CN115312363A - High vacuum system for low-temperature transmission line in accelerator tunnel - Google Patents

High vacuum system for low-temperature transmission line in accelerator tunnel Download PDF

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Publication number
CN115312363A
CN115312363A CN202210847976.7A CN202210847976A CN115312363A CN 115312363 A CN115312363 A CN 115312363A CN 202210847976 A CN202210847976 A CN 202210847976A CN 115312363 A CN115312363 A CN 115312363A
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China
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vacuum
transmission line
monitoring device
low
temperature transmission
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CN202210847976.7A
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王金坤
倪清
赵乾坤
汪义
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Shanghai Advanced Research Institute of CAS
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Shanghai Advanced Research Institute of CAS
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/02Vessels; Containers; Shields associated therewith; Vacuum locks
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K9/00Screening of apparatus or components against electric or magnetic fields
    • H05K9/0007Casings
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00Energy generation of nuclear origin
    • Y02E30/10Nuclear fusion reactors

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Particle Accelerators (AREA)

Abstract

The invention relates to a high vacuum system for a low-temperature transmission line in an accelerator tunnel, which comprises a low-temperature transmission line, a vacuum gate valve, a first monitoring device and a molecular pump set which are sequentially connected, wherein the low-temperature transmission line is connected with a second monitoring device through a manual angle valve, the vacuum gate valve, the first monitoring device, the molecular pump set and the second monitoring device are all connected with an electrical element for controlling and acquiring data, and a shielding layer is arranged among the electrical element, the vacuum gate valve, the first monitoring device, the molecular pump set and the second monitoring device. The invention solves the problem of radiation protection of a vacuum system in an accelerator tunnel, has stable protection and shielding performance on ionizing radiation, ensures that vacuum equipment can safely and reliably run in a radiation environment for a long time, and has wide practicability.

Description

High vacuum system for low-temperature transmission line in accelerator tunnel
Technical Field
The invention relates to the technical field of low-temperature equipment vacuumizing, in particular to a high-vacuum system for a low-temperature transmission line in an accelerator tunnel.
Background
The low-temperature working medium transmission system mainly comprises a transmission line and a distribution valve box and provides helium flow circulation of different temperature areas for a horizontal module of the superconducting linear accelerator. The transmission line conveys the helium flow from each temperature area of the cooling box to the distribution valve box, and the distribution valve box distributes and adjusts the helium flow according to the requirement of the cooling object and then conveys the helium flow to each cooling object. Because part of the low-temperature transmission line is arranged in a high-radiation tunnel of the electronic accelerator device and used for conveying and distributing low-temperature helium flow to cool the superconducting module, in order to reduce radiation damage of vacuum equipment and operation of personnel entering and exiting the tunnel, a set of high-reliability vacuum system needs to be built and arranged in a radiation environment, heat leakage of the low-temperature transmission line is reduced to the minimum, and a magnet of the superconducting module is ensured to be kept at a required low temperature.
In practical applications, the on-line equipment used in the accelerator tunnel needs to be able to withstand up to 1000Gy of radiation, and the vacuum acquisition and measurement equipment is located in the beam radiation region of the accelerator. The vacuum system in the existing domestic accelerator device is generally not considered for radiation damage, so that the reliability of the vacuum system is poor. The vacuum system in the foreign accelerator device is generally not provided with on-line equipment, and the off-line equipment can be pushed out of the radiation environment when the accelerator device is in the running state, so that the state of maintaining the vacuum degree at low temperature in a poor way cannot be realized.
Therefore, there is a need to develop a high vacuum system for cryogenic transmission lines in accelerator tunnels that enables long term online operation and maintenance of vacuum acquisition and measurement equipment.
Disclosure of Invention
In order to solve the problems in the prior art, the invention provides a high vacuum system for a low-temperature transmission line in an accelerator tunnel, which can solve the problem of radiation damage of the vacuum system in the accelerator tunnel caused by electron beams, so that vacuum equipment can be operated and maintained on line for a long time in a radiation environment.
The invention provides a high vacuum system for a low-temperature transmission line in an accelerator tunnel, which comprises a low-temperature transmission line, a vacuum gate valve, a first monitoring device and a molecular pump set which are sequentially connected, wherein the low-temperature transmission line is connected with a second monitoring device through a manual angle valve, the vacuum gate valve, the first monitoring device, the molecular pump set and the second monitoring device are all connected with an electrical element for controlling and acquiring data, and a shielding layer is arranged among the electrical element, the vacuum gate valve, the first monitoring device, the molecular pump set and the second monitoring device.
Furthermore, a safety valve and an inflation valve are arranged on the low-temperature transmission line.
Further, the low temperature transmission line includes outer tube, cold shield and the inner tube that sets up by outer to interior, the cold shield with the surface of inner tube all wraps up adiabatic multilayer material, just the outer tube with between the cold shield and inner tube between all have the vacuum intermediate layer.
Furthermore, one end part of the low-temperature transmission line is provided with a measuring interface which is communicated with the manual angle valve; and a vacuumizing interface is arranged in the middle of the low-temperature transmission line and communicated with the vacuum gate valve.
And further, an inflation interface is arranged at a position adjacent to the vacuumizing interface and is communicated with a nitrogen source through the inflation valve.
Furthermore, the molecular pump group adopts a split structure and comprises a backing pump, a backing electromagnetic valve and a turbo molecular pump which are sequentially connected through a metal corrugated pipe.
Further, the first and second monitoring devices each include a vacuum gauge controller for switching gauges, and low and high vacuum gauges for monitoring pressure.
Further, the vacuum gate valve, the first monitoring device and the molecular pump group are connected through a vacuum pipeline, the vacuum pipeline comprises an upper interface, a lower interface, a middle first interface and a middle second interface, the upper interface is connected with the vacuum gate valve, the lower interface is connected with the turbo molecular pump, and the middle first interface and the middle second interface are respectively connected with a low vacuum gauge and a high vacuum gauge in the first monitoring device.
Furthermore, the inner diameter of the vacuum pipeline is 100mm, and the height of the vacuum pipeline is 100 mm-150 mm.
Further, the electric element includes long-range IO module, serial servers and the switch of connecting each other, long-range IO module with the vacuum push-pull valve the preceding stage solenoid valve is connected, serial servers with the switch with first monitoring facilities the second monitoring facilities the molecular pump group is connected, just the switch is connected with input/output controller and vacuum PLC respectively.
The high vacuum system for the low-temperature transmission line in the accelerator tunnel provided by the invention realizes a reliable and stable vacuum system by utilizing the characteristic of radiation compatibility of equipment, and solves the problem of radiation protection of the vacuum system in the accelerator tunnel. The mechanical part and the electronic part of the vacuum equipment are separated, and the electronic equipment is placed in the radiation shielding area, so that the vacuum equipment has stable protection and shielding performance on ionizing radiation, ensures that the vacuum equipment can safely and reliably run in a radiation environment for a long time, and has wide practicability.
Drawings
Fig. 1 is a schematic view of the structure of a high vacuum system for a cryogenic transfer line in an accelerator tunnel according to the present invention.
Fig. 2 is a schematic view of the structure of the low temperature transmission line of fig. 1.
Detailed Description
The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
The high vacuum system for the low-temperature transmission line in the accelerator tunnel is used for vacuumizing a cavity in a radiation damage environment, and comprises a low-temperature transmission line 1, a vacuum gate valve 2, a first monitoring device 3 and a molecular pump group 4 which are sequentially connected, wherein the low-temperature transmission line 1 is connected with a manual angle valve 51, a safety valve 52 and an inflation valve 53, and the manual angle valve 51 is connected with a second monitoring device 6, as shown in figure 1. In addition, the vacuum gate valve 2, the first monitoring device 3, the molecular pump group 4 and the second monitoring device 6 are all connected with an electrical element 7 for controlling and collecting data, and a shielding layer 71 is arranged between the electrical element 7 and the vacuum gate valve 2, the first monitoring device 3, the molecular pump group 4 and the second monitoring device 6 to weaken the influence of radiation on the electrical element 7. Note that the broken line in fig. 1 indicates a cable connecting the electric element 7 to another device.
As shown in fig. 2, the low-temperature transmission line 1 includes an outer pipe 11, a cold shield 12 and an inner pipe 13 arranged from outside to inside, wherein the outer surfaces of the cold shield 12 and the inner pipe 13 are wrapped with a heat-insulating multi-layer material 14 (as shown by oblique line filling portions in fig. 2), and leakage rates between the outer pipe 11 and the cold shield 12 and between the cold shield 12 and the inner pipe 13 are less than 1 × 10 -9 Pa·m 3 A vacuum interlayer 15 per second (vacuum interlayers are connected, i.e. there is only one vacuum interlayer). The heat-insulating multilayer material 14 is a combination of reflecting materials and spacers which are alternated, the heat-insulating multilayer material 14 wrapped by the cold screen 12 is 30-40 layers, the heat-insulating multilayer material 14 wrapped by the inner pipe 13 is 10-15 layers, and the layer density is kept between 20 layers/cm and 40 layers/cm. It should be noted that, when wrapping the multi-layer heat insulating material 14, it is necessary to perform the heating and drying treatment for more than 24 hours on the multi-layer heat insulating material before wrapping, and ensure that the surface of the material is free from impurities such as oil stains; after the drying treatment is finished, sealing the multilayer heat-insulating material for standby use by using vacuum or nitrogen filling, wherein the standby time is not more than 12 hours; after all the heat-insulating materials are wound and wrapped, the heat-insulating materials are bound and fixed by nylon ropes approximately every other meter. The operation improves the vacuum-pumping efficiency and maintains the high vacuum degree between the interlayers on the premise of ensuring the excellent and stable heat insulation performance of the low-temperature transmission line.
With continued reference to fig. 1, the top wall of one end of the cryogenic line 1 is provided with a measurement interface 16, the measurement interface 16 is communicated with a manual angle valve 51, and the safety valve 52 is provided on the top wall of the other end of the cryogenic line 1. The side wall in the middle of the low-temperature transmission line 1 is provided with a vacuumizing interface 17, and the vacuumizing interface 17 is communicated with the vacuum gate valve 2. An air charging interface 18 is arranged near the vacuumizing interface 17, and the air charging interface 18 is communicated with a nitrogen source (not shown) through an air charging valve 53.
The molecular pump group 4 comprises a backing pump 41, a backing electromagnetic valve 42 and a turbo molecular pump 43 which are sequentially connected through pipelines, wherein the backing pump 41 is an oil-free multi-stage roots pump, the pumping speed is more than or equal to 10L/s, and the molecular pump can work under atmospheric pressure for a long time so as to adapt to the pumping-out requirement of a large-volume cavity; turbo molecular pump43 maximum pumping speed of 260L/s or more, and limiting pressure of 10 or less - 6 Pa. Thus, the molecular pump group 4 can make the vacuum interlayer 15 of the low-temperature transmission line 1 less than 1 multiplied by 10 -3 Pa vacuum degree. In this embodiment, the pipeline connecting the backing pump 41, the backing solenoid valve 42 and the turbomolecular pump 43 is a metal bellows, and the sealing material at the joint of the metal bellows and each component is a radiation resistant material of ethylene propylene diene monomer type. The backing pump 41 and the turbo-molecular pump 43 also have radiation resistance with radiation resistance dose not less than 10 3 Gy. And, the molecular pump group 4 adopts a split structure, namely, all parts are fixedly arranged on an evacuating operation platform of a stainless steel frame, and can be operated online for a long time.
The monitoring equipment can measure the vacuum degree and provide vacuum opening and closing and protection signals. Wherein, the first monitoring device 3 is used for monitoring and displaying the pump opening vacuum degree of the molecular pump set 4, and ensuring that the molecular pump set 4 can take proper action. The second monitoring device 6 is used to monitor the pressure in the cryogenic transmission line 1 over a long period of time and to ensure that appropriate action can be taken when the pressure increases.
Specifically, the first monitoring device 3 and the second monitoring device 6 each include a vacuum gauge controller, a low vacuum gauge and a high vacuum gauge, the low vacuum gauge and the high vacuum gauge are used for monitoring pressure in a full-range, and the vacuum gauge controller is used for switching the range. Wherein the low vacuum gauge is a resistance gauge, and the radiation resistant dose is 10 3 Gy, measurement range 1.0X 10 3 ~1.0×10 -3 torr; the high vacuum gauge is a cold cathode ion gauge with an anti-radiation dosage of 10 7 Gy, measurement range 1.0X 10 -2 ~1.0×10 -11 torr. The low vacuum gauge and the high vacuum gauge have radiation resistance, and are respectively communicated with the same vacuum interlayer when the system works, and the range switching function is realized through the vacuum gauge controller, so that the vacuum gauge and the high vacuum gauge reach 1.0 multiplied by 10 3 ~1.0×10 - 11 Carrying out full-scale measurement on the torr.
The vacuum gate valve 2, the first monitoring device 3 and the molecular pump group 4 are connected through a vacuum pipeline 8, specifically, the vacuum pipeline 8 comprises an upper interface, a lower interface, a middle first interface and a middle second interface, wherein the upper interface is connected with the vacuum gate valve 2; the lower interface is connected with a turbo molecular pump 43 in the molecular pump group 4 through a flange, and a filter screen is arranged at the lower interface to prevent impurities or debris from damaging the turbo molecular pump 43; the middle first interface and the middle second interface are respectively connected with a low vacuum gauge and a high vacuum gauge in the first monitoring device 3. The inner diameter of the vacuum line 8 corresponds to the inlet diameter of the turbomolecular pump 43 and is approximately 100mm. Meanwhile, in order to increase the effective pumping speed and increase the pipe conductance, the height of the vacuum pipe 8 is set between 100mm and 150mm.
In this embodiment, the vacuum gate valve 2, the interface of the preceding stage solenoid valve 42, the manual angle valve 51, the safety valve 52 and the inflation valve 53, and the interface of the low vacuum gauge, the interface of the high vacuum gauge and the air extraction interface of the turbomolecular pump 43 are all oxygen-free copper knife edge flange interfaces, and are hermetically connected by an oxygen-free copper sealing gasket, so that the air release amount is small, the permeability is low, and the high temperature baking resistance is achieved. The valve body material and the flange material of each valve are all stainless steel 316L, and the valve seat and the sealing material of each valve are all metal materials. The leakage rate of each valve is less than 1 multiplied by 10 -9 Pa.m 3/s, and has radiation resistance with radiation dose not less than 10 8 Gy。
The electric element 7 is in a radiation-proof safe area through the shielding layer 71, and data acquisition and system control are realized. Specifically, the electric element 7 includes remote IO module, serial server and switch connected each other, wherein, remote IO module is connected with vacuum push-pull valve 2, preceding stage solenoid valve 42, and serial server and switch are connected with first monitoring facilities 3, second monitoring facilities 6, molecular pump group 4, and the switch still is connected with input/output controller and vacuum PLC respectively. The vacuum PLC is used for acquiring vacuum data and controlling the starting and stopping of the molecular pump group 4 and the preceding stage electromagnetic valve 42; the input and output controller is used for acquiring, sending and storing vacuum data. The invention transmits signals generated by the vacuum gate valve, the monitoring equipment and the molecular pump set to an electric element in a radiation-proof safety area through a cable with shielding and radiation resistance, wherein the radiation resistance dose of the cable is more than or equal to 10 4 Gy enables all elements within the systemThe device can be suitable for the resistant module radiation environment, can work under the radiation environment for a long time.
The high vacuum system for the low temperature transmission line in the accelerator tunnel provided by the invention has three typical working modes, and the three working modes are described in detail below.
1) Initial state evacuation mode
In this mode, the low temperature transmission line is not put into use, need through manual or automatic to its evacuation: after the low-temperature transmission line is qualified in leak detection, the surface of the outer tube 11 of the low-temperature transmission line is sleeved by a heating blanket, a heating mode is started, and when the heating temperature reaches 80 ℃, a backing pump 41 and a vacuum gate valve 2 are started in sequence for vacuumizing; when the vacuum degree reaches 10Pa, performing hot nitrogen replacement, filling nitrogen to 1000Pa, closing the backing pump 41, stopping evacuation, standing and heating for 2 hours, and then starting the backing pump 41 again; continuously evacuating for several hours, then carrying out nitrogen gas replacement for the second time, and circulating for 3-5 times in such a way until the vacuum degree after replacement reaches a relative stable value less than 10Pa; starting the turbo molecular pump 43 to perform extreme high vacuum pumping until the vacuum degree reaches<10 -3 And when Pa is needed, the molecular pump group 4 is in standby, the vacuum gate valve 2 is closed, and the sealing vacuum degree of the low-temperature transmission line is monitored.
2) Room temperature maintenance vacuum state mode
In the mode, the low-temperature transmission line is put into use, and the control system automatically operates. At room temperature, when the vacuum degree of the seal of the low-temperature transmission line is reached<10 -3 And when Pa, the operation can be carried out by cooling. In the cooling process, the vacuum gate valve 2 is in a closed state, and the gas releasing rate in the cold vacuum state is low. Therefore, the frequently occurring vacuum maintaining condition belongs to the condition that the transmission line is in a normal temperature state, the vacuum monitoring equipment judges the vacuum degree of the low-temperature transmission line, and when the vacuum degree is more than 10 -3 Pa, the corresponding vacuum gate valve 2 is opened, and the molecular pump group 4 is started to evacuate; degree of vacuum<10 -3 And Pa, closing the corresponding vacuum gate valve 2, and keeping the molecular pump group 4 in standby.
3) Vacuum degree destruction mode under low-temperature transmission line operation condition
In this mode, the control system operates automatically. When the low-temperature transmission line is in low-temperature operationIn the state, the vacuum degree is generally 10 -6 Pa or so, the vacuum gate valve 2 is closed at the moment, and the molecular pump group 4 is in a standby state. If the vacuum degree detected by the low-temperature transmission line is more than 10 -3 Pa, the leakage of the low-temperature transmission line is indicated, and the leakage hole is probably generated by the long-term cold and heat shock of the welding seam of the internal pipeline. To ensure the test is carried out, at this time, the molecular pump group 4 and the corresponding vacuum gate valve 2 are started according to the operation process of the mode 2). After the turbomolecular pump 43 is started, if the vacuum monitoring equipment monitors that the vacuum degree is continuously increased to be more than 10 -1 Pa, at which time the vacuum insertion plate valve 2 is closed and the molecular pump group 4 is in standby in order to protect the turbomolecular pump 43 from impact. In this case, if the test is not stopped, the mode is switched to the rough pumping mode, the vacuum gate valve 2 is opened, and only the backing pump 41 is started to maintain the evacuation.
In the above working mode, the absolute pressure of the cryogenic transmission line can be read in real time by the second monitoring device 6, so as to realize the interlocking control among the devices in the system, thereby maintaining vacuum. The first monitoring device 3 reads the absolute pressure of the pump port of the turbomolecular pump 43 in real time to realize the linkage control among the devices in the molecular pump group 4, thereby realizing the judgment of the starting sequence among the turbomolecular pump 43, the backing electromagnetic valve 42 and the backing pump 41.
The high vacuum system of the invention adopts vacuum obtaining and measuring equipment, and has the advantages of rapid vacuum pumping, compact appearance, dry type and durability. The combination of the turbomolecular pump and the backing pump can realize both the high-pumping-speed pre-pumping of rough vacuum and the acquisition of high vacuum, and is suitable for the application requirements of various pumping processes. The dry molecular pump group vacuumizes the vacuum interlayer, so that the pollution of oil stains to the vacuum interlayer can be effectively eliminated; when power is cut off accidentally, the front-stage vacuum safety valve can protect the vacuum cavity from being influenced by backflow. In order to operate the molecular pump group in a radiation environment, the adopted vacuum equipment uses a sensorless driving principle, so that a mechanical part and an electronic part of the equipment are separated, and the electronic equipment can be placed in a radiation shielding area 50 meters away from the vacuum equipment, so that the radiation damage of the electronic equipment is avoided, and the data acquisition and system control of a vacuum system are realized. The molecular pump set, the vacuum monitoring equipment, the vacuum gate valve, the vacuum pipeline and other equipment adopted by the invention can be suitable for a module radiation resistant environment or adopt shielding measures, and the radiation resistant measurement of all components is more than or equal to 1000Gy/a. The invention has the advantages of firm structure of each part, long service life, high reliability, excellent electromagnetic compatibility and radiation resistance, simple and convenient installation and matching and easy maintenance.
The above embodiments are merely preferred embodiments of the present invention, which are not intended to limit the scope of the present invention, and various changes may be made in the above embodiments of the present invention. All simple and equivalent changes and modifications made according to the claims and the content of the specification of the present application fall within the scope of the claims of the present patent application. The invention has not been described in detail in the conventional technical content.

Claims (10)

1. The high vacuum system for the low-temperature transmission line in the accelerator tunnel is characterized by comprising a low-temperature transmission line, a vacuum gate valve, a first monitoring device and a molecular pump set which are sequentially connected, wherein the low-temperature transmission line is connected with a second monitoring device through a manual angle valve, the vacuum gate valve, the first monitoring device, the molecular pump set and the second monitoring device are all connected with an electrical element used for controlling and acquiring data, and a shielding layer is arranged between the electrical element and the vacuum gate valve, the first monitoring device, the molecular pump set and the second monitoring device.
2. The high vacuum system for the cryogenic transfer line in an accelerator tunnel according to claim 1, wherein the cryogenic transfer line is provided with a safety valve and a gas charging valve.
3. The high vacuum system for the low temperature transmission line in the accelerator tunnel according to claim 1, wherein the low temperature transmission line comprises an outer tube, a cold shield and an inner tube which are arranged from outside to inside, the outer surface of the cold shield and the outer surface of the inner tube are wrapped with heat insulation multilayer materials, and vacuum interlayers are arranged between the outer tube and the cold shield and between the cold shield and the inner tube.
4. The high vacuum system for the cryogenic transfer line in the accelerator tunnel according to claim 1, wherein one end of the cryogenic transfer line is provided with a measurement interface, and the measurement interface is communicated with the manual angle valve; and a vacuumizing interface is arranged in the middle of the low-temperature transmission line and communicated with the vacuum gate valve.
5. The high vacuum system for the cryogenic transmission line in the accelerator tunnel according to claim 4, wherein an inflation port is provided adjacent to the evacuation port, the inflation port being in communication with a nitrogen source through the inflation valve.
6. The high vacuum system for the low temperature transmission line in the accelerator tunnel according to claim 1, wherein the molecular pump group adopts a split structure, and comprises a backing pump, a backing solenoid valve and a turbo molecular pump which are sequentially connected through a metal corrugated pipe.
7. The high vacuum system for a cryogenic transfer line in an accelerator tunnel of claim 6, wherein the first monitoring device and the second monitoring device each comprise a vacuum gauge controller for switching range, and a low vacuum gauge and a high vacuum gauge for monitoring pressure.
8. The high vacuum system for the low temperature transmission line in the accelerator tunnel according to claim 7, wherein the vacuum gate valve, the first monitoring device and the molecular pump set are connected by a vacuum pipeline, the vacuum pipeline includes an upper interface, a lower interface, a middle first interface and a middle second interface, the upper interface is connected with the vacuum gate valve, the lower interface is connected with the turbo molecular pump, and the middle first interface and the middle second interface are respectively connected with a low vacuum gauge and a high vacuum gauge in the first monitoring device.
9. The high vacuum system for the low temperature transmission line in the accelerator tunnel according to claim 8, wherein the vacuum pipe has an inner diameter of 100mm and a height of 100mm to 150mm.
10. The high vacuum system for the low temperature transmission line in the accelerator tunnel according to claim 6, wherein the electrical components comprise a remote IO module, a serial server and a switch connected with each other, the remote IO module is connected with the vacuum gate valve and the pre-stage solenoid valve, the serial server and the switch are connected with the first monitoring device, the second monitoring device and the molecular pump set, and the switch is connected with an input output controller and a vacuum PLC respectively.
CN202210847976.7A 2022-07-19 2022-07-19 High vacuum system for low-temperature transmission line in accelerator tunnel Pending CN115312363A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210847976.7A CN115312363A (en) 2022-07-19 2022-07-19 High vacuum system for low-temperature transmission line in accelerator tunnel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210847976.7A CN115312363A (en) 2022-07-19 2022-07-19 High vacuum system for low-temperature transmission line in accelerator tunnel

Publications (1)

Publication Number Publication Date
CN115312363A true CN115312363A (en) 2022-11-08

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Application Number Title Priority Date Filing Date
CN202210847976.7A Pending CN115312363A (en) 2022-07-19 2022-07-19 High vacuum system for low-temperature transmission line in accelerator tunnel

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