CN111383971A - Vacuum conveying piece device - Google Patents
Vacuum conveying piece device Download PDFInfo
- Publication number
- CN111383971A CN111383971A CN201811635906.5A CN201811635906A CN111383971A CN 111383971 A CN111383971 A CN 111383971A CN 201811635906 A CN201811635906 A CN 201811635906A CN 111383971 A CN111383971 A CN 111383971A
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- cavity
- mechanical arm
- manipulator
- guide
- vacuum transfer
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- 229910000831 Steel Inorganic materials 0.000 claims abstract description 35
- 239000010959 steel Substances 0.000 claims abstract description 35
- 239000011521 glass Substances 0.000 claims description 10
- 230000005540 biological transmission Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 abstract description 6
- 235000012431 wafers Nutrition 0.000 abstract description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000003825 pressing Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Manipulator (AREA)
Abstract
The invention discloses a vacuum conveying sheet device, comprising: the device comprises a cavity (1), a sliding rail guide device (2), a mechanical arm (3), a steel belt driving mechanism (4), a sensor device (5) and a cavity cover (6), wherein the cavity (1) and the cavity cover (6) are connected through a hinge to form an openable closed space, the sliding rail guide device (2) is connected with the mechanical arm (3) to enable the mechanical arm (3) to move along the guiding direction of the sliding rail, the steel belt driving mechanism (4) is connected with the middle part of the mechanical arm (3) to drive the mechanical arm (3) to move, the sensor device (5) is arranged at the position, close to the end part, of the side face of the cavity (1), and the stroke, the initial position and the final position of the mechanical arm (3) are accurately controlled. The invention can realize the accurate control of the operation of the manipulator, can adjust the operation stroke of the manipulator and is suitable for taking and delivering wafers of various semiconductor devices.
Description
Technical Field
The invention relates to the technical field of semiconductors, in particular to a vacuum conveying sheet device.
Background
With the rapid development of science and technology, the importance of the semiconductor industry is prominent day by day, and the automation and requirements of semiconductor manufacturing are higher and higher. In the semiconductor industry, a plurality of devices need to use a vacuum manipulator to convey wafers, but at present, the number of commercialized and finished vacuum wafer conveying manipulators is very small, and the vacuum wafer conveying manipulators are generally machines which are integrated by a plurality of devices, so that the cost is high. The vacuum wafer transfer device used for a single machine table is mostly customized, the cost of processed parts is high, the structure is complex, the assembly difficulty is high, the required precision is high, and the application performance is lack of reliability.
Disclosure of Invention
In order to solve the above problems, the present invention discloses a vacuum transfer sheet device, comprising: the device comprises a cavity, a slide rail guide device, a mechanical arm, a steel belt driving mechanism, a sensor device and a cavity cover, wherein the cavity and the cavity cover are connected through a hinge to form an openable closed space, the slide rail guide device is connected with the mechanical arm to enable the mechanical arm to move along the guide direction of the slide rail, the steel belt driving mechanism is connected with the middle part of the mechanical arm to drive the mechanical arm to move, the sensor device is arranged at the position, close to the end, of the side face of the cavity, and the stroke, the initial position and the final position of the mechanical arm are accurately controlled.
In the vacuum conveying sheet device of the present invention, preferably, the slide rail guide device includes a fixing base, a guide rod, and a slide block, wherein the fixing base is fixed at four corners of the bottom of the cavity, two ends of the guide rod are respectively fixed on the fixing base to form two fixed guide rails parallel to each other, the two slide blocks are slidably mounted on the two parallel guide rods, and the manipulator is fixed on the two slide blocks.
In the vacuum transfer piece device of the present invention, preferably, the stroke of the manipulator is designed to be smaller than a difference between an effective length of the guide rod and a length of the slider, and a certain safety distance is reserved at each of two ends of the guide rod.
In the vacuum transfer piece device of the present invention, preferably, the initial and final positions of the robot are spaced from both ends of the guide rod by 1 to 20 mm.
In the vacuum conveying sheet device, preferably, the steel belt driving mechanism comprises a driving wheel, a steel belt, a connecting block, a driven wheel and an adjusting seat, the driving wheel is connected with a motor or a motor at the bottom of the cavity, the driven wheel is installed on the adjusting seat, the adjusting seat is fixed at the bottom of the cavity to realize adjustment of the driven wheel, the driven wheel and the driving wheel are connected and driven by the steel belt, the steel belt is tensioned by the adjusting seat to realize transmission, and the connecting block is connected with the manipulator to realize driving of the manipulator.
In the vacuum transfer piece device of the present invention, preferably, the stroke of the manipulator is designed to be smaller than a difference between a distance from the connecting block to the two ends and a length of the connecting block, and a certain safety distance is reserved at each of the two ends of the steel strip.
In the vacuum transfer sheet device of the present invention, preferably, a safety distance between both ends of the steel belt is greater than a safety distance between both ends of the guide rod.
In the vacuum conveying sheet device of the present invention, preferably, the sensor device includes an emitter, a mounting seat, a pressing plate, a glass lens, and a reflecting plate, the pressing plate presses and fixes the glass lens to a side surface of the cavity, a sealing ring is disposed between the glass lens and the cavity, the emitter is fixed to the mounting seat, the mounting seat is fixed to the cavity in a position-adjustable manner, and the reflecting plate is mounted to an inner wall of the other side of the cavity opposite to the emitter and is configured to reflect a signal of the emitter.
In the vacuum transfer sheet device of the present invention, preferably, each of the emitters emits laser light and receives a laser signal returned from the opposite light emitting panel when the sensor device is normally operated, and the sensor device feeds back a stop signal if an object blocks the light so that the emitter does not receive the return signal.
Drawings
Fig. 1 is an overall configuration diagram of a vacuum transfer sheet device of the present invention.
Fig. 2 is a structural view of the slide rail guide apparatus of the present invention.
Fig. 3 is a structural view of a steel belt drive mechanism of the present invention.
Fig. 4 is a structural view of the sensor device of the present invention.
Figure 5 is a schematic representation of the operation of the sensor when the robot of the present invention is retracted.
Fig. 6 is a schematic diagram of the operation of the sensor when the robot of the present invention is extended.
In the figure:
1-cavity; 2, a slide rail guide device; 21-a fixed seat; 22-guide rod; 23-sliding block; 3, a mechanical arm; 4-steel belt driving mechanism; 41-driving wheel; 42-steel band; 43-connecting block; 44-driven wheels; 45-adjusting seat; 5-sensor device; 51-an emitter; 52-mounting seat; 53-pressing plate; 54-glass lens; 55-reflecting plate; 6-chamber cover.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more clearly and completely understood, the technical solutions in the embodiments of the present invention will be described below with reference to the accompanying drawings in the embodiments of the present invention, and it should be understood that the specific embodiments described herein are only for explaining the present invention and are not intended to limit the present invention. The described embodiments are only some embodiments of the invention, not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "upper", "lower", "vertical", "horizontal", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
Furthermore, numerous specific details of the invention, such as structure, materials, dimensions, processing techniques and techniques of the devices are described below in order to provide a more thorough understanding of the invention. However, as will be understood by those skilled in the art, the present invention may be practiced without these specific details. Unless otherwise specified below, each part in the device may be formed of a material known to those skilled in the art, or a material having a similar function developed in the future may be used.
Fig. 1 is an overall configuration diagram of a vacuum transfer sheet device of the present invention. As shown in fig. 1, the vacuum transfer sheet device of the present invention includes: the device comprises a cavity 1, a slide rail guide device 2, a manipulator 3, a steel belt drive mechanism 4, a sensor device 5 and a cavity cover 6, wherein the cavity 1 and the cavity cover 6 are connected through a hinge to form an openable closed space, and a vacuum environment can be realized. The slide rail guide device 2 is connected with the mechanical arm 3, so that the mechanical arm 3 moves along the guide direction of the slide rail, the steel belt drive mechanism 4 is connected with the middle part of the mechanical arm 3 to drive the mechanical arm 3 to move, and the sensor device 5 is arranged at the position, close to the end part, of the side surface of the cavity 1 and used for accurately controlling the stroke, the initial position and the final position of the mechanical arm 3.
Fig. 2 is a structural view of the slide rail guide apparatus of the present invention. As shown in fig. 2, the slide rail guiding device 2 includes a fixing base 21, a guide rod 22 and two sliding blocks 23, wherein the fixing base 21 is fixed at four corners of the bottom of the cavity 1, two ends of the guide rod 22 are respectively fixed on the fixing base 21 to form two fixed and parallel guide rails, the two sliding blocks 23 are slidably mounted on the two parallel guide rods 22, and the manipulator 3 is fixed on the two sliding blocks 23. The stroke of the manipulator is designed to be smaller than the difference between the effective length of the guide rod 22 and the length of the slide block 23, and certain safety distances are reserved at two ends of the guide rod 22 respectively. Specifically, as shown in fig. 2, in the slide rail guide 2, the length of the slider 23 is a, the effective length of the two guide rods 23 is L, the effective stroke of the slider 23 is L-a, and the stroke of the robot 3 is designed to be p < L-a. That is, in practical applications, the two ends of the stroke of the manipulator, i.e., the initial and final positions of the manipulator, are respectively reserved with certain safety distances e1 and e2 from the two ends of the guide rod 22, and then P is L-a-e1-e 2. According to the actual application requirement and the hard limiting requirement, the distance between the e1 and the e2 can be 1-20 mm respectively.
Fig. 3 is a structural view of a steel belt drive mechanism of the present invention. As shown in fig. 3, the steel belt driving mechanism 4 includes a driving wheel 41, a steel belt 42, a connecting block 43, a driven wheel 44, and an adjusting seat 45. The driving wheel 41 is connected with a motor or a motor at the bottom of the cavity 1, the driven wheel 44 is installed on the adjusting seat 45, the adjusting seat 45 is fixed at the bottom of the cavity 1 to realize adjustment of the driven wheel 44, the driven wheel 44 and the driving wheel 41 are connected and driven through the steel belt 42, the steel belt 42 is tensioned through the adjusting seat 45 to realize transmission, and the connecting block 43 is connected with the manipulator 3 to realize driving of the manipulator 3. The stroke of the manipulator is designed to be smaller than the difference between the distance from the connecting block 43 to the two ends and the length of the connecting block 43, and certain safety distances are reserved at the two ends of the steel strip respectively. Specifically, as shown in fig. 3, the length of the connecting block 43 is b, the distance from the connecting block to the two ends is L2, the effective stroke of the connecting block is L2-b, two safety distances e3 and e4 are reserved at the two ends of the steel strip, and the stroke P of the manipulator 3 is L2-b-e3-e 4. In addition, the steel band 42 is more easily damaged than the guide bar 22, and therefore, the reserved safety distance between the two ends of the steel band is designed to be larger than the reserved safety distance between the two ends of the guide rail, i.e. e3 is larger than e1, e4 is larger than e2, so that a hard protection is formed for the steel band 42.
Fig. 4 is a structural view of the sensor device of the present invention. As shown in fig. 4, the sensor device 5 includes an emitter 51, a mount 52, a platen 53, a glass lens 54, and a reflector 55. The pressing plate 53 presses and fixes the glass lens 54 on the side surface of the chamber 1, a sealing ring is arranged between the glass lens 54 and the chamber 1, the emitter 51 is fixed on the mounting seat 52, and the mounting seat 52 is fixed on the chamber 1 in a position-adjustable manner, for example, a bolt penetrates through a horizontal long hole on the mounting seat 52 to be fixed. A reflection plate 55 is installed at the other side inner wall of the chamber 1 opposite to the emitter 51 to reflect the signal of the emitter 51. When the sensor device 5 is operating normally, each emitter 51 emits laser light and receives a laser signal returned from the opposite light emitting panel 55, and if an object blocks the light so that the emitter 51 does not receive the return signal, the sensor device 5 feeds back a stop signal. The position of the manipulator 3 is designed in two ways, one being the retracted position of the manipulator and the other being the extended position of the manipulator, and the accuracy of these two positions is controlled by the sensor means 5.
Figure 5 is a view of the sensor operation with the robot retracted in accordance with the present invention. Fig. 6 is a diagram of sensor operation with the robot of the present invention extended. The operation of the sensor device is described in detail below with reference to fig. 5 and 6. The positions of the sensor device 5 are marked in fig. 5 and 6 as the initial position S1 and the end position S2, respectively. When the robot 3 is fully retracted, as shown in fig. 5, the rear edge of the tail weight block of the robot 3 blocks the signal emitted by the sensor means 5 at S1, the sensor means 5 will feed back a stop signal, and the control system will immediately signal the robot 3 to stop the retraction movement. Similarly, as shown in fig. 6, when the manipulator 3 performs the extending movement, when the front edge of the counterweight blocks the signal emitted by the sensor device 5 at S2, the sensor device 5 will feed back a stop signal, and the control system will immediately send a signal to stop the manipulator 3 performing the extending movement. The manipulator has a counterweight width c, and the distance between the initial position S1 and the final position S2 is L3, so the precise stroke of the manipulator is L3-c.
The manipulator 3 is used as a terminal execution element of the vacuum conveying piece device, the sensor device 5 directly detects the position of the manipulator 3, and the sensor device 5 sends out signals only when the manipulator 3 reaches a preset position, so that the signals are accurate and reliable, and misjudgment caused by faults or errors of intermediate links and the like can be avoided. For example, even if the steel strip in the intermediate link slips, the slip only affects the transport speed of the robot and does not affect the stop position of the robot and thus the signal of the sensor device.
The vacuum conveying piece device can realize a vacuum environment, the operation position of the manipulator is accurate and reliable, the stroke of the manipulator is accurate and adjustable, and the taking and conveying pieces of various semiconductor devices can be realized. In addition, even under the condition that the sensor device is out of order or damaged, still set up hard protect function among the slide rail guider to can stop after guaranteeing that the manipulator dashes the safe distance that the guide arm was reserved, thereby protected other parts, can not cause the loss.
The above description is only for the specific embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention.
Claims (9)
1. A vacuum conveying sheet device is characterized in that,
the method comprises the following steps: a cavity body (1), a slide rail guide device (2), a mechanical arm (3), a steel belt driving mechanism (4), a sensor device (5) and a cavity cover (6),
the mechanical arm is characterized in that the cavity (1) and the cavity cover (6) are connected through a hinge to form an openable closed space, the slide rail guide device (2) is connected with the mechanical arm (3) to enable the mechanical arm (3) to move along the guide direction of the slide rail, the steel belt drive mechanism (4) is connected with the middle part of the mechanical arm (3) to drive the mechanical arm (3) to move, the sensor device (5) is arranged at the position, close to the end, of the side face of the cavity (1), and the stroke, the initial position and the final position of the mechanical arm (3) are accurately controlled.
2. The vacuum transfer pad device of claim 1,
slide rail guider (2) are including fixing base (21), guide arm (22) and slider (23), wherein, fixing base (21) are fixed in the position at four angles in cavity (1) bottom, the both ends of guide arm (22) are fixed respectively on fixing base (21), form two fixed and parallel to each other guide rails, two slider (23) wear the dress with slidable mode on two parallels guide arm (22), manipulator (3) are fixed two on slider (23).
3. The vacuum transfer pad device of claim 1,
the stroke of the manipulator is designed to be smaller than the difference value between the effective length of the guide rod (22) and the length of the sliding block (23), and certain safety distances are reserved at two ends of the guide rod (22) respectively.
4. The vacuum transfer pad device of claim 3,
the initial and final positions of the manipulator are respectively 1-20 mm of safe distance from the two ends of the guide rod (22).
5. The vacuum transfer pad device of claim 1,
steel band actuating mechanism (4) include action wheel (41), steel band (42), connecting block (43), follower (44) and adjust seat (45), action wheel (41) with the motor or the motor of cavity (1) bottom are connected, follower (44) are installed adjust on seat (45), it is fixed in to adjust seat (45) cavity (1) bottom, realize the regulation of follower (44), follower (44) with adopt between action wheel (41) steel band (42) are connected and are transmitted, through adjust seat (45) will steel band (42) take-up realizes the transmission, connecting block (43) with manipulator (3) are connected, and the realization is right the drive of manipulator (3).
6. The vacuum transfer pad device of claim 5,
the stroke of the manipulator is designed to be smaller than the difference between the distance from the connecting block (43) to the two ends of the steel belt (42) and the length of the connecting block (43), and certain safety distances are reserved at the two ends of the steel belt (42) respectively.
7. The vacuum transfer pad device of claim 6,
the safety distance between the two ends of the steel belt (42) is larger than that between the two ends of the guide rod (22).
8. The vacuum transfer pad device of claim 1,
sensor device (5) are including transmitter (51), mount pad (52), clamp plate (53), glass lens (54) and reflector panel (55), clamp plate (53) compress tightly glass lens (54) and fix the side in cavity (1), glass lens (54) with be provided with the sealing washer between cavity (1), transmitter (51) are fixed on mount pad (52), mount pad (52) are fixed with position adjustable mode on cavity (1), reflector panel (55) install with transmitter (51) are relative the opposite side inner wall of cavity (1) is used for the reflection the signal of transmitter (51).
9. The vacuum transfer pad device of claim 1,
when the sensor device (5) works normally, each emitter (51) can emit laser and receive a laser signal returned by the opposite light-emitting plate (55), and if an object blocks light so that the emitters (51) cannot receive the return signal, the sensor device (5) feeds back a stop signal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811635906.5A CN111383971A (en) | 2018-12-29 | 2018-12-29 | Vacuum conveying piece device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811635906.5A CN111383971A (en) | 2018-12-29 | 2018-12-29 | Vacuum conveying piece device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111383971A true CN111383971A (en) | 2020-07-07 |
Family
ID=71218041
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811635906.5A Pending CN111383971A (en) | 2018-12-29 | 2018-12-29 | Vacuum conveying piece device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111383971A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117551985A (en) * | 2022-08-08 | 2024-02-13 | 青岛四方思锐智能技术有限公司 | Wafer conveying device for ALD (atomic layer deposition) film plating equipment |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103424991A (en) * | 2012-05-15 | 2013-12-04 | 上海微电子装备有限公司 | Silicon wafer linear exchange device and method |
| JP2017037910A (en) * | 2015-08-07 | 2017-02-16 | 日東電工株式会社 | Semiconductor wafer transfer method and semiconductor wafer transfer device |
| CN106783703A (en) * | 2015-11-19 | 2017-05-31 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Manipulator and transmission chamber |
| CN107507796A (en) * | 2017-07-30 | 2017-12-22 | 江苏鲁汶仪器有限公司 | A kind of wafer transmission system |
| CN207282471U (en) * | 2017-09-13 | 2018-04-27 | 深圳市矽电半导体设备有限公司 | A kind of expansion crystalline substance ring grass-hopper of wafer detection equipment |
-
2018
- 2018-12-29 CN CN201811635906.5A patent/CN111383971A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103424991A (en) * | 2012-05-15 | 2013-12-04 | 上海微电子装备有限公司 | Silicon wafer linear exchange device and method |
| JP2017037910A (en) * | 2015-08-07 | 2017-02-16 | 日東電工株式会社 | Semiconductor wafer transfer method and semiconductor wafer transfer device |
| CN106783703A (en) * | 2015-11-19 | 2017-05-31 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Manipulator and transmission chamber |
| CN107507796A (en) * | 2017-07-30 | 2017-12-22 | 江苏鲁汶仪器有限公司 | A kind of wafer transmission system |
| CN207282471U (en) * | 2017-09-13 | 2018-04-27 | 深圳市矽电半导体设备有限公司 | A kind of expansion crystalline substance ring grass-hopper of wafer detection equipment |
Non-Patent Citations (1)
| Title |
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| 周正军等, 北京理工大学出版社 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117551985A (en) * | 2022-08-08 | 2024-02-13 | 青岛四方思锐智能技术有限公司 | Wafer conveying device for ALD (atomic layer deposition) film plating equipment |
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Application publication date: 20200707 |
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