CN205302012U - Accurate five dimension revolving stages - Google Patents

Accurate five dimension revolving stages Download PDF

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Publication number
CN205302012U
CN205302012U CN201521049770.1U CN201521049770U CN205302012U CN 205302012 U CN205302012 U CN 205302012U CN 201521049770 U CN201521049770 U CN 201521049770U CN 205302012 U CN205302012 U CN 205302012U
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China
Prior art keywords
bearing
mounting disc
hole
orientation
translating rails
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Withdrawn - After Issue
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CN201521049770.1U
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Chinese (zh)
Inventor
康晓鹏
杜水生
李华
付兴
司敬芝
王鹏
刘军鹏
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XiAn Institute of Optics and Precision Mechanics of CAS
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XiAn Institute of Optics and Precision Mechanics of CAS
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Priority to CN201521049770.1U priority Critical patent/CN205302012U/en
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Publication of CN205302012U publication Critical patent/CN205302012U/en
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Abstract

The utility model belongs to the technical field of mechanical equipment is used to the precision optics, a accurate five dimension revolving stages is disclosed, including vertical axis, translation subassembly and every single move subassembly, vertical axis includes refractor, leveling support base, torque motors, bearing cover, first objective table, box and setting position fixed axle, thrust ball bearing, azimuthal rotation axle, an angular contact ball bearing, the bearing distance ring in the box, the bottom half is equipped with the through -hole, and box and refractor are all fixed on the base is supported in the leveling, the refractor is located the through -hole of bottom half, the lateral wall of box is equipped with two through -holes, and these two through -holes are relative, and the the central axis of these two through -holes passes the refractor, the utility model relates to a revolving stage is used to multi freedom optics, and the operation is stable, and structural configuration is reasonable, compact, and joint strength rigidity is high, has fine anufacturability.

Description

A kind of accurate five dimension turntables
Technical field
This utility model belongs to precision optics application mechanical equipment technical field, relates to a kind of accurate five dimension turntables, can be applicable to precision optics application plant equipment or other similar plant equipment.
Background technology
Precise rotating platform is test inertance element and carries out the important non-standard equipment of physical simulation experiment, and it is applied in optical field and is mainly in photoelectricity bonding apparatus and Experiments of Optics and optical instrument optical component is controlled the conventional debugging apparatus regulated. In usual use procedure, optical element is fixed on the platen of optical rotating stage, realizes the tracking of optical component parameter is regulated by the rotation of optical rotary table, translation, pitching.
The precision of turntable vertical shaft series, and the adjustable degree of freedom direct relation of turntable working range optical articles quality and debugging progress.
Current turntable vertical shaft series drives location mainly to have 3 kinds of schemes, and (1) adopts motor, decelerator and gear drive (or worm-drive) common drive shaft system to rotate location; (2) motor, decelerator and frictional wheel drive is adopted to drive axle system to rotate location; (3) torque motor is adopted directly to drive axle system to rotate location. 1st kind scheme not only structure is complicated, volume is big, and multi-stage speed-reducing and transmission exist gap, and servo rigidity is low; Though the 2nd kind of scheme simple in construction, volume is relatively big, and there is the easily shortcoming such as abrasion and skidding; 3rd kind of scheme adopts torque motor directly to drive axle system to position, and relies solely on torque motor and directly drives, and positioning precision is not high, for the turntable that volume and quality are big, it is servo-controlled realize highly difficult.
Due to the particularity of optical rotating stage, as long as turntable is required do not have high accuracy by it, to its traveling comfort, registration degree has higher requirement.
Utility model content
For the above particular/special requirement to optical rotating stage, the purpose of this utility model is in that to overcome the deficiencies in the prior art, it is provided that a kind of precision is high, and stable precision five ties up turntable, for a kind of multiple degrees of freedom optical application turntable.
For solving above technical problem, this utility model provides techniques below scheme:
A kind of accurate five dimension turntables, including vertical shaft series, translation assembly and tilting component; It is characterized in that
Orientation fixing axle, thrust ball bearing, orientation rotation axle, the first angular contact ball bearing, the bearing distance collar that described vertical shaft series includes refracting telescope, leveling supports base, torque motor, bearing gland, the first object stage, casing and is arranged in casing;
Described box bottom is provided with through hole, casing and refracting telescope and is each attached on leveling support base; Refracting telescope is positioned at the through hole of box bottom; The sidewall of casing is provided with two through holes, and the two through hole is relative, the central axis described refracting telescope of traverse of the two through hole;
In a tubular form, the fixing axle in orientation is arranged on box bottom to the fixing axle in described orientation, and the central axis of axle and the central axes of box bottom through hole are fixed in orientation; Described orientation rotation axle in a tubular form, is socketed on the fixing axle in orientation; Described first angular contact ball bearing is a pair, the back-to-back orientation that is installed on of this diagonal angle contact ball bearing is fixed between axle and orientation rotation axle, between the pair of angular contact ball bearing, inside and outside circle is supported by bearing distance collar respectively, and the inside and outside footpath of angular contact ball bearing located above in this diagonal angle contact ball bearing is compressed by bearing gland and connects; Bearing gland is connected by screw is fixing with the fixing axle of orientation rotation axle and/or orientation;
Described thrust ball bearing is single direction thrust ball bearing, is socketed on orientation rotation axle; Thrust ball bearing includes Huan Hexia footpath, footpath ring, and the external diameter of lower footpath ring is more than the external diameter of upper footpath ring, and lower footpath ring contacts with box bottom;
Described torque motor is loaded between orientation rotation axle and casing, and torque motor is used for driving orientation rotation axle to rotate; Described first object stage level is fixed on orientation rotation axle, and the center of the first object stage is provided with through hole, the central axes of the central axis of this through hole and box bottom through hole.
Above-mentioned translation assembly includes the first translating rails mounting disc and the second translating rails mounting disc;
First translating rails mounting disc and the second translating rails mounting disc are sequentially arranged on the first object stage from bottom to top, first translating rails mounting disc and the second translating rails mounting disc are equipped with through hole, the central axis of the two through hole all with the central axes of box bottom through hole;
Described second translating rails mounting disc can be slided in the first translating rails mounting disc, and the route of slip is cross.
Tilting component includes pitch axis, transition frame, the second object stage, bearing block and the second bearing being fixed on bearing block;
Transition frame and the second object stage are installed in the second translating rails mounting disc from bottom to top successively, transition frame and be equipped with through hole on the second object stage, the central axis of the two through hole all with the central axes of box bottom through hole;
Described pitch axis has 4, and 4 pitch axis are evenly distributed in the circumferential direction in transition frame, and pitch axis includes vertical section and traversing section; Vertical section is connected with transition frame, described second bearing holder (housing, cover) is connected on traversing section, and described bearing block has 4, in these 4 bearing blocks, two relative bearing blocks are fixed on the upper surface of the second translating rails mounting disc, and two additionally relative bearing blocks are fixed on the lower surface of the second object stage; The route that the cross of two bearing block lines compositions two groups relative and the second translating rails mounting disc are slided in the first translating rails mounting disc overlaps.
Above-mentioned accurate five dimension turntables also include trimming assembly,
Trimming assembly includes the first gear, the second gear, bearing housing, worm gear, worm screw, excentric sleeve, worm shaft and drive motor;
Described first gear, the second gear, bearing housing and worm gear are respectively positioned in described casing; First gear and the engagement of the second gear, the first gear is connected by screw and orientation rotation axle are fixing, and the second gear and worm gear are each attached on bearing housing, are provided with location bearing in bearing housing, and bearing housing is fixed on cabinet wall;
Described drive motor is positioned at outside described casing, drive motor output shaft is fixing with one end of worm shaft to be connected, the other end of worm shaft is connected with worm screw, described excentric sleeve is socketed in the interlude of worm shaft, excentric sleeve is provided with adpting flange, and adpting flange is fixedly installed in cabinet exterior by screw; Being realized the engagement of worm gear and worm screw by eccentric adjusting sleeve and separated, when worm gear is with worm engaging, drive motor drives worm screw to rotate, worm screw rotarily drives worm gear and rotates, and then driving the second gear to rotate, second gear driven the first gear rotates, and then drives orientation rotation axle to rotate.
Above-mentioned tilting component also includes threaded rod, adjusting nut, the first pitch regulation ball pivot and the second pitch regulation ball pivot, transition frame is provided with 4 through holes being uniformly distributed along the circumference, through hole is near described bearing block, and described threaded rod has 4, each threaded rod one through hole of traverse; Described adjusting nut is arranged on the two ends up and down of threaded rod;
Being equipped with groove in the transition frame at the upper and lower two ends of through hole, be respectively symmetrically loading the first pitch regulation ball pivot and the second pitch regulation ball pivot in two grooves, the concave surface of the first pitch regulation ball pivot and the convex surface of the second pitch regulation ball pivot coordinate assembling;
The bearing block being fixed on the second translating rails mounting disc upper surface is clutch shaft bearing seat, and the bearing block being fixed on the second object stage lower surface is the second bearing block;
Threaded rod near clutch shaft bearing seat is fixed on the lower surface of the second object stage, and the threaded rod near the second bearing block is fixed on the upper surface of the second translating rails mounting disc.
Above-mentioned first translating rails mounting disc is fixed on the first object stage, first translating rails mounting disc upper surface is provided with the first track, first track is cross, first track is centrally located at the center of the first translating rails mounting disc, second translating rails mounting disc lower surface is provided with the second track, second track is cross, second track is centrally located at the center of the second translating rails mounting disc, first track and the second track are connected by rolling guide slide block, and the end of the first track and the second track is provided with positioning and locking device.
Above-mentioned second bearing is the second angular contact ball bearing, bar heart ball bearing or ball bearing; Described orientation is fixed axle, orientation rotation axle, the first object stage, transition frame and/or the second object stage and is provided with lightening hole.
Being equipped with seam boss on the fixing axle in above-mentioned orientation and orientation rotation axle, in the pair of angular contact ball bearing, the inside and outside footpath of the angular contact ball bearing being positioned at bottom is supported by the seam boss of the fixing axle in orientation and orientation rotation axle vertically respectively.
Above-mentioned cabinet wall is provided with the first boss flange, and orientation rotation axle outer wall is provided with the second boss flange, and torque motor includes fixed ring and rotating ring, and described fixed ring is connected by screw is fixing with the first boss flange, and rotating ring and the second boss flange connect by screw is fixing.
Above-mentioned thrust ball bearing is socketed in bottom orientation rotation axle.
This utility model has following technical effect that
1, this utility model precision is high, stable, can be used for multiple degrees of freedom optical application;
2, moment machine type of drive has that reliable, moment of torsion is big, vibrate advantage little, compact conformation, high-accuracy optical basic demand can be met, coordinate big speed ratio micro-adjusting mechanism can realize the heavy duty of turntable vertical shaft series, low speed, high accuracy control, control accuracy��1 ';
3, monoblock type casting technique makes important feature part in rigidity, when strength similarity, reduce structural member size to greatest extent, orientation is fixed axle, orientation rotation axle, the first object stage, transition frame and/or the second object stage and is provided with lightening hole, therefore of the present utility model lightweight, reduce cost, save material;
4, this utility model topology layout is reasonable, compact, and bonding strength rigidity is high, has good anufacturability.
Accompanying drawing explanation
Fig. 1 is profile front view;
Fig. 2 is sectional plan view;
Fig. 3 is top view;
Fig. 4 is A-A sectional view;
Fig. 5 is B-B sectional view (i.e. the structural representation of trimming assembly);
Fig. 6 is pitching and locking principle orientation diagram;
Fig. 7 is translation and locking principle orientation diagram;
Fig. 8 three-dimensional is axis side view;
Fig. 9 is three dimensional sectional view;
Piece number in figure: 1-refracting telescope, 2-leveling supports base, 3-casing, 4-side is fixing axle, 5-thrust ball bearing, 6-orientation rotation axle, 7-the first angular contact ball bearing, 8-bearing distance collar, 10-torque motor, 11-bearing gland, 13-the first object stage, 14-the first translating rails mounting disc, 15-track, 16-the second translating rails mounting disc, 17-bearing block, 18-the second bearing, 19-pitch axis, 20-transition frame, 21-the second object stage, 22-threaded rod, 23-adjusting nut, 24-the first pitch regulation ball pivot, 25-the second pitch regulation ball pivot, 26-the first gear, 27-the second gear, 28-bearing housing, 29-worm gear, 30-worm screw, 31-excentric sleeve, 32-adpting flange, 33-worm shaft, 34-drive motor.
Detailed description of the invention
Such as Fig. 1 to Fig. 9, this utility model provides a kind of accurate five dimension turntables, including vertical shaft series, translation assembly, tilting component and trimming assembly; Orientation fixing axle 4, thrust ball bearing 5, orientation rotation axle the 6, first angular contact ball bearing 7, the bearing distance collar 8 that vertical shaft series includes refracting telescope 1, leveling supports base 2, torque motor 10, bearing gland the 11, first object stage 13, casing 3 and is arranged in casing;
Described box bottom is provided with through hole, casing and refracting telescope and is each attached on leveling support base; Refracting telescope is positioned at the through hole of box bottom; The sidewall of casing is provided with two through holes, and the two through hole is relative, the central axis described refracting telescope of traverse of the two through hole;
In a tubular form, the fixing axle in orientation is arranged on box bottom to the fixing axle in described orientation, and the central axis of axle and the central axes of box bottom through hole are fixed in orientation; Orientation rotation axle is in a tubular form, it is socketed on the fixing axle in orientation, first angular contact ball bearing is a pair, the back-to-back orientation that is installed on of this diagonal angle contact ball bearing is fixed between axle and orientation rotation axle, the fixing axle in the internal diameter of this diagonal angle contact ball bearing and orientation is connected, external diameter is connected with orientation rotation axle, and between this diagonal angle contact ball bearing, inside and outside circle is supported connection by bearing distance collar respectively; Being equipped with seam boss on the fixing axle in orientation and orientation rotation axle, in pair of horns contact ball bearing of the present utility model, the inside and outside footpath of the angular contact ball bearing being positioned at bottom is supported connection by the seam boss of the fixing axle in orientation and orientation rotation axle vertically respectively; In this diagonal angle contact ball bearing, the inside and outside footpath of angular contact ball bearing located above is compressed by bearing gland; Bearing gland is connected by screw is fixing with the fixing axle of orientation rotation axle and/or orientation;
Thrust ball bearing is single direction thrust ball bearing, is socketed on orientation rotation axle; Thrust ball bearing includes Huan Hexia footpath, footpath ring, and the external diameter of lower footpath ring is more than the external diameter of upper footpath ring, and lower footpath ring contacts with box bottom;
Torque motor is loaded between orientation rotation axle and casing, and torque motor is used for driving orientation rotation axle to rotate; First object stage level is fixed on orientation rotation axle, and the center of the first object stage is provided with through hole, the central axes of the central axis of this through hole and box bottom through hole.
Translation assembly includes the first translating rails mounting disc 14 and the second translating rails mounting disc 16; First translating rails mounting disc and the second translating rails mounting disc are sequentially arranged on the first object stage from bottom to top, first translating rails mounting disc and the second translating rails mounting disc are equipped with through hole, the central axis of the two through hole all with the central axes of box bottom through hole;
Second translating rails mounting disc is positioned at above the first translating rails mounting disc, and the second translating rails mounting disc can be slided in the first translating rails mounting disc, and the route of slip is cross.
Tilting component includes transition frame the 20, second object stage 21, bearing block 17 and the second bearing 18 being fixed on bearing block;
Described pitch axis has 4, and 4 pitch axis are evenly distributed in the circumferential direction in transition frame, and pitch axis includes vertical section and traversing section; Vertical section is connected with transition frame, described second bearing holder (housing, cover) is connected on traversing section, and described bearing block has 4, in these 4 bearing blocks, two relative bearing blocks are fixed on the upper surface of the second translating rails mounting disc, and two additionally relative bearing blocks are fixed on the lower surface of the second object stage; The route that the cross of two bearing block lines compositions two groups relative and the second translating rails mounting disc are slided in the first translating rails mounting disc overlaps.
This utility model also includes trimming assembly, and trimming assembly includes first gear the 26, second gear 27, bearing housing 28, worm gear 29, worm screw 30, excentric sleeve 31, worm shaft 33 and drive motor 34;
First gear, the second gear, bearing housing and worm gear are respectively positioned in casing; First gear and the engagement of the second gear, the first gear is connected by screw and orientation rotation axle are fixing, and the second gear and worm gear are each attached on bearing housing, are provided with location bearing in bearing housing, and bearing housing is fixed on cabinet wall;
Drive motor is positioned at outside described casing, drive motor output shaft is fixing with one end of worm shaft to be connected, the other end of worm shaft is connected with worm screw, excentric sleeve is socketed in the interlude of worm shaft, by eccentric adjustment axle sleeve offset in the horizontal direction, realize adjusting the distance between worm and wormwheel, i.e. the use of fine adjustment function and disabling; Excentric sleeve is provided with adpting flange, and adpting flange is fixedly installed in cabinet exterior by screw; Realize the engagement of worm gear and worm screw by eccentric adjusting sleeve and separate, when worm gear is with worm engaging, drive motor drives worm screw to rotate, worm screw rotarily drives worm gear and rotates, and then drive the second gear to rotate, second gear driven the first gear rotates, and then drives orientation rotation axle to rotate, it is achieved that rotation of the present utility model.
Tilting component also includes threaded rod 22, adjusting nut the 23, first pitch regulation ball pivot 24 and the second pitch regulation ball pivot 25, transition frame is provided with 4 through holes being uniformly distributed along the circumference, through hole is near described bearing block, and described threaded rod has 4, each threaded rod one through hole of traverse;Described adjusting nut is arranged on the two ends up and down of threaded rod;
Being equipped with groove in the transition frame at the upper and lower two ends of through hole, be respectively symmetrically loading the first pitch regulation ball pivot and the second pitch regulation ball pivot in two grooves, the concave surface of the first pitch regulation ball pivot and the convex surface of the second pitch regulation ball pivot coordinate assembling;
The bearing block being fixed on the second translating rails mounting disc upper surface is clutch shaft bearing seat, and the bearing block being fixed on the second object stage lower surface is the second bearing block;
Threaded rod near clutch shaft bearing seat is fixed on the lower surface of the second object stage, and the threaded rod near the second bearing block is fixed on the upper surface of the second translating rails mounting disc. The pitch regulation of the second object stage is realized by adjusting nut position.
Described first translating rails mounting disc is fixed on the first object stage, first translating rails mounting disc upper surface is provided with the first track, first track is cross, first track is centrally located at the center of the first translating rails mounting disc, second translating rails mounting disc lower surface is provided with the second track, second track is cross, second track is centrally located at the center of the second translating rails mounting disc, first track and the second track are connected by rolling guide slide block, and the end of the first track and the second track is provided with positioning and locking device.
Second bearing can adopt angular contact ball bearing, bar heart ball bearing or ball bearing; Orientation is fixed axle, orientation rotation axle, the first object stage, transition frame and/or the second object stage and is provided with lightening hole.
Described cabinet wall is provided with the first boss flange, and orientation rotation axle outer wall is provided with the second boss flange, and torque motor includes fixed ring and rotating ring, and described fixed ring is connected by screw is fixing with the first boss flange, and rotating ring and the second boss flange connect by screw is fixing.

Claims (10)

1. precision five ties up a turntable, including vertical shaft series, translation assembly and tilting component; It is characterized in that:
Orientation fixing axle, thrust ball bearing, orientation rotation axle, the first angular contact ball bearing, the bearing distance collar that described vertical shaft series includes refracting telescope, leveling supports base, torque motor, bearing gland, the first object stage, casing and is arranged in casing;
Described box bottom is provided with through hole, casing and refracting telescope and is each attached on leveling support base; Refracting telescope is positioned at the through hole of box bottom; The sidewall of casing is provided with two through holes, and the two through hole is relative, the central axis described refracting telescope of traverse of the two through hole;
In a tubular form, the fixing axle in orientation is arranged on box bottom to the fixing axle in described orientation, and the central axis of axle and the central axes of box bottom through hole are fixed in orientation;
Orientation rotation axle in a tubular form, is socketed on the fixing axle in orientation; Described first angular contact ball bearing is a pair, the back-to-back orientation that is installed on of this diagonal angle contact ball bearing is fixed between axle and orientation rotation axle, between the pair of angular contact ball bearing, inside and outside circle is supported by bearing distance collar respectively, and the inside and outside footpath of angular contact ball bearing located above in this diagonal angle contact ball bearing is compressed by bearing gland and connects; Bearing gland is connected by screw is fixing with the fixing axle of orientation rotation axle and/or orientation;
Described thrust ball bearing is single direction thrust ball bearing, is socketed on orientation rotation axle, and including Huan Hexia footpath, upper footpath ring, the external diameter of lower footpath ring is more than the external diameter of upper footpath ring, and lower footpath ring contacts with box bottom;
Described torque motor is loaded between orientation rotation axle and casing, and torque motor is used for driving orientation rotation axle to rotate; Described first object stage level is fixed on orientation rotation axle, and the center of the first object stage is provided with through hole, the central axes of the central axis of this through hole and box bottom through hole.
2. accurate five dimension turntables according to claim 1, it is characterised in that: described translation assembly includes the first translating rails mounting disc and the second translating rails mounting disc;
First translating rails mounting disc and the second translating rails mounting disc are sequentially arranged on the first object stage from bottom to top, first translating rails mounting disc and the second translating rails mounting disc are equipped with through hole, the central axis of the two through hole all with the central axes of box bottom through hole;
Described second translating rails mounting disc can be slided in the first translating rails mounting disc, and the route of slip is cross.
3. accurate five dimension turntables according to claim 2, it is characterised in that: tilting component includes pitch axis, transition frame, the second object stage, bearing block and the second bearing being fixed on bearing block;
Transition frame and the second object stage are installed in the second translating rails mounting disc from bottom to top successively, transition frame and be equipped with through hole on the second object stage, the central axis of the two through hole all with the central axes of box bottom through hole;
Described pitch axis has 4, and 4 pitch axis are evenly distributed in the circumferential direction in transition frame, and pitch axis includes vertical section and traversing section; Vertical section is connected with transition frame, described second bearing holder (housing, cover) is connected on traversing section, and described bearing block has 4, in these 4 bearing blocks, two relative bearing blocks are fixed on the upper surface of the second translating rails mounting disc, and two additionally relative bearing blocks are fixed on the lower surface of the second object stage; The route that the cross of two bearing block lines compositions two groups relative and the second translating rails mounting disc are slided in the first translating rails mounting disc overlaps.
4. accurate five dimension turntables according to claim 3, it is characterised in that: described accurate five dimension turntables also include trimming assembly,
Trimming assembly includes the first gear, the second gear, bearing housing, worm gear, worm screw, excentric sleeve, worm shaft and drive motor;
Described first gear, the second gear, bearing housing and worm gear are respectively positioned in described casing; First gear and the engagement of the second gear, the first gear is connected by screw and orientation rotation axle are fixing, and the second gear and worm gear are each attached on bearing housing, are provided with location bearing in bearing housing, and bearing housing is fixed on cabinet wall;
Described drive motor is positioned at outside described casing, drive motor output shaft is fixing with one end of worm shaft to be connected, the other end of worm shaft is connected with worm screw, described excentric sleeve is socketed in the interlude of worm shaft, excentric sleeve is provided with adpting flange, and adpting flange is fixedly installed in cabinet exterior by screw; Being realized the engagement of worm gear and worm screw by eccentric adjusting sleeve and separated, when worm gear is with worm engaging, drive motor drives worm screw to rotate, worm screw rotarily drives worm gear and rotates, and then driving the second gear to rotate, second gear driven the first gear rotates, and then drives orientation rotation axle to rotate.
5. accurate five dimension turntables according to claim 4, it is characterized in that: described tilting component also includes threaded rod, adjusting nut, the first pitch regulation ball pivot and the second pitch regulation ball pivot, transition frame is provided with 4 through holes being uniformly distributed along the circumference, through hole is near described bearing block, described threaded rod has 4, each threaded rod one through hole of traverse; Described adjusting nut is arranged on the two ends up and down of threaded rod;
Being equipped with groove in the transition frame at the upper and lower two ends of through hole, be respectively symmetrically loading the first pitch regulation ball pivot and the second pitch regulation ball pivot in two grooves, the concave surface of the first pitch regulation ball pivot and the convex surface of the second pitch regulation ball pivot coordinate assembling;
The bearing block being fixed on the second translating rails mounting disc upper surface is clutch shaft bearing seat, and the bearing block being fixed on the second object stage lower surface is the second bearing block;
Threaded rod near clutch shaft bearing seat is fixed on the lower surface of the second object stage, and the threaded rod near the second bearing block is fixed on the upper surface of the second translating rails mounting disc.
6. accurate five dimension turntables according to claim 5, it is characterized in that: described first translating rails mounting disc is fixed on the first object stage, first translating rails mounting disc upper surface is provided with the first track, first track is cross, first track is centrally located at the center of the first translating rails mounting disc, second translating rails mounting disc lower surface is provided with the second track, second track is cross, second track is centrally located at the center of the second translating rails mounting disc, first track and the second track are connected by rolling guide slide block, the end of the first track and the second track is provided with positioning and locking device.
7. accurate five dimension turntables according to claim 6, it is characterised in that: described second bearing is the second angular contact ball bearing, bar heart ball bearing or ball bearing; Described orientation is fixed axle, orientation rotation axle, the first object stage, transition frame and/or the second object stage and is provided with lightening hole.
8. tie up turntable according to the arbitrary described precision five of claim 1 to 7, it is characterized in that: the fixing axle in orientation and orientation rotation axle are equipped with seam boss, in the pair of angular contact ball bearing, the inside and outside footpath of the angular contact ball bearing being positioned at bottom is supported by the seam boss of the fixing axle in orientation and orientation rotation axle vertically respectively.
9. accurate five dimension turntables according to claim 8, it is characterized in that: described cabinet wall is provided with the first boss flange, orientation rotation axle outer wall is provided with the second boss flange, torque motor includes fixed ring and rotating ring, described fixed ring is connected by screw is fixing with the first boss flange, and rotating ring and the second boss flange connect by screw is fixing.
10. accurate five dimension turntables according to claim 9, it is characterised in that: described thrust ball bearing is socketed in bottom orientation rotation axle.
CN201521049770.1U 2015-12-15 2015-12-15 Accurate five dimension revolving stages Withdrawn - After Issue CN205302012U (en)

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Application Number Priority Date Filing Date Title
CN201521049770.1U CN205302012U (en) 2015-12-15 2015-12-15 Accurate five dimension revolving stages

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Application Number Priority Date Filing Date Title
CN201521049770.1U CN205302012U (en) 2015-12-15 2015-12-15 Accurate five dimension revolving stages

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Publication Number Publication Date
CN205302012U true CN205302012U (en) 2016-06-08

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105425824A (en) * 2015-12-15 2016-03-23 中国科学院西安光学精密机械研究所 Precision five-dimensional turntable
CN108152852A (en) * 2017-12-12 2018-06-12 中国计量科学研究院 A kind of adjustable monocrystalline monochromator
CN109282118A (en) * 2018-11-09 2019-01-29 中国科学院长春光学精密机械与物理研究所 Precise rotating platform shafting
CN109987256A (en) * 2017-12-31 2019-07-09 沈阳恒为机器人科技有限公司 A kind of two-dimensional rotation mechanism
CN107676594B (en) * 2017-10-23 2024-01-30 中国科学院苏州生物医学工程技术研究所 Precise turntable for X-ray CT detection equipment

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105425824A (en) * 2015-12-15 2016-03-23 中国科学院西安光学精密机械研究所 Precision five-dimensional turntable
CN105425824B (en) * 2015-12-15 2017-12-05 中国科学院西安光学精密机械研究所 A kind of precision five ties up turntable
CN107676594B (en) * 2017-10-23 2024-01-30 中国科学院苏州生物医学工程技术研究所 Precise turntable for X-ray CT detection equipment
CN108152852A (en) * 2017-12-12 2018-06-12 中国计量科学研究院 A kind of adjustable monocrystalline monochromator
CN109987256A (en) * 2017-12-31 2019-07-09 沈阳恒为机器人科技有限公司 A kind of two-dimensional rotation mechanism
CN109987256B (en) * 2017-12-31 2024-01-16 沈阳恒为机器人科技有限公司 Two-dimensional rotating mechanism
CN109282118A (en) * 2018-11-09 2019-01-29 中国科学院长春光学精密机械与物理研究所 Precise rotating platform shafting
CN109282118B (en) * 2018-11-09 2020-04-10 中国科学院长春光学精密机械与物理研究所 Precision rotary table shaft system

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