CN111360637A - Optical element double station processing device - Google Patents
Optical element double station processing device Download PDFInfo
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- CN111360637A CN111360637A CN201811589481.9A CN201811589481A CN111360637A CN 111360637 A CN111360637 A CN 111360637A CN 201811589481 A CN201811589481 A CN 201811589481A CN 111360637 A CN111360637 A CN 111360637A
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- 238000012545 processing Methods 0.000 title claims abstract description 80
- 230000003287 optical effect Effects 0.000 title claims abstract description 62
- 238000005498 polishing Methods 0.000 claims abstract description 56
- 230000007246 mechanism Effects 0.000 claims abstract description 40
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/0031—Machines having several working posts; Feeding and manipulating devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
- B24B47/12—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces by mechanical gearing or electric power
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
- B24B47/16—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces performing a reciprocating movement, e.g. during which the sense of rotation of the working-spindle is reversed
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Abstract
本发明提供一种光学元件双工位加工装置,包括工件承载台以及两个工位加工机构,还包括用于驱使工件承载台绕自身轴线旋转的载台驱动机构,工位加工机构包括可用于对工件承载台上的工件抛光的工位抛光盘、一端与工位抛光盘连接固定的工位摆臂以及可控制工位摆臂旋转的工位驱动组件,工位摆臂的旋转轴线平行于工件承载台的旋转轴线,加工时两个工位抛光盘位于工件承载台上非球面元件的两个工位上。本发明中,可以通过持续转动与定角度往复摆动结合来实现同轴非球面光学元件的加工及局部误差的修正工作,而且通过工件承载台带动被加工非球面光学元件的往复摆动配合两工位抛光盘的小摆幅摆动来实现离轴非球面光学元件的抛光,能够有效保证加工质量。
The invention provides a dual-station processing device for optical components, which includes a workpiece carrying platform and two-station processing mechanisms, as well as a carrier driving mechanism for driving the workpiece bearing platform to rotate around its own axis. A station polishing disc for polishing the workpiece on the workpiece carrying table, a station swing arm whose one end is connected and fixed with the station polishing disc, and a station drive assembly that can control the rotation of the station swing arm. The rotation axis of the station swing arm is parallel to the The rotation axis of the workpiece carrying table, and the two-station polishing discs are located on the two stations of the aspherical element on the workpiece carrying table during processing. In the present invention, the processing of the coaxial aspherical optical element and the correction of local errors can be realized by the combination of continuous rotation and fixed-angle reciprocating oscillation, and the reciprocating oscillation of the aspherical optical element to be processed is driven by the workpiece carrier to cooperate with the two stations. The small swing swing of the polishing disc realizes the polishing of off-axis aspherical optical elements, which can effectively ensure the processing quality.
Description
技术领域technical field
本发明属于光学元件加工,具体涉及一种光学元件双工位加工装置。The invention belongs to optical element processing, in particular to a double-station processing device for optical elements.
背景技术Background technique
非球面光学元件具有光学系统设计灵活、成像质量好、光能损失少、仪器小型化、轻量化、系统更加简洁及在校正像差上具有独特的优点,非球面光学元件的口径越大,其系统的空间观测分辨率越高、集光能力和信噪比越好,达到长焦距和大视场的效果,因此被广泛的应用到大型望远镜、空间相机、军事侦察等各个领域。Aspherical optical elements have the advantages of flexible optical system design, good imaging quality, less light energy loss, miniaturization and light weight of instruments, simpler systems and unique advantages in correcting aberrations. The higher the spatial observation resolution of the system, the better the light-gathering ability and the signal-to-noise ratio, and the effect of long focal length and large field of view. Therefore, it is widely used in various fields such as large telescopes, space cameras, and military reconnaissance.
目前,对于中等口径非球面的加工主要有传统加工技术和现代加工技术,传统加工技术主要是通过传统修带抛光机和高级技师的手工修磨相结合的方法完成非球面光学元件的加工,这种方法对人的依赖性比较大,存在一定的人为不确定性,加工效率低,重复性差;现代加工技术主要是通过高精度计算机数控机床完成对各种非球面光学元件的加工,但是也存在着设备复杂、成本高、效率低等问题;针对光学系统快速集成的要求,利用以往加工技术加工非球面光学元件时,由于采用单模式加工,很难有效抑制大的非球面度梯度带来的中频误差,影响非球面光学元件的质量,从而严重影响相机的成像质量;另外,采用单模式加工加工周期长,效率较低,无法满足研制计划要求。At present, the processing of medium-caliber aspheric surfaces mainly includes traditional processing technology and modern processing technology. The traditional processing technology mainly completes the processing of aspheric optical components through the combination of traditional tape polishing machine and manual grinding by senior technicians. This method is relatively dependent on people, there are certain artificial uncertainties, low processing efficiency and poor repeatability; modern processing technology mainly completes the processing of various aspherical optical components through high-precision computer numerical control machine tools, but there are also Due to the complex equipment, high cost, low efficiency and other problems; for the requirements of rapid integration of optical systems, when using the previous processing technology to process aspheric optical components, it is difficult to effectively suppress the large asphericity gradient due to single-mode processing. The intermediate frequency error affects the quality of the aspherical optical components, thus seriously affecting the imaging quality of the camera; in addition, the single-mode processing has a long processing cycle and low efficiency, which cannot meet the requirements of the development plan.
发明内容SUMMARY OF THE INVENTION
本发明实施例涉及一种光学元件双工位加工装置,至少可解决现有技术的部分缺陷。The embodiments of the present invention relate to a dual-station processing device for optical elements, which can at least solve some of the defects of the prior art.
本发明实施例涉及一种光学元件双工位加工装置,包括工件承载台以及两个工位加工机构,还包括用于驱使所述工件承载台绕自身轴线旋转的载台驱动机构,所述工位加工机构包括可用于对所述工件承载台上的工件抛光的工位抛光盘、一端与工位抛光盘连接固定的工位摆臂以及可控制所述工位摆臂旋转的工位驱动组件,所述工位摆臂的旋转轴线平行于所述工件承载台的旋转轴线,加工时两个所述工位抛光盘位于所述工件承载台上非球面元件的两个工位上。The embodiment of the present invention relates to a dual-station processing device for optical components, which includes a workpiece carrier and two-station processing mechanisms, and also includes a carrier drive mechanism for driving the workpiece carrier to rotate around its own axis. The position processing mechanism includes a station polishing disc that can be used to polish the workpiece on the workpiece carrier, a station swing arm whose one end is connected and fixed with the station polishing plate, and a station drive assembly that can control the rotation of the station swing arm , the rotation axis of the station swing arm is parallel to the rotation axis of the workpiece carrier, and the two station polishing discs are located on the two stations of the aspherical element on the workpiece carrier during processing.
作为实施例之一,所述工位摆臂水平设置且位于所述工件承载台的上方。As an embodiment, the work station swing arm is horizontally arranged and located above the workpiece carrier.
作为实施例之一,所述工位加工机构还包括由所述工位驱动组件驱使绕自身轴线旋转的工位摆轴,所述工位摆轴竖直设置,所述工位摆臂远离所述工位抛光盘的一端安设于所述工位摆轴上。As one of the embodiments, the station processing mechanism further includes a station swing shaft driven by the station drive assembly to rotate around its own axis, the station swing shaft is vertically arranged, and the station swing arm is far away from the One end of the station polishing disc is installed on the station pendulum shaft.
作为实施例之一,所述工位加工机构还包括可随所述工位摆轴同步旋转的调压器,且所述调压器与所述工位摆轴同轴设置,所述调压器包括可沿竖直方向移动的支撑杆,所述工位摆臂安设于所述支撑杆的顶端。As one of the embodiments, the station processing mechanism further includes a voltage regulator that can rotate synchronously with the station pendulum shaft, and the voltage regulator and the station pendulum shaft are coaxially arranged, and the pressure regulator The device includes a support rod that can move in a vertical direction, and the work station swing arm is installed on the top end of the support rod.
作为实施例之一,所述工位驱动组件包括工位驱动电机,所述工位驱动电机通过曲柄摇杆机构与所述工位摆轴传动连接。As one embodiment, the station drive assembly includes a station drive motor, and the station drive motor is drive-connected to the station swing shaft through a crank-rocker mechanism.
作为实施例之一,所述曲柄摇杆机构包括与所述工位摆轴键连接的工位摇杆以及与所述工位摇杆通过连杆传动且由所述工位驱动电机驱使旋转的工位曲柄盘,所述连杆一端与所述工位摇杆铰接,另一端与所述工位曲柄盘的T型槽连接,且所述连杆与所述工位曲柄盘的连接处偏离所述工位曲柄盘的回转中心。As one of the embodiments, the crank-rocker mechanism includes a work-station rocker connected with the work-station pendulum shaft key, and a work-station rocker that is driven by a connecting rod and driven to rotate by the work-station drive motor. The station crank plate, one end of the connecting rod is hinged with the station rocker, the other end is connected with the T-shaped groove of the station crank plate, and the connection between the connecting rod and the station crank plate deviates The center of rotation of the crank disc of the station.
作为实施例之一,所述工位曲柄盘与所述连杆之间的连接处与所述工位曲柄盘的旋转轴线之间的距离为曲柄,所述曲柄的最大尺寸小于连杆长度、工位摇杆长度、所述工位曲柄盘的旋转轴线与所述工位摆轴的旋转轴线之间的距离。As one of the embodiments, the distance between the connection between the station crank disk and the connecting rod and the rotation axis of the station crank disk is the crank, and the maximum dimension of the crank is smaller than the length of the connecting rod, The length of the station rocker, the distance between the rotation axis of the station crank plate and the rotation axis of the station swing shaft.
作为实施例之一,所述曲柄摇杆机构的传动角度不小于50度。As one of the embodiments, the transmission angle of the crank-rocker mechanism is not less than 50 degrees.
作为实施例之一,所述载台驱动机构包括载台驱动电机,所述工件承载台通过主轴支撑,且所述主轴位于所述工件承载台的旋转轴线上,所述载台驱动电机与所述主轴之间通过皮带传动连接。As an embodiment, the stage driving mechanism includes a stage driving motor, the workpiece carrying stage is supported by a main shaft, and the main shaft is located on the rotation axis of the workpiece carrying stage, and the stage driving motor is connected to the workpiece carrying stage. The main shafts are connected by a belt drive.
作为实施例之一,所述工位抛光盘与所述工位摆臂的端部之间通过顶针连接,所述顶针位于所述工位抛光盘的正上方。As one embodiment, the station polishing disc and the end of the station swing arm are connected by a thimble, and the thimble is located just above the station polishing disc.
本发明实施例至少具有如下有益效果:The embodiments of the present invention have at least the following beneficial effects:
本发明提供的加工装置中,工件承载台对应两个工位加工机构,当将光学元件安设于工件承载台上时,可以通过两个工位加工机构的两个工位抛光盘同时光学元件进行修磨加工,具体是工件承载台可以绕自身轴线持续转动,而工位摆臂可以控制工位抛光盘往复摆动,即本发明提供的加工装置可以通过持续转动与定角度往复摆动结合来实现同轴非球面光学元件的加工及局部误差的修正工作,而且通过工件承载台带动被加工非球面光学元件的往复摆动配合两工位抛光盘的小摆幅摆动来实现离轴非球面光学元件的抛光;本发明加工装置的设计解决了传统方法修正局部误差的困难,及离轴非球面光学元件加工时无法旋转、摆动等的问题,应用两个具有极坐标系的加工工具以不同的运动模式和路径在工件的不同的工位并行工作,这种不同运动模式的抛光盘的双工位加工,有效的提高了非球面光学元件的加工效率、精度,达到光学加工的快速响应,全频段质量控制的特点;结构简单,经济实用,采用双工位多模式组合加工技术可以有效的控制光学元件的全频段误差质量,提高非球面光学元件的质量。In the processing device provided by the present invention, the workpiece carrying table corresponds to the two-station processing mechanism, and when the optical element is installed on the workpiece carrying table, the two-station polishing discs of the two-station processing mechanism can simultaneously use the optical element To carry out the grinding process, specifically, the workpiece carrier can continuously rotate around its own axis, and the station swing arm can control the reciprocating swing of the station polishing plate, that is, the processing device provided by the present invention can be realized by the combination of continuous rotation and fixed-angle reciprocating swing. The processing of coaxial aspheric optical elements and the correction of local errors, and the reciprocating swing of the processed aspheric optical elements is driven by the workpiece carrier to cooperate with the small swing swing of the two-station polishing disc to realize the off-axis aspheric optical elements. Polishing; the design of the processing device of the present invention solves the difficulty of correcting local errors in the traditional method, and the problems that the off-axis aspherical optical element cannot be rotated and oscillated during processing, and two processing tools with polar coordinate systems are used in different motion modes. Work in parallel with the path in different stations of the workpiece. This dual-station processing of polishing discs with different motion modes effectively improves the processing efficiency and precision of aspheric optical components, and achieves fast response in optical processing and full-band quality. Control characteristics: simple structure, economical and practical, the use of dual-station multi-mode combined processing technology can effectively control the full-frequency error quality of optical components and improve the quality of aspheric optical components.
附图说明Description of drawings
为了更清楚地说明本发明实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其它的附图。In order to explain the embodiments of the present invention or the technical solutions in the prior art more clearly, the following briefly introduces the accompanying drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only These are some embodiments of the present invention, and for those of ordinary skill in the art, other drawings can also be obtained from these drawings without creative effort.
图1为本发明实施例提供的光学元件双工位加工装置的结构示意图;1 is a schematic structural diagram of an optical element dual-station processing device provided in an embodiment of the present invention;
图2为图1的光学元件双工位加工装置的加工示意图。FIG. 2 is a schematic view of processing of the optical element double-station processing apparatus of FIG. 1 .
具体实施方式Detailed ways
下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其它实施例,都属于本发明保护的范围。The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.
如图1以及图2,本发明实施例提供一种光学元件双工位加工装置,可以实现对光学元件3表面的修磨加工,包括工件承载台1以及两个工位加工机构2,光学元件3安设于工件承载台1上,可以通过两个工位加工机构2对光学元件3同时进行加工,加工装置还包括载台驱动机构4,其能够驱使工件承载台1绕自身轴线旋转,具体地,每一工位加工机构2包括工位抛光盘5、工位摆臂6以及工位驱动组件7,工位抛光盘5为工位加工机构2的工作部件,工位加工机构2主要是通过工位抛光盘5对工件承载台1上的光学元件3进行加工,而工位驱动组件7则为工位加工机构2的驱动部件,而工位摆臂6为工位抛光盘5与工位驱动组件7之间的传动部件,工位摆臂6一端与工位抛光盘5连接固定,具体是在工位摆臂6的该端设置有顶针11,工位抛光盘5安设于该顶针11上,且工位抛光盘5位于对应顶针11的正下方,工位驱动组件7能够控制工位摆臂6旋转,进而由工位摆臂6带动对应的工位抛光盘5同步旋转,工位摆臂6的旋转轴线平行于工件承载台1的旋转轴线,具体是两个旋转轴线均为竖直方向,在加工时,两个工位抛光盘5均位于工件承载台1的非球面元件表面,且位于光学元件3的两个不同工位上,表明两个工位抛光盘5的加工路径不同,进而可以提高加工装置的加工效率。在本发明中,工件承载台1对应两个工位加工机构2,当将光学元件3安设于工件承载台1上时,可以通过两个工位加工机构2的两个工位抛光盘5同时光学元件3进行修磨加工,具体是工件承载台1可以绕自身轴线持续转动,而工位摆臂6可以控制工位抛光盘5往复摆动,光学元件3一般为非球面光学元件3,包括同轴非球面光学元件3以及离轴非球面光学元件3,即本发明提供的加工装置可以通过持续转动与定角度往复摆动结合来实现同轴非球面光学元件3的加工及局部误差的修正工作,而且通过工件承载台1带动被加工非球面光学元件3的往复摆动配合两工位抛光盘5的小摆幅摆动来实现离轴非球面光学元件3的抛光;本发明加工装置的设计解决了传统方法修正局部误差的困难,及离轴非球面光学元件3加工时无法旋转、摆动等的问题,应用两个具有极坐标系的加工工具以不同的运动模式和路径在工件的不同的工位并行工作,这种不同运动模式的工位抛光盘5的双工位加工,有效的提高了非球面光学元件3的加工效率、精度,达到光学加工的快速响应,全频段质量控制的特点;另外整体结构简单,经济实用,采用双工位多模式组合加工技术可以有效的控制光学元件3的全频段误差质量,提高非球面光学元件3的质量,而这里所谓的多模式包括:只有工件承载台1旋转,两个工位抛光盘5均不往复摆动;工件承载台1旋转,同时两个工位抛光盘5或者其中一个工位抛光盘5往复摆动;工件承载台1不旋转,两个工位抛光盘5或者其中一个工位抛光盘5往复摆动。对于这几种工作模式可以根据光学元件3的需求来选定,具体是控制载台驱动机构4与两个工位驱动组件7工作即可,非常方便。As shown in FIG. 1 and FIG. 2 , an embodiment of the present invention provides a dual-station processing device for optical elements, which can realize the grinding process of the surface of the
参见图1,在优选方案中,两个工位摆臂6均水平设置且均位于工件承载台1的上方,由于工位摆臂6与工位抛光盘5之间采用顶针11连接,在工位抛光盘5对光学元件3表面进行修磨时,工位抛光盘5需要对光学元件3产生抛光压力,当工位摆臂6水平设置时,则只需控制工位摆臂6竖直方向移动,进而可以达到控制抛光压力的作用。针对抛光压力的调节,工位加工机构2还包括工位摆轴8,工位摆轴8竖直设置,在工位驱动组件7的驱使下其可以绕自身轴线旋转,工位摆臂6安设于该工位摆轴8上,通过工位摆轴8带动工位摆臂6旋转,工位摆轴8安装在两个轴承座内,下面轴承采用圆锥辊子轴承,上部采用深沟球轴承,以保证摆动精度。在工位摆轴8上设置有调压器9,该调压器9可以随工位摆轴8同步旋转,且其在工位摆轴8的旋转轴线上,调压器9包括可沿竖直方向移动的支撑杆10,工位摆臂6安设于支撑杆10的顶端,由此可以通过控制支撑杆10竖直向下移动时,支撑杆10带动工位摆臂6与顶针11同步下移,而顶针11则可以对工位抛光盘5产生向下的作用力,进而达到增加抛光压力的目的,相反在支撑杆10上移时,可以减小工位抛光盘5对光学元件3的抛光压力,当然在调节抛光压力时,支撑杆10的竖直方向位移比较小,调压器9可以采用类似于液压结构,支撑杆10为液压结构的活塞杆。一般来说,在工位摆轴8的顶端设置有安装座,支撑杆10伸出安装座,且在安装座上设置有限位支撑结构12,具体可为一竖直设置的限位环,限位环的孔径大于工位摆臂6的外径,工位摆臂6的一端通过顶针11与工位抛光盘5连接,另一端支撑于该限位支撑结构12上,支撑杆10位于限位支撑结构12与顶针11之间,工位摆臂6只能在限位环内进行移动。Referring to FIG. 1 , in the preferred solution, the two
继续优化工位加工机构2的结构,工位驱动组件7包括工位驱动电机13,工位驱动电机13通过曲柄摇杆机构14与工位摆轴8传动连接,通过曲柄摇杆机构14可以实现对工位摆臂6的往复摆动。具体地,曲柄摇杆机构14包括工位摇杆15以及工位曲柄盘16,其中工位摇杆15的其中一端套设于工位摆轴8的外表面且两者之间为键连接,工位摇杆15带动工位摆轴8同步转动,而工位摇杆15的另一端与连杆17之间为铰接,可以为球铰,连杆17水平设置,其另一端具有部分结构伸入工位曲柄盘16的T型槽内且通过T型螺栓连接固定,T型螺栓可在T型槽内滑动,工位曲柄盘16也为水平设置,其在工位驱动电机13的驱使下绕自身轴线旋转,旋转轴线也为竖直方向,且连杆17与工位曲柄盘16的连接处偏离工位曲柄盘16的旋转轴线,则当工位曲柄盘16旋转时,则可以带动连杆17绕旋转轴线旋转,由于连杆17与工位摇杆15铰接,且工位摇杆15与工位摆轴8连接固定,则连杆17控制工位摇杆15与工位摆轴8绕工位摆轴8的旋转轴线往复摆动。连接处与工位曲柄盘16的旋转轴线之间的距离为曲柄,工位摆臂6所需的最大摆角、曲柄摇杆机构14中的曲柄存在的条件、最小传动角γmin以及行程速度变化系数K设计曲柄摇杆机构14各构件的具体尺寸,包括曲柄d的最大长度dmax,连杆17长度,工位摇杆15的长度,工位曲柄盘16的旋转轴线与工位摆轴8的旋转轴线之间的距离,具体要求为:曲柄摇杆机构14的最小传动角γmin≥50°;曲柄摇杆机构14的行程速度变化系数K≈1;曲柄d的最大长度dmax为以上四个尺寸中最小值。根据曲柄d的最大长度dmax的大小确定工位曲柄盘16直径的大小,各构件均采用45#钢,且连杆17与工位摇杆15理论尺寸加工精度≤0.05mm,通过T形槽和铰接与连杆17连接能够自由回转,T型螺栓可以在T型槽内自由滑动以调整曲柄d的长短。至于工位曲柄盘16与工位驱动电机13之间还应通过减速器18连接,在这里减速器18可以采用蜗轮蜗杆减速器,可以改变工位驱动电机13的传动方向,另外工位驱动电机13可以采用三相异步电动机。Continue to optimize the structure of the
进一步地,载台驱动机构4包括载台驱动电机19以及主轴20,其中主轴20竖直设置位于工件承载台1的旋转轴线上,且工件承载台1安设于主轴20的顶端,载台驱动电机19驱使主轴20旋转,进而由主轴20带动工件承载台1同步旋转。主轴20与工件承载台1之间为莫氏锥度3#过渡接头连接,便于拆装。工件承载台1采用45#钢,工件承载台1的台面上开有通过中心的相互垂直的两条T形槽,通过T形槽螺栓和顶块来固紧被加工光学元件3,工件承载台1具体尺寸根据加工装置所加工的最大工件尺寸而定。载台驱动电机19与主轴20之间通过皮带24传动,具体是主轴20的底部设置有从动轮21,载台驱动电机19通过减速器22与主动轮23传动连接,而主动轮23与从动轮21之间通过皮带24传动,其中这里的减速器22也采用蜗轮蜗杆减速器。Further, the
以上所述仅为本发明的较佳实施例而已,并不用以限制本发明,凡在本发明的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the scope of the present invention. within the scope of protection.
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