CN111302299B - Welding sealing system and welding sealing process - Google Patents
Welding sealing system and welding sealing process Download PDFInfo
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- CN111302299B CN111302299B CN202010105701.7A CN202010105701A CN111302299B CN 111302299 B CN111302299 B CN 111302299B CN 202010105701 A CN202010105701 A CN 202010105701A CN 111302299 B CN111302299 B CN 111302299B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00261—Processes for packaging MEMS devices
- B81C1/00277—Processes for packaging MEMS devices for maintaining a controlled atmosphere inside of the cavity containing the MEMS
- B81C1/00285—Processes for packaging MEMS devices for maintaining a controlled atmosphere inside of the cavity containing the MEMS using materials for controlling the level of pressure, contaminants or moisture inside of the package, e.g. getters
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
Abstract
The invention discloses a welding sealing system which comprises a gas filling module, a baking module, a welding module and a conveying module, wherein the moisture content of the inside of a device is less than 100PPM, the air pressure of the inside of a packaging body can be controlled, the precision is within +/-500 Pa, the purity of backfill process gas is ensured to be higher than 99.5%, and the welding sealing system is suitable for sealing requirements of military special processes such as energy storage welding sealing and the like. The four modules of the welding sealing system can independently operate and can also cooperatively work, so that the degree of automation is high, and the requirements of mass production can be met. The invention discloses a welding sealing process, which can realize energy storage welding sealing of low-vapor and high-purity process gas by applying the welding sealing system.
Description
Technical Field
The invention relates to the technical field of welding packaging, in particular to a welding sealing system and a welding sealing process.
Background
At present, the electronic components are widely applied to different fields such as communication, medical treatment, information storage, national defense and military. In order to meet different application scenes, new requirements are put forward on the quality and reliability of electronic components. In failure modes of electronic components, a high proportion of device failures due to internal moisture content exceeding standards are accounted for. According to the method of GJB597A-96 "semiconductor Integrated Circuit Total Specification" and GJB5548A-96 "microelectronic device Experimental method and procedure", the following are defined: the internal moisture content of the microelectronic device must not exceed 5000 x 10 -6 . Water vapor content 5000 x 10 -6 The corresponding dew point temperature was-2 ℃. If the content of water vapor in the packaged electronic component is high, when the electronic component works or is stored under the condition that the temperature is lower than the dew point temperature, the water vapor can condense on the inner surface of the device to cause drift of electrical parameters, and when serious, corrosion failure of metal parts in the device can be caused, so that the conditions of frequency drift, poor contact of a relay, performance degradation and even loss of functions of the electronic device are caused. Thus (2)The sensitivity, service life and reliability of the device are directly affected by the moisture content in the packaged electronic components. For certain high precision devices (e.g., MEMS sensors, etc.), or for application scenarios requiring higher sealing devices (e.g., military equipment devices), more stringent internal moisture constraints are required.
At present, the packaging of electronic components is generally to introduce inert process gas into a glove box, and hermetically package a to-be-sealed piece in a parallel sealing welding, energy storage welding and other modes under the protection of the process gas atmosphere. However, in the existing packaging process, the water vapor in the welding system and the water vapor adsorbed on the surface of the component to be sealed are difficult to effectively remove, and the component to be sealed is easy to secondarily adsorb the water vapor in the process of transferring in the welding system, so that the high water vapor content remains in the electronic component after sealing, and the performance, the service life and the application in the tip field of the electronic component are affected.
Disclosure of Invention
Therefore, the technical problem to be solved by the invention is to overcome the defect of high content of residual water vapor in the electronic components after welding and sealing in the prior art, so as to provide a welding and sealing system capable of effectively reducing the water vapor in the sealed components and improving the purity of process gas in the sealed components.
Therefore, the invention provides the following technical scheme:
in a first aspect, the present invention provides a weld sealing system comprising:
the gas filling module comprises a gas supply unit for supplying process gas and a condensing unit connected with the gas supply unit, wherein the condensing unit is used for adsorbing impurity gas in the process gas;
the baking module comprises a pretreatment unit, a baking unit connected with the pretreatment unit and a first air extraction unit respectively connected with the pretreatment unit and the baking unit; the pretreatment unit is provided with a pretreatment chamber for receiving the to-be-sealed piece, the baking unit is used for baking the to-be-sealed piece output by the pretreatment chamber, and the baking unit and the pretreatment unit are respectively connected with the condensing unit through a process gas pipeline;
the welding module comprises a welding unit for welding the to-be-sealed piece, a discharging unit connected with the to-be-sealed piece and a second air extraction unit connected with the welding unit; the welding unit receives the sealing piece to be sealed output by the baking unit, and the discharging unit receives the sealing piece output by the welding unit; the welding unit is connected with the condensing unit through a process gas pipeline;
The conveying module comprises a first conveying mechanism positioned between the pretreatment unit and the baking mechanism, a second conveying mechanism positioned between the baking mechanism and the welding mechanism, and a third conveying mechanism positioned between the welding mechanism and the discharging mechanism; the first, second and third transfer mechanisms have transfer valves that switch adjacent two units between communicating and closing.
Alternatively, the welded sealing system described above,
the baking unit comprises a first operation chamber for receiving the to-be-sealed piece and a heater arranged outside the first operation chamber; the first operation chamber is communicated with the condensing unit and the first air pumping unit;
a second operation chamber for placing the to-be-sealed piece is arranged in the welding unit, and the second operation chamber is communicated with the condensing unit and the second air extraction unit; a pressure controller is arranged on a process gas pipeline of the second operation chamber communicated with the condensing unit;
preferably, the first operation chamber is a quartz vacuum chamber, and the second operation chamber is a welding vacuum chamber.
Further alternatively, in the welding sealing system, a pressure detecting member is disposed outside the pretreatment chamber, a pressure detecting member is disposed outside the first operation chamber, and a dew point detecting member is disposed outside the second operation chamber;
Preferably, the pressure detecting member is a vacuum gauge, and the dew point detecting member is a dew point gauge.
Optionally, in the welding sealing system, the condensation unit includes a first tank for providing a condensation medium and a second tank for receiving the condensation medium in the first tank, the first tank is connected with an air supply mechanism, a gas inlet of the second tank is communicated with the air supply unit, and a gas outlet of the second tank is communicated with the pretreatment unit, the baking unit and the welding unit;
preferably, the first tank body is a liquid nitrogen Dewar, and the second tank body is a liquid nitrogen cold trap.
Further alternatively, the welded sealing system described above,
a pressure regulating member is arranged on a process gas pipeline communicated with the gas inlet;
the process gas pipeline communicated with the gas outlet comprises at least one first connecting section connected with the second tank body and at least three second connecting sections respectively connected with the welding unit, the baking unit and the pretreatment unit.
Further alternatively, the welded sealing system described above,
the first connecting section is sequentially provided with a dew point detection part and a pressure regulating part along the direction away from the condensing unit; each second connecting section is provided with a control valve for controlling the second connecting end to be opened or closed;
Preferably, the dew point detecting member is a dew point meter, the pressure adjusting member is a pressure regulating valve, and the control valve is a block valve.
Optionally, in the welding sealing system, the air filling module further includes an air supply unit connected to the first tank, and a third air extraction unit connected to the second tank;
the air supply unit comprises an air blowing pump communicated with the first tank body through an air supply pipeline;
the third air extraction unit comprises a fourth air extraction pump communicated with the second tank body through an air extraction pipeline;
preferably, the fourth air pump is a dry pump.
Alternatively, the welded sealing system described above,
the first air extraction unit comprises a first air extraction pump which is communicated with the baking unit through an air extraction pipeline, and a second air extraction pump which is respectively communicated with the baking unit and the pretreatment unit through an air extraction pipeline, wherein the first air extraction pump and the second air extraction pump are mutually communicated through an air extraction pipeline;
the second air extraction unit comprises a third air extraction pump communicated with the baking unit through an air extraction pipeline;
preferably, the first air pump is a cold pump, the second air pump is a dry pump, and the third air pump is a mechanical pump;
Preferably, a control valve for controlling the opening or closing of the air extraction pipeline is arranged on the air extraction pipeline.
Optionally, the welding sealing system further comprises a control module connected with the gas filling module, the baking module, the welding module and the conveying module.
In a second aspect, the present invention provides a solder sealing process comprising the steps of:
s1, carrying out gas desorption and baking treatment on a piece to be sealed in a first reaction area, wherein the baking treatment is carried out in a vacuum environment;
s2, introducing process gas into the first reaction zone to break vacuum, and then transferring the baked piece to be sealed to a second reaction zone under the protection of the process gas; wherein the process gas is purified gas from which impurity gas is removed;
and S3, vacuumizing the second reaction zone, filling the process gas into the second reaction zone, repeatedly vacuumizing and filling the process gas for 2-4 times, backfilling the process gas with required pressure, and welding the to-be-sealed piece in the second reaction zone.
Optionally, in the above welding and sealing process, in step S1, gas during the baking process is pumped out of the first reaction area, so that the baking process is performed in a vacuum environment.
Optionally, in the welding and sealing process, the vacuum degree of the first reaction area is1x10 －5 －1x10 －6 pa, wherein the temperature of the baking treatment is 140-200 ℃, and the time of the baking treatment is 8-16 hours.
Optionally, the welding sealing process described above applies the welding sealing system described above.
The technical scheme of the invention has the following advantages:
1. the invention provides a welding sealing system which comprises a gas filling module, a baking module, a welding module and a conveying module. The gas filling module comprises a gas supply unit for supplying process gas and a condensing unit connected with the gas supply unit, wherein the process gas passes through the condensing unit, and the water vapor and other impurity gases are adsorbed and removed. The process gas for welding is purified by the gas filling module, and the process gas with high purity and low vapor is provided for the baking module and the welding module. The baking module comprises a pretreatment unit and a baking unit connected with the pretreatment unit, when the sealing piece is subjected to welding sealing, the sealing piece firstly enters the inner cavity of the pretreatment unit, and the first air extraction unit connected with the pretreatment unit carries out degassing pretreatment on the sealing piece by extracting the air in the inner cavity of the pretreatment unit. The sealing member to be sealed after the degassing pretreatment enters a baking unit under the conveying of a first conveying mechanism. The baking unit is communicated with the first air extraction unit, and can form a vacuum environment in the baking unit, so that the to-be-sealed piece is baked under the vacuum condition, and a long-time high-temperature and high-vacuum gas desorption environment is provided for the to-be-sealed piece, thereby realizing the efficient desorption of the water vapor adsorbed on the surface of the to-be-sealed piece. In addition, through setting up the preprocessing unit, impurity gas such as steam from external environment is cut off after waiting that the sealing member gets into the preprocessing unit, avoids revealing of impurity gas such as steam to toasting unit, welding module, further reduces the possibility that makes waiting that the sealing member adsorbs steam in the welding process.
And the to-be-sealed piece after baking treatment enters a welding unit through a second conveying mechanism, and the welded airtight package is completed in the welding unit. The welding unit is connected with the second air extraction unit and the condensing unit, gas is extracted through the second air extraction unit, a vacuum environment is formed in the welding unit, and purified process gas is provided for the welding unit through the condensing unit. Through vacuumizing and backfilling process gas, the welding unit can be flushed with the process gas, so that water vapor in the welding system is reduced, the to-be-sealed piece is hermetically sealed in a high-purity process gas atmosphere, and the possibility of introducing impurity gas such as water vapor and the like into the sealed shell is effectively reduced. And conveying the sealing element subjected to the welding sealing treatment to a discharging unit through a third conveying structure, and finishing the welding sealing process.
The welding sealing system enables transfer between adjacent units by means of a transfer module, the first transfer mechanism, the second transfer mechanism and the third transfer mechanism of the transfer module having control valves for switching between communicating and sealing the adjacent two units. When the control valve is closed, the adjacent processing units form a closed environment, and after the processing process is finished, the control valve is opened to enable the adjacent units to be communicated, and conveying of the to-be-sealed piece is carried out. The transmission module is utilized to transfer the to-be-sealed piece, so that the adsorption of impurity gases such as water vapor and the like caused by the contact of the to-be-sealed piece with the outside air in the transfer process is avoided, the water vapor content in the sealed electronic component is further reduced, and the purity of the internal process gas is improved.
The sealing welding system can realize the water vapor content of less than 100PPM in the device, control the internal air pressure of the package, ensure the precision within +/-500 Pa, ensure the purity of backfill process gas to be higher than 99.5 percent, and is suitable for the sealing requirements of the military special processes such as energy storage welding sealing and the like. The four modules of the welding sealing system can independently operate and can also cooperatively work, so that the degree of automation is high, and the requirements of mass production can be met.
2. According to the welding sealing method provided by the invention, the to-be-sealed piece is subjected to degassing and baking treatment in the first reaction area so as to effectively remove the water vapor adsorbed on the surface of the to-be-sealed piece, the baking treatment is performed in a vacuum environment, and the baked gas is continuously adsorbed away, so that the adsorbed gas on the surface of the to-be-sealed piece is greatly reduced. And after baking, breaking vacuum in the first reaction area, and transferring the piece to be sealed to the second reaction area under the protection of process gas, so that the piece to be sealed is prevented from secondarily adsorbing water vapor in the transfer process. And repeating the operations of vacuumizing and filling the process gas in the second reaction zone, so that the impurity gases such as water vapor and the like in the second reaction zone are effectively removed, and the welding process is performed under the high-purity process gas atmosphere. Meanwhile, as the filled process gas is purified gas after the impurity gas is removed, the increase of the water vapor content in the shell after the electronic component is packaged due to the fact that the process gas is doped with water vapor is avoided.
The welding and sealing process can meet the extremely low water vapor content requirement of the inside of packaging devices such as energy storage welding and the like, is less than 100PPM, can control the air pressure inside the packaging body, ensures that the backfill process gas purity is higher than 99.5%, and has high consistency and efficiency.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic structural view of a welding sealing system according to embodiment 1 of the present invention;
FIG. 2 is a flow chart of a welding sealing process provided in embodiment 2 of the present invention;
reference numerals illustrate:
1-a gas filling module;
11-an air supply unit, 111-an air storage tank and 112-a first pressure regulating valve;
12-a condensing unit, 121-a first tank, 122-a second tank, 123-a first vacuum gauge, 124-a first dew point meter, 125-a second pressure regulating valve, 126-a third isolating valve;
13-an air supply unit, 131-an air blowing pump;
14-third air extraction units, 141-fourth air extraction pumps, 142-fourth isolating valves;
2-baking modules;
21-a pretreatment unit, 211-a pretreatment chamber, 212-a second vacuum gauge;
22-baking unit, 221-first operation chamber, 222-heater, 223-third vacuum gauge;
23-a first air extraction unit, 231-a first air extraction pump, 232-a second air extraction pump, 233-a first block valve;
3-welding a module;
31-a welding unit, 311-a second operating chamber, 312-a second dew point meter;
32-a discharging unit;
33-a second air extraction unit, 331-a third air extraction pump, 332-a second block valve;
34-a pressure controller;
4-a transfer module;
41-first transfer mechanism, 42-second transfer mechanism, 43-third transfer mechanism, 44-cylinder.
Detailed Description
The following description of the embodiments of the present invention will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the invention are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
In addition, the technical features of the different embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.
Example 1
The present embodiment provides a welding sealing system, as shown in fig. 1, including a filling module 1, a baking module 2, a welding module 3, and a transfer module 4. Wherein the gas filling module 1 comprises a gas supply unit 11 and a condensation unit 12 for supplying process gas from which impurity gas such as water vapor is removed to the baking module 2 and the welding module 3; the baking module 2 comprises a pretreatment unit 21, a baking unit 22 and a first air extraction unit 23, and is used for carrying out degassing and baking treatment on the to-be-sealed piece; the welding module 3 comprises a welding unit 31, a discharging unit 32 and a second air extracting unit 33, the welding module 3 receives the piece to be sealed output by the baking module 2, and the piece to be sealed is welded and sealed under the protection of the process gas atmosphere in the welding module 3. The transfer module 4 comprises a first transfer structure between the pre-treatment unit 21 and the baking unit 22, a second transfer structure 42 between the baking unit 22 and the welding unit 31, and a third transfer structure 43 between the welding unit 31 and the outfeed unit 32, with the transfer module 4 controlling the transfer of the piece to be sealed between adjacent units.
The gas filling module 1 is used for providing a gas supply unit 11 of process gas, a condensing unit 12 for desorbing impurity gases such as water vapor in the process gas, and a gas supply unit 13 and a third gas extraction unit 14 connected with the condensing unit 12. As shown in fig. 1, the condensing unit 12 includes a first tank 121, a second tank 122 connected to the first tank 121, an air supply unit 13 connected to the first tank 121, and a third air exhaust unit 14 connected to the second tank 122. The third air pumping unit 14 includes a fourth air pumping pump 141, and an air pumping pipeline communicating the fourth air pumping pump 141 with the second tank 122. The first tank 121 is configured to provide a condensing medium, the second tank 122 receives the condensing medium in the first tank 121, and after the process gas is introduced into the second tank 122, the impurity gas such as water vapor in the process gas is condensed and adsorbed by the condensing medium, and then the purified process gas is output from the second tank 122. The first tank 121 is connected to the air supply unit 13, and the air supply unit 13 includes an air blowing pump 131 communicating with the first tank 121 through an air supply line. The condensing medium in the first tank 121 is transferred into the second tank 122 by the wind force of the blower pump 131. Specifically, the condensing medium is liquid nitrogen, the first tank 121 is a liquid nitrogen Dewar for supplying liquid nitrogen, and the second tank 122 is a liquid nitrogen cold trap for condensing and adsorbing by using liquid nitrogen as the condensing medium. The inlet of the liquid nitrogen Dewar is communicated with the air blowing pump 131 through an air supply pipeline, and the outlet of the liquid nitrogen Dewar is communicated with a liquid nitrogen cold trap through a condensing medium pipeline.
The gas supply unit 11 is connected to the second tank 122 for supplying the process gas to the second tank 122. Specifically, the process gas may be an inert gas such as argon, nitrogen, helium, etc., and the gas supply unit 11 may be a gas tank 111 or any other structure capable of supplying the process gas. The donor unit is communicated with the gas inlet of the second tank 122 through a process gas pipeline, so that the process gas in the gas supply unit 11 enters the second tank 122 through the gas inlet, and after condensation and adsorption of a condensing medium in the second tank 122, water vapor and CO mixed in the process gas 2 The impurity gases are removed, and purified process gas is output from the gas outlet of the second tank 122. A pressure regulating member, specifically, a pressure regulating valve is provided on a pipe line connecting the gas supply unit 11 and the gas inlet of the second tank 122. For convenience of description, the pressure regulating valve provided at the gas inlet is referred to as a first pressure regulating valve 112, and the first pressure regulating valve 112 is used to control the pressure of the process gas supplied from the gas supply unit 11 to the second tank 122. The gas outlet of the second tank 122 is communicated with the welding unit 31, the baking unit 22 and the pretreatment unit 21 through a process gas pipeline, and the other gas outlet of the second tank 122 is communicated with the fourth air pump 141 through an air pumping pipeline. Specifically, the fourth pump 141 is a cold trap for liquid nitrogen decomposition Is pumped by the dry pump to realize the regeneration pumping after the second tank 122 is saturated; meanwhile, the gas is pumped by the dry pump, so that impurity gas in a pipeline of the welding sealing system is reduced, and the cleanliness of the pipeline is improved. A control valve for controlling the opening or closing of the pipeline is arranged on the exhaust pipeline for communicating the dry pump with the liquid nitrogen cold trap, and specifically, the control valve is a fourth block valve 142.
The second tank 122 is provided with a pressure detecting member at the outside, specifically, a vacuum gauge provided at the outside of the liquid nitrogen cold trap. For convenience in description, the vacuum gauge arranged outside the liquid nitrogen cold trap is called a first vacuum gauge 123, and the pressure in the liquid nitrogen cold trap is monitored through the first vacuum gauge 123. On the process gas line connecting the second tank 122 with the welding unit 31, the baking unit 22 and the pretreatment unit 21, a dew point detecting member and a pressure regulating member are sequentially provided in a direction away from the second tank 122, specifically, the dew point detecting member is a dew point meter, and the pressure regulating member is a pressure regulating valve. For convenience of description, the dew point meter provided at the gas outlet is referred to as a first dew point meter 124, the pressure regulating valve is referred to as a second pressure regulating valve 125, the dew point of the process gas outputted from the second tank 122 is monitored by the first dew point meter 124, and the pressure of the process gas outputted from the second tank 122 is regulated by the second pressure regulating valve 125, thereby delivering the process gas with high purity, low moisture and controllable pressure to the welding unit 31, the baking unit 22 and the pretreatment unit 21.
As shown in fig. 1, the roasting module 2 includes a pretreatment unit 21, a roasting unit 22 connected to the pretreatment unit 21, and a first air pumping unit 23 connected to the pretreatment unit 21 and the roasting unit 22, respectively. The pretreatment unit 21 has a pretreatment chamber 211 for receiving a seal to be deaerated by first placing the seal to be sealed in the pretreatment chamber 211 from the outside environment and sucking air in the chamber through a first suction unit 23 connected to the pretreatment unit 21. The pre-treated sealing member is transferred into the baking unit 22, and the sealing member is baked in the baking unit 22. The baking unit 22 is connected with the first air extraction unit 23, a vacuum environment is formed in the baking unit 22, and baking treatment is carried out on the to-be-sealed piece under the vacuum environment, so that water vapor and other various impurity gases adsorbed on the surface of the to-be-sealed piece are sufficiently removed, the purity of process gas in the shell after the to-be-sealed piece is packaged is improved, and the water vapor content in the shell after the packaging is reduced. Meanwhile, the pretreatment unit 21 and the baking unit 22 of the baking module 2 are connected with the second tank 122 of the condensing unit 12 through a process gas pipeline, and receive the high-purity low-moisture content process gas output by the second tank 122.
Specifically, the pretreatment unit 21 is a pretreatment chamber having a pretreatment chamber 211, and the baking unit 22 includes a first operation chamber 221 receiving the sealing member to be sealed outputted from the pretreatment unit 21 and a heater 222 embedded on a wall surface of the first operation chamber 221. The first operation chamber 221 is a quartz vacuum chamber, and is configured to heat the inner seal member by a heater 222 embedded in a wall surface of the chamber Dan Yingzhen. The quartz vacuum chamber has high temperature resistance, abrasion resistance and low expansion coefficient, so that the baking temperature is improved; the inner surface of the quartz vacuum chamber is smooth, the adsorbed water vapor is less, the reduction of the water vapor in the operation environment is facilitated, and the situation that the water vapor in the environment enters the package shell to cause the exceeding of the water vapor content in the electronic component is avoided. The heater 222 is disposed outside the quartz vacuum chamber, and the baking process of the sealing member to be sealed in the chamber is realized by heating the quartz vacuum chamber.
The first air pumping unit 23 comprises a first air pumping pump 231 and a second air pumping pump 232, the first air pumping pump 231 is specifically a cold pump, the second air pumping pump 232 is a dry pump, the first air pumping pump 231 is communicated with a quartz vacuum chamber of the baking unit 22 through an air pumping pipeline, the second air pumping pump 232 is respectively communicated with the quartz vacuum chamber and a pretreatment chamber 211 of the pretreatment unit 21 through an air pumping pipeline, the first air pumping pump 231 and the second air pumping pump 232 are mutually communicated through air pumping pipelines, and control valves for opening or closing control pipelines are respectively arranged on the air pumping pipelines which are communicated with the first air pumping pump 231 and the pretreatment chamber 211, the second air pumping pump 232 and the quartz vacuum chamber, and the control valves are specifically isolating valves. For convenience of description, the control valve provided on the suction line of the first suction unit 23 is referred to as a first block valve 233. The first pump 231 uses a cold pump with a caliber of 200mm as a main pump of the first pumping unit 23, and the third pump 331 uses a dry pump with a caliber of 6L as a front pump of the main pump. The pretreatment chamber 211 and the quartz vacuum chamber are vacuumized by the dry pump and the cold pump, the extraction efficiency of the dry pump and the cold pump to the gas is high, the ultimate vacuum degree of the quartz vacuum chamber can be improved, and various gases such as water vapor in the quartz vacuum chamber can be removed. The pretreatment unit 21 and the baking unit 22 are externally provided with pressure detecting members, specifically, a second vacuum gauge 212 disposed outside the pretreatment chamber 211, and two third vacuum gauges 223 disposed outside the quartz vacuum chamber, and a third vacuum gauge 223 outside the quartz vacuum chamber is a high vacuum gauge.
The pretreatment unit 21 and the baking unit 22 are communicated with the gas outlet of the second tank 122 through a process gas pipeline, and the process gas pipeline comprises 1 first connecting section connected with the gas inlet of the second tank 122, 2 second connecting sections respectively connected with the baking unit 22 and the pretreatment unit 21, and a third connecting section connected with the first connecting section and the second connecting section. The second connecting section is provided with a control valve (for example, a third block valve 126) for controlling the opening or closing of the pipeline, so that the condensing unit 12 can be independently controlled to carry out gas delivery to the pretreatment unit 21 and the baking unit 22. A dew point detecting member (e.g., a first dew point gauge 124) and a pressure adjusting member (e.g., a second pressure regulating valve 125) are provided on the first connection section in a direction away from the condensing unit 12 for controlling the dew point, pressure of the process gas outputted by the condensing unit 12. Specifically, a first connecting section of the process gas pipeline is connected with a gas outlet of the liquid nitrogen cold trap, a second connecting section of the process gas pipeline is connected with the pretreatment chamber 211 and the quartz vacuum chamber, and a control valve arranged on the second connecting section is used for independently controlling gas delivery from the liquid nitrogen cold trap to the pretreatment chamber 211 and the quartz vacuum chamber.
A first transfer mechanism 41 is provided between the pretreatment unit 21 and the baking unit 22, the first transfer mechanism 41 having a transfer valve that switches between communication and closure of the adjacent pretreatment unit 21 and baking unit 22. Specifically, the transfer valve is a gate valve disposed between the pretreatment chamber 211 and the vacuum quartz chamber, and when the gate valve is closed, the pretreatment chamber 211 and the vacuum quartz chamber form independent closed chambers respectively; when the gate valve is opened, the adjacent pretreatment chamber 211 is communicated with the vacuum quartz chamber, and the to-be-sealed piece is conveyed to the quartz vacuum chamber from the pretreatment chamber 211 for baking treatment under the pushing of the sealing cylinder 44. Before transferring the to-be-sealed piece, firstly, opening a block valve on the second connecting section, and conveying purified process gas into the pretreatment chamber 211 or the quartz vacuum chamber, so that the surface of the to-be-sealed piece adsorbs the process gas, and the vacuum environment in the chamber can be broken, so that the to-be-sealed piece can be automatically pushed into the next chamber.
As shown in fig. 1, the welding module 3 includes a welding unit 31, a discharging unit 32 connected to the welding unit 31, and a first pumping unit 23. The welding unit 31 receives the sealing member to be sealed outputted from the baking unit 22 and performs a welding sealing process thereon, and the welded sealing member is transferred into the discharging unit 32 to complete the welding sealing process. Wherein the welding unit 31 is connected to the second pumping unit 33 through a pumping pipe, and is connected to the second tank 122 of the condensing unit 12 through a process gas pipe. The welding unit 31 is internally provided with a second operation chamber 311 in which a member to be sealed is placed, and specifically, the welding unit 31 is a glove box for welding the member to be sealed, and the second operation chamber 311 is a seal-welding vacuum chamber inside the glove box. The second operation chamber 311 is connected to the third pump 331 of the second pumping unit 33 through a pumping line, and the third pump 331 is preferably a mechanical pump. The pumping line is provided with a control valve (e.g., the second block valve 332) for controlling the opening or closing of the pumping line. The second operation chamber 311 is communicated with the condensing unit 12 through a process gas pipeline, wherein one end of the process gas pipeline connected with the second operation chamber 311 is a second connection section, and a control valve for controlling the opening or closing of the pipeline is arranged on the second connection section. The third pump 331 pumps the gas in the second operation chamber 311, thereby forming a vacuum environment in the second operation chamber 311, and then the condensation unit 12 supplies the process gas into the second operation chamber 311, thereby forming a process gas atmosphere for sealing welding in the second operation chamber 311. The second operation chamber 311 is vacuumized by the independent second air pumping unit 33, so that the vacuum degree of the second operation chamber 311 can be improved; then, the second operation chamber 311 is filled with high purity process gas by backfilling the process gas. By repeating the operations of vacuumizing and backfilling the process gas, the impurity gas such as water vapor in the first operation chamber 221 can be efficiently removed, so that the to-be-sealed piece is welded and sealed under the high-purity process gas atmosphere, and the electronic component with high process gas purity and low water vapor content in the shell is obtained. The outside of the welding unit 31 is provided with a dew point detecting means, in particular a second dew point meter 312, the second dew point meter 312 being arranged to detect the dew point of the process gas in the glove box. The pressure controller 34 is arranged in the process gas pipelines of the second operation chamber 311 and the second tank 122 of the welding unit 31, the pressure of the process gas filled into the second operation chamber 311 is monitored by the pressure controller 34, when the required gas pressure is reached, the pressure controller 34 controls the pipeline to be closed, and the gas delivery to the second operation chamber 311 is stopped, so that the effective control of the process gas pressure in the second operation chamber 311 is realized, and the process gas pressure in the shell is controllable after the piece to be sealed is welded and packaged in the second operation chamber 311. Specifically, the pressure controller 34 is disposed on a second connection section of the process gas line to the seal-welding vacuum chamber.
Further, a second conveying structure is further arranged between the baking unit 22 and the welding unit 31, a third conveying structure 43 is further arranged between the welding unit 31 and the discharging unit 32, and the second conveying structure and the third conveying structure 43 comprise conveying valves for controlling adjacent units to switch between communication and sealing, and the conveying valves are particularly gate valves. When the gate valves between the baking unit 22 and the welding unit 31 and between the welding unit 31 and the discharging unit 32 are closed, the adjacent quartz vacuum chamber, glove box and discharging bin are independent closed chambers. When the shutter valve located between the baking unit 22 and the welding unit 31 is stuck, the quartz vacuum chamber and the glove box are communicated, and the member to be sealed is conveyed into the glove box from the quartz vacuum chamber under the pushing action of the cylinder 44. Before the gate valve is opened, process gas is firstly introduced into a Dan Yingzhen cavity of the baking unit 22 to break vacuum, and when the air pressure at two sides is close, a cylinder is used for pushing the to-be-sealed piece to be transferred. After the process gas is introduced, the surface of the to-be-sealed piece can absorb a certain process gas, and then the to-be-sealed piece is transferred to the welding unit 31 by the baking unit 22 in a closed environment, so that the secondary absorption of water vapor in the transfer process of the to-be-sealed piece is effectively avoided. When the gate valve between the welding unit 31 and the discharging unit 32 is opened, the welded sealing member is transferred into the discharging bin from the glove box, and the electronic component after welding and sealing is obtained.
As a specific embodiment, the welding sealing system further comprises a control module, wherein the control module specifically comprises a PLC control system and a sensor for signal acquisition. The PLC control system is connected with each processing unit of the gas filling module 1, the baking module 2, the welding module 3 and the conveying module 4, signals are collected through the sensors to judge, and the processing units are controlled to execute functions of the processing units, so that an automatic welding and sealing process of the to-be-sealed piece is completed.
Example 2
The embodiment provides a welding sealing process, wherein the welding sealing process is applied to the welding sealing system in embodiment 1, and specifically comprises the following steps:
s1, carrying out gas desorption and baking treatment on a piece to be sealed in a first reaction area, wherein the baking treatment is carried out in a vacuum environment;
specifically, the pretreatment unit 21 in the first reaction zone is subjected to gas desorption treatment of the member to be sealed, and then the member to be sealed is transferred into the Dan Yingzhen cavity of the baking unit 22 in the first reaction zone to be baked. In the baking process, the dry pump and the cold pump of the first air extracting unit 23 are used for extracting air from the quartz vacuum chamber, so that the baked air is continuously removed, and the vacuum environment of the quartz vacuum chamber is maintained. The baking treatment temperature is 140-200 ℃ and the baking time is 8-16h; during the baking process, the vacuum degree in the quartz vacuum chamber is always kept at 1 multiplied by 10 －5 －1×10 －6 pa range.
S2, introducing process gas into the first reaction zone to break vacuum, and then transferring the baked piece to be sealed to a second reaction zone under the protection of the process gas; wherein the process gas is purified gas from which impurity gas is removed;
specifically, process gas is introduced into the quartz vacuum chamber of the baking unit 22, when the pressure in the quartz vacuum chamber is close to the pressure in the welding unit 31, a transfer valve of the first transfer mechanism 41 is opened, the to-be-sealed piece is transferred into the seal welding vacuum chamber of the welding unit 31 in the second reaction zone under the pushing of the air cylinder 44, and the to-be-sealed piece is not required to be contacted with external air in the transfer process, so that secondary water vapor adsorption is effectively avoided.
The process gas is specifically provided by the gas supply unit 11 in the gas filling module 1, and then the impurity gas such as water vapor in the process gas is removed through the liquid nitrogen cold trap adsorption in the condensing unit 12. The backfill gas dew point is monitored by a dew point meter and when the dew point is below-65 ℃, a control valve located on the second connection section connecting the bake unit 22 with the condensing unit 12 provides purified process gas to the quartz vacuum chamber of the bake unit 22.
And S3, vacuumizing the second reaction zone, filling the process gas into the second reaction zone, repeatedly vacuumizing and filling the process gas for 2-4 times, backfilling the process gas with required pressure, and welding the to-be-sealed piece in the second reaction zone.
The seal welding vacuum chamber of the welding unit 31 is simultaneously communicated with the first air extracting unit 23 and the condensing unit 12, and the mechanical pump of the first air extracting unit 23 is utilized to extract the gas in the seal welding vacuum chamber and then vacuumize to about 0.5 pa; and then a control valve on a second connecting section of a process gas pipeline which is communicated with the welding unit 31 and the condensing unit 12 is opened, and process gas, which can be inert gas such as argon, nitrogen, helium and the like, is filled into a sealed welding vacuum chamber of the welding unit 31, and the backfilling pressure can be controlled to be 0.05-1 atmosphere. The operation of flushing vacuum and backfilling gas is repeated for 2-4 times, so that the seal welding vacuum chamber is filled with high-purity low-vapor process gas, and the welding operation is carried out in the process gas atmosphere, so as to obtain the sealing device with extremely low vapor content in the shell and high process gas purity. After the sealing member is welded and packaged, the sealing member is transferred to the discharging unit 32 through the transfer valve of the third transfer structure 43, and a sealed device is obtained.
It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. While still being apparent from variations or modifications that may be made by those skilled in the art are within the scope of the invention.
Claims (20)
1. A welding sealing system, comprising:
a gas filling module (1) comprising a gas supply unit (11) for supplying a process gas, and a condensing unit (12) connected to the gas supply unit, the condensing unit (12) being for adsorbing impurity gases in the process gas;
the baking module (2) comprises a pretreatment unit (21), a baking unit (22) connected with the pretreatment unit (21), and a first air extraction unit (23) respectively connected with the pretreatment unit (21) and the baking unit (22); the pretreatment unit (21) is provided with a pretreatment chamber (211) for receiving the to-be-sealed piece, the baking unit (22) is used for baking the to-be-sealed piece output by the pretreatment chamber (211), and the baking unit (22) and the pretreatment unit (21) are respectively connected with the condensing unit (12) through a process gas pipeline;
a welding module (3) comprising a welding unit (31) for welding the piece to be sealed, a discharging unit (32) connected with the piece to be sealed, and a second air pumping unit (33) connected with the welding unit (31); the welding unit (31) receives the sealing member to be sealed output by the baking unit (22), and the discharging unit (32) receives the sealing member output by the welding unit (31); the welding unit (31) is connected with the condensing unit (12) through a process gas pipeline;
A transfer module (4) comprising a first transfer mechanism (41) between the pre-treatment unit (21) and the baking unit (22), a second transfer mechanism (42) between the baking unit (22) and the welding unit (31), and a third transfer mechanism (43) between the welding unit (31) and the outfeed unit (32); the first transfer mechanism (41), the second transfer mechanism (42) and the third transfer mechanism (43) have transfer valves that switch adjacent two units between communicating and closing.
2. The welding sealing system of claim 1, wherein,
the baking unit (22) comprises a first operation chamber (221) for receiving the member to be sealed, and a heater (222) arranged outside the first operation chamber (221); the first operation chamber (221) is communicated with the condensing unit (12) and the first air pumping unit (23);
a second operation chamber (311) for placing the to-be-sealed piece is arranged in the welding unit (31), and the second operation chamber (311) is communicated with the condensing unit (12) and the second air pumping unit (33); the second operation chamber (311) is provided with a pressure controller (34) on a process gas pipeline communicated with the condensing unit (12).
3. The welding sealing system according to claim 2, wherein the first operating chamber (221) is a quartz vacuum chamber and the second operating chamber (311) is a welding vacuum chamber.
4. The welding sealing system according to claim 2, characterized in that the exterior of the pre-treatment chamber (211) is provided with a pressure detection element, the exterior of the first operating chamber (221) is provided with a pressure detection element, and the exterior of the second operating chamber (311) is provided with a dew point detection element.
5. The welding sealing system of claim 4, wherein the pressure sensing element is a vacuum gauge and the dew point sensing element is a dew point gauge.
6. The welding sealing system according to claim 1, wherein the condensing unit (12) comprises a first tank (121) for providing a condensing medium and a second tank (122) for receiving the condensing medium in the first tank (121), the first tank (121) being connected to an air supply unit (13), a gas inlet of the second tank (122) being in communication with the air supply unit (11), a gas outlet of the second tank (122) being in communication with the pretreatment unit (21), the baking unit (22) and the welding unit (31).
7. The welding sealing system of claim 6, wherein the first tank (121) is a liquid nitrogen dewar and the second tank (122) is a liquid nitrogen cold trap.
8. The welding sealing system of claim 6, wherein,
a pressure regulating member is arranged on a process gas pipeline communicated with the gas inlet;
the process gas line communicating with the gas outlet comprises at least one first connection section connected to the second tank (122), and at least three second connection sections connected to the welding unit (31), the baking unit (22) and the pretreatment unit (21), respectively.
9. The welding sealing system of claim 8, wherein the welding device comprises a welding device,
the first connecting section is sequentially provided with a dew point detection part and a pressure regulating part along the direction away from the condensing unit (12); and each second connecting section is provided with a control valve for controlling the second connecting section to be opened or closed.
10. The welding sealing system of claim 9, wherein the dew point detector is a dew point meter, the pressure regulator is a pressure regulating valve, and the control valve is a block valve.
11. The welding sealing system according to claim 6, wherein the gas filling module (1) further comprises a gas supply unit (13) connected to the first tank (121), and a third gas extraction unit (14) connected to the second tank (122);
The air supply unit (13) comprises an air blowing pump (131) communicated with the first tank body (121) through an air supply pipeline;
the third air extraction unit (14) comprises a fourth air extraction pump (141) communicated with the second tank body (122) through an air extraction pipeline.
12. The welding sealing system of claim 11, wherein the fourth pump (141) is a dry pump.
13. The welding sealing system of claim 1, wherein,
the first air extraction unit (23) comprises a first air extraction pump (231) communicated with the baking unit (22) through an air extraction pipeline, and a second air extraction pump (232) respectively communicated with the baking unit (22) and the pretreatment unit (21) through an air extraction pipeline, wherein the first air extraction pump (231) and the second air extraction pump (232) are mutually communicated through an air extraction pipeline;
the second pumping unit (33) comprises a third pumping pump (331) communicated with the welding unit (31) through a pumping pipeline.
14. The welding sealing system of claim 13, wherein the first pump (231) is a cold pump, the second pump (232) is a dry pump, and the third pump (331) is a mechanical pump.
15. The welding sealing system of claim 13, wherein the extraction line is provided with a control valve that controls the opening or closing of the extraction line.
16. The welding sealing system according to any one of claims 1-15, further comprising a control module connecting the filling module (1), the baking module (2), the welding module (3) and the transfer module (4).
17. A welding sealing process, comprising the steps of:
s1, carrying out gas desorption and baking treatment on a piece to be sealed in a first reaction area, wherein the baking treatment is carried out in a vacuum environment;
s2, introducing process gas into the first reaction zone to break vacuum, and then transferring the baked piece to be sealed to a second reaction zone under the protection of the process gas; wherein the process gas is purified gas from which impurity gas is removed;
and S3, vacuumizing the second reaction zone, filling the process gas into the second reaction zone, repeatedly vacuumizing and filling the process gas for 2-4 times, backfilling the process gas with required pressure, and welding the to-be-sealed piece in the second reaction zone.
18. The solder sealing process according to claim 17, wherein in step S1, the baked gas is pumped out of the first reaction zone, and the baking process is performed under a vacuum environment.
19. The welding sealing process of claim 17, wherein the first reaction zone has a vacuum level of 1x10 -5 -1x10 -6 pa, wherein the temperature of the baking treatment is 140-200 ℃, and the time of the baking treatment is 8-16 hours.
20. The welding sealing process according to any one of claims 17-19, wherein the welding sealing process employs the welding sealing system of any one of claims 1-16.
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| CN114893957A (en) * | 2022-04-15 | 2022-08-12 | 四川景恒科技有限公司 | Ultrahigh vacuum degassing and drying method and system |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5210067A (en) * | 1975-07-07 | 1977-01-26 | Ibm | Method of manufacturing gas discharge display panel |
| CN103056473A (en) * | 2013-01-07 | 2013-04-24 | 山东高唐杰盛半导体科技有限公司 | Continuous vacuum welding furnace and welding method for same |
| CN104759751A (en) * | 2015-04-15 | 2015-07-08 | 中国科学院福建物质结构研究所 | Vacuum/atmosphere welding device and method capable of conducting continuous feeding work |
| CN109415253A (en) * | 2017-10-25 | 2019-03-01 | 深圳孔雀科技开发有限公司 | A kind of method for sealing of planar vacuum glass |
| CN109534842A (en) * | 2018-11-26 | 2019-03-29 | 北京卫星制造厂有限公司 | Power semiconductor modular welding procedure |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040099715A1 (en) * | 2002-11-27 | 2004-05-27 | Clifford George M. | System and method for seal formation |
| US7314777B2 (en) * | 2004-11-15 | 2008-01-01 | Honeywell International Inc. | Chip packaging systems and methods |
-
2020
- 2020-02-20 CN CN202010105701.7A patent/CN111302299B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5210067A (en) * | 1975-07-07 | 1977-01-26 | Ibm | Method of manufacturing gas discharge display panel |
| CN103056473A (en) * | 2013-01-07 | 2013-04-24 | 山东高唐杰盛半导体科技有限公司 | Continuous vacuum welding furnace and welding method for same |
| CN104759751A (en) * | 2015-04-15 | 2015-07-08 | 中国科学院福建物质结构研究所 | Vacuum/atmosphere welding device and method capable of conducting continuous feeding work |
| CN109415253A (en) * | 2017-10-25 | 2019-03-01 | 深圳孔雀科技开发有限公司 | A kind of method for sealing of planar vacuum glass |
| CN109534842A (en) * | 2018-11-26 | 2019-03-29 | 北京卫星制造厂有限公司 | Power semiconductor modular welding procedure |
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