CN111380349A - Microwave drying device for substrate process - Google Patents
Microwave drying device for substrate process Download PDFInfo
- Publication number
- CN111380349A CN111380349A CN201811625051.8A CN201811625051A CN111380349A CN 111380349 A CN111380349 A CN 111380349A CN 201811625051 A CN201811625051 A CN 201811625051A CN 111380349 A CN111380349 A CN 111380349A
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- Prior art keywords
- microwave
- conveying
- substrate
- cavity
- conveying platform
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B15/00—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form
- F26B15/10—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form with movement in a path composed of one or more straight lines, e.g. compound, the movement being in alternate horizontal and vertical directions
- F26B15/12—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form with movement in a path composed of one or more straight lines, e.g. compound, the movement being in alternate horizontal and vertical directions the lines being all horizontal or slightly inclined
- F26B15/122—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form with movement in a path composed of one or more straight lines, e.g. compound, the movement being in alternate horizontal and vertical directions the lines being all horizontal or slightly inclined the objects or batches of material being carried by transversely moving rollers or rods which may rotate
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B25/00—Details of general application not covered by group F26B21/00 or F26B23/00
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B3/00—Drying solid materials or objects by processes involving the application of heat
- F26B3/32—Drying solid materials or objects by processes involving the application of heat by development of heat within the materials or objects to be dried, e.g. by fermentation or other microbiological action
- F26B3/34—Drying solid materials or objects by processes involving the application of heat by development of heat within the materials or objects to be dried, e.g. by fermentation or other microbiological action by using electrical effects
- F26B3/347—Electromagnetic heating, e.g. induction heating or heating using microwave energy
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Microbiology (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Health & Medical Sciences (AREA)
- Biomedical Technology (AREA)
- Biotechnology (AREA)
- Molecular Biology (AREA)
- Drying Of Solid Materials (AREA)
Abstract
The invention discloses a microwave drying device for a substrate process, which comprises a microwave cavity, a conveying platform penetrating through the microwave cavity, at least one microwave generator and at least one exhaust set, wherein the at least one microwave generator and the at least one exhaust set are arranged in the microwave cavity, and a substrate to be dried is conveyed into and moved out of the microwave cavity by the conveying platform. The microwave energy emitted by the microwave generator directly heats water molecules in the liquid on the substrate to heat and evaporate the liquid accumulated in the through holes or blind holes of the substrate without dead angles, and the at least one exhaust set is used for extracting and exhausting the moisture evaporated from the substrate, thereby achieving the purpose of drying the substrate. Moreover, since the microwave only heats the liquid and does not use energy to heat the substrate, the drying efficiency is high, and the electric power and the processing cost of the substrate can be effectively saved.
Description
Technical Field
The present invention relates to a drying apparatus, and more particularly, to a microwave drying apparatus for removing liquid from a substrate during a substrate processing process.
Background
After the substrate is etched with the chemical solution to form the copper foil circuit thereon, the chemical solution on the substrate must be cleaned with a volatile liquid (e.g., isopropyl alcohol) or a non-volatile liquid (e.g., pure water), and the cleaned substrate must be dried for further processing.
One of the drying devices for drying substrates in the prior art is to install a plurality of gas nozzles above a conveying platform for conveying substrates, or to install a plurality of gas nozzles above and below the conveying platform, the gas nozzles are connected to a blower via a pipeline, the substrate to be dried is blown by high-temperature and high-pressure gas provided by the blower, and the high-temperature and high-pressure gas blown from the gas nozzles can directly blow off liquid on the substrate, and the liquid can be further evaporated after being heated.
However, with the rapid development of the electronic industry, besides the functions of various electronic devices becoming more diversified and complicated, the shapes of the electronic devices are also becoming lighter, thinner, shorter and smaller, the substrates in these electronic devices are also becoming smaller and thinner, the circuits on the substrates are becoming finer and finer, and the apertures of the through holes and blind holes for inserting various electronic components on the substrates are becoming smaller and smaller. Thus, the high pressure gas blown from the gas nozzle is difficult to enter the small-diameter through hole and the blind hole to blow off the liquid, and the liquid accumulated in the through hole and the blind hole can cause oxidation and damage of the miniaturized circuit on the substrate. In addition, the air supplied by the blower may be contaminated with dust particles, which also damage the miniaturized circuitry.
Furthermore, in order to maintain the temperature in the drying device of the prior art, the liquid on the substrate can be evaporated due to the temperature rise, the blower must continuously supply high temperature gas, which not only causes the problem of energy consumption, but also keeps the surrounding of the drying device in a high temperature state, resulting in an extremely uncomfortable working environment for the working personnel.
Disclosure of Invention
In view of the problems of the prior art, it is an object of the present invention to provide a microwave drying apparatus for a substrate process, which evaporates liquid on a substrate by microwave heating to remove the liquid on the substrate and dry the substrate.
In order to achieve the above-mentioned creation purpose, the present invention adopts a technical means that a microwave drying apparatus for a substrate process comprises:
the microwave cavity is made of metal materials capable of shielding microwaves, a microwave action cavity is formed inside the microwave cavity, a front opening is formed at the front end of the microwave cavity, and a rear opening is formed at the rear end of the microwave cavity;
a conveying platform which penetrates through the front opening and the rear opening of the microwave cavity and is provided with a conveying direction;
at least one microwave generator, which is arranged in the microwave action cavity of the microwave cavity and can emit microwaves.
The microwave drying device for substrate processing can further comprise at least one exhaust group, wherein the at least one exhaust group is arranged in the microwave action cavity of the microwave cavity, each exhaust group is arranged on one side of the conveying platform and comprises at least one air pumping piece, and each air pumping piece is provided with an air inlet facing the conveying platform.
The at least one air pumping piece of each air exhaust group can comprise a plurality of air pumping pieces which are arranged at intervals along the conveying direction of the conveying platform.
The at least one air pumping member of each air exhaust set can comprise an air pumping member, and the air pumping member extends towards the front end and the rear end of the microwave cavity.
The at least one exhaust set can include two exhaust sets respectively disposed at two opposite sides of the conveying platform.
The at least one microwave generator may include a plurality of microwave emitters spaced apart along or perpendicular to the conveying direction of the conveying platform.
A plurality of conveying wheel shafts can be erected on the conveying platform, the conveying wheel shafts are arranged at intervals along the conveying direction of the conveying platform, and the rotating shaft of each conveying wheel shaft extends perpendicular to the conveying direction of the conveying platform.
The invention can directly heat water molecules in the liquid by using microwaves, so that the liquid accumulated in the through holes or blind holes of the substrate is heated and evaporated without dead angles, thereby achieving the purpose of drying the substrate and simultaneously avoiding the problem that the circuit board is damaged by dust particles when the substrate is dried by wind power. Moreover, because the microwave only heats the liquid, the energy can not be used for heating the substrate, so the drying efficiency is high, the electric power can be effectively saved, the processing cost of the substrate can be saved, and meanwhile, the whole microwave drying device can be maintained at a comfortable temperature acceptable for human bodies.
The invention is described in detail below with reference to the drawings and specific examples, but the invention is not limited thereto.
Drawings
Fig. 1 is a schematic perspective view illustrating a first preferred embodiment of the present invention.
FIG. 2 is a top view of the first preferred embodiment of the present invention.
FIG. 3 is a top view of a second preferred embodiment of the present invention.
Fig. 4 is a schematic end view of a second preferred embodiment of the invention.
Detailed Description
Referring to fig. 1 to 3, the microwave drying apparatus for substrate processing according to the present invention includes a microwave chamber 10, a transfer stage 20, at least one microwave generator 30, 30A, and at least one exhaust set 40, 40A.
The microwave cavity 10 is made of a metal material capable of shielding microwaves, a microwave action cavity is formed inside the microwave cavity 10, a front opening 11 is formed at a front end of the microwave cavity 10, and a rear opening 12 is formed at a rear end of the microwave cavity 10.
The conveying platform 20 penetrates through the front opening 11 and the rear opening 12 of the microwave cavity 10, so that the microwave cavity 10 covers a section of the conveying platform 20, the conveying platform 20 can drive the substrate 50 to be dried to move along a conveying direction 201, the front opening 11 of the microwave cavity 10 is moved into the microwave action cavity, and the dried substrate 50 is moved out of the microwave action cavity from the rear opening 12 of the microwave cavity 10.
Specifically, a plurality of conveying wheel shafts 21 are erected on the conveying platform 20, the conveying wheel shafts 21 are arranged at intervals along a conveying direction 201 in which the conveying platform 20 drives the substrate 50 to move, and a rotating shaft of each conveying wheel shaft 21 extends perpendicular to the conveying direction 201 of the conveying platform 20.
Referring to fig. 4, the at least one microwave generator 30, 30A is disposed in the microwave cavity 10 and is capable of emitting microwaves, so that the microwaves can cause water molecules in the liquid on the substrate 50 to vibrate and rub, thereby increasing the temperature and evaporating, so as to remove the liquid on the substrate 50 and dry the substrate 50.
As shown in fig. 1 and 2, in the first preferred embodiment of the present invention, the at least one microwave generator 30 comprises a plurality of microwave emitters 30, and the microwave emitters 30 are arranged at intervals along the conveying direction 201 of the conveying platform 20.
Referring to fig. 3, in a second preferred embodiment of the present invention, the at least one microwave generator 30A also includes a plurality of microwave emitters 30A, and the microwave emitters 30A are arranged perpendicular to the conveying direction 201 of the conveying platform 20 at intervals.
In one embodiment of the present invention, the microwave generators 30, 30A are mounted above the transfer platform 20 and emit microwaves toward the substrate 50 on the transfer platform 20. Because the microwaves emitted by the microwave generators 30 and 30A are reflected when encountering the microwave cavity 10 made of metal material, and the microwave cavity is filled with microwaves, the liquid on the top surface of the substrate 50 is heated and evaporated by the microwaves, and the liquid on the bottom surface of the substrate 50 is also heated and evaporated by the microwaves. That is, the microwave generators 30 and 30A can dry the entire substrate 50 as long as they can emit microwaves to the microwave action cavity of the microwave cavity 10.
The at least one exhaust set 40, 40A is disposed in the microwave cavity of the microwave cavity 10, each exhaust set 40, 40A is disposed beside the conveying platform 20 and includes at least one exhaust element 41, 41A, the at least one exhaust element 41, 41A is disposed along the conveying direction 201 of the conveying platform 20 and is connected to an exhaust pump (not shown) via a pipeline 42, each exhaust element 41 has an air inlet 411, and the air inlet 411 faces the conveying platform 20 to extract and exhaust moisture evaporated from the substrate 50 on the conveying platform 20.
In the embodiment of the present invention, the at least one exhaust set 40, 40A includes two exhaust sets 40, 40A, and the two exhaust sets 40, 40A are respectively disposed at two opposite sides of the conveying platform 20. Further, as shown in fig. 1 and 2, in the first preferred embodiment of the present invention, the at least one air exhausting device 41 of each air exhausting set 40 includes a plurality of air exhausting devices 41, and the air exhausting devices 41 are arranged at intervals along the conveying direction 201 of the conveying platform 20. As shown in fig. 3, in the second preferred embodiment of the present invention, the at least one air pumping element 41A of each air exhausting set 40A comprises an air pumping element 41A, and the air pumping element 41A extends towards the front end and the rear end of the microwave cavity 10.
The microwave drying device has the advantages that the microwave can directly heat water molecules in the liquid, so that the microwave drying device can heat and evaporate the liquid accumulated in the through holes or blind holes of the substrate 50 without dead angles to achieve the aim of drying the substrate 50, and simultaneously, the problem that the circuit board is damaged by dust particles when the substrate 50 is dried by wind power is avoided. Moreover, since the microwave only heats the liquid, the energy is not used to heat the substrate 50, so the drying efficiency is high, the power can be effectively saved, the processing cost of the substrate 50 can be saved, and the whole microwave drying device can be maintained at a comfortable temperature acceptable for human body.
The above description is only for the preferred embodiment of the present invention and should not be construed as limiting the invention in any way, although the present invention has been disclosed in the preferred embodiment, it is not limited to the above description, but rather, the present invention may be embodied in other forms and embodiments, and any simple modification, equivalent change and modification made by those skilled in the art without departing from the spirit and scope of the present invention will still fall within the technical spirit and scope of the present invention as defined in the appended claims.
Claims (8)
1. A microwave drying device for substrate process is characterized in that the device comprises a microwave cavity, a conveying platform and at least one microwave generator, wherein:
the microwave cavity is made of metal materials capable of shielding microwaves, a microwave action cavity is formed inside the microwave cavity, a front opening is formed at the front end of the microwave cavity, and a rear opening is formed at the rear end of the microwave cavity;
the conveying platform penetrates through the front opening and the rear opening of the microwave cavity and is provided with a conveying direction;
the at least one microwave generator is arranged in the microwave action cavity of the microwave cavity and can emit microwaves.
2. The apparatus of claim 1, further comprising at least one exhaust set disposed in the microwave cavity of the microwave chamber, each exhaust set disposed on a side of the transfer platen and comprising at least one pumping element, each pumping element having an inlet facing the transfer platen.
3. The apparatus of claim 2, wherein the at least one pumping element of each of the plurality of pumping groups comprises a plurality of pumping elements spaced apart along the conveying direction of the conveying platen.
4. The apparatus of claim 2, wherein the at least one pumping element of each of the exhaust sets comprises a pumping element extending toward the front end and the rear end of the microwave cavity.
5. The apparatus of any of claims 2 to 4, wherein the at least one exhaust set comprises two exhaust sets respectively disposed at two opposite sides of the conveying platform.
6. The microwave drying apparatus for substrate processing according to any one of claims 1 to 4, wherein the at least one microwave generator comprises a plurality of microwave emitters spaced apart along the conveying direction of the conveying platform.
7. The apparatus of any of claims 1 to 4, wherein the at least one microwave generator comprises a plurality of microwave emitters spaced apart from each other in a direction perpendicular to the conveying direction of the conveying platform.
8. The apparatus of any one of claims 1 to 4, wherein a plurality of conveying axles are mounted on the conveying platform, the conveying axles are spaced apart along the conveying direction of the conveying platform, and the rotation axis of each conveying axle extends perpendicular to the conveying direction of the conveying platform.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811625051.8A CN111380349A (en) | 2018-12-28 | 2018-12-28 | Microwave drying device for substrate process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811625051.8A CN111380349A (en) | 2018-12-28 | 2018-12-28 | Microwave drying device for substrate process |
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| Publication Number | Publication Date |
|---|---|
| CN111380349A true CN111380349A (en) | 2020-07-07 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811625051.8A Pending CN111380349A (en) | 2018-12-28 | 2018-12-28 | Microwave drying device for substrate process |
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| CN (1) | CN111380349A (en) |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003124285A (en) * | 2001-10-17 | 2003-04-25 | Dainippon Printing Co Ltd | Wet processing equipment and transport method |
| CN101405832A (en) * | 2006-03-13 | 2009-04-08 | Rec斯坎沃佛股份有限公司 | Method for separating wafers from a stack of wafers |
| CN201530618U (en) * | 2009-07-29 | 2010-07-21 | 扬博科技股份有限公司 | Substrate conveyor used in wet process |
| CN102683248A (en) * | 2011-03-14 | 2012-09-19 | 优志旺电机株式会社 | Laser lift-off device |
| CN202613936U (en) * | 2012-03-15 | 2012-12-19 | 刘西叶 | Continuous photovoltaic materials microwave drying device |
| CN204388524U (en) * | 2015-01-16 | 2015-06-10 | 四川联星环保科技有限公司 | For the preparation of the drying plant of RDF derivatived fuel |
| CN104848668A (en) * | 2014-02-17 | 2015-08-19 | 上海雄汉实业有限公司 | Wafer drying system |
| CN205655645U (en) * | 2016-04-27 | 2016-10-19 | 贡享本草（永泰）生物科技有限公司 | Wet controlling means can be taken out to microwave cryodrying wisdom |
| CN207528015U (en) * | 2017-11-27 | 2018-06-22 | 苏州德瑞姆超声科技有限公司 | A kind of silicon chip Quick-air-drying slot |
| CN209541371U (en) * | 2018-12-28 | 2019-10-25 | 扬博科技股份有限公司 | The microwave drier of substrate process |
| CN209541370U (en) * | 2019-01-29 | 2019-10-25 | 昆山众劲机械有限公司 | Oven with heated air circulation device |
-
2018
- 2018-12-28 CN CN201811625051.8A patent/CN111380349A/en active Pending
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003124285A (en) * | 2001-10-17 | 2003-04-25 | Dainippon Printing Co Ltd | Wet processing equipment and transport method |
| CN101405832A (en) * | 2006-03-13 | 2009-04-08 | Rec斯坎沃佛股份有限公司 | Method for separating wafers from a stack of wafers |
| CN201530618U (en) * | 2009-07-29 | 2010-07-21 | 扬博科技股份有限公司 | Substrate conveyor used in wet process |
| CN102683248A (en) * | 2011-03-14 | 2012-09-19 | 优志旺电机株式会社 | Laser lift-off device |
| CN202613936U (en) * | 2012-03-15 | 2012-12-19 | 刘西叶 | Continuous photovoltaic materials microwave drying device |
| CN104848668A (en) * | 2014-02-17 | 2015-08-19 | 上海雄汉实业有限公司 | Wafer drying system |
| CN204388524U (en) * | 2015-01-16 | 2015-06-10 | 四川联星环保科技有限公司 | For the preparation of the drying plant of RDF derivatived fuel |
| CN205655645U (en) * | 2016-04-27 | 2016-10-19 | 贡享本草（永泰）生物科技有限公司 | Wet controlling means can be taken out to microwave cryodrying wisdom |
| CN207528015U (en) * | 2017-11-27 | 2018-06-22 | 苏州德瑞姆超声科技有限公司 | A kind of silicon chip Quick-air-drying slot |
| CN209541371U (en) * | 2018-12-28 | 2019-10-25 | 扬博科技股份有限公司 | The microwave drier of substrate process |
| CN209541370U (en) * | 2019-01-29 | 2019-10-25 | 昆山众劲机械有限公司 | Oven with heated air circulation device |
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Application publication date: 20200707 |
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