CN111381334A - Alignment method for optical path component in optical system - Google Patents

Alignment method for optical path component in optical system Download PDF

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Publication number
CN111381334A
CN111381334A CN201811617565.9A CN201811617565A CN111381334A CN 111381334 A CN111381334 A CN 111381334A CN 201811617565 A CN201811617565 A CN 201811617565A CN 111381334 A CN111381334 A CN 111381334A
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optical
optical path
alignment
path component
component
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CN111381334B (en
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郭永飞
康玉思
谭向全
王忠素
吴清文
张旭升
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/003Alignment of optical elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/62Optical apparatus specially adapted for adjusting optical elements during the assembly of optical systems

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  • Optics & Photonics (AREA)
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Abstract

The invention discloses an alignment method for an optical path component in an optical system, which comprises the following steps: adjusting the front alignment optical system and the rear alignment optical system to be coaxial; adjusting the optical component mounting base to enable the front end face of the optical component mounting base to be perpendicular to the front alignment optical system and the rear end face of the optical component mounting base to be perpendicular to the rear alignment optical system; roughly installing a front optical path component and a rear optical path component on the front end surface and the rear end surface of an optical component installation seat respectively; adjusting the position of the optical path component on the optical component mounting base until the optical path component is aligned with the optical component mounting base; the position of the optical path component on the optical component mounting base is fixed. The alignment method for the optical path component in the optical system can realize the precise alignment of the optical path component.

Description

Alignment method for optical path component in optical system
Technical Field
The invention relates to the technical field of optical systems, in particular to an alignment method for an optical path component in an optical system.
Background
The optical components of the optical system are divided into two parts and mounted on parallel end faces, and in order to achieve good optical performance, precise alignment of the divided two parts of the optical components is required. How to perform precise alignment to meet the alignment precision requirement becomes a difficult problem of ensuring the manufacturing and processing quality of the optical system and optimizing the processing technology.
How to conveniently and efficiently realize the requirement of the alignment precision of the light path component in the optical system becomes a necessary link for the development of the precision manufacturing technology of the optical system.
Disclosure of Invention
The invention aims to overcome the defects in the prior art, and adopts the following technical scheme:
the embodiment of the invention provides an alignment method for an optical path component in an optical system, which aligns the optical path component through an alignment device, wherein the optical path component comprises the following components: a front optical path component and a rear optical path component, the means for aligning comprising:
a base, a front alignment optical system, an optical component mounting base, a rear alignment optical system, and a displacement table;
the front alignment optical system and the rear alignment optical system are respectively arranged on the base and are used for imaging the front light path component and the rear light path component;
the optical component mounting base is provided with the front optical path component and the rear optical path component;
the optical component mounting base is arranged on the displacement table and can move along with the displacement table;
the alignment method includes the steps of:
s1, adjusting the front alignment optical system and the rear alignment optical system to be coaxial;
s2, adjusting the optical component mounting base to make the front end face of the optical component mounting base perpendicular to the front alignment optical system and the rear end face perpendicular to the rear alignment optical system;
s3, roughly mounting the front optical path component and the rear optical path component on the front end surface and the rear end surface of the optical component mounting seat respectively;
s4, adjusting the displacement table to adjust the optical component mounting seat, so that the images of the front optical path component and the rear optical path component are observed by the front alignment optical system and the rear alignment optical system at the same time;
s5, adjusting the positions of the front and rear optical path components on the optical component mounting base by taking the observed imaging superposition condition of the front and rear optical path components as an adjustment basis until the front and rear optical path components reach the alignment requirement;
and S6, fixing the positions of the front optical path component and the rear optical path component on the optical component mounting seat.
In some embodiments, the step S4 of adjusting the displacement stage to adjust the optical component mounting seat so that the images of the front optical path component and the rear optical path component are simultaneously observed by the front alignment optical system and the rear alignment optical system includes:
s41, adjusting the displacement table to move along the left and right direction, so that the front alignment optical system and the rear alignment optical system can simultaneously observe the front optical path component and the rear optical path component to be aligned;
and S42, adjusting the displacement table to move along the front and back direction, so that the front alignment optical system and the back alignment optical system can simultaneously observe clear images of the front optical path component and the back optical path component.
In some embodiments, the front optical path assembly is a plurality of front optical path assemblies, and the front optical path assemblies are arranged on the front end surface of the optical assembly mounting seat in an array form;
the rear light path components are arranged on the rear end face of the optical component mounting seat in an array mode.
In some embodiments, the steps further comprise:
repeating steps S4-S6 until the front and rear optical path components achieve fine alignment.
In some embodiments, the array is rectangular in form.
In some embodiments, the array is circular in form.
In some embodiments, the array is triangular in form.
In some embodiments, the front and rear optical path components are each provided with a stripe pattern thereon.
In some embodiments, the displacement stage comprises: a front horizontal sliding table, a rear horizontal sliding table, an upper vertical lifting table, a lower vertical lifting table and a left displacement table and a right displacement table;
the upper and lower vertical lifting tables are arranged on the front and rear horizontal sliding tables, and the left and right displacement tables are arranged on the upper and lower vertical lifting tables;
the front and rear horizontal sliding tables can move in the front and rear directions;
the upper and lower vertical lifting platforms can move in the up-down direction;
the left and right displacement tables can move in the left and right directions.
In some embodiments, the base includes a first post and a second post, the first post is correspondingly disposed on the front side of the optical component mounting base, and the second post is correspondingly disposed on the rear side of the optical component mounting base.
The invention has the technical effects that: the alignment method for the optical path component in the optical system can be used for aligning the optical path component. The invention discloses an alignment method for a light path component in an optical system, which is characterized in that an optical component mounting seat is placed on a displacement table, and three-dimensional displacement motion is realized under the driving of the displacement table. The front alignment optical system and the rear alignment optical system are respectively arranged on the base and are used for imaging the front light path component and the rear light path component, and the positions of the front light path component and the rear light path component are adjusted by observing the alignment condition of the imaging of the front light path component and the rear light path component until the precise alignment of the front light path component and the rear light path component is realized. The invention simultaneously observes the positions of the front and rear light path components needing precise alignment in the light path, adjusts the front and rear light path components based on the positions, realizes the precise alignment of the front and rear light path components in a single pair, and has the advantages of reliable and convenient alignment.
Drawings
FIG. 1 is a schematic diagram of a structure for an optical path component alignment apparatus in an optical system according to an embodiment of the present invention;
FIG. 2 is a schematic layout of an optical assembly according to one embodiment of the present invention;
FIG. 3 is a flow chart illustrating an alignment method for optical path components in an optical system according to one embodiment of the present invention.
Wherein the reference numerals are specifically:
100. an alignment device for optical path components in an optical system;
1. a base; 11. a first upright 11; 12. a second upright 12;
2. an optical system for front alignment; 3. a front optical path component; 4. an optical component mount;
5. a rear optical path component; 6. an optical system for post alignment; 7. a displacement table.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not to be construed as limiting the invention.
In the description of the embodiments of the present invention, the front-back direction corresponds to the front-back direction in fig. 1, the up-down direction corresponds to the up-down direction in fig. 1, and the left-right direction refers to the direction perpendicular to the paper surface in fig. 1.
Referring to fig. 1 and 2, an optical path component alignment apparatus 100 for use in an optical system according to one embodiment of the present invention is illustrated. The optical path component aligning device used in the optical system is used for aligning the optical path component, and the optical path component comprises: a front optical path component 3 and a rear optical path component 5, the optical path component alignment apparatus for use in an optical system comprising:
a base 1, a front alignment optical system 2, an optical component mounting base 4, a rear alignment optical system 6, and a displacement table 7;
the front alignment optical system 2 and the rear alignment optical system 6 are respectively mounted on the base 1 and used for imaging the front optical path component 3 and the rear optical path component 5;
the optical component mounting seat 4 is provided with the front optical path component 3 and the rear optical path component 5;
the optical component mounting seat 4 is arranged on the displacement table 7 and can move along with the displacement table 7;
by observing the alignment of the images of the front optical path component 3 and the rear optical path component 5 in the front alignment optical system 2 and the rear alignment optical system 6, the front optical path component 3 and the rear optical path component 5 can be aligned by adjusting the positions of the front optical path component 3 and the rear optical path component 5.
In some embodiments, the base 1 includes a first upright 11 and a second upright 12, the first upright 11 is correspondingly disposed on the front side of the optical component mounting base 4, and the second upright 12 is correspondingly disposed on the rear side of the optical component mounting base 4.
In some embodiments, the front optical path component 3 is mounted on a front end surface of the optical component mounting base 4, the rear optical path component 5 is mounted on a rear end surface of the optical component mounting base 4, and the front optical path component 3 and the rear optical path component 5 are coaxially disposed on the optical component mounting base 4.
In some embodiments, the front optical path assembly 3 is plural.
In some embodiments, the front optical path components 3 are mounted in an array on the front face of the optical component mount 4.
Referring to fig. 2, the front optical path components 3 are mounted on the front end surface of the optical component mounting base 4 in an array form, and the array form is rectangular. Likewise, the corresponding rear optical path components 5 are also mounted and arranged on the rear end face of the optical component mounting base 4 in a rectangular array.
In some embodiments, the rear optical path component 5 is plural.
In some embodiments, the rear optical path components 5 are mounted in an array on the rear end face of the optical component mount 4.
In some embodiments, the array form comprises one of a rectangle, a circle, or a triangle. That is to say, the optical path component alignment apparatus for use in an optical system provided by the embodiment of the present invention can perform alignment operation for optical path components in different array forms, and a specific array form may be various array forms that are actually required. Therefore, the optical path component alignment device for the optical system provided by the embodiment of the invention has the advantages of good universality and capability of meeting the requirements of optical path components in different array forms.
In some embodiments, the front and rear optical path components 3, 5 are each provided with a stripe pattern.
In some embodiments, the displacement stage 7 comprises: a front and rear horizontal sliding table, an upper and lower vertical lifting table, and a left and right displacement table 7; the upper and lower vertical lifting platforms are arranged on the front and rear horizontal sliding platforms, and the left and right displacement platforms 7 are arranged on the upper and lower vertical lifting platforms; the front and rear horizontal sliding tables can move in the front and rear directions; the upper and lower vertical lifting platforms can move in the up-down direction; the left and right displacement stages 7 can move in the left and right directions.
In some embodiments, the stage 7 moves up and down in a direction perpendicular to the plane of the page to align the different components of the array sequentially into the alignment optics.
The forward and backward movement of the displacement table 7 is used to achieve the initial alignment of the optical path module 3 and the rear optical path module 5 on the mount 4 with the alignment optical system 2/5.
Referring to FIG. 3, on the other hand, a method for aligning optical path components in an optical system according to one embodiment of the present invention is illustrated. Aligning the optical path component by an alignment device, the optical path component comprising: a front optical path component 3 and a rear optical path component 5, the means for aligning comprising:
a base 1, a front alignment optical system 2, an optical component mounting base 4, a rear alignment optical system 6, and a displacement table 7;
the front alignment optical system 2 and the rear alignment optical system 6 are respectively mounted on the base 1 and used for imaging the front optical path component 3 and the rear optical path component 5;
the optical component mounting seat 4 is provided with the front optical path component 3 and the rear optical path component 5;
the optical component mounting seat 4 is arranged on the displacement table 7 and can move along with the displacement table 7;
the alignment method includes the steps of:
s1, adjusting the front alignment optical system 2 and the rear alignment optical system 6 to be coaxial;
s2, adjusting the optical unit mount 4 so that the front end face is perpendicular to the front alignment optical system 2 and the rear end face is perpendicular to the rear alignment optical system 6;
s3, roughly mounting the front optical path component 3 and the rear optical path component 5 on the front end surface and the rear end surface of the optical component mounting base 4, respectively;
s4, adjusting the displacement table 7 to adjust the optical component mounting base 4 so that the images of the front optical path component 3 and the rear optical path component 5 are simultaneously observed by the front alignment optical system 2 and the rear alignment optical system 6;
s5, adjusting the positions of the front optical path component 3 and the rear optical path component 5 on the optical component mounting base 4 by using the observed coincidence condition of the images of the front optical path component 3 and the rear optical path component 5 as an adjustment basis until the front optical path component 3 and the rear optical path component 5 meet the alignment requirement;
s6, fixing the positions of the front optical path component 3 and the rear optical path component 5 on the optical component mounting base 4.
In some embodiments, the step S4 of adjusting the displacement stage 7 to adjust the optical component mounting seat 4 so that the images of the front optical path component 3 and the rear optical path component 5 are simultaneously observed by the front alignment optical system 2 and the rear alignment optical system 6 includes:
s41, adjusting the displacement table 7 to move along the left and right direction, so that the front alignment optical system 2 and the rear alignment optical system 6 can simultaneously observe the front optical path component 3 and the rear optical path component 5 to be aligned;
and S42, adjusting the displacement table 7 to move along the front-back direction, so that the front alignment optical system 2 and the rear alignment optical system 6 can simultaneously observe clear images of the front optical path component 3 and the rear optical path component 5.
In some embodiments, the front optical path assembly 3 is a plurality of front optical path assemblies 3, and the front optical path assemblies 3 are mounted on the front end surface of the optical assembly mounting seat 4 in an array form;
the number of the rear optical path components 5 is plural, and the rear optical path components 5 are mounted on the rear end surface of the optical component mounting base 4 in an array form.
In some embodiments, the steps further comprise:
repeating steps S4 to S6 until the front optical path component 3 and the rear optical path component 5 achieve fine alignment.
In some embodiments, the array is rectangular in form.
In some embodiments, the array is circular in form.
In some embodiments, the array is triangular in form.
In some embodiments, the front and rear optical path components 3, 5 are each provided with a stripe pattern.
In some embodiments, the displacement stage 7 comprises: a front and rear horizontal sliding table, an upper and lower vertical lifting table, and a left and right displacement table 7;
the upper and lower vertical lifting platforms are arranged on the front and rear horizontal sliding platforms, and the left and right displacement platforms 7 are arranged on the upper and lower vertical lifting platforms;
the front and rear horizontal sliding tables can move in the front and rear directions;
the upper and lower vertical lifting platforms can move in the up-down direction;
the left and right displacement stages 7 can move in the left and right directions.
In some embodiments, the base 1 includes a first upright 11 and a second upright 12, the first upright 11 is correspondingly disposed on the front side of the optical component mounting base 4, and the second upright 12 is correspondingly disposed on the rear side of the optical component mounting base 4.
The invention has the technical effects that: the invention discloses an alignment device and an alignment method for an optical path component in an optical system, which can be used for aligning the optical path component. The invention discloses an alignment device and an alignment method for a light path component in an optical system, which are used for realizing three-dimensional displacement motion under the driving of a displacement table by placing an optical component mounting seat on the displacement table. The front alignment optical system and the rear alignment optical system are respectively arranged on the base and are used for imaging the front light path component and the rear light path component, and the positions of the front light path component and the rear light path component are adjusted by observing the alignment condition of the imaging of the front light path component and the rear light path component until the precise alignment of the front light path component and the rear light path component is realized. The invention simultaneously observes the positions of the front and rear light path components needing precise alignment in the light path, adjusts the front and rear light path components based on the positions, realizes single-pair front and rear light path component precise alignment, realizes the precise alignment of all array optical components through the scanning motion of the displacement table, and has the advantages of reliable and convenient alignment.
The following describes the alignment apparatus 100 for optical path components in an optical system and the alignment method for optical path components in an optical system according to the present invention in detail with reference to specific embodiments.
Example 1:
referring to FIG. 1, there is illustrated an optical path component alignment apparatus 100 for use in an optical system according to one embodiment of the present invention. The apparatus 100 for aligning optical path components in an optical system includes: the device comprises a base 1, a front alignment optical system 2, a front optical path component 3, an optical component mounting seat 4, a rear optical path component 5, a rear alignment optical system 6 and a displacement table 7.
The optical path component to be aligned is divided into a front optical path component 3 and a rear optical path component 5, exists in an array form, and is respectively installed on 2 parallel end faces of the optical component installation seat 4. A striped pattern is present on the front optical path component 3 and the rear optical path component 5 as an alignment observation target. The array form can be various forms such as rectangle, circle, triangle and the like.
The front alignment optical system 2 and the rear alignment optical system 6 are respectively installed on two upright posts of the base 1, 2 are coaxial and are respectively vertical to the front end face and the rear end face of the optical component installation seat 4, the front optical path component 3 and the rear optical path component 5 are imaged, the positions of the front optical path component 3 and the rear optical path component 5 on the optical component installation seat 4 are adjusted by observing the superposition alignment condition of the component images 2 until the alignment requirements are met.
The optical component mounting seat 4 is mounted on the displacement table 7, and the displacement table 7 drives the optical component mounting seat 4 to move so as to realize three-dimensional scanning movement. After completing the alignment of a pair of front and rear optical components, the displacement table 7 performs 2-dimensional scanning motion in the mounting plane of the optical component mounting seat 4, and completes the precise alignment of all the front and rear optical components.
Referring to fig. 3, the specific steps of the alignment method for optical path components in an optical system according to an embodiment of the present invention are as follows:
a. the front alignment optical system 2 and the rear alignment optical system 6 are adjusted to be coaxial;
b. adjusting the optical component mounting base 4 so that the front and rear end faces thereof are respectively kept perpendicular to the front alignment optical system 2 and the rear alignment optical system 6;
c. roughly installing a front optical path component 3 and a rear optical path component 5 on the front end surface and the rear end surface of an optical component installation seat 4;
d. the displacement table 7 moves two-dimensionally along the plane direction of the front and rear end faces of the optical component mounting base 4, so that the front alignment optical system 2 and the rear alignment optical system 6 can simultaneously observe the front optical path component 3 and the rear optical path component 5 to be aligned; the plane direction of the front end face and the back end face of the optical component mounting seat 4 is the left-right direction in the attached drawing 1;
e. the displacement table 7 moves along the normal direction of the front end surface and the rear end surface of the optical component mounting seat 4, so that clear images of the front optical path component 3 and the rear optical path component 5 can be observed by the front alignment optical system 2 and the rear alignment optical system 6 at the same time; the moving direction of the normal direction of the front and rear end faces of the optical component mounting base 4 is the front and rear direction in fig. 1;
f. adjusting the positions of the front light path component 3 and the rear light path component 5 on the optical component mounting seat 4 by taking the observed superposition condition of the images of the front light path component 3 and the rear light path component 5 as an adjustment basis until the front light path component 3 and the rear light path component 5 meet the alignment requirement and are fixed;
g. and d, e and f are repeated, and all the optical assemblies to be aligned are observed and adjusted until all the array optical assemblies are precisely aligned front and back.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the present invention, unless otherwise expressly stated or limited, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through an intermediate. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art within the scope of the present invention.
The above-described embodiments of the present invention should not be construed as limiting the scope of the present invention. Any other corresponding changes and modifications made according to the technical idea of the present invention should be included in the protection scope of the claims of the present invention.

Claims (10)

1. An alignment method for an optical path component in an optical system, the optical path component being aligned by an alignment device, the optical path component comprising: a front optical path component and a rear optical path component, the means for aligning comprising: a base, a front alignment optical system, an optical component mounting base, a rear alignment optical system, and a displacement table;
the front alignment optical system and the rear alignment optical system are respectively arranged on the base and are used for imaging the front light path component and the rear light path component;
the optical component mounting base is provided with the front optical path component and the rear optical path component;
the optical component mounting base is arranged on the displacement table and can move along with the displacement table;
characterized in that the alignment method comprises the steps of:
s1, adjusting the front alignment optical system and the rear alignment optical system to be coaxial;
s2, adjusting the optical component mounting base to make the front end face of the optical component mounting base perpendicular to the front alignment optical system and the rear end face perpendicular to the rear alignment optical system;
s3, roughly mounting the front optical path component and the rear optical path component on the front end surface and the rear end surface of the optical component mounting seat respectively;
s4, adjusting the displacement table to adjust the optical component mounting seat, so that the images of the front optical path component and the rear optical path component are observed by the front alignment optical system and the rear alignment optical system at the same time;
s5, adjusting the positions of the front and rear optical path components on the optical component mounting base by taking the observed imaging superposition condition of the front and rear optical path components as an adjustment basis until the front and rear optical path components reach the alignment requirement;
and S6, fixing the positions of the front optical path component and the rear optical path component on the optical component mounting seat.
2. The alignment method for an optical path component in an optical system according to claim 1, wherein the step S4 of adjusting the displacement stage to adjust the optical component mount so that the images of the front and rear optical path components are simultaneously observed by the front and rear alignment optical systems, specifically comprises:
s41, adjusting the displacement table to move along the left and right direction, so that the front alignment optical system and the rear alignment optical system can simultaneously observe the front optical path component and the rear optical path component to be aligned;
and S42, adjusting the displacement table to move along the front and back direction, so that the front alignment optical system and the back alignment optical system can simultaneously observe clear images of the front optical path component and the back optical path component.
3. The alignment method for optical path components in an optical system according to claim 1, wherein the number of the front optical path components is plural, and the front optical path components are mounted on the front end surface of the optical component mounting base in an array;
the rear light path components are arranged on the rear end face of the optical component mounting seat in an array mode.
4. The alignment method for an optical path component in an optical system according to claim 3, wherein the steps further comprise: repeating steps S4-S6 until the front and rear optical path components achieve fine alignment.
5. The alignment method as claimed in claim 3, wherein the array is rectangular.
6. The alignment method as claimed in claim 3, wherein the array form is a circle.
7. The alignment method as claimed in claim 3, wherein the array form is triangular.
8. The alignment method as claimed in claim 3, wherein the front and rear optical path members are respectively provided with a stripe pattern.
9. The alignment method for an optical path component in an optical system according to claim 1, wherein the displacement stage comprises: a front horizontal sliding table, a rear horizontal sliding table, an upper vertical lifting table, a lower vertical lifting table and a left displacement table and a right displacement table;
the upper and lower vertical lifting tables are arranged on the front and rear horizontal sliding tables, and the left and right displacement tables are arranged on the upper and lower vertical lifting tables;
the front and rear horizontal sliding tables can move in the front and rear directions;
the upper and lower vertical lifting platforms can move in the up-down direction;
the left and right displacement tables can move in the left and right directions.
10. The alignment method as claimed in claim 1, wherein the base comprises a first pillar and a second pillar, the first pillar is correspondingly disposed on a front side of the optical component mounting base, and the second pillar is correspondingly disposed on a rear side of the optical component mounting base.
CN201811617565.9A 2018-12-28 2018-12-28 Alignment method for optical path component in optical system Expired - Fee Related CN111381334B (en)

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