CN209541371U - The microwave drier of substrate process - Google Patents
The microwave drier of substrate process Download PDFInfo
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- CN209541371U CN209541371U CN201822234538.5U CN201822234538U CN209541371U CN 209541371 U CN209541371 U CN 209541371U CN 201822234538 U CN201822234538 U CN 201822234538U CN 209541371 U CN209541371 U CN 209541371U
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- microwave
- substrate
- delivery platform
- cavity
- drier
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Abstract
The utility model discloses a kind of microwave drier of substrate process, including a microwave cavity, the delivery platform through the microwave cavity and at least microwave generator being arranged in the microwave cavity and an at least exhaust group, substrate to be dried is sent by means of the delivery platform and removes the microwave cavity.The microwave energy that the microwave generator is issued is heated directly against the hydrone in the liquid on the substrate, the liquid in the perforation or blind hole that are accumulated in the substrate is enabled to heat up and evapotranspire with no dead angle, an at least exhaust group is recycled to extract and be discharged the moisture to evapotranspire from the substrate, to achieve the purpose that the dry substrate.Furthermore because microwave can only heat liquid, energy will not be used to make the substrate to heat up, therefore dry high-efficient, can effectively save electric power, save the processing cost of the substrate.
Description
Technical field
The utility model relates to a kind of drying devices, and espespecially one kind is in substrate processing technology, for removing on substrate
The microwave drier of liquid.
Background technique
Substrate must then utilize volatility after being etched with chemical liquid and showing the route of copper foil thereon
Liquid (such as: isopropanol) or non-volatile liquid (such as: pure water) clean the chemical liquid on substrate, then after cleaning
Substrate is dried, to carry out the processing of next step.
The drying device that substrate is dried of one of prior art, be one to conveying substrate conveying it is flat
Multiple air jet pipes are installed in the top of platform, or install multiple air jet pipes, those jets in the over and under of the delivery platform simultaneously
Pipe carries out the substrate to be dried using high temperature provided by the air blower, high pressure gas via one air blower of piping connection
It blows, and can also be allowed other than it can directly blow down the liquid on the substrate from the high temperature of air jet pipe blowout, high pressure gas
The laggard step evaporation of liquid heating.
However, flourishing with electronic industry, various electronic device is in addition to function more diversification and complication
Outside, external form also all develops towards light, thin, short, small direction, the substrate in those electronic devices also correspondingly towards miniaturization, it is slim
Change evolution, the circuit on the substrate is constantly made fine, for the perforation of various electronic component grafting and the aperture of blind hole on the substrate
Also smaller and smaller.It is blown in this way, should be difficult to enter in the perforation and blind hole of the small-bore from the high pressure gas that air jet pipe is blown out
Except liquid, and the liquid being accumulated in the perforation and blind hole will cause the circuit of the imperceptibility on the substrate to aoxidize, damage.Except this
Except, it is also possible to that grit can be mixed in gas provided by the air blower, which can also cause brokenly the circuit of the imperceptibility
It is bad.
Furthermore the temperature in the drying device in order to maintain the prior art allows the liquid on the substrate can be because of heating
And evaporate, the air blower must constantly supplying high temperature gas, so not only cause the problem of expending energy, also to make the drying
The condition of high temperature is persistently maintained around device, forms the extremely uncomfortable working environment for staff.
Utility model content
In view of the problems of aforementioned prior art, the creation of the utility model is designed to provide a kind of substrate work
The microwave drier of skill, the liquid to be evapotranspired on substrate by microwave heating, to reach the liquid removed on the substrate, make
The purpose of the drying substrates.
In order to reach above-mentioned creation purpose, the technological means that the utility model uses is to enable the microwave of a substrate process dry
Dry device includes:
One microwave cavity, the metal material using energy shield microwaves is made, and the inside of the microwave cavity is formed
One microwave action chamber is formed with an open front at one front end of the microwave cavity, is formed with one at a rear end of the microwave cavity
After-opening；
One delivery platform, open front and after-opening through the microwave cavity, and there is a conveying direction；
An at least microwave generator, the microwave action for being set to the microwave cavity is intracavitary, and can emit microwave.
The microwave drier of aforesaid substrate technique can further comprise an at least exhaust group, and at least one exhaust is mounted on this
The microwave action of microwave cavity is intracavitary, the configuration of each exhaust group the delivery platform a side and include at least one pumping part,
Each pumping part has the air inlet towards the delivery platform.
At least one pumping part of above-mentioned each exhaust group can contain multiple pumping parts, those pumping parts are along the delivery platform
Conveying direction be alternatively arranged setting.
At least one pumping part of above-mentioned each exhaust group can include a pumping part, and the pumping part is towards before the microwave cavity
End is extended with rear end.
An above-mentioned at least exhaust group can include two exhaust groups, which it is two opposite to be positioned respectively at the delivery platform
Side.
An above-mentioned at least microwave generator can contain multiple microwave emitters, those microwave emitters are along the delivery platform
Conveying direction be alternatively arranged setting or the conveying direction of the vertical delivery platform is alternatively arranged setting.
More feeding axles can be set up on above-mentioned delivery platform, those feeding axles are between the conveying direction of the delivery platform
Every being arranged, and the conveying direction of the vertical delivery platform of rotation axis of each feeding axle extends.
By utility model as described above, can be heated using microwave directly against the hydrone in liquid, with nothing
Dead angle the liquid being accumulated in the perforation or blind hole of the substrate is enabled to heat up and evapotranspired, to achieve the purpose that the dry substrate, together
When avoid the problem that using wind-force dry up substrate when have grit destroy circuit board.Furthermore because microwave can only carry out liquid
Energy will not be used to making the substrate to heat up by heating, therefore dry high-efficient, can effectively save electric power, save the substrate plus
Work cost, while the microwave drier can also be allowed integrally to maintain comfort temperature human-acceptable.
The utility model is described in detail below in conjunction with the drawings and specific embodiments, but not as to the utility model
Restriction.
Detailed description of the invention
Fig. 1 is the three-dimensional appearance schematic diagram of the first preferred embodiment of the utility model.
Fig. 2 is the schematic top plan view of the first preferred embodiment of the utility model.
Fig. 3 is the schematic top plan view of the second preferred embodiment of the utility model.
Fig. 4 is the end view schematic of the second preferred embodiment of the utility model.
Specific embodiment
Referring to shown in Fig. 1 to Fig. 3, the microwave drier of the substrate process of the utility model include a microwave cavity 10,
One delivery platform 20, at least a microwave generator 30,30A and at least an exhaust group 40,40A.
The microwave cavity 10 is made using the metal material of maskable microwave, and the inside of the microwave cavity 10 is formed
One microwave action chamber is formed with an open front 11, shape at a rear end of the microwave cavity 10 at one front end of the microwave cavity 10
Cheng Youyi after-opening 12.
Open front 11 and after-opening 12 of the delivery platform 20 through the microwave cavity 10, make the microwave cavity 10 cladding should
One section of delivery platform 20, which can drive a substrate 50 to be dried to move along a conveying direction 201, this is micro-
The open front 11 of wave cavity 10 moves into the microwave action chamber, then the substrate 50 after drying is opened after the microwave cavity 10
Mouth 12 removes the microwave action chamber.
Specifically, being provided with more feeding axles 21 on the delivery platform 20, those feeding axles 21 are flat along the conveying
The conveying direction 201 that platform 20 drives the substrate 50 mobile is alternatively arranged setting, and the rotation axis of each feeding axle 21 vertically should
The conveying direction 201 of delivery platform 20 extends.
Cooperate it is shown in Figure 4, an at least microwave generator 30,30A be set to the microwave cavity 10 microwave action chamber
It is interior, and microwave can be emitted, enable the microwave that the hydrone in the liquid on the substrate 50 is promoted to shake, rub, to heat up and steam
Hair, to achieve the purpose that remove the liquid on the substrate 50, keep the substrate 50 dry.
As shown in Figures 1 and 2, in first preferred embodiment of the utility model, an aforementioned at least microwave generator 30
Multiple microwave emitters 30 are contained, those microwave emitters 30 are alternatively arranged along the conveying direction 201 of the delivery platform 20 and set
It sets.
With further reference to shown in Fig. 3, in second preferred embodiment of the utility model, an aforementioned at least microwave generator
30A also contains multiple microwave emitter 30A, those microwave emitters 30A is vertically between the conveying direction 201 of the delivery platform 20
Every being arranged.
In specific embodiment of the present utility model, those microwave generators 30,30A are to be erected at the delivery platform 20
Top, towards on the delivery platform 20 substrate 50 emit microwave.Wherein, since those microwave generators 30,30A are launched
Microwave can be reflected when encountering the microwave cavity 10 of the metal material, make the microwave action intracavitary full of microwave, therefore in addition to this
Except the effect that the liquid of the top surface of substrate 50 will receive microwave heats up and evaporates, the liquid of the bottom surface of the substrate 50 also can be by
The effect of microwave and heat up and evaporate.That is, as long as the microwave generator 30,30A can be to the microwaves of the microwave cavity 10
Acting chamber transmitting microwave is that can reach the effect for making entire substrate 50 dry.
The microwave action that an at least exhaust group 40,40A are set to the microwave cavity 10 is intracavitary, and each exhaust group 40,40A match
It sets the side in the delivery platform 20 and includes at least one pumping part 41,41A, at least one pumping part 41, the 41A are along the conveying
The conveying direction 201 of platform 20 is arranged, and is connected to an exhaust pump (not shown) via pipeline 42, and each pumping part 41 has one
Air inlet 411, the air inlet 411 are steamed towards the delivery platform 20 with extracting and being discharged from the substrate 50 on the delivery platform 20
Scattered moisture.
In specific embodiment of the present utility model, an aforementioned at least exhaust group 40,40A include two exhaust groups 40,
40A, the two exhausts group 40,40A are arranged respectively at two opposite sides of the delivery platform 20.Furthermore, such as Fig. 1 and Fig. 2
Shown, in first preferred embodiment of the utility model, at least one pumping part 41 of aforementioned each exhaust group 40 contains more
A pumping part 41, those pumping parts 41 are alternatively arranged setting along the conveying direction 201 of the delivery platform 20.As shown in figure 3, at this
In second preferred embodiment of utility model, at least one pumping part 41A of aforementioned each exhaust group 40A includes a pumping part
41A, the pumping part 41A are extended towards the front and rear end of the microwave cavity 10.
The utility model has the advantage of, since microwave can be heated directly against the hydrone in liquid, therefore this reality
It can without dead angle enable the liquid in the perforation for being accumulated in the substrate 50 or blind hole heat up with novel microwave drier and steam
It dissipates, to achieve the purpose that the dry substrate 50, while avoiding having grit destruction circuit board when drying up substrate 50 using wind-force
Problem.Furthermore because microwave can only heat liquid, energy will not be used to that the substrate 50 to be made to heat up, therefore dry effect
Rate is high, can effectively save electric power, save the processing cost of the substrate 50, while the microwave drier being allowed integrally to maintain human body
Acceptable comfort temperature.
The above is only the preferred embodiment of the utility model, not makees limit in any form to the utility model
System, although the utility model has been disclosed with preferred embodiment as above, is not intended to limit the utility model, certainly, this reality
Can also there are other various embodiments, any person skilled in the art, without departing from the utility model technical side with novel
It is made by the above technical examples according to the technical essence of the present invention any simply to repair in the range of case spirit and its essence
Change, equivalent variations and modification, still falls in technical solutions of the utility model and protective scope of the claims.
Claims (8)
1. a kind of microwave drier of substrate process, which is characterized in that it include a microwave cavity, a delivery platform at least
One microwave generator, in which:
The microwave cavity is made using the metal material of energy shield microwaves, and the inside of the microwave cavity forms a microwave and makees
With chamber, it is formed with an open front at a front end of the microwave cavity, is formed with an after-opening at a rear end of the microwave cavity；
The open front and the after-opening of the delivery platform through the microwave cavity, and there is a conveying direction；
The microwave action that an at least microwave generator is set to the microwave cavity is intracavitary, and can emit microwave.
2. the microwave drier of substrate process according to claim 1, which is characterized in that it further comprises at least one
Exhaust group, the microwave action which is mounted on the microwave cavity is intracavitary, and each exhaust group configuration is in the conveying
One side of platform and include at least one pumping part, each pumping part have towards the delivery platform an air inlet.
3. the microwave drier of substrate process according to claim 2, which is characterized in that each exhaust group
At least one pumping part contains multiple pumping parts, which is alternatively arranged setting along the conveying direction of the delivery platform.
4. the microwave drier of substrate process according to claim 2, which is characterized in that each exhaust group
At least one pumping part includes a pumping part, which is extended towards the front end of the microwave cavity and the rear end.
5. the microwave drier of substrate process according to any one of claim 2 to 4, which is characterized in that it is described extremely
A few exhaust group includes two exhaust groups, which is positioned respectively at two opposite sides of the delivery platform.
6. the microwave drier of substrate process according to any one of claim 1 to 4, which is characterized in that it is described extremely
A few microwave generator contains multiple microwave emitters, which arranges along the conveying direction interval of the delivery platform
Column setting.
7. the microwave drier of substrate process according to any one of claim 1 to 4, which is characterized in that it is described extremely
A few microwave generator contains multiple microwave emitters, the conveying direction interval of the vertical delivery platform of the microwave emitter
It is arranged.
8. the microwave drier of substrate process according to any one of claim 1 to 4, which is characterized in that described defeated
It send and sets up more feeding axles on platform, which is alternatively arranged setting along the conveying direction of the delivery platform, and every
The conveying direction of the vertical delivery platform of the rotation axis of one feeding axle extends.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822234538.5U CN209541371U (en) | 2018-12-28 | 2018-12-28 | The microwave drier of substrate process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822234538.5U CN209541371U (en) | 2018-12-28 | 2018-12-28 | The microwave drier of substrate process |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209541371U true CN209541371U (en) | 2019-10-25 |
Family
ID=68267370
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822234538.5U Active CN209541371U (en) | 2018-12-28 | 2018-12-28 | The microwave drier of substrate process |
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| CN (1) | CN209541371U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111380349A (en) * | 2018-12-28 | 2020-07-07 | 扬博科技股份有限公司 | Microwave drying device for substrate process |
| CN111595137A (en) * | 2020-05-20 | 2020-08-28 | 苏州煊凯智能科技有限公司 | Automatic drying equipment for glass cleaning |
-
2018
- 2018-12-28 CN CN201822234538.5U patent/CN209541371U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111380349A (en) * | 2018-12-28 | 2020-07-07 | 扬博科技股份有限公司 | Microwave drying device for substrate process |
| CN111595137A (en) * | 2020-05-20 | 2020-08-28 | 苏州煊凯智能科技有限公司 | Automatic drying equipment for glass cleaning |
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