transitioned into the TE2 and returns to the first main channel, the above-mentioned process is repeated until the optical signal is transitioned into the TE4, and at this time, the optical signal is output by the output end 12 loaded on the TE4 mode waveguide 134, and of course, in a specific application, any output end can be selected and exported.
In summary, the present invention provides a tunable optical delay line of a silicon-based coupling waveguide, which includes a track-type Si waveguide structure, input and output waveguides, and a delay adjusting part disposed on an upper surface of an SOI substrate. After the two waveguides are coupled by the coupling wave principle, the optical signal can be continuously transmitted in the runway type structure, so that the optical delay effect is generated. And the regulation and control of the optical delay time are realized by utilizing the characteristics of the phase change material GST. The invention can still make the output bandwidth larger on the premise of compact structure, is more beneficial to integration and has small loss.
Claims (10)
1. An adjustable optical delay line of a silicon-based coupling waveguide is characterized in that: comprising a racetrack silicon waveguide structure having an input end and at least one output end, the runway type waveguide structure also comprises a first main road and a second main road which are arranged in parallel, a first bend and a second bend which are respectively arranged at two sides of the first main road and the second main road, and a plurality of bending coupling waveguides which are arranged between the first main road and the second main road, wherein the first main channel and the second main channel comprise a plurality of waveguides with different widths, and the widths of the adjacent waveguides are different by 1 order, the two ends of the first bend are connected to a first main road and a second main road, one end of the second bend is connected to the second main road, the other end is arranged at a position capable of coupling and transmitting an optical signal into the first main road, the plurality of curved coupling waveguides are positioned such that optical signals transmitted in the first and second mainchannels can be coupled into and transmitted by the corresponding curved coupling waveguides.
2. A tunable optical delay line for a silicon-based coupling waveguide as defined in claim 1, wherein: the waveguides with different widths on the first main channel and the second main channel are increased step by step and then decreased step by step along the optical signal transmission direction, wherein the waveguide modes of the first main channel are sequentially arranged from the input end along the optical signal transmission direction to be TE0, TE1, TE2, TE3 and TE4 and then from TE4 to TE3 to TE2 to TE1 to TE0, and the waveguide modes of the second main channel are sequentially arranged from the first bend along the optical signal transmission direction to be TE0, TE1, TE2 and TE3 and then from TE3 to TE2 to TE1 to TE 0.
3. A tunable optical delay line for a silicon-based coupling waveguide as defined in claim 2, wherein: the number of the plurality of curved coupling waveguides is 6, the 6 curved coupling waveguides are used for transmitting optical signals in a TE0 mode, and each curved coupling waveguide is coupled with one waveguide on the first main channel and one waveguide on the second main channel.
4. A tunable optical delay line for a silicon-based coupling waveguide as defined in claim 3, wherein: the distance between the coupling end of each bent coupling waveguide and the first main channel and the second main channel is within the coupling action range.
5. A tunable optical delay line for a silicon-based coupling waveguide as defined in claim 3, wherein: the coupling end length of each bent coupling waveguide meets a coupling length formula of coupling optical signals between two adjacent waveguides.
6. A tunable optical delay line for a silicon-based coupling waveguide as defined in claim 3, wherein: the TE wave modes with different dispersion curves in the curved coupling waveguide and the respective waveguides on the first and second main channels, and the dispersion curves intersect at phase-matched wavelength nodes.
7. A tunable optical delay line for a silicon-based coupling waveguide as defined in claim 1, wherein: the runway type silicon waveguide structure is manufactured on an SOI substrate, and all waveguides in the runway type silicon waveguide structure are ridge waveguides.
8. A tunable optical delay line for a silicon-based coupling waveguide as defined in claim 1, wherein: the optical waveguide fiber laser device further comprises at least 1 output end, wherein the output end is provided with a phase change switch, and the phase change switch is used for leading out an optical signal on the waveguide under voltage excitation.
9. A tunable optical delay line for a silicon-based coupling waveguide as defined in claim 8, wherein: the number of the output ends is 4, 4 phase change switches are arranged corresponding to the 4 output ends, and the positions of the 4 phase change switches meet the condition that light runs through the positions of 1 circle, 2 circles, 3 circles and 4 circles on the adjustable light delay line respectively.
10. A method for adjusting optical delay using the adjustable optical delay line of the silicon-based coupling waveguide of any one of claims 1 to 9, wherein: in the runway type silicon waveguide structure, an optical signal firstly passes through the first main road, the first bend, the second main road and the second bend from the input end in a TE0 mode, then the optical signal in a TE0 mode is coupled into the TE1 mode waveguide of the first main road close to the second bend by the second bend, the jump from the TE0 mode to the TE1 mode is completed by a coupling wave principle, next-circle transmission is carried out, the TE1 mode jumps to a TE2 mode and returns to the first main road, and the processes are repeated until the optical signal is jumped to the TE4 or is led out by any output end.
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| CN114966970A (en) * | 2021-02-22 | 2022-08-30 | 中国计量大学 | Transmission type wave plate based on germanium antimony tellurium nano-pillar array dynamic adjustment and preparation method thereof |
| CN114966970B (en) * | 2021-02-22 | 2024-04-12 | 中国计量大学 | Germanium antimony tellurium nano-pillar array-based dynamically adjustable transmission-type wave plate and preparation method thereof |
| CN113703244A (en) * | 2021-08-19 | 2021-11-26 | 扬州大学 | Large-scale integrated electro-optic micro-ring optical phased array |
| CN113703244B (en) * | 2021-08-19 | 2023-12-19 | 扬州大学 | Large-scale integrated electro-optical micro-ring optical phased array |
| CN114114534A (en) * | 2022-01-29 | 2022-03-01 | 中科鑫通微电子技术(北京)有限公司 | Optical pulse time delay device |
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