CN111283334A - Processing technology of composite heating body - Google Patents
Processing technology of composite heating body Download PDFInfo
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- CN111283334A CN111283334A CN202010191092.1A CN202010191092A CN111283334A CN 111283334 A CN111283334 A CN 111283334A CN 202010191092 A CN202010191092 A CN 202010191092A CN 111283334 A CN111283334 A CN 111283334A
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- heating body
- composite heating
- plc
- ultraviolet laser
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
- B23K26/402—Removing material taking account of the properties of the material involved involving non-metallic material, e.g. isolators
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
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- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Laser Beam Processing (AREA)
Abstract
The processing technology of the composite heating body is characterized by comprising the following steps of: firstly, a pyrolytic graphite deposition process is completed on the surface of pyrolytic boron nitride to obtain a composite heating body rough blank, and then the composite heating body rough blank is cut by cold laser cutting equipment to obtain a composite heating body finished product. According to the invention, after the pyrolytic graphite deposition process is completed on the surface of pyrolytic boron nitride, the cutting pattern is calculated according to the power and the resistance value of the composite heating element, and the cutting of pyrolytic graphite is ensured to be accurately and rapidly completed through one-step forming by ultraviolet laser processing, so that the later service life of the pyrolytic graphite heater and the power stability of the heater are ensured.
Description
Technical Field
The invention relates to the technical field of composite heating bodies, in particular to a processing technology of a composite heating body.
Background
The new material market is in the fast growth period, and heating device all can be used in the preparation process of a lot of new materials, and the market is also more and more to the demand of heater, and the requirement is also higher and higher, and traditional heating mode can not satisfy the demand, must seek a heating member that can rapid heating, the heating is even and the power consumption is few. In order to meet the high market demand, through continuous comparison and experiments of related research and development personnel, the pyrolytic boron nitride-pyrolytic graphite composite heater can be heated to thousands of degrees in tens of seconds, the heating uniformity is controlled within single digit, and the excellent performance of low energy consumption is achieved.
The lower non-defective rate of the composite heater is a tripping stone which influences the development of the composite heater industry, and currently, researchers are researching and solving the problem, for example, Chinese patent CN 108892541A discloses a preparation method of a cylindrical composite heater, which comprises the steps that the substrate of the cylindrical heater is a pyrolytic boron nitride substrate, and the surface of the pyrolytic boron nitride substrate is polished until the surface roughness of the substrate is Ra: 0.5-4.0 microns, and then coating a pyrolytic graphite coating with the thickness of 10-300 microns, wherein the difference between the thermal expansion coefficient of the pyrolytic graphite coating and the thermal expansion coefficient of the pyrolytic boron nitride matrix is less than or equal to 1.5 multiplied by 10 < -6 >/DEG C; processing patterns on the surface of the substrate coated with the pyrolytic graphite coating, filling the processed substrate into a CVD reaction furnace again, coating a pyrolytic boron nitride coating with the thickness of 10-300 mu m, and cooling to obtain the cylindrical composite heater.
The scheme is researched from a preparation method of the composite heater, so that the yield of the composite heater is improved.
In the actual production, a part of defects are caused by improper processing of the obtained composite material rough blank. Therefore, it is necessary to design a manufacturing process for manufacturing a composite heating body with a high yield so as to improve the yield of the composite heating body in terms of the manufacturing process.
Disclosure of Invention
In order to overcome the defects in the prior art, the invention aims to provide a processing technology of a composite heating body.
In order to achieve the above objects and other related objects, the present invention provides the following technical solutions: firstly, a pyrolytic graphite deposition process is completed on the surface of pyrolytic boron nitride to obtain a composite heating body rough blank, and then the composite heating body rough blank is cut by cold laser cutting equipment to obtain a composite heating body finished product.
The preferable technical scheme is as follows: the cold laser cutting equipment is ultraviolet laser cutting equipment, and in the cutting process, the corners of the composite heating body are in arc transition with the radius of R2.
The preferable technical scheme is as follows: the ultraviolet laser cutting equipment comprises an ultraviolet laser galvanometer system, an optical image computing system, a processing platform and a PLC (programmable logic controller), wherein the processing platform is mechanically connected with a motion system, and the PLC is in signal connection with the laser galvanometer system, the optical image computing system and the motion system; the optical image calculation system scans and calculates workpieces on the processing platform and sends positioning information and graphic planning information to the PLC, the PLC controls the processing platform to be positioned through the motion system according to the positioning information, the PLC controls the ultraviolet laser galvanometer system to emit ultraviolet laser onto the workpieces, and meanwhile, the PLC controls the processing platform to perform closed-loop motion through the motion system according to the graphic planning information to complete cutting.
The preferable technical scheme is as follows: the ultraviolet laser galvanometer system comprises an ultraviolet laser, a beam expanding device and a focusing device, the ultraviolet laser is connected with the PLC, the ultraviolet laser adopts an MOPA ultraviolet laser with an output pulse width not larger than 10ns, the beam expanding device adopts a beam expanding lens with a beam expanding multiple of 8-15 multiplying power, and the focusing device adopts a focusing lens.
The preferable technical scheme is as follows: the optical image calculation system comprises a CCD camera and a calculation device, the CCD camera is connected with the PLC, the CCD camera is used for scanning and positioning and sending positioning information to the PLC, the calculation device is connected with the PLC, and the calculation device is used for calculating a cutting track according to the power and the resistance value of the composite heating body and sending graphic information to the PLC.
The preferable technical scheme is as follows: the motion system includes base station, X axle moving platform, Y axle moving platform and rotating electrical machines, X axle moving platform pass through first linear guide set up in on the base station, Y axle moving platform pass through second linear guide set up in on the X axle moving platform, first linear guide with second linear guide mutually perpendicular, the rotating electrical machines set up in Y axle moving platform's center, processing platform set up in the rotating electrical machines top, first linear guide second linear guide and the rotating electrical machines with the PLC controller is connected.
The preferable technical scheme is as follows: and the first linear guide rail and the second linear guide rail are both provided with high-resolution grating rulers.
Due to the application of the technical scheme, compared with the prior art, the invention has the advantages that:
1. in the prior art, the composite heating body is processed by adopting a mechanical cutting mode, the invention has two advantages that the composite heating body is cut by adopting ultraviolet laser, one of the advantages is high processing precision, and the problem of cutter abrasion is avoided; and secondly, the processing effect is good, and the combination between the base material Pyrolytic Boron Nitride (PBN) and the Pyrolytic Graphite (PG) cannot be loosened, so that the quality hidden trouble is caused, and the service life is shortened.
2. In the cutting process, the arc transition with the radius of R2 is adopted at the corner of the heating body, so that the problem that the service life is reduced due to the generation of micro cracks caused by the formation of a broken corner in the carrying or mounting process is solved.
Drawings
FIG. 1 is a schematic diagram of the present invention.
FIG. 2 is a schematic structural diagram of an ultraviolet laser galvanometer system and an optical image computing system of the present invention.
Fig. 3 is a schematic structural diagram of the processing platform and the motion system of the present invention.
FIG. 4 is a schematic representation of a finished product made in accordance with the present invention.
In the above drawings, 1, an ultraviolet laser galvanometer system; 2. an optical image computing system; 3. a working platform; 4. a PLC controller; 5. a motion system; 6. an ultraviolet laser; 7. a beam expander; 8. a focusing mirror; 9. a CCD camera; 10. a computing device; 11. a base station; 12. an X-axis moving platform; 13. a Y-axis moving platform; 14. a first linear guide rail; 15. a second linear guide; 16. a rotating electric machine; 17. pyrolyzing boron nitride; 18. and (4) pyrolyzing graphite.
Detailed Description
The following description of the embodiments of the present invention is provided for illustrative purposes, and other advantages and effects of the present invention will become apparent to those skilled in the art from the present disclosure.
Please refer to fig. 1-4. It should be understood that in the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship which the product of the present invention is usually placed in when used, which is only for the convenience of describing the present invention and simplifying the description, but does not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and therefore, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance. The terms "horizontal", "vertical", "overhang" and the like do not imply that the components are required to be absolutely horizontal or overhang, but may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.
In the description of the present invention, it should be further noted that, unless otherwise specifically stated or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly and may include, for example, a fixed connection, a detachable connection, an integral connection, a mechanical connection, an electrical connection, a direct connection, an indirect connection via an intermediate medium, and a communication between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Example (b):
a processing technology of a composite heating body comprises the following steps:
(1) finishing a pyrolytic graphite deposition process on the surface of pyrolytic boron nitride to obtain a composite heating body rough blank;
(2) calculating a graph according to the power and the resistance value of the composite heating body;
(3) cutting the composite heating body rough blank by using ultraviolet laser cutting equipment;
(4) and obtaining a finished product of the composite heating body.
It should be noted that:
in the cutting process, the corners of the composite heating body are in arc transition with the radius of R2, so that corner collapse and micro cracks are avoided in the transportation and assembly processes.
As shown in fig. 1, the ultraviolet laser cutting device comprises an ultraviolet laser galvanometer system 1, an optical image computing system 2, a processing platform 3 and a PLC controller 4, wherein the processing platform 3 is mechanically connected with a motion system 5. The PLC 4 is in signal connection with the laser galvanometer system 1, the optical image computing system 2 and the motion system 5.
Firstly, an optical image computing system 1 carries out scanning computation on a workpiece and sends positioning information and graphic planning information to a PLC (programmable logic controller) 4; then, the PLC 4 controls the motion system 5 to position the processing platform 3 according to the positioning information; and then, the PLC 4 controls the ultraviolet laser galvanometer system 1 to emit ultraviolet laser to the workpiece, and meanwhile, the PLC 4 controls the motion system 5 according to the graph planning information so as to control the processing platform 3 to perform closed-loop motion and finish cutting.
As shown in fig. 2, an ultraviolet laser galvanometer system 1 and an optical image calculation system 2. The ultraviolet laser galvanometer system 1 comprises an ultraviolet laser 6, a beam expander 7 and a focusing mirror 8, the ultraviolet laser 6 is connected with the PLC 4, the ultraviolet laser 6 adopts an MOPA ultraviolet laser with the output pulse width not more than 10ns, and the beam expansion multiple multiplying power of the beam expander 7 is 8-15. Light beams emitted by the ultraviolet laser 6 control the energy distribution of the focused light spots through the beam expander 7, and then are focused on the surface of the processing platform 3 through the focusing lens 8.
The optical image calculation system 2 includes a CCD camera 9 and a calculation device 10. The CCD camera 9 and the calculating device 10 are connected with the PLC 4, the CCD camera 9 is used for scanning a workpiece to be positioned and sending positioning information to the PLC 4, and the calculating device 10 is used for calculating a cutting track according to the power and the resistance value of the composite heating body and sending graphic information to the PLC 4.
As shown in fig. 3, the platform 3 is processed. Comprises a base 11, an X-axis moving platform 12, a Y-axis moving platform 13 and a rotating motor 16. The X-axis moving platform 12 is arranged on the base platform 11 through a first linear guide rail 14, the Y-axis moving platform 13 is arranged on the X-axis moving platform 12 through a second linear guide rail 15, the rotating motor 16 is arranged at the center of the Y-axis moving platform 13, and the machining platform 3 is arranged above the rotating motor 16.
The first linear guide rail 14 and the second linear guide rail 15 are perpendicular to each other and are provided with a high-resolution grating scale (not shown in the figure) as feedback control. The first linear guide 14, the second linear guide 15, and the rotary electric machine 16 are connected to the PLC controller 4.
As shown in fig. 4, the composite heating body is a finished product. The composite material comprises pyrolytic boron nitride 17 and pyrolytic graphite 18, and the finished product adopts circular arc transition with the radius of R2 at the corner.
It can be shown that the invention makes it possible to cut composite heating bodies. Scanning a workpiece in the optical image computing system 2 through a CCD camera 9, computing the track of a cutting graph through a computing device 10, and then sending positioning information and graph information to the PLC 4; the PLC 4 firstly controls the motion system 5 to position the processing platform 3 according to the obtained information, then controls an ultraviolet laser 6 in the ultraviolet laser galvanometer system 1 to emit ultraviolet laser, controls the energy distribution of focused light spots through a beam expander 7, and focuses on a workpiece on the processing platform 3 through a focusing lens 8; and finally, the PLC 4 controls the motion system 5 according to the graphic information, so that the processing platform 3 performs closed-loop motion to finish cutting.
After the deposition process of pyrolytic graphite 18 is finished on the surface of Pyrolytic Boron Nitride (PBN) 17, the composite heating element is processed and formed in one step by ultraviolet laser according to a graph calculated by the power and the resistance value of the composite heating element.
The pyrolytic graphite 18 on the surface of the composite heating body is only 0.2MM, the material of the pyrolytic graphite 18 is brittle and thin, and the Pyrolytic Boron Nitride (PBN) substrate cannot be damaged, so that in the processing process: 1. the ultraviolet laser is adopted, and is a cold laser, so that the PBN base material is not damaged in the processing process. 2. At the corner, an R2 arc transition is adopted.
Above, guaranteed accurate quick completion pyrolytic graphite's cutting, guaranteed pyrolytic graphite heater's later stage life and heater's power stability.
Therefore, the invention has the following advantages:
1. the invention has two advantages by adopting ultraviolet laser cutting, one of which has high processing precision and does not have the problem of cutter abrasion; and secondly, the processing effect is good, and the combination between the base material Pyrolytic Boron Nitride (PBN) and the pyrolytic graphite cannot be loosened, so that potential quality hazards are caused, and the service life is shortened.
2. In the cutting process, the arc transition with the radius of R2 is adopted at the corner of the heating body, so that the problem that the service life is reduced due to the generation of micro cracks caused by the formation of a broken corner in the carrying or mounting process is solved.
The foregoing embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.
Claims (7)
1. The processing technology of the composite heating body is characterized by comprising the following steps of: firstly, a pyrolytic graphite deposition process is completed on the surface of pyrolytic boron nitride to obtain a composite heating body rough blank, and then the composite heating body rough blank is cut by cold laser cutting equipment to obtain a composite heating body finished product.
2. The process for processing a composite heating body according to claim 1, wherein: the cold laser cutting equipment is ultraviolet laser cutting equipment, and in the cutting process, the corners of the composite heating body are in arc transition with the radius of R2.
3. The process for processing a composite heating body according to claim 2, characterized in that: the ultraviolet laser cutting equipment comprises an ultraviolet laser galvanometer system, an optical image computing system, a processing platform and a PLC (programmable logic controller), wherein the processing platform is mechanically connected with a motion system, and the PLC is in signal connection with the laser galvanometer system, the optical image computing system and the motion system; the optical image calculation system scans and calculates workpieces on the processing platform and sends positioning information and graphic planning information to the PLC, the PLC controls the processing platform to be positioned through the motion system according to the positioning information, the PLC controls the ultraviolet laser galvanometer system to emit ultraviolet laser onto the workpieces, and meanwhile, the PLC controls the processing platform to perform closed-loop motion through the motion system according to the graphic planning information to complete cutting.
4. The process for processing a composite heating body according to claim 3, wherein: the ultraviolet laser galvanometer system comprises an ultraviolet laser, a beam expanding device and a focusing device, the ultraviolet laser is connected with the PLC, the ultraviolet laser adopts an MOPA ultraviolet laser with an output pulse width not larger than 10ns, the beam expanding device adopts a beam expanding lens with a beam expanding multiple of 8-15 multiplying power, and the focusing device adopts a focusing lens.
5. The process for processing a composite heating body according to claim 3, wherein: the optical image calculation system comprises a CCD camera and a calculation device, the CCD camera is connected with the PLC, the CCD camera is used for scanning and positioning and sending positioning information to the PLC, the calculation device is connected with the PLC, and the calculation device is used for calculating a cutting track according to the power and the resistance value of the composite heating body and sending graphic information to the PLC.
6. The process for processing a composite heating body according to claim 3, wherein: the motion system includes base station, X axle moving platform, Y axle moving platform and rotating electrical machines, X axle moving platform pass through first linear guide set up in on the base station, Y axle moving platform pass through second linear guide set up in on the X axle moving platform, first linear guide with second linear guide mutually perpendicular, the rotating electrical machines set up in Y axle moving platform's center, processing platform set up in the rotating electrical machines top, first linear guide second linear guide and the rotating electrical machines with the PLC controller is connected.
7. The process for processing a composite heating body according to claim 6, wherein: and the first linear guide rail and the second linear guide rail are both provided with high-resolution grating rulers.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010191092.1A CN111283334A (en) | 2020-03-18 | 2020-03-18 | Processing technology of composite heating body |
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| CN202010191092.1A CN111283334A (en) | 2020-03-18 | 2020-03-18 | Processing technology of composite heating body |
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Citations (9)
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|---|---|---|---|---|
| JPH06129778A (en) * | 1992-10-15 | 1994-05-13 | Toray Ind Inc | Heating furnace |
| CN101045990A (en) * | 2006-02-09 | 2007-10-03 | 通用电气公司 | Etch resistant heater and assembly thereof |
| US20080173638A1 (en) * | 2007-01-21 | 2008-07-24 | John Thomas Mariner | Encapsulated graphite heater and process |
| CN101318264A (en) * | 2008-07-07 | 2008-12-10 | 苏州德龙激光有限公司 | Design method for ultraviolet laser machining apparatus for cutting wafer |
| US20120074094A1 (en) * | 2010-09-24 | 2012-03-29 | Kuang Hong Precision Co., Ltd. | Manufacturing Method for Forming Circuit Structure on Non-Conductive Carrier |
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| CN106807606A (en) * | 2017-01-21 | 2017-06-09 | 上海大学 | A kind of graphene composite film and preparation method thereof |
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-
2020
- 2020-03-18 CN CN202010191092.1A patent/CN111283334A/en active Pending
Patent Citations (9)
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|---|---|---|---|---|
| JPH06129778A (en) * | 1992-10-15 | 1994-05-13 | Toray Ind Inc | Heating furnace |
| CN101045990A (en) * | 2006-02-09 | 2007-10-03 | 通用电气公司 | Etch resistant heater and assembly thereof |
| US20080173638A1 (en) * | 2007-01-21 | 2008-07-24 | John Thomas Mariner | Encapsulated graphite heater and process |
| CN101318264A (en) * | 2008-07-07 | 2008-12-10 | 苏州德龙激光有限公司 | Design method for ultraviolet laser machining apparatus for cutting wafer |
| US20120074094A1 (en) * | 2010-09-24 | 2012-03-29 | Kuang Hong Precision Co., Ltd. | Manufacturing Method for Forming Circuit Structure on Non-Conductive Carrier |
| CN102843791A (en) * | 2011-06-15 | 2012-12-26 | 信越化学工业株式会社 | Ceramic heater |
| CN106807606A (en) * | 2017-01-21 | 2017-06-09 | 上海大学 | A kind of graphene composite film and preparation method thereof |
| CN108863443A (en) * | 2018-07-10 | 2018-11-23 | 山东国晶新材料有限公司 | A kind of preparation method of Planar Compound heater |
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| Title |
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Application publication date: 20200616 |